1307134 (1) 九、發明說明 【發明所屬之技術領域】 本發明係有關一種將從外部搬運進來的檢查對象板搬 入到裝置內，而進行點燈檢查的點燈檢查裝置。 % 【先前技術】 一般周知有使液晶基板等的面板（檢查對象板）的端 I 子與探針接觸，而進行點燈檢查的點燈檢查裝置。這種點 燈檢查裝置主要係具備：支持上述面板而進行點燈檢查的 檢查部；搬運上述面板至該檢查部的搬運部：以及定位上 述面板的定位裝置。本例係揭示於日本特開2 002-3 73 92 5 號公報、以及日本特開2002-36 8 058號公報。 上述定位裝置係具備：彼此接近分離的一對輥子；以 及使該一對輥子彼此近接分離的移動機構而構成。上述一 對輥子係朝向XY軸方向設置二組。然後，該一對輥子係 I 藉由上述移動機構，與上述面板的周緣部抵接，而構成上 述面板的位置定位，藉由該一對的輥子來支持上述面板。 此時，上述一對的輥子與上述面板的周緣抵接而支持時， 上述面板不偏移，而上述各輥子以一定的壓力被按壓在該 面板上。 在該定位裝置定位而被支持的面板，係被送到搬運 部，並搬運到檢查部而進行檢查。 然而，在上述以往的點燈檢查裝置中，上述各輥子與 上述面板的周緣抵接，來支持該面板之際，使面板不偏 -4- (2) 1307134 移，而使上述各輥子以一定的壓力按壓於該面板，但是， 該按壓力的調整不易。藉著調整具有彈性的上述輥子的移 動量，而進行上述按壓力的調整，但該移動量僅比設定値 些微偏離，當按壓力變的過強時，將有導致上述面板破損 的顧慮，當按壓力變過弱時’將有導致上述面板偏移的顧 慮。 特別是，當上述面板爲大型且重時，由於需要以於其 對應之強度的按壓力來支持，因此上述現象變爲明顯。當 上述面板爲大型時，上述按壓力僅比基準値過強一些的程 度，但上述面板也有容易撓曲而導致破損的顧慮。當上述 面板較重時，即使上述按壓力僅過若一些的程度，亦有容 易導致上述面板偏移的顧慮。因此，有所謂難以安全地定 位上述面板的問題點。 【發明內容】 〔發明之槪要〕 本發明係有鑑於這種問題點而硏創者，目的在於提供 一種可安全定位並支持檢查對象板的點燈檢查裝置。 本發明之點燈檢查裝置，係點燈檢查從外部搬運而來 的檢查對象板，其特徵爲具備有：傾斜、水平或垂直地支 持上述檢查對象板而點燈檢查的檢查部；將上述檢查對 象板搬運至該檢查部的搬運部；及接收從外部搬入的檢査 對象板而定位支持，並傳送到上述搬運部的定位機構：上 述定位機構係具備有：接收從外部所搬入的檢查對象板的 -5- (3) 1307134 板接收部；與該板接收部板所接收的檢查對象板的 接近分離，並且與上述周緣部抵接’在定位上述檢 板的上面給予支持的一對或複數對的板夾鉗；及支 該對的板夾鉗中的一方’在該一方的板夾鉗與上述 象板的周緣部抵接的狀態下，在使該一方的板夾鉗 押於上述周緣部的方向彈壓，並且在使構成上述對 夾鉗分離之前，先.解除上述彈壓的緩衝機構。 根據上述構成，上述定位機構接受檢查對象板 支持時，上述緩衝機構彈壓與上述檢查對象板的周 接的上述板夾鉗，以不成爲設定値以上的按壓力而 持。使各板夾鉗與上述檢查對象板分離時，在此之 除上述緩衝機構朝向上述板夾鉗的彈壓。 上述緩衝機構係具備有：經常朝向構成上述對 夾鉗彼此接近的方向，彈壓上述一方的板夾鉗的經 手段；及朝向與其之彈壓方向反方向，按壓以該經 手段彈壓的上述一方的板夾鉗，來限制上述經常彈 的彈壓力的限制手段。 根據上述構成，而以上述板夾鉗支持上述檢查 時，經常彈壓手段經常彈壓上述板夾鉗，而使上述 象板不成爲設定値以上的按壓力，而加以支持。又 上述各板夾鉗與上述檢查對象板分離時，在此之前 述限制手段，來限制上述經常彈壓手段的彈壓力， 對於上述板夾鉗的彈壓。然後，使上述各板夾鉗與 查對象板分離’而搬送到上述搬運部。 周緣部 查對象 持構成 檢查對 朝向按 的各板 而定位 緣部抵 加以支 前先解 的各板 常彈壓 常彈壓 壓手段 對象板 檢查對 ，當使 先以上 來解除 上述檢 -6- (4) (4)1307134 如以上所述’根據本發明，可達到如下的效果。 上述緩衝機構’由於彈壓與上述檢查對象板的周緣部 抵接的上述板夾鉗，以不成爲設定値以上的按壓力來支 持’因此’在可確實支持上述檢查對象板之同時，可防止 上述檢查對象板撓曲或破損。 各板夾鉗與上述檢查對象板分離時，在此之前由於先 解除上述緩衝機構對於上述板夾銷的彈壓，因此，該板夾 鉗彈壓上述檢查對象板，而防止上述檢查對象板偏移。 當以上述板夾甜支持上述檢查對象板時，經常彈壓手 段經常彈壓上述板夾鉗，而使上述檢查對象板不成爲設定 値以上的按壓力來支持’因此，上述檢查對象板不會撓曲 或破損，而可安全且確實的以上述板夾鉗來支持上述檢查 對象板。 又’使上述各板夾鉗與上述檢查對象板分離時，在此 之前先以上述限制手段，來限制上述經常彈壓手段的彈壓 力’來解除對於上述板夾鉗的彈壓。然後，使上述各板夾 鉗與上述檢查對象板分離，而搬送到上述搬運部時，藉由 上述經常彈壓手段的彈壓力，來防止上述檢查對象板偏 移。 【實施方式】 以下’參照添附圖面，說明本發明的實施形態的點燈 檢查裝置。第1圖係本發明的實施形態的點燈檢查裝置的 位置定位機構之斜視圖，第2圖係本發明的實施形態的點 (5) (5)1307134 燈檢查裝置的正面圖，第3圖係本發明的實施形態的點燈 檢查裝置的搬運部的正面圖，第4圖係本發明的實施形態 的點燈檢查裝置的檢查部的側面剖面圖，第5圖係本發明 的實施形態的點燈檢查裝置的檢査部的槪略正面圖，第6 圖係本發明的實施形態的點燈檢查裝置的檢查部的槪略側 面剖面圖，第7圖係本發明的實施形態的點燈檢查裝置的 位置定位機構的側面圖，第8圖係本發明的實施形態的點 燈檢查裝置的位置定位機構的斜視圖，第9圖係本發明的 實施形態的點燈檢查裝置的位置定位機構的平面圖，第10 圖係本發明的實施形態的點燈檢查裝置的位置定位機構的 正面圖，第1 1圖係本發明的實施形態的點燈檢查裝置的 位置定位機構的側面圖，第1 2圖係本發明的實施形態的 點燈檢查裝置的位置定位機構之夾鉗時的動作之側面圖， 第13圖係本發明的實施形態的點燈檢查裝置的位置定位 機構之開放時的動作之側面圖。 本實施形態的點燈檢查裝置1 1係如第1圖至第4圖 所示，主要由：搬運部12、檢查部13、位置定位機構14 所構成。 搬運部12係從位置定位機構14接受從外部搬入的液 晶面板P，並搬運到檢查部1 3，而且將檢查結束後的液晶 面板P運送到位置定位機構1 4的裝置。搬運部1 2如第2 圖及第3圖所示，主要係由搬運手臂15、以及驅動機構 1 6所構成。 搬運手臂15係用來支持液晶面板P的部分。該搬運 -8- (6) 1307134 手臂15係由：手臂部2〇、夾鉗臂21、軌道部22、以及板 夾鉗23所構成。 手臂部20係配設在所支持的液晶面板p的上下位 • 置，而用來支持液晶面板P的構件。手臂部2 0係藉由驅 ' 動機構16而可上下移動的被支持，與液晶面板P的上下 * 端部相對接近分離。夾鉗臂2 1係用來支持液晶面板p的 構件。夾鉗臂21係由：上下夾鉗臂21A、及左右夾鉗臂 φ 21B所構成’而從上下左右來支持液晶面板P。上下夾鉗 臂2 1 A係藉由手臂部20的上下動作，而從上下掌握液晶 面板P。下側的上下夾鉗臂21A係被固定在手臂部20。 左右夾鉗臂21B係藉由設置在手臂部20的後述軌道 部22的功能而左右移動，並從左右來掌握液晶面板p。 軌道部22係用來可左右移動並支持夾鉗臂21的左右夾鉗 臂21B的構件。左右夾鉗臂21B係設置有導引部21C，該 導引部21C係可滑動的被支持在軌道部22。 Φ 板夾鉗23係用來直接與液晶面板p的端部抵接的構 _ 件。該板夾鉗23係以具有彈力的合成樹脂等構成，並且 彈性的支持液晶面板P的周緣。 驅動機構16係在以搬運手臂15支持液晶面板P的同 時，在搬運部1 2和檢查部1 3之間來回移動液晶面板P的 裝置。驅動機構16主要由X方向移動機構部25、Y方向 移動機構部26所構成。 X方向移動機構部25係在搬運部12和檢查部13之 間來回移動搬運手臂15的機構。X方向移動機構部25主 -9 - (7) (7)1307134 要由：軌道部28、X軸驅動電動機29、球型螺絲30、以 及螺帽（未圖示）所構成。 軌道部2 8係用來支持在搬運部1 2和檢查部！3之間 的搬運手臂15的來回動作的構件。後述的滑動板33係可 來回動作地被支持在軌道部28。X軸驅動電動機29係與 球型螺絲3 0連結，而用來旋轉驅動該球型螺絲3 〇的電動 機。球型螺絲3 0係直接使滑動板3 3來回動作的構件。球 型螺絲3〇被支持在軸承（未圖示），而配設在搬運手臂 1 5的來回動作方向的橫方向。螺帽係藉由球型螺絲3 〇的 旋轉而來回動作的構件。螺帽被嵌入到球型螺絲30,而該 球型螺絲30以X軸驅動電動機29來回驅動，而來回動 作。螺帽係固定在滑動板3 3 ’並藉由球型螺絲3 〇的旋 轉，使滑動板3 3來回動作。 Y方向移動機構部26係可上下移動的支持搬運手臂 15的手臂部20的機構。該Y方向移動機構部26主要係 由：滑動板33、軌道部34、Y軸驅動電動機35、球型螺 絲3 6、以及螺帽（未圖示）所構成。 滑動板33係用來支持搬運手臂15而來回動作的構 件。在滑動板33的背面分別於其上下設置有導引（未圖 示）’該導引係被安裝在X方向移動機構部25的軌道部 28°藉此，滑動板33藉由軌道部28可來回移動的被支持 在X軸方向上。 軌道部34係用來導引搬運手臂15的手臂部20的上 下移動的軌道。軌道部34被安裝在滑動板33的表面。在 10- (8) 1307134 該軌道部34安裝有導引部40。該導引部40係在軌道部 34設置二個，並且分別支持搬運手臂15之上下的手臂部 20 = Y軸驅動電動機35係用來旋轉驅動球型螺絲36的電 動機。Y軸驅動電動機35係使搬運手臂15之上下的手臂 部2 0彼此接近而分離時，使球型螺絲3 6旋轉。球型螺絲 36係直接使螺帽（未圖示）上下接近分離的構件。球型螺 絲3 6係在上半部和下半部使其螺絲溝的螺旋方向相反， 並以耦合器4 1連接一條。球型螺絲3 6的上端部係可旋轉 的被支持在軸承4 2。然後，於球型螺絲3 6的上下分別設 置有上述螺帽，當使球型螺絲36朝向一方旋轉時，各螺 帽37彼此接近，而朝向反方向旋轉時，各螺帽彼此分 離。該螺帽係與導引部40 —體設置，經由該導引部40與 手臂部20 —體設置。上述螺帽係以球型螺絲3 6接近分離 時，直接的使導引部40接近分離。然後，間接的使搬運 手臂15的上下之手臂部20接近分離。再藉由球型螺絲36 的旋轉，使導引部40上下移動，並使手臂部20朝向上下 移動。 檢查部1 3係用來支持液晶面板P並進行點亮試驗的 裝置。檢查部13如第2圖、第4圖至第6圖所示，主要 係具備XYZ 0載置台43、背光44、工作台45、以及探測 器46而構成。 ΧΥΖ0載置台43係在其前面支持背光44和工作台 45，並進行安裝在工作台45的液晶面板P的位置對準的 -11 - (9) 1307134 校正載置台。該ΧΥΖ0載置台43係在進行支持液晶面板 P的工作台45的XYZ軸方向的調整、和θ旋轉方向的調 整之同時，在收受液晶面板P時，使工作台45朝向Z軸 方向移動的裝置。在XYZ 0載置台43內分別設置有：使 工作台45朝向XY軸方向移動的驅動電動機（未圖 示）；使工作台45朝向Θ旋轉方向旋轉的驅動電動機 (未圖示）；以及使工作台45朝向Z軸方向移動的驅動 電動機（未圖示）。各驅動電動機係分別與控制手段連接 (未圖示），並藉由控制手段正確的定位上述液晶面板 P ° 背光44係用來從背面側照明支持在工作台45的液晶 面板P的構件。背光44係由筐體5 6和收納在該筐體5 6 內的燈5 7所構成。 工作台45係用來支持檢查對象板的液晶面板p的構 件。在該工作台45的開口部45A安裝有擴散板60。 探測器46係與液晶面板p的端子接觸而進行液晶面 板P之檢查的裝置。探測器46係由：探針基座67、探針 塊68、相機69、以及探針載台70所構成。 探針基座67係用來支持探針塊68、及相機69的構 件。探針基座67係在期望載置於工作台45的液晶面板P 的狀態下，經由探針載台70固定在框架上（未圖示）。 探針塊6 8係在其前端的探針7 1期望於液晶面板P的狀態 下，被固定在探針基座67。相機69係一邊觀看設置在液 晶面板P的標誌’一邊進行液晶面板p之位置對準的相 -12- (10) (10)1307134 機。探針載台70係在固定於框架的狀態下，支持探針基 座67。 位置定位機構1 4係接受從外部以水平狀態搬入的液 晶面板P，而位置定位且支持之後，旋轉、傾斜並送到上 述搬運部1 2的機構。 該位置定位機構14如第1圖、第7圖至第1 1圖所 示，係由：板接收機構部8 1、位置定位支持機構部82、 旋轉機構部83、傾斜機構部84、以及升降機構部85所構 成。 板接收機構部81係接受從外部以水平狀態搬入的液 晶面板P的機構部。該板接收機構部81係由：將其基端 部固定在後述的旋轉機構部8 3的上側基板1 1 5，而朝向水 平方向且配設成放射狀配設的4根支持棒8 8 ;以及分別朝 向垂直方向設置於各支持棒8 8的板接收部8 9所構成。板 接收部8 9係直接與液晶面板P的下面側抵接，而支持液 晶面板P的構件，以合成樹脂等具有柔軟性的構件構成， 俾使不會傷害液晶面板P。 位置定位支持機構部82係在位置定位且支持在板接 收機構部8 1的液晶面板P上的機構部。該位置定位支持 機構部82係由：板夾鉗91、移動裝置92、以及緩衝機構 93所構成。 板夾鉗91係與液晶面板P的周緣部抵接，並在位置 定位該液晶面板P上支持的構件。該板夾紺91係構成 對，而在彼此垂直的方向（水平狀態的XY軸方向）設置 -13- (11) 1307134 2組。各板夾鉗91係朝向垂直方向配設圓柱狀或圓筒狀 合成樹脂而構成。構成對的各板夾鉗91，係在其中的一 設置2個，於另一方設置1個。構成對的板夾鉗91，係 * 由上述移動裝置92與液晶面板P的周緣部相對接近 - 離。 移動裝置92係支持板夾鉗91而接近分離的裝置。 移動裝置92係分別設置於圖中的X軸方向和γ軸方向 • X軸方向的移動裝置92亦具有和γ軸方向的移動裝置 相同的構成。該移動裝置92具體而言，係由：軌道96 導引97 '導引板98、連結構件99、鎖100、副齒輪ι〇1 以及驅動電動機102所構成。 軌道9 6之基端部係固定在上側基板1 1 5，而分別設 在個別配設於XY軸方向之兩側的支持板1 〇4。導引97 可滑動的安裝於各軌道96。導引板98係一體設置於上 導引97。連結構件99係在其上端部一體設置於導引板 (I 的狀態下，朝向下方延伸而設置。鎖1 00係與上述軌道 平行設置。副齒輪1 0 1係在從兩側延伸的各鎖i 00和其 側及下側咬合，同時而且彼此朝向相反方向移動各 100。驅動電動機102的旋轉軸係與上述副齒輪ι〇1 合’而旋轉驅動副齒輪1 0 1。然後，使驅動電動機1 〇 2 向一方旋轉時，經由各鎖1 0 0使上述各板夾鉗9 1彼此 近，當使驅動電動機102朝向反方向旋轉時，使上述各 夾鉗9 1彼此分離。 緩衝機構93係以一定的按壓力使構成上述對的板 的 方 藉 分 該 〇 92 置 係 述 98 96 上 鎖 嵌 朝 接 板 夾 -14- (12) 1307134 鉗9 1的一方，朝向另一方的板夾鉗91側彈壓之同時，用 來解除其彈壓力的裝置。亦即，支持構成對的各板夾鉗91 中的一方，該一方的板夾鉗91在與上述液晶面板p的周 * 緣部抵接的狀態下，以一定的彈壓力使該一方的板夾鉗9 1 •. 朝向另一方的板夾鉗9 1側彈壓之同時，將上述液晶面板 • P搬運到上述搬運部12，而在使構成對的各板夾鉗91分 離之前，先解除上述彈壓的裝置。該緩衝機構93係由： φ 滑動機構1 〇 5、經常彈壓手段1 0 6、以及限制手段1 〇 7所 構成。 滑動機構105係由：緩衝軌道11〇、緩衝導引ill、 以及緩衝導引板11 2所構成。緩衝軌道11 0係朝向移動裝 置92的軌道96相同的方向，被安裝在移動裝置92的導 引板98。緩衝導引111係可滑動的安裝在緩衝軌道110 上。緩衝導引板112係與緩衝導引ill 一體設置。然後， 在該緩衝導引板112上安裝有上述板夾鉗91。 • 經常彈壓手段106係在構成對的各板夾鉗91彼此接 近的方向上，用來經常彈壓上述一方的板夾鉗9 1的手 段。該經常彈壓手段106具體而言係以彈簧構成。該經常 彈壓手段1 06的一方分別安裝於緩衝導引板丨丨2側，另一 方安裝於移動裝置92的導引板98側，上述一方的板夾鉗 91朝向另一方的板夾鉗91側彈壓。該經常彈壓手段1 〇 6 的特性（彈壓力）’係設定在與所載置的上述液晶面板p 的尺寸等相合之最適當的値。 限制手段1 07係朝向與其彈壓方向相反方向按壓，以 -15- (13) (13)1307134 上述經常彈壓手段1 06來彈壓的上述一方的板夾鉗9 1，而 用來限制經常彈壓手段1 06的彈壓力。限制手段1 07具體 而言係以氣缸所構成，該氣缸的活塞軸108與上述滑動機 構105的緩衝導引板112抵接，而成爲按壓該緩衝導引板 112。限制手段107係設置在上述緩衝導引板112的內側 (另一方的板夾鉗9 1側），該活塞軸1 0 8係藉著按壓上 述緩衝導引板1 1 2，而限制上述經常彈壓手段1 06的彈壓 力。 旋轉機構部8 3係用來支持上述板接收機構部8 1、及 位置定位支持機構部82而旋轉的機構。該旋轉機構部83 係由：上側基板1 1 5、下側基板1 1 6、使上述上側基板1 1 5 及下側基板1 1 6 —體旋轉的驅動電動機1 1 7所構成。上側 基板115係用來支持上述板接收機構部81、及位置定位支 持機構部8 2。該上側基板1 1 5係經由4根的支柱1 1 8安裝 在下側基板116。下側基板116係一體固定在驅動電動機 117的旋轉軸。藉此，藉著僅以設定角度旋轉驅動電動機 1 1 7 ’而經由上述上側基板1 1 5、及下側基板1 1 6，僅以設 定角度旋轉以上述板接收機構部81、及位置定位支持機構 部82來支持的上述液晶面板P。該旋轉機構部83係一體 安裝於升降機構部85。 傾斜機構部84係用來支持以垂直的狀態一體設置的 上述旋轉機構部83、及升降機構部85的機構，並使之傾 斜。該傾斜機構部84係由：基板120、支柱121、轉動支 持軸122、驅動電動機123、以及減速齒輪124所構成。 -16- (14) 1307134 基板12〇係用來支持裝置全體的板材。支柱1: 來支持被一體設置的上述旋轉機構部83、及升降 85的構件。該支柱121係在上述基板120保留設定 設置2根。轉動支持軸122係橫跨在2根支柱121 置。在該轉動支持軸122上可旋轉的安裝有上述旋 部83以及升降機構部85。 上述驅動電動機123係與上述減速齒輪124連 速齒輪124的輸出軸係與上述轉動支持軸122連結 齒輪1 2 4係用來減低驅動電動機1 2 3的旋轉，間接 述板接收機構部8 1、及位置定位支持機構部82來 上述液晶面板P，朝向設定角度直接轉動上述旋轉 83。藉此，以減速齒輪124降低驅動電動機123的 度，而僅旋轉上述轉動支持軸122特定角度。 升降機構部85係用來使上述液晶面板p升 置。亦即，升降機構部8 5係經由上述旋轉機構部 使以上述板接收機構部8 1、及位置定位支持機構部 支持的上述液晶面板P，朝向與該液晶面板P之面 方向升降。升降機構部85係由：固定板13〇、 131、轉動支持軸132、螺帽133、以及驅動電動機 構成。固定板130係一體的固定在上述轉動支持軸 並且與該轉動支持軸122同時轉動。滑動板13ι係 的被支持在上述固定板130。在該滑動板Hi以垂 度一體的設計上述旋轉機構部83。藉此，上述滑動 在被支持於上述固定板130的狀態下滑動時，支持 21係用 機構部 間隔而 上而設 轉機構 結。減 。減速 的以上 支持的 機構部 旋轉速 降的裝 83，而 82來 垂直的 滑動板 134所 122， 可滑動 直的角 板13 1 在該滑 -17- (15) 1307134 動板1 3 1的上述旋轉機構部8 3係一體滑動。 轉動支持軸132係使上述滑動板131 1 3 0相對而滑動的構件。該轉動支持軸1 3 2 動板131的滑動方向，可旋轉的被支持； * . 13〇。上述螺帽133係被固定在上述滑動板] •至上述轉動支持軸132。藉此，藉由支持軸 使上述螺帽133朝向轉動支持軸132的軸方 φ 滑動板131朝向上述轉動支持軸132的軸方 電動機134與上述轉動支持軸132連結，並 軸1 32旋轉。 〔動作〕 以如上方式構成的點燈檢查裝置1 1，以 作。 點燈檢查裝置1 1的動作如下所述。1307134 (1) Description of the Invention [Technical Field] The present invention relates to a lighting inspection device for carrying out a lighting inspection by moving an inspection target sheet conveyed from the outside into the apparatus. [Prior Art] A lighting inspection device that performs a lighting inspection by bringing a terminal of a panel (inspection target plate) such as a liquid crystal substrate into contact with a probe is known. The lighting inspection apparatus mainly includes an inspection unit that supports the panel to perform lighting inspection, a conveyance unit that transports the panel to the inspection unit, and a positioning device that positions the panel. This example is disclosed in Japanese Laid-Open Patent Publication No. 002-3 73 92 5 and Japanese Laid-Open Patent Publication No. 2002-36-8 058. The positioning device includes a pair of rollers that are close to each other and a moving mechanism that separates the pair of rollers from each other. The above pair of rollers are provided in two groups in the XY-axis direction. Then, the pair of roller sets I are brought into contact with the peripheral edge portion of the panel by the moving mechanism to constitute the positional positioning of the panel, and the pair of rollers support the panel. At this time, when the pair of rollers abut against the peripheral edge of the panel and are supported, the panel is not displaced, and the rollers are pressed against the panel with a constant pressure. The panel that is positioned and supported by the positioning device is sent to the transport unit and transported to the inspection unit for inspection. However, in the conventional lighting inspection apparatus described above, when the respective rollers are in contact with the peripheral edge of the panel to support the panel, the panel is not biased by -4-(2) 1307134, and the rollers are fixed. The pressure is pressed against the panel, but the adjustment of the pressing force is not easy. By adjusting the amount of movement of the above-mentioned roller having elasticity, the pressing force is adjusted, but the amount of movement is only slightly deviated from the setting. When the pressing force is too strong, there is a concern that the panel is broken. When the pressure becomes too weak, there will be concerns about the above panel shift. In particular, when the above-mentioned panel is large and heavy, it is required to be supported by the pressing force of its corresponding strength, so that the above phenomenon becomes conspicuous. When the above-mentioned panel is large, the pressing force is only a little stronger than the reference enthalpy, but the above-mentioned panel is also likely to be deflected to cause breakage. When the above-mentioned panel is heavy, even if the above pressing force is only excessive, there is a concern that the above panel shift is liable to occur. Therefore, there is a problem that it is difficult to securely position the above panel. [Summary of the Invention] The present invention has been made in view of such a problem, and an object thereof is to provide a lighting inspection apparatus that can safely position and support an inspection target board. In the lighting inspection apparatus of the present invention, the inspection target panel is inspected from the outside, and is characterized in that it includes an inspection unit that supports the inspection target panel obliquely, horizontally or vertically, and performs lighting inspection; a transporting unit that transports the target plate to the inspection unit, and a positioning mechanism that receives the inspection target panel and carries it to the transport unit, and the transport mechanism is configured to receive the inspection target panel that is carried from the outside. -5- (3) 1307134 plate receiving portion; close to and separate from the inspection target plate received by the plate receiving portion plate, and abutting the peripheral portion to provide a pair or plural for supporting the upper surface of the detecting plate a pair of plate clamps and one of the pair of plate clamps in the state in which the one plate clamp is in contact with the peripheral edge portion of the image plate, and the one plate clamp is clamped to the periphery The direction of the portion is biased, and the buffer mechanism for releasing the biasing force is first released before the pair of clamps are separated. According to the above configuration, when the positioning mechanism receives the support of the inspection target plate, the buffer mechanism biases the plate clamp that is in contact with the inspection target plate so as not to be a pressing force equal to or larger than the setting target. When the plate clamps are separated from the inspection target plate, the spring pressure of the buffer mechanism toward the plate clamp is removed. The buffer mechanism includes means for biasing the one plate clamp in a direction in which the pair of clamps approach each other, and pressing the one plate that is biased by the means in a direction opposite to a direction in which the biasing direction is opposite thereto Clamps, to limit the above-mentioned restrictions on the elastic pressure of the regular bomb. According to the above configuration, when the above-described inspection is supported by the plate clamp, the elastic means often presses the plate clamp, and the image plate is not supported by the pressing force of the setting 値 or more. Further, when each of the plate clamps is separated from the inspection target plate, the restriction means previously restricts the spring pressure of the above-described conventional elastic means to the spring pressure of the plate clamp. Then, each of the plate clamps is separated from the inspection target plate and transferred to the conveyance unit. The peripheral part of the inspection object is configured to check the front plate of the front plate and the front edge of the plate is pressed against the front plate, and the plate is inspected by the normal spring pressure and pressure device means, and the above inspection is performed. (4) 1307134 As described above, according to the present invention, the following effects can be attained. The above-mentioned cushioning mechanism "supports the above-mentioned plate clamps that are in contact with the peripheral edge portion of the inspection target plate by the biasing force, so that the above-mentioned inspection target plate can be surely supported, and the above-mentioned inspection target plate can be surely supported. Check the target plate for deflection or breakage. When the plate clamps are separated from the inspection target plate, the spring pressure of the plate pin is released by the buffer mechanism. Therefore, the plate clamp biases the inspection target plate to prevent the inspection target plate from being displaced. When the above-mentioned inspection target plate is supported by the above-mentioned plate holder, the spring pressing means often presses the plate clamp, and the inspection target plate is not supported by the pressing force of the setting 値 or more. Therefore, the inspection target plate does not flex. Or damage, and the above-mentioned inspection target plate can be supported by the above-mentioned plate clamps safely and surely. Further, when the plate clamps are separated from the inspection target plate, the biasing force of the above-described constant biasing means is restricted by the above-described restriction means to release the biasing force against the plate clamp. Then, when the plate clamps are separated from the inspection target plate and are transported to the conveyance unit, the deflection of the inspection target plate is prevented by the elastic pressure of the normal elastic means. [Embodiment] Hereinafter, a lighting inspection device according to an embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view showing a position locating mechanism of a lighting inspection device according to an embodiment of the present invention, and Fig. 2 is a point (5) of an embodiment of the present invention. (5) 1307134 Front view of a lamp inspection device, Fig. 3 4 is a front cross-sectional view of an inspection unit of a lighting inspection apparatus according to an embodiment of the present invention, and FIG. 5 is a side view of an embodiment of the present invention. FIG. 6 is a schematic side cross-sectional view of the inspection unit of the lighting inspection apparatus according to the embodiment of the present invention, and FIG. 7 is a lighting inspection of the embodiment of the present invention. 8 is a perspective view of a position locating mechanism of a lighting inspection device according to an embodiment of the present invention, and FIG. 9 is a position locating mechanism of a lighting inspection device according to an embodiment of the present invention. Fig. 10 is a front view of a position locating mechanism of a lighting inspection device according to an embodiment of the present invention, and Fig. 1 is a side view of a position locating mechanism of a lighting inspection device according to an embodiment of the present invention. 1 is a side view of the operation of the position positioning mechanism of the lighting inspection device according to the embodiment of the present invention, and FIG. 13 is a view showing the positional positioning mechanism of the lighting inspection device according to the embodiment of the present invention. Side view of the action. The lighting inspection device 1 1 of the present embodiment is mainly composed of a conveyance unit 12, an inspection unit 13, and a position positioning mechanism 14 as shown in Figs. 1 to 4 . The transport unit 12 receives the liquid crystal panel P loaded from the outside from the position aligning mechanism 14, transports it to the inspection unit 13, and transports the liquid crystal panel P after the inspection to the position locating mechanism 14. As shown in Figs. 2 and 3, the transport unit 1 2 is mainly composed of a transport arm 15 and a drive mechanism 16. The carrying arm 15 is used to support the portion of the liquid crystal panel P. The transport -8-(6) 1307134 arm 15 is composed of an arm portion 2A, a clamp arm 21, a rail portion 22, and a plate clamp 23. The arm portion 20 is disposed on the upper and lower positions of the supported liquid crystal panel p to support the member of the liquid crystal panel P. The arm portion 20 is supported by the drive mechanism 16 so as to be movable up and down, and is relatively close to the upper and lower end portions of the liquid crystal panel P. The clamp arm 21 is used to support the member of the liquid crystal panel p. The clamp arm 21 is composed of the upper and lower clamp arms 21A and the right and left clamp arms φ 21B, and supports the liquid crystal panel P from the top, bottom, left, and right. The upper and lower clamp arms 2 1 A grasp the liquid crystal panel P from above and below by the vertical movement of the arm portion 20. The lower upper and lower clamp arms 21A are fixed to the arm portion 20. The right and left gripper arms 21B are moved to the left and right by the function of the rail portion 22, which will be described later, of the arm portion 20, and the liquid crystal panel p is grasped from the right and left. The rail portion 22 is a member for moving left and right and supporting the right and left gripper arms 21B of the gripper arm 21. The left and right clamp arms 21B are provided with a guide portion 21C that is slidably supported by the rail portion 22. The Φ plate clamp 23 is a member for directly abutting against the end of the liquid crystal panel p. The plate clamp 23 is constructed of a resilient synthetic resin or the like and elastically supports the periphery of the liquid crystal panel P. The drive mechanism 16 is a device that moves the liquid crystal panel P back and forth between the transport unit 12 and the inspection unit 13 while supporting the liquid crystal panel P by the transport arm 15. The drive mechanism 16 is mainly composed of an X-direction moving mechanism unit 25 and a Y-direction moving mechanism unit 26. The X-direction moving mechanism unit 25 is a mechanism that moves the transport arm 15 back and forth between the transport unit 12 and the inspection unit 13. The X-direction moving mechanism unit 25 main -9 - (7) (7) 1307134 is composed of a rail portion 28, an X-axis drive motor 29, a ball screw 30, and a nut (not shown). The rail portion 28 is used to support the transport unit 12 and the inspection unit! A member that moves the arm 15 back and forth between the three. The slide plate 33, which will be described later, is supported by the rail portion 28 so as to be movable back and forth. The X-axis drive motor 29 is coupled to the ball screw 30 and is used to rotate the motor of the ball screw 3 〇. The ball screw 30 is a member that directly moves the slide plate 3 3 back and forth. The ball screw 3 is supported by a bearing (not shown) and is disposed in the lateral direction of the forward and backward movement direction of the carrying arm 15. The nut is a member that moves back and forth by the rotation of the ball screw 3 〇. The nut is embedded in the ball screw 30, and the ball screw 30 is driven back and forth by the X-axis drive motor 29 to move back and forth. The nut is fixed to the slide plate 3 3 ' and the slide plate 3 3 is moved back and forth by the rotation of the ball screw 3 〇. The Y-direction moving mechanism unit 26 is a mechanism that supports the arm portion 20 of the carrying arm 15 so as to be movable up and down. The Y-direction moving mechanism portion 26 is mainly composed of a slide plate 33, a rail portion 34, a Y-axis drive motor 35, a ball screw 36, and a nut (not shown). The slide plate 33 is a member for supporting the arm 15 to move back and forth. Guides (not shown) are provided on the back surface of the slide plate 33 on the upper and lower sides thereof. The guide system is attached to the rail portion 28 of the X-direction moving mechanism portion 25, whereby the slide plate 33 can be provided by the rail portion 28. Moving back and forth is supported in the X-axis direction. The rail portion 34 is a rail for guiding the up and down movement of the arm portion 20 of the carrying arm 15. The rail portion 34 is mounted on the surface of the slide plate 33. A guide portion 40 is attached to the rail portion 34 at 10- (8) 1307134. The guide portion 40 is provided in the rail portion 34, and supports the arm portion above and below the carrying arm 15 respectively. 20 = The Y-axis driving motor 35 is a motor for rotating the ball screw 36. The Y-axis drive motor 35 rotates the ball screw 36 when the arm portions 20 above and below the transport arm 15 are separated from each other. The ball screw 36 is a member that directly closes a nut (not shown) to a separate member. The ball screw 36 is attached to the upper half and the lower half so that the screw grooves are spirally opposite to each other and connected by a coupler 41. The upper end portion of the ball screw 36 is rotatably supported by the bearing 42. Then, the nut is provided on the upper and lower sides of the ball screw 36, and when the ball screw 36 is rotated toward one side, the nuts 37 are close to each other, and when the nut 37 is rotated in the opposite direction, the nuts are separated from each other. The nut is integrally provided with the guide portion 40, and is integrally provided with the arm portion 20 via the guide portion 40. When the nut is nearly separated by the ball screw 36, the guide portion 40 is directly separated. Then, the upper and lower arm portions 20 of the transport arm 15 are indirectly separated. Further, by the rotation of the ball screw 36, the guide portion 40 is moved up and down, and the arm portion 20 is moved upward and downward. The inspection unit 13 is a device for supporting the liquid crystal panel P and performing a lighting test. As shown in Fig. 2 and Fig. 4 to Fig. 6, the inspection unit 13 mainly includes an XYZ 0 mounting table 43, a backlight 44, a table 45, and a detector 46. The ΧΥΖ0 mounting table 43 supports the backlight 44 and the table 45 on the front side thereof, and aligns the -11 - (9) 1307134 aligning stage mounted on the liquid crystal panel P of the table 45. The ΧΥΖ0 mounting table 43 is a device that moves the table 45 in the Z-axis direction while receiving the liquid crystal panel P while adjusting the XYZ-axis direction of the table 45 supporting the liquid crystal panel P and adjusting the θ rotation direction. . A drive motor (not shown) that moves the table 45 in the XY-axis direction and a drive motor (not shown) that rotates the table 45 in the Θ-rotation direction are provided in the XYZ 0 mount 43; A drive motor (not shown) that moves the stage 45 in the Z-axis direction. Each of the drive motors is connected to a control means (not shown), and the liquid crystal panel is correctly positioned by the control means. The backlight 44 is used to illuminate the member of the liquid crystal panel P supported on the stage 45 from the back side. The backlight 44 is composed of a casing 56 and a lamp 57 housed in the casing 56. The stage 45 is for supporting the member of the liquid crystal panel p of the inspection target board. A diffusion plate 60 is attached to the opening 45A of the table 45. The detector 46 is a device that contacts the terminals of the liquid crystal panel p to inspect the liquid crystal panel P. The probe 46 is composed of a probe base 67, a probe block 68, a camera 69, and a probe stage 70. The probe base 67 is used to support the probe block 68 and the components of the camera 69. The probe base 67 is fixed to the frame (not shown) via the probe stage 70 in a state where it is desired to be placed on the liquid crystal panel P of the table 45. The probe block 6.8 is fixed to the probe base 67 in a state where the probe 7 1 at the front end thereof is desired in the liquid crystal panel P. The camera 69 is a phase -12-(10) (10) 1307134 machine that performs alignment of the liquid crystal panel p while viewing the mark ' provided on the liquid crystal panel P'. The probe stage 70 supports the probe base 67 in a state of being fixed to the frame. The position locating mechanism 14 receives a liquid crystal panel P that is carried in a horizontal state from the outside, and is positioned and supported, and then rotated, tilted, and sent to the above-described conveyance unit 12. As shown in FIG. 1 and FIG. 7 to FIG. 1 , the position positioning mechanism 14 is composed of a plate receiving mechanism portion 81, a position positioning support mechanism portion 82, a rotating mechanism portion 83, a tilt mechanism portion 84, and a lifting machine. The mechanism unit 85 is configured. The plate receiving mechanism unit 81 receives a mechanism portion of the liquid crystal panel P that is carried in a horizontal state from the outside. The plate receiving mechanism portion 81 is configured by fixing the base end portion thereof to the upper substrate 1 15 of the rotating mechanism portion 8 to be described later, and arranging the four supporting rods 8 8 radially arranged in the horizontal direction; And a plate receiving portion 89 which is provided in each of the support bars 8 8 in the vertical direction. The board receiving portion 8.9 is directly in contact with the lower surface side of the liquid crystal panel P, and the member for supporting the liquid crystal panel P is made of a flexible member such as synthetic resin so as not to damage the liquid crystal panel P. The position positioning support mechanism portion 82 is positioned at a position and supported by the mechanism portion on the liquid crystal panel P of the board receiving mechanism portion 81. The position positioning support mechanism portion 82 is composed of a plate clamp 91, a moving device 92, and a buffer mechanism 93. The plate clamp 91 abuts against the peripheral edge portion of the liquid crystal panel P, and positions the member supported on the liquid crystal panel P at a position. The plate clamps 91 are paired, and the groups of -13-(11) 1307134 are set in the direction perpendicular to each other (the XY-axis direction in the horizontal state). Each of the plate clamps 91 is configured by arranging a cylindrical or cylindrical synthetic resin in the vertical direction. Each of the plate clamps 91 constituting the pair is provided in one of the two, and one on the other. The pair of plate clamps 91 are relatively close to each other by the moving device 92 and the peripheral portion of the liquid crystal panel P. The mobile device 92 supports the plate clamp 91 and approaches the separate device. The moving device 92 is provided in the X-axis direction and the γ-axis direction in the figure, respectively. The moving device 92 in the X-axis direction also has the same configuration as the moving device in the γ-axis direction. Specifically, the moving device 92 is constituted by a rail 96 guiding 97' guide plate 98, a joint member 99, a lock 100, a sub-gear 1 and a drive motor 102. The base end portions of the rails 96 are fixed to the upper substrate 1 15 and are respectively provided on the support plates 1 〇 4 which are disposed on both sides in the XY-axis direction. The guide 97 is slidably mounted to each of the rails 96. The guide plate 98 is integrally provided to the upper guide 97. The connecting member 99 is provided so that the upper end portion thereof is integrally provided in the guide plate (I is extended downward). The lock 100 is provided in parallel with the above-described rail. The sub-gear 110 is attached to each of the locks extending from both sides. i 00 is engaged with the side and the lower side thereof, and simultaneously moves each other 100 in the opposite direction. The rotation shaft of the drive motor 102 is coupled with the sub-gear 1 described above to rotationally drive the sub-gear 1 0 1. Then, the drive motor is driven When the 〇2 is rotated to one side, the plate clamps 9 1 are brought closer to each other via the locks 100, and when the drive motor 102 is rotated in the reverse direction, the clamps 9 1 are separated from each other. With a certain pressing force, the side of the board constituting the above pair is deducted from the side of the board, and the side of the board is clamped to the side of the board clamp - 14 - (12) 1307134 tongs 9 1 , toward the other side of the board clamp At the same time as the 91 side is pressed, the device for releasing the elastic pressure thereof, that is, one of the plate clamps 91 that support the pair, is supported by the plate clamp 91 of the one side of the liquid crystal panel p. In the state of being connected, the one is made with a certain elastic pressure Plate clamp 9 1 • While the other side plate clamp 9 1 is biased, the liquid crystal panel • P is transported to the transport unit 12, and before the pair of plate clamps 91 are separated, The buffer mechanism 93 is composed of: a φ sliding mechanism 1 〇 5, a constant urging means 1 0 6 , and a restriction means 1 〇 7. The sliding mechanism 105 is composed of: a buffer track 11 〇, a buffer guide The ill and the buffer guide plate 11 are formed. The buffer track 110 is mounted in the same direction as the track 96 of the moving device 92, and is mounted on the guide plate 98 of the moving device 92. The buffer guide 111 is slidably mounted on The buffer guide plate 112 is integrally provided with the buffer guide ill. Then, the plate clamp 91 is mounted on the buffer guide plate 112. • The frequent biasing means 106 is attached to each of the plate clamps constituting the pair The means for constantly squeezing the one of the plate clamps 9 1 in the direction in which the tongs 91 approach each other. The conventional urging means 106 is specifically constituted by a spring. The one of the conventional urging means 106 is respectively mounted on the buffer guide.丨丨 2 The other side is attached to the side of the guide plate 98 of the moving device 92, and the one plate clamp 91 is biased toward the other plate clamp 91 side. The characteristic (elastic pressure) of the conventional elastic means 1 〇 6 is set at The most suitable 相 is matched with the size and the like of the above-mentioned liquid crystal panel p. The restriction means 07 is pressed in the opposite direction to the direction of the biasing force, and is -15-(13) (13) 1307134. The above-mentioned one plate clamp 9 1 is biased to limit the elastic pressure of the conventional elastic means 106. The restricting means 107 is specifically constituted by a cylinder, and the piston shaft 108 of the cylinder abuts against the buffer guide plate 112 of the slide mechanism 105 to press the buffer guide plate 112. The restricting means 107 is disposed inside the buffer guiding plate 112 (the other side of the plate clamp 9 1), and the piston shaft 108 limits the above-mentioned constant spring pressure by pressing the buffer guiding plate 1 1 2 Means 1 06 elastic pressure. The rotation mechanism portion 8.3 is a mechanism for supporting the above-described plate receiving mechanism portion 81 and the position positioning support mechanism portion 82 to rotate. The rotation mechanism unit 83 is composed of an upper substrate 1 15 and a lower substrate 1 16 and a drive motor 1 17 that rotates the upper substrate 1 15 and the lower substrate 1 16 . The upper substrate 115 is for supporting the plate receiving mechanism portion 81 and the position positioning supporting mechanism portion 8 2 . The upper substrate 1 15 is attached to the lower substrate 116 via four pillars 1 1 8 . The lower substrate 116 is integrally fixed to the rotating shaft of the drive motor 117. Thereby, the above-mentioned board receiving mechanism portion 81 and the position and position support are supported by the above-described upper substrate 1 15 and lower substrate 1 1 6 by rotating only the driving motor 1 1 7 ' at a set angle. The liquid crystal panel P supported by the mechanism unit 82. The rotating mechanism portion 83 is integrally attached to the elevating mechanism portion 85. The tilting mechanism portion 84 is for supporting and tilting the mechanism of the rotating mechanism portion 83 and the lifting mechanism portion 85 which are integrally provided in a vertical state. The tilt mechanism portion 84 is composed of a substrate 120, a support post 121, a rotation support shaft 122, a drive motor 123, and a reduction gear 124. -16- (14) 1307134 The substrate 12 is used to support the plate of the entire device. Pillar 1: The above-described rotating mechanism portion 83 and the member of the lift 85 are integrally supported. The pillars 121 are provided in the substrate 120 in a predetermined setting. The rotation support shaft 122 is disposed across the two pillars 121. The rotary portion 83 and the elevating mechanism portion 85 are rotatably attached to the rotation support shaft 122. The drive motor 123 is coupled to the output shaft of the reduction gear 124 and the rotation support shaft 122. The gear is coupled to the rotation support shaft 122 to reduce the rotation of the drive motor 1 2 3, and the plate receiving mechanism portion 8 1 is indirectly The position positioning support mechanism unit 82 directly rotates the rotation 83 toward the set angle by the liquid crystal panel P. Thereby, the degree of driving the motor 123 is lowered by the reduction gear 124, and only the rotation support shaft 122 is rotated by a specific angle. The elevating mechanism portion 85 is for lifting the liquid crystal panel p. In other words, the elevating mechanism unit 805 moves the liquid crystal panel P supported by the plate receiving mechanism unit 8.1 and the position locating support mechanism unit toward the surface of the liquid crystal panel P via the rotating mechanism unit. The elevating mechanism portion 85 is composed of fixing plates 13A and 131, a rotation support shaft 132, a nut 133, and a drive motor. The fixing plate 130 is integrally fixed to the above-described rotation support shaft and rotates simultaneously with the rotation support shaft 122. The slide plate 13o is supported by the above fixed plate 130. The above-described rotating mechanism portion 83 is integrally formed with the sliding plate Hi in a sag. Thereby, when the slide is slid in a state of being supported by the fixed plate 130, the 21-series mechanism portion is supported to be spaced apart from each other to provide a swing mechanism. Less . Deceleration of the above-supported mechanism portion rotates the speed drop of the 83, while 82 comes to the vertical sliding plate 134 of the 122, the slidable straight gusset 13 1 in the sliding -17-(15) 1307134 moving plate 1 3 1 of the above The rotating mechanism portion 836 slides integrally. The rotation support shaft 132 is a member that slides the slide plates 131 1 30 relative to each other. The rotation supports the sliding direction of the shaft 1 3 2 of the movable plate 131, and is rotatably supported; *. 13〇. The nut 133 is fixed to the slide plate] to the rotation support shaft 132. Thereby, the shaft φ of the nut 133 toward the rotation support shaft 132 by the support shaft 132 is coupled to the rotation support shaft 132 by the shaft motor 134 facing the rotation support shaft 132, and the shaft 1 32 is rotated. [Operation] The lighting inspection device 1 1 configured as described above is used. The operation of the lighting inspection device 1 1 is as follows.
# 收納複數片液晶面板P的卡匣（未圖示 點燈檢查裝置11的附近，機械手臂（未圖 匣，將液晶面板P以水平狀態取出，並搬入 置1 1內D 在點燈檢查裝置11內中，首先位置定亡 械手臂接受液晶面板P。此時，液晶面板P 定位機構1 4的板接收機構部8 1。具體而言 板接收部8 9上。此時，位置定位支持機構吾 91藉由移動裝置92彼此分離。藉此，機械 與上述固定板 係朝向上述滑 E上述固定板 3 1，並且螺固 1 3 2的旋轉， 向移動，上述 向滑動。驅動 使該轉動支持 如下的方式動 )，係設置在 示）從上述卡 到點燈檢查裝 [機構1 4從機 被載置於位置 ，載置在4個 5 8 2的板夾鉗 手臂不須將液 -18- (16) (16)1307134 晶面板P與板夾鉗91接觸，而載置於4個板接收部89 上。 然後’在位置定位支持機構部8 2進行液晶面板P的 定位、及支持。具體而S，係驅動移動裝置92的驅動電 動機102’而將副齒輪101朝向設定方向僅旋轉設定角 度，僅使鎖100朝向設定方向移動設定量。在位置定位 時，使鎖100僅朝向彼此接近的方向移動設定量。此時， 在緩衝機構93中，緩衝導引板1 12以經常彈壓手段106 彈壓，而成爲與限制手段1 07的活塞軸1 〇8抵接的狀態。 在該狀態下，當上述鎖1〇〇朝向彼此接近的方向移動時， 首先如第12圖（A)所示，板夾鉗91與液晶面板P的周 緣部抵接。再者，當上述鎖1〇〇僅朝向彼此接近的方向移 動設定量時，如第12圖（B)所示，緩衝軌道110、及限 制手段107更被推入，使緩衝導引板1 12與限制手段107 的活塞軸1〇8分離，經常彈壓手段106將板夾鉗91按壓 在液晶面板P的周緣部。此時，藉著正確調整上述鎖1 00 的移動量，而調整經常彈壓手段1 06的身長量，而調整板 夾鉗9 1對於液晶面板P之周緣部的按壓力。 又，沒有設置緩衝機構93的另一方的板夾鉗9 1，由 於沒有在經常彈壓手段1 〇 6偏移，因此該另一方的板夾鉗 9 1朝向定位的基準位置移動而調整。# Storing a plurality of cassettes of the liquid crystal panel P (not shown in the vicinity of the lighting inspection device 11 , the robot arm (not shown, the liquid crystal panel P is taken out in a horizontal state, and is placed in the 1 1 D in the lighting inspection device In the middle of the step 11, the positional arm is first received by the liquid crystal panel P. At this time, the panel receiving mechanism portion 81 of the liquid crystal panel P positioning mechanism 14 is specifically the plate receiving portion 89. At this time, the position positioning support mechanism The 91 is separated from each other by the moving device 92. Thereby, the machine and the fixing plate are oriented toward the sliding plate E, and the rotation of the screw 13 is swung to move, and the direction is slid. The driving supports the rotation. The following way to move), is set in the display) from the above card to the lighting inspection device [mechanism 1 4 slave machine is placed in position, placed on 4 5 8 2 plate clamp arm does not need to liquid -18 - (16) (16) 1307134 The crystal panel P is in contact with the plate clamp 91 and is placed on the four plate receiving portions 89. Then, the position and support mechanism unit 8 2 performs positioning and support of the liquid crystal panel P. Specifically, S drives the drive motor 102' of the moving device 92 to rotate the sub-gear 101 only by a set angle toward the set direction, and only moves the lock 100 by a set amount toward the set direction. At the time of positional positioning, the locks 100 are moved by a set amount only in a direction in which they approach each other. At this time, in the buffer mechanism 93, the buffer guide plate 1 12 is biased by the constant biasing means 106, and is brought into contact with the piston shaft 1 〇 8 of the restriction means 107. In this state, when the locks 1 are moved in the direction in which they approach each other, first, as shown in Fig. 12(A), the plate clamp 91 abuts against the peripheral edge portion of the liquid crystal panel P. Further, when the locks 1 are moved by a set amount only in a direction in which they approach each other, as shown in Fig. 12(B), the buffer rail 110 and the restricting means 107 are further pushed in, so that the buffer guide plate 1 12 is pushed. Separated from the piston shaft 1〇8 of the restriction means 107, the elastic means 106 presses the plate clamp 91 against the peripheral edge portion of the liquid crystal panel P. At this time, by appropriately adjusting the amount of movement of the lock 100, the amount of the body of the constant biasing means 106 is adjusted, and the pressing force of the plate clamp 9 1 to the peripheral portion of the liquid crystal panel P is adjusted. Further, since the other plate clamp 9 1 which is not provided with the buffer mechanism 93 is not displaced by the constant biasing means 1 〇 6, the other plate clamp 9 1 is moved toward the positioning reference position and adjusted.
藉此，液晶面板P係藉著與另一方的板夾鉗91抵 接，而進行其之位置定位，一方的板夾鉗91抵接，並藉 由經常彈壓手段1 06以設定按壓力彈壓，而使液晶面板P -19* (17) (17)1307134 不偏移，而加以支持。 在該狀態下，藉由旋轉機構部8 3，與上述板接收機構 部81、及位置定位支持機構部82 —起90度旋轉液晶面板 P。 然後，在傾斜機構部8 4與上述板接收機構部8 1、位 置定位支持機構部82、及旋轉機構部83, —起轉動液晶 面板P至設定角度爲止（第4圖的檢查部13的液晶面板 P的傾斜角）。 再者，以升降機構部85與上述板接收機構部81、位 置定位支持機構部82、旋轉機構部83、及傾斜機構部84 同時使液晶面板P，朝向與其表面垂直的方向的上方移 動，而搬運到搬運部12。 此時，在緩衝機構9 3中，限制手段1 0 7的活塞軸1 0 8 延伸出，從第1 3圖（A )的狀態，如第1 3圖（B )般按壓 緩衝導引板1 1 2，而使板夾紺9 1與液晶面板P的周緣部 分離。藉此，解除經常彈壓手段106的液晶面板P的彈 壓，而防止液晶面板P偏移。此時，另一方的板夾鉗91 由於不會從設定位置移動，因此液晶面板p在與該另一方 的板夾鉗9 1抵接的狀態下，維持在設定位置。 在該狀態下，搬運部12的搬運手臂15接受液晶面板 P而予以支持。然後，以驅動機構16將搬運手臂15朝向 檢查部13側移動，而將液晶面板P載置於工作台45上。 在檢查部13中’以XYZ 0載置台43進行被支持在工 作台45的液晶面板P的定位。具體而言’整合液晶面板 -20- (18) 1307134 P的端子、和探測器46的探針71而彼此接觸，更點亮背 光44而進行導通試驗。 在檢查結束之後，搬運部12從工作台45接受液晶面 板P，並回到位置定位機構1 4。 在位置定位機構14中，與上述相同，定位並支持液 晶面板P，而返回水平旋轉90度，並傳送到外部的機械 手臂。 〔效果〕 如以上所述，當位置定位機構1 4接受液晶面板P而 位置定位支持時，上述緩衝機構93的經常彈壓手段106， 彈壓與上述液晶面板P的周緣部抵接的上述板夾鉗91， 而不會成爲設定値以上的按壓力來支持，並且使各板夾鉗 91與上述液晶面板P分離時，在此之前，由於先使上述 緩衝機構93的限制手段1 07解除對於上述板夾鉗9 1的彈 φ 壓，故可確實支持上述液晶面板P，並可防止在搬運途中 液晶面板p偏移。再者，可防止上述液晶面板p撓曲或破 損。 〔變形例〕 在上述實施形態中，雖然以氣缸構成上述緩衝機構93 的限制手段107，由於限制手段1〇7可按壓緩衝導引板 H2，因此亦可爲油壓氣缸等其他構成。 又’在上述實施形態中，雖亦可以彈簧構成經常彈壓 -21 - (19) 1307134 手段106’而以設定按壓力將板夾鉗91按壓在液晶面板P 的周緣部之構成，但亦可以空氣彈簧或橡膠等其他彈壓手 段來構成。 - 再者，在上述實施形態中’雖以使液晶面板P傾斜而 • 檢查的點燈檢查裝置1 1爲基礎進行說明，但亦可在水平 . 狀態、垂直狀態等所檢查的其他檢查裝置。而可適用在具 備位置定位機構14之全部的裝置中。 【圖式簡單說明】 第1圖係本發明的實施形態的點燈檢查裝置的位置定 位機構之斜視圖。 第2圖係本發明的實施形態的點燈檢查裝置的正面 圖。 第3圖係本發明的實施形態的點燈檢查裝置的搬運部 的正面圖。 φ 第4圖係本發明的實施形態的點燈檢查裝置的檢查部 的側面剖面圖。 第5圖係本發明的實施形態的點燈檢查裝置的檢查部 的槪略正面圖。 第6圖係本發明的實施形態的點燈檢查裝置的檢查部 的槪略側面剖面圖。 第7圖係本發明的實施形態的點燈檢查裝置的位置定 位機構的側面圖。 第8圖係本發明的實施形態的點燈檢查裝置的位置定 -22- (20) 1307134 位機構的斜視圖。 第9圖係本發明的實施形態的點燈檢查裝置的位置定 位機構的平面圖。 • 第1 〇圖係本發明的實施形態的點燈檢查裝置的位置 . 定位機構的正面圖。 • 第11圖係本發明的實施形態的點燈檢查裝置的位置 定位機構的側面圖。 Φ 第12圖係本發明的實施形態的點燈檢查裝置的位置 定位機構之夾鉗時的動作之側面圖。 第1 3圖係本發明的實施形態的點燈檢查裝置的位置 定位機構之開放時的動作之側面圖。 【主要元件符號說明】 1 2 :搬運部 1 3 :檢查部 φ 1 4 :位置定位機構 _ 11 :點燈檢查裝置 15 :搬運手臂 1 6 :驅動機構 20 :手臂部 21 :夾鉗臂 22 :軌道部 2 1 A :上下夾鉗臂 21B :左右夾鉗臂 -23- (21)1307134 23 :板夾鉗 25: X方向移動機構部 26: Y方向移動機構部 28 :軌道部 29: X軸驅動電動機 3 0 :球型螺絲 3 3 :滑動板Thereby, the liquid crystal panel P is positioned in contact with the other plate clamp 91, and the position of the liquid crystal panel P is abutted, and the one plate clamp 91 abuts, and is biased by the constant pressing means 106 at a set pressing force. The LCD panel P -19* (17) (17) 1307134 is supported without being offset. In this state, the liquid crystal panel P is rotated by 90 degrees with the plate receiving mechanism portion 81 and the position positioning support mechanism portion 82 by the rotating mechanism portion 83. Then, the tilt mechanism portion 84 and the plate receiving mechanism portion 81, the position positioning support mechanism portion 82, and the rotating mechanism portion 83 rotate the liquid crystal panel P to a set angle (the liquid crystal of the inspection portion 13 of Fig. 4) The tilt angle of the panel P). Further, the lifting mechanism unit 85 and the plate receiving mechanism unit 81, the position positioning support mechanism unit 82, the rotation mechanism unit 83, and the tilt mechanism unit 84 simultaneously move the liquid crystal panel P upward in a direction perpendicular to the surface thereof. Transfer to the transport unit 12. At this time, in the buffer mechanism 913, the piston shaft 1 0 8 of the restriction means 107 extends, and from the state of the first figure (A), the buffer guide plate 1 is pressed as in the first figure (B). 1 2, the plate clamp 9 1 is separated from the peripheral portion of the liquid crystal panel P. Thereby, the elastic pressure of the liquid crystal panel P of the normal biasing means 106 is released, and the liquid crystal panel P is prevented from shifting. At this time, since the other plate clamp 91 does not move from the set position, the liquid crystal panel p is maintained at the set position while being in contact with the other plate clamp 9 1 . In this state, the transport arm 15 of the transport unit 12 receives the liquid crystal panel P and supports it. Then, the transport mechanism 15 is moved toward the inspection portion 13 by the drive mechanism 16, and the liquid crystal panel P is placed on the table 45. In the inspection unit 13, the positioning of the liquid crystal panel P supported by the stage 45 is performed by the XYZ 0 mounting table 43. Specifically, the terminals of the liquid crystal panel -20-(18) 1307134 P and the probe 71 of the detector 46 were brought into contact with each other, and the backlight 44 was further illuminated to conduct a conduction test. After the end of the inspection, the transport unit 12 receives the liquid crystal panel P from the table 45 and returns to the position locating mechanism 14. In the position locating mechanism 14, as in the above, the liquid crystal panel P is positioned and supported, and is returned to the horizontal rotation by 90 degrees and transmitted to the external mechanical arm. [Effects] As described above, when the position positioning mechanism 14 receives the liquid crystal panel P and is positioned and supported, the conventional biasing means 106 of the buffer mechanism 93 biases the plate clamp that abuts against the peripheral edge portion of the liquid crystal panel P. 91, and when the plate clamp 91 is not separated from the above-mentioned liquid crystal panel P, the restriction means 107 of the above-described buffer mechanism 93 is released from the above-mentioned board. Since the clamp φ 9 is pressed, the liquid crystal panel P can be surely supported, and the liquid crystal panel p can be prevented from shifting during transportation. Further, the liquid crystal panel p can be prevented from being bent or broken. [Modification] In the above-described embodiment, the restriction means 107 of the buffer mechanism 93 is constituted by a cylinder, and the restriction means 1A7 can press the buffer guide plate H2. Therefore, other configurations such as a hydraulic cylinder may be employed. Further, in the above-described embodiment, the spring clamp may be configured to constantly press the -21 (19) 1307134 means 106', and the plate clamp 91 may be pressed against the peripheral edge portion of the liquid crystal panel P by a set pressing force, but air may be used. It is composed of spring or rubber and other elastic means. Further, in the above-described embodiment, the lighting inspection device 1 1 that checks the liquid crystal panel P for tilting is described. However, other inspection devices that are inspected in a horizontal state or a vertical state may be used. It can be applied to devices having all of the position locating mechanisms 14. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a position locating mechanism of a lighting inspection device according to an embodiment of the present invention. Fig. 2 is a front view of a lighting inspection apparatus according to an embodiment of the present invention. Fig. 3 is a front elevational view showing the conveying unit of the lighting inspection device according to the embodiment of the present invention. φ Fig. 4 is a side cross-sectional view showing an inspection unit of the lighting inspection device according to the embodiment of the present invention. Fig. 5 is a schematic front view showing an inspection unit of the lighting inspection device according to the embodiment of the present invention. Fig. 6 is a schematic side cross-sectional view showing an inspection portion of the lighting inspection device according to the embodiment of the present invention. Fig. 7 is a side view showing a position locating mechanism of the lighting inspection device according to the embodiment of the present invention. Fig. 8 is a perspective view showing the position of the lighting inspection apparatus according to the embodiment of the present invention -22-(20) 1307134. Fig. 9 is a plan view showing a position locating mechanism of the lighting inspection apparatus according to the embodiment of the present invention. • The first diagram is the position of the lighting inspection apparatus according to the embodiment of the present invention. The front view of the positioning mechanism. Fig. 11 is a side view showing a position locating mechanism of the lighting inspection device according to the embodiment of the present invention. Φ Fig. 12 is a side view showing the operation of the lighting inspection device according to the embodiment of the present invention when the positioning mechanism is clamped. Fig. 1 is a side view showing the operation of the lighting inspection device according to the embodiment of the present invention when the positioning mechanism is opened. [Description of main component symbols] 1 2 : Transport unit 1 3 : Inspection unit φ 1 4 : Positioning mechanism _ 11 : Lighting inspection device 15 : Transport arm 1 6 : Drive mechanism 20 : Arm portion 21 : Clamp arm 22 : Track portion 2 1 A : Upper and lower clamp arms 21B : Left and right clamp arms -23 - ( 21 ) 1307134 23 : Plate clamp 25 : X-direction movement mechanism portion 26 : Y-direction movement mechanism portion 28 : Track portion 29 : X-axis Drive motor 3 0 : ball screw 3 3 : slide plate
35: Y軸驅動電動機 3 6 :球型螺絲 3 4 :軌道部 40、2 1 C :導引部 4 1 :耦合器 42 :軸承 43 : XYZ 0載置台 44 :背光35: Y-axis drive motor 3 6 : Spherical screw 3 4 : Track section 40, 2 1 C : Guide part 4 1 : Coupler 42 : Bearing 43 : XYZ 0 mount 44 : Backlight
4 5 :工作台 45A :開口部 46 :探測器 56 :筐體 57 :燈 6 〇 :擴散板 6 7 :探針基座 6 8 :探針塊 69 :相機 -24- (22) (22)1307134 7 Ο :探針載台 7 1 :探針 8 1 :板接收機構部 82 :位置定位支持機構部 8 8 :支持棒 8 9 :板接收部 9 1 :板夾鉗 92 :移動裝置 96 :軌道 97 :導引 98 :導引板 99 :連結構件 100 ：鎖 102 :驅動電動機 1 0 4 :支持板 8 3 :旋轉機構部 84 :傾斜機構部 8 5 :升降機構部 93 :緩衝機構 1 〇 1 :副齒輪 105 :滑動機構 106 :經常彈壓手段 107 :限制手段 110 :緩衝軌道 -25- 1307134 1 1 1 1 1 1 14 5 : Table 45A: Opening 46: Detector 56: Housing 57: Lamp 6 〇: Diffuser 6 7 : Probe base 6 8 : Probe block 69 : Camera-24- (22) (22) 1307134 7 Ο : Probe stage 7 1 : Probe 8 1 : Plate receiving mechanism portion 82 : Position positioning support mechanism portion 8 8 : Support bar 8 9 : Plate receiving portion 9 1 : Plate clamp 92 : Mobile device 96 : Track 97: Guide 98: Guide plate 99: Connection member 100: Lock 102: Drive motor 1 0 4: Support plate 8 3: Rotation mechanism portion 84: Tilt mechanism portion 8 5: Elevation mechanism portion 93: Buffer mechanism 1 〇 1 : sub-gear 105 : sliding mechanism 106 : frequent elastic means 107 : restriction means 110 : buffer track - 25 - 1307134 1 1 1 1 1 1 1
1 P 緩衝導引 緩衝導引板 活塞軸 上側基板 下側基板 驅動電動機 支柱 基板 支柱 轉動支持軸 驅動電動機 減速齒輪 固定板 滑動板 轉動支持軸 3 3 :螺帽 驅動電動機 晶面板 -26-1 P Buffer Guide Buffer Guide Plate Piston Shaft Upper Substrate Lower Substrate Drive Motor Pillar Base Plate Pillar Rotary Support Shaft Drive Motor Reduction Gear Fixing Plate Sliding Plate Rotating Support Shaft 3 3 : Nut Drive Motor Crystal Panel -26-