JP2006349576A - Lighting system for visual inspection by reflected light and transmitted light - Google Patents

Lighting system for visual inspection by reflected light and transmitted light Download PDF

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JP2006349576A
JP2006349576A JP2005178290A JP2005178290A JP2006349576A JP 2006349576 A JP2006349576 A JP 2006349576A JP 2005178290 A JP2005178290 A JP 2005178290A JP 2005178290 A JP2005178290 A JP 2005178290A JP 2006349576 A JP2006349576 A JP 2006349576A
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light
inspection
visual inspection
mirror
reflected light
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Tsutomu Kubota
勉 窪田
Kazuyuki Matsumoto
和幸 松本
Yasuo Imamura
保夫 今村
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Moritex Corp
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Moritex Corp
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Priority to JP2005178290A priority Critical patent/JP2006349576A/en
Priority to TW095119425A priority patent/TW200702658A/en
Priority to CNB2006100928468A priority patent/CN100426021C/en
Priority to KR1020060054202A priority patent/KR100873057B1/en
Publication of JP2006349576A publication Critical patent/JP2006349576A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/335—Acousto-optical deflection devices having an optical waveguide structure

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that conventional methods for inspecting defects of polarizing films etc. through the use of a transmission lighting system provided with a creamy-white acrylic scattering plate for a three-wavelength fluorescent lamp can have been used only for inspection by transmitted light, that inspection can not have been performed by a color of a different wavelength altered according to the type of defect, and that very small defects can have been easily undetected since defects can not be distinguished in their height directions (recessions and protrusions) and only scattering light can be used. <P>SOLUTION: In this lighting system for visual inspection, at upper parts of an apparatus body 1, a light projection part 2 for irradiating lighting light is arranged, and a reflection mirror 3 is opposed to the light projection part at an angle. A transmission mirror 5 mounting an object to be inspected 10 is arranged at an angle at a lower part of the apparatus body. A Fresnel lens 6 is arranged between the reflection mirror and the transmission mirror. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は，例えば偏光フィルムや液晶基板等の他，各種の検査対象物の欠陥を目視にて検査するための照明装置，特に反射光と透過光の両方を用いて目視検査を行うことができる目視検査用照明装置に関するものである。   INDUSTRIAL APPLICABILITY The present invention can perform visual inspection using, for example, both a reflected light and a transmitted light, in addition to a polarizing film, a liquid crystal substrate, and the like, and an illumination device for visually inspecting defects of various inspection objects. The present invention relates to a visual inspection lighting device.

従来，偏光フィルム等の検査対象物の欠陥を検査する場合，多くは，３波長蛍光灯に乳白色のアクリル散乱板を備えた透過照明装置を利用し，蛍光灯からアクリル散乱板を介して検査対象物を透過した散乱光により目視検査を行っていた。   Conventionally, when inspecting a defect of an inspection object such as a polarizing film, in many cases, a transmission illumination device including a milky white acrylic scattering plate is used for a three-wavelength fluorescent lamp, and the inspection target is passed from the fluorescent lamp through the acrylic scattering plate. Visual inspection was performed with scattered light transmitted through the object.

一方，特許文献１には，偏光反射板を積層した光学シートを検査対象物とし，この光学シートに対して斜めに当たるように光を照射して，光学シートからの反射光により欠陥を検査する方法が記載されている。
特開２００１−１１６９２５号公報 On the other hand, Patent Document 1 discloses a method for inspecting a defect with reflected light from an optical sheet by using an optical sheet on which a polarizing reflector is laminated as an object to be inspected and irradiating light so as to strike the optical sheet obliquely. Is described.
JP 2001-116925 A

しかしながら蛍光灯を用いた透過照明装置による従来の検査においては，以下に示すような課題があった。   However, the conventional inspection using the transmission illumination device using the fluorescent lamp has the following problems.

１） ３波長蛍光灯に乳白色のアクリル散乱板を用いた照明装置は、透過光による検査にしか利用できなかった。
２） 蛍光灯による照明であるから、欠陥の種類によって波長の異なった色に変更して検査を行うことはできない。一方，蛍光灯の光は散乱光であって，欠陥観察に有効な散乱光以外の収束光等を照射することができず，また拡散するため、検査対象物を，照明から遠くに離すことにより、照度が距離の２乗に反比例して下降してしまい，十分な照度における検査が行えない。
３） 蛍光灯による照明は色温度が３０００〜５０００°Ｋであり，検査に適する太陽光線に近い６０００°Ｋの光を得ることができなかった。
４） 蛍光灯による照明では、光源の演色性の程度、つまり色の見え方の良い悪いを表わす指数（Ｒａ）が８８程度であるため，欠陥観察する際の欠陥の見え方、色が低くなり、欠陥を見逃す率が高い。
５） 透過光による検査では検査対象の欠陥の種類によって，欠陥の高さ方向（凹凸）の区別ができず，また散乱光しか使用できないため，微小な欠陥を見逃しやすい。
本発明は以上の課題を解決することを目的とするものである。 1) An illumination device using a milky white acrylic scattering plate for a three-wavelength fluorescent lamp can only be used for inspection with transmitted light.
2) Since it is illumination by a fluorescent lamp, it cannot be inspected by changing to a color having a different wavelength depending on the type of defect. On the other hand, the fluorescent lamp light is scattered light and cannot irradiate convergent light other than scattered light that is effective for defect observation, and also diffuses. The illuminance falls in inverse proportion to the square of the distance, and inspection with sufficient illuminance cannot be performed.
3) The illumination by the fluorescent lamp had a color temperature of 3000 to 5000 ° K, and it was not possible to obtain light of 6000 ° K that was close to sunlight suitable for inspection.
4) In the case of illumination with a fluorescent lamp, the degree of color rendering of the light source, that is, the index (Ra) indicating good or bad color appearance is about 88. High rate of missing defects.
5) In the inspection using transmitted light, the height direction (unevenness) of the defect cannot be distinguished depending on the type of defect to be inspected, and only scattered light can be used, so it is easy to miss a minute defect.
The present invention aims to solve the above problems.

以上の課題を解決するために，本発明では，器体の上部に，照明光を照射する投光部と，投光部に対向して反射用ミラーを傾斜して配置し，器体の下部に検査対象物を載置する透過用ミラーを傾斜して配置すると共に，反射用ミラーと透過用ミラー間にフレネルレンズを配置した反射光及び透過光による目視検査用照明装置を提案する。   In order to solve the above-described problems, in the present invention, a light projecting unit that irradiates illumination light and an reflecting mirror that is inclined to be opposed to the light projecting unit are disposed on the upper part of the device. In addition, an illumination device for visual inspection using reflected light and transmitted light is proposed in which a transmission mirror for placing an inspection object is inclined and a Fresnel lens is disposed between the reflection mirror and the transmission mirror.

そして本発明では，上記の構成において，投光部と反射用ミラーを左右側に配置すると共に，透過用ミラーは目視側を前方に配置した構成を提案する。   The present invention proposes a configuration in which the light projecting unit and the reflection mirror are arranged on the left and right sides and the transmission mirror is arranged on the front side in the above configuration.

また本発明では，上記の構成において，フレネルレンズの上面に液晶散乱シートを付設することを提案する。   The present invention proposes that a liquid crystal scattering sheet is provided on the upper surface of the Fresnel lens in the above configuration.

また本発明では，上記の構成において，投光部は，器体の外部に設置した光源と光ファイバーにより接続し，光ビームを拡大する機能を有するレンズシステムとして構成することを提案する。   According to the present invention, in the above-described configuration, it is proposed that the light projecting unit is configured as a lens system having a function of expanding a light beam by being connected to a light source installed outside the container by an optical fiber.

そして本発明では，上記の構成において，投光部はズーム機能を有するものとすることを提案する。   In the present invention, it is proposed that in the above configuration, the light projecting unit has a zoom function.

更に本発明では，上記の構成において，投光部は，色変更フィルターを設置可能に構成することを提案する。   Furthermore, in the present invention, in the above configuration, it is proposed that the light projecting unit is configured to be able to install a color change filter.

更に本発明では，上記の構成において，光源は，アークショート方式のメタルハライドランプ光源とすることを提案する。   Furthermore, in the present invention, it is proposed that, in the above configuration, the light source is an arc short type metal halide lamp light source.

以上の構成において，投光部から照射された照明光は，反射用ミラーで反射されてフレネルレンズに照射され，フレネルレンズにより収束されて，収束光として透過用ミラー上の検査対象物に照射される。検査対象物に照射された照明光は反射して，器体の前方に位置する観察者の目視側の方向に進み，従って観察者は反射光により検査対象物を観察して，その欠陥を検査することができる。   In the above configuration, the illumination light emitted from the light projecting unit is reflected by the reflecting mirror and applied to the Fresnel lens, converged by the Fresnel lens, and applied to the inspection object on the transmission mirror as converged light. The The illumination light applied to the inspection object is reflected and travels in the direction of the viewer's viewing side located in front of the body. Therefore, the observer observes the inspection object with the reflected light and inspects the defect. can do.

このように反射光により目視検査を行うことにより，欠陥の種類によっては，その高さ方向（凹凸）の区別をすることができ，また散乱光ではないため，微小な欠陥も検出しやすい。   By performing visual inspection with reflected light in this way, depending on the type of defect, the height direction (unevenness) can be distinguished, and since it is not scattered light, it is easy to detect minute defects.

一方，検査対象物が，光透過性を有するものの場合には，フレネルレンズを経て検査対象物に照射された照明光は，検査対象物を透過して透過用ミラーにて反射され，再び検査対象物を透過して目視側に出射するので，反射式の検査と共に透過光による検査を行うことができる。   On the other hand, when the inspection object is light-transmitting, the illumination light irradiated to the inspection object through the Fresnel lens is transmitted through the inspection object and reflected by the transmission mirror, and is again inspected. Since the object is transmitted and emitted to the viewing side, the inspection by the transmitted light can be performed together with the reflection type inspection.

以上のように検査対象物に照射される照明光は，フレネルレンズで収束された収束光であるため，検査対象物において，照射距離とは無関係に一定した照度を得ることができ，目視観察による検査を良好に行うことができる。   As described above, since the illumination light irradiated on the inspection object is a convergent light converged by the Fresnel lens, a constant illuminance can be obtained on the inspection object regardless of the irradiation distance. Inspection can be performed satisfactorily.

また投光部と反射用ミラーを器体の上部に左右側に配置すると共に，透過用ミラーは器体の下部において，目視側を前方に配置しているので，照明光を直接に目視することがなく，目に対して悪影響を与えることがない。   In addition, the light projecting part and the reflecting mirror are arranged on the left and right sides of the upper part of the container, and the viewing mirror is arranged in front of the transmitting mirror at the lower part of the container. There is no adverse effect on the eyes.

フレネルレンズの上面に液晶散乱シートを付設した構成においては，必要に応じて液晶散乱シートを制御して光透過状態から光散乱状態へと変化させることにより，散乱光による目視検査を行うこともできる。この際，照明光は，液晶散乱シートにより散乱された後にフレネルレンズを透過するため，検査対象物に照射される照明光は，散乱光ではあってもフレネルレンズによる収束作用を受け，従って照射距離による照度低下を防ぐことができる。   In a configuration in which a liquid crystal scattering sheet is attached to the upper surface of the Fresnel lens, visual inspection using scattered light can be performed by controlling the liquid crystal scattering sheet to change from a light transmitting state to a light scattering state as necessary. . At this time, since the illumination light is scattered by the liquid crystal scattering sheet and then passes through the Fresnel lens, the illumination light applied to the inspection object is subjected to the convergence effect by the Fresnel lens even though it is scattered light, and therefore the irradiation distance. It is possible to prevent a decrease in illuminance.

投光部は，器体の外部に設置した光源と光ファイバーにより接続した構成とし，光ビームを拡大する機能を有するレンズシステムとして構成することにより，設置の自由度が高くなり，また光源を可視光から，紫外光，赤外光の光源等に変更することも容易となる。   The light projecting unit is connected to a light source installed outside the body by an optical fiber, and is configured as a lens system that has a function of expanding the light beam, so that the degree of freedom of installation is increased and the light source is made visible light. Therefore, it is easy to change to an ultraviolet light source or an infrared light source.

投光部にズーム機能を設けることにより，検査対象物の大きさに対応して照明光の照射範囲を適宜に調節することができる。   By providing a zoom function in the light projecting unit, it is possible to appropriately adjust the illumination light irradiation range corresponding to the size of the inspection object.

また，投光部に色変更フィルターを設置可能とすることにより，検査対象物及びその検査目的の欠陥に適合した光源色を選択して検査を行うことができる。   In addition, by making it possible to install a color change filter in the light projecting unit, it is possible to perform inspection by selecting a light source color suitable for the inspection object and the defect for the inspection purpose.

更に，照明光の光源として，平均演色性の高いアークショート方式のメタルハライドランプ光源を使用することにより，欠陥の見え方を向上させて，欠陥を見逃す率を低下させることができる。   Furthermore, by using an arc short type metal halide lamp light source having a high average color rendering property as a light source of illumination light, the appearance of defects can be improved and the rate of missing defects can be reduced.

次に本発明の実施の形態を添付図面を参照して説明する。
図１は本発明に係る目視検査用照明装置の実施の形態を正面側から見た模式的断面図，図２は図１のＡ−Ａ線断面図，図３はミラーの調節動作を模式的に説明する図１のＢ−Ｂ線断面図，図４はミラーの調節動作を模式的に説明する図３のＣ−Ｃ線断面図である。 Next, embodiments of the present invention will be described with reference to the accompanying drawings.
1 is a schematic cross-sectional view of an embodiment of a lighting device for visual inspection according to the present invention as viewed from the front side, FIG. 2 is a cross-sectional view taken along line AA of FIG. 1, and FIG. FIG. 4 is a cross-sectional view taken along the line BB of FIG. 1 and FIG. 4 is a cross-sectional view taken along the line CC of FIG.

これらの図において，符号１は器体であり，この器体は前方が開口した箱状に形成されており，この器体１の上部には，図中左側に照明光を照射する投光部２を設置すると共に，投光部２に対向して図中右側に反射用ミラー３を傾斜させて配置している。図４に示すように，反射用ミラー３は，その枠部４を器体１に回転可能に取り付けて，傾斜角度を調節可能に構成しているが，この傾斜角度は投光部２との相対位置関係を適切に調節した後は，その状態を保持できるような構成とすれば良い。   In these drawings, reference numeral 1 denotes a container, which is formed in a box shape with an opening at the front, and a light projecting unit for irradiating illumination light on the left side of the figure on the top of the container 1 2 and the reflecting mirror 3 is inclined and arranged on the right side in the figure so as to face the light projecting unit 2. As shown in FIG. 4, the reflecting mirror 3 is configured such that the frame part 4 is rotatably attached to the body 1 and the inclination angle can be adjusted. After the relative positional relationship is adjusted appropriately, the configuration may be maintained.

次に，器体１の下部には透過用ミラー５を，その目視側を前方として傾斜させて配置しており，また器体１には，上記反射用ミラー３と透過用ミラー５の間にフレネルレンズ６を配置している。図３に示すように透過用ミラー５は，その枠部７を回転，移動可能に構成する等により，傾斜角度を随時調節可能として，目視方向を適宜に調節することができる構成としている。この傾斜角度の調節機構は適宜である。   Next, a transmission mirror 5 is disposed at the lower part of the container body 1 so that the viewing side is inclined forward, and the container body 1 is provided between the reflection mirror 3 and the transmission mirror 5. A Fresnel lens 6 is arranged. As shown in FIG. 3, the transmission mirror 5 has a configuration in which the tilt angle can be adjusted at any time and the viewing direction can be adjusted appropriately by configuring the frame portion 7 so as to be rotatable and movable. This tilt angle adjustment mechanism is appropriate.

符号８は光源であり，この光源８は器体１の外部に設置して，この光源８と器体１内の投光部２を光ファイバー９により接続しており，投光部２は光源８から光ファイバー９を伝搬した光ビームを拡大する機能を有するレンズシステムとして構成している。   Reference numeral 8 denotes a light source. The light source 8 is installed outside the container 1, and the light source 8 and the light projecting unit 2 in the container 1 are connected by an optical fiber 9. It is configured as a lens system having a function of expanding the light beam propagated from the optical fiber 9 to the optical fiber 9.

以上の構成において，光源８から光ファイバー９を伝搬して投光部２に至った照明光は，ビームが拡大されて反射用ミラー３に照射される。投光部２から照射された照明光は，反射用ミラー３で反射され，次いでフレネルレンズ６に照射され，フレネルレンズ６により収束されて，収束光として透過用ミラー５上の検査対象物１０に照射される。   In the above configuration, the illumination light that has propagated from the light source 8 through the optical fiber 9 to the light projecting unit 2 is irradiated with the reflection mirror 3 with the beam expanded. The illumination light emitted from the light projecting unit 2 is reflected by the reflection mirror 3, then irradiated to the Fresnel lens 6, converged by the Fresnel lens 6, and converged on the inspection object 10 on the transmission mirror 5. Irradiated.

こうして検査対象物１０に照射された照明光は，この検査対象物１０で反射されて，器体１の前方に位置する観察者の目視側の方向に進み，従って観察者は反射光により検査対象物１０を観察して，その欠陥を検査することができる。   The illumination light irradiated onto the inspection object 10 in this manner is reflected by the inspection object 10 and travels in the direction of the viewer's viewing side located in front of the body 1. The defect 10 can be inspected by observing the object 10.

一方，検査対象物１０が，偏光フィルム等のように，光透過性を有するものの場合には，フレネルレンズ６を経て検査対象物１０に照射された照明光は，検査対象物１０を透過して透過用ミラー５に至り，そこで反射され，再び検査対象物１０を透過して観察者の目視側の方向に出射するので，光透過性を有する検査対象物１０の場合には，反射光による検査と共に透過光による検査を行うことができる。   On the other hand, when the inspection object 10 has a light transmission property such as a polarizing film, the illumination light irradiated to the inspection object 10 through the Fresnel lens 6 is transmitted through the inspection object 10. Since it reaches the transmission mirror 5 and is reflected there, it passes through the inspection object 10 again and exits in the direction of the viewer's viewing side. Therefore, in the case of the inspection object 10 having optical transparency, inspection with reflected light is performed. At the same time, inspection with transmitted light can be performed.

以上のように検査対象物１０に照射される照明光は，フレネルレンズ６で収束された収束光であるため，検査対象物１０において照射距離とは無関係に一定した照度を得ることができ，目視で観察しての検査を良好に行うことができる。   As described above, since the illumination light irradiated onto the inspection object 10 is convergent light converged by the Fresnel lens 6, the inspection object 10 can obtain a constant illuminance regardless of the irradiation distance, and can be visually observed. Inspection can be performed satisfactorily.

また投光部２と反射用ミラー３は器体１の上部に左右側に配置すると共に，透過用ミラー５は器体１の下部において，目視側を前方に配置しているので，照明光を直接に目視することがなく，目に対して悪影響を与えることがない。図２に示すように，器体１の上部の開口を遮光性の蓋体１１で覆えば，更に効果的である。   In addition, the light projecting unit 2 and the reflecting mirror 3 are disposed on the left and right sides of the upper portion of the container 1, and the transmitting mirror 5 is disposed on the front side of the lower portion of the container 1, so that the illumination light can be transmitted. There is no direct visual observation and no adverse effects on the eyes. As shown in FIG. 2, it is more effective if the upper opening of the vessel 1 is covered with a light-shielding lid 11.

上述したように本発明では，図５に模式的に示すように，フレネルレンズ６の上面に液晶散乱シート１２を付設することができる。この実施の形態においては，必要に応じて制御電圧を印加する等により，液晶散乱シート１２を光透過状態から光散乱状態へと変化させることにより，散乱光による目視検査を行うことができる。   As described above, in the present invention, the liquid crystal scattering sheet 12 can be attached to the upper surface of the Fresnel lens 6 as schematically shown in FIG. In this embodiment, the liquid crystal scattering sheet 12 is changed from the light transmitting state to the light scattering state by applying a control voltage as necessary, whereby visual inspection with scattered light can be performed.

この際，照明光は，液晶散乱シート１２により散乱された後にフレネルレンズ６を透過するため，検査対象物１０に照射される照明光は，散乱光ではあってもフレネルレンズ６による収束作用を受け，従って照射距離による照度低下を防ぐことができる。   At this time, since the illumination light is scattered by the liquid crystal scattering sheet 12 and then passes through the Fresnel lens 6, the illumination light applied to the inspection object 10 is subjected to a convergence effect by the Fresnel lens 6 even though it is scattered light. Therefore, a decrease in illuminance due to the irradiation distance can be prevented.

上述したように実施の形態では，投光部２は，器体１の外部に設置した光源８と光ファイバー９により接続した構成としているため，設置の自由度が高く，また光源を可視光から，紫外光，赤外光の光源等に変更することも容易である。   As described above, in the embodiment, the light projecting unit 2 is configured to be connected to the light source 8 installed outside the vessel 1 by the optical fiber 9, so that the degree of freedom of installation is high, and the light source is changed from visible light. It is easy to change to an ultraviolet light source or an infrared light source.

また，光源８としては，平均演色性の高い光源，例えばアークショート方式のメタルハライドランプ光源を用いると，蛍光灯照明では、光源の演色性の程度、つまり色の見え方の良い悪いを表わす指数（Ｒａ）が８８程度であるのに対して，メタルハライドランプ光源ではＲａ＝９５程度と高くなるので，欠陥の見え方を向上させて，欠陥を見逃す率を低下させることができる。   When the light source 8 is a light source having a high average color rendering property, for example, an arc short type metal halide lamp light source, the fluorescent light illumination has an index (indicating the degree of color rendering property of the light source, that is, the color appearance is not good. Ra) is about 88, whereas in the metal halide lamp light source, Ra is as high as about 95, so that the appearance of defects can be improved and the rate of missing defects can be reduced.

また，投光部２にズーム機能を設けることにより，検査対象物１０の大きさに対応して照明光の照射範囲を適宜に調節することができる。   In addition, by providing the light projecting unit 2 with a zoom function, the illumination light irradiation range can be appropriately adjusted in accordance with the size of the inspection object 10.

また，投光部に色変更フィルターを設置可能とすることにより，検査対象物及びその検査目的の欠陥に適合した光源色を選択して検査を行うことができる。   In addition, by making it possible to install a color change filter in the light projecting unit, it is possible to perform inspection by selecting a light source color suitable for the inspection object and the defect for the inspection purpose.

尚，本発明では，以上に説明した要素の他，ユニバーサルルーペや、基準偏光板、低圧ナトリウムランプも取り付けることができるため、更に高度な目視検査を行うことができる照明装置を提供することができる。尚，ユニバーサルルーペや基準偏光板は装置前面，即ち，作業者の前面に設置する。また低圧ナトリウムランプは投光部２のすぐ上部に設置する。   In the present invention, in addition to the above-described elements, a universal loupe, a reference polarizing plate, and a low-pressure sodium lamp can be attached, so that it is possible to provide an illumination device that can perform a more advanced visual inspection. . The universal loupe and the reference polarizing plate are installed in front of the apparatus, that is, in front of the operator. The low-pressure sodium lamp is installed immediately above the light projecting unit 2.

本発明は，以上の通りであるので，偏光フィルムや液晶基板等の目視検査の他，印刷物原版の目視検査、バイオニクスの目視検査等を，反射光と透過光を用いて行うことができる。また、光源を適宜に変更し，例えば可視光から、紫外線、赤外線ランプに交換することにより、農業分野の自然食品の発育、畜産物の発育、半導体関係の露光装置にも応用でき、安価で性能の優れた照明装置を提供することができる。   Since the present invention is as described above, in addition to visual inspection of a polarizing film, a liquid crystal substrate, etc., visual inspection of a printed material original plate, visual inspection of bionics, and the like can be performed using reflected light and transmitted light. In addition, by changing the light source as appropriate, for example, by changing from visible light to ultraviolet and infrared lamps, it can be applied to growth of natural foods in the agricultural field, growth of livestock products, and semiconductor-related exposure equipment, and it is inexpensive and has high performance. It is possible to provide an excellent lighting device.

図１は本発明に係る目視検査用照明装置の実施の形態を正面側から見た模式的断面図である。FIG. 1 is a schematic cross-sectional view of an embodiment of a visual inspection illumination device according to the present invention as viewed from the front side. 図１のＡ−Ａ線断面図である。It is the sectional view on the AA line of FIG. 透過用ミラーの調節動作を模式的に説明する図１のＢ−Ｂ線断面図である。FIG. 6 is a cross-sectional view taken along the line BB in FIG. 1 for schematically explaining the adjusting operation of the transmission mirror. 反射用ミラーの調節動作を模式的に説明する図３のＣ−Ｃ線断面図である。It is CC sectional view taken on the line of FIG. 3 which illustrates typically the adjustment operation of a reflective mirror. フレネルレンズと液晶散乱シートを付設した構成を模式的に示す断面図である。It is sectional drawing which shows typically the structure which attached the Fresnel lens and the liquid-crystal scattering sheet.

符号の説明Explanation of symbols

１ 器体
２ 投光部
３ 反射用ミラー
４ 枠部
５ 透過用ミラー
６ フレネルレンズ
７ 枠部
８ 光源
９ 光ファイバー
１０ 検査対象物
１１ 蓋体
１２ 液晶散乱シート
DESCRIPTION OF SYMBOLS 1 Container 2 Light projection part 3 Reflection mirror 4 Frame part 5 Transmission mirror 6 Fresnel lens 7 Frame part 8 Light source 9 Optical fiber 10 Inspection object 11 Cover body 12 Liquid crystal scattering sheet

Claims (7)

器体の上部に，照明光を照射する投光部と，投光部に対向して反射用ミラーを傾斜して配置し，器体の下部に検査対象物を載置する透過用ミラーを傾斜して配置すると共に，反射用ミラーと透過用ミラー間にフレネルレンズを配置したことを特徴とする反射光及び透過光による目視検査用照明装置 A projection part for irradiating illumination light and an reflecting mirror are inclined on the upper part of the body, facing the light projecting part, and a transmission mirror for placing the object to be inspected on the lower part of the container Illuminating device for visual inspection using reflected light and transmitted light, wherein a Fresnel lens is disposed between the reflecting mirror and the transmitting mirror 投光部と反射用ミラーを左右側に配置すると共に，透過用ミラーは目視側を前方に配置したことを特徴とする請求項１に記載の反射光及び透過光による目視検査用照明装置 The illumination device for visual inspection using reflected light and transmitted light according to claim 1, wherein the light projecting unit and the reflecting mirror are arranged on the left and right sides, and the transmitting mirror is arranged with the viewing side forward. フレネルレンズの上面に液晶散乱シートを付設したことを特徴とする請求項１に記載の反射光及び透過光による目視検査用照明装置 2. A lighting device for visual inspection using reflected light and transmitted light according to claim 1, wherein a liquid crystal scattering sheet is provided on the upper surface of the Fresnel lens. 投光部は，器体の外部に設置した光源と光ファイバーにより接続し，光ビームを拡大する機能を有するレンズシステムとして構成したことを特徴とする請求項１に記載の反射光及び透過光による目視検査用照明装置 The light projecting unit is configured as a lens system having a function of expanding a light beam by connecting to a light source installed outside the body by an optical fiber, and visually observing with reflected light and transmitted light according to claim 1. Inspection lighting device 投光部はズーム機能を有するものとすることを特徴とする請求項１に記載の反射光及び透過光による目視検査用照明装置 The illumination device for visual inspection using reflected light and transmitted light according to claim 1, wherein the light projecting portion has a zoom function. 投光部は，色変更フィルターを設置可能に構成したことを特徴とする請求項１に記載の反射光及び透過光による目視検査用照明装置 The illumination device for visual inspection using reflected light and transmitted light according to claim 1, wherein the light projecting unit is configured to be able to install a color change filter. 光源は，アークショート方式のメタルハライドランプ光源とすることを特徴とする請求項１に記載の反射光及び透過光による目視検査用照明装置
The illumination device for visual inspection using reflected light and transmitted light according to claim 1, wherein the light source is an arc short type metal halide lamp light source.
JP2005178290A 2005-06-17 2005-06-17 Lighting system for visual inspection by reflected light and transmitted light Pending JP2006349576A (en)

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JP2005178290A JP2006349576A (en) 2005-06-17 2005-06-17 Lighting system for visual inspection by reflected light and transmitted light
TW095119425A TW200702658A (en) 2005-06-17 2006-06-01 Illumination device for visual inspection based on reflected light and transmitted light
CNB2006100928468A CN100426021C (en) 2005-06-17 2006-06-16 Visual inspection lighting device based on reflective light and transmission light
KR1020060054202A KR100873057B1 (en) 2005-06-17 2006-06-16 Illumination device for visual inspection based on reflected light and transmitted light

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CN100426021C (en) 2008-10-15
KR100873057B1 (en) 2008-12-11

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