TW571082B - Detection device for substrate - Google Patents

Abstract

The invention is to decrease as could as possible the occupied area and the prime cost of detection device which grow up as the size of the substrate to be detected become larger, characterized in that a detecting stage for receiving the substrate to be detected from the transition device is shifted selectively between a transition position where the received substrate to be detected is horizontal and a detection position where the received substrate to be detected is inclined.

Description

571082 V. Description of the invention (1) [Detailed description of the invention] [Technical field to which the invention belongs] The panel inspected by a visual inspection lighting inspection device panel like a crystal stormer panel is inspected from the state of the substrate box, and then the present invention The invention relates to an inspection device used for conducting a power-on test such as a liquid inspection substrate. [Known Technology] Of the display panels such as liquid crystal display panels, most of them are used to carry a display for a substrate to be inspected to an inspection table, and the inspection table is transported to the substrate cassette from the inspection table at an angle.

The biggest problem of k kinds of inspection devices is: at what point should the unchecked box that is transported to the box in a horizontal state, and the inspected heart plate that is transported to the inspection table in an inclined manner changed from = to an inclined state. Transfer, ... The tilted state is changed to = The surface to be checked is delivered to the flat transport platform, and the rotary inspection board that is transported in the selective variable is changed from the base pair to the tilted one. The water-changing device is used to take out the quasi-mechanism horizontally in the box for the board, and tilt the panel in advance, and then use the panel, and check the panel to match the box gold (Japanese JP-A J device, in advance The function of the alignment and tilting state is to change the long side direction of the horizontal transfer robot arm, and in the horizontal state, the J alignment mechanism will turn the panel from 7 ″ to make the relay mechanism tilted. It was delivered in a tilted state to # 1-183864, which is the opposite of the aforementioned transportation and change). In addition to the function of selecting the panel, the mechanism also has the function of making the panel 9 (panel).

313784.ptd $ 6 pages 571082 V. Description of the invention [However, the size of the conveying panel is large, the size of the product is increased, the time is changed, and so on. [Solve the problem that the hand-held inspection station, inspection system, and inspection position are selectively moved with electrodes facing each other, and the untransported inspection station will be changed to tilt inspection (2) Problems to be solved] Compared with conveying the panel in a horizontal state, it has more instability factors when it is tilted, and this type of unstable element becomes more significant as the panel is shaped. In addition, with the increase in the size of the panel, the number of stages will increase with the size of the panel, which will increase the cost of the device's occupancy, increase the transport distance, and cause problems during transport. The purpose of Ming is to minimize, as far as possible, the increase in the area occupied by the device and the costs, stages, functions, and effects caused by the large size of the device. The inspection platform with the substrate in an inclined state 'shifts the mechanism of the inspection table in the delivery position; a contactor for inspection contact shifted to the inspection position; and when the inspected substrate is delivered to the inspected substrate in the aforementioned inspection, In the horizontal state, the substrate to be inspected is transferred to the table from the inclined state by the displacement mechanism and completed in this state by: between the inspection positions of the delivery device that receives the inspected substrate in the horizontal state. The probe device is arranged between the selective moving device and the inspection position. The seismic inspection system receives the substrate to be inspected on the inspection table, and the aforementioned inspection table is shifted to a delivery device for loading the inspection table. Inspection by moving the delivery device to the delivery device in a horizontal state. Perform the lighting inspection by moving the delivery device to the inspection position. From the examination table using the displacement mechanism from

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Page 7 571082 V. Description of the invention (3) " 1 ~-The inspection position is moved to the delivery device, and the tilted state is changed to the horizontal state, and in this state, the delivery device is delivered to the delivery device and transported horizontally. According to the present invention, there is a problem of device occupation caused by an increase in the size of a device board for transferring a substrate to be inspected selectively by changing the inspection to a horizontal state and a tilted state. The inspection platform is shifted, and the substrate to be inspected is oblique. Therefore, it is not necessary to tilt the result. The result can reduce the increase in the area of the inspected substrate and the costly upward inspection box. The inspection section, the inspection section of the front section, the inspection section, and the cassette inspection table that selectively configures 0 as the axis for controlling the extension are delivered to the loading section of the inspection section of the inspection section. The four shifts are drawn from the above-mentioned inspection. Compared with the above, there is a space for effective turning of the base; the inspection box is separated from the box section and the front and rear 'this hair' is available. The step of facing the water further includes providing a setting table, the delivery device, and the cassette. In this way, the S box and the inspection table are both sides. The table system is arranged in the inspection section, and left and right I sections are arranged between the inspection sections, and they are arranged in the loader. In this way, the mechanism of the box setting section and the rear space of the box section include the following: the delivery device that can withstand the aforementioned inspection table and the i units of the substrate can be inspected. The substrate can be delivered in a horizontal state. The inspection table is equipped with a box. The box is set to the layout. The driver is selected because the space is extended to the inspection table in the horizontal direction of the inspection. When the aforementioned inspection

571082 ——-_______ V. Description of the invention (4) ~ ~ ----- 一 ------- The moving plate and probe moving in the z direction staggered with the substrate to be inspected are not required on the inspection table A moving mechanism is provided to allow the inspection base to move the inspection C in the Z direction relative to each other, so that the inspection dimension of the inspection port becomes smaller, and at the same time, the position of the inspection substrate in the probe device is stabilized.衣 1 甲 置 之 ΐ: The real moving mechanism may be provided with: the method of bearing the aforementioned probe mounted in the direction of moving in the direction of ==, moving the movable stage AZ ″, and moving the inspection stage into 5 units; installation; With the cool disk top; the old disk of the inspected substrate is out of order ...., the old clothes of ρ; the backlight device can be rotated around the angle at the same time as the previous movement The height of the inspection table in the direction of the lamp inspection installation with backlight device. 2Move the inspection table to the delivery device ;: shift. The axis of the mouth extension is supported on the front page 9

: A reed nut attached to the lead screw in a state of extending in the horizontal direction; four in the axis extending in the vertical direction: the-end of the leaf nut is pivotally installed here With the rotation of the lead screw 313784.ptd 571082 5. The base of the invention (5), the aforementioned driving mechanism includes: a driven gear mounted on a pivot. The driving source for angular rotation of the driven gear, the aforementioned The inspection table may also be connected to the aforementioned driven gear. Thereby, as the driven gear rotates at an angle, the taste detection platform can surely and selectively move rice between the delivery device and the inspection position. [Embodiment of the invention] Referring to FIGS. 1 to 3, the inspection device 1 〇 is used as a liquid crystal inspection device that uses a rectangular, crystal display panel as the inspection substrate 12 to be inspected. The inspected substrates 12 and 2 are inspected in an inclined state. The following 'to simplify the description and clearly understand the present invention, the μα, ^ ^ obliquely arranged on the left side of the inner surface of the inspected substrate 12 parallel to the inspection device 10' and the upward and downward tilting directions (forward and backward tilting directions) are called X The right and left directions and the direction perpendicular to the substrate 12 to be inspected are referred to as the Z direction. Outside, the axes extending in the X direction, the Y direction, and the Z direction are referred to as the line, the Y axis, and the Z axis, respectively. Μ The χ vehicle inspection device 10 includes a main body 14. The left area at the upper part of the front of the main body 14 is an inclined surface 16 inclined upward. The main body 14 is a main body frame that is provided with a plurality of passage members, and is detachably mounted on the reading frame. A plurality of panels are formed in the shape of a frame. Λ In the main body 14, the corresponding inspection box setting portion 22 for inspecting the substrate to be inspected is tilted, and the inspection portion is used as the loading portion 24 of the substrate to be inspected. Plate 1 2 The large rectangular opening 2 6. The inspection section 20 is provided above the inspection section 20: the inspection section 20 of the arrangement area of the rear main body oblique section 16, and the area on the right end side is set as $ 2 〇 and the Ε box setting section 2 2 between the fields. The inclined surface portion 16 has energized the test substrate than the group to be checked

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Page 10 571082 V. Description of the invention (6) A plurality of probe devices 28, an inspection table 30 for receiving the subject I ?, and a shift mechanism 32 for shifting the inspection table 30. ^ Contrary to this, the box configuration section 22 is provided with a box setting table 36 for mounting a plurality of boxes 34 for receiving the inspected substrate 12, and the loading section 24 is provided with: The robot 38 functions as a delivery device that delivers the inspected substrate 12 to the inspection table 30 and the cassette 34. In order to accommodate the inspected substrate 12 in a horizontal manner, the cassette 34 is distinguished. F The cassette for the inspected substrate 12 that has not been inspected; and the g-box for the inspected substrate 12 that has been inspected. In the example shown in f, the probe device 28 corresponds to the two long sides (χ side) and one short side (γ side) = which are opposite to the substrate to be inspected and the square, and each probe is used. The zine moving device of the needle device 28 is movable in the Z direction. In the example shown in Fig. 4, a Z driving device 40 is also arranged on the remaining short side. In fact, the probe device 28 and the two moving devices 40 are arranged on one side, two adjacent sides, or all sides of the electrodes 12 and the type of inspection in cooperation with the substrate 12. The needle block 4 is shown in the figure of J4 and Λ5. Each probe device 28 is a plurality of probes, and 5 is mounted on the plate-shaped probe base 44, and the probe is set in the plate shape of the Z moving device 40. Can be produced with 4 daggers installed together with the Z moving device and explained. The movable stage 46 is provided on each probe block 42 with a row of probes on its lower side. Each probe is: a plurality of needles assembled with a front end as a method ", a probe of a pin type or a plate type with the tip of the needle as a contactor"

571082 V. Description of the invention (7) Opening film: The front end of multiple wirings on one side, or a thin film probe with electrodes as contacts (for probe pins, you can use JP 10 ~ 1 3 2 8 5 3 The general known probe block described in the Bulletin. &Amp; The probe base 44 of each probe device 28 on both sides is sufficient so that at least the needle block 42 protrudes from the movable table 46 into the body. , Nai extension: The linear guide is installed in the movable port 46 in a way that can be moved in the χ direction, and the position of the χ direction is adjusted by the X driving mechanism 50. Xiang Yan: The linear guide is provided with a direction of χ Square guide: rail. In the slide example where the guide rail can be moved toward the long side of the guide rail, the guide is installed on the movable table 46, and the slide guide can also be installed on the probe base. The slide guide is mounted on the movable table 46. The probe device 28 on the side of fR: Y is borrowed from the probe base 44 in order to at least allow the probe block 42 from the inside of the door 2 and the main body 14 '. The spacer 52 shown in Fig. 5 is mounted on the movable table 46. Each X driving mechanism 50 is mounted on a fork shaft motor so as to be engageable with a χ-axis motor, The reed two = 56. The same as the slide guide of 48, screwed to each of the X-axis drive devices of the lead screw 50 is using the χ vertical movable table 46. This can adjust the probe arranged on the long side. Needle device

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V. Description of the invention (8) A —__ The position of the contactor is 2-8. "The probe corresponding to the rectangular short side is assembled with the probe placed on the gamma side. Lu Gan said that there is a camera 60, and in addition, the probe placed on the Y side at each end in the long side direction is placed on the X side. Each probe device 28 on the side is provided with a camera 60 at the end opposite to the side where each camera is equipped. ★ The camera 60 is supported on the opposite needle base 44 of the probe display panel 12 to The feed-in light is formed by the display used to display the Xiao Φ k. The output signal of the camera 60 is used to position the relative position between the ΐΪΤΐ and the probe device 28 in the field of view. The camera position S is converted into a camera, and positioning is performed by moving the display panel 12 of the alignment table 74 of the inspection table 30. Right: H-moving device ... 40 'In addition to the aforementioned movable table 46, σ46 A pair of linear guides 62 attached to the main body 14; a hollow motor 64 disposed on a surface forming the opening 16 of the inclined surface portion 16; a lead screw 66 screwed to a rotating hollow portion of the hollow motor 64. The hollow motor "and The lead screw 66 is formed as a zeta moving machine that can move the movable table 46 in two directions. Each movable stage 46 is formed of a plate-like member extending in the direction corresponding to the side of the rectangle, and is supported at a position parallel to the inclined surface 16 of the spot body 14 by a linear guide 62 and a moving mechanism. In addition, the linear guide 62 is a general linear guide, and includes: a guide groove extending in the ζ direction; and a sliding guide fitted to the guide in a manner movable in two directions. The guide is installed to form an opening.丨 6 surface, and the slide guide is installed on the movable platform 46. Each hollow motor 64 is installed on the inclined surface 丨 6, so that the hollow part rotates

313784.ptd Page 13 571082 V. Description of the invention (9) The axis can extend in the Z direction, and each lead screw 66 is mounted on the movable table 46 in such a manner as to extend in the Z direction. As shown in FIG. 6 and FIG. 7, the inspection table 30 is provided with a chuck top 70 that receives the substrate 12 to be inspected and performs vacuum adsorption in a releasable manner; Device 72; equipped with a function of allowing the top plate 70 and the backlight device 72 to perform a two-dimensional movement in a plane parallel to the substrate to be inspected 12 and to perform an angular rotation around the Z axis Integrated alignment stage 74; When the substrate to be inspected 12 is delivered to the robot 38, the substrate elevating rod 76 that allows the substrate to be inspected 12 to be raised and lowered with the top 70 of the chuck. For example, in the horizontal direction, the extension of the screw 82 to the shaft is performed.

As shown in FIG. 6 and FIG. 7, the shift mechanism 32 includes a plate-shaped base 80 that extends toward 4 and is disposed on the main body 14 in a state; and is disposed on the base 8 in a state that extends toward γ. 〇 Lead screw 82; reed nut 84 screwed to the piano; located at one end around the axis that can extend in the X direction, and assembled at one or more 86 of the reed nut 84, and A rotating mechanism for the lead screw 82 to rotate. The illustration uses a pair of engagement arms 86. ^ Taiwan is located at two intervals in the γ direction.

π and base 0. The base 80 is mounted on the front end of the base 杳 in a pivotal manner, and is equipped with a pair of "9", while the two mounting stations are shown in the solid line in the figure. When the reed nut 84 is retracted,

313784.ptd Page 14 571082 V. Description of the invention (ίο) ~ ^ —-, it will be shifted to a level where the substrate to be inspected will be inspected. 2 The position of the robot 38. When the lead screw 82 rotates and the spring When the blade screw = to the position shown by the dot lock line in FIG. 7, the displacement is as follows. Then, the inclined state X of the substrate 12 and the inclined surface 丨 6 of the main body 14 are checked. The object to be inspected 12 is inspected with the inspection table 30 tilted one by one in FIG. 7. In addition, the inspection table 30 uses a shifting unit 32 to selectively shift the position shown by a solid line in FIG. 7 and the position shown by a figure in FIG. 7. As shown in Fig. 1 and Fig. 2, the robot 38 is supported so that the loading section can move to a pair of guides 100 extending in parallel in the Y direction. In addition, the robot 38 is provided with a motor 102. The robot moving mechanism with the lead screw 104 that rotates with the motor 102 will move to an appropriate position in the γ direction, and the substrate to be inspected 12 will be delivered to the cassette 34 and the inspection table. The robot 30 includes: A slide plate 106 that moves along the guide 100; a drive mechanism 108 mounted on the slide plate 106; a robot arm that is driven by the drive mechanism to deliver the substrate to be inspected. The inspection substrate 12 is transported and delivered by a robot 38 in a horizontal state in which the longitudinal direction of the inspection substrate 12 is consistent with the longitudinal direction of the robotic arm 10. The inspection device 10 is to make the inspection table 30 perform a pre-alignment function, and 2 sets of stoppers 1 1 2 and 2 sets of push rods 1 1 4 are arranged on the top of the chuck (see Fig. 6). The stoppers 112 are arranged 2 > adjacent to the virtual rectangle ^ " '' The corresponding position on the edge, and the putter At the positions corresponding to other edges adjacent to the rectangle. ^, The stopper 112 located at the edge of the X direction (long side direction) is arranged below

313784.ptd Page 15 571082 V. Description of the invention (11) The edge of the square inclined side. Each pusher 1 1 4 is an actuator (not shown) at a position where it does not contact the substrate 12 to be inspected on the top 70 of the chuck, and the substrate 1 1 2 to be inspected is opposed to each other. The position of the stopper 1 1 2 at the edge portion is angularly rotated. Specifically, each of the pushers 1 1 4 is retracted to a position where it does not abut the substrate 12 to be inspected when the substrate to be inspected 12 is delivered to the transfer robot 38. The substrate to be inspected 12 is attracted to the chuck top 70, and then the substrate to be inspected 12 is pushed to the stopper 112. In this way, the substrate to be inspected 12 can be aligned in advance on the inspection table 30 by contacting its edge portion with the stopper portion 1 丨 2. The following describes the delivery of the inspected substrate 12 using the inspection device 10 and the lighting inspection of the inspected substrate 12 with reference to FIGS. 8 to 11. First, the robot 38 uses the robot arm 11 to remove the The uninspected substrate 12 is taken out from 34 and transferred to the inspection table 30. Until this point in time ', the inspection table 30 is shifted to the delivery device so as to receive the substrate 12 to be inspected horizontally as shown in Fig. 8 while the substrate lifting lever 76 is protruded from the chuck top 70. In addition, each probe device is "raised in the ^ direction, and each pusher 1 1 4 is retracted to a position where it does not contact the substrate to be inspected.

As shown in Fig. 8, the corpse 4 moves the robot arm U0 forward to the substrate rise :: dry 76 space, and then descends slightly. Thereby, the substrate to be inspected is lifted on the substrate lifting lever 76. After that, the robot arm π0 moves backward, and the substrate lifting lever 76 lowers. Take this

313784.ptd Page 16 571082 V. Description of the invention (12) Load the inspected substrate 12 on the top of the chuck as shown in Figure 9. After that, each of the push rods 1 1 and 4 pushes the substrate to be inspected 12 to the opposing stopper 112. Thereby, the substrate to be inspected 12 is aligned in advance. After that, the substrate to be inspected 12 is vacuum-adsorbed on the top of the chuck 70, and the rotation mechanism 88 of the displacement mechanism 32 is operated in this state. Thereby, as shown in FIG. 10, the inspection table 30 is shifted to be inclined, that is, the inspection position. In this state, since the lower end edge portion of the substrate 12 to be inspected abuts against the stop portion 1 12 in the X direction, it can be prevented from slipping off the chuck 70. Next, the camera 60 and the alignment table 74 are used for precise alignment. After that, each probe device 28 is moved to the substrate 12 to be inspected, and the contacts of each probe device 28 are pushed to the electrodes of the substrate to be inspected 2. In this state, the substrate to be inspected is energized to perform the lighting inspection of the substrate 12 to be inspected. After that, the inspected substrate 12 is removed. This removal operation is performed by each machine performing an operation opposite to the above. As described above, when the inspection substrate 30 is shifted to selectively change the inspected substrate 12 to a horizontal state and a tilted state, the apparatus for transporting the inspected substrate 12 in the tilted state is no longer necessary. It is possible to reduce problems such as an increase in the occupied area of the device and an increase in price due to an increase in the size of the substrate 12 to be inspected. In addition, as clearly shown in FIG. 2, the space can be effectively used as an arrangement space for a control device or the like after the inspection section 20, the loading section 24, and the II box setting section 22. In the above-mentioned embodiment, the robot 3 8 ′ provided with a robot arm n 0 is used. However, it is also possible to use the robot 3 8 ′ equipped with a driving mechanism 108.

313784.ptd Page 17 571082 Description of the invention (13) Two robot arms with two or more robot arms π 〇 are ordered and delivered individually to the substrate to be inspected. When a robot with two robot arms is used, the method of delivering the inspected substrate to the E box can be controlled as follows: • The inspected substrate received by one robot arm is delivered to the cassettes of the appropriate cassette group. At the same time, the other unchecked substrates in the box are received by the same robot arm or other robot arms. In addition, the method of delivering the inspected substrate to the inspection table can be controlled: while one robotic arm receives the inspected substrate, the uninspected inspected substrate received by the other robotic arm is delivered to the inspection table. 300 In the above-mentioned embodiment, although the turntable for changing the longitudinal direction of the substrate to be inspected is not provided, the turntable may be provided. In addition, instead of the displacement mechanism 32 including the base 80, the lead screw 82, the reed nut 84, and the engaging arm 86, for example, the inspection table 30 can be rotated in a non-rotatable manner by a pivot extending in the horizontal direction. And the driving mechanism is used to rotate the pivot in an angular manner, thereby selectively shifting the inspection table between the delivery device and the inspection position. Referring to FIG. 12 to FIG. 14, the 'shifting mechanism 130' includes a plate-shaped base 132 disposed on the main body 14 in a state of extending in the horizontal direction, and around the axis extending in the horizontal direction. The pivot 134 of the inspection table 30 is rotatably supported; the fan-shaped driven gear 136 is rotatably mounted on the shaft 134; the drive motor 138 provided on the base 132; and the drive motor 138 installed on the base 132 Drive gear 140 that engages with the driven gear 136 of the rotating shaft.

313784.ptd Page 18 571082 Five 'invention description (14) The driven gear 136 is loyal to you. The rotation axis of U8 is great at the center of the long side of the pivot 134. The horse is supported by a bearing 142 mounted on the base 132 in a suspicious manner, thereby supporting the load acting on the driving gear. In the displacement mechanism 130, the motor 138 rotates in the forward direction or when the driven gear 136 and the shaft pole I34 also rotate in the forward direction or w. As a result, the inspection platform 30 can deliver the delivery device shown in FIG. Rotate to selectively shift between inspection positions. /, Shown in Fig. 14 The present invention is not limited to the above embodiment. For example, the lighting inspection is set by the inspector. Γ can be set on the delivery path of each substrate to be inspected. It can not only be used for visual inspection, but also for inspection. In addition, the inspection device and the LCD display panel are used for automatic U; inspection device. Each of the present invention can be performed with the inspection of the substrate, and various changes can be made without departing from the scope of the present invention. Situation

313784.ptd 571082 Brief description of the drawing [Simplified description of the drawing] FIG. 1 is a front view showing an embodiment of the inspection device of the present invention, and the figure is in a state where the front panel of the cassette setting portion and the loading portion is removed Figure. Figure 2 is a sectional view taken along line 2-2 of Figure 1. Figure 3 is a sectional view taken along line 3-3 of Figure 1. Fig. 4 is a plan view showing details of the probe device and its vicinity. Figure 5 is a sectional view taken along line 5-5 of Figure 4. Fig. 6 is a plan view showing an embodiment of the inspection table and the displacement mechanism. Fig. 7 is a front view of the inspection table and the displacement mechanism shown in Fig. 6. Fig. 8 is an operation explanatory diagram of the inspection device. Fig. 9 is an operation explanatory diagram following Fig. 8; Fig. 10 is an operation explanatory diagram subsequent to Fig. 9 < D Fig. 11 is an operational explanatory diagram subsequent to Fig. 10; 12 The figure is a front view of another embodiment of the displacement mechanism used in the present invention. Fig. 13 is a side view of the displacement mechanism shown in Fig. 12. Fig. 14 is a displacement mechanism shown in Fig. 12. Side view J This figure shows the state when the display inspection table is tilted. [Description of symbols] 10 Inspection device 12 Inspection substrate 14 Main body 16 Inclined surface portion 20 Inspection section 22 Cassette design section

313784.ptd Page 20 571082 Brief description of drawings 24 Loading section 26 Opening 28 Probe device 30 Inspection table 32 &130; Transfer mechanism 34 Cassette 36 Cassette setting table 38 Robot (delivery device) 40 Z moving device 42 Probe block 44 Probe base 46 Movable stage 48 > 62 Linear guide 50 X drive mechanism 52 Spacer 54 X-axis motor 60 Camera 64 Hollow motor 56 ^ 58 ^ 66 Lead screw 70 Chuck top 72 Backlight 74 pairs Stand 76 Baseplate lifting lever 80 ^ 132 Base 82 Lead screw 84 Reed nut 86 Engaging arm 88 Rotating mechanism 90 Mounting part 92 Guide 94 Support stand 100 Guide 102 Motor 104 Lead screw 106 Slide plate 108 Drive mechanism 110 Mechanical arm 112 Slot stop 114 Push rod 134 Shaft pole 136 Driven gear 138 Drive motor 140 Drive gear 142 Bearing

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Claims (1)

571082 n ai: u 乂 case number 91113456 ☆ year, / month? Amendment VI. Patent application scope 1. An inspection device for inspected substrates, which includes: used to accept the inspected substrates, and can accept the inspected substrates. An inspection table for selectively shifting between a delivery device in a horizontal state and an inspection position where the substrate to be inspected is inclined; a shift mechanism for selectively shifting the inspection table between the delivery device and the inspection position; one The above probe device is provided with a contactor in contact with an electrode of a substrate to be inspected received on an inspection table moved to an inspection position; and when the aforementioned inspection table is moved to a delivery device, it is inspected The substrate is delivered to the delivery device of the aforementioned inspection table. 2. The inspection device according to item 1 of the scope of patent application, which further includes: a cassette setting table provided with one or more cassettes to be inspected, and the aforementioned delivery device delivers the inspected substrate to the aforementioned inspection table With the aforementioned S box. 3. As for the inspection device in the scope of patent application item 1 or 2, wherein the inspection table is disposed in the inspection section, and the cassette setting table is disposed in a left-right space with the inspection section. The cassette setting section, and the delivery device is arranged in a loading section located between the inspection section and the cassette setting section. 4. The inspection device according to item 1 or 2 of the scope of patent application, wherein the aforementioned displacement mechanism includes: a base that can receive the aforementioned inspection table around the axis extending in the horizontal direction in a rotatable manner; A drive mechanism selectively shifted between the aforementioned delivery device and the aforementioned inspection position. 5. The inspection device according to item 3 of the patent application scope, wherein the aforementioned lift 3] 3784 amendment. Pic 2003.10. 3]. 022 Page 22 571082 _ Case No. 91113456 f year 丨 丨 Month 7th Amendment _ Sixth, the scope of patent application structure includes the axis that extends in the horizontal direction The base of the inspection table is rotatably received on all sides; and a driving mechanism for selectively shifting the inspection table between the delivery device and the inspection position. 6. The inspection device according to item 1 of the scope of patent application, further comprising: a moving mechanism that moves the probe device toward the Z direction interlaced with the substrate to be inspected when the inspection table is moved to the inspection position. 7. The inspection device according to item 1 or 2 of the scope of patent application, wherein the inspection table further includes: a top of a chuck that bears the substrate to be inspected; a backlight device on which the top of the chuck is installed; and the backlight The device performs an aligning stage that rotates angularly around the Z axis extending in the Z direction while performing a two-dimensional movement in a plane parallel to the substrate to be inspected. 8. The inspection device according to item 3 of the patent application scope, wherein the driving mechanism includes: a lead screw disposed on the base in a state of extending in a horizontal direction; a reed nut screwed onto the lead screw ; And one or more engaging arms which are pivotably mounted on one end of the reed nut around the axis extending in a direction perpendicular to the extending direction of the lead screw, and the inspection table is It is pivotally mounted on the other ends of the two joint arms. 9. The inspection device according to item 3 of the patent application scope, wherein the inspection table is supported on the base by a pivot extending in a horizontal direction, and the driving mechanism includes: a slave installed on the pivot A driving gear; and a driving source for angular rotation of the driven gear; and the aforementioned inspection table is connected 3] 3784 amendment.]:) ^ Page 23 2003. 10.31.023 571082 Amendment No. 91113456 The scope of patent application is following the aforementioned driven gear picture 1_ 丨 3] 3784 amendment. ^ Page 24 2003.] 0.31. 024