201230230 六、發明說明： 【發明所屬戈^技術領域】 發明領域 本發明係有關於一種例如檢查.處理平面顯示器用之 玻璃基板、半導體基板或印刷基板等的檢查裝置及基板之 定位方法。 L先前^^标迴 發明背景 近年來，於玻璃基板、半導體基板或印刷基板（以下稱 作基板)#之製造巾’會有it行基板之檢查#之處理的檢查 4置檢查裝置包含有.處理部，係進行基板之檢查處理 者；及搬送部，係將基板自外部朝處理部搬送或將基板 自處理部朝外部搬送者。 搬送#包含有：滾筒，係支持基板，且可沿著搬送方 向旋轉者’及⑽塾，係吸附基板，且可朝搬送方向移動 者。搬送料使吸轉持有業已保胁賴之基板的吸附 墊移動’ H此，進行基板之搬送。 、不過，在自外軸人基板時，崎部會進行位置調整， 以使基板配置在搬送部之基板載置位置。於該位置調整 中’舉例言之，係自四方夾入基板而使基板移 基板載置位置，朗行基板之定位。 、前述定位方法係揭示有以下方法，即：藉由可環繞與 搬达方向呈正交之轴旋轉，同時朝與搬送方向呈正交之水 平面方向往復動作之滾筒，使滾筒往復動作而改變滾筒中 201230230 的基板保持位置，並調整基板之載置位置者(例如參照專利 文獻卜專利文獻2)。於該定位方法中，可藉由滾筒之旋轉， 使基板朝搬送方向移動，並變更基板之載置位置。 先行技術文獻 專利文獻 [專利文獻1]日本實用新案公開公報實開平M02129號 公報 [專利文獻2]日本專利公開公報特開2009-13061號公報 I：發明内容3 發明概要 發明欲解決之課題 然而，專利文獻1、專利文獻2所揭示之定位方法係使 滾筒朝與搬送方向垂直之方向移動，藉此，與基板間會產 生摩擦力，並有基板與滾筒之接觸面損傷之虞。又，於專 利文獻1、專利文獻2所揭示之定位方法中，必須對滚筒設 置驅動部，且會有裝置構造變得複雜之問題。 本發明係有鑑於前述而完成，目的在提供一種可藉由 簡易之構造防止基板之損傷而進行搬送的檢查裝置及基板 之定位方法。 用以欲解決課題之手段 為了解決前述課題並達成目的，有關本發明之檢查裝 置包含有：搬送台，係具有支持基板並沿著搬送該基板之 搬送方向旋轉之滾筒者；驅動機構，係沿著前述搬送方向 使前述基板移動者；整列構件驅動部，係保持整列構件， 201230230 並使^列構件朝前述搬送方向移動，而 置於前述搬送台之前述基板搬人側之端部側，並 述基板者；端面檢測部’係'檢測前述基板與前述搬送方向 =方向之端面者’·檢查部，係根據前述端面檢測部所 檢測如面資訊，進行歧基板之檢㈣；絲準構件驅 動部’係、㈣鲜構件，並料‘鱗構件，而該基 準構件係設置於前述檢查部與前述整列構件驅動部間= 抵接於前述基板者。 為了解決前述課題並達成目的，有關本發明之檢查裝 置之基板之定位方法係具有檢查部及搬送部之檢查裳置之 基板之^位方法，且該檢查部係進行基板之檢查該搬送 部係載置前述基板而搬送該基板者，又，包含有：搬入步 驟，係將前述基板搬入搬送台，且該搬送台係具有沿著搬 送前述基板之搬送方向旋轉之滾筒者；整列構件驅動步 驟’係驅動整列構件，且該整列構件係設置於前述搬送台 之前述基板搬入側之端部側，並抵接於前述基板者；基板 固定步驟，係藉由基準構件與前述整列構件夹持前述基板 並固定，且該基準構件係設置於前述檢查部與前述整列構 件驅動部間，並抵接於前述基板者；及端面檢測步驟，係 檢測業已藉由前述基板固定步驟固定的前述基板與前述搬 送方向平行之方向之端面者。 發明效果 有關本發明之檢查裝置係作成沿著無動力滾筒之旋轉 方向使基板移動而固定載置位置’且與無動力滾筒之旋轉 201230230 方向呈正交之方向係藉由感測器進行端面檢測，藉此，確 認基板之位置，因此，具有可藉由簡易之構造防止基板之 損傷而進行搬送之效果。 圖式簡單說明 第1圖係以模式顯示有關本發明之實施形態的平面顯 示器（FPD)檢查裝置之構造俯視圖。 第2圖係以模式顯示有關本發明之實施形態的F P D檢 查裝置之構造側視圖。 第3圖係以模式顯示有關本發明之實施形態的整列銷 驅動部之立體圖。 第4圖係以模式顯示有關本發明之實施形態的整列銷 驅動部之立體圖。 第5圖係以模式顯示有關本發明之實施形態的基準銷 驅動部之立體圖。 第6圖係顯示有關本發明之實施形態的基板檢查處理 之一連串流程之流程圖。 第7圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之基板搬入之俯視圖。 第8圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之基板搬入之側視圖。 第9圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之基板搬入之側視圖。 第10圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之定位處理之側視圖。 201230230 第11圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之定位處理之側視圖。 t實施冷式】 用以實施發明之形態 以下’與圖式一同地詳細說明用以實施本發明之形 態。另’本發明並不受限於以下實施形態。又，於以下說 明中參照的各圖只不過是在可理解本發明内容之程度下概 略地顯示形狀、大小及位置關係。即’本發明並不僅限於 各圖中所例示的形狀、大小及位置關係。 首先，參照圖式，詳細地說明有關本發明之實施形態 的檢查裝置。另，於以下說明中，列舉基板之檢查裝置為 例來說明。另，有關本實施形態之檢查裝置係作成離線型 者來說明’然而，亦可為聯機型。 第1圖係以模式顯示有關本實施形態之平面顯示器 (FPD)檢查裝置1之概略構造俯視圖。第2圖係以模式顯示有 關本實施形態之FPD檢查裝置1之構造側視圖。如第1圖所 示，FPD檢查裝置1包含有：基板處理部2，係檢測所搬送 構成矩形之基板W之缺陷者；及控制部3，係進行基板處理 部2全體之控制者。又，基板處理部2包含有：搬送台12、 2〇、21，係搬送基板w者；及高架台1〇，係保持檢查單元 ιοο(檢查部），且該檢查單元1〇〇係設置於搬送台12上並檢 測移動之基板W之缺陷者。 两架台10及搬送台12、20、21係固定在例如像是第2圖 所开、之架台11。架台11係藉由例如組合有塊狀之大理石或 201230230 鋼材的框架等耐震性高之構件所構成。除此之外，於架台 11與設置面（例如地面）間設置有例如藉由彈簧或油壓減震 器等所構成的振動吸收機構13。藉此，可進一步地防止搬 送台12、20、21及高架台1〇之振動。 搬送台12、20、21係具有例如作為搬送輔助機構之複 數板狀構件在與基板W之搬送方向D垂直之方向組合成竹 簾狀之結構。藉由將該搬送台12、2〇、21沿著搬送方向D 排列，形成基板w之搬送路徑。於各搬送台12、2〇、2丨之 板狀構件上分別設置有無動力滾筒121、2〇1、211，且該無 動力滾筒12卜20^2^係以上面保持基板w，並可朝搬送 方向D旋轉。又，於搬送台2〇之寬度方向中央設置有驅動機 構30,且該驅動機構3〇係朝搬送方向D驅動，並吸附基板w 而進行搬送。另，無動力滾筒121、2(H、211宜如拉格朗奇 點般，以不會產生基板W之撓曲振動之間隔來配置。 搬送台20包含有：整列銷驅動部2()2，係使整列銷2〇2a 朝搬送方向D移動，且該整列銷2 Q 2 a係整列#已載置於搬送 台20之基板W者；基準銷驅動部2〇3 ’係將構成定位位置之 基準的基㈣咖減域理部2之上下方_動者；及端 面檢測。卩204 ’係具有端面檢測感測器2〇4a，且該端面檢測 感測器2G4a係檢測基板w與搬送方向D平行側之端面者。 第3、4圖係以模式顯示整列銷驅動部2〇2之立體圖。如 第3 4圖所示’整列銷驅動部2〇2包含有：整列銷2伽，係 抵接於基板W之端面者，及進退部2Q2b，係可朝與搬送方 向D平行之方向進退，並使整列銷202a與搬送方向D平行地 201230230 移動者。另，推 驅動将你 "^糊⑽藉由控制部3之控制來驅動。該 駆動:使用氣壓虹或電動馬達等。 "亥 為略tf2()2a係使用顺(聚闕酮)材等之樹脂而形成 主狀，且可環繞如第3圖所示之圓柱之 軸χ(與搬送方门之中心 、方向D呈正交）旋轉。藉此，即使在基板w與整 :2〇2:抵接之端面相對於整列鎖202a之移動方向而傾斜 時亦可減輕施加於基板W與整列銷202a間之摩摔力， 抑制基板％之損傷。 + 亚 第5圖係以模式顯示基準銷驅動部2〇3之立體圖。如第5 圖所不’基準銷驅動部203包含有：基準銷2G3a，係與基板 W抵接’並構成基板W之定位位置之基準者；及升降部 203b，係可朝與搬送方向D垂直之方向升降並使基準銷 203a朝與搬送方向〇垂直之方向升降驅動者。另，升降部 203b係藉由控制部3之控制來驅動。該驅動係使用氣壓缸或 電動馬達等。 基準銷203a係由PEEK(聚醚醚酮)材等之樹脂所構成。 基準銷203a係構成至少與基板w抵接之領域朝搬送方向D 之前方傾斜之錐形形狀。藉此，當基板％搬送至搬送台2〇 時，特別是自搬送台20之上方接收基板W時，即使基板w 之位置偏離，亦可更確實地避免基板接收時基板贾與基準 銷203a之接觸。再者，可縮小抵接於基板w時之接觸面積。 另，亦可將錐形形狀形成於比抵接於基板W之領域更上 方，只要可規定與基板W之抵接位置，則亦可使用朝檢查 單元100側傾斜之棒狀構件作為基準銷。又，亦可環繞如第 201230230 3圖所示之長向之中心軸X(與搬送方向D呈正交）旋轉。 如第卜2圖所示，整列銷202&之配置只要是可央持基 準銷脈關定基板W之位置即可。較為理想的是整列鎖 202a係相對於搬送台觀寬度方“配置纽位於最外緣 側之基準銷203a更内側。又， 雖然說明整列銷及基準銷分 別為2個之情形，然而，只要是前述配置，則亦可分別配置 1個或複數個》 驅動機構30包含有：驅動部32，係於與搬送方向d之水 平方向平行之搬送⑽上移動者；切構件33，係、支持於 驅動部32者；及吸附墊34，係支持於支持構件33，並藉由 利用未圖示之果來進行的吸氣，吸附基板W。驅動機構 3〇係藉由町來實現，卩卩：使崎性馬達導件作為搬送軸 31，同時使用線性馬達作為驅動部32者。 另，驅動機構30係設置於搬送台之寬度方向中央，藉 此’可保持包含S已搬人搬送台2Q的基板w之重心位置之 領域’且可進行安定之絲搬送。又，只要可進行搬送而 不會損傷基板W，則驅動機構3〇之配設位置可為任何位 置。再者，基板w之保持亦可不是吸附，而是把持基板w 之端部而進行搬送之構造。 檢查單元100係具有未圖示之拍攝部，且該拍攝部係透 過顯微鏡101 ’拍攝業已設定在搬送台12所形成的搬送路徑 上並通過與搬送台12之寬度方向平行之檢查線L1的基板 W。藉由解析利用該檢查單元100所取得之影像，可檢測基 板W是否存在有缺陷。另，檢查單元1〇〇可沿著檢查線以移 10 201230230 動。於本說明中，將設置檢查單元100之領域稱作檢查空間 PR1。又，將除了檢查空間pR1以外之領域稱作搬送空間 TR1、TR2 〇 另，舉例言之，檢查單元100亦可置換成以下於預定位 置施订處理之其他處理單元，即：對基板w之缺陷部分進 行的雷射_純或塗布修正等之純單元；進行觀察. 影像保存之拍攝單元；進行配線等之尺寸測定、膜厚測定、 色測定等之測定單it等。即，處理單⑽包括檢查單元、 修復單兀、拍攝單元、曝光單元、測定單元等。又，有關 本發明之檢查裝置亦包含前述處理單元於載置基板w之台 上對基板w進行各處理之構造。 又’右FPD檢查裝置1具有包圍檢查空間PR1及搬送空 間TR1 ' TR2之外裝’則可形成内部空間（無塵室），因此較 為理想。除了基板W之搬入口與搬出口及下部之導管外， 該無塵室絲閉m外裝係於檢查單元·之上方具有將 潔淨之空氣（以下稱作潔淨空氣）送入内部空間之FFU。 舉例8之，FFU係送出業已除去粒子等之灰塵的潔淨 空氣。其結I ’特別是將檢查單元1〇〇附近及檢查線u周邊 (檢查空間PR1)作成灰塵少之潔淨狀態。又，集中在檢查單 7C 100附近及檢查線L1周邊而送出的潔淨空氣係於無塵室 内形成降流後，自排氣口排氣。 第6圖係顯示有關本實施形態之基板檢查處理之一連 串流程之流程圖。第7圖係以模式顯示有關本實施形態之基 板檢查處理中之基板搬人之俯視圖。第8、9圖係以模式顯 201230230 示有關本實施形態之基板檢查處理中之基板搬入之側視 圖°第10、11圖係以模式顯示有關本實施形態之基板檢查 處理中之定位處理之側視圖。首先，自外部將基板W搬入 FPD檢查裝置1(步驟S102)。基板W之搬入係如第7、8圖所 不’將業已保持於搬送機器人40之臂部40a的基板W搬入搬 送台20 °當保持有基板W之臂部40a進到搬送台20上後，搬 送機器人40會下降。此時，臂部4〇a係進入搬送台2〇之板狀 構件間。然後，藉由使臂部40a下降，如第9圖所示，基板 W係保持於無動力滾筒201。當基板W支持於無動力滾筒 2〇1後’搬送機器人4〇係自搬送台2〇(FpD檢查裝置丨)脫離。 於搬送台20接收基板W後，進行基板W之定位處理。 首先，如第8圖所示，驅動基準銷驅動部2〇3而使基準銷2〇3a 上升(步驟S104)。然後，驅動整列銷驅動部202而使整列銷 202a移動（步驟s丨06)。如第丨〇圖所示，整列銷2〇2&係沿著第 1、2圖所示之搬送方向D移動而抵接於基板w，並使基板w 朝搬送方向D移動。若藉由整列銷202a之移動使基板W移 動，則基板W係抵接於基準銷2〇3a(第η圖）。基板w係於一 方向中夾持於整列銷202a及基準銷203a，並構成固定狀 態。於該狀態下，決定基板W之載置位置。 右決定基板w之載置位置，則端面檢測部2〇4係藉由端 面檢測感測器204a，檢測基板W與整列銷2〇2&及基準銷2〇3a 之夾持方向呈正交之方向的其中—邊之端面（步驟sl〇8)。端 面檢測部204係根據端面檢測感測器2〇4a所檢測的資訊，生 成於搬送台20之基板W與搬送方向D平行之端面之位置資 12 201230230 端面檢卿2G4係於生纽置資訊後，將位置資訊輸出 至控制部3(步驟SU〇)。另’位置資訊係例如來自端面檢測 感’則器204a之距離資訊，且控制部3係根據所取得之距離資 汛進行基板W之位置補正。又，亦可構成位置資訊係座 ‘資Λ且控制部3係根據所取得之座標資訊，進行基板w 之座標補正。 在利用端面檢測部2 〇 4之位置資訊之輸出後，驅動機構 3〇係使基板W吸附保持於吸附墊34(步驟SU2)。然後，整列 銷驅動部202係使整列銷2〇2a朝與搬送方向D相反之方向移 動，並自基板w解除整列銷202a(步驟S114卜又，基準銷驅 動部203係使基㈣2G3aT降至至少基準銷職之上端部 低於無動力滾筒201之上端部之位置（步驟SU6卜另，整列 銷2〇2a之解除動作及基準銷203a之下降動作亦可順序相 反，且亦可同時地進行。 在整列銷202a之解除及基準銷2〇33之下降後，驅動機 構30係驅動驅動部32而使吸附墊34移動，並使基板w移動 至搬送台12側（步驟si 18)。檢查單元1〇〇係透過顯微鏡1〇1， 拍攝通過檢查線L1之基板w ,並進行所取得之影像之解析 (檢查處理)(步驟S120)。 在所搬送的基板W之檢查處理結束後，若有下一個檢 查對象之基板W時(步驟S122 : Yes)，則控制部3係轉移至步 驟S102而進行下一個基板贾之基板檢查處理。又，若無下 一個檢查對象之基板评時(步驟S122 : N〇)，則控制部3係結 束基板檢查處理。 13 201230230 如刚述實施形態，由於作成沿著無動力滾筒之旋轉方 向使基板移動而固定载置位置，且與旋轉方向呈正交之方 向係藉由感測器進行端面檢測，藉此，確認基板之位置， 因此’可藉由簡易之構造’防止基板之損傷而進行搬送。 特別是隨著近年來基板之大型化，基板對滚筒施加的自重 k大且谷易產生損傷’因此藉由僅—方向之移動及位 置確認，具有能有效地防止搬送時基板之損傷之效果。 另，於本實施形態中，作成離線型之FPD檢查裝置來 說明’然而’亦可適用於聯機型之FPD檢查裝置。於聯機 型之情形時，由於基板係自與搬^料同讀查單元1〇〇 側之側連結的搬送台搬送，因此，宜加人使整列銷2斷 降或自搬送台20之上面退避之構造。 附墊置換成整列銷及基準銷驅動部 銷夾持基板而固定載置位置，同時 維持夾持狀態並搬送基板。 又’於彻吸附塾之基板之搬送中，亦可作成將各吸 骚動部，且藉由整列銷及基準 ，同時藉由驅動部32之觝叙， :¾ >亦=τ'上人……·.，· 一The present invention relates to an inspection apparatus and a substrate positioning method for, for example, inspection, processing of a glass substrate, a semiconductor substrate, or a printed substrate for a flat panel display. In the recent years, in the glass substrate, the semiconductor substrate or the printed substrate (hereinafter referred to as the substrate) # manufacturing towel 'there is a check of the inspection of the substrate 4 inspection 4 inspection device includes. The processing unit performs a substrate inspection process; and the transfer unit transports the substrate from the outside to the processing unit or the substrate from the processing unit to the outside. The transport # includes a drum, a support substrate, and a person who can rotate along the conveyance direction and (10), which are capable of moving the substrate and moving in the conveyance direction. The transfer material moves the adsorption pad of the substrate that has been held by the suction holding unit, and the substrate is transferred. However, in the case of the outer shaft substrate, the position of the sagittal portion is adjusted so that the substrate is placed at the substrate mounting position of the transport unit. In this position adjustment, for example, the substrate is sandwiched from the square to move the substrate to the substrate mounting position, and the substrate is positioned. The positioning method described above discloses that the drum is reciprocated to change the drum by rotating the drum orthogonal to the direction of movement and reciprocating toward the horizontal direction orthogonal to the conveying direction. In the case where the substrate holding position of 201230230 is held, and the placement position of the substrate is adjusted (for example, refer to Patent Document 2). In the positioning method, the substrate can be moved in the transport direction by the rotation of the drum, and the placement position of the substrate can be changed. [Patent Document 1] Japanese Laid-Open Patent Publication No. H02129 (Patent Document 2) Japanese Laid-Open Patent Publication No. 2009-13061 A SUMMARY OF INVENTION Technical Problem However, In the positioning method disclosed in Patent Document 1 and Patent Document 2, the roller is moved in a direction perpendicular to the conveying direction, whereby a frictional force is generated between the substrate and the substrate, and the contact surface between the substrate and the roller is damaged. Further, in the positioning method disclosed in Patent Document 1 and Patent Document 2, it is necessary to provide a driving portion to the drum, and there is a problem that the device structure is complicated. The present invention has been made in view of the above, and it is an object of the invention to provide an inspection apparatus and a method of positioning a substrate which can be transported by preventing damage to a substrate by a simple structure. Means for Solving the Problem In order to solve the above problems and achieve the object, the inspection apparatus according to the present invention includes: a transfer table having a support substrate and rotating along a conveyance direction in which the substrate is conveyed; and a drive mechanism The transporting direction moves the substrate; the aligning member driving unit holds the aligning member, and 201230230 moves the aligning member in the transporting direction, and is placed on the end side of the substrate carrying side of the transporting table, and The end surface detecting unit 'detects the end surface of the substrate and the transport direction=direction', and the inspection unit performs the inspection of the substrate based on the surface information detected by the end surface detecting unit (4); The 'fourth and the fourth (four) fresh members are combined with the 'scale member', and the reference member is provided between the inspection portion and the entire column member driving portion = abutting against the substrate. In order to solve the above problems and achieve the object, the method for positioning a substrate of an inspection apparatus according to the present invention includes a method of inspecting a substrate of an inspection unit and a conveyance unit, and the inspection unit performs inspection of the substrate. When the substrate is placed on the substrate and the substrate is transferred, the loading step includes loading the substrate into the transfer table, and the transfer table has a roller that rotates in a transport direction in which the substrate is transported; Driving the entire row of members, the row of members being disposed on the end of the substrate carrying side of the transfer table and abutting against the substrate; and in the substrate fixing step, the substrate is sandwiched by the reference member and the aligned member And the reference member is disposed between the inspection unit and the alignment member driving unit and abuts against the substrate; and the end surface detecting step detects the substrate and the transport that have been fixed by the substrate fixing step The end face in the direction parallel to the direction. Advantageous Effects of Invention The inspection apparatus according to the present invention is configured such that the substrate is moved in the direction of rotation of the unpowered drum to fix the mounting position 'and is orthogonal to the direction of rotation of the unpowered drum 201230230. End detection by the sensor Thereby, since the position of the substrate is confirmed, it is possible to carry out the conveyance by preventing damage of the substrate by a simple structure. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing the structure of a flat display (FPD) inspection apparatus according to an embodiment of the present invention in a mode. Fig. 2 is a side view showing the configuration of an F P D inspection apparatus according to an embodiment of the present invention in a mode. Fig. 3 is a perspective view showing, in a mode, a row of pin driving portions according to an embodiment of the present invention. Fig. 4 is a perspective view showing, in a mode, a row of pin driving portions according to an embodiment of the present invention. Fig. 5 is a perspective view showing a reference pin driving portion according to an embodiment of the present invention in a mode. Fig. 6 is a flow chart showing a series of processes for substrate inspection processing according to an embodiment of the present invention. Fig. 7 is a plan view showing the substrate loading in the substrate inspection process according to the embodiment of the present invention. Fig. 8 is a side view showing the substrate loading in the substrate inspection process according to the embodiment of the present invention. Fig. 9 is a side view showing the substrate loading in the substrate inspection process according to the embodiment of the present invention. Fig. 10 is a side view showing, in a mode, a positioning process in a substrate inspection process according to an embodiment of the present invention. 201230230 Fig. 11 is a side view showing a positioning process in a substrate inspection process according to an embodiment of the present invention in a mode. t 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施Further, the present invention is not limited to the following embodiments. Further, the drawings referred to in the following description are merely illustrative of the shape, size, and positional relationship to the extent that the present invention can be understood. That is, the present invention is not limited to the shapes, sizes, and positional relationships illustrated in the respective drawings. First, an inspection apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. In the following description, an inspection apparatus for a substrate will be described as an example. Further, the inspection apparatus according to the present embodiment is described as being of an off-line type. However, it may be an on-line type. Fig. 1 is a plan view showing a schematic configuration of a flat panel display (FPD) inspection apparatus 1 according to the present embodiment. Fig. 2 is a side view showing the structure of the FPD inspection apparatus 1 of the present embodiment in a mode. As shown in Fig. 1, the FPD inspection apparatus 1 includes a substrate processing unit 2 that detects defects in which the substrate W that constitutes a rectangle is conveyed, and a control unit 3 that controls the entire substrate processing unit 2. Further, the substrate processing unit 2 includes: a transfer table 12, 2, 21, and a transfer substrate w; and an overhead table 1A, which holds an inspection unit ιοο (inspection unit), and the inspection unit 1 is provided in The substrate 12 is transported and the defective substrate W is detected. The two stages 10 and the transfer stages 12, 20, 21 are fixed to, for example, the stand 11 as shown in Fig. 2. The gantry 11 is composed of a member having high shock resistance such as a frame in which a block of marble or a 201230230 steel material is combined. In addition to this, a vibration absorbing mechanism 13 composed of, for example, a spring or a hydraulic damper is provided between the gantry 11 and the installation surface (e.g., the ground). Thereby, the vibration of the transport stages 12, 20, 21 and the overhead stage 1 can be further prevented. Each of the transfer tables 12, 20, and 21 has a structure in which a plurality of plate-like members as a transfer assisting mechanism are combined in a bamboo curtain shape in a direction perpendicular to the transport direction D of the substrate W. The conveyance paths of the substrate w are formed by arranging the conveyance stages 12, 2, and 21 in the conveyance direction D. The power-less rollers 121, 2〇1, and 211 are respectively disposed on the plate-like members of each of the transfer tables 12, 2, and 2, and the unpowered roller 12 is held by the substrate w and can be The conveying direction D is rotated. Further, the drive mechanism 30 is provided at the center in the width direction of the transfer table 2, and the drive mechanism 3 is driven in the transport direction D, and the substrate w is sucked and transported. Further, the unpowered rollers 121 and 2 (H and 211 are preferably disposed at intervals of the flexural vibration of the substrate W as in the case of the Lagrange point. The transfer table 20 includes the entire row of pin driving portions 2 () 2 , the entire row of pins 2〇2a is moved in the transport direction D, and the entire row of pins 2 Q 2 a is arranged on the substrate W of the transfer table 20; the reference pin drive unit 2〇3' will constitute the positioning position. The basis of the base (four) coffee subtraction domain 2 is lower than the _ mover; and the end face detection. The 卩204' has an end face detecting sensor 2〇4a, and the end face detecting sensor 2G4a detects the substrate w and transports The end faces of the parallel sides of the direction D. The figures 3 and 4 show a perspective view of the entire row of pin drive units 2〇2 in a mode. As shown in Fig. 34, the 'integral pin drive unit 2〇2 includes: a whole row of pins 2, The person who is in contact with the end face of the substrate W and the advancing and retracting portion 2Q2b can move forward and backward in a direction parallel to the transport direction D, and move the entire pin 202a parallel to the transport direction D 201230230. In addition, the push drive will drive you " ^ paste (10) is driven by the control of the control unit 3. The swaying: using a pneumatic rainbow or an electric motor, etc. "Hai Wei The tf2()2a is mainly formed by using a resin such as a cis (polyfluorene ketone) material, and can surround the axis of the cylinder as shown in Fig. 3 (orthogonal to the center and direction D of the transfer door). By rotating, even when the end faces of the substrate w and the integral: 2〇2: are inclined with respect to the moving direction of the entire row of locks 202a, the frictional force applied between the substrate W and the entire row of pins 202a can be reduced, and the substrate can be suppressed. The damage of %. The sub-figure 5 shows a perspective view of the reference pin drive unit 2〇3 in the mode. As shown in Fig. 5, the reference pin drive unit 203 includes the reference pin 2G3a and is in contact with the substrate W. The reference member constituting the positioning position of the substrate W; and the lifting portion 203b are movable up and down in a direction perpendicular to the conveying direction D, and the reference pin 203a is driven up and down in a direction perpendicular to the conveying direction 。. It is driven by the control unit 3. The drive system uses a pneumatic cylinder, an electric motor, etc. The reference pin 203a is made of a resin such as PEEK (polyether ether ketone) material. The reference pin 203a is configured to at least abut against the substrate w. The area is tapered toward the direction of the transport direction D. When the substrate % is transported to the transfer table 2, particularly when the substrate W is received from above the transfer table 20, even if the position of the substrate w is shifted, the contact between the substrate and the reference pin 203a during substrate reception can be more reliably prevented. The contact area when the substrate w is abutted can be reduced. Alternatively, the tapered shape can be formed above the area in which the substrate W is abutted, and as long as the abutment position with the substrate W can be specified, the The rod-shaped member which is inclined on the side of the inspection unit 100 serves as a reference pin. Alternatively, it may be rotated around the central axis X (which is orthogonal to the conveyance direction D) as shown in Fig. 201230230. As shown in Fig. 2, the arrangement of the entire row of pins 202&s can be as long as the position of the substrate W can be determined by the reference pin. Preferably, the entire row of locks 202a is located inside the reference pin 203a on the outermost edge side with respect to the width of the transfer table. Further, although the case where the entire row of pins and the reference pin are two, respectively, In the above arrangement, one or a plurality of drive mechanisms 30 may be included. The drive unit 32 includes a drive unit 32 that moves on a transport (10) that is parallel to the horizontal direction of the transport direction d. The cut member 33 is supported by the drive unit. The portion 32 and the adsorption pad 34 are supported by the support member 33, and absorb the substrate W by suction using a fruit (not shown). The drive mechanism 3 is realized by the town. The sacrificial motor guide is used as the transport shaft 31 and the linear motor is used as the drive unit 32. The drive mechanism 30 is disposed at the center in the width direction of the transport table, thereby maintaining the substrate including the S-transported transfer table 2Q. The field of the center of gravity of w can be transported with stable filaments. Further, as long as the substrate W can be transported without damaging the substrate W, the position of the drive mechanism 3 can be any position. can In the adsorption unit, the end portion of the substrate w is held and transported. The inspection unit 100 includes an imaging unit (not shown), and the imaging unit transmits the transport path formed by the transport table 12 through the microscope 101 The substrate W passing through the inspection line L1 parallel to the width direction of the transfer table 12 is detected. By analyzing the image obtained by the inspection unit 100, it is possible to detect whether or not the substrate W is defective. Further, the inspection unit 1 can be along The inspection line is moved by 10 201230230. In the present description, the field in which the inspection unit 100 is set is referred to as the inspection space PR1. Further, the areas other than the inspection space pR1 are referred to as the transportation spaces TR1, TR2, for example, The inspection unit 100 can also be replaced with another processing unit that performs the following processing at a predetermined position, that is, a pure unit of laser-only or coating correction for the defective portion of the substrate w; observation is performed. A measurement unit such as dimension measurement, film thickness measurement, color measurement, etc. for wiring, etc., that is, the processing unit (10) includes an inspection unit, a repair unit, and a photographing unit. Further, the inspection apparatus according to the present invention includes a structure in which the processing unit performs each processing on the substrate w on the stage on which the substrate w is placed. Further, the right FPD inspection apparatus 1 has an inspection space PR1 and It is preferable that the transport space TR1 'TR2 is installed outside', so that the internal space (clean room) can be formed. In addition to the inlet and the outlet of the substrate W and the lower duct, the clean room wire is closed. Above the inspection unit, there is an FFU that sends clean air (hereinafter referred to as clean air) into the internal space. For example, the FFU sends out clean air that has removed dust such as particles. In the vicinity of 1〇〇 and around the inspection line u (inspection space PR1), it is cleaned with less dust. Further, the clean air sent in the vicinity of the inspection sheet 7C 100 and around the inspection line L1 is formed into a downflow in the clean room, and then exhausted from the exhaust port. Fig. 6 is a flow chart showing a series of processes for the substrate inspection process of the present embodiment. Fig. 7 is a plan view showing the transfer of the substrate in the substrate inspection process of the present embodiment in a mode. Figs. 8 and 9 show a side view of the substrate loading in the substrate inspection process according to the present embodiment. FIG. 10 and FIG. 11 show the side of the positioning process in the substrate inspection process according to the present embodiment. view. First, the substrate W is carried into the FPD inspection apparatus 1 from the outside (step S102). In the case of the loading of the substrate W, the substrate W held by the arm portion 40a of the transfer robot 40 is carried into the transfer table 20, and the arm portion 40a holding the substrate W is brought into the transfer table 20, The transfer robot 40 will descend. At this time, the arm portion 4〇a enters between the plate members of the transfer table 2〇. Then, by lowering the arm portion 40a, as shown in Fig. 9, the substrate W is held by the unpowered roller 201. When the substrate W is supported by the unpowered roller 2〇1, the transfer robot 4 is detached from the transfer table 2 (FpD inspection device 丨). After the substrate W is received by the transfer table 20, the positioning process of the substrate W is performed. First, as shown in Fig. 8, the reference pin driving unit 2〇3 is driven to raise the reference pin 2〇3a (step S104). Then, the entire column pin driving unit 202 is driven to move the entire column pin 202a (step s丨06). As shown in the figure, the entire row of pins 2〇2& moves along the conveyance direction D shown in Figs. 1 and 2 to abut against the substrate w, and moves the substrate w in the conveyance direction D. When the substrate W is moved by the movement of the alignment pin 202a, the substrate W abuts against the reference pin 2〇3a (n-th diagram). The substrate w is sandwiched between the entire row of pins 202a and the reference pin 203a in one direction, and is formed in a fixed state. In this state, the placement position of the substrate W is determined. When the placement position of the substrate w is determined right, the end surface detecting unit 2〇4 detects the direction in which the substrate W is aligned with the alignment pin 2〇2& and the reference pin 2〇3a by the end surface detecting sensor 204a. The end of the direction - the end of the edge (step sl8). The end surface detecting unit 204 generates the position of the end surface of the transfer table 20 parallel to the transport direction D based on the information detected by the end surface detecting sensor 2〇4a. 12 201230230 End face inspection 2G4 is after the live contact information The position information is output to the control unit 3 (step SU〇). Further, the position information is, for example, the distance information from the end face detecting sensor 204a, and the control unit 3 corrects the position of the substrate W based on the acquired distance information. Further, it is also possible to constitute a position information base ‘the information and the control unit 3 corrects the coordinates of the substrate w based on the obtained coordinate information. After the output of the position information of the end surface detecting portion 2 〇 4 is used, the drive mechanism 3 causes the substrate W to be adsorbed and held by the adsorption pad 34 (step SU2). Then, the alignment pin driving unit 202 moves the alignment pin 2〇2a in a direction opposite to the conveyance direction D, and releases the alignment pin 202a from the substrate w (step S114, and the reference pin drive unit 203 lowers the base (4) 2G3aT to at least The upper end portion of the reference sales position is lower than the upper end portion of the unpowered drum 201 (step SU6), the releasing operation of the entire row pin 2〇2a and the lowering operation of the reference pin 203a may be reversed in the order, or may be performed simultaneously. After the release of the alignment pin 202a and the decrease of the reference pin 2〇33, the drive mechanism 30 drives the drive unit 32 to move the adsorption pad 34 and moves the substrate w to the transfer table 12 side (step si 18). The 〇〇 system photographs the substrate w passing through the inspection line L1 through the microscope 1〇1, and performs analysis (inspection processing) of the acquired image (step S120). After the inspection process of the transferred substrate W is completed, if there is When one of the substrates W to be inspected is inspected (step S122: Yes), the control unit 3 proceeds to step S102 to perform substrate inspection processing for the next substrate. Further, if there is no substrate evaluation for the next inspection target (step S122: N〇), then control In the third embodiment, the substrate inspection process is completed. 13 201230230 As described in the embodiment, the substrate is moved along the rotation direction of the unpowered roller to fix the placement position, and the direction orthogonal to the rotation direction is used by the sensor. Since the end surface detection is performed, the position of the substrate is confirmed, so that the substrate can be prevented from being damaged by the simple structure. In particular, as the substrate is enlarged in recent years, the self-weight k applied to the roller by the substrate is large and valleys. It is easy to cause damage. Therefore, it is effective to prevent damage of the substrate during transportation by moving only in the direction and position. In addition, in the present embodiment, an off-line FPD inspection device is described to explain 'however' It can be applied to the on-line type FPD inspection device. In the case of the on-line type, since the substrate is transported from the transfer table connected to the side of the reading unit 1 on the side of the reading unit, it is advisable to add the entire column. The pin 2 is cut off or the structure is retracted from the upper side of the transfer table 20. The pad is replaced with the entire pin and the reference pin drive portion pin holds the substrate to fix the mounting position while maintaining the clamping. In the state of transporting the substrate, it is also possible to use the drive unit 32 by means of the entire pin and the reference during the transfer of the substrate. 3⁄4 > =τ'上人......·.,·
凌筒係支持丞板，並可沿著整列鈷·ν必知 準錦，且於 '^鲫，且於 置。此時， 並可沿著整列叙移動方向旋轉。The Ling can support the fascia, and it can be found along the entire column of cobalt ν, and it is placed in the '^鲫, and is placed. At this time, it is possible to rotate along the entire movement direction.
以模式顯示有關本發明之實施形離 201230230 示器（FPD)檢查裝置之構造俯視圖。 第2圖係以模式顯示有關本發明之實施形態的FPD檢 查裝置之構造側視圖。 第3圖係以模式顯示有關本發明之實施形態的整列銷 驅動部之立體圖。 第4圖係以模式顯示有關本發明之實施形態的整列銷 驅動部之立體圖。 第5圖係以模式顯示有關本發明之實施形態的基準銷 驅動部之立體圖。 第6圖係顯示有關本發明之實施形態的基板檢查處理 之一連串流程之流程圖。 第7圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之基板搬入之俯視圖。 第8圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之基板搬入之側視圖。 第9圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之基板搬入之側視圖。 第10圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之定位處理之側視圖。 第11圖係以模式顯示有關本發明之實施形態的基板檢 查處理中之定位處理之側視圖。 【主要元件符號說明】 1.. .平面顯示器(FPD)檢查裝置 3...控制部 2.. .基板處理部 10...高架台 15 201230230 11.. .架台 12.20.21.. .搬送台 13.. .振動吸收機構 30··.驅動機構 31.. .搬送軸 32.. .驅動部 33.. .支持構件 34.. .吸附墊 40.. .搬送機器人 40a...臂部 100…檢查單元(檢查部） 101.. .顯微鏡 121,201,211…無動力滾筒 202…整列銷驅動部 202a··.整列銷 202b··.進退部 203...基準銷驅動部 203a…基準銷 203b...升降部 204…端面檢測部 204a…端面檢測感測器 D...搬送方向 L1..·檢查線 PR1…檢查空間 S102，S 104,S 106，S 108，S 110，S 112, S114，S116，S118，S120,S122 ...步驟 TR1，TR2...搬送空間 W. ..基板 X. ..中心軸 16A top view of the configuration of the 201230230 display (FPD) inspection apparatus relating to the embodiment of the present invention is shown in a mode. Fig. 2 is a side view showing the configuration of an FPD inspection apparatus according to an embodiment of the present invention in a mode. Fig. 3 is a perspective view showing, in a mode, a row of pin driving portions according to an embodiment of the present invention. Fig. 4 is a perspective view showing, in a mode, a row of pin driving portions according to an embodiment of the present invention. Fig. 5 is a perspective view showing a reference pin driving portion according to an embodiment of the present invention in a mode. Fig. 6 is a flow chart showing a series of processes for substrate inspection processing according to an embodiment of the present invention. Fig. 7 is a plan view showing the substrate loading in the substrate inspection process according to the embodiment of the present invention. Fig. 8 is a side view showing the substrate loading in the substrate inspection process according to the embodiment of the present invention. Fig. 9 is a side view showing the substrate loading in the substrate inspection process according to the embodiment of the present invention. Fig. 10 is a side view showing, in a mode, a positioning process in a substrate inspection process according to an embodiment of the present invention. Fig. 11 is a side view showing, in a mode, a positioning process in a substrate inspection process according to an embodiment of the present invention. [Description of main component symbols] 1. Flat panel display (FPD) inspection device 3... Control unit 2. Substrate processing unit 10: Elevated platform 15 201230230 11.. gantry 12.20.21. Table 13: Vibration absorbing mechanism 30··. Drive mechanism 31.. Transport shaft 32.. Drive unit 33.. Support member 34.. Adsorption pad 40.. Transfer robot 40a... Arm 100... inspection unit (inspection unit) 101.. microscope 31, 201, 211... no power roller 202... alignment pin drive unit 202a··. alignment pin 202b··. advancing and retracting unit 203... reference pin driving unit 203a... reference pin 203b. .. lifting unit 204... end surface detecting unit 204a... end surface detecting sensor D... conveying direction L1..·inspecting line PR1...inspecting space S102, S104, S106, S108, S110, S112, S114 , S116, S118, S120, S122 ... steps TR1, TR2... transport space W. .. substrate X. .. central axis 16