KR100898208B1 - Glass substrate inspection equipment and inspection method - Google Patents

Glass substrate inspection equipment and inspection method Download PDF

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Publication number
KR100898208B1
KR100898208B1 KR20077012375A KR20077012375A KR100898208B1 KR 100898208 B1 KR100898208 B1 KR 100898208B1 KR 20077012375 A KR20077012375 A KR 20077012375A KR 20077012375 A KR20077012375 A KR 20077012375A KR 100898208 B1 KR100898208 B1 KR 100898208B1
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KR
South Korea
Prior art keywords
glass substrate
hole
camera
image
direction
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Application number
KR20077012375A
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Korean (ko)
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KR20070085606A (en
Inventor
신이치 오카무라
Original Assignee
샌트랄 글래스 컴퍼니 리미티드
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Priority to JP2005040096A priority Critical patent/JP4747602B2/en
Priority to JPJP-P-2005-00040096 priority
Application filed by 샌트랄 글래스 컴퍼니 리미티드 filed Critical 샌트랄 글래스 컴퍼니 리미티드
Publication of KR20070085606A publication Critical patent/KR20070085606A/en
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Publication of KR100898208B1 publication Critical patent/KR100898208B1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens

Abstract

A glass substrate inspection apparatus for use in flat panel displays, wherein the glass substrate has cutouts and hole holes in corners, and stops the glass substrates in a predetermined position in the middle of a conveying apparatus for conveying the glass substrates. A stopper, a linear illuminator disposed at right angles to the conveying direction of the glass substrate from one side of the stopped glass substrate, and a perpendicular to the conveying direction of the glass substrate which is provided on the opposite side to the illuminator by sandwiching the glass substrate An image acquisition device comprising a camera having an optical axis directed perpendicular to the glass substrate that is movable in parallel to the glass substrate in a direction; and processing the cutout and through hole images of the corners of the glass substrate obtained by the image acquisition device. Provided is a glass substrate inspection apparatus, which is composed of an image processing apparatus.
Glass substrate inspection device, image acquisition device, image processing device, flat panel display

Description

Glass substrate inspection equipment and inspection method

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate inspection apparatus used for a flat panel display, and more particularly, to an inspection apparatus for performing a dimension inspection of hole processing and notch processing of a glass substrate using a camera and an image processing apparatus. And an inspection method.

Glass substrates used for flat panel displays, such as liquid crystal displays and plasma displays, cut glass plates into rectangles, and further cut the corners of the glass plate, called an orientation flat, to penetrate near the sides. Hole drilling is performed.

In such glass substrates, if the size, shape, and location and size of the cutouts are not as desired, a problem arises during assembly of the indicator, and defects called chips or cracks at the edges of the cutouts. If present, a problem that the glass substrate is broken occurs.

For this reason, it is necessary to inspect the size and shape of the cutout, the position and size of the cutout hole, and the presence or absence of defects near the edge of the throughhole, with respect to the cutout and the through hole processing portion applied to the glass substrate.

Patent Literature 1 discloses a technique for optically inspecting shape and dimensions. This optical system aims to recognize a shape, and it is difficult to detect a defect.

A device for inspecting a glass substrate, which illuminates the glass plate with an illuminator arranged in an oblique direction with respect to the advancing direction of the glass plate, and detects the light of the illuminated portion of the glass plate with a line camera having a field of view parallel to the illuminator. The apparatus which detects the fault of a glass plate cut surface is disclosed by patent document 2. As shown in FIG.

In addition, the glass plate is fixed to a stage that can be moved and rotated, and the glass substrate is fiber-illuminated from various angles, and the image is captured by a CCD camera from a direction perpendicular to the glass substrate and oblique directions. Patent Document 3 discloses an apparatus for detecting a defect of a glass substrate.

In the apparatus disclosed in Patent Documents 2 and 3, even if various defects present in the substrate can be detected, it is difficult to inspect the form of the notch called an orientation flat.

Moreover, the object of a light transmissive sheet is made, The patent document 4 discloses the image of the light transmissive sheet | seat in a line camera, and the hole detection method of a light transmissive sheet as a defect in a light transmissive sheet is disclosed.

In this method, even if the position and size of a hole as a defect can be captured, it is difficult to check the dimensional accuracy of the position and size of the processed through hole and the edge defect of the through hole.

Patent Document 1: Japanese Patent Application Laid-Open No. 6-137815

Patent Document 2: Japanese Patent Application Laid-Open No. 1-169343

Patent Document 3: Japanese Patent Publication No. 2003-98122

Patent Document 4: Japanese Patent Application Laid-Open No. 11-304724

Summary of the Invention

In the conventional inspection apparatus, the illumination method and the image processing are different in the inspection for the purpose of inspection of shape and dimensions and detection of defects. Since each device must be inspected for defects occurring at the edges, it is difficult to inspect notches and through-hole shapes and defects occurring at the edges of the through-holes with one device.

The present invention provides a test apparatus capable of inspecting the shape of the cutout and the hole determined in the design specification, and the defects occurring at the edges of the through holes naturally occurring in the processing of the through holes with one inspection apparatus. It is a task.

The glass substrate inspecting apparatus of the present invention is a glass substrate inspecting apparatus used for a flat panel display, wherein the glass substrate is cut out of corners and punched through holes, and the glass is conveyed in the middle of a conveying apparatus for conveying the glass substrate. A stop device for stopping the substrate at a predetermined position, a linear illuminator disposed at right angles to the conveying direction of the glass substrate from one surface of the stopped glass substrate, and the glass substrate fitted to the opposite side to the illuminator An image acquisition device comprising a camera having an optical axis orthogonal to the glass substrate that is movable parallel to the glass substrate in a direction perpendicular to the conveyance direction of the glass substrate, and a section of the glass substrate corner obtained by the image acquisition device. The result is a glass comprising an image processing apparatus for processing an image of a through hole. A board inspection apparatus.

Brief description of the drawings

1 is a plan view schematically showing a glass substrate.

2 is a schematic view showing an inspection apparatus of the present invention.

3 is a diagram schematically showing a binarized image of a cutout.

4 is a diagram schematically showing a binarized image of a through hole.

5 is a graph showing the size of the digitized arm portion of the through hole edge portion.

details

The glass substrate inspection apparatus and inspection method of the present invention provide an apparatus that can easily inspect a glass substrate for a flat panel display in which cut processing and through hole drilling are performed.

Glass substrates used in flat panel displays are mostly rectangular, and as shown in Fig. 1, cutouts are made for the corners of a rectangle called an orientation flat to determine the front and back sides of the glass substrate (4, 5, 6). , 7) is performed. Further, drilling is performed to provide through holes 2 and 3 for filling gas. These cutouts and through-holes are machined to predetermined sizes at predetermined positions based on the design specifications of the glass substrate.

The glass substrate inspection apparatus of the present invention is for inspecting the cutout of the glass substrate, the shape of the through hole, and the edge defects of the through hole. The glass substrate inspection device includes: a stop device for stopping the substrate during transportation; a scattered light source for illuminating the glass substrate; An image acquisition device comprising a camera for imaging the glass substrate illuminated with scattered light, a moving device for moving the camera to a predetermined position for imaging a cut-out or through hole, and an image processing device for analyzing an image of the captured camera do.

2 shows an example of the inspection apparatus of the present invention. The glass substrate 1 is moved by the conveyance roll 8 in the direction shown by the arrow of a figure, and inspection is performed by stopping the glass substrate 1 with the stopper which is not shown in figure.

The stop device stops the glass substrate 1 when the cutout or the through hole reaches the position of the camera 9 in the conveying direction. The stop device may stop the glass substrate by automatically stopping the conveying roll 8 based on a signal for detecting the edge of the glass substrate 1 using an optical glass edge detection device. When glass contacts a stationary object using a phosphorus stop object, the conveyance roll 8 may be stopped and the glass substrate may be stopped. After the inspection is finished, the physical still object is made accessible so that the conveyance to the conveying roll can be made possible again.

As shown in FIG. 2, the scattered light light source 10 that illuminates the stationary glass substrate 1 with the scattered light 13, and the scattered light 13 are provided on the side that transmits the glass substrate 1, and the scattered light 13 is provided. The image of the glass substrate 1 is acquired using the image acquisition apparatus used as the camera 9 for imaging the glass substrate 1 illuminated by the light.

It is preferable to use an area camera for the camera 9 for imaging the notch and through-hole of the glass substrate 1 stopped by the stop device. In addition, when imaging the through hole, it is preferable to use a telecentric lens so that the side surface of the through hole is not taken out.

The glass substrate 1 stopped in the stationary state is illuminated with a linear illuminator 15 from the bottom, and the cut-out of the through hole and the corner of the glass substrate 1 is picked up by the camera 9 from above the glass substrate 1. do.

The illuminator is composed of the scattered light source 10 and the box cover 11, and it is preferable to use a linear fluorescent lamp as the scattered light source 10, but other light sources may be used as long as they can illuminate the scattered light. In addition, in order to uniformize the illumination of the scattered light 13, it is preferable to provide a diffuser plate 14 between the scattered light source 10 and the glass substrate 1.

The camera 9 is provided so that the optical axis of the camera 9 is perpendicular to the glass substrate 1. Further, the camera 9 is movable in parallel with the glass substrate in a direction perpendicular to the conveying direction of the conveying roll 8 of the glass substrate by a moving device (not shown). Instead of the fluorescent lamp 11, you may use the spot illuminator which can move | move in cooperation with the camera 9. As shown in FIG.

The image picked up by the camera 9 shown in FIG. 2 is binarized by light and dark by the image processing apparatus 12, and is cut out and a through-hole shape using the binarized image. Inspection and inspection of defects occurring in the through hole edge are performed.

As shown in FIG. 3, the notched image 20 is the edge 22 cut out and becomes the oblique edge 22. As shown in FIG. Many glass substrates are processed with the chamfer 21, and the part of the chamfer 21 is displayed as a dark in the image 20 of a notch.

From the image of a notch, shape inspection of a notch can be performed as follows, for example.

The coordinates of the intersection points P1 and P2 between the edge line 22 of the notch and the edge line 23 and the edge line 24 other than the notch, and the intersection point on the extension line between the edge line 23 and the edge line 24 ( By obtaining the coordinates of P3), the triangles P1, P2, and P3 are measured, the size and shape of the cutout can be obtained, and it is possible to judge whether the difference is less than acceptable by comparison with the value of the design specification or not. Become.

In the glass substrate inspection apparatus of the present invention, the width of the chamfer 21 can also be measured, and the chamfer shape inspection can be performed.

4 stops the glass substrate 1 in the image of the through hole 30 with the stop device in the conveying direction of the glass substrate so that the through hole 30 is directly below the camera 9, and the camera 9 Is obtained by imaging the through-hole 30.

In order to perform the inspection of the through holes satisfactorily, it is preferable to coincide the optical axis of the camera 9 with the center P4 of the through holes 30.

For this reason, the glass substrate 1 is supported by the adsorption support apparatus which becomes an adsorption board or an adsorption pad, etc., and supports the said adsorption support apparatus by a servo motor, a pulse motor, etc. It is desirable to provide a moving device that can move with high precision as a moving device that becomes a controller of the motor.

The glass substrate inspection apparatus of the present invention allows the movement of the camera 9 to move in parallel to the glass substrate 1 in a direction perpendicular to the conveying direction. In addition, a moving device is provided which allows the camera 9 to move in the same direction as the conveying direction of the glass substrate 1 in parallel with the glass substrate 1 or in a direction perpendicular to the glass substrate 1. It is preferable.

The center of the through hole 30 and the optical axis of the camera 9 determine the position of the through hole 30 in the image of the camera 9 by image processing, and based on the position of the through hole 30, the camera ( 9) and / or by the moving device of the glass substrate 1.

The vicinity of the edge of the through hole 30 appears in the image as the dark portion 31. The defect 32 also appears on the image as an arm at the edge of the through hole 30. The camera is mounted perpendicular to the glass substrate so that defects can be detected on any surface of the glass substrate.

Inspection of the shape of the through hole 30 and inspection of a defect can be performed, for example, as follows.

The coordinates of the center P4 of the through hole 30 and the radius r1 of the through hole 30 are measured from the image data, and the position and size of the through hole 30 are good, based on the difference from the value of the design specification. Check for bad

In addition, defects called chips, cracks, or the like may occur at the edges of the through holes 30 due to the processing of the through holes 30. Such a defect appears in the image as the dark portion 32 larger than the edge arm portion 31 of the good article in the image.

The edge defect of the through hole 30 can be detected as follows.

In the image of the through hole 30, the reference line is simulated in a suitable direction parallel to the surface of the glass substrate from the center P4 of the through hole, and the reference line is rotated on the glass substrate surface in the clockwise direction. About the rotation angle (theta), the width | variety ( theta ) of the arm part near an edge is measured from an image, and the graph like FIG. 5 is created, for example.

The width t 2 of the defect arm portion is larger than the width t 1 of the edge arm portion of the good product, and it is possible to determine whether the edge machining is good or bad using the graph shown in FIG. 5.

In addition, when acquiring the image of the through hole 30, a light shielding plate (not shown) is provided between the diffusion plate 14 and the glass substrate 1, so that the width of the illumination illuminated by the scattered light 13 on a straight line, It is preferable to set it as 1.5 to 3 times the field of view of the camera 9, More preferably, it is about 2 times.

When the illumination width of the scattered light 13 is larger than three times the field of view of the camera 9, the brightness of the defect image becomes brighter, making it difficult to discriminate by binarization, and when smaller than 1.5 times, the entire view of the camera 9 is illuminated. This may not be reflected or illumination irregularity may occur easily, and inspection precision may fall.

Claims (7)

  1. A glass substrate inspection apparatus for use in flat panel displays, wherein the glass substrate has cutouts and hole holes in corners, and stops the glass substrates in a predetermined position in the middle of a conveying apparatus for conveying the glass substrates. With respect to the conveying direction of the glass substrate, a stationary device, a linear illuminator disposed at right angles to the conveying direction of the glass substrate from one surface of the stopped glass substrate, and a glass substrate fitted to the opposite side to the illuminator. Processes an image acquisition device comprising a camera whose optical axis is perpendicular to the glass substrate, which is movable in parallel to the glass substrate in a perpendicular direction, and the cutting of the corners of the glass substrate obtained by the image acquisition device and the image of the through hole. In the glass substrate inspection apparatus composed of an image processing apparatus,
    Inspecting the size and shape of the cutout using a binarized image of the cutout of the glass substrate corner,
    By using the binarized image of the through hole in the corner of the glass substrate, the position, size and edge defect of the through hole are inspected.
    At the stop position of the glass substrate, a support device for adsorption-supporting the glass substrate and a moving device for moving the support device in a direction perpendicular to the conveyance direction and the conveyance direction or at right angles to the conveyance direction and the conveyance direction are provided.
    A moving device is installed for moving the camera in the conveying direction, vertical direction of the glass substrate, or in the conveying direction and vertical direction of the glass substrate.
    The moving device of the glass substrate, the moving device of the camera, or the moving device of the glass substrate and the moving device of the camera acquire an image of the through hole by matching the optical axis of the camera with the center of the through hole. An inspection method of a glass substrate, characterized in that the through hole is inspected.
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  7. The method of claim 1,
    The inspection of the edge defect of the through-hole is made into the "arm" by the binarization process of the circular edge of a through-hole and the edge part around an edge, and the arm part of an edge is measured by the length perpendicular | vertical to the circular edge of the said through-hole. And the through-holes are inspected using the length of the arm portion to be measured.
KR20077012375A 2005-02-17 2006-02-17 Glass substrate inspection equipment and inspection method KR100898208B1 (en)

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Application Number Priority Date Filing Date Title
JP2005040096A JP4747602B2 (en) 2005-02-17 2005-02-17 Glass substrate inspection apparatus and inspection method
JPJP-P-2005-00040096 2005-02-17

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KR100898208B1 true KR100898208B1 (en) 2009-05-18

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101530009B1 (en) * 2008-12-19 2015-06-22 한미반도체 주식회사 Wafer Vision Inspection Apparatus
CN102081047B (en) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 Method and system for distinguishing defects of substrate
CN103175839A (en) * 2011-12-21 2013-06-26 北京兆维电子(集团)有限责任公司 Processing method and system for detection of offset plate surface
KR20150139103A (en) 2014-06-02 2015-12-11 삼성디스플레이 주식회사 Inspecting apparatus
JP2018112411A (en) * 2017-01-06 2018-07-19 日本電気硝子株式会社 Inspection method and production method of glass plate, and inspection equipment of glass plate
WO2019160711A1 (en) * 2018-02-13 2019-08-22 Corning Incorporated Apparatus and methods for processing a substrate
KR20190097929A (en) * 2018-02-13 2019-08-21 코닝 인코포레이티드 Apparatus and method for inspecting a glass sheet

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09101125A (en) * 1995-10-07 1997-04-15 Kawasaki Heavy Ind Ltd Article shape measuring method and device
JP2002181714A (en) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd Thin plate inspection device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000333047A (en) * 1999-05-25 2000-11-30 Rohm Co Ltd Optical image pickup device and optical image pickup method
JP4307872B2 (en) * 2003-03-18 2009-08-05 オリンパス株式会社 Board inspection equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09101125A (en) * 1995-10-07 1997-04-15 Kawasaki Heavy Ind Ltd Article shape measuring method and device
JP2002181714A (en) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd Thin plate inspection device

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JP4747602B2 (en) 2011-08-17
WO2006088150A1 (en) 2006-08-24
KR20070085606A (en) 2007-08-27
JP2006226801A (en) 2006-08-31

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