KR101202181B1 - Checking apparatus for flat plate-like device under test - Google Patents

Abstract

An object of the present invention is to enable an inspected object to be inspected accurately without replacing the panel receiver and irrespective of whether or not the inspected object has a polarizing plate. An inspection apparatus for a flat inspection object corresponds to a first base having a first opening, four second bases which together form a second opening facing the first opening, and at least one second base. And at least one elevating device for elevating a second base. The elevating device includes: a first base having a first opening penetrating in the vertical direction; and four elongated second bases arranged above the first base in a frame shape to form a second opening facing the first opening together. It is arrange | positioned in between, and supports the corresponding 2nd base so that a 1st base can be elevated.

Description

Checking apparatus for flat plate-like device under test}

The present invention relates to an apparatus for inspecting a flat inspection object such as a liquid crystal display panel.

An inspection apparatus for illuminating and inspecting a rectangular flat object under test, such as a liquid crystal display panel, includes a panel support on which the test object is mounted. This panel receiving part includes four panel receiving parts which together form a receiving surface for receiving an object under test. These panel receiving parts are arrange | positioned so that a test subject may be received by the edge of the four sides of the outer periphery of a test subject so that the rectangular opening which becomes a path | route for test light may be supported, while supporting a test subject stably.

By the way, such a test subject has various kinds of test subjects which differ in the size of four sides, ie, an outer peripheral dimension, according to the kind of screen dimension of a final product. As an inspection apparatus which can inspect such a plurality of types of test subjects with one panel receiving, there exists the inspection apparatus of patent document 1, for example.

The inspection apparatus of patent document 1 is arrange | positioned at the plate-shaped table base which has a 1st opening, and the space | interval above the said table base, and receives the test subject, and arrange | positions between the said table base and the said panel receiver. And a coupling device for coupling the table base and the panel receiver.

The panel receivers are four moving pieces which together form a second rectangular opening facing the first opening by being combined in a man-shaped shape, each having four panel receivers receiving the test object. And a moving piece, wherein the engaging device engages the moving piece and the table base such that each moving piece is movable two-dimensionally in a plane parallel to the table base.

According to the said inspection apparatus, since each movable piece is movable in the plane parallel to the said table base, the magnitude | size of the 2nd opening formed by the said four movable pieces, ie, the arrangement position of four panel receiving parts, is examined. It can be changed according to the outer circumferential dimension of. Thereby, various kinds of inspected objects can be inspected by one panel receiving.

However, the inspected object to be checked for lighting includes, in addition to the inspected object having different outer circumferential dimensions, the inspected object only of the array substrate in which liquid crystal is sealed in two glass substrates, and a polarizing plate that matches the polarization of light passing through the array substrate. There is an inspection object provided on one side or both sides of the array substrate.

The polarizing plate is provided so as to cover almost the entire surface of the array substrate. However, the polarizing plate is not provided at the terminal portion in which a plurality of terminals for the array substrate are disposed and the rear portion of the terminal portion. This terminal portion is provided at one of four edges of the outer periphery of the array substrate, and generally at edges along two sides that are adjacent to each other.

Therefore, in the case of the inspected object having the polarizing plate on the side facing the panel receiver, the thickness dimension of the edge having no polarizing plate at the terminal portion or the rear side thereof is different from the thickness dimension of the edge having the other polarizing plate. As a result, the height position of the to-be-supported part of a to-be-tested object with respect to a panel receiver differs.

For example, in a panel receiving in which the height positions of the receiving surfaces of the four panel receiving parts are equal to the flat receiving object only on the array substrate without the polarizing plate with respect to the table base, the test object with the polarizing plate is placed. When placed on the panel tray, the inspected object is inclined with respect to the table base by an angle corresponding to the thickness dimension of the polarizing plate and received by the panel tray. The description of the object under test causes a concern that the inspection contact cannot correctly contact the terminal during the inspection.

Therefore, in the case where the inspected object has a polarizing plate or not, the height of the receiving surface of the four panel receiving parts for receiving the inspected object in parallel with the table base, for the inspected object only of the array substrate. The height of the receiving face of the panel receiving part receiving the edge corresponding to the terminal part is equal to the receiving face of the panel receiving part receiving the other edge by the thickness dimension of the polarizing plate. It was necessary to prepare the panel tray which heightened and to replace the panel tray depending on whether the to-be-tested object was equipped with the polarizing plate. However, the replacement of the panel tray is complicated, and furthermore, due to the recent increase in the size of the liquid crystal panel, the panel tray is also enlarged, which increases the complexity and risk of the replacement.

Patent Document 1: Japanese Unexamined Patent Application Publication No. 2007-40747

An object of the present invention is to make it possible to accurately inspect an inspected object without replacing the panel holder and irrespective of whether or not the inspected object has a polarizing plate.

An inspection apparatus for a flat object under test according to the present invention includes a first base having a first opening penetrating in a vertical direction, and four elongated second bases disposed above the first base and facing the first opening. At least one elevating device corresponding to the at least one second base and at least one second base having four receiving bases which together form a second rectangular opening and which receive together the plate-shaped object under test; And at least one elevating device disposed between the second base and the first base and supporting the corresponding second base in a liftable manner to the first base.

The elevating device may include at least one elevating mechanism and a driving mechanism for driving the elevating mechanism, and may include a driving mechanism provided on the first or second base.

The elevating mechanism is provided above the first base and below the second base, and faces the first and second fixing members facing each other, and is movable in the longitudinal direction of the second base. And a movable member coupled to the second fixing member and movable in the longitudinal direction of the second base by the driving mechanism, wherein the first fixing member and the movable member or the second fixing member and the movable member May be coupled to be movable relative to the movable member in a direction inclined with respect to the longitudinal direction of the second base. In addition, the elevating device may be configured such that the second base is elevated relative to the first base. Allowing, but at least the movement in the longitudinal direction of the second base may comprise a plurality of movement restricting mechanisms.

One of the first and second fixing members may include a first rail extending in the longitudinal direction of the second base provided on either one of the first and second bases, and the movable member may include: A first guide coupled to the first rail to move along a first rail, and a first tongue member provided on the first guide, wherein the first inclined portion inclined with respect to the longitudinal direction of the second base. And a second rail provided in the first inclined portion and extending in the inclined direction, and the other of the first and second fixing members moves along the second rail. A second guide member coupled to the second rail, and a second tongue member provided on the other side of the first and second bases so as to have a second inclined portion facing in parallel with the first inclined portion; The second guide is installed on the inclined portion 2 may include a tongue member.

The lifting device may be arranged in the inspection device in each of two, three or four second bases.

The first opening may include a lower third opening and an upper quadrangular fourth opening, and the first base includes a table base having the third opening and an upper surface, and the upper side of the table base. Four long moving pieces arranged to form a fourth opening, and a coupling device disposed between the table base and each moving piece, the moving pieces being parallel to the upper surface of the table base to change the size of the fourth opening. It may include a coupling device that is coupled to move two-dimensionally in the plane, each second base may correspond to each moving piece, and may be disposed above the corresponding moving piece.

The movement restricting mechanism is a linear bush provided on either of the first and second bases, the linear bush having a hole penetrating in the lifting direction of the lifting mechanism, and a shaft fixed to the other of the first and second bases. As an example, the shaft may include a shaft passing through the hole.

In addition, the inspection apparatus may include an alignment device for positioning the flat inspection object received on the receiving surface, and each second base includes a panel receiving portion defining a part of the receiving surface. The alignment device includes a first pusher mechanism and a first positioning mechanism disposed on one side and the other side of the pair of opposing second bases and disposed outside the receiving face, respectively, and the pair of second bases facing each other. And a second pusher mechanism and a second positioning mechanism, respectively disposed on one side and the other side, wherein the pusher mechanism and the positioning mechanism each include a flat plate-shaped test object received on the panel receiving portion, for positioning or pushing. At least one pressing member pressed by a mechanism, and at least one pressing member for displacing the pressing member in the longitudinal and width directions of the second base corresponding thereto; Line treatment has a drive mechanism, the alignment mechanism of each drive positioning mechanism, to resist the pushing force of the pusher mechanism opposite the position in the back and forth direction of the pressure member can be maintained which corresponds releasably.

In the present invention, at least one second base can be raised and lowered relative to another second base by a lifting device corresponding thereto. For this reason, depending on whether or not the inspected object is provided with a polarizing plate on the receiving surface, the height of the at least one second base is adjusted with respect to the height position of the other second base, so that the inspected object is in the correct posture. You can get it on the receiving side. As a result, the inspected object can be inspected accurately with or without the polarizing plate.

1 is a perspective view showing a first embodiment of an inspection apparatus according to the present invention.
Fig. 2 is a schematic diagram showing a moving mechanism in the first embodiment.
Fig. 3 is a side view showing the lifting device in the first embodiment.
4 is a perspective view showing a lifting device in the first embodiment.
FIG. 5 is an enlarged side view of portion A in FIG. 3.
FIG. 6 is an enlarged cross-sectional view of part B of FIG. 3.
FIG. 7 is a side view showing a lowered state of the elevating device of part A in FIG.
8 is a side view showing the alignment device.
9 is a perspective view showing a pusher mechanism of the alignment device.
Fig. 10 is a perspective view showing the positioning mechanism of the alignment device.
11 is a schematic diagram of the operation of the alignment apparatus.
12 is a schematic diagram showing a second embodiment of the inspection apparatus according to the present invention.
Fig. 13 is a perspective view showing a moving mechanism in the second embodiment.

[Description of Terms]

In the present invention, in Fig. 3, the up-down direction is referred to as Z direction or up-down direction, the left-right direction is referred to as X direction or left-right direction, and the paper back direction is referred to as Y-direction or front-back direction. However, their direction depends on the posture of the subject under examination.

For this reason, the inspection apparatus according to the present invention may be used in any state, such as a state in which the XY plane defined by the X and Y directions becomes a horizontal plane, and a state inclined with respect to the horizontal plane.

[First Embodiment]

1 to 3, the inspection apparatus 10 is a flat inspection object 12 such as a liquid crystal display panel, and the inspection object 12 is connected to a predetermined electric circuit to perform inspection such as lighting inspection. It is used as a device for

The test object 12 includes an array substrate 16 in which liquid crystal is inserted between two transparent substrates, and a polarizing plate 18 that is attached to both surfaces of the array substrate 16 to match polarization of light passing therethrough. However, the object 12 under test does not include the polarizing plate 18 or has the polarizing plate 18 attached only to one of the upper and lower surfaces of the array substrate 16.

The array substrate 16 has a rectangular shape, and some edges along the sides of the rectangle are used as the terminal portion 20 in which a plurality of terminals are provided, and the region other than the terminal portion 20 is used as the display portion 22. Doing. The polarizing plate 18 is provided only in the display part 22, and the polarizing plate 18 is not provided in the terminal part 20 and its back. That is, in the display part 22 in which the polarizing plate 18 was provided, and the terminal part 20 in which the polarizing plate 18 is not provided, the thickness dimension of the to-be-tested object 12 differs. In Fig. 1, the array substrate 16 has a terminal portion 20 on two adjacent sides of a quadrangle.

Referring to FIG. 1, the inspection apparatus 10 includes a first base 24 having a first opening penetrating in a vertical direction in a central region, and a second opening having a quadrangle facing the first opening. A panel plate 14 having four second bases 26 spaced above the first base 24, and disposed between each second base 26 and the first base 24; And a lifting device 28 for supporting each second base 26 to be liftable to the first base 24.

The backlight unit (not shown) which illuminates the to-be-tested object 12 received by the panel support 14 below is arrange | positioned at intervals below the 1st base 24. As shown in FIG. The first and second openings act as a passage for guiding the light of the backlight (not shown) to the display portion 22 of the object 12 disposed on the panel support 14.

Each second base 26 includes an elongated plate-shaped panel receiving portion 26a and an elongated plate-shaped member 26b, and the panel receiving portion 26a is formed from one edge in the width direction of the plate-shaped member 26b. The panel receiving part 26a and the plate-shaped member 26b are L-shaped, so that it may arise and so that the plate-shaped member 26b may be located in a XY plane (horizontally). The upper end surface which extends in the longitudinal direction of the panel receiving part 26a of each 2nd base 26 is the receiving surface 26c which receives the test subject 12 together.

Referring to Fig. 2, the first base 24 includes a plate-shaped table base 30 having a third opening serving as a lower portion of the first opening, and a fourth serving as an upper portion of the first opening. It is arrange | positioned between the four long plate-shaped moving pieces 32a-32d, the moving piece 32a-32d, and the table base 30 combined in the shape of a man-shaped so that an opening may be formed, and the moving pieces 32a- And a coupling device 34 coupling 32d) to the table base 30 so as to be two-dimensionally movable in the X and Y directions.

[About moving flights]

A pair of opposing moving pieces 32a and 32b extend in parallel in the X direction at intervals in the Y direction and a pair of opposite moving pieces 32c and 32d are in the XY plane. Extends parallel to the Y direction at intervals in the X direction. These moving pieces 32a-32d are coupled to the table base 30 so that the inside of an XY plane can be moved two-dimensionally so that the magnitude | size of a 4th opening may be changed by the coupling device 34. As shown in FIG.

The two moving pieces 32 which are adjacent to each other are coupled by appropriate coupling means so as to be integrally movable in the X direction (or Y direction) and moveable in the Y direction (or X direction), respectively. . As a result, the adjacent moving pieces 32 are coupled to each other without disturbing the relative moving pieces 32 moving independently in the Y direction (or the X direction).

As such a coupling means, for example, an ant groove having a trapezoidal cross-sectional shape extending in the X direction (or the Y direction) and opening toward the fourth opening, and slidably coupled to the ant groove A combination with an ant bag (protrusion member) can be used. The ant groove is formed in the fourth opening side in one width direction of two moving pieces 32 adjacent to each other, and the ant bag (protrusion member) is in the other longitudinal direction of the two moving pieces 32 adjacent to each other. One end of the edge is formed. Instead of a combination of ant grooves and ant sacks (protrusion members), other coupling means may be used, such as a combination of a rail and a guide that slides on the rail and is detachably coupled.

[Combination device]

Referring to Fig. 2, the coupling device 34 is a pair of long plate-shaped first sliders 36 installed on the table base 30 so as to be movable in the X direction while being spaced in the X direction and extending in the Y direction. And a pair of long plate-shaped second sliders 38 provided on the table base 30 so as to be movable in the Y direction while extending in parallel in the X direction at intervals from the upper side of the first slider 36. Equipped.

The first and second sliders 36 and 38 are arranged in a square shape on the upper surface of the table base 30. Each of the first sliders 36 is coupled to one end and the other end so as to be movable on the rail 42 extending in the X direction. Each second slider 38 is coupled at one end and the other end so as to be movable on the rail 44 extending in the Y direction. Each second slider 38 is coupled to both first sliders 36 by the first and second coupling members 40a and 40b so as to be movable in the Y direction.

Each of the coupling members 40a and 40b is provided in the corresponding first slider 36 and extends in the Y direction to a pair of rails 46a (or 46b) extending in the longitudinal direction of the first slider 36. And a pair of rails 48a (or 48b) mounted on the corresponding second slider 38 and extending in the longitudinal direction of the second slider 38 in the X direction. It is movably coupled. As a result, the coupling members 40a and 40b can move two-dimensionally in the XY plane with respect to the table base 30.

In the illustrated example, the moving pieces 32a and 32b extending in the X direction have rails 41a and 41b provided below and extending in the X direction, respectively. The rails 41a and 41b are coupled to each other so as to be movable relative to the pair of guides 43b and 43b provided on the coupling members 40b and 40b, respectively. As a result, the moving pieces 32a and 32b are coupled to the second sliders 38 and 38 so as to be movable in the X direction and impossible to move in the Y direction, respectively.

Similarly, the moving pieces 32c and 32d extending in the Y direction have rails 41c and 41d respectively provided below and extending in the Y direction. The rails 41c and 41d are coupled to each other so as to be movable relative to the pair of guides 43a and 43a provided on the coupling members 40a and 40a, respectively. As a result, the moving pieces 32c and 32d are coupled to the first sliders 36 and 36 so as to be movable in the Y direction and impossible to move in the X direction, respectively.

Each of the first and second sliders 36 and 38 is moved by the moving piece drive mechanism 50 in the X direction (or the Y direction), and can be released to an appropriate position in such a moving direction. maintain.

Motors disposed on the upper surface of the table base 30, ball screws rotated by the motors connected to the motors in a state extending in the X-direction (or Y-direction); A mechanism is used that includes a nut coupled to the ball screw and connected by a connector to the first and second sliders 36 or 38. The motor is a position controllable motor, such as a pulse motor, to keep the rotation angle position releasable.

For example, when both the first sliders 36 are moved in a direction (X direction) closer to each other by the corresponding moving piece drive mechanism 50 (X direction), the first sliders 36 are provided through the coupling members 40a and 40a. And the moving pieces 32c and 32d extending in the Y direction coupled to 36 are moved together with the coupling members 40a and 40a in the direction of approaching and away from each other (X direction), and at the same time as the moving pieces 32c and 32d. The moving pieces 32a and 32b connected by the coupling means such as the ant groove, the ant bag (protrusion member) and the like are moved in the X direction in accordance with the movement of the moving pieces 32c and 32d.

When the first slider 36 is moved in the X direction, the movement in the X direction of the moving pieces 32a and 32b relative to the second sliders 38 and 38 is provided on the moving pieces 32a and 32b and is X. The relative movement between the rails 41a and 41b extending in the direction and the guides 43b and 43b provided in the respective engaging members is allowed.

In addition, when the second slider 38 is moved in the direction (Y direction) closer to each other by the corresponding moving piece drive mechanism 50, the second sliders 38 and 38 through the engaging members 40b and 40b. The moving pieces 32a and 32b extending in the Y-direction connected to the X1 are moved together with the coupling members 40b and 40b in the direction of approaching and moving away from each other (Y-direction), and at the same time, the ants described above on the moving pieces 32a and 32b. The moving pieces 32c and 32d connected by the coupling means, such as a groove | channel, an ant bag (protrusion member), are moved to a Y direction according to the movement of the moving pieces 32a and 32b.

When the second slider 38 is moved in the Y direction, the movement in the Y direction of the moving pieces 32c and 32d relative to the first sliders 36 and 36 is provided on the moving pieces 32c and 32d and is Y. The relative movement between the rails 41c and 41d extending in the direction and the guides 43a and 43a provided in the engaging members 40b and 40b is allowed.

Thereby, the four moving pieces 32a-32d are moved so that the magnitude | size of a 4th opening may be changed. As a result, the size of a 4th opening and also a 2nd opening mentioned later can be changed according to the plane dimension of the to-be-tested object 12 which should be inspected. This operation is performed prior to the lighting test of the inspected object 12.

[Elevation device]

3-6, each 2nd base 26 is arrange | positioned at intervals just above the corresponding moving piece 32, and the lifting device 28 respond | corresponds to the 2nd base 26. As shown in FIG. It is arrange | positioned between the 2nd base 26 and the corresponding moving piece 32 so that the movable piece 32 can be supported up and down.

Referring to Fig. 4, the elevating device 28 is connected to four elevating mechanisms 52 for supporting the second base 26 to elevate and the elevating mechanism 52 to drive the elevating mechanism 52. 6 movement restrictions that allow the drive mechanism 54 and the second base 26 to move up and down in the vertical direction (Z direction) but prevent movement in the left and right directions and the front and rear directions (X and Y directions). And instrument 56. The number of the lifting mechanism 52, the driving mechanism 54, and the movement restricting mechanism 56 is determined based on the size, weight of the inspected object 12, the size of the panel receiver 14, and the like.

The drive mechanism 54 includes two first driving force transmission members 79 extending in a direction orthogonal to the longitudinal direction of the moving piece 32 at intervals in the longitudinal direction of the corresponding moving piece 32, and The second driving force transmitting member 80 connected to the first driving force transmitting member 79 and the second driving force transmitting member 80 are connected to the corresponding moving piece 32. A driving source 82 for moving in the longitudinal direction, and a supporting member 84 installed on the moving piece 32 to support the first driving force transmitting member 79 so as to be movable in the longitudinal direction of the moving piece 32. .

Each of the first driving force transmission members 79 has an elongated plate-shaped (or rod-shaped) shape extending in the width direction of the moving piece 32 and is disposed at intervals in the width direction of the moving piece 32. It is coupled to one pair of lifting mechanisms 52 at one end or the other end thereof. The second driving force transmission member 80 has an elongated plate-shaped (or rod-shaped) shape extending in the longitudinal direction of the moving piece 32, and is connected to two first driving force transmission members 79, It is connected to the drive source 82 at one end thereof.

The drive source 82 moves the second driving force transmission member 80 in the longitudinal direction of the moving piece 32, thereby, through the first driving force transmission member 79 connected to the second driving force transmission member 80. The lifting mechanism 52 is driven. The drive source 82 may include a fluid cylinder mechanism such as a pneumatic cylinder or a hydraulic cylinder. This cylinder mechanism is provided with the cylinder in the moving piece 32 or the 2nd base 26, and a piston rod is connected to the 2nd driving force transmission member 80. As shown in FIG.

However, instead of the cylinder mechanism, the drive source 82 may include a motor capable of controlling the rotation angle position, such as a pulse motor. In this case, the second driving force transmitting member 80 has a ball screw and a nut coupled to the ball screw, and the first driving force transmitting member 79 is coupled to the nut. Thereby, by rotating the ball screw with the motor, the nut is retracted in the longitudinal direction of the moving piece 32, and further, the movable member 62 to be described later through the first driving force transmission member 79 is moved. The longitudinal direction of the piece 32 is moved.

3, 4 and 6, the movement regulating mechanism 56 includes a linear bush 86 having a through hole penetrating in the up and down direction, and a shaft 88 fitted into the through hole of the linear bush 86. As shown in FIG. do. The linear bush 86 and the shaft 88 are attached to the 2nd base 26 and the moving piece 32, respectively. The movement restricting mechanism 56 further includes a hole 89 provided in the second base 26 in succession to the through hole of the linear bush 86.

The shaft 88 is slightly smaller than the hole diameter of the linear bush 86, but has substantially the same diameter dimension. As a result, the shaft 88 prevents the linear bush 86 from moving in the X direction and the Y direction with respect to the shaft 88, and further, the second base 26 is X with respect to the moving piece 32. It prevents the movement in the direction and the Y direction.

However, since a plurality of spheres are provided on the inner wall of the through hole of the linear bush 86, and the shaft 88 can slide up and down with respect to the linear bush 86, the second base It is possible for the 26 to move in the vertical direction with respect to the moving piece 32, that is, to move up and down.

Referring to Fig. 5, each lifting mechanism 52 includes first and second fixing members 58 and 60 provided on the upper surface of the moving piece 32 and the lower surface of the second base 26, respectively, and the second base. And a movable member 62 coupled to the first and second fixing members 58 and 60 so as to be movable in the longitudinal direction of the 26.

The first fixing member 58 includes a first rail 64 provided on the moving piece 32. The movable member 62 includes a first guide 66 coupled to the first rail 64 so as to slide along the first rail 64, and a first tongue installed on an upper portion of the first guide 66. And a second rail 70 provided on the upper part of the first tongue member 68. The second fixing member 60 includes a second guide 72 coupled to the second rail 70 so as to slide along the second rail 70, and an upper portion and a second portion of the second guide 72. And a second tongue member 74 installed on the bottom surface of the base 26.

An upper portion of the first tongue member 68 is a first inclined portion 76 inclined in the longitudinal direction of the moving piece 32. The lower surface of the second tongue member 74 is a second inclined portion 78 parallel to the first inclined portion 76.

The 2nd rail 70 is attached to the 1st inclination part 76 so that a movement is impossible so that it may extend in the inclination direction. The second guide 72 coupled to the second rail 70 so as to be slidably movable is provided on the second inclined portion 78 so as not to be movable.

The 1st rail 64 extends in the longitudinal direction of the moving piece 32, and is provided so that a movement to the upper surface of the moving piece 32 is impossible. The first guide 66 coupled to the first rail 64 so as to be slidably movable is provided below the first tongue member 68 in a non-movable manner.

The lifting and lowering of the second base 26 relative to the moving piece 32 causes the power of the driving source 82 to move the first tongue member 68 through the first and second driving force transmitting members 79 and 80. 32) in the longitudinal direction. That is, referring to FIGS. 5 and 7, when the first tongue member 68 and the second rail 70 provided thereon move in the longitudinal direction of the moving piece 32, the second tongue member 74 and this The installed second base 26 slides or slides up and down with respect to the first tongue member 68 along the second rail 70 extending in the inclined direction of the first inclined portion 76. do.

At this time, since the movement in the longitudinal direction of the moving piece 32 is prevented by the movement restricting mechanism 56 in the second base 26, only the first tongue member 68 is the length of the moving piece 32. Move in the direction of As a result, the second base 26 moves downward or upward with respect to the moving piece 32 without moving in the longitudinal direction. In addition, the first rail 64 and the first guide 66 smoothly move the first tongue member 68 only in the longitudinal direction.

The first rail 64 and the first guide 66 may be alternately provided on the upper surfaces of the first tongue member 68 and the moving piece 32, respectively, and the second rail 70 and the first guide 66 may be provided. The 2nd guide 72 may be provided in the lower part of the 2nd tongue member 74, and the upper part of the 1st tongue member 68, respectively.

In addition, without using a rail and a guide, the first tongue member 68 is in contact with the second inclined portion 78 of the second tongue member 74 and the upper surface of the moving piece 32. ), And a low friction material in a sheet form on the upper and lower portions of the first tongue member, the lower surface of the second inclined portion 78 and the upper surface of the moving piece 32 to form a first friction material. The tongue member 68 may be smoothly moved.

The first and second fixing members 58 and 60 include a rotating member such as a roller that rotates around an axis line extending in the width direction of the moving piece 32. The first and second fixing members 58 and 60 may be rotatably provided on the lower surface of the second base 26 and the upper surface of the moving piece 32, respectively. At this time, the movable member 62 can move smoothly along the rotational direction of the rotating member. In addition, the 1st and 2nd fixing members 58 and 60 may be installed in the lower surface of the 2nd base 26, and the upper surface of the moving piece 32, respectively. In addition, the movable member 62 may be arrange | positioned by changing the upper part and the lower part.

The lifting mechanism 52 may include a jack such as a screw jack. In this case, the drive mechanism 54 may include a motor capable of controlling the rotation angle position as a pulse motor as a drive source, and rotates the screw portion of the screw jack by the motor to turn the jack in the Z direction. Lifting means such as stretching may be used.

The lifting device 28 includes a drive mechanism 54 such as a cylinder arranged to expand and contract in the Z direction, and directly lift the second base 26 with respect to the moving piece 32 without passing through the lifting mechanism 52. You may have to. However, since the drive mechanism 54 generally has a large dimension in its driving direction, the drive mechanism 54 is driven to expand and contract in the longitudinal direction of the moving piece 32, so that the drive mechanism 54 extends through the lifting mechanism 52. The base 26 is raised and lowered.

The lifting device 28 is a moving piece 32 between the second base 26 and the moving piece 32 as compared with the case of directly lifting the second base 26 by the drive mechanism 54. Large space in the longitudinal direction of can be effectively utilized. The lifting device 28 does not include the drive mechanism 54, and may operate the lifting mechanism 52 by an operator of the lifting operation.

In the inspection apparatus 10, each of the two bases 26 can be lifted and lowered to each of the four moving pieces 32 moving two-dimensionally in the plane parallel to the upper surface of the table base 30 described above. Since the position of the receiving surface 26c is adjusted three-dimensionally by arrange | positioning the elevating apparatus 28 so that it may support, it can test | inspect various to-be-tested objects with a common panel tray without replacing a panel tray.

In the present embodiment, the elevating device 28 is disposed in each of the four second bases 26, but one or two depending on the number of the terminal portions 20 of the inspected object 12 to be inspected. Each of the two or three second bases 26 is provided with a lifting device 28 as described above. For the second base 26 on which the elevating device 28 is not arranged, the second base 26 and the member for increasing the width dimension of the plate member 26b or for adjusting the height position of the plate member 26b. It is necessary to align the height positions of the four receiving surfaces 26c by means of disposing between the moving pieces 32 and the like.

In addition, in this embodiment, one lifting device 28 is disposed between the second base 26 and the first base 24 so as to raise and lower one second base 26. Two elevating devices 28 may be disposed between the second base 26 and the first base 24 so as to elevate the two or three second bases 26.

In the case where the elevating device 28 elevates the second base 26 steplessly, if the elevating device 28 is arranged so that the three second bases 26 can independently elevate, the polarizing plate ( 18, even if the terminal part 20 is provided in the edge of either side of the to-be-tested object 12 with which the said 2nd base 26 was lifted, the board | substrate receiving body 14 inclines to the panel receiver 14 The subject 12 can be received parallel to the table base 30 without losing.

[About alignment device]

1 and 8 to 11, in the first embodiment, the inspection object 10 is an alignment device for aligning the inspection object 12 two-dimensionally in a plane parallel to the receiving surface 26c ( 90) further. The alignment device 90 includes a first pusher mechanism 92 and a first positioning mechanism 94 on one side and the other side of the pair of opposing second bases 26 and disposed outside the receiving surface 26c, respectively. ) And a second pusher mechanism 96 and a second positioning mechanism 98 disposed on one side and the other side of the other pair of second bases 26, respectively.

Each of the pusher mechanisms 92 and 96 advances the inspected object 12 with respect to the positioning mechanisms 94 and 98 facing the pusher mechanisms 92 and 96. In contrast, each of the positioning mechanisms 94 and 98 determines the reference position of the inspected object 12 in the X direction (or Y direction).

8 to 10, each of the pusher mechanisms 92 and 96 and the positioning mechanisms 94 and 98 are at substantially the same height as the panel receiving face, and when viewed in plan view, they are located outside of the panel receiving face. The press member 100, the support body 102 supported by the press member 100, the alignment drive mechanism 104 which retracts the movable body 102 and the press member 100, and the support plate which supports them Equipped with 106.

In the example shown in figure, the movable body 102 extends up and down, and has a post shape. The pressing member 100 is a roller having a surface parallel to the Z direction rotatably provided around the axis line extending in the Z direction by the mounting pin 108 in the upper end portion of the movable body 102, but may be another member.

The supporting plate 106 is attached to the pair of rails 110 provided on the upper surface of the plate member 26b so as to be movable in the longitudinal direction (the X direction or the Y direction) of the plate member 26b. Both rails 110 extend in parallel in the longitudinal direction (the X direction or the Y direction) at intervals in the width direction (the Y direction or the X direction) of the plate member 26b.

The supporting plate 106 is attached to one rail 110 by the guide 112, and is placed on the upper surface of the other rail 110. For this reason, one rail 110 acts as a guide rail. The other rail 110 has the female screw hole 114 which opens upwards in each of several places of the longitudinal direction (X direction or Y direction).

The other rail 110 is provided with a strip-shaped fixing bracket 118 having a long hole 116 extending in the longitudinal direction, and is provided in the support plate 106 so that relative movement is impossible. The fixing bracket 118 is fitted into the long hole 116 from above, and is detachably attached to the other rail 110 by the bolt 120 joined to the female screw hole 114. Thereby, each support plate 106 is fixed so that release is possible at the predetermined position in the longitudinal direction.

As a result of the above, each of the pusher mechanisms 92 and 96 and the positioning mechanisms 94 and 98 are releasably fixed to a predetermined position in the longitudinal direction. For this reason, the other rail 110 acts as a fixed rail which releasably fixes the positions of the pusher mechanisms 92 and 96 and the positioning mechanisms 94 and 98 in the longitudinal direction. However, the positions of the pusher mechanisms 92 and 96 and the positioning mechanisms 94 and 98 in the longitudinal direction are the female threaded holes 114 for coupling the bolts 120 and the fixing brackets 118 for the bolts 120. By changing the position of), it can be selected according to the type, size, etc. of the inspected object 12.

Each alignment drive mechanism 104 is a pair of rails 122 which extend in the longitudinal direction (X direction or Y direction) of the support plate 106 at intervals in the width direction (Y direction or X direction) of the support plate 106. ), A slider 124 fitted to each rail 122 so as to be movable in the width direction of the support plate 106, a connecting plate 126 connecting the two sliders 124, and the pressing member 100 to the support plate ( 106 is provided with a drive source 128 for moving in the width direction.

The slider 124 is provided on the bottom surface of the connecting plate 126. The drive source 128 is provided on the upper surface of the support plate 106. The movable body 102 is provided in an upright body above the connecting plate 126. However, the movable body 102 and the connecting plate 126 may have an integral structure.

As shown in Fig. 10, each drive source 128 of the pusher mechanisms 92 and 96 utilizes a hydraulic cylinder mechanism such as an pneumatic cylinder or a hydraulic cylinder. In this cylinder mechanism, the cylinder is attached to the support plate 106 and the piston rod is connected to the slider 124.

For this reason, each alignment drive mechanism 104 of the pusher mechanisms 92 and 96 pushes the slider 124 with respect to the panel receiving part 26a of the 2nd base 26 by the drive source 128, and is pressed. The member 100 is advanced in the X direction or the Y direction with respect to the subject 12 mounted on the panel receiver 14.

As shown in Figs. 9 and 11, each drive source 128 of the positioning mechanisms 94 and 98 uses a motor capable of controlling the rotational angle position like a pulse motor. For this reason, each alignment drive mechanism 104 of the positioning mechanisms 94 and 98 extends from the corresponding drive source 128 in the width direction of the support plate 106 and is rotated by the corresponding drive source 128. A screw 130 and a nut 132 coupled to the ball screw 130 is further provided. The nut 132 is attached to the connecting plate 126.

Each alignment drive mechanism 104 of the positioning mechanisms 94 and 98 rotates the ball screw 130 by the drive source 128 to thereby rotate the nut 132 to the panel receiving portion 26a of the second base 26. ), The pressing member 100 is moved forward and backward with respect to the inspected object 12 mounted on the panel support 14.

In the alignment apparatus 90 having the above structure, for example, as shown in Fig. 11, the pressing member 100 of the positioning mechanism 98 for the X direction is moved in the X direction, The object 12 is pressed by the pressing member 100 of the pusher mechanism 96 for the X-direction and the pressing member 100 of the positioning mechanism 98 for the X-direction by maintaining the reference position of the test subject 12. For). As a result, the inspected object 12 is aligned in the X direction.

The alignment of the inspected object in the Y direction is performed by operating the positioning mechanisms 94 and 94 for Y direction and the pusher mechanisms 92 and 92 for Y direction as described above.

As described above, the positioning mechanisms 94 and 98 and each of the alignment drive mechanisms 104 maintain the changeable and releasable position of the advance of the pressing member 100 in the X direction or the Y direction. In addition, each alignment driving mechanism 104 of the positioning mechanisms 94 and 98 is formed by the pusher mechanism 92 or 94 facing the position of the pressing member 100 in the advancing direction of the corresponding pressing member 100. Resist to pressure and keep releaseable.

12 and 13, in the inspection apparatus 200, the four moving pieces 134 woven in a square shape are XY so as to change the size of the fourth opening by the coupling device 142. It is coupled to the table base 30 to move two-dimensionally in the plane.

The coupling device 142 extends in the Y direction at intervals in the X direction, and has a pair of long plate-shaped first sliders 144 provided on the table base 30 so as to be movable in the X direction, and a first slider ( 144 extends parallel to the X direction at intervals in the Y direction, and has a pair of long plate-shaped second sliders 146 provided on the table base 30 so as to be movable in the Y direction.

The moving pieces 134a, 134b, 134c, and 134d respectively correspond to one slider 146, the other slider 146, one slider 144, and the other slider 144, and are supported by corresponding sliders. have.

The first and second sliders 144 and 146 are provided on the upper surface of the table base 30. Further, the first and second sliders 144 and 146 are movable on the rail 148 extending in the X direction and the rail 150 extending in the Y direction, respectively, at one end and the other end of each slider. Are combined.

Since the first and second sliders 144 and 146 are not coupled to each other, the first and second sliders 144 and 146 can move independently in the XY plane in the X or Y direction. The moving pieces 134a to 134d supported by these sliders move in accordance with the movement of the corresponding slider.

Each of the first and second sliders 144 and 146 is moved in the X direction (or the Y direction) by the moving piece drive mechanism 152, and is releasably released at an appropriate position in the moving direction. maintain. Each moving piece drive mechanism 152 can be made into the same mechanism as the moving piece drive mechanism 50 in 1st Example.

[Second Embodiment]

12 and 13, the inspection apparatus 200 includes a first base 24 having four long plate-like moving pieces 134 combined in a square shape, and each moving piece 134. A panel receiver 14 having second bases 136 and 138 arranged at intervals above and between the respective moving pieces 134 and the corresponding second bases 136 or 138 and corresponding And a lifting device 28 that supports the base 136 or 138 to the moving piece 134 so that the base 136 or 138 can be lifted.

The four moving pieces 134 are a pair of moving pieces 134a and 134b extending in the X direction at intervals in the Y direction, and moving pieces 134c and 134d extending in the Y direction at intervals in the X direction. By assembling in a square shape, the fourth opening is formed as in the first embodiment.

The second bases 136 and 136 corresponding to the moving piece 134a and the moving piece 134b, as in the first embodiment, include an elongate plate-shaped panel receiving portion 136a and an elongate plate-like member 136b. Then, the longitudinal direction of the panel receiving part 136a and the plate-shaped member 136b are matched, and the width direction of the panel receiving part 136a becomes the Z direction, and the width direction of the plate-shaped member 136b is the X direction (or the Y direction). ), The panel receiving portion 136a and the plate member 136b are L-shaped. The second bases 136 and 136 are disposed above the moving piece 134a and the moving piece 134b.

The second bases 138 and 138 corresponding to the moving piece 134c and the moving piece 134 (d) include a replacement part constituting the panel receiving portion 138a and a plate-like member 138b. The plate member 138b is located above the corresponding moving pieces 134c and 134d and is disposed below the moving pieces 134a and the moving pieces 134b.

Each plate-like member 138b is moved between the jaws of the moving pieces 134a and 134b and the jaws of the moving pieces 134c and 134d so that the lifting members 28 can lift and lower the moving pieces 134c and 134d. Are arranged at intervals in the vertical direction.

Each replacement part is provided on the upper surface of the second base 138 or 138 corresponding to the moving piece 134c or the moving piece 134d. Each replacement part is, as described later, exchanged in dimensions suitable for the distance between the moving pieces 134a or 134b after the moving pieces 134a or 134b, and also the second base 136 or 136, have been moved. The part is installed. The panel receiving part 136a and the panel receiving part 138a include receiving surface 136c and 138c, respectively, and the panel receiving surface which receives the test subject 12 is formed by these receiving surfaces.

As a result of the above, the four moving pieces 134a-134d are moved so that the magnitude | size of a 4th opening may be changed. After the positions of the moving pieces 134a to 134d are determined, the replacement parts suitable for the intervals of the moving pieces 134a and 134b are provided in the second base 138 corresponding to the moving pieces 134c and 134d.

Also in the inspection apparatus 200, the lifting and lowering which supports the 2nd base 136 and 138 so that lifting and lowering is possible to the four moving pieces 134 which move two-dimensionally in the plane parallel to the upper surface of the table base 30 is possible. Since the device 28 is disposed, the positions of the second bases 136 and 138 are adjusted three-dimensionally. As a result, inspection of various test subjects is possible with one panel tray, without replacing the panel tray.

In the second embodiment, the inspection apparatus may include the pusher mechanisms 92 and 96 and the positioning mechanisms 94 and 98 of the alignment apparatus as in the first embodiment.

In the above embodiment, in all the alignment apparatuses are provided with positioning mechanisms, positioning pins may be used in place of the respective positioning mechanisms. In this case, for example, the pressing member 100, the movable body 102, the alignment drive mechanism 104, and the like of each positioning mechanism are removed, and the positioning pin is moved like the movable body 102 to the plate member 26b. Or what is necessary is just to arrange | position to the plate-shaped member 26b or the support plate 106 so that the outer side of the panel receiving part 26a may be raised from the support plate 106.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the claims.

10, 200: inspection device for flat test subject 12: flat test subject
14: panel support 24, 140: first base
26, 136, 138: second base 26a, 136a, 138a: panel receiving portion
26b, 136b, 138b: plate member 26c, 136c, 138c: receiving surface
28: lifting device 30: table base
32, 134: moving piece 34, 142: coupling device
52: lifting mechanism 54: driving mechanism
56: movement restricting mechanism 58: first fixing member
60: second fixing member 62: movable member
64: first rail 66: first guide
68: first tongue member 70: second rail
72: second guide 74: second tongue member
76: first inclined portion 78: second inclined portion
90: alignment device 92, 96: pusher mechanism
94, 98: positioning mechanism 104: alignment driving mechanism

Claims (8)

A first base having a first opening penetrating in a vertical direction;
Four long second bases arranged above the first base, the four long second bases having a rectangular second opening facing the first opening together and having a receiving surface receiving the plate-like object together; 2 bases; And
At least one elevating device corresponding to at least one of said second bases, said at least one elevating device disposed between said corresponding second base and said first base to enable lifting of said corresponding second base onto said first base; And at least one elevating device for supporting the flat plate inspection object.
The inspection apparatus according to claim 1, wherein the elevating device includes at least one elevating mechanism and a driving mechanism for driving the elevating mechanism, the drive mechanism being provided on the first or second base.
3. The lifting device of claim 2, wherein the elevating mechanism is provided above the first base and below the second base, and is movable in a longitudinal direction of the first and second fixing members facing each other and the second base. A movable member coupled to the first and second fixing members, the movable member being moved in the longitudinal direction of the second base by the driving mechanism;
The first fixing member and the movable member or the second fixing member and the movable member are coupled to be movable relative to the movable member in a direction inclined with respect to the longitudinal direction of the second base,
The lifting device further includes a plurality of movement control mechanisms that allow the second base to move up and down relative to the first base, but at least prevent movement of the second base in the longitudinal direction of the second base. .
The method according to claim 3, wherein one of the first and second fixing members includes a first rail provided on either one of the first and second bases and extending in the longitudinal direction of the second base,
The movable member may include a first guide coupled to the first rail so as to be movable along the first rail, and a first tongue member installed on the first guide, the first inclined member with respect to the longitudinal direction of the second base. A first tongue member having a first inclined portion, and a second rail provided in the first inclined portion and extending in an inclined direction thereof;
The other side of the first and second fixing members may include a second guide coupled to the second rail to move along the second rail, and a second tongue member provided on the other side of the first and second bases. And a second tongue member having a second inclined portion facing in parallel with the first inclined portion and having the second guide installed on the second inclined portion.
The inspection apparatus according to any one of claims 1 to 4, wherein the elevating device is disposed in each of two, three, or four second bases.
The said 1st opening contains a lower 3rd opening and an upper quadrangle 4 opening, The said 1st base has the said 3rd opening and an upper surface. A table base, four long moving pieces arranged to form the fourth opening above the table base, and a coupling device disposed between the table base and each moving piece, the size of the fourth opening being determined. And a coupling device for movably coupling each moving piece two-dimensionally in a plane parallel to the upper surface of the table base, wherein each second base corresponds to each moving piece, and above each corresponding moving piece. Inspection apparatus, characterized in that disposed on.
The said motion control mechanism is a linear bush provided in either one of the said 1st and 2nd base, The linear bush which has a hole which penetrated in the lifting direction of the said lifting mechanism, and said 1st And a shaft fixed to the other side of the second base, the shaft passing through the hole.
The inspection apparatus according to any one of claims 1 to 4, wherein the inspection apparatus further includes an alignment device for positioning the flat inspection object received on the receiving surface,
Each second base includes a panel receiving portion defining a portion of the receiving surface,
The alignment device,
A first pusher mechanism and a first positioning mechanism disposed on one side and the other side of the pair of opposing second bases and disposed outwardly of the receiving face, respectively, and on one side and the other of the pair of opposing second bases; With a second pusher mechanism and a second positioning mechanism disposed on each side,
The pusher mechanism and the positioning mechanism each include at least one pressing member for pressing the flat plate-like object received by the panel receiving portion with the positioning mechanism or the pusher mechanism, and the pressing member corresponding to the second base. Has at least one alignment drive mechanism displaced in the longitudinal and width directions of
And the alignment drive mechanism of each positioning mechanism is releasably held in resistance against the pressing force of the pusher mechanism facing the position in the advancing direction of the corresponding pressing member.

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