JP2007139516A - Lighting inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a liquid crystal panel P from being displaced or damaged in process of conveyance to an inspection part. <P>SOLUTION: This lighting inspection device 11 is for performing lighting inspection on the liquid crystal panel P. The inspection device 11 is equipped with: an inspection part 13 for performing lighting inspection on the crystal panel P in an obliquely supported state; a conveyance part 12 for conveying the crystal panel P to the inspection part 13; and a positioning mechanism 14 for receiving/positioning the crystal panel P conveyed in a horizontal state from the exterior and then transferring it in an inclined state to the conveyance part 12. The positioning mechanism 14 is equipped with: a panel receiver 89 for receiving the crystal panel P while being in contact with a lower surface thereof; a pair or a plurality of pairs of panel clamps 91 for positioning/supporting the crystal panel P while being in contact with peripheral parts thereof; and a buffer mechanism 93 for biasing panel clamps 91 positioned on one side in a direction that presses them against the peripheral part while removing the biasing prior to separating the respective panel clamps 91 therefrom. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a lighting inspection apparatus that carries out a lighting inspection by carrying an inspection object plate conveyed from the outside into the apparatus.

  2. Description of the Related Art A lighting inspection apparatus that performs a lighting inspection by bringing a probe needle into contact with a terminal of a panel (inspection target plate) such as a liquid crystal substrate is generally known. Such a lighting inspection apparatus mainly includes an inspection unit that supports the panel and performs a lighting inspection, a conveyance unit that conveys the panel to the inspection unit, and a positioning device that positions the panel. This example is shown in Patent Document 1 and Patent Document 2.

  The positioning device includes a pair of rollers that are close to and away from each other and a moving mechanism that moves the pair of rollers close to and away from each other. Two pairs of the pair of rollers are provided in the XY axis direction. The pair of rollers are brought into contact with the peripheral edge of the panel by the moving mechanism, whereby the panel is positioned and the panel is supported by the pair of rollers. At this time, when the pair of rollers abuts and supports the peripheral edge of the panel, the rollers are pressed against the panel with a constant pressing force so that the panel is not displaced.

The panel positioned and supported by the positioning device is transferred to the transport unit and transported to the inspection unit for inspection.
JP 2002-373925 A JP 2002-368058 A

  By the way, in the above-described conventional lighting inspection apparatus, when the rollers contact the peripheral edge of the panel and support the panel, the rollers are pressed against the panel with a certain pressing force so that the panel does not shift. However, adjustment of this pressing force is not easy. The pressing force is adjusted by adjusting the moving amount of the elastic roller. However, if the moving amount is slightly deviated from the set value and the pressing force becomes too strong, the panel may be damaged. If the pressing force becomes too weak, the panel may be displaced.

  In particular, when the panel is large and heavy, it is necessary to support the panel with a pressing force having a corresponding strength, so the above phenomenon becomes remarkable. When the panel is large, the panel may be easily bent or damaged even if the pressing force is slightly higher than the reference value. When the panel is heavy, the panel may be easily displaced even if the pressing force is slightly weak. For this reason, there is a problem that it is difficult to safely position the panel.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a lighting inspection apparatus that can safely position and support an inspection object plate.

The lighting inspection apparatus according to the present invention is:


A lighting inspection apparatus for inspecting and inspecting an inspection target plate conveyed from the outside, wherein the inspection target plate is supported obliquely, horizontally or vertically, and inspected for lighting, and the inspection target plate is mounted on the inspection unit. A transport unit for transporting and a positioning mechanism for receiving, positioning, supporting and delivering the inspection target plate carried from the outside to the transport unit, wherein the positioning mechanism receives the inspection target plate carried from the outside. One or more pairs of panel clamps that are supported by the panel receiver and the inspection object plate that is positioned near the peripheral edge of the inspection object plate received by the panel receiver and abutting against the peripheral edge to position the inspection object plate And supporting one of the paired panel clamps with the one panel clamp in contact with the peripheral edge of the inspection target plate. Urges in a direction to press the edge, characterized in that a buffer mechanism for releasing the urging prior to separating the respective panels clamp to be paired.

  With the above configuration, when the positioning mechanism receives and supports the inspection target plate, the buffer mechanism urges the panel clamp that is in contact with the peripheral edge of the inspection target plate, and a pressing force equal to or greater than a set value. Support so as not to become. When each panel clamp is separated from the inspection object plate, the buffer mechanism releases the bias to the panel clamp prior to that.

  The buffer mechanism includes: a constantly urging unit that constantly urges the one panel clamp in a direction in which the paired panel clamps are close to each other; and the one panel clamp that is urged by the constantly urging unit. It is desirable to provide a restricting means for restricting the urging force by the constantly urging means by pressing in the direction opposite to the urging direction.

  With the above configuration, when the inspection object plate is supported by the panel clamp, the constantly urging means always urges the panel clamp to support the inspection object plate so that the pressing force does not exceed a set value. To do. Further, when the panel clamps are separated from the inspection object plate, the urging force by the constantly urging means is restricted by the restricting means prior to that, and the urging to the panel clamp is released. Then, each said panel clamp is spaced apart from the said test object board, and it delivers to the said conveyance part.

  As described above, according to the present invention, the following effects can be obtained.

  Since the buffer mechanism urges the panel clamp that is in contact with the peripheral edge of the inspection target plate so that the pressing force does not exceed a set value, the inspection target plate can be reliably supported. In addition, the inspection object plate can be prevented from being bent or damaged.

  When each panel clamp is separated from the inspection target plate, the buffer mechanism releases the bias to the panel clamp prior to that, so that the panel clamp continues to bias the inspection target plate and the inspection target. It is possible to prevent the plate from shifting.

  When the inspection object plate is supported by the panel clamp, the constantly urging means always urges the panel clamp to support the inspection object plate so as not to have a pressing force exceeding a set value. The board to be inspected can be safely and reliably supported by the panel clamp without the board to be inspected being bent or damaged.

  In addition, when separating each panel clamp from the inspection object plate, the urging force by the constantly urging means is regulated by the regulating means prior to that to release the urging to the panel clamp, When the panel clamps are separated from the inspection target plate and delivered to the transport unit, it is possible to prevent the inspection target plate from being displaced by the urging force of the constantly urging means.

  Hereinafter, a lighting inspection apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. 1 is a perspective view showing a positioning mechanism of a lighting inspection apparatus according to an embodiment of the present invention, FIG. 2 is a front view showing a lighting inspection apparatus according to an embodiment of the present invention, and FIG. 3 is a lighting according to the embodiment of the present invention. FIG. 4 is a side sectional view showing the inspection unit of the lighting inspection device according to the embodiment of the present invention, and FIG. 5 shows the inspection unit of the lighting inspection device according to the embodiment of the present invention. FIG. 6 is a schematic side sectional view showing an inspection unit of the lighting inspection apparatus according to the embodiment of the present invention. FIG. 7 is a side view showing a positioning mechanism of the lighting inspection apparatus according to the embodiment of the present invention. Is a perspective view showing a positioning mechanism of a lighting inspection apparatus according to an embodiment of the present invention, FIG. 9 is a plan view showing a positioning mechanism of a lighting inspection apparatus according to an embodiment of the present invention, and FIG. 10 is according to an embodiment of the present invention. FIG. 11 is a front view showing the positioning mechanism of the lighting inspection device. The side view which shows the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention, FIG. 12 is a side view which shows the operation | movement at the time of clamping of the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention, FIG. It is a side view which shows the operation | movement at the time of open | release of the positioning mechanism of the lighting inspection apparatus which concerns on embodiment.

  As shown in FIGS. 1 to 4, the lighting inspection apparatus 11 according to the present embodiment mainly includes a transport unit 12, an inspection unit 13, and a positioning mechanism 14.

  The transport unit 12 is a device for receiving the liquid crystal panel P carried from the outside from the positioning mechanism 14 and transporting the liquid crystal panel P to the inspection unit 13 and passing the liquid crystal panel P after the inspection to the positioning mechanism 14. As shown in FIGS. 2 and 3, the transport unit 12 mainly includes a transport arm 15 and a drive mechanism 16.

  The transport arm 15 is a part that supports the liquid crystal panel P. The transport arm 15 includes an arm part 20, a clamp arm part 21, a rail part 22, and a panel clamp 23.

  The arm unit 20 is a member that is disposed at the upper and lower positions of the supported liquid crystal panel P and supports the liquid crystal panel P. The arm portion 20 is supported by the drive mechanism 16 so as to be movable up and down, and is brought close to and away from the upper and lower ends of the liquid crystal panel P. The clamp arm portion 21 is a member for supporting the liquid crystal panel P. The clamp arm portion 21 includes an upper and lower clamp arm portion 21A and a left and right clamp arm portion 21B, and supports the liquid crystal panel P from the upper, lower, left and right sides. The vertical clamp arm portion 21 </ b> A grips the liquid crystal panel P from above and below by the vertical movement of the arm portion 20. The lower vertical clamp arm portion 21 </ b> A is fixed to the arm portion 20.

  The left and right clamp arm portion 21B moves to the left and right by the function of a rail portion 22 (described later) provided on the arm portion 20, and grips the liquid crystal panel P from the left and right. The rail portion 22 is a member for supporting the left and right clamp arm portions 21B of the clamp arm portion 21 so as to be movable left and right. The left and right clamp arm portion 21B is provided with a guide 21C, and the guide 21C is slidably supported by the rail portion 22.

  The panel clamp 23 is a member for directly contacting the end of the liquid crystal panel P. The panel clamp 23 is made of an elastic synthetic resin or the like, and elastically supports the periphery of the liquid crystal panel P.

  The drive mechanism 16 is a device for supporting the liquid crystal panel P by the transport arm 15 and reciprocating the liquid crystal panel P between the transport unit 12 and the inspection unit 13. The drive mechanism 16 is mainly composed of an X direction moving mechanism section 25 and a Y direction moving mechanism section 26.

  The X-direction moving mechanism unit 25 is a mechanism for reciprocating the transport arm 15 between the transport unit 12 and the inspection unit 13. The X-direction moving mechanism unit 25 mainly includes a rail unit 28, an X-axis drive motor 29, a ball screw 30, and a nut (not shown).

  The rail portion 28 is a member that supports the reciprocating movement of the transfer arm 15 between the transfer unit 12 and the inspection unit 13. A slide plate 33, which will be described later, is supported on the rail portion 28 so as to be able to reciprocate. The X-axis drive motor 29 is a motor that is connected to the ball screw 30 and rotationally drives the ball screw 30. The ball screw 30 is a member for reciprocating the slide plate 33 directly. The ball screw 30 is supported by a bearing (not shown) and is disposed in a lateral direction that is a reciprocating direction of the transfer arm 15. The nut is a member for reciprocating with the rotation of the ball screw 30. The nut is screwed into the ball screw 30, and the ball screw 30 is reciprocated by being rotationally driven by the X-axis drive motor 29. The nut is fixed to the slide plate 33, and the slide plate 33 is reciprocated by the rotation of the ball screw 30.

  The Y-direction moving mechanism unit 26 is a mechanism for supporting the arm unit 20 of the transport arm 15 so as to be movable up and down. The Y-direction moving mechanism portion 26 is mainly composed of a slide plate 33, a rail portion 34, a Y-axis drive motor 35, a ball screw 36, and a nut (not shown).

  The slide plate 33 is a member for supporting the transport arm 15 to reciprocate. On the back surface of the slide plate 33, guides (not shown) are respectively provided above and below, and these guides are attached to the rail portion 28 of the X-direction moving mechanism portion 25. As a result, the slide plate 33 is supported by the rail portion 28 so as to be reciprocally movable in the X-axis direction.

  The rail part 34 is a rail for guiding the vertical movement of the arm part 20 of the transport arm 15. The rail portion 34 is attached to the surface of the slide plate 33. A guide 40 is attached to the rail portion 34. Two guides 40 are provided on the rail portion 34 to support the upper and lower arm portions 20 of the transfer arm 15.

  The Y-axis drive motor 35 is a motor for rotating the ball screw 36. The Y-axis drive motor 35 rotates the ball screw 36 when the upper and lower arm portions 20 of the transport arm 15 are brought close to each other or separated from each other. The ball screw 36 is a member for directly moving a nut (not shown) close up and down. In the ball screw 36, the screw groove spiral direction is reversed between the upper half and the lower half, and the ball screw 36 is connected to one by a coupling 41. An upper end portion of the ball screw 36 is rotatably supported by a bearing 42. The nuts are respectively provided above and below the ball screw 36. When the ball screw 36 is rotated in one direction, the nuts 37 come close to each other, and when rotated in the opposite direction, the nuts are separated from each other. The nut is provided integrally with the guide 40, and is provided integrally with the arm unit 20 via the guide 40. When the nut is moved closer and separated by the ball screw 36, the guide 40 is moved closer and separated directly. Then, the upper and lower arm portions 20 of the transfer arm 15 are indirectly moved closer to and away from each other. As the ball screw 36 rotates, the guide 40 moves up and down, and the arm unit 20 moves up and down.

  The inspection unit 13 is a device for supporting the liquid crystal panel P and performing a lighting test. As shown in FIGS. 2 and 4 to 6, the inspection unit 13 mainly includes an XYZθ stage 43, a backlight 44, a work table 45, and a prober 46.

  The XYZθ stage 43 is an alignment stage that supports the backlight 44 and the work table 45 on the front surface thereof and aligns the liquid crystal panel P attached to the work table 45. The XYZθ stage 43 adjusts the XYZ axis direction and θ rotation direction of the work table 45 that supports the liquid crystal panel P, and moves the work table 45 in the Z axis direction when the liquid crystal panel P is delivered. It is a device for. In the XYZθ stage 43, a drive motor (not shown) for moving the work table 45 in the XY-axis direction, a drive motor (not shown) for rotating the work table 45 in the θ rotation direction, and the work table 45 in Z direction. A drive motor (not shown) for moving in the axial direction is provided. Each drive motor is connected to a control means (not shown), and the liquid crystal panel P is accurately positioned by the control means.

  The backlight 44 is a member for illuminating the liquid crystal panel P supported by the work table 45 from the back side. The backlight 44 includes a housing 56 and a lamp 57 housed in the housing 56.

  The work table 45 is a member for supporting the liquid crystal panel P that is an inspection target plate. A diffusion plate 60 is attached to the opening 45 </ b> A of the work table 45.

  The prober 46 is an apparatus for inspecting the liquid crystal panel P in contact with the terminals of the liquid crystal panel P. The prober 46 includes a probe base 67, a probe block 68, a camera 69, and a probe stage 70.

  The probe base 67 is a member for supporting the probe block 68 and the camera 69. The probe base 67 is fixed to a frame (not shown) through the probe stage 70 in a state desired by the liquid crystal panel P placed on the work table 45. The probe block 68 is fixed to the probe base 67 with the probe needle 71 at the tip desired by the liquid crystal panel P. The camera 69 is a camera for aligning the liquid crystal panel P while looking at the marks provided on the liquid crystal panel P. The probe stage 70 supports the probe base 67 while being fixed to the frame.

  The positioning mechanism 14 is a mechanism for receiving and positioning and supporting the liquid crystal panel P carried in the horizontal state from the outside, and then delivering the liquid crystal panel P to the transport unit 12 by rotating and tilting.

  As shown in FIGS. 1 and 7 to 11, the positioning mechanism 14 includes a panel receiving mechanism portion 81, a positioning support mechanism portion 82, a rotation mechanism portion 83, a tilt mechanism portion 84, and an elevating mechanism portion 85. Has been.

  The panel receiving mechanism part 81 is a mechanism part for receiving the liquid crystal panel P carried in from the outside in a horizontal state. The panel receiving mechanism portion 81 has four support rods 88 that are fixed in a horizontal direction and radially, with a base end portion fixed to an upper base plate 115 of a rotation mechanism portion 83 described later, and each support rod 88. And a panel receiver 89 provided in the vertical direction. Since the panel receiver 89 is a member that directly contacts the lower surface of the liquid crystal panel P and supports the liquid crystal panel P, the panel receiver 89 is formed of a flexible member such as a synthetic resin so as not to damage the liquid crystal panel P. .

  The positioning support mechanism portion 82 is a mechanism portion for positioning and supporting the liquid crystal panel P supported by the panel receiving mechanism portion 81. The positioning support mechanism portion 82 includes a panel clamp 91, a moving device 92, and a buffer mechanism 93.

  The panel clamp 91 is a member for supporting the liquid crystal panel P after positioning it in contact with the peripheral edge of the liquid crystal panel P. Two sets of the panel clamps 91 are provided in a pair and in a direction orthogonal to each other (XY axis direction in a horizontal state). Each panel clamp 91 is configured by arranging a columnar or cylindrical synthetic resin in the vertical direction. Each of the paired panel clamps 91 is provided with two on one side and one on the other side. The pair of panel clamps 91 are brought close to and away from the peripheral edge of the liquid crystal panel P by the moving device 92.

  The moving device 92 is a device for supporting and separating the panel clamp 91. The moving device 92 is provided in each of the X-axis direction and the Y-axis direction in the drawing. The moving device 92 in the X-axis direction and the moving device 92 in the Y-axis direction have the same configuration. Specifically, the moving device 92 includes a rail 96, a guide 97, a guide plate 98, a connecting member 99, a rack 100, a pinion 101, and a drive motor 102.

  The rail 96 is provided on each of the support plates 104 whose base ends are fixed to the upper base plate 115 and disposed on both sides in the XY axis direction. The guide 97 is slidably attached to each rail 96. The guide plate 98 is provided integrally with the guide 97. The connecting member 99 is provided to extend downward in a state where the upper end portion thereof is integrally provided with the guide plate 98. The rack 100 is provided in parallel with the rail 96. The pinion gear 101 meshes with each rack 100 extending from both sides and the upper side and the lower side thereof, and moves the racks 100 simultaneously and in opposite directions. The drive motor 102 is configured such that its rotation shaft is engaged with the pinion gear 101 and rotationally drives the pinion gear 101. When the drive motor 102 is rotated in one direction, the panel clamps 91 are brought close to each other via the racks 100, and when the drive motor 102 is rotated in the opposite direction, the panel clamps 91 are separated from each other. It has become.

  The buffer mechanism 93 is a device for biasing one of the paired panel clamps 91 toward the other panel clamp 91 with a constant biasing force and releasing the biasing force. That is, one of the paired panel clamps 91 is supported and the one panel clamp 91 is in contact with the peripheral edge of the liquid crystal panel P, and the one panel clamp 91 is connected to the other panel clamp 91. This is a device for urging the panel with a constant urging force and releasing the urging prior to separating each pair of panel clamps 91 for delivering the liquid crystal panel P to the transport unit 12. . The buffer mechanism 93 includes a slide mechanism 105, a constant biasing means 106, and a restricting means 107.

  The buffer mechanism 93 is a device for biasing one of the paired panel clamps 91 toward the other panel clamp 91 with a constant biasing force and releasing the biasing force. That is, one of the paired panel clamps 91 is supported and the one panel clamp 91 is in contact with the peripheral edge of the liquid crystal panel P, and the one panel clamp 91 is connected to the other panel clamp 91. This is a device for urging the panel with a constant urging force and releasing the urging prior to separating each pair of panel clamps 91 for delivering the liquid crystal panel P to the transport unit 12. . The buffer mechanism 93 includes a slide mechanism 105, a constant biasing means 106, and a restricting means 107.

  The slide mechanism 105 includes a buffer rail 110, a buffer guide 111, and a buffer guide plate 112. The buffer rail 110 is attached to the guide plate 98 of the moving device 92 in the same direction as the rail 96 of the moving device 92. The buffer guide 111 is slidably attached to the buffer rail 110. The buffer guide plate 112 is provided integrally with the buffer guide 111. The panel clamp 91 is attached to the buffer guide plate 112.

  The constant biasing means 106 is a means for constantly biasing the one panel clamp 91 in a direction in which the paired panel clamps 91 are close to each other. Specifically, the constant biasing means 106 is constituted by a spring. One of the constantly urging means 106 is attached to the buffer guide plate 112 side and the other is attached to the guide plate 98 side of the moving device 92, respectively, to urge the one panel clamp 91 to the other panel clamp 91 side. Yes. The characteristic (biasing force) of the constant biasing means 106 is set to an optimum value in accordance with the dimensions of the liquid crystal panel P to be placed.

  The restricting means 107 is a means for restricting the urging force by the constantly urging means 106 by pressing the one panel clamp 91 urged by the always urging means 106 in the direction opposite to the urging direction. . The restricting means 107 is specifically composed of an air cylinder, and the piston shaft 108 of the air cylinder abuts on the buffer guide plate 112 of the slide mechanism 105 to press the buffer guide plate 112. The restricting means 107 is provided inside the buffer guide plate 112 (on the other panel clamp 91 side), and the piston shaft 108 pushes the buffer guide plate 112 to restrict the urging force by the constantly urging means 106. It is supposed to be.

  The rotation mechanism 83 is a mechanism for supporting and rotating the panel receiving mechanism 81 and the positioning support mechanism 82. The rotation mechanism 83 includes an upper base plate 115, a lower base plate 116, and a drive motor 117 that integrally rotates the upper base plate 115 and the lower base plate 116. The upper base plate 115 supports the panel receiving mechanism 81 and the positioning support mechanism 82. The upper base plate 115 is attached to the lower base plate 116 via four support columns 118. The lower base plate 116 is integrally fixed to the rotation shaft of the drive motor 117. Accordingly, the liquid crystal panel P supported by the panel receiving mechanism 81 and the positioning support mechanism 82 via the upper base plate 115 and the lower base plate 116 by rotating the drive motor 117 by a set angle. Is rotated by a set angle. The rotation mechanism unit 83 is integrally attached to the lifting mechanism unit 85.

  The tilt mechanism portion 84 is a mechanism for supporting and tilting the rotation mechanism portion 83 and the lifting mechanism portion 85 that are integrally provided in an orthogonal state. The tilt mechanism portion 84 includes a substrate 120, a support column 121, a rotation support shaft 122, a drive motor 123, and a reduction gear 124.

  The substrate 120 is a plate material for supporting the entire apparatus. The column 121 is a member for supporting the rotation mechanism 83 and the lifting mechanism 85 provided integrally. Two support columns 121 are provided on the substrate 120 with a set interval. The rotation support shaft 122 is provided so as to span the two columns 121. The rotation mechanism portion 83 and the lifting mechanism portion 85 are rotatably attached to the rotation support shaft 122.

  The drive motor 123 is connected to the reduction gear 124. The output shaft of the reduction gear 124 is connected to the rotation support shaft 122. The reduction gear 124 decelerates the rotation of the drive motor 123 to directly set the rotation mechanism 83 and indirectly set the liquid crystal panel P supported by the panel receiving mechanism 81 and the positioning support mechanism 82. It is designed to rotate at an angle. Thereby, the rotation of the drive motor 123 is decelerated by the reduction gear 124, and the rotation support shaft 122 is rotated by a set angle.

  The elevating mechanism unit 85 is a device for elevating the liquid crystal panel P. That is, the elevating mechanism unit 85 causes the liquid crystal panel P supported by the panel receiving mechanism unit 81 and the positioning support mechanism unit 82 to pass through the rotating mechanism unit 83 in a direction perpendicular to the surface of the liquid crystal panel P. It is designed to move up and down. The lifting mechanism unit 85 includes a fixed plate 130, a slide plate 131, a ball screw 132, a nut 133, and a drive motor 134. The fixed plate 130 is integrally fixed to the rotation support shaft 122 and rotates together with the rotation support shaft 122. The slide plate 131 is slidably supported on the fixed plate 130. The slide mechanism 131 is integrally provided with the rotation mechanism 83 at an orthogonal angle. As a result, when the slide plate 131 slides while being supported by the fixed plate 130, the rotation mechanism portion 83 supported by the slide plate 131 slides integrally.

  The ball screw 132 is a member for sliding the slide plate 131 with respect to the fixed plate 130. The ball screw 132 is rotatably supported by the fixed plate 130 in the sliding direction of the slide plate 131. The nut 133 is fixed to the slide plate 131 and screwed into the ball screw 132. As a result, the nut 133 moves in the axial direction of the ball screw 132 due to the rotation of the ball screw 132, and the slide plate 131 slides in the axial direction of the ball screw 132. The drive motor 134 is connected to the ball screw 132 and rotates the ball screw 132.

[Operation]
The lighting inspection apparatus 11 configured as described above operates as follows.

  The operation of the lighting inspection device 11 is as follows.

  A cassette (not shown) containing a plurality of liquid crystal panels P is installed in the vicinity of the lighting inspection device 11, and a robot hand (not shown) takes out the liquid crystal panel P from the cassette in a horizontal state, and the lighting inspection device 11. Carry in.

  In the lighting inspection device 11, the positioning mechanism 14 first receives the liquid crystal panel P from the robot hand. At this time, the liquid crystal panel P is placed on the panel receiving mechanism portion 81 of the positioning mechanism 14. Specifically, it is placed on four panel receivers 89. At this time, the panel clamps 91 of the positioning support mechanism 82 are separated from each other by the moving device 92. Thus, the robot hand places the liquid crystal panel P on the four panel receivers 89 without contacting the panel clamp 91.

  Next, the positioning support mechanism 82 positions and supports the liquid crystal panel P. Specifically, the drive motor 102 of the moving device 92 is driven to rotate the pinion 101 in the set direction by a set angle, and the rack 100 is moved in the set direction by a set amount. In the case of positioning, the rack 100 is moved in a direction close to each other by a set amount. At this time, in the buffer mechanism 93, the buffer guide plate 112 is constantly urged by the urging means 106 and is in contact with the piston shaft 108 of the regulating means 107. In this state, when the rack 100 is moved in a direction approaching each other, the panel clamp 91 first comes into contact with the peripheral portion of the liquid crystal panel P as shown in FIG. Further, when the rack 100 is moved in a direction close to each other by a set amount, the buffer rail 110 and the restricting means 107 are further pushed in as shown in FIG. Apart from the piston shaft 108, the constantly urging means 106 presses the panel clamp 91 against the peripheral edge of the liquid crystal panel P. At this time, by accurately adjusting the amount of movement of the rack 100, the height of the constantly biasing means 106 is adjusted, and the pressing force of the panel clamp 91 on the peripheral edge of the liquid crystal panel P is adjusted.

  Further, since the other panel clamp 91 not provided with the buffer mechanism 93 is not always displaced by the urging means 106, the other panel clamp 91 is adjusted so as to move to the positioning reference position.

  Thereby, the liquid crystal panel P is positioned by abutting against the other panel clamp 91, and the one panel clamp 91 is abutted and constantly urged by the urging means 106 with a set pressing force. The liquid crystal panel P is supported so as not to shift.

  In this state, the rotating mechanism 83 rotates the liquid crystal panel P together with the panel receiving mechanism 81 and the positioning support mechanism 82 by 90 degrees.

  Next, the tilt mechanism 84 rotates the liquid crystal panel P together with the panel receiving mechanism 81, the positioning support mechanism 82, and the rotation mechanism 83 to a set angle (the tilt angle of the liquid crystal panel P in the inspection unit 13 in FIG. 4). Move.

  Further, in the elevating mechanism 85, the liquid crystal panel P is moved together with the panel receiving mechanism 81, the positioning support mechanism 82, the rotating mechanism 83, and the tilting mechanism 84 in the direction perpendicular to the surface thereof to be conveyed. Part 12 is handed over.

  At this time, in the buffer mechanism 93, the piston shaft 108 of the restricting means 107 is extended, and the buffer guide plate 112 is pushed from the state of FIG. 13A as shown in FIG. Separate from the peripheral edge of the panel P. Thereby, the urging | biasing of liquid crystal panel P by the always urging | biasing means 106 is cancelled | released, and it prevents that liquid crystal panel P slip | deviates. At this time, since the other panel clamp 91 has not moved from the set position, the liquid crystal panel P is maintained at the set position while being in contact with the other panel clamp 91.

  In this state, the transport arm 15 of the transport unit 12 receives and supports the liquid crystal panel P. Next, the transport arm 15 is moved to the inspection unit 13 side by the drive mechanism 16, and the liquid crystal panel P is placed on the work table 45.

  In the inspection unit 13, the liquid crystal panel P supported by the work table 45 is positioned by the XYZθ stage 43. Specifically, the terminals of the liquid crystal panel P and the probe needles 71 of the prober 46 are aligned and brought into contact with each other, and the backlight 44 is turned on to perform a continuity test.

  After the inspection is completed, the transport unit 12 receives the liquid crystal panel P from the work table 45 and returns it to the positioning mechanism 14.

  The positioning mechanism 14 positions and supports the liquid crystal panel P in the same manner as described above, returns it to the horizontal position, rotates it 90 degrees, and transfers it to the external robot hand.

[effect]
As described above, when the positioning mechanism 14 receives and supports the positioning of the liquid crystal panel P, the constant biasing means 106 of the buffer mechanism 93 attaches the panel clamp 91 in contact with the peripheral edge of the liquid crystal panel P. When the panel clamps 91 are separated from the liquid crystal panel P, the restricting means 107 of the buffer mechanism 93 is applied to the panel clamps 91 before the panel clamps 91 are separated from the liquid crystal panel P. Since the bias is released, the liquid crystal panel P can be reliably supported, and the liquid crystal panel P can be prevented from being displaced during the conveyance. Furthermore, the liquid crystal panel P can be prevented from being bent or damaged.

[Modification]
In the above embodiment, the restricting means 107 of the buffer mechanism 93 is constituted by an air cylinder. However, the restricting means 107 only needs to be able to push the buffer guide plate 112, and thus may be another structure such as a hydraulic cylinder.

  In the above embodiment, the urging means 106 is always configured by a spring. However, any configuration that can press the panel clamp 91 against the peripheral portion of the liquid crystal panel P with a set pressing force may be used. You may comprise by another biasing means.

  Furthermore, although the above embodiment has been described based on the lighting inspection device 11 that inspects the liquid crystal panel P by inclining, it goes without saying that other inspection devices that inspect in a horizontal state, a vertical state, or the like may be used. The present invention can be applied to all apparatuses including the positioning mechanism 14.

It is a perspective view which shows the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a front view which shows the lighting inspection apparatus which concerns on embodiment of this invention. It is a front view which shows the conveyance part of the lighting inspection apparatus which concerns on embodiment of this invention. It is side surface sectional drawing which shows the test | inspection part of the lighting test | inspection apparatus which concerns on embodiment of this invention. It is a schematic front view which shows the test | inspection part of the lighting test | inspection apparatus which concerns on embodiment of this invention. It is a schematic sectional side view which shows the test | inspection part of the lighting test | inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a top view which shows the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a front view which shows the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the operation | movement at the time of the clamp of the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the operation | movement at the time of open | release of the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention.

Explanation of symbols

11: lighting inspection device, 12: transport section, 13: inspection section, 14: positioning mechanism, 15: transport arm, 16: drive mechanism, 20: arm section, 21: clamp arm section, 21A: upper and lower clamp arm section, 21B : Left and right clamp arm part, 21C: Guide, 22: Rail part, 23: Panel clamp, 25: X direction moving mechanism part, 26: Y direction moving mechanism part, 28: Rail part, 29: X axis drive motor, 30: Ball screw, 31: nut, 33: slide plate, 34: rail portion, 35: Y-axis drive motor, 36: ball screw, 37: nut, 39: guide, 40: guide, 41: coupling, 42: bearing, 43: XYZθ stage, 44: backlight, 45: work table, 46: prober, 56: housing, 57: lamp, 60: diffusion plate, 67: probe base 68: Probe block, 69: Camera, 70: Probe stage, 71: Probe needle, 81: Panel receiving mechanism section, 82: Positioning support mechanism section, 83: Rotating mechanism section, 84: Tilt mechanism section, 85: Elevating mechanism section , 88: support bar, 89: panel receiver, 91: panel clamp, 92: moving device, 93: buffer mechanism, 96: rail, 97: guide, 98: guide plate, 99: connecting member, 100: rack, 101: Pinion, 102: drive motor, 105: sliding mechanism, 106: constant biasing means, 107: restricting means, 110: buffer rail, 111: buffer guide, 112: buffer guide plate, 115: upper base plate, 116: lower Side base plate, 117: drive motor, 118: support column, 120: substrate, 121: support column, 122: rotation support shaft, 123: drive Motor: 124: reduction gear, 130: fixed plate, 131: slide plate, 132: ball screw, 133: nut, 134: drive motor, P: liquid crystal panel.

Claims (4)

A lighting inspection device that performs a lighting inspection on an inspection object plate conveyed from the outside,
An inspection section for inspecting lighting by supporting the inspection object plate diagonally, horizontally or vertically;
A transport unit that transports the inspection target plate to the inspection unit;
A positioning mechanism that receives, positions, supports, and delivers the inspection target plate carried in from the outside, and delivers it to the transport unit;
The positioning mechanism is
A panel receiver for receiving the inspection object plate carried in from the outside;
A pair or a plurality of pairs of panel clamps, which are moved close to and away from the peripheral edge of the inspection target plate received by the panel receiver, and which support the positioning target object after positioning the inspection target plate;
Supporting one of the paired panel clamps and attaching the one panel clamp to the peripheral edge in a state where the one panel clamp is in contact with the peripheral edge of the inspection object plate. And a buffer mechanism for releasing the bias before separating the pair of panel clamps from each other. The lighting inspection apparatus according to claim 1,
The buffer mechanism is
A constantly biasing means for constantly biasing the one panel clamp in a direction in which the paired panel clamps are close to each other;
A lighting device comprising: a regulating means for regulating the urging force by the constantly urging means by pressing the one panel clamp urged by the always urging means in a direction opposite to the urging direction thereof. Inspection device. In the lighting inspection apparatus according to claim 2,
The lighting inspection device, wherein the constant biasing means of the buffer mechanism is a spring. In the lighting inspection device according to claim 2 or 3,
The lighting inspection apparatus, wherein the buffer mechanism regulating means is an air cylinder.

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