KR100554897B1 - Screen printing apparatus - Google Patents

Abstract

(Problem) Provided is a screen printing apparatus which is simply configured and has a compact and inexpensive X, Y, and θ control mechanism.

(Solution means) The moving plate 146 mounted on the second upper and lower base plates 144 is gripped in the X direction by the X direction driving pin 148 and the X direction pressing pin 150, and the first Since it is held in the Y direction by the Y-direction driving pin 152 and the first Y-direction pressing pin 156, the second Y-direction driving pin 154, and the second Y-direction pressing pin 158, respectively, the X-direction As the driving pin 148 is moved, the position of the substrate 42 supported by the moving plate 146 relative to the plate 36 is adjusted in the X direction, and the first Y-direction driving pin 152 and the second Y-direction driving are performed. By moving the pin 154 by the same amount, the position of the substrate 42 relative to the plate making 36 is adjusted in the Y direction, and the first Y-direction driving pin 152 and the second Y-direction driving pin 154 are different from each other. The rotational position [theta] relative to the plate making 36 of the substrate 42 is adjusted by moving in the positive or other direction.

Screen printing device, switching control valve, negative pressure supply device, plate making, board

Description

SCREEN PRINTING DEVICE {SCREEN PRINTING APPARATUS}

1 is a side view of a screen printing apparatus according to one embodiment of the present invention;

FIG. 2 is a front view of the printing apparatus of FIG. 1 excluding an alignment apparatus, a squeegee driving apparatus, a substrate conveying apparatus, etc. in order to explain a frame;

3 is a view for showing the plate-making holding device of FIG. 2 in detail, a cross-sectional view taken along III-III of the embodiment;

4 is a plan view showing the plate-making holding device of FIG.

5 is a front view showing the plate-making holding device of FIG.

6 is a front view illustrating a vertical table included in the substrate carrier of FIG. 1;

7 is a bottom view of the upper and lower tables of FIG. 6;

8 is a side view illustrating the upper and lower tables of FIG. 8;

9 is a front view of the upper and lower tables showing a state in which the moving plate is removed in FIG. 6;

FIG. 10 is a front view of a vertical table showing a state in which a moving plate and a second vertical plate are removed in FIG. 6;

FIG. 11 is a side view showing the X-direction positioning device of FIG. 6; FIG.

12 is a plan view showing the X-direction positioning device of FIG. 6;

FIG. 13 is a side view showing the X direction pressing device of FIG. 6;

14 is a plan view showing the X-direction pressing device of FIG.

15 is a front view showing the X-direction pressing device of FIG.

16 is a sectional view showing the main parts of the locking device of FIG. 6;

FIG. 17 is an enlarged view of a first vertical plate of the vertical table included in the substrate carrier of FIG. 1;

18 is an enlarged view illustrating the shapes of the enlarged diameter pin and the internal insertion pin of FIG. 17;

19 is a front view illustrating an enlarged shape of the enlarged diameter pin of FIG. 17;

20 is a view for explaining another example of the block and the stopper member of FIG. 17;

21 is a front view illustrating the squeegee driving device of FIG. 1;

22 is an enlarged view of main parts of the squeegee support plate and the scraper support plate of FIG. 21;

FIG. 23 is a side view in which part of the squeegee support plate of FIG. 21 is enlarged and shown in a cutaway view; FIG.

24 is a cross-sectional view illustrating main parts of a plate connecting device, a fastening device, a squeegee, a scraper, and the like installed on the squeegee support plate and the scraper support plate of FIG. 21;

25 is a view showing a squeegee side coupling and a scraper side coupling for detachably connecting the pneumatic piping of FIG. 21;

FIG. 26 is a block diagram illustrating a configuration of a control device installed in the screen printing apparatus of FIG. 1. FIG.

(Explanation of symbols for the main parts of the drawing)

10: screen printing apparatus

36: Engraving

104: substrate carrier

110: carrier main body

114: up and down table

138: first upper and lower base plate

144: second upper and lower base plate (base plate)

146: moving plate

148: X direction drive pin (X direction drive member)

150: X direction pressing pin (X direction pressing member)

152: first Y-direction driving pin (first Y-direction driving member)

154: second Y-direction drive pin (second Y-direction drive member)

156: first Y-direction pressing pin (first Y-direction pressing member)

158: second Y-direction pressing pin (second Y-direction pressing member)

164: gas hole

168: switching control valve

170: negative pressure supply device

172: compressor body supply device

220: locking device

222: small diameter hole

224: large diameter hole

226: fixed cylinder

440: electronic control device

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen printing apparatus, and more particularly, to a technique for positioning a substrate to be printed in the X direction, the Y direction, and the rotation direction by a simple and compact mechanism.

In the screen printing apparatus, at the printing position, only a small gap is provided between the plate making and the printing substrate, while the handling apparatus for replacing the substrate requires a predetermined space, so that the position is separated from the printing position. It is common to provide a substrate transfer position at a position where the substrate transfer table is reciprocally driven to transfer the substrate from the substrate replacement position to the printing position. In such a screen printing apparatus, an X, Y, and θ control mechanism for aligning the substrate with respect to the plate making is provided on the substrate carrier. Prior to screen printing, by means of the X, Y, θ adjustment mechanisms, the position in the X direction of the substrate, the position in the Y direction orthogonal to the X direction, and the rotational angle position θ should be adjusted with respect to the plate making. The pattern is positioned relative to the substrate.

By the way, the said conventional X, Y, (theta) adjustment mechanism is the X direction moving plate guided so that a movement to an X direction is possible from a base plate, and the X direction which makes the X direction moving plate microscopically in X direction. Fine movement control device, X direction locking device for locking the X direction moving plate, Y direction moving plate guided to move in the Y direction from the X direction moving plate, Y direction fine movement to move the Y direction moving plate in the Y direction Adjusting device, Y-direction locking device for locking the Y-direction moving plate, a rotating plate rotatably installed around its center in the Y-direction moving plate, a rotating fine adjustment device for fine-adjusting the rotation angle position of the rotating plate, the rotating plate It is equipped with a rotation locking device for locking and the like, and the substrate is placed on the rotating plate, so that the volume of the X, Y, θ control mechanism is increased, so that a screen printing device is required. In addition to the increase in size, the weight of the X, Y, and θ control mechanisms becomes large, and the mechanism for reciprocating them becomes large, and there is an unreasonable point that the screen printing apparatus becomes expensive because it requires a large number of parts.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a screen printing apparatus having a simple and inexpensive X, Y and θ control mechanism.

In order to achieve the above object, the present invention is directed to a plate making provided at a substrate printing position, a carrier main body guided between a predetermined substrate replacement position and the substrate printing position, and installed on the conveying main body so as to be accessible to the plate making. A screen having a top and bottom table, and having a substrate carrier for transferring the substrate placed on the top and bottom table from the substrate replacement position to the substrate printing position, and having the substrate positioned directly under the plate making during screen printing A printing apparatus, wherein the top and bottom tables are mounted on the base plate such that (a) the top and bottom base plates and (b) the relative movement in a direction parallel to the top and bottom base plates to support the substrate. The plate and (c) the upper and lower base plates for gripping the movable plate in the X direction. A pair of members provided on the sheet, an X-direction driving member driven in the X direction based on an electrical signal, and an X-direction pressing member to which a predetermined pressing force is directed toward the X-direction driving member; and (d) the movable plate. Two pairs of members provided on the upper and lower base plates to grip in the Y direction orthogonal to the X direction with a predetermined distance from the X direction, the first Y-direction driving member being driven in the Y direction based on an electrical signal. And a first Y-direction pressing member and a second Y-direction pressing member to which the second Y-direction driving member, and a predetermined pressing force toward the first Y-direction driving member and the second Y-direction driving member are applied.

In this case, the movable plate mounted on the upper and lower base plates is gripped by the X direction driving member and the X direction pressing member at a predetermined pressing force in the X direction, and the first Y direction driving member and the first Y direction pressing are performed. Since the member, the second Y-direction driving member, and the second Y-direction pressing member are held at predetermined pressing forces in the Y direction, respectively, the plate making of the substrate supported on the moving plate by moving the X-direction driving member is performed. The position is adjusted in the X direction, and the position with respect to the plate making of the substrate supported on the moving plate is adjusted in the Y direction by moving the first Y-direction driving member and the second Y-direction driving member by the same amount, and the first The rotational position [theta] relative to the plate making of the substrate supported on the moving plate is adjusted by moving the Y-direction driving member and the second Y-direction driving member in different amounts or in different directions. Therefore, according to the present invention, the X-direction moving plate guided to be movable in the X direction by the guide rail in the base plate, the X-direction fine adjustment device for moving the X-direction moving plate in the X direction, the X-direction moving plate is locked. X direction locking device for moving, Y direction moving plate guided to the Y direction by the guide rail in the X direction moving plate, Y direction fine adjustment device for moving the Y direction moving plate in the Y direction, Y direction moving Y-direction locking device for locking the plate, rotating plate rotatably installed around its center in the Y-direction moving plate, rotating fine adjustment device for fine-adjusting the rotation angle position of the rotating plate, rotation locking device for locking the rotating plate Since the X, Y, and θ adjustment mechanisms can be configured without the use of a lamp or the like, the screen printing apparatus becomes small and at the same time the volume is small and the space for it is reduced. Since the weight of the X, Y, and θ control mechanisms becomes smaller, the mechanism for reciprocating them also becomes smaller, and the number of parts decreases, making the screen printing apparatus inexpensive.

Here, preferably, (e) a plurality of gas holes formed in the top surface of the upper and lower base plates, and (f) a compressor body supply device for releasing the compressor body from the plurality of gas holes of the upper and lower base plates; g) a negative pressure supply device for adsorbing the moving plate to the upper and lower base plates with a negative pressure in the plurality of gas holes of the upper and lower base plates, and (h) the movement period of the moving plate from the compressor body supply device. And a switching control valve for supplying the compressor body to the upper and lower base plates, and supplying the negative pressure to the upper and lower base plates from the negative pressure supply device after the positioning of the movable plate is completed, and fixing the movable plate to the upper and lower base plates. will be. In this case, since the compressor body is supplied from the compressor body supply device to the upper and lower base plates by the switching control valve during the movement period of the moving plate, the compressed air is released and moved in the plurality of gas holes of the upper and lower base plates. Since an air film is generated between the plate and the upper and lower base plates that support it, the movable plate is moved with an extremely small force, and after the positioning of the movable plate is completed, the switching control valve Since the negative pressure is supplied to the upper and lower base plates, the inside of the plurality of gas holes of the upper and lower base plates become negative pressure and the moving plate is attracted to the upper and lower base plates supporting it, so that the moving plate is securely fixed. Therefore, a guide rail or the like for moving the moving plate in the X, Y direction or the rotational direction is not necessary, and there is an advantage that the device is simple and compact.

Further, preferably, (i) positioning the X-direction position relative to the plate making of the substrate by changing the X-direction position of the X-direction driving member, and the first Y-direction driving member and the second Y-direction driving member Position the Y direction relative to the plate making by changing the Y direction position of the substrate by the same amount, and change the Y direction positions of the first Y direction driving member and the second Y direction driving member by another amount. And a positioning control device for positioning the rotational position with respect to the plate making.

In this case, since the substrate can be aligned by controlling the compact X-direction driving member, the first Y-direction driving member, and the second Y-direction driving member, the X-direction table guide device, the X-direction table feed screw device, Y-direction table guide device, Y-direction table feed screw device, table rotating mechanism and rotary feed device without using a small and lightweight feed screw mechanism. There is an advantage that the adjustment of.

Preferably, (j) a stepped hole consisting of a small diameter hole and a large diameter hole subsequent thereto and formed through the moving plate, (k) a locking plate smaller than the large diameter hole, and (l) And a locking device having a fixed cylinder provided on the upper and lower base plates, the output rod having a smaller diameter than the small diameter hole and penetrating the small diameter hole and having the locking plate fixed to the distal end. In this case, there is an advantage that the movable plate can be fixed to the upper and lower base plates even in a state where the plurality of gas holes in the upper and lower base plates are not negatively pressured.

Preferably, (m) the moving plate has a rectangular shape, and (n) the X-direction driving member and the X-direction pressing member are engaged with two sides parallel to the Y-direction of the moving plate and move. A circular cross-section pin for holding the plate in the X direction, (o) the first Y-direction drive member and the second Y-direction drive member, the first Y-direction pressing member and the second Y-direction pressing member, the It is a pin of circular section which engages with two sides parallel to the X direction and grips the moving plate in the Y direction. In this case, since the two moving sides parallel to each other are fitted at predetermined pressing forces by the pins of the circular cross section in the X and Y directions, the X direction drive member, the X direction pressing member, and the first Y direction. Even if the contact position of the driving member, the second Y-direction driving member, the first Y-direction pressing member, and the second Y-direction pressing member is displaced, there is an advantage that the adjustment position of the moving plate is not affected.

(Example)

EMBODIMENT OF THE INVENTION Hereinafter, the screen printing apparatus 10 for large format board | substrates of one Embodiment of this invention is demonstrated in detail based on drawing. 1 is a side view of the screen printing apparatus 10, and FIG. 2 is a front view. In FIG. 1, the squeegee drive device 12 is shown by the cover which covers it, In FIG. 2, the alignment substrate position detection device 13, the squeegee drive device 12 mentioned later, etc. are isolate | separated. 2, the right part R is a printing position for screen-printing the board | substrate 42 mentioned later, and the left part L is the handling apparatus which the board | substrate 42 does not show in figure. A pair of position marks on the substrate 42 which are replaced positions to be replaced and detected by the pair of alignment substrate position detecting devices 13 before the printing of the replaced new substrate 42 are described above and below. It is also a position which is positioned at a printing position preset by the XY-θ position adjusting function of the table 114.

The screen printing apparatus 10 is provided with the machine frame | frame, namely the frame 14 which forms a rectangular frame shape with a long horizontal view from the front, and forms a right triangle frame from the side. The frame 14 has a rectangular frame base frame 18 having a plurality of floor pads 16 in contact with a horizontal installation surface, that is, a bottom surface, and a non-worker (back side) of the base frame 18. A pair of vertical pillars 22 installed vertically at a pair of corner portions on the side and connected to each other by a connecting beam 20 horizontally at the top, and the operator (front) of the base frame 18. A pair of inclined pillars 24 and the pair of inclined pillars 24 which are installed in an inclined state at, for example, about 60 degrees from a pair of corners on the side and connected to an upper end of the vertical column 22, and the pair of inclined pillars 24 It has a top horizontal frame 26 and the lower horizontal frame 28 is fixed to the upper end and the lower end of the horizontally placed between these upper and lower ends, respectively. In addition, the upper horizontal frame 26 and the lower horizontal frame 28 are increased in rigidity by reinforcing members 30, 32, and 34 connected to the intermediate portions thereof.

As shown in FIG. 3, the plate making 36 used for the screen printing apparatus 10 is for printing a very large thick film having an appearance of about 1500 (length) mm x 1800 (width) mm, for example. It consists of a rectangular frame 38 made of a light alloy such as an alloy, and a screen 40 provided on one surface of the rectangular frame 38. The screen 40 has an emulsion made of a photocurable resin at a predetermined thickness. A negative image of an image to be printed is formed by removing the uncured portion that is shielded during light exposure after application, that is, during curing of the emulsion. Since only the portion of the screen 40 where the photocurable resin coating has been removed is allowed to pass the paste, thick film printing of a desired pattern can be performed on a large substrate 42 for a 40-inch plasma display, for example. have. In the upper horizontal frame 26 and the lower horizontal frame 28, a plurality of (6 in the present embodiment) for holding and holding the plate making 36 in an inclined state of about 60 degrees to be fixed to the frame 14 Plate-making holding device 44 is provided. The upper horizontal frame 26 and the lower horizontal frame 28 function as a plate making frame for fixing the plate making 36 in an inclined state at about 60 degrees.

On the upper horizontal frame 26 and the lower horizontal frame 28, a pair of first guide plates having an elongated shape having a guide surface facing one surface of the plate making 36, that is, the surface on the screen 40 side of the rectangular frame 38 ( 46 and a pair of elongated second guide plates 48 having guide surfaces opposed to the end faces of the platen 36 are fixed to each other so as to be horizontal, respectively, and these first guide plates 46 and second guide plates ( 48), the plate making 36 is guided in the horizontal direction. In addition, the second guide plate 48 fixed to the lower horizontal frame 28 is provided with a plurality of spherical rotary bodies 50 respectively protruding slightly from the guide surfaces of the first guide plates 46. A pair of resin conveying rollers 54, such as a nylon resin and a fluorine resin, which protrude by the cylinder 52 from the guide surface thereof, is provided, and at the time of replacing the relatively heavy plate-making 36, When the plate making 36 or the new plate making 36 is moved horizontally, i.e., in the left-right direction in the front view of FIG. 2, the movement is caused by the rotation of the spherical rotating body 50 and the resin conveying roller 54. The resistance is to be alleviated. The first guide plate 46 and the second guide plate 48 are fixed to the upper horizontal frame 26 and the lower horizontal frame 28 with a predetermined spacer member. For example, in the lower horizontal frame 28, as shown in Figs. 3 and 4, the elongated shape member 56 and the elongate shape member 56 of the square cross-section fixed to the upper surface of the lower horizontal frame 28. The spacer member 58 fixed to the front surface of () is inserted, and the 1st guide plate 46 is fixed.

The plate-making holding device 44 has the spacer member 58 in the cutout 59 provided at three positions in the longitudinal direction of each first guide plate 46, as shown in detail in FIGS. 3 to 5. Abutting plate installed in a direction perpendicular to the guide surface of the first guide plate 46 by a guide rail 60 fixed to the first guide plate 46 or the contact plate movably installed in the thickness direction of the first guide plate 46 or the plate-making 36 62, a contact plate drive cylinder 64 fixed to the elongate shape member 56 to drive the contact plate 62 in the thickness direction and to move the contact plate 62; The plate thickness gauge 66, which is a plate-shaped thickness gauge for setting the plate spacing D1 between the screen 40 and the substrate 42, and the permanent magnet 68 for absorbing the plate gap gauge 66. The fitting hole 70 for detachably inserting the plate space gauge 66 on the bottom and detachably It is formed at the upper half, and is integrally connected to the movable portion 74 of the slide cylinder 72 fixed to the elongate shape member 56, and is located at two positions in the vertical direction parallel to the screen 40 of the plate making 36. Backing member 78 fixed to elongate shape member 56 in sliding contact with the gauge holding member 76 and the back surface of the gauge holding member 76 in order to receive a narrow pressure load. And a clamp cylinder (86) having an output rod (82) fixed at the tip and protruding toward the abutting plate (62) and fitted with a bracket (84) to a lower horizontal frame (28). ).

The plate spacing D1 between the screen 40 of the plate making 36 and the substrate 42 (dotted and dashed lines in FIG. 3) raised during screen printing is one of the setting conditions for screen printing, and the screen 40 ), The fineness of the lines of the printed pattern, the viscosity of the paste, and the like. In the screen printing apparatus 10 according to the present embodiment, the plate-making holding device 44 configured as described above allows the confirmation of the zero of the plate gap D1 and the setting of the plate gap D1 in the printing state to be reliable. With a high simple structure, it is further performed with high precision. That is, in the state where the plate-making 36 is guided to a predetermined printing position, as shown by the solid line of FIG. 3, FIG. 4, FIG. 5, the output rod 82 is pulled in by the clamp cylinder 86, In the non-coupling position, the movable cylinder 74 is in the ascending side position by the slide cylinder 72, and the plate interval gauge 66 is moved upward from the position opposite to the rear surface of the contact plate 62. At the same time, as shown by the dashed-dotted line in FIG. 4, the abutment plate 62 is drawn to the non-worker side by the abutment plate driving cylinder 64, whereby the plate making 36 is also the first guide plate ( In accordance with the clearance state or mutual contact state between the board | substrate 42 and the said screen 40 raised to the printing position because it descend | falls to the 46 side, confirmation of the board | substrate gap D1 by an operator is performed easily.

Next, the abutting plate 62 protrudes toward the worker side by the abutting plate driving cylinder 64, and the plate making 36 is raised to the clamp cylinder 86 side, that is, to the worker side, from the first guide plate 46. In the spaced state, the plate spacing gauge 66 for forming the plate spacing D1 suitable for the printing condition is replaced with that up to the fitting hole 70 of the gauge holding member 76. This plate spacing gauge 66 has a thickness dimension substantially adding the depth of the plate spacing D1 and the fitting hole 70. Next, the movable portion 74 is brought into the lowering side position by the slide cylinder 72 so that the plate gap gauge 66 is positioned opposite to the rear surface of the abutting plate 62, and the abutting plate driving cylinder ( When the abutment plate 62 is pulled to the non-worker side by 64, the plate gap gauge 66 and the gauge holding member 76 are pressed together between the abutment plate 62 and the backup member 78. As a result, the front surface of the contact plate 62 protrudes toward the clamp cylinder 86 as much as the portion forming the plate spacing D1. In this state, the output rod 82 of the clamp cylinder 86 protrudes, and the rectangular frame 38 is pressed between the press pad 80 and the abutting plate 62 at the tip thereof, whereby the plate spacing D1 is achieved. ) Is secured in a state in which is formed reliably.

As a result, compared with the case where a complicated mechanism for continuously varying the plate spacing D1 is provided, it becomes simpler and smaller, thereby reducing the attachment space, making maintenance easier and at the same time setting the plate spacing. The reliability of (D1) becomes high. That is, by the structure which presses the plate space gauge 66 by the contact plate drive cylinder 64 and the clamp cylinder 86, there is no change of the plate space D1 set once, and reliability becomes high. In addition, since the replacement of the plate interval gauge 66 is also simplified, there is an advantage that the man-hour of setting the plate interval is reduced.

Further, the plate gap gauge 66 has a fitting hole 70 in which the plate gap gauge 66 is detachably inserted in the upper part of the front surface, so that the rectangular frame 38 which is the outer circumference of the plate making 36 and the backing member 78 which is a position fixing member are provided. Position where the gauge holding member 76 and the gauge holding member 76 provided therebetween are sandwiched between the backup member 78 and the plate-making 36, and are not inserted. The plate spacing gauge holding device 88 is comprised from the slide cylinder 72 which functions as an actuator to move between, and the plate spacing gauge holding device 88 is not inserted and inserted. When the plate-making 36 is pressed by the pressure pad 80 of the clamp cylinder 86 in the state of being made into a state, the plate | board spacing gauge 66 does not exist between the pressure pad 80 and the backup member 78. Therefore, it is possible to confirm that the plate spacing D1 is zero. At the time, since the fitting hole 70 is formed in the upper portion of the gauge holding member 76, there is an advantage that the plate gap gauge 66 is easily replaced.

In addition, a contact plate provided between the rectangular frame 38, which is the outer circumferential portion of the platen 36, and the plate gap gauge 66, to face the pressing pad 80 and to be movable in the pressing direction and the semi-pressing direction thereof ( 62 and the contact plate 62 are driven in the pressing direction so that the plate gap gauge 66 is pushed between the rear surface and the backup member 78, or the contact plate 62 is pressed against the half. Since the contact plate drive cylinder 64 functioning as an actuator which enables movement of the gauge holding member 76 in the vertical direction by driving in the direction is provided, the platen 36 is brought into contact with the contact plate 62. By lifting upward and moving the gauge holding member 76 upward, there is an advantage that the gauge plate 66 can be easily replaced without being bound by the load of the plate making 36.

Further, a clamp cylinder 86 fixed to the frame 14 by fitting a bracket 84 with a pressure pad 80 functioning as a pressure member and an output rod 82 on which the pressure pad 80 is fixed to the tip. Since the clamp device 90 is comprised and the pressing pad 80 is pushed toward the backup member 78 which is a position fixing member, the plate-making 36 is interposed between them, There is an advantage that it is easily fixed regardless of the thickness of).

In addition, the abutment plate 62 has a thickness dimension larger than the thickness increased by inserting the plate spacing gauge 66 between the backup member 78 and the plate making plate 36, so that the plate spacing zero is confirmed. In the state, the screen 40 and the plate gap gauge 66 are spaced apart from each other. Moreover, the fitting hole 70 is such that the plate gap gauge 66 fitted therein is pulled out toward the center of the screen 40. Since a part of the circumference is cut out so as to be possible, there is an advantage that the plate-gauge gauge 66 fitted in the fitting hole 70 of the gauge holding member 76 can be easily replaced.

Returning to FIG. 1, the frame 14 conveys the board | substrate 42 before printing from the board replacement position L to the printing position R, or transfers the board | substrate 42 after printing from the printing position R to the board | substrate. The board | substrate conveying apparatus 100 for conveying to the replacement position L is provided. The substrate conveying apparatus 100 includes two conveying rails 102 fixed to the upper horizontal frame 26 and the lower horizontal frame 28 of the frame 14 so as to extend in the horizontal direction, that is, the X direction described later. The substrate carrier 104 is guided in an inclined state parallel to the plate making 36 between the substrate replacement position (L) and the printing position (R), and the substrate carrier (104) and the substrate replacement position (L) The conveyance drive apparatus 106 which drives back and forth to the printing position R is provided.

As shown in FIG. 1, the substrate carrier table 104 is perpendicular to the carrier body 110 by a plate-shaped carrier base 110 guided by the carrier rail 102 and a guide rod 112. The upper and lower table driving functions as a drive device for driving the upper and lower tables 114, which are provided on the conveyance main body 110 so as to be spaced apart from the plate-making body 36 by being guided in the direction, and the upper and lower tables 114. The cylinder 116 is provided. In addition, the conveying drive device 106 is a flat surface, that is, including a pair of endless belts 120 fixed to a part of the upper end and the lower end of the conveying main body 110 and the two conveying rails 102, namely A rotating shaft 124 rotatably supported by inserting the bearing 122 into the frame 14 in a position perpendicular to the conveying direction of the conveying body 110 in a plane parallel to the screen surface of the plate-making 36; A pair of pulleys 126 fixed to both ends of the rotary shaft 124 and wound around the pair of endless belts 120, and fixed to an output shaft of the drive motor 128 by being fixed to a central portion of the rotary shaft 124. A pulley 134 is wound around the endless belt 132 together with the pulley 130. As a result, the substrate carrier table 104 is reciprocally driven between the substrate replacement position L and the printing position R by the drive motor 128.

FIG. 6 is a front view showing the top and bottom table 114 of the substrate carrier 104, FIGS. 7 and 8 are bottom and side views thereof, and FIG. 9 is a top and bottom table showing a state where the moving plate 146 is removed. FIG. 10 is a front view of the vertical table 114 showing a state where the moving plate 146 and the second upper and lower base plates 144 are removed.

As shown in detail in the figure, the upper and lower tables 114 of the substrate carrier 104 are positioned in the X direction of the substrate 42 relative to the platen 36 at the substrate replacement position L or the printing position R. FIG. , And also functions as an XYθ table for finely adjusting the Y-direction position and the rotational angle position θ by automatic or manual operation. A rectangular second upper and lower base plate 144 fixed in the center of the first upper and lower base plate 138 and fixed on the first upper and lower base plate 138, and a position not shown. On the second upper and lower base plates 144 to allow relative movement in a direction parallel to the second upper and lower base plates 144 to mount or support the substrate 42 in a state positioned by the determining member. A laid tooth The plate 146 and the movable plate 146 are provided on the first upper and lower base plates 138 and the second upper and lower base plates 144 to grip the plate in the X direction (in this embodiment, left and right directions when viewed from an operator). As a pair of members, the X direction driving pin 148 driven in the X direction according to the electrical signal, and the X direction pressing pin 150 given a predetermined pressing force toward the X direction driving pin 148, and The first upper and lower base plates 138 to grip the movable plate 146 in the Y direction (up and down view from the operator in this embodiment) orthogonal to the X direction while being spaced apart by the predetermined distance A from the X direction. ) And two pairs of members provided on the second upper and lower base plates 144, the first Y-direction driving pins 152 and the second Y-direction driving pins 154 driven in the Y-direction according to an electrical signal, and the second members. 1 Y direction drive pin 152 and 2 Y direction drive pin A first Y-direction pressing pin 156 and a second Y-direction pressing pin 158 applied with a predetermined pressing force toward 154 are provided.

As a result, the movable plate 146 mounted on the second upper and lower base plates 144 is gripped with a predetermined pressing force in the X direction by the X direction driving pin 148 and the X direction pressing pin 150. By the first Y-direction driving pin 152 and the first Y-direction pressing pin 156, the second Y-direction driving pin 154 and the second Y-direction pressing pin 158 to the predetermined pressing force in the Y direction, respectively Since the X direction driving pin 148 is moved, the position of the substrate 42 supported by the movable plate 146 relative to the plate making 36 is adjusted in the X direction, and the first Y direction driving pin 152 is held. ) And the second Y-direction driving pin 154 are moved by the same amount, the position of the substrate 42 supported on the moving plate 146 relative to the plate making 36 is adjusted in the Y direction, and the first Y The substrate supported on the moving plate 146 by the direction driving pin 152 and the second Y direction driving pin 154 being moved in different amounts or in different directions ( The rotational position θ relative to the plate making 36 of 42 is adjusted. Therefore, the X-direction moving plate guided to be movable in the X direction by the guide rail in the second upper and lower base plate 144, the X-direction fine adjustment device for moving the X-direction moving plate in the X direction, the X-direction moving plate X-direction locking device for locking the lock, Y-direction moving plate guided to the Y-direction by the guide rail in the X-direction moving plate, Y-direction fine adjustment device for moving the Y-direction moving plate in the Y direction, Y Y-direction locking device for locking the direction moving plate, a rotating plate rotatably installed around its center in the Y-direction moving plate, a rotating fine adjustment device for fine-adjusting the rotation angle position of the rotating plate, rotation for locking the rotating plate Since the X, Y, and θ adjustment mechanisms can be configured without using a locking device or the like, the screen printing apparatus 10 becomes thin because the volume is small and the space for it is reduced. At the same time, the smaller the X, Y, θ weight of the adjusting mechanism is also small mechanism which it reciprocates, and the number of components can be a screen printing device with low cost and lightweight because a note.

The second upper and lower base plate 144 has the same width as the width of the first upper and lower base plate 138, but is smaller than the vertical dimension of the first upper and lower base plate 138. For example, it has a vertical dimension of 1/2 or less, and as shown in detail in FIG. 11, the lower plate 160 fixed on the first upper and lower base plates 138 by sandwiching the plate-shaped spacer 140. The upper plate 162 fixed in close contact with the upper surface of the lower plate 160 and a plurality of relatively small diameter gas holes 164 penetrating the upper plate 162 and arranged on one surface at predetermined intervals. ) And a communication concave portion 166 formed on the upper surface of the lower plate 160 to communicate the plurality of gas holes 164 with each other on the rear surface of the upper plate 162, and the plurality of gas holes on the top surface thereof. With (164) installed There. The communication concave portion 166 has a negative pressure supply device 170 for attaching the switching control valve 168 to suck the moving plate 146 to the second upper and lower base plates 144 with negative pressure in the gas hole 164. And a compressor body supply device 172 for discharging the compressor body from the gas hole 164. The switching control valve 168 supplies the compressor body from the compressor body supply device 172 to the communication recess 166 of the second upper and lower base plates 144 during the movement period of the moving plate 146, and moves the movement. After positioning of the plate 146 is completed, the negative pressure is supplied from the negative pressure supply device 170 to the communication concave portion 166 of the second upper and lower base plate 144, and the movable plate 146 is moved to the second upper and lower base. Fix to plate 144. The negative pressure supply device 170 is configured with, for example, a vacuum pump for outputting negative pressure, and the compressor body supply device 172 is configured with a compressor for outputting compressed air, for example.

Thereby, in the movement period of the moving plate 146, a compressor body is supplied from the compressor body supply apparatus 172 to the 2nd upper and lower base plates 144 by the switching control valve 168 which functions as a switching control apparatus. Therefore, the compressed air is discharged in the plurality of gas holes 164 of the second upper and lower base plates 144, and the compressed gas layer or the compressed body is moved between the movable plate 146 and the second upper and lower base plates 144 supporting it. Since the film is generated, the moving plate 146 is driven with a very small force by the X-direction driving pin 148, the first Y-direction driving pin 152, and the second Y-direction driving pin 154, which are driven in accordance with the electric signal. After the positioning of the moving plate 146 is completed, the negative pressure is supplied from the negative pressure supply device 170 to the second upper and lower base plates 144 by the switching control valve 168, so that the second pressure is supplied. A plurality of upper and lower base plates 144 Since the absorption in the gas holes 164. The second upper and lower base plate 144 for supporting I is moved by a negative pressure plate 146 of it, the moving plate 146 is secured. This eliminates the need for a guide rail or the like for moving the moving plate 146 in the X, Y, or rotational directions [theta], and makes the screen printing apparatus 10 simple and compact. In addition, since the moving plate 146 is supported by the second upper and lower base plates 144 by sandwiching the compressor body layer, the X direction shifting device 180, the first Y direction shifting device 182, and the first There is an advantage that the motor and the screw shaft in the 2 Y-direction shifting device 184 become significantly smaller.

X-direction drive pins 148 to engage the end surface of the side parallel to the Y direction of the movable plate 146 and the first Y-direction drive pins to engage the end surface of the side parallel to the X direction of the movable plate 146 ( 152 and the 2nd Y-direction drive pin 154 function as an X-direction drive member and a Y-direction drive member, respectively, For example, it is comprised by a miniature bearing or a small diameter bearing, and has a circular cross section. These X-direction driving pins 148, the first Y-direction driving pins 152 and the second Y-direction driving pins 154 are the X-direction positioning device 180 and the first Y-direction moving device 182 and It is provided in the 2nd Y-direction position shifter 184, respectively. These X-direction position shifting device 180, the 1st Y-direction shifting device 182, and the 2nd Y-direction shifting device 184 are comprised as shown to FIG. 11 and FIG. These configurations will be described below by representing the X-direction positioning device 180.

11 and 12, the X-direction positioning device 180 includes a screw shaft 188 in a direction parallel to the X direction rotatably supported by inserting a bearing 186 in the first upper and lower base plate 138. An X-direction pulse motor 190 connected to the screw shaft 188 and serving as a rotary drive device for rotating the rotary shaft, and a guide rail in a direction parallel to the X direction fixed to the first upper and lower base plates 138. 192 and a moving block 194 guided in the X direction by the guide rail 192 and screwed to the screw shaft 188 and moved by a distance corresponding to the rotation angle of the screw shaft 188. The arm 198 protruded from the movable plate 194 and received therein into the X-direction cutout 196 cut into the second vertical base plate 144 from the end edge in the X-direction, and the cylindrical outer circumferential surface is moved. Curvature of the outer circumferential surface in contact with the end surface parallel to the Y-direction of 146 The X-direction drive pin 148 of the circular cross section attached to the front-end | tip part of the arm 198 is provided so that a center line may become perpendicular | vertical with respect to the 2nd upper and lower base plate 144. As shown in FIG.

In addition, the X-direction pressing pin 150 and the movable plate 146 which are engaged with the end surface of the side parallel to the Y-direction of the movable plate 146 to hold the movable plate 146 together with the X-direction driving pin 148. The first Y-direction pressing pin 156 that grips the movable plate 146 together with the first Y-direction driving pin 152 and the second Y-direction driving pin 154 by engaging the end surface of the side parallel to the X direction of ) And the second Y-direction pressing pin 158 are provided in the X-direction pressing device 200, the first Y-direction pressing device 202, and the second Y-direction pressing device 204, respectively. These X direction pressurizing apparatus 200, the 1st Y direction pressing apparatus 202, and the 2nd Y direction pressing apparatus 204 are comprised as shown to FIGS. 13-15. Hereinafter, these structures are represented by the X-direction pressurization apparatus 200 and demonstrated.

13 to 15, the X-direction pressurizing device 200 includes a pressure cylinder 206 fixed to the rear surface of the second upper and lower base plates 144 and a tip of the output rod 208 of the pressure cylinder 206. An output plate 212 fixed to one end of the output rod 208 by a guide rod 210 parallel to the output rod 208 and prevented from rotating around its axis, and the output plate 212. The arm 216 and the cylindrical outer circumferential surface protruded in the X-direction notch 214 formed by cutting in the X direction from the end edge to the 2nd up-and-down base plate 144 in the Y direction of the movable plate 146 A circular cross section X-direction pressing pin 150 attached to the distal end of the arm 216 in contact with an end surface parallel to the center surface and the center of curvature of the outer circumferential surface thereof is perpendicular to the second upper and lower base plates 144, The pressing force according to the pressure supplied to the pressure cylinder 206 It is provided to the moving plate 146 from the X direction pressing pin 150.

As described above, the X-direction driving pin 148, the X-direction pressing pin 150, the first Y-direction driving pin 152, the first Y-direction pressing pin 156, the second Y-direction driving pin 154 The second Y-direction pressing pin 158 has a circular cross section, and is engaged with two sides parallel to the Y direction and two sides parallel to the X direction of the rectangular moving plate 146, whereby the moving plate 146 is engaged. Since they are fitted at predetermined pressing forces, even if the contact position of these pins with respect to the movable plate 146 is shifted, there is no influence on the adjustment position of the movable plate 146, and since there is no backlash, There is an advantage that high positioning accuracy is obtained.

In addition, as shown in detail in FIG. 16, the second upper and lower base plates 144 are provided with a locking device 220 for properly fixing the movable plate 146.

In the movable plate 146, a small diameter hole 222 is formed on the first upper and lower base plate 138 side, and a large diameter hole 224 subsequent thereto is formed on the substrate 42 side. A stepped hole formed of such a small diameter hole 222 and a large diameter hole 224 penetrates through the movable plate 146. The locking device 220 has a fixed cylinder 226 fixed to the rear surface of the second upper and lower base plates 144 and an outer shape as small as a predetermined gap D2 with respect to the inner circumferential surface of the large diameter hole 224. A circular locking plate 228 fitted into the large diameter hole 224, and a locking plate (3) at the distal end of the output rod 230 protruding from the fixed cylinder 226 through the small diameter hole 222; 228 is fixed. The distance between the outer circumferential surface of the output rod 230 and the inner circumferential surface of the small diameter hole 224 is set equal to or greater than the gap D2, and the movable plate 146 is within the range of the gap D2. While being movable in a plane parallel to the two upper and lower base plates 144, the output rod 230 of the fixed cylinder 226 is pulled in, so that a plurality of gas holes of the second upper and lower base plates 144 are provided. 164, the movable plate 146 is fixed to the 2nd upper and lower base plates 144 even if the inside does not become a negative pressure.

17, 18, and 19 show that the upper and lower tables 114 including the first upper and lower base plates 138 and the like are lifted to the side approaching the plate making 36 by the upper and lower table driving cylinders 116. In order to increase the repeat positioning accuracy with respect to the plate-making 36 of the board | substrate 42, the positioning apparatus 240 provided between the said 1st upper and lower base plate 138 and the spacer member 58 which is a position fixing member is provided. It is a figure explaining in detail. 17, the spacer member 58 is a position fixing member fixed to the lower horizontal frame 28 or the upper horizontal frame 26, as shown in Figure 3 or 5, the positioning device 240 is The upper and lower corner portions of the spacer member 58 are formed by fitting holes 242 in a direction perpendicular to the first upper and lower base plates 138 having an axial center (FIGS. 6, 9, and 10). And a pair of fitting members 246 fixed to the cylindrical attachment member 244 and a fitting hole of the fitting member 246 when the first upper and lower base plates 138 are raised. 242 includes a pair of fitting pin devices 248 installed on the first upper and lower base plates 138.

The fitting pin device 248 has an outer diameter slightly smaller than that of the fitting hole 242 and is spaced from the first upper and lower base plates 138 at a position concentric with the fitting hole 242. Cylindrical enlarged diameter pin 250 protruding on the side, that is, the plate-making 36 side, the inner insertion pin 252 fitted inside the enlarged diameter pin 250, and the first upper and lower base plates 138 And an internal insertion pin drive cylinder 254 which is fixedly installed on the back side and functions as an internal insertion pin drive device for driving the internal insertion pin 252 in the axial direction.

As shown in detail in FIGS. 18 and 19, the cylindrical enlarged diameter pin 250 has a plurality (8 in the present embodiment) cut out from the tip along a plane passing through its central axis so as to be equally spaced in the circumferential direction. Slit 256 and a tapered inner circumferential surface 258 that becomes a smaller diameter toward the tip from the inner circumferential surface, and also on the outer circumferential surface of the inner insertion pin 252, a taper outer circumferential surface 260 that becomes a smaller diameter toward the tip ) Is formed. For this reason, as the first upper and lower base plates 138 approach the plate-making plate 36 to the position indicated by the dashed-dotted line in FIG. 17, the enlarged diameter pin 250 is inserted into the fitting hole 242 of the fitting member 246. ) Is inserted, when the internal insertion pin 252 is driven to the front end side by the internal insertion pin drive cylinder 254, the tapered outer peripheral surface 260 is pushed by the tapered inner peripheral surface 258 to enlarge and enlarge the diameter pin The outer shape of the 250 is enlarged in diameter so that the fitting member 246 and the fitting pin device 248 are centered so that the upper and lower tables 114 and the substrate 42 mounted thereon are highly precise with respect to the plate making 36. Road positioning is intended. In addition, since the positioning is performed by the diameter expansion of the enlarged diameter pin 250 inserted in the fitting hole 242, it becomes unnecessary to provide a tapered surface in the fitting hole 242, It is difficult to be affected by changes over time or adjustments, and the positioning accuracy is maintained.

In addition, the substrate carrier table 104 is a substrate (110) guided by the conveying rail 102 between the substrate printing position (R) and the substrate replacement position (L), and plate-making on the conveying body (110) And a top and bottom table 114 provided to be spaced apart from each other with respect to 36, wherein the fitting hole 242 is provided at a portion corresponding to the substrate printing position R in the position fixing spacer member 58, Since the fitting pin device 248 is provided on the upper and lower tables 114, the gap in positioning due to the gap enabling the operation of the lifting mechanism for raising and lowering the upper and lower tables 114 is also eliminated, thereby providing a substrate ( The positioning accuracy of 42) is further improved. According to the experiments of the present inventors, in the conventional apparatus, the positioning accuracy of the substrate 42 was about 15-20 μm in the positive direction, whereas in the screen printing apparatus 10 of the present embodiment, it was about 3 μm in the government. . In addition, in the screen printing apparatus 10 of the present embodiment, it is unnecessary to install a sliding bearing or a mechanism for pressing the sliding bearing in advance in the linear sliding portion guided by the conveying rail 102 or the guide rod 112, thereby requiring maintenance. At the same time, there is an advantage that the device becomes inexpensive.

In addition, a fitting pin device 248 composed of the enlarged diameter pin 250, the internal insertion pin 252, and the internal insertion pin driving cylinder 254 is provided on the first upper and lower base plates 138 of the upper and lower tables 114. Since it is provided, there is an advantage that the squeegee drive device 12 can be easily installed as compared with the case where it is provided on the plate-side member such as the spacer member 58 or the like.

Returning to FIG. 17, the first upper and lower base plates 138 of the upper and lower tables 114 abut on one surface of the first upper and lower base plates 138 of the block 262 fixed to the spacer member 58. The stopper member 264 is provided, and the movement position toward the plate-making 36 side of the upper and lower tables 114 is accurately determined. These blocks 262 and the stopper member 264 may be provided in plural, but may be one. In addition, 266 is a shock absorber for suppressing the vibration generated by the contact at the rising end and the falling end of the first upper and lower base plate 138.

For example, as shown in FIG. 20, the V groove 268 is formed in the block 262, and the width is increased toward the tip to fit the stopper member 264 into the V groove 268. This tapered portion 270 may be formed. In this way, the positioning accuracy is further improved. In order to obtain sufficient positioning accuracy, at least two positioning devices 240 are provided, that is, two or more positioning devices or one positioning device 240 and the block 262 shown in FIG. What is necessary is just to provide the stopper member 264 to be fitted. In the latter case, it is preferable that the axial center of the positioning device 240 exists on the extension line of the V groove 268.

Next, the squeegee drive apparatus 12 of FIG. 1 is demonstrated using FIGS. 21-25. Fig. 21 is a front view showing the squeegee driving device 12, Fig. 22 is an enlarged view of the main portion of the squeegee driving device 12, Fig. 23 is a sectional view seen from XXIII-XXIII of Fig. 22, and a squeegee driving device. An enlarged view of the main portion of FIG. 12, FIG. 24 is a sectional view showing a state in which the scraper 368 is stopped, and FIG. 25 is a squeegee of the squeegee side coupling 392 and the scraper side coupling 394. FIG. It is sectional drawing which shows the attachment state to the support plate 290 and the scraper support plate 292. As shown in FIG.

The squeegee drive device 12 pushes a paste (not shown) placed on the screen 40 of the plate making 36 in one direction (upward in FIG. 21) along the screen 40 at the time of screen printing, It is for returning the paste moved to the one direction side from the return to the other direction (down direction in FIG. 21). In FIG. 21, the squeegee driving device 12 is parallel to the plate making 36 by two pairs of guide rails 280 provided at the upper horizontal frame 26 and the lower horizontal frame 28, respectively. The rectangular frame 284 is guided in a direction perpendicular to the direction and spaced apart from the plate-making 36 by two pairs of cylinders 282 provided on the upper horizontal frame 26 and the lower horizontal frame 28, respectively. ). The drive base plate 288 is connected to the upper end of the rectangular frame 284 by inserting a plurality of connection bars 286 (four in the present embodiment).

A pair of guide rails 289 are fixed to the left and right sides of the rectangular frame 284 along the longitudinal direction, and the squeegee support plate 290 and the scraper support plate 292 are a pair of guide rails. Both ends of the left and right are guided to the 289 so as to be independently reciprocated along the plate 36 at a position spaced a predetermined distance from the screen 40 of the plate plate 36 toward the operator. Two pairs of bearings 294 are provided on the lower left and right sides of the rectangular frame 284 and the driving base plate 288, and a pair of upper and lower ends rotatably supported by these bearings 294. The screw shaft 296 is provided in parallel with the guide rail 289. The reducer 298 and the drive motor 300 are fixed to the drive base plate 288, and one of the pair of screw shafts 296 is fitted with the reducer 298 connected to the upper end of the drive motor 300. At the same time, a pair of screws 296 are operatively connected by sandwiching a belt 304 hung on pulleys 302 fixed to their upper ends, respectively. As a result, the squeegee support plate 290 having both ends screwed to the pair of screw shafts 296 and the scraper support plate 292 connected thereto are connected to the screen of the plate-making 36 by the drive motor 300. 40 is integrally reciprocated along the plate 36 at a position spaced apart from the predetermined distance. In this embodiment, the squeegee support plate 290 and the scraper support plate 292 function as the first reciprocating member and the second reciprocating member.

The squeegee support plate 290 and the scraper support plate 292 are detachably connected by a pair of left and right plate connecting devices 306 provided at both ends of the squeegee support plate 290. As shown in detail in FIG. 24, the plate connecting device 306 has a connecting plate 308 protruding from the squeegee supporting plate 290 above the scraper supporting plate 292 and a tip of the connecting plate 308. In the engaging hole 310 formed in the upper surface of the scraper support plate 292 by being installed so as to be accessible to the scraper support plate 292 side to the side of the scraper support plate 292 by a spring (not shown) A connecting pin 312 is fitted.

As shown in detail in FIGS. 22 and 23, the squeegee support plate 290 has a position where the squeegee 320 abuts against the screen 40 of the plate making 36 and pushes it further down the screen 40. A squeegee upper and lower cylinder 322 for driving to a position spaced a predetermined distance from the middle, and a middle height position stopper cylinder functioning as a middle height stopper for making the squeegee 320 an intermediate height at which the tip thereof suitably contacts the screen 40. 324 and a rising limit position stopper 326 for setting the rising limit position of the squeegee 320 are provided. The squeegee 320 has a shape that is slightly shorter than the width dimension of the plate making 36, and has a long band-shaped squeegee body 328 made of an elastic body such as a synthetic rubber such as urethane rubber or a natural rubber, and the squeegee body ( 328 is composed of a metal squeegee holding member 330 fitted together. The squeegee upper and lower cylinders 322 are provided with adjustment screws 332 with a locking function for setting the projecting height of the output rod, that is, the lower limit position of the squeegee 320. The intermediate height position stopper cylinder 324 is provided with an adjustment screw 334 with a locking function for setting the protruding length of the output rod, that is, the intermediate height stopper position of the squeegee 320. The rising limit position stopper 326 is provided with an adjustment screw 336 with a locking function for setting the height position at the lower end thereof, that is, the rising limit position of the squeegee 320.

A squeegee holding device 340 for holding the squeegee 320 is connected to a distal end of the output rod 338 of the squeegee upper and lower cylinders 322. The squeegee holding device 340 has a long plate shape with both ends protruding downward, and a pair of guide rails 342 fixed at both ends in the longitudinal direction toward the bottom of the squeegee support plate 290 downward. The upper and lower members 346 having a long shape, which are guided in the direction perpendicular to the screen 40 and whose central portion in the longitudinal direction is fitted with the swing coupling 344 to the output rod 338, and the upper and lower parts thereof. The vertical position adjusting member 352, which is installed to be adjustable in the vertical direction by the adjustment screw 348 with respect to the member 346, and which is fixed by the vertical movement fixing screw 350, and the vertical position adjusting member thereof. The length of the rotary motion position adjustment bar 356 and the length of the rotary motion position adjustment bar 356, which is attached to the 352 so as to be rotatable about the shaft and secured by the rotational motion fixing screw 354. direction Interlocking members 360 which are installed at equal intervals and are engaged in a pair of engaging grooves 358 formed on the outer surface of the squeegee holding member 330 of the squeegee 320 and gripped by the pair of engaging grooves 358. And a plurality of fasteners 364 made of a set screw 362 screwed to the engaging member 360 to fix the engaging member 360 to the rotational movement adjusting bar 356.

As a result, the squeegee 320 is driven up and down to a position where the squeegee body 328 is spaced apart from the screen 40 by the squeegee upper and lower cylinders 322 and the position where the screen 40 is pushed down. When the output rod of the stopper cylinder 324 protrudes downward, it is driven upward by the squeegee upper and lower cylinders 322 so that the squeegee main body 328 is positioned at a position where the screen 40 is properly or lightly in contact with the screen 40. . In addition, as the squeegee 320 is rotated by the rotational movement angle of the rotational position adjusting bar 356, the contact angle α of the squeegee body 328 with respect to the screen 40 is adjusted. The position or strength of pushing down the screen 40 of the squeegee body 328 is adjusted by changing the position of the vertical position adjusting member 352 by the adjustment screw 348.

As shown in detail in FIG. 22, the scraper support plate 292 has a position where the scraper 368 abuts against the screen 40 of the plate making 36 and further pushes it down and a predetermined distance from the screen 40. The scraper upper and lower cylinders 370 for driving to the spaced position and the guide rails 372 fixed to the scraper support plate 292 are movably guided in the vertical direction and are vertically moved by the scraper upper and lower cylinders 370. Up and down member 374 which is driven in the direction and the relative position of the up and down direction with respect to the up and down member 374 is installed to be adjustable, and the long and vertical position adjusting member of the elongated shape fixed by the up and down movement fixing screw 376 ( 378) and an elongated shape that is rotatably attached to the shaft center with respect to the up and down position adjustment member 378 and fixed by a rotation movement fixing screw (not shown). Rotation and a movement position adjusting bar 380 and the scraper plurality of fixing grooves (382) provided at equal intervals in the longitudinal direction of the rotating position adjusting bar 380 to secure the 368. As shown in FIG. 24, the scraper 368 is made of metal such as stainless steel, and has a scraper body 384 formed at a plate shape having both ends bent toward the squeegee 320, and an upper end portion of the scraper body 384. It consists of a scraper connection member 386 connected integrally, the fastener 382 is engaged with the engaging member 388 to engage the scraper connection member 386, and the scraper connection member 386 It consists of a set screw 390 screwed to the fastening member 388 in order to fix it to the rotational movement adjusting bar 380.

The scraper upper and lower cylinders 370 and the squeegee upper and lower cylinders 322 are fixed to the squeegee support plate 290 and the scraper support plate 292 and detachable squeegee side couplings 392 connected when they approach each other. ) And a pair of pneumatic pipes 396 and 398 each having a scraper side coupling 394 in the middle portion thereof, and when the squeegee 320 of the pair of pressure chambers of the scraper upper and lower cylinders 370 is raised, The pressure chamber which becomes a high pressure and the pressure chamber which becomes high pressure at the time of the lowering of the scraper 368 among the pair of pressure chambers of the squeegee upper and lower cylinder 322 are connected, and a pair of pressure chambers of the scraper upper and lower cylinder 370 are connected. The pressure chamber that becomes high pressure when the heavy squeegee 320 descends and the pressure chamber that becomes high pressure when the scraper 368 rises among the pair of pressure chambers of the squeegee upper and lower cylinders 322 are connected to each other. As a result, the scraper 368 is positioned at a position where the lower end (tip) is spaced apart from the screen 40 by the scraper upper and lower cylinder 370 when the squeegee 320 descends, and when the squeegee 320 is raised. The lower end (tip) is positioned at the position where the scraper upper and lower cylinders 370 are in contact with the screen 40.

As such, since the squeegee 320 and the scraper 368 are respectively provided on the independent squeegee support plate 290 and the scraper support plate 292 which are reciprocated along the screen 40 of the plate making 36, In the state where the squeegee support plate 290 and the scraper support plate 292 are connected by the plate connecting device 306 functioning as the reciprocating member connecting device, the squeegee is integrally reciprocated with each other. As the 320 is advanced in contact with the screen 40 of the plate making 36, the paste on the screen 40 of the plate making 36 is pushed in one direction to perform screen printing, and the scraper 368 is made of the plate making ( By reversing in contact with the screen 40 of 36, the paste moved in one direction by the squeegee 320 is returned to the other direction.

In addition, when the paste is replaced, the connecting pin 312 of the plate connecting device 306 is pulled out by the operator from the engaging hole 310 to connect the squeegee support plate 290 and the scraper support plate 292. As this is released, these squeegee support plates 290 and scraper support plates 292 are sufficiently spaced apart from each other. For this reason, since the space | interval of the squeegee 320 provided in the squeegee support plate 290 and the scraper 368 provided in the scraper support plate 292 becomes large enough, it is mainly the opposite side of the squeegee 320 and the scraper 368. The recovery of the existing paste is performed efficiently, and the cleaning of the paste attached to the squeegee 320 and the scraper 368 becomes easy, and the working time is shortened and sufficient cleaning is possible. In addition, as shown in detail in FIG. 25, in relation to the squeegee support plate 290 and the scraper support plate 292 being connected to and spaced from each other, the pressure chamber of the squeegee upper and lower cylinders 322 and the scraper upper and lower cylinders 370 may be used. Squeegee side coupling (392) and scraper side coupling (394) installed in the middle of the pneumatic pipes (396, 398) for communicating the pressure chamber and fixed to these squeegee support plates (290) and scraper support plates (292). ) Are connected to each other and open, so that the space between the squeegee 320 provided on the squeegee support plate 290 and the scraper 368 provided on the scraper support plate 292 is the squeegee upper cylinder 322 and the scraper upper cylinder 370. It is not limited to the pneumatic piping (396, 398) between) and can be freely enlarged, and at the same time the paste cleaning operation can be performed without disturbing the pneumatic piping (396, 398) There is. In addition, a device is provided for lifting the squeegee drive device in which the squeegee support plate 290 and the scraper support plate 292 or the rectangular frame 284 supporting the squeegee support plate 282 are separated from the plate making 36 by the cylinder 282. Although it is used, it is used only at the time of replacing or repairing the plate making 36, and it is not used during normal operation | work including the said paste replacement operation.

Here, the upper horizontal frame 26 positioned above the upper horizontal frame 26 and the lower horizontal frame 28 that serve as the plate making frame for fixing the plate making 36 in the inclined state. Between the scraper support plate 292 and the scraper support plate 292, the scraper support plate 292 is pushed up by the squeegee support plate 290 to automatically engage the scraper support plate 292 to reach the fixed position. A stepping device 410 is provided to walk at a fixed position. As shown in detail in FIG. 24, the stepping device 410 is fixed by fitting the bracket 412 to the upper horizontal frame 26 and in the direction of movement of the upper horizontal frame 26 and the scraper support plate 292. A slope adjacent to the bottom of the step groove 414, which is formed to face in the depth direction of the step groove 414 as parallel and the upper side is opened and the lower side is closed from the step groove 414 and the upper horizontal frame 26. The engaging member 418 having the guide surface 416 and the bracket 420 are fitted to the scraper support plate 292, and pressed by a spring (not shown) in the depth direction of the engaging groove 414 to make the platen 36. The tip of the side) includes a stepping pin 422 fitted into the stepping groove 414. As a result, when the scraper support plate 292 approaches the upper horizontal frame 261, the tip of the stepping pin 422 is pushed by the inclined guide surface 416, and then reaches the stepping groove 414. When the stepping pin 422 is pulled out by the operator from the stepping groove 414 by the worker, the stepping of the stepping pin 422 and the stepping groove 414 is released to support the scraper. The plate 292 is made to move freely with respect to the platemaking 36 and the frame 14.

In addition, the squeegee support plate 290 pushes up the scraper support plate 292 when the squeegee support plate 290 and the scraper support plate 292 are released from each other by the plate connecting device 306. An abutting plate 434 in which a pushing cylinder 430 spaced apart by a predetermined distance is fixedly installed, and the end of the output rod 432 of the pushing cylinder 430 abuts on the scraper support plate 292. This is fixed. The pushing cylinder 430 is configured to be switched to a state in which the output rod 432 is drawn and protruded in response to an operation of the changeover switch 436 provided in the squeegee support plate 290.

According to the step device 410 described above, before the paste is cleaned, the squeegee support plate 290 is driven forward in an inclined upward direction, and when the scraper support plate 292 is pushed up to the step position, the scraper support plate 292 is carried out. Is automatically engaged, a fixing operation for preventing the scraper support plate 292 from falling down is unnecessary. In addition, when the squeegee support plate 290 is driven backward in the inclined direction after the scraper support plate 292 is fastened to the stepping device 410, the squeegee support plate 290 and the scraper support plate 292 are easily separated from each other. do. In addition, by protruding the scraper support plate 292 by the push-up cylinder 410, the push-up cylinder which is operated by air while being easy to separate from the squeegee support plate 290 of the scraper support plate 292. By the impact mitigation action of 410, there is an advantage that the impact when the scraper support plate 292 is in contact with the step device 410 is alleviated.

The screen printing apparatus 10 comprised as mentioned above is controlled by the control apparatus shown in FIG. 26, for example. In Fig. 9, the electronic controller 440 is a so-called microcomputer including a CPU, a ROM, a RAM, an input / output interface, etc., so that the CPU processes the input signal in accordance with a program previously stored in the ROM, and the cylinder for lifting and lowering the conveying roller. Solenoid valve 442 for operating 52, solenoid valve 444 for operating abutting plate drive cylinder 64, solenoid valve 446 for operating slide cylinder 72, clamp cylinder 86 ) Solenoid valve 448 to operate, X direction pulse motor 190 to drive moving plate 146 in X direction, and first Y direction to drive moving plate 146 in Y direction or θ direction. The first Y-direction pulse motor 450 of the position shifter 182 and the second Y-direction pulse motor 452 of the second Y-direction shifter 184 and the fixed cylinder 226 of the locker 220 The solenoid valve 453 and the conveyance main body 110 for operation are made between the substrate replacement position (L) and the printing position (R). Drive the drive motor 128 for driving, the solenoid valve 454 for operating the up and down table drive cylinder 116, the solenoid valve 456 for operating the internal insertion pin drive cylinder 254, the squeegee 320 To operate the drive motor 300, the solenoid valve 458 for operating the squeegee upper and lower cylinders 322, the solenoid valve 460 for operating the middle height position stopper cylinder 324, the push-up cylinder 430 To control the solenoid valve 462, the solenoid valve 464 for operating the cylinder 282 to close the squeegee driving device 12 with respect to the plate making (36).

The console box 466 has a manual mode for operating each actuator alone, a manual automatic switching switch 468 for switching to an automatic mode for automatically operating each actuator, and automatic screen printing. The printing start stop switch 470, the conveying roller 54, the conveying roller up / down switch 472, and the abutting plate 62 for switching between the up and down positions, from the backup member 78 The contact plate driving switch 474 and the plate gap gauge 66 for switching the state where the platen 36 is lifted apart from the state where the contact plate 62 is moved toward the backup member 78 are plated 36. Plate gap gauge slide switch 476 for switching between the insertion position and the non-insertion position between the backup member 78 and the backup member 78, and the clamp switch 478 for fixing the plate-making 36 to the frame 14 X plate to plate 146 First direction switch 482 and second direction switch 484 and second movement direction plate 146 for driving operation of the X direction switch 480 for driving operation in the Y direction or the θ direction Table platen switch for driving the moving plate lock switch 485 for operating the locking device 220, the carrier main body 110 between the substrate replacement position (L) and the printing position (R) to easily fix the 486), the table up and down switch 488 for elevating the upper and lower tables 114, the internal insertion pin 252, that is, the positioning switch 490, the squeegee 320 for driving the fitting pin device 248 A squeegee drive switch 492 for driving forward and backward along the screen 40, a squeegee up / down switch 494 for lifting up and down the squeegee 320, and a middle height for raising the squeegee 320 from its forward limit to a medium height. The switch 496 and the squeegee drive device 12 are brought into contact with the plate-making 36. And a squeegee vertical drive system switch (498) for spacing are provided respectively, and an operation signal generated from these switches is supplied to the electronic controller (440). In addition, an operation signal of the changeover switch 436 for operating the pushing cylinder 430 is also supplied to the electronic controller 440.

When the manual mode is selected by the operation of the manual automatic switching switch 468, the conveying roller up / down switch 472, the contact plate driving switch 474, the plate gap gauge slide switch 476, and the clamp switch 478, the X direction switch 480, the first Y direction switch 482 and the second Y direction switch 484, the movable plate locking switch 485, the table drive switch 486, and the table up / down switch 488. Operation of manual switches such as positioning switch 490, squeegee drive switch 492, squeegee up and down switch 494, middle height switch 496, squeegee drive device up and down switch 498, changeover switch 436, etc. It becomes effective and the operation | movement corresponding to these switches is performed independently.

For example, when the plate making 36 is replaced, after the manual mode is selected by the operation of the manual automatic switching switch 468, the clamp by the clamp cylinder 86 is released by the operation of the clamp switch 478. The plate 36 is pushed up to the squeegee driver 12 by the operation of the contact plate driving switch 474 and the plate gap gauge 66 is interposed by the plate gap gauge slide switch 476. After being raised to the position where it is not inserted into the groove, the contact plate 62 is drawn back to the backup member 78 by the operation of the contact plate drive switch 474 so that the plate 36 is applied to the first guide plate 46. Lower until it comes in contact. In this state, when the conveying roller 54 is raised by the operation of the conveying roller up / down switch 472, the plate making 36 used until then is moved lightly by the conveying roller 54 and the spherical rotating body 50. It becomes possible, and it is taken out of the screen printing apparatus 10. FIG. On the contrary, the new plate-making 36 is lightly inserted to the predetermined attachment position by the said conveying roller 54 and the spherical rotating body 50, and the conveying roller 54 is operated by operation of the conveying roller up-down switch 472. Is lowered. At this time, in the case where the confirmation of the plate spacing zero is performed in advance, the clamp is performed by the clamp cylinder 86 by the operation of the clamp switch 478, and the plate making 36 is pressurized pad 80 of the clamp cylinder 86. ) And the contact plate 62 is pressed. At this time, since the plate gap gauge 66 is not inserted in between, the top and bottom tables 114 on which the substrate 42 is placed are raised by the operation of the table top and bottom switches 488, so that the screen 40 It is confirmed that the plate spacing D1 between the substrate and the substrate 42 is zero. Next, the clamp by the clamp cylinder 86 is released by the operation of the clamp switch 478, and the plate making 36 is pushed up to the squeegee driving device 12 by the operation of the contact plate driving switch 474. At the same time, after the plate gap gauge 66 is lowered to the position where the plate gap gauge 66 is inserted between the plates by the operation of the plate gap gauge slide switch 476, the plate 62 is again contacted by the operation of the contact plate driving switch 474. At this time, when the clamp is performed by the clamp cylinder 86 by the operation of the clamp switch 478 and the plate-making 36 is fixed, the plate spacing D1 corresponding to the plate spacing gauge 66 is formed. Moreover, the plate space gauge 66 is replaced with a thing suitable for the new plate making 36 as needed, while the gauge holding member 76 is raised by the operation of the plate space gauge slide switch 476. .

When the paste is replaced, after the manual mode is selected by the operation of the manual automatic switching switch 468, the connection between the squeegee support plate 290 and the scraper support plate 292 is released by the plate connecting device 306. Further, the scraper support plate 292 is pushed up from the squeegee support plate 290 by a predetermined distance by the output rod 432 of the pushing cylinder 430 by the operation of the changeover switch 436, and the squeegee is pushed in this state. When the squeegee support plate 290 is advanced by the operation of the drive switch 492 and the scraper support plate 292 is driven to its highest position (step), the scraper support plate 292 is moved by the step device 410. You are automatically taken to that location. Then, when the squeegee support plate 290 is reversed by the operation of the squeegee drive switch 492, the squeegee support plate 292 and the squeegee support plate 290 are greatly opened, so that the squeegee 320 and the scraper 368 or The cleaning operation of the screen 40 is easily performed. When the cleaning operation is finished, the squeegee support plate 290 is advanced by the operation of the squeegee drive switch 492, and the stepping pin 422 of the step device 410 is pulled out to operate the scraper support plate 292. The stepped state of the lifter is released and received by the output rod 432 of the pushing cylinder 430, and the output rod 432 of the pushing cylinder 430 is drawn by the operation of the changeover switch 436. The connecting pin 312 of the plate connecting device 306 is operated to connect the scraper support plate 292 to the squeegee support plate 290.

However, when the automatic mode is selected by the operation of the manual automatic switching switch 468, the operation of the manual switch is invalidated and the screen printing is automatically executed in response to the operation of the print start stop switch 470. . That is, when a new substrate 42 is placed on the moving plate 146 of the substrate carrier 104 which is located at the substrate replacement position L by a handling device (not shown), the substrate 42 is attached to the substrate 42. A pair of position marks are detected by the alignment substrate position detection apparatus 13, and alignment operation is performed. That is, the X-direction positioning device 180, the first Y-direction moving device 182, and the second Y-direction moving device 184 are operated so that the pair of location marks automatically coincide with the preset position. . Next, after the substrate carrier 104 is driven to the printing position R by the drive motor 128, the upper and lower tables 114 are approached to the plate making machine 36 side, and at the same time, the engagement pin device 248 is enlarged. As the diameter pin 250 enlarges in diameter, the plate 36 fixed to the frame 14 and the substrate 42 mounted on the upper and lower tables 114 are positioned. At this time, the squeegee 320 at the intermediate height position in the forward (rising) position is raised to the upper limit position and lowered to the position where the scraper 368 contacts the screen 40, and in this state, the squeegee 320 is moved. And once the scraper 368 has been retracted to its reverse (falling) position, the squeegee 320 is lowered to the position at which the screen 40 is pressed, and the scraper 368 is raised, and is advanced again in this state. The paste on the screen 40 is transferred onto the substrate 42 in a predetermined pattern. Subsequently, the squeegee 320 is positioned at the intermediate position, and the upper and lower tables 114 are lowered in the direction away from the screen 40, and then the substrate carrier 104 is replaced by the drive motor 128. It is driven up to (L), whereby the substrate 42 after printing is replaced with a new substrate 42 by the handling apparatus.

In the alignment operation, the electronic control device 440 positions the X direction position with respect to the plate 36 of the substrate 42 by changing the X direction position of the X direction driving pin 148, and the first Y. FIG. By changing the Y-direction positions of the directional drive pin 152 and the second Y-direction drive pin 154 by the same amount, the Y-direction position of the substrate 42 relative to the plate making 36 is positioned, and the first Y-direction drive is performed. As the alignment control device for positioning the rotational position θ relative to the plate making 36 of the substrate 42 by changing the Y-direction position of the pin 152 and the second Y-direction driving pin 154 by another amount. It is functioning. Thereby, the X direction guide apparatus which guides an X direction table, the X direction table feed screw mechanism which feeds an X direction table, the Y direction guide apparatus which guides a Y direction table, the Y direction feed screw mechanism which feeds a Y direction table, Adjustment of the X-direction position, the Y-direction position, and the rotational angle position θ of the movable plate is performed without using a rotation direction guide device for guiding the table in the rotation direction and a rotation direction drive device for rotating the table in the rotation direction. .

In addition, the electronic control apparatus 440 switches the switching control valve 168 within the moving period of the moving plate 146 during the alignment operation, so that the second upper and lower bases from the compressor body supply device 172 are changed. X-direction drive pin 148, which is supplied in accordance with an electrical signal, forms a compressor body layer between the moving plate 146 and the second upper and lower base plates 144 supporting the compressor body through plate 144, The first Y-direction driving pin 152 and the second Y-direction driving pin 154 allow the movable plate 146 to be moved with a very small force, and after the positioning of the movable plate 146 is completed, By switching the switching control valve 168, the negative pressure is supplied from the negative pressure supply device 170 to the second upper and lower base plates 144, so that the moving plate 146 is placed on the second upper and lower base plates 144. Adsorb and fix. Thereby, there exists an advantage that the drive mechanism and fixing mechanism of the X direction drive pin 148, the 1st Y direction drive pin 152, and the 2nd Y direction drive pin 154 become extremely small.

As mentioned above, although one Example of this invention was described using drawing, this invention is applied also to other aspects.

For example, in the screen printing apparatus 10 of the above-mentioned embodiment, although the plate making 36 is fixed to the frame 14 in the inclined state, the form which is fixed in a horizontal state may be sufficient. Even in this way, the same effects as in the above-described embodiment can be obtained.

In addition, although the moving plate 146 of the above-mentioned embodiment is comprised so that the board | substrate 42 may be directly supported, even if it supports indirectly by inserting another member, it does not interfere.

In addition, although the 1st up-and-down base table 138 and the 2nd up-and-down base table 144 fixed integrally with each other were used for the up-and-down table 114 of the above-mentioned embodiment, even if it is a single up-and-down base table, it does not interfere.

In addition, in the above-described embodiment, the X direction driving pin 148, the first Y direction driving pin 152, and the second Y direction driving pin 154 are attached to the first vertical base table 138, and the X direction Although the pressing pin 150, the first Y-direction pressing pin 156, and the second Y-direction pressing pin 158 are attached to the second upper and lower base table 144, the first upper and lower base table 138 and the second It is sufficient to be fixed to the upper and lower base tables 144.

In addition, although the X direction pressing pin 150, the 1st Y direction pressing pin 156, and the 2nd Y direction pressing pin 158 of the above-mentioned embodiment are pressed according to pneumatic pressure, it is comprised so that it may press according to the elastic force of a spring. It may be.

In addition, for example, in the above-mentioned X-direction position shifting device 180, a ball screw for screwing a plurality of balls into the screw shaft 188 for driving the X-direction driving pin 148 may be used. In such a case, the positioning accuracy becomes higher.

Further, the X-direction driving pin 148, the first Y-direction driving pin 152, the second Y-direction driving pin 154 of the above-described embodiment, the X-direction pressing pin 150, the first Y-direction pressing pin ( 156) Although the 2nd Y direction pressing pin 158 was circular cross section, even if it is a triangular shape or an elliptical shape, it does not interfere, for example.

In addition, the above-mentioned thing is an embodiment of the present invention to the last, and this invention can change variously in the range which does not deviate from the summary.

In this case, the movable plate mounted on the upper and lower base plates is gripped by the X direction driving member and the X direction pressing member at a predetermined pressing force in the X direction, and the first Y direction driving member and the first Y direction pressing are performed. Since the member, the second Y-direction driving member, and the second Y-direction pressing member are held at predetermined pressing forces in the Y direction, respectively, the position relative to the plate making of the substrate supported by the moving plate by moving the X-direction driving member. Is adjusted in the X direction, and the position relative to the plate making of the substrate supported on the moving plate is adjusted in the Y direction by moving the first Y-direction driving member and the second Y-direction driving member by the same amount, and the first Y By moving the direction drive member and the second Y direction drive member in different amounts or in different directions, the rotational position θ relative to the plate making of the substrate supported by the moving plate is adjusted. Therefore, according to the present invention, the X-direction moving plate guided to be movable in the X direction by the guide rail in the base plate, the X-direction fine adjustment device for moving the X-direction moving plate in the X direction, the X-direction moving plate is locked. X direction locking device for moving, Y direction moving plate guided to the Y direction by the guide rail in the X direction moving plate, Y direction fine adjustment device for moving the Y direction moving plate in the Y direction, Y direction moving Y-direction locking device for locking the plate, rotating plate rotatably installed around its center in the Y-direction moving plate, rotating fine adjustment device for fine-adjusting the rotation angle position of the rotating plate, rotation locking device for locking the rotating plate Since the X, Y, and θ adjustment mechanisms can be configured without the use of a lamp or the like, the screen printing apparatus becomes small and at the same time the volume is small and the space for it is reduced. Since the weight of the X, Y, and θ control mechanisms becomes smaller, the mechanism for reciprocating them also becomes smaller, and the number of parts decreases, making the screen printing apparatus inexpensive.

Claims (5)

A plate placed at the substrate printing position, a carrier main body guided between the predetermined substrate replacement position and the substrate printing position, and an upper and lower table provided on the conveying main body so as to be accessible from the plate making; And a substrate carrier for conveying the substrate placed on the substrate to the substrate printing position, wherein the substrate is positioned directly under the plate making at the time of screen printing. With the top and bottom base plate, In order to support the substrate, a movable plate mounted on the upper and lower base plates to allow relative movement in a direction parallel to the upper and lower base plates, A pair of members provided on the upper and lower base plates for holding the movable plate in the X direction, the X direction driving member driven in the X direction based on an electrical signal, and a predetermined pressing force toward the X direction driving member. Given X direction pressing member, Two pairs of members provided on the upper and lower base plates to grip the movable plate in the Y direction perpendicular to the X direction while being spaced a predetermined distance from the X direction, and are driven in the Y direction based on an electrical signal. 1st Y direction drive member and 2nd Y direction drive member, and the 1st Y direction pressing member and 2nd Y direction pressing member which were given predetermined pressing force toward the said 1st Y direction driving member and the 2nd Y direction driving member. Screen printing apparatus comprising a. According to claim 1, A plurality of gas holes formed in the top surface of the upper and lower base plates, A compressor body supply device for discharging the compressor body from a plurality of gas holes of the upper and lower base plates; A negative pressure supply device for adsorbing the movable plate to the upper and lower base plates by using a plurality of gas holes in the upper and lower base plates as negative pressures; During the moving period of the moving plate, the compressor body is supplied from the compressor body supplying device to the upper and lower base plates, and after completion of positioning of the moving plate, the negative pressure is supplied from the negative pressure supplying device to the upper and lower base plates to move the moving plate. Screen switching device comprising a switching control valve for fixing to the upper and lower base plates. The positioning method according to claim 1 or 2, wherein the position of the X direction relative to the plate making of the substrate is positioned by changing the position of the X direction driving member in the X direction, and the first Y direction driving member and the second Y direction. By changing the Y-direction position of the driving member by the same amount, the Y-direction position of the substrate is positioned relative to the plate making, and the Y-direction positions of the first Y-direction driving member and the second Y-direction driving member are changed by different amounts. And a alignment control device for positioning the rotational position of the substrate by the change by changing. 3. A stepped hole formed by a small diameter hole and a large diameter hole continuous thereto, the stepped hole formed through the moving plate, a locking plate having a smaller diameter than the large diameter hole, and the small diameter. And a locking device having a fixed cylinder provided on the elevating base plate, the output plate having a smaller diameter than the hole and having an output rod fixed to the distal end by penetrating the small diameter hole. The method of claim 1 or 2, wherein the movable plate is rectangular. The X-direction driving member and the X-direction pressing member are pins of a circular cross section for engaging the two sides parallel to the Y direction of the moving plate to grip the moving plate in the X direction, The first Y-direction driving member, the second Y-direction driving member, the first Y-direction pressing member, and the second Y-direction pressing member are engaged with two sides parallel to the X direction of the moving plate, respectively, to move the corresponding moving plate. A screen printing apparatus, characterized in that the pin of the circular cross section gripped in the Y direction.

Images