JP2011085574A - Testing device for plate-shaped specimen - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a low-cost testing device for accurately positioning a specimen. <P>SOLUTION: An alignment device used in the testing device includes: a first pusher mechanism and a first positioning mechanism arranged on one and the other of a pair of opposing sides of a panel receiving face, at an interval along respective extending directions of the corresponding sides; and a second pusher mechanism and a second positioning mechanism arranged on one and the other of the other pair of opposing sides of the panel receiving face. The pusher mechanisms and the positioning mechanisms are located on the same level as the panel receiving face, and each includes a pressure member disposed on the outside of the panel receiving face and a driving mechanism moving the pressure member forward and backward relative to the panel receiving face. The driving mechanisms of the respective positioning mechanisms releasably maintain the positions of the pressure members in the X direction or the Y direction. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an apparatus for testing a flat inspection object such as a liquid crystal display panel.

  An apparatus for performing a lighting test on a display panel such as a liquid crystal display panel has a probe unit for energizing an object to be inspected, in particular, a positioning function for positioning with respect to a needle tip of a contact (ie, an alignment function). ing.

  This type of apparatus generally includes a panel receiver such as an inspection stage or a work table, a stage moving mechanism that is displaced around the θ axis extending in the three directions of XYZ and the Z direction, and a probe disposed above the panel receiver. A unit.

  At the time of positioning, the panel receiver is displaced with respect to the probe unit by the stage moving mechanism so that the electrode of the object to be inspected and the needle tip of the contact are in contact with the object to be inspected being releasably attracted to the panel receiver.

  However, in such a test apparatus, not only the panel receiver, but also the apparatus that supports the panel receiver, the backlight unit, and the like must be displaced by the stage moving mechanism, so that the stage moving mechanism becomes large and the test apparatus is expensive. become.

  In particular, in a device for testing a large object to be inspected as in recent years, the weight of an object to be displaced by a stage may exceed 1 ton, so that the stage moving mechanism becomes larger and the test device is more expensive. I can't avoid becoming.

  In order to solve the above-described problems, an alignment apparatus that positions an object to be inspected so that an electrode of the object to be inspected and a needle tip of a contactor are in contact with each other by displacing the object to be inspected with respect to the panel receiver. It has been proposed (Patent Document 1).

  In this alignment apparatus, a pair of first pushers arranged at intervals in the extending direction of the corresponding side is disposed on each of the pair of opposing sides of the panel receiving surface. A second pusher is disposed on each of one and the other of the pair of sides. Each pusher includes a pressing member that is pressed against the end face of the object to be inspected, and a moving mechanism that moves the pressing member back and forth in the X direction or the Y direction with respect to the object to be inspected.

  At the time of positioning, the pressing member of each pusher is pressed against the end face in the X direction or Y direction of the object to be inspected by the moving mechanism, and is displaced with respect to the panel receiver. The needle tip is positioned so as to be in contact.

  In such an alignment apparatus, when a mechanism for moving the pressing member back and forth with a pressure fluid such as air or oil is used as the moving mechanism of each pusher, the object to be inspected is centered by these pushers, and the panel receiver Is positioned against.

  However, in such an alignment device, there is a slight difference in the pressure of the fluid supplied to both pushers arranged on opposite sides with respect to the panel receiver, or to the pushers spaced in the extending direction of the corresponding sides. However, there is a difference in the pressing force by the pusher. As a result, the object to be inspected is not accurately displaced and accurate positioning is not performed.

JP 2008-188727 A

  An object of the present invention is to provide an inexpensive test apparatus capable of accurately positioning an object to be inspected.

  According to the present invention, a flat test object testing apparatus includes a panel receiver having a rectangular panel receiving surface for receiving a flat test object, and a probe including a plurality of contacts pressed against the electrodes of the test object. A unit and an alignment device for positioning an object to be inspected received by the panel receiver with respect to the contact;

  The alignment apparatus includes a first pusher mechanism and a first positioning mechanism disposed on one and the other of a pair of opposing sides of the panel receiving surface, and another pair of opposing sides of the panel receiving surface, respectively. One and the other include a second pusher mechanism and a second positioning mechanism arranged, respectively.

  Each of the pusher mechanism and the positioning mechanism includes at least one pressing member positioned outside the panel receiving surface, and at least one driving mechanism that displaces the pressing member in the X direction or the Y direction. The drive mechanism of each positioning mechanism maintains the position of the pressing member in the X direction or the Y direction so as to be releasable.

  Each positioning mechanism can include a motor capable of controlling the rotational angular position.

  The pressing member of each positioning mechanism may be made of a material that is hardly elastically deformed or does not elastically deform at least in the moving direction thereof.

  The drive mechanism of each positioning mechanism includes a drive source and a mechanism that is driven by the drive source and releasably maintains the position of the pressing member in the X direction or the Y direction in cooperation with the drive source. be able to.

  The maintaining mechanism of each positioning mechanism includes a ball screw extending from the drive source in the X direction or the Y direction and rotated by the drive source, and a nut screwed into the ball screw, And a nut for displacing the member in the X direction or the Y direction.

  The drive source of the drive mechanism of each pusher mechanism can include a cylinder mechanism that moves the pressing member forward and backward using a pressure fluid.

  The test apparatus according to the present invention further includes first and second pressure fluid sources having different pressures, and the pressure fluid of the first and second pressure fluid sources as a drive source of the drive mechanism of the pusher mechanism. A selectively supplying valve device.

  Instead of the above, the test apparatus according to the present invention further includes an electropneumatic regulator that selectively supplies at least two pressure fluids having different pressures to a drive source of the drive mechanism of the pusher mechanism. 6. The test apparatus according to any one of items 6.

  Each of the pusher mechanism and the positioning mechanism is a movable body that supports the pressing member, and is disposed on the panel receiver that is driven by the driving mechanism and moves in the X direction or the Y direction. A moving body can be provided.

  The pressing member may be supported by the movable body so as to be rotatable around an axis extending in the Z direction.

  The test apparatus according to the present invention may further include a Z moving mechanism for moving the panel receiver in the Z direction.

  The test apparatus according to the present invention is further a levitation device disposed on the panel receiver, wherein the test object is levitated from the panel receiving surface when the alignment object is displaced by the alignment device. A device can be included.

  The levitation device is a part of a ball that can protrude and retract with respect to the panel receiving surface, and the ball disposed on the panel receiving member and a part of the ball are exposed to the panel receiving surface. And a biasing spring.

  The panel receiver may include an opening portion that opens to the panel receiving surface, and a valve that selectively connects the opening portion to at least one of a pressure fluid supply source and a decompression tank.

  The test apparatus according to the present invention may further include a table base on which the panel receiver is disposed and having a rectangular first opening. Further, the panel receiver jointly forms a rectangular second opening that can be opposed to the first opening and is similar to the first opening, and the panel receiving surface is formed together 4 There may be provided four moving pieces arranged on the table base so that the size of the second opening can be varied.

  The pair of moving pieces may extend in parallel to the X direction with an interval in the Y direction, and the other pair of moving pieces may extend in parallel to the Y direction with an interval in the X direction. In addition, the moving pieces may be formed by jointly forming the second opening and the panel receiving surface, and the size of the second opening may be variable. It may be arranged on the table base. Furthermore, the adjacent moving pieces may be coupled without being prevented from moving independently in the Y direction or the X direction.

  The test apparatus according to the present invention further includes a table base on which the panel receiver is disposed, the table base having a rectangular first opening, and disposed between the table base and the panel receiver, A coupling mechanism that couples the movable piece to the table base so as to be movable in the X direction and the Y direction.

  The test apparatus according to the present invention further includes a moving piece moving mechanism for moving each moving piece in the X direction or the Y direction via the coupling mechanism, the moving piece moving mechanism being disposed on the table base. be able to.

  Each moving piece moving mechanism can include a motor that moves the moving piece and that can control a rotational angle position.

  The test apparatus according to the present invention may further include a vertical movement mechanism that moves the panel receiver and the probe unit in directions away from each other.

  The test apparatus according to the present invention may further include a camera apparatus supported by the probe unit so as to photograph the mark portion of the object to be inspected from above.

  The test apparatus according to the present invention may further include a frame that supports the panel receiver. The probe unit may be supported by the frame or the panel receiver.

  The test apparatus according to the present invention may further include a unit support mechanism for supporting the probe unit on the panel receiver. The unit support mechanism is a first moving body received by the panel support so as to be movable in the X direction or the Y direction, and a first moving body extending in the Y direction or the X direction, and the X direction or the Y direction. A second moving body coupled to the first moving body so as to be movable obliquely in a direction and a Z direction, the second moving body extending in the Y direction or the X direction, and the second movement A stopper that defines the most advanced position of the body, and the first moving body is moved in the X direction or the Y direction, thereby moving the second moving body in the X direction or the Y direction. And a probe moving mechanism that is displaced in the direction. The probe unit may be supported by the second moving body.

  The unit support mechanism is further a movable body receiver extending in the Y direction or the X direction, and is supported by the panel receiver so as to be movable in the Y direction or the X direction by the panel receiver. A movable body receiver that supports the body on the panel receiver, and the movable body receiver may be moved in the longitudinal direction so that the position in the Y direction or the X direction with respect to the panel receiver is maintained releasably.

  The probe unit further extends along the side of the rectangle and is supported by the unit support mechanism, and is supported by the support base so as to be movable in the Z direction at intervals in the longitudinal direction of the support base. A probe block supporting a plurality of the contacts.

  The support base may be supported by the unit support mechanism so as to be angularly rotatable around an axis extending in the Z direction. Further, the probe unit further maintains the releasable positional relationship between the panel receiver and the probe unit around an axis extending in the Z direction by angularly rotating the support base with respect to the panel receiver. An angle adjusting mechanism may be provided.

  The probe moving mechanism selects the probe block as a retracted position retracted from the panel receiving surface, an alignment position for positioning the object to be inspected, and a contact position for bringing the contact into contact with the electrode of the object to be inspected. It is possible to include a position-controllable motor that is displaced and maintained releasably.

  The probe unit may be arranged at each of locations corresponding to two adjacent sides of the rectangle.

  The alignment apparatus includes a plurality of the first pusher mechanisms and a plurality of the plurality of first pusher mechanisms disposed on one and the other of the pair of opposing sides of the panel receiving surface at intervals in the extending direction of the corresponding sides, respectively. A first positioning mechanism can be included.

  The alignment apparatus includes a pair of the first pusher mechanisms and a pair of the first pusher mechanisms disposed on one and the other of the pair of opposing sides of the panel receiving surface at intervals in the extending direction of the corresponding sides, respectively. A first positioning mechanism can be included.

  The alignment apparatus may include a pair of first positioning mechanisms disposed on the other side of the pair of opposing sides of the panel receiving surface at intervals in the extending direction of the corresponding side.

  The first pusher mechanism can include a plurality of the pressing members spaced in the direction of the corresponding side. The drive mechanism of the first pusher mechanism includes a drive source that displaces the pressing member in the X direction or the Y direction, and a support member that supports the plurality of pressing members at intervals in the Y direction or the X direction. And a support member supported by the drive source so as to be rotatable about an axis extending in the Z direction.

  At the time of positioning, the object to be inspected is displaced with respect to the panel receiver by pressing each pusher mechanism and each pressing member of each positioning mechanism against the end face in the X direction or Y direction of the object to be inspected. The electrode and the needle tip of the contact are positioned so as to contact each other.

  At the time of such positioning, since the driving mechanism of each positioning mechanism maintains the position of the pressing member in the X direction or Y direction so as to be releasable, the position of the pressing member of each positioning mechanism in the X direction or Y direction is not displaced. For this reason, the pressing member of the positioning mechanism can be used as a member for determining the reference position of the object to be inspected in the X direction and the Y direction.

  As a result, according to the present invention, the object to be inspected and the probe unit are accurately positioned by pressing the end surfaces in the X direction and the Y direction of the object to be inspected against the pressing member of the positioning mechanism by the pusher mechanism. The

  Each pusher mechanism and each positioning mechanism need only have a structure for displacing a light object to be inspected, so that it is lightweight and a large alignment device that displaces a heavy object such as a panel receiver or a backlight unit. Coupled with the fact that the test equipment is not necessary, the test equipment becomes inexpensive.

  Furthermore, if not only the pressing portion on the pusher mechanism side but also the pressing member on the positioning mechanism side that determines the reference position can be moved backward with respect to the object to be inspected, it is easy to deliver the object to be inspected to the panel receiver. Become.

  If the drive source that maintains the position of the pressing member in the X direction or the Y direction so that the driving mechanism of each positioning mechanism can be released includes a position-controllable motor such as a pulse motor, the X of the pressing member of each positioning mechanism The position in the direction or Y direction is not displaced unless the motor is rotated.

  If the pressing member of each positioning mechanism is made of a material that is hardly elastically deformed or does not elastically deform at least in the moving direction, the position of the edge of the object to be inspected in the X or Y direction is It is correctly positioned by the pressing member.

1 is a perspective view showing an embodiment of a test apparatus according to the present invention. It is a front view of the test apparatus shown in FIG. It is a top view of the testing apparatus shown in FIG. FIG. 4 is a cross-sectional view taken along line 4-4 in FIG. FIG. 5 is an exploded perspective view showing a panel receiver and a table base that receives the panel receiver in order to explain one embodiment of the coupling mechanism and the moving piece moving mechanism. It is a top view which removes a probe unit and shows the test apparatus shown in FIG. FIG. 7 is a cross-sectional view taken along line 7-7 in FIG. 3, and is a cross-sectional view in which members below the panel receiver are omitted. It is a perspective view which shows one Example of the positioning mechanism with the moving piece of a panel receptacle. FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3, and is a cross-sectional view in which members below the panel receiver are omitted. It is a perspective view which shows one Example of a pusher mechanism with the moving piece of a panel receptacle. It is a front view which shows a probe unit and its support mechanism with the moving piece of a panel receiver. It is a perspective view for demonstrating the relationship between a probe unit and a to-be-inspected object. It is a perspective view which decomposes | disassembles and shows a probe unit and its support mechanism. It is the perspective view which looked at one Example of the unit support mechanism from one direction in the X direction. It is the perspective view which looked at the unit support mechanism of FIG. 14 from the direction opposite to FIG. It is a figure which shows the relationship between the pusher mechanism and positioning mechanism when positioning is performed. It is a front view which shows a part in cross section which shows the relationship between a pusher mechanism, a positioning mechanism, and a to-be-inspected object when positioning and contact are performed. It is a perspective view which shows one Example of the relationship between a panel receiver and a floating device. It is sectional drawing which shows one Example of a levitating apparatus. It is a figure for demonstrating positioning by the test apparatus shown in FIG. 1, Comprising: It is a figure explaining the state which displaces a to-be-inspected object to a X direction. It is a figure for demonstrating positioning by the test apparatus shown in FIG. 1, Comprising: It is a figure explaining the state which rotates a to-be-inspected object angularly around the θ-axis. It is a figure explaining the displacement state of a probe unit, (A) shows a state when a probe unit is in a retracted position, (B) shows a state when a probe unit is in an intermediate position, The state when in the contact position is shown. It is a figure which shows one Example of the opening part of a panel receiver with the other Example of a floating apparatus. It is a figure which shows the other Example of the test apparatus which concerns on this invention. It is a figure for demonstrating the other positioning method. It is a figure for demonstrating other positioning method. It is a figure which shows the other Example of an alignment apparatus. It is a figure which shows the further another Example of an alignment apparatus. FIG. 6 is an exploded perspective view showing a panel receiver and a table base for receiving the panel receiver in order to explain another embodiment of the coupling mechanism.

  [Explanation of terms]

  In the present invention, in FIG. 2, the vertical direction (the direction perpendicular to the object to be inspected received by the panel holder) is referred to as the Z direction or the vertical direction, the horizontal direction is referred to as the X direction or the horizontal direction, and the paper back direction is defined as Y. It is called direction or front-rear direction. However, these directions differ depending on the posture of the test object at the time of the test.

  Therefore, the test apparatus according to the present invention may be used in any state such as a state in which the XY plane defined by the X direction and the Y direction is a horizontal plane, and a state in which the XY plane is inclined with respect to the horizontal plane.

  [Example]

  1 to 4, the test apparatus 10 uses a display panel such as a liquid crystal display panel in which liquid crystal is encapsulated as a flat test object 12 (see FIGS. 4, 7, 9, etc.), and the test object 10 It is used as a device for connecting the body 12 to a predetermined electric circuit and performing an electrical test such as a lighting test.

  The device under test 12 has a rectangular shape, and includes a plurality of electrodes on each of the edges corresponding to some sides of the rectangle. Hereinafter, in order to facilitate understanding, the inspected object 12 will be described as having a rectangular shape that is long in the X direction. In the example shown in the figure, the device under test 12 has a plurality of electrodes on each of two edge portions corresponding to adjacent sides of the rectangle with a distance in the longitudinal direction of the corresponding edge portion.

  [Test equipment]

  The test apparatus 10 includes an instrument base, that is, a platform 14, a table base 16 that is spaced above the platform 14, and a panel receiver 18 that is disposed above the table base 16 and receives the object 12 to be inspected. A plurality of probe units 20 arranged on the upper side of the panel receiver 16, a unit support mechanism 22 for supporting each probe unit 20 on the panel receiver 16, and a mark portion of the inspection object 12 received by the panel receiver 18 (described later) A plurality of camera devices 24 attached to the probe unit 20 so as to photograph from above, and an alignment device described later for positioning the object 12 received by the panel receiver 18 with respect to the panel receiver 18. Including.

  In the illustrated example, the probe unit 20 is disposed at each of the locations corresponding to two adjacent sides of the rectangle. However, the arrangement location of the probe unit 20 is determined according to the arrangement position of the electrode of the device under test 12.

  In the illustrated example, the unit support mechanism 22 is disposed at each of the locations corresponding to the rectangular sides. However, the unit support mechanism 22 may not be disposed at a location where the probe unit 20 is not disposed.

  In the example shown in the figure, two camera devices 24 are further arranged at a position corresponding to one of two adjacent sides of the rectangle with a distance in the longitudinal direction of the sides, and one camera device 24 is adjacent to each other. It arrange | positions in the location corresponding to the other of the two sides which fit. However, the two camera devices 24 may be arranged at intervals in the longitudinal direction of the probe unit 20 in each of the probe units 20.

  The platform 14 is supported by a frame 25 (see FIG. 4) of the test apparatus 10. However, the platform 14 may be part of the frame 25. The platform 14 and the table base 16 have a rectangular plate shape, and are spaced apart in the Z (vertical) direction so that the table base 16 is positioned above the platform 14.

  The table base 16 is supported on the platform 14 by a plurality of support posts 26 (see FIG. 4), and has a rectangular opening 16a (see FIGS. 1 and 4) larger than the inspection object 12. A known backlight unit 28 (see FIG. 4) is disposed between the platform 14 and the table base 16.

  [About panel support]

  As shown in FIG. 5, the panel receiver 18 includes four moving pieces 30 that are combined with each other in a cross-beam shape or a saddle shape. As shown in FIGS. 4 to 10, 12, and 13, each moving piece 30 includes a first piece 30 a having a small width dimension and a second piece 30 b having a small width dimension. Are combined in an L shape so that the first piece 30a is horizontal and the width direction of the second piece 30b is the vertical direction.

  The pair of moving pieces 30 extends in the X direction with a spacing in the Y direction in the XY plane, and the other pair of moving pieces 30 has a spacing in the X direction in the XY plane and in parallel with the Y direction. It is growing. The moving pieces 30 are coupled to the table base 16 by a coupling mechanism 62 described later so as to be movable in a two-dimensional manner (X direction and Y direction) in a plane parallel to the table base 16 (XY plane). ing.

  The four moving pieces 30 jointly form a rectangular opening 32 similar to the device under test 12 and the opening 16a, and jointly form a rectangular panel receiving surface 34 to the top of the second piece 30b. Formed on the surface. The openings 16a and 32 are opposed to allow light from the backlight unit 28 to travel to the device under test 12 received by the panel receiving surface 34.

  The four moving pieces 30 are coupled to the table base 16 by a coupling mechanism 62 described later so that the size of the opening 32 can be varied (that is, two-dimensionally within the XY plane). .

  Two adjacent moving pieces 30 are coupled by appropriate coupling means so as to be movable integrally in the X direction (or Y direction) and individually movable in the Y direction (or X direction). Yes. Thereby, the adjacent moving piece 30 is couple | bonded, without preventing the other moving piece 30 moving to a Y direction (or X direction) independently.

  That is, each moving piece 30 is coupled to one adjacent moving piece 30 so as to be independently movable in the longitudinal direction (Y direction or X direction) of the one adjacent moving piece 30 and the other adjacent one. The moving piece 30 is coupled to the other moving piece 30 so as to be integrally movable in the longitudinal direction (Y direction or X direction) of the other moving piece 30.

  As such a coupling means, for example, a so-called dovetail that extends in the X direction (or Y direction) and opens to the side of the opening 32 and has a truncated quadrangular pyramid cross-sectional shape, and slides in the dovetail A combination with a so-called ant pattern having a truncated quadrangular pyramid shaped cross-section that can be fitted can be used.

  The dovetail groove is formed at the end edge of the adjacent two moving pieces 30 on the side of the opening 32 in the width direction, and the dovetail pattern is formed at one end edge of the other two moving pieces 30 in the other longitudinal direction. The

  However, instead of the combination of the dovetail groove and the dovetail pattern, other coupling means such as a combination of a guide rail and a guide that is slidably and non-detachably coupled to the guide rail may be used.

  Each moving piece 30 is provided with a plurality of levitation devices 36 shown in FIGS. 18 and 19. The levitation device 36 levitates the inspection object 12 from the panel receiving surface 34 when the inspection object 12 is displaced by the alignment device described above, and facilitates the movement of the inspection object 12 during alignment. .

  In the examples shown in FIGS. 18 and 19, each levitation device 36 is embedded in the second piece 30b so that the opening is open to the top surface (panel receiving surface 34) of the second piece 30b. A cylindrical member 38 at the bottom, a ball 40 disposed on the cylindrical member 38 so that a part of the cylindrical member 38 can be projected and retracted with respect to the panel receiving surface 34, and a spring 42 that biases a part of the ball 40 to be exposed to the panel receiving surface 34. And a disc-shaped ball receiver 44 disposed between the ball 40 and the spring 42 and disposed on the cylindrical member 38 so as to be movable in the vertical direction, and a ring 46 for restricting the displacement of the ball 40 in the cylindrical member 38. .

  The levitation device 36 receives the object to be inspected 12 by the ball 40 and maintains it in a state of being levitated from the panel receiving surface 34. For this reason, the urging force of the spring 42 only needs to be a level that causes the device under test 12 to float from the panel receiving surface 34.

  As shown in FIG. 23, the panel receiver 18 also includes a plurality of open portions 48 that open to the panel receiving surface 34 and communication holes 50 that communicate with the open portions 48 in each second piece 30b. . In the illustrated example, each opening 48 is a hole, but may be another opening such as a groove that opens to the panel receiving surface 34 and extends in the longitudinal direction of the second piece 30b.

  The communication hole 50 of each second piece 30 b is connected to the on / off valve 52 by a pipe 54. The valve 52 is connected to a reduced pressure tank 56 such as a vacuum tank, and is driven by a valve driver 58 to selectively turn on an air flow path between the reduced pressure tank 56 and the communication hole 50. Turn off.

  When the air flow path is turned on, the opening 48 and the communication hole 50 are connected to the decompression tank. As a result, the object to be inspected 12 is attracted to the panel receiving surface 34 in a non-displaceable state by pressing down the ball 40 against the urging force of the spring 42 of the levitation device 36. In this state, a lighting test of the device under test 12 is performed.

  On the contrary, when the air flow path is turned off, the opening 48 and the communication hole 50 are disconnected from the decompression tank 56. As a result, the object to be inspected 12 is released from being adsorbed to the panel receiving surface 34, and a part of the ball 40 is slightly projected from the panel receiving surface 34 by the biasing force of the spring 42.

  As a result, the device under test 12 is slightly lifted from the panel receiving surface 34. In this state, replacement of the new and old test objects 12 and alignment of the new test objects 12 are performed. The alignment is performed by displacing the device under test 12 using an alignment device, as will be described later. At the time of alignment, the object to be inspected 12 is only in contact with the ball 40 and is lifted from the panel receiving surface 34, so that it is smoothly and easily displaced.

  As shown in FIG. 23, instead of the above-described levitation device 36, a pressure fluid source 60 such as a compressed air source is connected to the valve 52, and the decompression tank 56 and the pressure fluid source 60 are selected as the communication hole 50 by the valve 52. May be connected.

  In the above case, a switching valve is used as the valve 52. The inspected body 12 is slightly lifted from the panel receiving surface 34 when the opening 48 is connected to the pressure fluid source 60 and the pressure fluid from the pressure fluid source 60 is ejected from the opening 48.

  [About coupling mechanism]

  As shown in FIGS. 1, 3, 5, etc., the coupling mechanism 62 described above is configured to couple the four moving pieces 30 to the table base 16 so as to be movable in the X and Y directions. It is arranged between.

  In the illustrated example, the coupling mechanism 62 includes a pair of strip-shaped first sliders 64 that extend in parallel to the Y direction with an interval in the X direction and are arranged on the table base 16 so as to be movable in the X direction. A pair of strip-like second sliders 66 that extend in parallel to the X direction with an interval in the Y direction above one slider 64 and are arranged on the table base 16 so as to be movable in the Y direction are provided.

  As shown in FIG. 5, one second slider 66 is coupled to one first slider 64 so as to be movable in the Y direction by a coupling member 68, and the other second slider 66 is coupled to another coupling member. 68 is coupled to the other first slider 64 so as to be movable in the Y direction.

  Each of the sliders 64 and 66 is coupled to a pair of rails 70 and 70 provided on the upper surface of the table base 16 at one end and the other end of each slider so as to be movable in the X direction (or Y direction). ing.

  Each coupling member 68 is coupled to a pair of rails 72 provided on the corresponding first slider 64 and extending in the longitudinal direction of the first slider 64 so as to be movable in the Y direction. The second slider 66 is coupled to the other pair of rails 72 so as to be movable in the X direction. Thereby, each coupling member 68 can move two-dimensionally in the XY plane with respect to the table base 16.

  In the illustrated example, each moving piece 30 extending in the Y direction is coupled to the coupling member 68 so as not to be displaced, and each moving piece 30 extending in the X direction is the remaining pair of second sliders 66 extending in the X direction. The rail 72 is coupled to be movable in the X direction.

  Each of the sliders 64 and 66 is moved in the X direction (or Y direction) by the moving piece moving mechanism 74 and is maintained so as to be releasable at an appropriate position in such a moving direction.

  In the illustrated example, each moving piece moving mechanism 74 is connected to a motor installed on the upper surface of the table base 16 and the motor extending in the X direction (or Y direction), and is rotated by the motor. A mechanism using a ball screw and a nut screwed to the ball screw and connected to the slider 64 or 66 by a connector is used. The motor is a position-controllable motor so as to maintain the rotational angle position so as to be releasable like a pulse motor.

  For example, when the pair of first sliders 64 is moved in the direction (X direction) away from each other by the corresponding moving piece moving mechanism 74, one of the first sliders 64 connected to the first slider 64 via the coupling member 68. The pair of moving pieces 30 (extending in the Y direction) are moved together with the coupling member 68 in the direction (X direction) away from each other. The other pair of moving pieces 30 (extending in the X direction) connected to each other is moved in the X direction as one moving piece 30 moves.

  Further, when both the second sliders 66 are moved in the direction (Y direction) away from each other by the corresponding moving piece moving mechanism 74, the other (extended in the X direction) connected to the second slider 66. The pair of moving pieces 30 are moved together with the second slider 66 in the direction away from each other (Y direction), and the one of the moving pieces 30 connected to the moving piece 30 by the connecting means such as the dovetail and the ant navel described above. A pair of moving pieces 30 (extending in the Y direction) is moved in the longitudinal direction (Y direction) as the other moving piece 30 moves.

  Therefore, the four moving pieces 30 are moved so that the size of the opening 32 becomes the size shown in FIGS. As a result, the size of the opening 32 and hence the panel receiving surface 34 can be changed according to the size of the device under test 12 to be tested. This operation is performed prior to the lighting test of the inspection object 12.

  [About alignment equipment]

  Referring to FIGS. 2, 4, 7 to 10, 16, and 17, the alignment device described above has a length of a side corresponding to one and the other of a pair of opposing sides (X sides) of the panel receiving surface 34, respectively. A pair of first pusher mechanisms 80 and a pair of first positioning mechanisms 82 arranged at intervals in the direction, and one and the other of a pair of opposite sides (Y sides) of the panel receiving surface 34, Each includes a second pusher mechanism 84 and a second positioning mechanism 86 disposed.

  Each of the pusher mechanisms 80 and 84 moves the inspected object 12 forward and backward with respect to the positioning mechanism 82 or 86 disposed on the side opposite to the side on which the pusher mechanism is disposed. In contrast, each of the positioning mechanisms 82 and 86 determines the reference position of the device under test 12 in the X direction (or Y direction).

  As shown in FIGS. 7 to 10, the pusher mechanisms 80 and 84 and the positioning mechanisms 82 and 86 are at the same height as the panel receiving surface 34 and are positioned outside the panel receiving surface 34 in plan view. The pressed member 90, a columnar moving body 92 on which the pressing member 90 is supported, a driving mechanism 94 for moving the moving body 92 and the pressing member 90 forward and backward with respect to the panel receiving surface 34, and a support plate 96 that supports them. With.

  In the illustrated example, the moving body 92 extends in the vertical direction and has a columnar shape. The pressing member 90 is a roller attached to the upper end portion of the moving body 92 by an attachment pin 98 so as to be rotatable around an axis extending in the Z direction, but may be another member.

  The support plate 96 is movable in the longitudinal direction (X direction or Y direction) of the first piece 30a on a pair of rails 100 provided on the upper surface of the first piece 30a of the movable piece 30 of the panel receiver 18. It is assembled. Both rails 100 extend in parallel to the longitudinal direction (X direction or Y direction) with an interval in the width direction (Y direction or X direction) of the first piece 30a.

  As shown in FIGS. 78 to 10, the support plate 96 is assembled to one rail 100 by a guide 102, and is placed on the upper surface of the other rail 100. For this reason, one rail 100 acts as a guide rail. The other rail 100 is provided with female screw holes 104 that open upward at each of a plurality of locations in the X direction (or Y direction).

  On the other rail 100, a band-shaped stopper 108 having a long hole 106 extending in the X direction (or Y direction) is placed, and is provided on the support plate 96 so as not to be relatively movable. The stopper 108 is releasably attached to the other rail 100 by a bolt 110 inserted into the elongated hole 106 from above and screwed into the female screw hole 104. Thus, each support plate 96 is releasably fixed to a predetermined position in the X direction (or Y direction).

  As a result, the pusher mechanisms 80 and 84 and the positioning mechanisms 82 and 86 are releasably fixed at predetermined positions in the X direction (or Y direction). For this reason, the other rail 100 acts as a fixed rail that releasably fixes the positions of the pusher mechanism and the positioning mechanism in the X direction (or Y direction).

  However, the positions of the pusher mechanism and the positioning mechanism in the X direction (or Y direction) can be changed by changing the positions of the female screw hole 104 into which the bolt 110 is screwed and the stopper 108 with respect to the bolt 110. It can be selected according to the type, size, etc.

  Each drive mechanism 94 is supported by each rail 112 and a pair of rails 112 extending in the longitudinal direction (X direction or Y direction) of the support plate 96 with an interval in the width direction (Y direction or X direction) of the support plate 96. The slider 114 is fitted so as to be movable in the width direction of the plate 96, the connecting plate 116 that connects both the sliders 114, and the drive source 118 that moves the pressing member 90 in the width direction of the support plate 96.

  The slider 114 is attached to the lower surface of the connecting plate 116. The drive source 118 is attached to the upper surface of the support plate 96. The moving body 92 is mounted on the connecting plate 116 in an upright state. However, the moving body 92 and the connecting plate 116 may be integrated.

  As shown in FIGS. 9 and 10, each drive source 118 of the pusher mechanisms 80 and 84 uses a fluid pressure cylinder mechanism such as a pneumatic cylinder or a hydraulic cylinder. In this cylinder mechanism, the cylinder is attached to the support plate 96, and the piston rod is connected to the slider 114.

  For this reason, each drive mechanism 94 of the pusher mechanisms 80 and 84 moves the slider 114 forward and backward with respect to the second piece 30b by the drive source 118, so that the pressing member 96 is moved to the panel receiving surface 34 and eventually the object 12 to be inspected. On the other hand, it is advanced or retracted in the X direction or the Y direction.

  As shown in FIGS. 7 and 8, each drive source 118 of the positioning mechanisms 82 and 86 uses a motor capable of controlling the rotational angle position such as a pulse motor. For this reason, each drive mechanism 94 of the positioning mechanisms 82 and 86 further extends from the corresponding drive source 118 in the width direction (X direction or Y direction) of the support plate 96 and is rotated by the corresponding drive source 118. A screw 120 and a nut 122 screwed to the ball screw 120 are provided. The nut 122 is attached to the connecting plate 116.

  Each drive mechanism 94 of the positioning mechanisms 82 and 86 rotates the ball screw 120 by the drive source 118 to advance and retract the nut 122 with respect to the second piece 30b, thereby causing the pressing member 96 to move to the panel receiving surface 34, As a result, it advances / retreats with respect to the inspection object 12 (X direction or Y direction).

  As shown in FIG. 20, each drive source (cylinder mechanism) 118 of the pusher mechanisms 80 and 84 is selectively connected to two pressure fluid sources 124 and 126 by a valve device 128. The pressurized fluid sources 124 and 126 store pressurized fluids such as compressed air and oil having different pressures.

  The valve device 128 includes a plurality of valves that are selectively driven by a valve driver 128. Each valve in the valve device 128 is selectively driven by a valve driver 129 to selectively connect one of the drive sources 118 of the pusher mechanisms 80, 84 to the pressure fluid sources 124, 126. Thereby, the piston rod of the cylinder mechanism described above is advanced and retracted with respect to the cylinder, and the pressing member 96 is advanced and retracted with respect to the panel receiving surface 34 and, consequently, the device under test 12.

  Further, as shown in FIG. 20, each drive source (position-controllable motor) 118 of the positioning mechanisms 82 and 86 is driven by a motor driver 130 and is correspondingly pressed in the X direction (or Y direction) by the pressing member 96. The reference position of the inspection object 12 at is determined. Each reference position is determined in advance according to the type, size, and the like of the inspection object 12.

  For example, as shown in FIG. 20, the alignment apparatus having the above-described structure moves the pressing member 96 of the positioning mechanism 86 for the X direction forward and backward in the X direction so that it becomes the reference position of the device under test 12 in the X direction. While maintaining, the to-be-inspected object 12 is pushed with respect to the press member 96 of the positioning mechanism 86 for X directions by the press member 96 of the pusher mechanism 84 for X directions. Thereby, the inspection object 12 is aligned in the X direction.

  The alignment of the test object 12 in the Y direction is performed by operating the Y-direction positioning mechanisms 82 and 82 and the Y-direction pusher mechanisms 80 and 80 as described above.

  For example, as shown in FIG. 21, the alignment of the inspection object 12 around the θ axis extending in the Z direction is performed by using the Y-direction positioning mechanisms 82 and 82 and the pressing members 90 of the Y-direction pusher mechanisms 80 and 84, respectively. This can be done by moving in the direction indicated by the arrow.

  During the alignment as described above, the drive source of each pusher mechanism is connected to the pressure fluid source 124 having a low pressure. As a result, the device under test 12 is sandwiched between the pressing members 90 with a weak force. As a result, the impact acting on the inspection object 12 when the inspection object 12 collides with the pressing member 90 is small, and the inspection object 12 is prevented from being damaged due to the impact.

  During the alignment, the device under test 12 is levitated from the panel receiving surface 34 by the levitating device 36 shown in FIGS. For this reason, the to-be-inspected object 12 moves smoothly at the time of alignment, and exact alignment is performed.

  As described above, at the time of alignment, the pressing member 90 of each positioning mechanism determines the reference position of the object 12 to be inspected. Therefore, the pressing member 90 of each positioning mechanism is difficult to be elastically deformed at least in the moving direction or It is made of a material that does not, or does not wear easily, such as a hard resin.

  Thereby, even if the to-be-inspected object 12 is pressed by the pressing member 90 of the pusher mechanism, the pressing member 90 of the positioning mechanism maintains the reference position together with the use of a position-controllable motor as a driving source. Further, since the rotation amount of the motor as the drive source can be determined without considering the elastic deformation of the pressing member 90, the position control of the motor is facilitated.

  However, when the amount of rotation of the motor as the drive source is determined in consideration of the elastic deformation of the pressing member 90, the pressing member 90 of the positioning mechanism may be made of an elastically deformable material.

  On the other hand, the pressing member 90 of the pusher mechanism can be made of a material such as a resin having a height that does not damage the device under test 12. Therefore, the pressing member 90 of the pusher mechanism may be either a material that does not elastically deform or a material that elastically deforms.

  When the device under test 12 is pressed against the pressing members 90 of the positioning mechanisms 82, 86 by the pusher mechanisms 80, 84, the ball screw 120 and the nut 122 are not driven by the friction force between them unless the drive source 118 is driven. The retraction of the pressing member 90 of the positioning mechanisms 82 and 86 is prevented. Thereby, the reference position for alignment is not displaced.

  As described above, the drive mechanisms 94 of the positioning mechanisms 82 and 86 maintain the most advanced position of the pressing member 90 in the X direction or the Y direction so as to be changeable and releasable. FIGS. 16 and 17 show a state in which the alignment around the X direction, the Y direction, and the θ axis is completed.

  When the alignment is completed, the drive source of each pusher mechanism is connected to the pressurized fluid source 126 having a high pressure. As a result, the device under test 12 is sandwiched between the pressing members 90 with a strong force. The device under test 12 is maintained in a state of being strongly sandwiched by the pressing member 90 until the lighting test is completed.

  [About the probe unit]

  As shown in FIGS. 7 and 11, each probe unit 20 includes a plate-like support base 132 that extends along a rectangular side (in the X direction or the Y direction) and is supported by the unit support mechanism 22, and a support base. A plurality of support blocks 134 attached to the support base 132 at intervals in the longitudinal direction of 132, a movement block 136 supported by each support block 134 so as to be movable in the Z direction, and attached to each movement block 136 Probe block 138.

  The support base 132 is detachably attached to the upper surface of the unit support mechanism 22 by a plurality of screw members (not shown). Each support block 134 has a protruding portion that protrudes from the upper end portion thereof toward the panel receiving surface 34.

  Each moving block 136 is attached to the support base 132 by a rail 140 provided on the front side (opening 32 side) of the support base 132 and extending in the vertical direction, and a guide 142 coupled to be movable in the vertical direction of the rail 140. Further, the position of the support block 134 in the vertical direction can be adjusted by an adjustment screw 144 screwed into the moving block 144 through the protruding portion of the support block 134 in the vertical direction.

  As shown in FIGS. 9 and 11, each probe block 138 has a plurality of contacts 146 arranged at intervals in the X direction or the Y direction, and the needle tips of these contacts 146 are arranged on the panel. The moving block 136 is supported so as to face the receiver 18.

  [Unit support mechanism]

  As shown in FIGS. 7, 9, 11 to 15, etc., the unit support mechanism 22 is disposed on the first piece 30 a of the panel receiver 18 and moves in a plate shape extending in the longitudinal direction of the first piece 30 a. Body receiver 150, first mobile body 152 disposed on mobile body receiver 150, and second mobile body 154 coupled to first mobile body 152 movably in a direction inclined with respect to panel receiving surface 34. A top plate 156 attached to the upper end of the second moving body 154, a probe moving mechanism 158 that moves the first moving body 152 in the width direction of the first piece 30a, and a second moving body 154. And a stopper 160 that regulates the most advanced position (position on the opening 32 side).

  The moving body receiver 150 is provided in the first piece 30a so as to extend in parallel to the longitudinal direction (X direction or Y direction) of the moving body receiver 150 with an interval in the width direction of the moving body receiver 150. A pair of rails 162 and a plurality of pairs of rails 162 and guides 164 supported by the rails 162 so as to be movable in the longitudinal direction and assembled to the lower side of the movable body receiver 150 are coupled onto the first piece 30a. ing. For this reason, the movable body receiver 150 is movable in the longitudinal direction of the first piece 30a.

  The first moving body 152 is provided in the moving body receiver 150 so as to extend in parallel with the width direction of the moving body receiver 150 with an interval in the longitudinal direction of the moving body receiver 150 (first piece 30a). A pair of rails 166 and a guide 168 supported by each rail 166 so as to be movable in the longitudinal direction and assembled to the lower side of the first moving body 152 are coupled onto the moving body receiver 150. Yes. Therefore, the first moving body 152 is movable in the width direction of the moving body receiver 150 (or the first piece 30a).

  The first and second moving bodies 152 and 154 are obliquely coupled to the panel receiving surface 34 so that the second moving body 154 is located on the panel receiving surface 34 side. For this reason, the first and second moving bodies 152 and 154 each have an obliquely downward surface and an obliquely upward surface. The second moving body 154 extends in the longitudinal direction of the first piece 30a, and extends obliquely so that the upper portion is on the panel receiving surface 34 side.

  The second moving body 154 is also provided on the diagonally downward surface of the first moving body 152 and spaced in the longitudinal direction of the first piece 30a in the width direction of the first piece 30a. Coupled to the first moving body 152 by a pair of rails 170 extending in parallel and a guide 172 coupled to each rail 170 so as to be movable in the longitudinal direction and provided on the obliquely downward surface of the second moving body 154 Has been. For this reason, the second moving body 154 can move in an oblique direction with respect to the first moving body 152.

  The top plate 156 has a long rectangular shape in the longitudinal direction of the first piece 30 a and is attached to the top of the second moving body 154. The probe unit 20 is mounted on the top plate 156 and supported by the second moving body 154.

  Each probe moving mechanism 158 includes a motor 174 installed on the upper surface of the moving body receiver 150, a ball screw 176 that is connected to the motor 174 so as to extend in the X direction (or Y direction), and is rotated by the motor 174. A mechanism using a nut 178 screwed to the ball screw 176 and a coupler 180 attached to the second moving body 154 and supporting the nut 178 is used.

  The motor 174 is a motor whose position can be controlled so as to maintain the rotational angle position so as to be releasable like a pulse motor, and is supported by the movable body receiver 150 via a bracket 182. The ball screw 176 is connected to the rotating shaft of the motor 174 and supported by the moving body receiver 150 via another bracket 184.

  The first and second moving bodies 152 and 154 also have a hole 186 formed in the first moving body 152 so as to extend obliquely upward and open to the upper end, and a rod 188 inserted into the hole 186 from above. Thus, the relative displacement in the direction perpendicular to the obliquely downward surface and the obliquely upward surface and the relative displacement in the longitudinal direction of the first and second moving bodies 152 and 154 are prevented.

  The first and second moving bodies 152 and 154 are separated from each other in the longitudinal direction of the rod 188 by a compression coil spring 190 disposed around the rod 188. It is relatively energized. Actually, since the first moving body 152 is prevented from being displaced in the longitudinal direction of the rod 188 by the rail 166 and the guide 168, the second moving body 154 is biased obliquely upward by the spring 190. .

  As shown in FIG. 11, the unit support mechanism 22 also has stoppers 191 and 193 provided on the first and second moving bodies 152 and 154 so as to regulate the highest position of the second moving body 154. Is provided. The stoppers 191 and 193 are in contact with each other when the second moving body 154 is raised, and prevent the second moving body 154 from rising, respectively. It is provided on the diagonally downward surface and the diagonally upward surface.

  In the unit support mechanism 22 as described above, when the first moving body 152 is moved toward the device under test 12 by the normal rotation of the motor 174, the second moving body 154 is also moved in the same direction. At this time, the second moving mechanism 154 is provided with a displacement generating mechanism 192 (see FIGS. 7, 11, and 13) that displaces the second moving body 154 obliquely downward against the urging force of the spring 190. .

  As shown in FIGS. 7 and 11, the displacement generating mechanism 192 includes a U-shaped bracket 194 provided on an obliquely downward surface of the second moving body 154 on the side of the inspected object 12, and the second moving body 154. And a roller 196 attached to the bracket 194 so as to be rotatable about an axis extending in the longitudinal direction and to be able to contact the stopper 160.

  In the unit support mechanism 22, when the first and second moving bodies 152 and 154 are moved toward the device under test 12 by the motor 174, the roller 196 contacts the stopper 160.

  When the first and second moving bodies 152 and 154 are further moved toward the device under test 12 by the motor 174, the second moving body 154 is prevented from advancing by the stopper 160. A displacement force that displaces the moving body 154 obliquely downward is generated in the fitting portion between the rail 170 and the guide 172.

  With such a displacement force, the second moving body 154 is moved downward as the first moving body 154 further advances. As a result, the probe unit 20 is moved downward, and the needlepoint of the contact provided in the probe block 138 is pressed against the electrode of the device under test 12.

  At this time, the fact that the device under test 12 is sandwiched by the pressing member 90 with a strong force and the fact that the device under test 12 is adsorbed to the panel receiving surface 34 is combined, so that the needle tip of the contact is attached to the electrode of the device under test 12 Even if pressed, the object 12 to be inspected is reliably prevented from being displaced with respect to the panel receiver 18 and the probe unit 20.

  In the above state, when the motor 174 is reversed, the first moving body 152 is moved backward with respect to the panel receiving surface 34 and the second moving body 154 in a state where the roller 196 is in contact with the stopper 160. During this time, the second moving body 154 is raised with respect to the first moving body 152 by the force of the spring 190 and is separated upward from the device under test 12.

  When the motor 174 is further reversed, the first moving body 152 continues to move backward. However, the second moving body 154 stops rising when the stopper 193 comes into contact with the stopper 191, and in this state, the second moving body 154 is retracted together with the first moving body 142 toward the retracted position with respect to the panel receiving surface 34. The

  As described above, the second moving body 154 and the probe block 138 are advanced and lowered by the forward rotation of the motor 174 with respect to the panel receiving surface 34 and the inspected object 12, and can be released to the advanced and lowered positions. It is maintained and is lifted and retracted by the reverse rotation of the motor 174, and is releasably maintained at the retracted position.

  In the state in which the second moving body 154 and thus the probe block 138 are retracted to the retracted position, the inspection object 12 is exchanged for the panel receiving surface 34. At this time, the fact that the object to be inspected 12 is levitated from the panel receiving surface 34 and the probe unit 20 is largely retracted from the panel receiving surface 34, and the object 12 to be inspected with respect to the panel receiving surface 34 is combined. Easy delivery.

  [Camera device]

  As shown in FIGS. 7, 11 to 13, etc., each camera device 24 includes an inverted L-shaped support block 200 supported by a support base 132 of the probe unit 20 and a mark portion (not shown) on the support block 200. And a camera 202 supported so as to photograph from above.

  The mark part is a mark itself provided on the object to be inspected 12, a needle tip of a specific contact, or the like. The camera 202 is an area sensor such as a video camera that takes an image of the vicinity of the mark portion of the inspection object 12 and generates an image signal, and a CCD area sensor can be used.

  The output signal of each camera 202 is subjected to image processing in a control device (not shown), and is used to determine the positional deviation of the device under test 12 with respect to the test device 10, particularly the panel receiver 18 and the probe unit 20. The obtained positional deviation is used as a signal for driving the alignment device.

  [Angle adjustment device]

  As shown in FIG. 15, each unit support mechanism 22 further moves the movable body receiver 150 in the longitudinal direction to maintain the position in the X direction (or Y direction) with respect to the panel receiver 18 so as to be releasable. Includes adjustment device.

  Such an angle adjusting device includes a coupling shaft 206 that supports the support base 132 on the top plate 156 so as to be angularly rotatable about an axis extending in the Z direction with respect to the top plate 156, and an upper surface of the longitudinal end portion of the top plate. A fixed nut 208 and a pair of adjustment screws 210 that are screwed into the nut 208 and push the rear surface of the end portion in the longitudinal direction of the support base 132 in the X direction (or Y direction).

  In the above-described angle adjusting device, when the screwing amount of the two adjusting screws 210 into the nut 208 is increased one and the other is decreased, the support base 132 is rotated angularly around the coupling shaft 206 to be attached to the top plate 156. Displaces. For this reason, the posture of the support base 132 with respect to the corresponding movable piece 30 can be adjusted by adjusting the screwing amount of the two adjusting screws 210 into the nut 208.

  [About unit position adjustment device]

  As shown in FIGS. 12, 13, 15 and the like, the probe unit 20 is moved in the X direction (or Y direction) with respect to the moving piece 30 of the panel receiver 18 by the unit position adjusting device, and the X direction (or The position in the Y direction) is adjusted.

  In the illustrated example, the unit position adjusting device includes a motor 212 that is disposed on the first piece 30 a and that can be controlled, a ball screw 214 that is rotated by the motor 212, and a nut 216 that is screwed into the ball screw 214. And a coupler 218 coupled to the nut 216 and the movable body receiver 150.

  When the motor 212 is rotated forward, the nut 216 is moved in the X direction (or Y direction), so that the movable body receiver 150 is moved in the same direction. When the motor 212 is reversely rotated, the nut 216 is moved in the Y direction (or the X direction), so that the movable body receiver 150 is moved in the same direction.

  As a result, the position of the moving body receiver 150 and the probe unit 20 in the X direction (or the Y direction) with respect to the moving piece 30 is adjusted and maintained so as to be releasable. The tip and the electrode of the device under test 12 can be reliably brought into contact with each other.

  [Operation of test equipment]

  As shown in FIG. 22 (A), the test apparatus 10 is configured so that each probe unit 20, each second moving body 92, and each second moving body 154 is retracted, with respect to the panel receiver 18. The inspection body 12 is delivered from above.

  Next, as shown in FIG. 15B, each pressing member 90 is advanced to perform alignment, and the probe block 138 is advanced to move the needle tip of each contact above the electrode of the device under test 12. Is done. During this time, each of the pusher mechanisms 80 and 84 is actuated by a low fluid pressure to prevent the object 12 to be inspected from being damaged.

  Next, as shown in FIG. 15C, each probe block 138 is lowered and the tip of each contact is pressed against the electrode of the device under test 12. During this time, each of the pusher mechanisms 80 and 84 is operated by a high fluid pressure, and the displacement of the device under test 12 is prevented. In this state, the test object 12 is energized, and a lighting test of the test object 12 is performed.

  The lighting test may be a visual lighting test in which an operator visually checks the object 12 from above, or an automatic lighting test that uses an area sensor such as a video camera and performs image processing in a control device. May be.

  During the lighting test, the device under test 12 is held by the alignment device and pressed against the panel receiving surface 34 by the contact 146, so that the opening 48 need not be connected to the decompression tank 56. In this case, the decompression tank 56 is unnecessary.

  When the electrical test is completed, each probe unit 20, each first moving body 152, and each second moving body 154 is retracted to the position shown in FIG. After floating from the surface 34, the inspection object 12 is transferred to the panel receiver 18.

  [Other embodiments]

  Referring to FIG. 24, the test apparatus 250 moves the panel receiver 18 in the vertical direction instead of the unit support mechanism 22 as a vertical movement mechanism for moving the panel receiver 18 and the probe unit 20 in a direction away from each other. Thus, the Z stage 252 that supports the table base 16 by the support 26 is used.

  The Z stage 152 is a so-called general lifting mechanism, and is supported by the frame 25 of the apparatus instead of the platform 14. The backlight unit 28 is placed on the Z stage 252. The probe unit 20 is supported by the frame 25 via a probe stage 254 that moves the probe unit 20 in the XY plane.

  The test apparatus 250 operates in the same manner as the test apparatus 10 except that the panel receiver 18 is moved up and down with respect to the probe unit 20 by the Z stage 152 and each probe unit 20 is moved in the XY plane by the probe stage 254. And it can be used similarly.

  [Other Examples of Alignment]

  In place of or in addition to the Z stage 252 in the test apparatus 250, as in the conventional test apparatus, a mechanism for moving the panel receiver 18 in the X, Y, or Z direction, angular about the θ axis In the case of providing a mechanism for rotating the probe unit 20 and the like, the alignment between the probe unit 20 and the inspection object 12 may be performed by a method other than the above. An example of such alignment will be described below.

  When the θ moving mechanism is provided, the inspected body 12 is angularly rotated around the θ axis while the inspected body 12 is held by the pusher mechanisms 80 and 84 and the positioning mechanisms 82 and 86, and the panel receiver 30 is moved in both directions. The probe unit 20 is moved in the X direction or the Y direction by an appropriate mechanism such as the moving piece moving mechanism 74.

  When the θ moving mechanism and the Y moving mechanism are provided, as shown in FIG. 25, the inspection object 12 is held by the θ movement mechanism while the inspection object 12 is held by the pusher mechanisms 80 and 84 and the positioning mechanisms 82 and 86. While rotating angularly around the θ-axis, the inspected object 12 is displaced in the Y direction with respect to both probe units 20 by the Y moving mechanism, and further, both the probe units 20 are moved in the X direction with respect to the inspected object 12. .

  When the θ moving mechanism and the X moving mechanism are provided, the object to be inspected 12 is angled around the θ axis by the θ moving mechanism while the object to be inspected 12 is held by the pusher mechanisms 80 and 84 and the positioning mechanisms 82 and 86. , The X object is moved by the X movement mechanism in the X direction with respect to both probe units 20, and the both probe units 20 are moved in the Y direction with respect to the object 12 to be inspected.

  When the θ moving mechanism and the XY moving mechanism are provided, as shown in FIG. 26, the object 12 is held by the θ moving mechanism while the object 12 is held by the pusher mechanisms 80 and 84 and the positioning mechanisms 82 and 86. The object 12 is rotated in the X direction with respect to both probe units 20 while being rotated angularly around the θ-axis along with the XY moving mechanism. In this case, both probe units 20 need not be displaced.

  Instead of arranging a pair of pusher mechanisms 84 on one of a pair of opposing sides of the panel receiving surface 34 in the extending direction of the corresponding sides, a single pusher mechanism 84 is arranged as shown in FIG. Alternatively, although not shown, three or more pusher mechanisms 84 may be arranged.

  Further, instead of arranging a pair of pusher mechanisms 84 on one of a pair of opposing sides of the panel receiving surface 34 in the extending direction of the corresponding side, as shown in FIG. A plurality of pressing members 90 that are spaced apart from each other, a supporting member 260 that supports the pressing members 90 at an interval in the Y direction (or the X direction), and the supporting member 260 are displaced in the X direction or the Y direction. The drive source 118 and the pivot pin 262 that supports the support member 260 by being connected to the drive source 118 so as to be rotatable about an axis extending in the Z direction may be provided.

  In the embodiment shown in FIG. 28, each pressing member 90 is supported by the movable body 92 already described, and the movable body 92 is supported by the support member 260.

  [Other embodiments of coupling mechanism]

  Referring to FIG. 29, in another embodiment of the coupling mechanism, three pairs of coupling members 270, 272, and 274 are used.

  Each coupling member 270 is coupled to a pair of rails 72 provided on the first slider 64 so as to be movable in the Y direction, and is provided on the second slider 66 in the same manner as the coupling member 68 shown in FIG. The pair of rails 72 are coupled to be movable in the X direction.

  Each coupling member 272 is coupled to another pair of rails 72 provided on the second slider 66 so as to be movable in the X direction. Each coupling member 274 is coupled to a pair of rails 72 provided on the first slider 64 so as to be movable in the Y direction, and is attached to a movable piece 30 extending in the Y direction so as not to move.

  Each moving piece 30 extending in the Y direction is coupled to the coupling member 270 so as to be movable in the Y direction with a pair of rails 276 provided on the lower surface thereof, and is attached to the coupling member 274 so as not to move.

  Each moving piece 30 extending in the X direction is coupled to the coupling member 272 so as to be movable in the X direction by a pair of rails 278 provided on the lower surface thereof, and a pair of auxiliary coupling members provided immovably on the lower surface. 280 is coupled to the rail 72 of the second slider 66 so as to be movable in the X direction.

  In another embodiment of the coupling mechanism, when the pair of first sliders 64 is moved in the direction (X direction) away from each other, the Y direction is coupled to the first slider 64 via the coupling member 270. One moving piece 30 extending is moved together with the coupling member 68 in a direction (X direction) away from each other, and is connected to the one moving piece 30 by a coupling means such as a dovetail groove and a ant umbilicus. The other moving piece 30 extending to is moved in the X direction as the one moving piece 30 moves.

  Further, when both the second sliders 66 are moved in the direction away from each other (Y direction), the other moving piece 30 extending in the X direction connected to the second slider 66 via the coupling member 272 is moved. The first slider 272 is moved in the direction (Y direction) away from each other together with the second slider 272, and the one movement extending in the Y direction connected to the other moving piece 30 by the connecting means such as the dovetail groove and the ant navel. The piece 30 is moved in the longitudinal direction (Y direction) as the other moving piece 30 moves.

  Therefore, the four moving pieces 30 are moved so that the size of the opening 32 becomes the size shown in FIGS. As a result, the size of the opening 32 and hence the panel receiving surface 34 can be changed according to the size of the device under test 12 to be tested.

  A motor as a drive source of a mechanism for moving the two members relative to each other, such as the unit support mechanism 20, the coupling mechanism 62, the moving piece moving mechanism 74, the positioning mechanisms 82 and 86, and the probe moving mechanism 158, is a rotary motor and Any of linear motors may be used.

  Similarly, the drive source of each pusher mechanism may be any of a rotary motor and a linear motor that can change the rotational force or propulsive force in two stages within a range smaller than the motor of the positioning mechanism.

  However, since the volume of compressed air changes according to pressure, using a cylinder mechanism that uses compressed air as a drive source for the pusher mechanism greatly reduces the impact when the pressing member collides with the object to be inspected during alignment. Is done. Therefore, it is preferable to use a cylinder mechanism that uses compressed air.

  Further, instead of using the motor (electric motor) as described above, the driving source of the positioning mechanisms 82 and 86 is not limited to the mechanism using the ball screw 120 and the nut 122, the mechanism using the rack and the pinion, and the like. Other driving sources such as a hydraulic motor for driving the motor may be used.

  The panel receiver 18 may have a structure in which the size of the opening 32 cannot be changed, for example, a structure dedicated to the inspected object of the same size. Also, the structure of the positioning mechanism can be variously changed.

  As in the above-described embodiment, instead of the two types of fluid pressure sources 124 and 126, the valve device 128, and the valve driver 129, an electropneumatic regulator that can output a fluid having an appropriate pressure by voltage control (that is, electropneumatic adjustment) May also be used. In this case, the electropneumatic regulator selectively supplies at least two different pressure fluids to the drive source 118 of the drive mechanism of the pusher mechanisms 80 and 84.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

DESCRIPTION OF SYMBOLS 10,250 Test apparatus 12 Flat test object 14 Platform 16 Table base 16a, 32 Opening 18 Panel receiver 20 Probe unit 22 Unit support mechanism 24 Camera apparatus 25 Frame 26 Post 28 Backlight unit 30 Moving piece 30a, 30b 1st and Second piece 34 Panel receiving surface 36 Lifting device 40 Ball 42 Spring 48 Opening portion 50 Communication hole 52 Valve 54 Pipe 56 Depressurization tank 58 Valve driver 60 Pressure fluid source 62 Coupling mechanism 64, 66 First and second sliders 68 , 270, 272, 274, 276 Coupling member 70, 72, 276, 278 Rail 74 Moving piece moving mechanism 80, 84 Pusher mechanism 82, 86 Positioning mechanism 90 Pressing member 92 Moving body 94 Drive mechanism 96 Support plate 98 Mounting Pin 114 Slider 116 Connecting plate 118 Drive source 120 Ball screw 122 Nut 124, 126 Pressure fluid source 128 Valve device 129 Valve driver 130 Motor driver 132 Support base 134 Support block 136 Moving block 138 Probe block 146 Contact 150 Moving body receiver 152, 154 First and second moving bodies 156 Top plate 158 Probe moving mechanism 160 Stopper 162, 166, 170 Rail 164, 168, 172 Guide 174 Motor 176 Ball screw 178 Nut 180 Joint 186 Hole 188 Rod 190 Compression coil spring 192 Displacement generation Mechanism 194 Bracket 196 Roller 200 Support block 202 Camera 206 Coupling shaft (angle adjusting device)
208 Nut (angle adjustment device)
210 Adjustment screw (angle adjustment device)
212 Motor (Unit position adjustment device)
214 Ball screw (unit position adjustment device)
216 Nut (Unit position adjustment device)
218 coupler (unit position adjustment device)
252 Z stage 260 Support member 262 Axis pin

Claims (32)

A panel receiver having a rectangular panel receiving surface for receiving a plate-shaped object to be inspected, a probe unit having a plurality of contacts pressed against the electrodes of the object to be inspected, and the object to be inspected received by the panel receiver An alignment device for positioning with respect to the contact,
The alignment apparatus includes a first pusher mechanism and a first positioning mechanism disposed on one and the other of a pair of opposing sides of the panel receiving surface, and another pair of opposing sides of the panel receiving surface, respectively. One and the other include a second pusher mechanism and a second positioning mechanism, respectively,
Each of the pusher mechanism and the positioning mechanism includes at least one pressing member positioned outside the panel receiving surface, and at least one driving mechanism that displaces the pressing member in the X direction or the Y direction.
The driving mechanism of each positioning mechanism is a testing apparatus for a flat plate-shaped object to be tested, which maintains the position of the pressing member in the X direction or the Y direction so as to be releasable.   The test apparatus according to claim 1, wherein each positioning mechanism includes a motor capable of controlling a rotational angle position.   The test apparatus according to claim 1, wherein the pressing member of each positioning mechanism is made of a material that is hardly elastically deformed or does not elastically deform at least in the moving direction thereof.   The drive mechanism of each positioning mechanism includes a drive source and a mechanism that is driven by the drive source and releasably maintains the position of the pressing member in the X direction or the Y direction in cooperation with the drive source. The test apparatus according to any one of claims 1 to 3.   The maintaining mechanism of each positioning mechanism includes a screw rod that extends from the drive source in the X direction or the Y direction and is rotated by the drive source, and a nut screwed into the screw rod, The test apparatus according to claim 4, further comprising a nut that displaces a member in the X direction or the Y direction.   6. The test apparatus according to claim 1, wherein a drive source of the drive mechanism of each pusher mechanism includes a cylinder mechanism that advances and retracts the pressing member using a pressure fluid.   And first and second pressure fluid sources having different pressures, and a valve device that selectively supplies the pressure fluid of the first and second pressure fluid sources to the drive source of the drive mechanism of the pusher mechanism; The test apparatus according to claim 1, comprising:   The test apparatus according to any one of claims 1 to 6, further comprising an electropneumatic regulator that selectively supplies at least two pressure fluids having different pressures to a drive source of the drive mechanism of the pusher mechanism.   Each of the pusher mechanism and the positioning mechanism is a movable body that supports the pressing member, and is disposed on the panel receiver that is driven by the driving mechanism and moves in the X direction or the Y direction. The test apparatus according to claim 1, further comprising a movable body.   The test apparatus according to claim 9, wherein the pressing member is supported by the movable body so as to be rotatable around an axis extending in the Z direction.   The test apparatus according to claim 1, further comprising a Z moving mechanism that moves the panel receiver in the Z direction.   The levitation device further includes a levitation device disposed on the panel receiver, the levitation device floating the inspection object from the panel receiving surface when the alignment object is displaced by the alignment device. 11. The test apparatus according to any one of 11 above.   The levitation device is a part of a ball that can protrude and retract with respect to the panel receiving surface, and the ball disposed on the panel receiving member and a part of the ball are exposed to the panel receiving surface. 13. The test apparatus of claim 12, comprising a spring that biases.   The panel receiver includes an opening portion that opens to the panel receiving surface, and a valve that selectively connects the opening portion to at least one of a supply source of pressure fluid and a decompression tank. The test apparatus according to claim 1. Further, a table base on which the panel receiver is disposed, including a table base having a rectangular first opening,
The panel receiver jointly forms a rectangular second opening that can be opposed to the first opening and is similar to the first opening, and four movements that jointly form the panel receiving surface The test apparatus according to claim 1, further comprising four moving pieces arranged on the table base so as to be variable in size of the second opening. The pair of moving pieces extends in parallel to the X direction with an interval in the Y direction, and the other pair of moving pieces extends in parallel to the Y direction with an interval in the X direction.
The movable piece is formed by jointly forming the second opening and the panel receiving surface, and the movable piece can further change the size of the second opening. Placed in the base,
The test apparatus according to claim 15, wherein the adjacent moving pieces are coupled without being prevented from independently moving in the Y direction or the X direction.   A table base having the panel receiver disposed therein, the table base having a rectangular first opening; and the table base disposed between the table base and the panel receiver; The test apparatus according to claim 1, further comprising a coupling mechanism coupled to the table base so as to be movable in the Y direction.   The test according to claim 17, further comprising a moving piece moving mechanism for moving each moving piece in the X direction or the Y direction via the coupling mechanism, the moving piece moving mechanism being arranged on the table base. apparatus.   The test apparatus according to claim 18, wherein each moving piece moving mechanism includes a motor that moves the moving piece and that can control a rotation angle position.   The test apparatus according to claim 1, further comprising a vertical movement mechanism that moves the panel receiver and the probe unit in directions away from each other.   21. The test apparatus according to claim 1, further comprising a camera device supported by the probe unit so as to photograph the mark portion of the object to be inspected from above. And a frame for supporting the panel receiver,
The test apparatus according to claim 1, wherein the probe unit is supported by the frame or the panel receiver. And a unit support mechanism for supporting the probe unit on the panel receiver.
The unit support mechanism is a first moving body that is received by the panel support so as to be movable in the X direction or the Y direction, the first moving body extending in the Y direction or the X direction, and the X direction or A second moving body coupled to the first moving body so as to be movable obliquely in the Y direction and the Z direction, the second moving body extending in the Y direction or the X direction, and the second moving body. A stopper that defines the most advanced position of the moving body, and the first moving body is moved in the X direction or Y direction, thereby moving the second moving body in the X direction or Y direction, and A probe moving mechanism for displacing in the Z direction,
The test apparatus according to claim 1, wherein the probe unit is supported by the second moving body.   The unit support mechanism is further a movable body receiver extending in the Y direction or the X direction, and is supported by the panel receiver so as to be movable in the Y direction or the X direction by the panel receiver. A moving body receiver for supporting a body on the panel receiver, and a unit position adjusting device for moving the moving body receiver in a longitudinal direction thereof so that the position in the Y direction or the X direction with respect to the panel receiver is releasably maintained. 24. The test apparatus according to claim 23, comprising:   The probe unit further extends along the side of the rectangle and is supported by the unit support mechanism, and is supported by the support base so as to be movable in the Z direction at intervals in the longitudinal direction of the support base. The test apparatus according to claim 23, wherein the test apparatus includes a probe block configured to support a plurality of the contacts. The support base is supported by a unit support mechanism so as to be angularly rotatable around an axis extending in the Z direction.
The probe unit further rotates the support base with respect to the panel receiver at an angle to maintain the positional relationship between the panel receiver and the probe unit releasably around an axis extending in the Z direction. The test apparatus according to claim 25, comprising an adjustment mechanism.   Each probe moving mechanism brings the probe block into a retracted position retracted from the panel receiving surface, an alignment position for positioning the object to be inspected by the alignment device, and brings the contact into contact with an electrode of the object to be inspected. 27. The test apparatus according to any one of claims 23 to 26, comprising a position-controllable motor that is selectively displaced to a contact position and is releasably maintained.   The test apparatus according to any one of claims 1 to 27, wherein the probe unit is disposed at each of locations corresponding to two adjacent sides of the rectangle.   The alignment apparatus includes a plurality of the first pusher mechanisms and a plurality of the plurality of first pusher mechanisms disposed on one and the other of the pair of opposing sides of the panel receiving surface at intervals in the extending direction of the corresponding sides, respectively. The test apparatus according to claim 1, comprising a first positioning mechanism.   The alignment apparatus includes a pair of the first pusher mechanisms and a pair of the first pusher mechanisms disposed on one and the other of the pair of opposing sides of the panel receiving surface at intervals in the extending direction of the corresponding sides, respectively. The test apparatus according to claim 1, comprising a first positioning mechanism.   The alignment apparatus includes a pair of the first positioning mechanisms arranged on the other side of the pair of opposing sides of the panel receiving surface at an interval in the extending direction of the corresponding side. 28. The test apparatus according to any one of 28. The first pusher mechanism includes a plurality of the pressing members spaced in the direction of the corresponding side,
The drive mechanism of the first pusher mechanism is a drive source that displaces the pressing member in the X direction or the Y direction, and a support member that supports the plurality of pressing members at intervals in the Y direction or the X direction. The test apparatus according to claim 1, further comprising: a support member supported by the drive source so as to be rotatable about an axis extending in the Z direction.

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