TWI280368B - Inspection apparatus - Google Patents

Abstract

The display panel inspection apparatus comprises an inspection stage which receives a rectangular display panel to inspect it and keeps it in an inclined state at the time of inspection and at least two probe units individually adapted to at least two sides of the display panel. The display panel is kept at an inclination angle of no less than 70 DEG and no more than 85 DEG, preferably of 80 DEG.

Description

1280368 IX. Description of the Invention: [Technical Field] The present invention relates to an inspection apparatus for inspecting a rectangular display panel. [Prior Art] A display panel inspection device such as an operation inspection device for a liquid crystal display panel has a device for supporting a rectangular display panel on an inspection stage to tilt the supporting display panel to a horizontal plane. The inspection is performed (for example, Patent Document 1). When the display panel is inspected in an inclined state, it is easier to inspect and inspect the display panel in a substantially vertical or horizontal state, and the inspection can be performed quickly. However, the display panel has been continuously enlarged due to the improvement of its production technology. When such a large display panel is maintained in a substantially vertical or horizontal state or in an inclined state, the display panel is greatly bent due to its own weight. In order to perform an operation check on the panel for display that is greatly curved, the operator may cause a deviation in the display panel even if the display panel is actuated, and the correct inspection cannot be performed quickly. (Patent Document 1) JP-A-2002-14047 SUMMARY OF THE INVENTION An object of the present invention is to enable accurate and rapid inspection. In the inventor of the present invention, when the large-sized display panel is tilted as in the case of the patent document, the angles of the inclination of the display panel with respect to the horizontal line and the degree of bending of the display panel are examined. As a result, it is found that the panel is opposite to the 1280368. When the tilt angle of the κ flat line is right at a predetermined value, the degree of bending of the panel is remarkably small, and the present invention has been completed. The inspection apparatus of the present invention includes: an inspection stage 'supporting a display panel to perform inspection|inspection and maintaining the display panel in an inclined state at the time of inspection; and at least two probe sets respectively corresponding to the display At least 2 sides of the panel. The display panel is maintained at 7 在 during inspection. Above 85. The following tilt angle. The angle of inclination can also be made 80. . The display panel is maintained at 70 during inspection. Above 85. The following tilt angles are preferably $80. Since the inclination angle is reduced, the amount of bending of the display panel is reduced, and the result is complementary to the inclination of the display panel, so that accurate and rapid inspection can be performed. The inspection device may further include: a transfer stage for carrying the unchecked display panel or the display panel that has been inspected; and the carrier device to maintain the unchecked display panel In the same inspection, the state of the same inclination angle is transferred from the delivery stage to the inspection stage, and the inspection display panel is transported from the inspection stage in a state of maintaining the same inclination angle as the inspection. To the transfer stage. Thereby, the display can be transferred by the carrier in a state where the amount of the curvature is small, so that the conventional carrier can be used. The carrier device </ RTI> may further include: a holder having a panel holding mechanism for holding the opposite sides of the display panel; and a moving mechanism for selectively moving the holder to the inspection stage and the delivery stage. [Embodiment] 1280368 face; te, Fig. 1 to Fig. 6 'Inspection device 10' is an operation check device for rectangular display 2 . In the example shown in the drawing, the display panel 12 has three sides (two short sides and one long side) which respectively have a reset electrode. The electrodes provided on the respective sides extend in a direction orthogonal to the sides thereof in the direction along the sides thereof (i.e., the side 2 of the sides). In the case of the frame 14, the machine 14 is housed in the frame 14 (made of a plurality of elongate members and a plurality of members). One of the frame bodies 14 extending in the X direction is opposed to the body base 18 in the oblique direction through the partition. Before the double check device 10, the inclined surface 16 is formed on the upper surface portion, and the upper portion is further retreated toward the rear side (see Fig. 2). The angle Θ of the inclined surface 16 is set to be above and above 85 with respect to the horizontal plane 70. The following tilt angles are especially 8 inches. The inclination. In the example shown in the figure, in the plane parallel to the display panel 12 supported by the inspection apparatus 10, the left-right direction of Fig. 1 is the X direction, and the direction perpendicular to the X direction is the Y direction. The Z direction is perpendicular to the direction of the display panel 12 supported by the inspection device 1A. The inspection device 1 includes a panel fixing portion for transferring the inspection panel 1 to the display panel 12, and an inspection portion for inspecting the inspection panel 12. In a main body base 18, rectangular openings 20 and 22 larger than the display panel 12 are formed at the corresponding panel fixing portion and the inspection portion, respectively. The panel fixing portion is disposed: a transfer stage 24 for tilting the display panel 12; and two sets of pushers 26 for pre-aligning the supported display surface 7 1280368. On the other hand, in the inspection unit, the inspection stage 28 (refer to Fig. 3) is disposed, the display panel 12 is tilted and supported, and the probe device 3 is used as an electrical connection device. @ 载 carrying port 24, including panel stack 32, formed by a plurality of elongated members, horizontally supporting display panel 12; z stage 34 supporting panel mount 32 for supporting display panel 12 can move in the z direction. And rotate the stage 35 to support the z stage 34. ,

The rotating carrier 35 is supported on the support table 37 and is rotatable about a predetermined angle around the drawing line extending toward the X $ direction. The drive mechanism for rotating the rotary stage 35 by a predetermined angle may be disposed on the rotary stage 35 or may be disposed on the support stage η. The Z stage 34 and the panel stage 32 are selectively rotated by the rotation stage 35 to be selectively moved to the position of the supported display surface &amp; and the g苜+田 Z 1 , ..., with the panel tilted relative to the horizontal plane. This shift '(4) transfers the display panel to the transfer device % described later

get on. T '糸 糸 未 糸 未 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 显示 支承 支承 显示 支承 显示 显示 显示 显示 显示 显示 显示 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 支承 显示Do not use the panel to maintain the horizontal state. On the other hand, when the transfer load a is transferred to the ... 6 and the display panel for the unchecked display panel is pre-aligned from the transport device 3, the panel for the display to be inspected is opposed to the display panel. When the horizontal plane is miscellaneously supported, the panel stage 32, the eight γ t, and the water + surface are maintained at an angle Θ inclined. The elongate members pushed in the direction of the Χ 隔 can be placed closer to each other ^/6, arranged in the direction of the Χ 、, and moved away from each other (X direction) by 1,280,368. γ . The mechanism moves in the direction of the squat. The opposite direction of the pusher 26 is disposed so as to face the opposite side; the edge member is movable toward the γ direction in a moving mechanism (not shown) which is adjacent to each other and extends in the other direction. The movement is performed by the display panel 12, and is arranged by the pusher or the editor in the push::== state, by the person not using the panel 12, by arranging the pushers of each group Move, and move in the direction of each other's sin relative to the transfer stage in February. The soap is pre-aligned with the inspection device 10, etc., "the panel 12 is disposed on the panel stage 32 (in a horizontal manner), and the pre-alignment is carried out on the transfer side a Yishan κ, the 卞 卞 table 35, and the 9 pieces 26 are pre-aligned. By rotating the carrier angle, the following is the result of '(4) dry = (4) by the transport device 36 (see::; the inspection is not performed at the inspection unit. Knowing the load port 28' F) The tilt angle of the actuation check is the same, with a range of 7 〇 or more 85. Below, preferably 80. 杳, ^ = check 'In the case of the display, the operator visually checks the visual inspection; -^ can be used The camera or image processing device shown in the figure automatically: - The tilt angle Θ 'Specifically 70. Above 85. The car is 80. The checked display panel 12' is transported by the device % The inspection r is carried to the parent carrier 24, and then stored in the storage box by manual or loading/unloading robot blowing the loading table 24. The loading table 28 is inspected to support the display panel 12 obliquely upward to the holder 9. The adsorption surface of the panel of 1280368 is such that the adsorption surface of the panel is opposite to the opening 空. Air suction: 3 faces 8; a plurality of adsorption grooves (for setting the display panel 丨2 true 12 from the first surface, and having a backlight unit for illuminating the display panel &lt; this moon surface; 42 and 44, using:: two, quasi (X, ..., parallel to this; display the Z side of the display panel 12 supported by it) and perpendicular to the second and have /9 rhyme, so that The display panel 12 is rotated at a predetermined angle in the Z direction. The rotation of the inspection table 28 is performed around the R extension L, so that the chuck 3 is retracted (dropped) by the z stage 44, and the display panel 12 is removed from the conveyance device. The display panel is moved in two dimensions by the X and Y stages 40 and 42, and the display panel is aligned by the θ stage 4 "rotating at a predetermined angle", and the display panel 12 is inspected. At this time, the probe unit 3 is advanced (raised) by the Z stage chuck 38. Further, the inspection stage 28 is inspected, and the inspected display panel 12 is delivered to the transfer unit 36 to cause the chuck. 38 back state waits. , &quot; Probe device 30, comprising: 4 base members 48, respectively corresponding to the side of the imaginary rectangle; 3 The needle set 50 is disposed on each of the three base members and the moving mechanism (not shown). For the positioning of the probe set 5〇, the three base members 48 are respectively disposed along the side corresponding to the side (ie, the long side of the side). The base member 48 has a long plate shape in the longitudinal direction corresponding to the side, and is supported on the back side of the body base 18 to expose a portion thereof to the opening 22. The adjacent base member 48 is The undocking method is separated by the interval. 幵10 1280368 揼 needle group 50, and the old-fashioned material seat member 48 is adjacent to each other; · for the base member 48, and the bottom is placed opposite to the other ―: Base: 48. In contrast to the 'moving mechanism, the adjacent shackle base structure #48' and the base member _ _ not attached to the base member 48 of the moving mechanism) and a plurality of fixtures (not shown) such as bolts, It is mounted on the body base 18 for support.

The remaining base members 48, shown), are supported for attachment to the base 18 of the corresponding side. Each of the probe sets 50 includes a state-attached block 54 in which the base member 48 of the long-plate-shaped probe base ' extends in the longitudinal direction, is disposed on the probe base 52, and a plurality of probe probe blocks 54. The probe base 52' is fixed by a plurality of bolt members (not shown)

By means of a spacer (not shown in a non-movable manner by a guide mechanism such as a linear guide (not attached to the body 52 to face the correspondence; a plurality of probes 56 are arranged in each part ( In the edge portion of the base member 4δ in the width direction, 1 Τ becomes the outer side of the center copper (that is, the front end side) of the rectangle. 4 (shown) is fixed to the probe. Each probe 56 is mounted on the probe. The needle block 54 is formed by a plurality of bolt members (the outer side of the front end side of the needle base portion 5 in the visibility direction of the needle base portion 5 is protruded forward, and the lower end portion of the front portion of the appropriate block 54 is used. Each of the moving mechanisms can use a general mechanism, including a motor mounted on the base 18 of the body, a guide that is rotated by the motor, and a guide nut screwed to the lead screw. Dry 11 1280368 Each pin 56 is moved When the inspection panel of the inspection table is inspected, the chuck 38 is pressed and pressed against the electrode of the display panel 12. In this state, the display panel 12 is energized through the electrode. The panel 12 is maintained at 7 相对 with respect to the horizontal line. The above 85. The following inclination = degree 'better is 80. The inclination angle is less, so the display panel Η is less curved, and the inspection can be performed more correctly and more quickly. Move I set 36 ' with: _ pair The carriers 62 and 64 are disposed in the X direction and spaced apart from each other in the Z direction, and are disposed on the body bottom and the pair of carrier moving mechanisms 66 and 68 to move the carrier 62 in the X direction. The main body base 18 is provided with two guides 72 and 74 in a state in which the guide rails are extended in the X direction with a space therebetween. The guide members 76 and 78 are movably fitted to each other. Guide rails 72, 74. V members 76 and 78 are respectively disposed at both ends of the carriers 62, 64. Since the carrier 62 passes through the guide 7? β μ on the body, the carrier 64 is transparent; The support through the v-rail 74 and the guide 78 can be supported by the body base 18 in a movable white and J manner. The carrier limbs 62 and 64' will be spaced apart in the Y direction and facing the support arm 82 in the X direction. It can be disposed on the rectangular carrier base 8〇 by moving the guide rails 84 &amp; 4 guides 86 in the -γ direction. 84' is mounted on the corresponding carrier base 8〇 in the Χ direction and in the γ direction=stretched state. The four guide knives are σ 2 in the γ direction and can move in the Υ direction. The two sides of the guide rails 84 are attached to the two guide rails 84. The support members 82 are mounted on the support members 82, and the two support arms 82 are cut into the carrier base 8G, and m is thus provided in each support arm 82. The first center 2 supports the arm shape. The partition is installed and the second arm 9 is shocked and placed on the two sides: the first arm 88 and the second arm 9 are spaced upwardly, and the pair of arms 8 and the second arm 82 extend. Supported by the corresponding support arm = 2 to the other side of the support ... ..., by the formation of a cantilever shape. Ji Tian Zhou Tianzhi's combination of institutions 92^8, all

Can be toward: close to each other and π two = 82. = 3:: = The shift (four) is mounted on the corresponding support arm 刖 side, from the base of the second arm 90 at γ 士. The two front end sides that extend in opposite directions to each other. Each of the first arms 88 holds the X material: two. , ... hold ... set the state of ± Pw (four). The two holding holders 94 and the two γ-straps Γ6' abut against the one edge portion of the two edges of the display panel 12 in the X direction, thereby collectively supporting the display panel 12.

The X holder 94 and the γ holder 96 can be supported by holding the display panel facing the holder, or can be supported by locking the display panel U to the locking piece, or It is supported by supporting the display panel 2 on the support sheet. The direction-extending ball screw 18 8 ' will be screwed to the ball screw carrier moving mechanisms 66, 68, and will be rotatably supported to the body base 13 1280368 to the X 100. Two = nut (not shown) is mounted on the carrier The base is 8 inches. The ball is rotated by a carrier motor (not shown).琢累#100, the carrier of the carrier moving mechanism 66 uses the carrier motor, #卜#0+ c 思战体私动机构68 is rotated in the opposite direction and 64, respectively, and the two carriers 62 are hunted. The loading station moves to the inspection stage, and moves to the transfer stage. Substation check station shift: The display panel is transported by the carrier moving mechanisms 66 and 68. The display panel 12 and the unchecked panel 12 and the flat panel 70 are used. Above μ. 'To maintain above 85 for water, preferably 8〇. It is a private move. Thereby, it is possible to reduce the amount of bending of the display 2: the display panel 12 that has been inspected and the unchecked state; the use of the = in the curve can make the day pass: the required distance between each other Zoom out. —...Interface with panel 12 ρ Figure 8 shows the panel for use (outer dimensions: 1〇5〇mmx p 5 1忖 panel) as an example, as follows. The surface μ is held as shown in Fig. 2, and if the display panel 12 is oriented with respect to the horizontal line, the portion of the display panel 1W is oriented in the direction of the other side of the curved direction toward the other side of the direction of the 及 and * It is a S shape. In the example of Fig. 8 (8), the knife is bent by 0.009 and 〇.〇i6//m toward one of the sides in the z direction. As shown in Fig. 8(B), when the display panel η is oriented with respect to the horizontal line, "when the tilt angle is ,, the display panel 12 is entirely curved in the z direction." In the example of Fig. 8(B), when the inclination angle is 85, the bend #·11 9 is m', and if the inclination angle is 80, when bending 1 〇 1. J 68 # m , 1 oblique angle is 75. Bending 1479.23 〇 mouth, if the angle of inclination is 14 1280368 7 〇 °, bend 1954.76 〇 &quot; m. Therefore, the carrier moving mechanism 66 and 68, by maintaining the display panel 12 relative to the horizontal line 70. 85 or more. The inclination angle is preferably an inclination angle of 8 inches, and the display panel 12 that has been inspected and unchecked can be crossed by the state in which the amount of bending is small. The two arms 9〇 and 9〇 are synchronously moved in the γ direction by the γ moving mechanisms 1〇8 and 108. Next, the i-th arms 88 and 88 are synchronously moved in the x direction by the X moving mechanisms 106 and 1〇6, respectively. Each of the X moving mechanisms 106 includes an X: a stationary source 110 that can be reversed and reversed, such as an electric motor, and a first pulley 112 that is rotated by the X driving source 110. The soldier 1 leather V wheel 112 is spaced apart from the second pulley 114 in the X direction, and the endless belt 116 hooked to the first and second pulleys (1) and 114. The 88 key is disposed on the upper side of the endless belt, 116. Next, the 8 series is installed at the lower side of the endless belt 116, so it moves in the direction close to it, if it rotates: another = in one direction, moves toward it. Thereby, the two ...8: direction 'is away from each other Hold and release. This ordering does not use the panel 1 2 to move the mechanism 1〇8, including: the drive source 120; the shaft 122, by the "motor can be forward and reverse, the axis of the extension, the weekly door #丝.-日Υ The driving source 120 is rotated in the direction of the yaw, and is rotated around, and the belt is rotated in the way of the car by 12 mountains; ^ a, 122a, so as not to be opposite to the first skin * #", the second pulley 122b, 122b, not on the reverse wheel 122a in the gamma square &amp; l22c, on the flute 1 κ &gt; ° on the interval; and the endless belt 122c, from the ^ brother 1 and the second pulley 122q122b. 15 1280368 rails 72, 74 , 84 and guide guides. 76, 78 and 78, 86, can use the line in the example of the figure, the upper side of the support is 82 installed in the endless skin u

At the upper side, the lower support arm ZZC is located at the endless belt 122e. Therefore, the two support arms 82 and 82, the right γ drive source 丨 2 〇 rotates in one direction, then move toward each other in the direction of the ancient, and if rotated in the other direction, the direction away from each other. t is the door to move. In this case, the two support arms 82 and 82 can

The holding and releasing of the display panel 12 is performed. Checking the clothes 10 and checking it during the inspection of the stage 28: the checked panels are transported and placed on the transfer station 24 by the load to 62 (or 64). The panel is placed on the delivery stage 24; the unchecked panel is pre-aligned, and the unchecked panel is placed on the carrier 62 (or 64). After the inspection, the unchecked panel on the transfer stage 24 side is held on the carrier 62 (or 64), and the inspected panel on the inspection stage 28 side is held on the other carrier 62 (or 64). The panels are transported to the inspection stage 28 and the transfer stage 24, respectively. The unchecked and inspected panels are transported using the carriers 62 and 64, respectively, by rotating the carrier moving mechanisms 66 and 68 in opposite directions. The display panel 12 is held by the carriers 62 and 64, and the X drive source Π〇, 110 and the γ turbulence source 12 旋转 are rotated in one direction, so that the χ holder 94, 94 and the γ holder are made %%. Moving in the direction of approaching each other causes the holders 94, 94, 96, 96 to support the edge of the 16 I280368 of the display panel 12. The above result 'is on the transfer stage 24, the unchecked panel is held by the carriers 62 and 64, and the unchecked panel is centered for pre-alignment. When the display panel 12 is transported by the carriers 62 and 64, the parent holder 94 and the γ holder 96 are respectively brought into contact with each other in the 'χ direction, a plurality of intervals in the γ direction, and a γ direction. Each edge is supported at a plurality of intervals in the χ direction (can be released). The display panel yx Α z you are tempted to enter. Therefore, the display panel 12 can be stably supported. The display panel 12 is released by the carriers 62 and 64, and the crucible driving sources 11A and 110 and the crucible driving source 12 are rotated in the other direction, thereby causing the crucible holders 94 and 94 and the crucible holders 96 and 96 to Wait for each other to leave. Further, the transfer stage 24 and the inspection stage 28 are configured to reciprocate the panel stage 32 and the chuck in the ζ direction at least once when the carrier is placed on the surface. If the inspection device 1 is supported by the display panel 12 with four edges corresponding to the four sides of the rectangle, even if the panel is large, the panel in the central region of the χ direction is curved in the central region of the Α direction. In this case, the support from the edge portion in the Y direction and the edge portion in the X direction can prevent each other from being caused, and the large panel can be stably transported without being damaged. Referring to FIGS. 7(A), (8), (C), and (D), the holder 13 is formed in an L shape, and the holder: 32 is mounted on the panel support side in a state where the recess of the L shape is set to the first side. The arm 8 8 is attached to the second arm 90 in a state in which the arm panel is locked, and the drop preventing piece m for preventing the display panel 12 from falling is disposed in the fixing frame 132a. The panel card 17 (1280368, which is disposed at the lower end of the protective trim piece 132), is abutted against the display panel, and the elastic block 136 is attached to the elastic block 136 by a fixing member 138 such as a bolt.幵"The recess of the L-shaped piece of the piece 132. The thick sound of the piece 1 3 4 is only +, and the size of the piece (the size perpendicular to the direction of the paper surface) is thicker than that of the holder piece 132, respectively. ^ &amp; has been small. The elastic block 13 ό is made of a rubber material such as oxy phthalate rubber, etc. The holders 94 and 96 used in the yoke examples shown in Figs. 1 to 6 are shown. , the only surname is the 保持 保持 1 1 1 1 。 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述

5 early blocks 1 3 ό, and the display panel 丨 2 12 12 friction is engaged with the elastic block 136 to select. However, it is also possible to use a holder to support the holder 12 to support the holder, etc., and to use other types. For one transport device 36, one carrier 62 or 64 may be used. In addition, if the inspection stage 28 arranges the delivery stage 24 on both sides of the χ direction, it may be provided that the panel is transported as a carrier of the transfer station (four)-stage, and is transported to another carrier. A transfer device that picks up the carrier and checks the carrier of the carrier. The panel can also be applied to a liquid crystal panel or other display panel. The present invention is applicable not only to a glass substrate for a liquid crystal display panel but also to an organic electrical connection device. The present invention is not limited to the above embodiments, and various changes can be made without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing an embodiment of an inspection apparatus using an electrical connecting device of the present invention. Figure 2 is a right side elevational view of the inspection apparatus of Figure 1, showing a 邙 18 1280368 minute interior. Figure 3 is a left side view of the inspection apparatus shown in Figure 1, showing a portion of the interior. Figure 4 is a front elevational view of the inspection apparatus shown in Figure 1 for illustrating the carrier. Figure 5 is a cross-sectional view taken along line 5-5 of Figure 4. Figure 6 is a cross-sectional view taken along line 6-6 of Figure 4. 7(A) to 7(D) show an embodiment of a holder used in a conveying apparatus. Figs. 8(A) and 8(B) are schematic views for explaining bending of a display panel. [Main component symbol description] 10 12 18 24 28 30 36 38 62 66 72 76 64 68 74 78 84 86 Inspection device display panel body base transfer carrier inspection stage probe device transport device chuck carrier carrier moving mechanism guide Carrier base 19 80 1280368 82 88, 90

98 94 96 100 106 108 110 112 , 114 116 120 122 124 130 , 140 , 150 Support arm 1st and 2nd arm combination mechanism X holder Y holder ball screw X moving mechanism Y moving mechanism X drive source pulley endless belt γ Drive source shaft nut holder

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Claims (1)

• 1280368 Patent Application No. 94109696, please replace the patent scope. This paragraph is 2, 6 years, 9 / 10, and the scope of application: 1 · An inspection device for display panels, comprising: inspection carrier for supporting the display panel Performing an inspection, and maintaining the display panel in an inclined state during inspection; and at least two probe sets respectively corresponding to at least two sides of the display panel; The inspection stage holds the display panel at 7 inches during inspection. Above 85. The following tilt angle. 2. The inspection apparatus for a display panel according to the ninth aspect of the invention, wherein the inspection table is to be held, and the display panel is maintained at the time of inspection. The angle of inclination. 3. The inspection device of the patent scope of the present invention, further comprising: a load port for supporting the unchecked display panel or the display panel that has been inspected; and a carrying device for The display panel that is not inspected with Γ I is transferred to the inspection stage at the same angle as that of the inspection to maintain the same angle of inclination as the inspection, and the inspection is carried out. In the state of maintaining the same inclination angle as the inspection, the inspection unit is transferred from the inspection station to the transfer station. 4. The application device of the third aspect of the invention includes the inspection device of the three items, The carrying and holding machine has a holding mechanism; and the holding mechanism of the opposite side of the panel is not used, so that the holding money is selectively moved to the inspection stage and 21 J280368 the transfer stage. , schema: such as the next page. twenty two