JP2925539B1 - Lighting equipment for macro inspection - Google Patents

Abstract

An object of the present invention is to provide a structure that can easily eliminate the bulkiness of the upper part of an inspection device even when a lighting device for macro inspection that illuminates a substrate is mounted on the inspection device for substrate inspection. A lighting device for macro inspection is attached to an upper part of an inspection device for inspecting a surface of a substrate. The illumination device for macro inspection includes a light source unit 2 having a light source 22 that emits a light beam to be an illumination light beam and a light source cover 21 that covers the light source 22, a light beam from the light source 22 reflected in the direction of the substrate 6, and an inspection. An optical member for providing an illumination light beam having possible optical characteristics is disposed inside the light shielding case 3, and includes an optical unit 1 attached to an upper part of the inspection device 5. The light source unit 2 is detachable from the optical unit 1, and the light shielding case 3 can be folded on the inspection device 5 with the light source unit 2 removed. By folding the light shielding case 3, the bulkiness at the upper part of the inspection device 5 can be easily eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an illumination device for macro inspection which is attached to an inspection device for inspecting the appearance of a substrate such as a wafer or a liquid crystal substrate, and irradiates an illumination light beam to a substrate to be inspected.

[0002]

2. Description of the Related Art An inspection apparatus for inspecting the surface of a large substrate such as a wafer or a liquid crystal substrate is provided with an illumination device for irradiating an illumination light beam to the substrate. Among these illumination devices, in order to inspect the surface of the substrate macroscopically, a macro inspection illumination device that uniformly illuminates the entire substrate is used, and this macro inspection illumination device is attached to the upper part of the inspection device. ing.

FIG. 6 shows a conventional illumination device for macro inspection described in JP-A-5-232320 and JP-A-5-232040. The illumination device for macro inspection has a light source unit 110 and an optical unit 120.

The light source unit 110 includes a light source 111 that emits a light beam, a heat ray absorbing filter 112, a dimming unit 113, and a filter unit 114 that are sequentially arranged on an optical path from the light source 111, and a light source cover 1 that covers the above members.
15 is provided. In the light source unit 110, the light source cover 115 is fixedly provided on the light shielding case 121 of the optical unit 120, and cannot be removed from the light shielding unit 121.

The optical unit 120 is a light source unit 110
Mirror 122 that reflects the light flux from the mirror toward the large substrate 130 to be inspected, a condensing Fresnel lens 123 and a light projecting Fresnel lens 124 disposed on the reflection path of the reflecting mirror 122, and a light projecting Fresnel A liquid crystal scattering plate 125 provided on the emission side of the lens 124 and a light-shielding case 121 that covers these members by disposing these members inside are provided. The optical unit 120 is configured such that a light-shielding case 121 is fixed on the upper portions of the inspection devices 140 and 150 (see FIGS. 7 and 8).
It is mounted on top of 0,150.

FIG. 7 shows an inspection apparatus 140 which performs the macro inspection of the substrate 130 by providing the above-described illumination apparatus for macro inspection. The optical unit 120 is mounted on the upper part of the inspection apparatus 140 with the light source unit 110 attached. It is fixed to.

[0007]

The illumination device for macro inspection as described above is composed of two members, a light source unit 110 and an optical unit 120, and is arranged above the inspection devices 140 and 150 in a state where they are assembled. ing. Therefore, the upper portions of the inspection devices 140 and 150 are bulky for disposing the illumination device for macro inspection.

On the other hand, recently, a substrate 1 to be inspected has
Since the size of the substrate 30 is increased, it is necessary to increase the irradiation range and the projected area of the macro illumination in order to cope with the illumination of the entire substrate 130 which has been increased in size. For this reason, the incident-side illumination optical path length increases, and the size of the reflection mirror 122 and the Fresnel lenses 123 and 124 increases. As a result, the illumination device for macro inspection tends to increase in size. The inspection device 140 in which the macro inspection illumination device is provided at the upper portion is further bulky as the size of the substrate is increased.

As described above, when the size of the inspection apparatus 140 is increased, there is a problem in that the upper lighting device becomes higher than the entrance of a car or a factory when the apparatus is transported or carried in. In order to cope with this carry-in problem, it is necessary to separate the macro inspection lighting device from the inspection device and pack it. Further, after carrying in the package, it is necessary to unpack and attach the macro inspection lighting device to the inspection device. However, since the illumination device for macro inspection is provided on the upper portion of the inspection device, the work of separating and assembling the illumination device for macro inspection is inefficient and requires a large number of workers.

The present invention has been made in consideration of such conventional problems, and does not need to be separated from the inspection apparatus even if the size of the apparatus is increased. An object of the present invention is to provide an inspection lighting device.

[0011]

In order to achieve the above object, a first aspect of the present invention is a lighting device for macro inspection, which is mounted on an upper portion of an inspection device for inspecting the surface of a substrate and irradiates the substrate with an illumination light beam. And a light source unit having a light source that emits a light beam to be the illumination light beam and a light source cover that covers the light source, and an optical characteristic that reflects the light beam from the light source in the direction of the substrate and that can be inspected. An optical member serving as an illumination light beam is disposed inside the light-shielding case, and includes an optical unit attached to an upper portion of the inspection device, and the light source unit is detachable from the optical unit, and The light shielding case can be folded on the inspection device in a detached state.

According to the present invention, after removing the light source unit from the optical unit, the light shielding case of the optical unit is folded on the inspection device, thereby eliminating the bulkiness of the upper portion of the inspection device. Therefore, it is not necessary to separate the entire macro inspection lighting device from the inspection device, and it is possible to correspond to the frontage of transportation or transportation. In addition, the work of folding and assembling the light shielding case is simpler than the work of assembling and assembling all members of the illumination device for macro inspection from the inspection device, so that the number of workers and the operation time can be reduced.

According to a second aspect of the present invention, in the first aspect, the light-shielding case has a box shape formed by assembling a plurality of walls, and inside the light-shielding case,
A reflection mirror for reflecting the light beam from the light source in the direction of the substrate is attached, and each of the wall portions is foldable in a state where interference with the reflection mirror is avoided.

According to the present invention, since the light shielding case is folded without the reflection mirror interfering with the wall of the light shielding case, it is possible to maintain good reflection without damaging the reflection mirror.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 shows an overall configuration of an embodiment of the present invention, and FIGS. FIG.
As shown in FIG.
And an optical unit 1, and is attached to an upper portion of an inspection device 5 that performs macro inspection and micro inspection of the substrate 6.

The light source unit 2 includes a light source 22 that emits a light beam L1 for forming an illumination light beam L2, and a heat ray absorption filter 23, a dimming unit 24, and a filter 25 that are sequentially arranged in the optical path of the light beam L1 from the light source 22. And the whole of them is covered by the light source cover 21.

The heat ray absorbing filter 23 transmits a light beam L1.
To reduce the temperature of the light beam L1. The light control unit 24 and the filter 25 convert the light flux L1 into a light amount and a color set by the operator. By transmitting through the above members, the light beam L1 from the light source 22 enters the optical unit 1 while diffusing and expanding the light beam.

The light source cover 21 is formed into a rectangular parallelepiped box. The light source cover 21 has an open end face on the optical unit 1 side so that the light beam L1 is incident on the optical unit 1.

The optical unit 1 includes a plurality of optical members for reflecting the light beam L1 from the light source unit 2 to the large substrate 6 to be inspected and for converting the light beam L1 into an illumination light beam L2 having optical characteristics capable of inspection. A light shielding case 3 that covers the optical member by disposing the member inside.

In this embodiment, the optical member is constituted by a reflecting mirror 40, a light-collecting Fresnel lens 41, a light-emitting Fresnel lens 42, and a liquid crystal scattering plate 43 arranged in order on the optical path of the light beam from the light source unit 2. Have been.

The reflection mirror 40 changes the optical axis to a set angle by reflecting the light beam L1 from the light source unit 2 toward the substrate 6. The condenser Fresnel lens 41 converts the light beam from the reflection mirror 40 into a parallel light beam, and the light projecting Fresnel lens 42 converts the light beam into a converged illumination light beam.

The liquid crystal scattering plate 43 switches between transparent and opaque depending on whether or not a voltage is applied from a power supply (not shown), thereby switching the illumination light beam L2 to a convergent light beam or a scattered light beam. That is, the power is turned on and the liquid crystal scattering plate 4 is turned on.
When a voltage is applied to 3, the liquid crystal scattering plate 43 becomes transparent, so that the convergent light flux from the light projecting Fresnel lens 42 is transmitted as it is to illuminate the substrate 6. On the other hand, when the power supply is turned off and the application of the voltage is cut off, the liquid crystal scattering plate 43 becomes opaque. Therefore, the convergent light beam from the light emitting Fresnel lens 42 becomes a scattered light beam and illuminates the substrate 6.

The light-shielding case 3 in which such an optical member is disposed has a box shape with a plurality of walls assembled. As shown in FIGS. 2 to 5, the light shielding case 3 includes left and right side walls 33 and 34 and left and right side walls 33 and 34.
Sloping wall part 3 provided on the rear side of 34 so as to be inclined
2 and a top wall portion 31 provided at the upper end of the inclined wall portion 32 and the left and right side wall portions 33 and 34, and the above-described reflection mirror 40 is attached to the lower surface of the inclined wall portion 32. .

The top wall 31 and the left and right side walls 33, 3
At the end of the light source unit 4 on the light source unit 2 side, a square frame-shaped mounting frame 35 is provided. The mounting frame 35 has substantially the same size as the light source cover 21 of the light source unit 2, and the distal end of the light source cover 21 can be fitted into and detached from the fitting. Then, the light source unit 2 is mounted on the optical unit 1 by fitting the distal end of the light source cover 21 into the mounting frame 35. To fix the light source unit 2 to the optical unit 1, a fastening member such as a screw (not shown) is provided at an appropriate position on the light shielding case 3. In order to prevent external light from entering through a gap between the light source cover 21 and the mounting frame 35 that are fitted with each other, a sealing material (shown in FIG. (Omitted) are attached as appropriate.

The light-shielding case 3 as described above is mounted on the inspection device 5 in a foldable state. In this case, the light-collecting Fresnel lens 41, the light-emitting Fresnel lens 42, and the liquid crystal scattering plate 43 are located inside the inspection device 5.

The inspection apparatus 5 is provided with a substrate 6 in a main body box 51.
The micro inspection of the substrate 6 is also possible by arranging the microscope device 54 in the main body box 51. The microscope device 54 moves in the X direction along the guide member 52 provided in the main body box 51, and the microscope itself moves in the Y direction, so that the entire surface of the substrate 6 can be micro-inspected.

The substrate 6 held on the swing stage is shown in FIG.
As shown by the dashed line, the micro inspection is performed in a state of being horizontally mounted on the substrate support 53 provided in the main body box 51. On the other hand, the macro inspection is performed in a state where the substrate 6 is obliquely erected from the chain line state to the solid line state.

The caster 5 is provided on the lower surface of the main body box 51.
The caster 55 allows the entire inspection apparatus 5 to be moved and transported.
After moving to the predetermined position, it is fixed on the floor by supporting legs 56 provided on the lower surface of the main body box 51.

For such an inspection apparatus 5, the light shielding case 3 is attached to the top plate 57 of the main body box 51.
It can be folded on the top plate 57 of the main body box 51. Next, a structure for enabling the light shielding case 3 to be folded will be described.

The sloping wall 32, the side walls 33 and 34, so as to be folded substantially in the same plane as the top plate 57 of the main body box 51.
A well-known hinge 37 is attached to a bent portion of the attachment frame 35. 2 and 3, 38, 39
Is a hinge attachment portion for attaching a hinge to the top plate 57. By attaching the hinge 37 to the bent portion, the left and right side walls 33 and 34, the inclined wall 32, and the mounting frame 35 are rotatably connected. Thereby, the left and right side wall portions 33 and 34, the inclined wall portion 32, and the mounting frame portion 35 can lie down and stand on the top plate 57.

As shown in FIG. 1, the top wall 31 is connected to the inclined wall 32 via a hinge 37 so that the top wall 31 can rotate with respect to the inclined wall 32. ing.
In this case, at the time of folding, as shown in FIG. 4, the top wall portion 31 is rotated in a direction to be folded on the inclined wall portion 32.

Further, in order to fix the box-shaped light-shielding case 3 in which the above-mentioned side wall portions 33 and 34, the inclined wall portion 32, the top wall portion 31 and the mounting frame portion 35 are assembled, FIG. As shown in FIG. 7, a fastening member 36 such as a screw is disposed at an appropriate position. Instead of these screws, fixing means such as latches and fasteners can be used.

Prior to the folding of the light shielding case 3, the fastening member fixing the light source unit 2 to the light shielding cover 3 is removed, and then the light source cover 21 is detached from the mounting frame 35 as shown in FIG. Then, the light source unit 2 is removed from the light shielding case 3. 4 and 5, after the light source unit 2 is detached and the connecting members 36 arranged at appropriate positions on the side wall portions 33, 34, the inclined wall portion 32, the top wall portion 31, and the mounting frame portion 35 are removed. The light shielding case 3 is folded as described above.

That is, after removing the light source unit 2, the fastening member 36 is removed. Then, as shown in FIG. 4, the left and right side wall portions 33 and 34 are turned outward to
Is folded on the top plate 57, and the top wall portion 31 is
To be folded on the inclined wall portion 32. By folding the left and right side walls 33 and 34 on the top plate 57 in this manner, the left and right side walls 33 and 34 are prevented from interfering with the reflection mirror 40 on the lower surface of the inclined wall 32 when the light shielding case 3 is folded. can do. Similarly, ceiling part 3
1 is folded on the inclined wall portion 32, so that the top wall portion 31
Can also be prevented from interfering with the reflection mirror 40.

Thereafter, the inclined wall portion 32 is rotated downward in the direction indicated by the arrow b to fold the inclined wall portion 32 together with the top wall portion 31 on the top plate 57, and then the mounting frame portion 35 is moved in the direction indicated by the arrow c. It is folded downward on the top wall 31 on the inclined wall 32 by rotating it downward as shown. After this folding, the left and right side walls 33 and 34 are turned upward as indicated by arrow d, and the left and right side walls 33 and 34 are folded to the uppermost part by this turning. In this case, in order to prevent the folded walls 31 to 35 from moving due to impact, vibration, or the like at the time of transportation, a magnetic attraction means may be provided near each joint side of each of the walls 31 to 35 or may be pressed from above. It is good to fix with a band etc.

According to the above procedure, the light shielding case 3 can be folded on the top plate 57 of the main body box 51 of the inspection apparatus 5. On the other hand, assembling of the light shielding case 3 can be performed by performing the procedure reverse to the above procedure and fastening the fastening member 36. Then, after assembling the light shielding case 3, the light source unit 2 is fitted into the mounting frame portion 35 and fixed with a fastening member. Thereby, the state shown in FIG. 1 and FIG. 2 is obtained, and illumination of the substrate 6 can be performed.

In such an embodiment, the light shielding case 3
Is folded on the main body box 51 of the inspection device 5, thereby eliminating the bulkiness of the upper portion of the inspection device 5. For this reason,
It is not only necessary to perform a troublesome work of separating the entire macro inspection lighting device from the upper portion of the inspection device 5, but also it is possible to correspond to a frontage of transportation or transportation.

The folding of the light-shielding case 3 is simpler than the work of separating all the members of the macro inspection lighting device from the inspection device 5, and the assembly after the folding is performed by assembling all the members of the macro inspection lighting device. It is easier than working. For this reason, the number of workers and the work time can be reduced. In this case, by providing the magnetic attraction means on each of the joining sides of the walls 31 to 35, the vibration at the time of transportation can be suppressed, and the joining sides which pass at the time of assembly can be temporarily stopped by magnetic attraction. .

Further, in the folding of the light shielding case 3 of this embodiment, the respective walls 31 and 3 of the light shielding case 3
2, 33, 34 and the mounting frame 35 do not interfere with the reflection mirror 40 in the light shielding case 3. Therefore, good reflection can be maintained without the reflection mirror 40 being damaged.

The present invention is not limited to the above-described embodiment, but can be variously modified. For example, the inspection apparatus 5 may only perform a macro inspection of the substrate 6, and the inspection apparatus 5 If it can be folded, the outer shape of the light-shielding case can be appropriately changed.

[0041]

As described above, according to the present invention, since the light-shielding case of the optical unit can be folded on the inspection device, the bulkiness of the upper portion of the inspection device is eliminated, and the upper portion of the inspection device can be made to correspond to the carrying frontage. Can be. This eliminates the need for a troublesome operation of separating the entire macro inspection lighting device from the inspection device. Moreover, folding of the light-shielding case is easier than separating all the components of the macro inspection lighting device from the inspection device, and assembly after folding is easier than assembling all the components of the macro inspection lighting device. Therefore, the number of workers and work time can be reduced.

According to the invention, since the light shielding case is folded without the reflection mirror interfering with the wall of the light shielding case, it is possible to maintain good reflection without damaging the reflection mirror.

[Brief description of the drawings]

FIG. 1 is an overall sectional view of an embodiment of the present invention.

FIG. 2 is a perspective view showing a state before folding of a light shielding case.

FIG. 3 is a perspective view of a state in which a light source unit is removed to fold a light shielding case.

FIG. 4 is a perspective view showing a procedure for folding the light shielding case.

FIG. 5 is a perspective view showing a state where a light shielding case is folded.

FIG. 6 is a side view showing a configuration of a conventional illumination device for macro inspection.

FIG. 7 is a side view of an inspection device provided with a conventional illumination device for macro inspection.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Optical unit 2 Light source unit 3 Light shielding case 6 Substrate 21 Light source cover 22 Light source 31 Top wall 32 Slant wall 33 Side wall 34 Side wall 35 Mounting frame 40 Reflection mirror L1 Light flux L2 Illumination light flux

Claims (2)

(57) [Claims] 1. An illumination device for macro inspection which is mounted on an inspection device for inspecting a surface of a substrate and irradiates the substrate with an illumination light beam, comprising: a light source for emitting a light beam to be the illumination light beam; A light source unit having a light source cover covering the light source, and an optical member that reflects a light beam from the light source in the direction of the substrate and serves as an illumination light beam having optical characteristics that can be inspected, is disposed inside the light shielding case; An optical unit attached to an upper part of the inspection device, wherein the light source unit is detachable from the optical unit, and the light shielding case is foldable on the inspection device when the light source unit is removed. An illumination device for macro inspection characterized by the following. 2. The light-shielding case according to claim 1, wherein the light-shielding case has a box shape formed by assembling a plurality of walls, and a light flux from the light source is directed inside the light-shielding case toward the substrate. A lighting device for macro inspection, wherein a reflecting mirror that reflects light is attached, and each of the wall portions is foldable while avoiding interference with the reflecting mirror.