JP4747602B2 - Glass substrate inspection apparatus and inspection method - Google Patents
Glass substrate inspection apparatus and inspection method Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Description
本発明は、フラットパネルディスプレーに用いられるガラス基板検査装置に関し、特にガラス基板の孔加工および切り欠き加工の寸法検査をカメラと画像処理装置用いて行う検査装置および検査方法に関する。 The present invention relates to a glass substrate inspection apparatus used for a flat panel display, and more particularly, to an inspection apparatus and an inspection method for performing a dimensional inspection for hole processing and notch processing of a glass substrate using a camera and an image processing apparatus.
液晶表示器やプラズマディスプレイなどのフラットパネルディスプレイに用いられるガラス基板は、ガラス板を矩形に切断し、さらに、オリフラと呼ばれるガラス板のコーナー部が切り欠かれた形状にされ、辺に近い位置に貫通孔の孔加工が施されている。 Glass substrates used for flat panel displays such as liquid crystal displays and plasma displays are made by cutting the glass plate into rectangles and then cutting the corners of the glass plate called orientation flats into positions close to the sides. The through hole is drilled.
このようなガラス基板において、切り欠きの大きさ、形、さらに貫通孔の位置・大きさが所望の通りになされていないと、表示器の組み立て時に不具合を生じ、また、貫通孔のエッジにハマやカケといわれる欠陥があると、ガラス基板が破損するという不具合を生じる。 In such a glass substrate, if the size and shape of the notch and the position and size of the through hole are not as desired, problems may occur when assembling the display device, and the edge of the through hole will be hammered. If there is a defect called “debris”, the glass substrate is damaged.
このため、ガラス基板に施されている切り欠きと貫通孔の加工部に対して、切り欠きの大きさ、形、さらに貫通孔の位置・大きさ、貫通孔エッジ付近の欠陥の有無を検査する必要がある。 For this reason, the size and shape of the notch, the position and size of the through hole, and the presence or absence of defects near the edge of the through hole are inspected for the notch and through hole processed portion provided on the glass substrate. There is a need.
形状・寸法の検査を光学的に行う技術が特許文献１に開示されている。この光学系は、形状を認識することを目的としており、欠陥を検出することが困難である。 A technique for optically inspecting the shape and dimensions is disclosed in Patent Document 1. The purpose of this optical system is to recognize the shape, and it is difficult to detect defects.
ガラス基板の検査装置として、ガラス板の進行方向に対して斜め方向に配設した照明器でガラス板を照明し、照明器に平行な視野を有するラインカメラでガラス板の照明された部分の光を検出して、ガラス板の切り口の欠点を検出する装置が特許文献２に開示されている。 As a glass substrate inspection device, the glass plate is illuminated with an illuminator arranged obliquely with respect to the traveling direction of the glass plate, and the light of the illuminated portion of the glass plate with a line camera having a field of view parallel to the illuminator Japanese Patent Application Laid-Open No. H10-228707 discloses a device that detects a defect of a cut edge of a glass plate by detecting the above.
また、ガラス板を移動と回転が可能なステージに固定し、様々な角度でガラス基板をファイバー照明し、ガラス基板に垂直な方向と斜めの方向からＣＣＤカメラで撮像し、撮像された結果を２値化処理して、ガラス基板の欠陥を検出する装置が特許文献３に開示されている。 In addition, the glass plate is fixed to a stage that can move and rotate, the glass substrate is illuminated with fibers at various angles, and images are taken with a CCD camera from a direction perpendicular to the glass substrate and an oblique direction. An apparatus that detects a defect of a glass substrate by performing a valuation process is disclosed in Patent Document 3.
特許文献２や３に開示されている装置では、基板に存在する各種の欠陥を検出することができても、オリフラと呼ばれる切り欠きの形を検査するのは困難である。 In the apparatuses disclosed in Patent Documents 2 and 3, it is difficult to inspect the shape of a notch called an orientation flat even if various defects existing on the substrate can be detected.
さらに、光透過性シートを対象として、特許文献４に、移動中の光透過性シートをラインカメラで撮像し、光透過性シート中の欠陥として、光透過性シートの穴の検出方法が開示されている。 Furthermore, for a light-transmitting sheet, Patent Document 4 discloses a method of detecting a hole in a light-transmitting sheet as a defect in the light-transmitting sheet by imaging a moving light-transmitting sheet with a line camera. ing.
この方法では、欠陥としての穴の位置や大きさをとらえることができても、加工されている貫通孔の位置や大きさの寸法精度や貫通孔のエッジの欠陥を検査することは困難である。
従来の検査装置では、形状・寸法の検査と欠陥の検出を目的とする検査では、照明方法と画像処理が異なっており、フラットパネルディスプレイに用いるガラス基板の切り欠きや貫通孔の形状の検査と貫通孔のエッジに生じる欠陥の検査を別々の装置で行わねばならず、一つの装置で、切り欠きや貫通孔の形状の検査と貫通孔のエッジに生じる欠陥の検査を行うことが困難であった。 In conventional inspection equipment, the illumination method and image processing are different in the inspection for the purpose of shape / dimension inspection and defect detection, and the inspection of the shape of notches and through holes in glass substrates used in flat panel displays. Inspection of defects that occur at the edge of the through hole must be performed by separate devices, and it is difficult to inspect the shape of notches and through holes and the defect that occurs at the edge of the through hole with one device. It was.
本発明は、設計仕様書で決められている切り欠きと孔の形状と、貫通孔の加工で自然発生的に生じる貫通孔のエッジに生じるの欠陥とを、一つの検査装置で実行できる検査装置の提供を課題とする。 The present invention provides an inspection apparatus capable of executing notches and hole shapes determined in the design specifications and defects generated at the edge of the through hole that are naturally generated by processing of the through hole with a single inspection apparatus. The issue is to provide
本発明のガラス基板検査装置は、フラットパネルディスプレイに用いられるガラス基板検査装置であって、該ガラス基板はコーナー部の切り欠き加工と貫通孔の孔加工とがされており、該ガラス基板を搬送する搬送装置の途中に該ガラス基板を所定の位置に停止させる停止装置と、停止させられた該ガラス基板の一方の面から該ガラス基板の搬送方向に直角に配設される直線上の照明器と、該ガラス基板を挟んで該照明器と反対側に設けられる、該ガラス基板の搬送方向に対して直角方向に、ガラス基板に平行に移動可能な、光軸をガラス基板に垂直に向けられているカメラとからなる画像取り込み装置と、該画像取り込み装置によって取り込まれる該ガラス基板のコーナーの切り欠きと貫通孔との画像を処理する画像処理装置とで構成されることを特徴とするガラス基板検査装置である。 The glass substrate inspection device of the present invention is a glass substrate inspection device used for a flat panel display, and the glass substrate is notched in a corner portion and a hole is formed in a through hole, and the glass substrate is conveyed. A stopping device for stopping the glass substrate at a predetermined position in the middle of the conveying device, and a linear illuminator arranged perpendicular to the conveying direction of the glass substrate from one surface of the stopped glass substrate And provided on the opposite side of the illuminator across the glass substrate, and movable in parallel to the glass substrate in a direction perpendicular to the transport direction of the glass substrate, with the optical axis oriented perpendicular to the glass substrate. And an image processing device that processes the images of the corner notches and the through holes of the glass substrate captured by the image capturing device. It is a glass substrate inspecting apparatus according to claim.
また、本発明のガラス基板検査装置は、前記ガラス基板検査装置において、切り欠きの２値化処理された画像を用いて、切り欠きの大きさと形とを検査することを特徴とするガラス基板検査装置である。 Further, the glass substrate inspection apparatus of the present invention is characterized in that in the glass substrate inspection apparatus, the size and shape of the notch are inspected using the binarized image of the notch. Device.
また、本発明のガラス基板検査装置は、前記ガラス基板検査装置において、貫通孔の２値化された画像を用いて、貫通孔の位置、大きさ、貫通孔のエッジの欠陥を検査することを特徴とするガラス基板検査装置である。 Further, the glass substrate inspection apparatus of the present invention uses the binarized image of the through hole in the glass substrate inspection apparatus to inspect defects in the position and size of the through hole and the edge of the through hole. The glass substrate inspection apparatus is characterized.
また、本発明のガラス基板検査装置は、前記ガラス基板検査装置において、ガラス基板の停止位置に、ガラス基板を吸着支持する支持装置と該支持装置を搬送方向および／または搬送方向に対して直角方向に移動させる移動装置が設けられていることを特徴とするガラス基板検査装置である。 Further, the glass substrate inspection apparatus of the present invention is the glass substrate inspection device, wherein the glass substrate is stopped at the stop position by supporting the glass substrate and the support device in the transport direction and / or in the direction perpendicular to the transport direction. A glass substrate inspecting apparatus characterized in that a moving apparatus for moving the glass substrate is provided.
また、本発明のガラス基板検査装置は、前記ガラス基板検査装置において、カメラが搬送方向および／またはガラス基板の垂直方向に移動するための移動装置が設けられていることを特徴とするガラス基板検査装置である。 In the glass substrate inspection apparatus of the present invention, the glass substrate inspection device is provided with a moving device for moving the camera in the transport direction and / or the vertical direction of the glass substrate. Device.
また、本発明のガラス基板の検査方法は、前記ガラス基板検査装置を用いて、ガラス基板の移動装置および／またはカメラの移動装置により、カメラの光軸と貫通孔の中心とを一致させて、該貫通孔の画像を取り込み、該画像を用いて貫通孔の検査を行うことを特徴とするガラス基板の検査方法である。 Further, the glass substrate inspection method of the present invention uses the glass substrate inspection device, the glass substrate moving device and / or the camera moving device, the optical axis of the camera and the center of the through hole are matched, An inspection method for a glass substrate, wherein an image of the through hole is captured and the through hole is inspected using the image.
また、本発明のガラス基板の検査方法は、貫通孔のエッジの欠陥の検査が、貫通孔の円形のエッジおよびエッジ周囲の暗部を２値化処理によって「暗」とし、該貫通孔の円形のエッジに垂直な長さでエッジの暗部を計測し、該計測される暗部の長さを用いて貫通孔の検査を行うことを特徴とする前記ガラス基板検査装置を用いるガラス基板の検査方法である。 Further, according to the glass substrate inspection method of the present invention, the inspection of the defect of the edge of the through hole is performed by binarizing the circular edge of the through hole and the dark portion around the edge to make it dark. A method for inspecting a glass substrate using the glass substrate inspection apparatus, wherein a dark portion of an edge is measured with a length perpendicular to the edge, and a through-hole is inspected using the measured length of the dark portion. .
本発明のガラス基板検査装置および検査方法は、切り欠き加工と貫通孔の孔加工とが施されている、フラットパネルディスプレイ用のガラス基板を、簡便に検査できる装置を提供する。 The glass substrate inspection apparatus and inspection method of the present invention provide an apparatus that can easily inspect a glass substrate for a flat panel display that has been subjected to notch processing and through-hole processing.
フラットパネルディスプレイに用いられるガラス基板は、ほとんどが矩形であり、図１に示すように、ガラス基板の表裏、向きを判別できるようにするための、オリフラと呼ばれる、矩形の角に対して切り欠き４、５、６、７の加工が行われている。また、ガスを充填するための貫通孔２、３を設ける穴空け加工が行われている。これらの切り欠きや貫通孔は、ガラス基板の設計仕様書に基づいて所定の位置に所定の大きさで加工される。 Most glass substrates used in flat panel displays are rectangular, and as shown in FIG. 1, notches are formed with respect to rectangular corners called orientation flats so that the front, back, and orientation of the glass substrate can be discriminated. Processing of 4, 5, 6, and 7 is performed. Moreover, the drilling which provides the through-holes 2 and 3 for filling with gas is performed. These notches and through-holes are processed at predetermined positions and in predetermined sizes based on the design specifications of the glass substrate.
本発明のガラス基板検査装置は、前記ガラス基板の切り欠きと貫通孔の形状と貫通孔のエッジの欠陥を検査するものであり、搬送中の基板を停止させる停止装置と、該ガラス基板を照明する散乱光光源と散乱光で照明された該ガラス基板を撮像するカメラとでなる画像取り込み装置と、該カメラを切り欠きあるいは貫通孔を撮像するために所定の位置に移動するための移動装置と、撮像したカメラの画像を解析する画像処理装置とからなる。 The glass substrate inspection apparatus of the present invention inspects the notch and the shape of the through hole of the glass substrate and the defect of the edge of the through hole, and stops the substrate being transferred, and illuminates the glass substrate. An image capturing device comprising a scattered light source that emits light and a camera that images the glass substrate illuminated by the scattered light, and a moving device that moves the camera to a predetermined position to capture a notch or a through-hole. And an image processing device for analyzing the captured image of the camera.
図２は、本発明の検査装置の一例を示すものである。ガラス基板１は、搬送ロール８により図の矢印で示す方向に移動され、検査は、ガラス基板１を図示しない停止装置で停止させて行う。 FIG. 2 shows an example of the inspection apparatus of the present invention. The glass substrate 1 is moved in the direction indicated by the arrow in the figure by the transport roll 8, and the inspection is performed by stopping the glass substrate 1 with a stop device (not shown).
停止装置は、切り欠きや貫通孔が搬送方向のカメラ９の位置に来たときに、ガラス基板１を停止させる。該停止装置は、光学的なガラス基板のエッジ検出装置を用いて、ガラス基板１のエッジを検出する信号に基づき、自動的に搬送ロール８を止めてガラス基板を停止するようにしてもよく、また、物理的な停止物体を用いて、停止物体にガラスが接触したときに搬送ロール８を止めてガラス基板が停止するようにしてもよい。物理的な停止物体は、検査が終了した後は再度搬送ロールでの搬送を可能にするために、出し入れが可能にしておく。 The stop device stops the glass substrate 1 when the notch or the through hole comes to the position of the camera 9 in the transport direction. The stop device may be configured to automatically stop the transport roll 8 and stop the glass substrate based on a signal for detecting the edge of the glass substrate 1 using an optical glass substrate edge detection device, Alternatively, a physical stop object may be used to stop the transport roll 8 and stop the glass substrate when the glass comes into contact with the stop object. The physical stop object is allowed to be taken in and out in order to be able to be transported again by the transport roll after the inspection is completed.
図２に示すように、停止したガラス基板１を散乱光１３で照明する散乱光光源１１と、散乱光１３がガラス基板１を透過する側に設置され、散乱光１３で照明されるガラス基板１を撮像するためのカメラ９とでなる画像取り込み装置を用いて、ガラス基板１の画像を取り込む。
As shown in FIG. 2, the scattered light source 11 that illuminates the stopped glass substrate 1 with the scattered light 13, and the glass substrate 1 that is installed on the side where the scattered light 13 passes through the glass substrate 1 and is illuminated with the scattered light 13. The image of the glass substrate 1 is captured using an image capturing device including the camera 9 for capturing the image.
停止装置によって停止しているガラス基板１の、切り欠きや貫通孔を撮像するためのカメラ９には、エリアカメラを用いることが好ましい。さらに、貫通孔を撮像するときに、貫通孔の側面が写らないようにするために、テレセントリックレンズを用いることが好ましい。 It is preferable to use an area camera as the camera 9 for imaging the notch and the through hole of the glass substrate 1 stopped by the stopping device. Furthermore, it is preferable to use a telecentric lens so that the side surface of the through hole is not captured when imaging the through hole.
停止装置で停止されたガラス基板１を下から直線上の照明器１５で照明し、ガラス基板１の上方からガラス基板１の貫通孔と角の切り欠きをカメラ９で撮像する。 The glass substrate 1 stopped by the stopping device is illuminated from below by a linear illuminator 15, and a through hole and a corner cutout of the glass substrate 1 are imaged by the camera 9 from above the glass substrate 1.
照明器は、散乱光光源１１とボックスカバー１０とで構成され、散乱光光源１１として、直線上の蛍光灯を用いることが望ましいが、散乱光で照明できれば他の光源を用いてもよい。さらに、散乱光１３の照明を均一化するために、散乱光光源１１とガラス基板１との間に拡散板１４を設けることが好ましい。
カメラ９は、ガラス基板１に対してカメラ９の光軸が垂直になるように設置されている。さらに、カメラ９は図示しない移動装置により、ガラス基板の搬送ロール８による搬送方向に対して、直角の方向に、ガラス基板に対して平行に移動可能としている。蛍光灯１１の代わりに、カメラ９と連動して移動可能なスポット照明器を用いてもよい。
The illuminator includes a scattered light source 11 and a box cover 10, and it is desirable to use a linear fluorescent lamp as the scattered light source 11 , but other light sources may be used as long as they can be illuminated with scattered light. Furthermore, in order to make the illumination of the scattered light 13 uniform, it is preferable to provide a diffusion plate 14 between the scattered light source 11 and the glass substrate 1.
The camera 9 is installed so that the optical axis of the camera 9 is perpendicular to the glass substrate 1. Furthermore, the camera 9 can be moved in parallel to the glass substrate in a direction perpendicular to the conveyance direction of the glass substrate by the conveyance roll 8 by a moving device (not shown). Instead of the fluorescent lamp 11, a spot illuminator that can move in conjunction with the camera 9 may be used.
図２に示すカメラ９で撮像された画像は、画像処理装置１２によって、明と暗の２値化処理され、２値化処理した画像を用いて、切り欠きや貫通孔の形状の検査や貫通孔エッジに生じる欠陥の検査が行われる。 The image picked up by the camera 9 shown in FIG. 2 is binarized by the image processing device 12, and the binarized image is used to inspect and penetrate the shape of notches and through holes. Inspection of defects occurring at the hole edge is performed.
切り欠きの画像２０は、図３に示すように、角が切り取られて斜めのエッジ２２となっている。多くのガラス基板は面取り２１の加工がされていて、面取り２１の部分は、切り欠きの画像２０では暗として表示される。 As shown in FIG. 3, the cutout image 20 is cut at corners to form an oblique edge 22. Many glass substrates are processed with a chamfer 21, and the portion of the chamfer 21 is displayed as dark in the cutout image 20.
切り欠きの画像から、例えば次のようにして、切り欠きの形状検査を行うことが出きる。 From the image of the notch, it is possible to inspect the shape of the notch as follows, for example.
切り欠きのエッジライン２２と、切り欠き以外のエッジライン２３およびエッジライン２４との交点Ｐ１，Ｐ２の座標、および、エッジライン２３とエッジライン２４との延長線上の交点Ｐ３の座標を求めることで三角形Ｐ１、Ｐ２、Ｐ３が計測され、切り欠きの大きさと形が求められ、設計仕様書の値と比較して、差異が許容以下かどうかで良否を判定することが可能となる。 By obtaining the coordinates of the intersection points P1, P2 between the edge line 22 of the notch and the edge line 23 and the edge line 24 other than the notch, and the coordinates of the intersection point P3 on the extension line of the edge line 23 and the edge line 24 The triangles P1, P2, and P3 are measured, and the size and shape of the notch are obtained. Compared with the values in the design specification, it is possible to determine whether or not the difference is below tolerance.
さらに、本発明のガラス基板検査装置では、面取り２１の幅も計測でき、面取りの形状検査が可能である。 Furthermore, in the glass substrate inspection apparatus of the present invention, the width of the chamfer 21 can be measured, and the chamfered shape can be inspected.
図４は、貫通孔３０の画像で、ガラス基板１を貫通孔３０がカメラ９の真下になるように、ガラス基板の搬送方向に停止装置で停止させるとともに、カメラ９を移動させ、貫通孔３０を撮像して得られる。 FIG. 4 is an image of the through hole 30, and the glass substrate 1 is stopped by a stop device in the glass substrate transport direction so that the through hole 30 is directly below the camera 9, and the camera 9 is moved to move the through hole 30. Obtained by imaging.
貫通孔の検査を良好に行うために、貫通孔３０の中心Ｐ４とカメラ９の光軸を一致させることが望ましい。 In order to satisfactorily inspect the through hole, it is desirable to match the center P4 of the through hole 30 with the optical axis of the camera 9.
このため、ガラス基板１は、吸盤あるいは吸着パッド等でなる吸着支持装置を用いて支持し、該吸着支持装置をサーボモーターあるいはパルスモーターなどとモータの制御器とからなる移動装置で高精度に移動できるような移動装置を設けることが好ましい。 For this reason, the glass substrate 1 is supported using a suction support device such as a suction cup or a suction pad, and the suction support device is moved with high accuracy by a moving device including a servo motor or a pulse motor and a motor controller. It is preferable to provide such a moving device.
本発明のガラス基板検査装置は、カメラ９の移動が、搬送方向に対し直角方向で、ガラス基板１に平行に移動できるようにしている。さらに、カメラ９をガラス基板１に平行でガラス基板１の搬送方向と同じ方向の移動や、ガラス基板１に垂直な方向の移動を可能にする移動装置を設けておくことが好ましい。 The glass substrate inspection apparatus of the present invention is configured such that the movement of the camera 9 can be moved parallel to the glass substrate 1 in a direction perpendicular to the conveying direction. Furthermore, it is preferable to provide a moving device that enables the camera 9 to move in the same direction as the conveyance direction of the glass substrate 1 in parallel with the glass substrate 1 or move in a direction perpendicular to the glass substrate 1.
貫通孔３０の中心とカメラ９の光軸とは、カメラ９の画像において貫通孔３０の位置を画像処理によって求め、該貫通孔３０の位置に基づいてカメラ９および／あるいはガラス基板１の移動装置により、一致させることができる。 The center of the through hole 30 and the optical axis of the camera 9 are obtained by obtaining the position of the through hole 30 in the image of the camera 9 by image processing, and moving the camera 9 and / or the glass substrate 1 based on the position of the through hole 30. Can be matched.
貫通孔３０のエッジ付近は、暗部３１として画像に現れる。貫通孔３０のエッジに欠陥３２も暗として画像に現れる。カメラはガラス基板に対して垂直に設置されており、欠陥がガラス基板のどちらの面にあっても検出が可能である。 The vicinity of the edge of the through hole 30 appears as a dark part 31 in the image. The defect 32 also appears in the image as dark at the edge of the through hole 30. The camera is installed perpendicular to the glass substrate, and the defect can be detected on either side of the glass substrate.
貫通孔３０の形状の検査および欠陥の検査は、例えば次のようにして実施できる。 The inspection of the shape of the through hole 30 and the inspection of defects can be performed as follows, for example.
貫通孔３０の中心Ｐ４の座標および貫通孔３０の半径ｒ１を画像データから計測し、設計仕様書の値との差異に基づいて貫通孔３０の位置と大きさの良否を検査する。 The coordinates of the center P4 of the through hole 30 and the radius r1 of the through hole 30 are measured from the image data, and the quality and position of the through hole 30 are inspected based on the difference from the design specification value.
さらに、貫通孔３０のエッジには、貫通孔３０の加工によってハマや欠け等と呼ばれる欠陥が生じることがある。この様な欠陥は、画像では良品のエッジの暗部３１よりも大きな暗部３２として画像に現れる。 Furthermore, a defect called crack or chipping may occur at the edge of the through hole 30 due to the processing of the through hole 30. Such a defect appears in the image as a dark portion 32 that is larger than the dark portion 31 of the non-defective edge in the image.
貫通孔３０のエッジの欠陥は次のようにして検出することが出きる。 The defect of the edge of the through hole 30 can be detected as follows.
貫通孔３０の画像において、貫通孔の中心Ｐ４から、ガラス基板の面に平行に、適当な方向に基準線を仮想し、該基準線を時計方向にガラス基板面上を回転させる。回転角θに対して、エッジ付近の暗部の幅ｔθを画像から測定し、例えば図５のようなグラフを作成する。 In the image of the through hole 30, a reference line is hypothesized in an appropriate direction parallel to the surface of the glass substrate from the center P4 of the through hole, and the reference line is rotated clockwise on the glass substrate surface. For the rotation angle θ, the width t θ of the dark part near the edge is measured from the image, and a graph as shown in FIG. 5 is created, for example.
欠陥の暗部の幅ｔ２は、良品のエッジの暗部の幅ｔ１よりも大きくなり、図５に示すグラフを用いて、エッジの加工の良否を判別することが可能となる。 Width t 2 of the dark part of the defect is larger than the width t 1 of the dark part of the non-defective edge, with reference to the graph shown in FIG. 5, it is possible to determine the quality of machining of the edge.
なを、貫通孔３０の画像を取り込みにおいて、拡散板１４とガラス基板１との間に、図示しない遮光板を設けて、直線上に散乱光１３で照明される照明の幅を、カメラ９の視野の１．５〜３倍にすることが好ましく、より好ましくは２倍程度とする。 In capturing the image of the through hole 30, a light shielding plate (not shown) is provided between the diffusion plate 14 and the glass substrate 1, and the width of illumination illuminated by the scattered light 13 on the straight line is set to It is preferable that the field of view is 1.5 to 3 times, more preferably about 2 times.
散乱光１３の照明の幅をカメラ９の視野の３倍より大きくすると、欠陥の画像の明るさが明るくなって、２値化による判別が困難となり、１．５倍より小さくするとカメラ９の視野全体に照明が写らなかったり、照明ムラが生じやすく、検査精度が低下する恐れがある。 If the illumination width of the scattered light 13 is larger than 3 times the field of view of the camera 9, the brightness of the image of the defect becomes brighter and it becomes difficult to discriminate by binarization, and if it is smaller than 1.5 times, the field of view of the camera 9 There is a risk that the illumination may not be reflected as a whole or illumination unevenness is likely to occur, resulting in a decrease in inspection accuracy.
１ ガラス基板
２、３ 貫通孔
４、５，６、７ 切り欠き
８ 搬送ロール
９ カメラ
１０ ボックスカバー
１１ 蛍光灯
１２ 画像処理装置
１３ 散乱光
１４ 拡散板
１５ 照明器
２２ 切り欠き線
２３ 面取り加工
３１ 貫通孔のエッジの暗部
３２ 欠陥による暗部
1 Glass substrate 2, 3 Through hole
According to the dark portion 32 defective edge of 4,5,6,7 notch 8 transport roller 9 camera 10 box cover 11 fluorescent lamp 12 image processing apparatus 13 the scattered light 14 diffusion plate 15 illuminator 22 notch lines 23 chamfering 31 holes Dark part
Claims (4)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
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| JP2005040096A JP4747602B2 (en) | 2005-02-17 | 2005-02-17 | Glass substrate inspection apparatus and inspection method |
| KR1020077012375A KR100898208B1 (en) | 2005-02-17 | 2006-02-17 | Glass substrate inspection equipment and inspection method |
| PCT/JP2006/302865 WO2006088150A1 (en) | 2005-02-17 | 2006-02-17 | Glass substrate inspection equipment and inspection method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005040096A JP4747602B2 (en) | 2005-02-17 | 2005-02-17 | Glass substrate inspection apparatus and inspection method |
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| JP2006226801A JP2006226801A (en) | 2006-08-31 |
| JP4747602B2 true JP4747602B2 (en) | 2011-08-17 |
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| JP2005040096A Expired - Fee Related JP4747602B2 (en) | 2005-02-17 | 2005-02-17 | Glass substrate inspection apparatus and inspection method |
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| JP (1) | JP4747602B2 (en) |
| KR (1) | KR100898208B1 (en) |
| WO (1) | WO2006088150A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370667A (en) * | 2016-07-28 | 2017-02-01 | 广东技术师范学院 | Visual detection apparatus and method for quality of corn kernel |
| WO2019160769A1 (en) * | 2018-02-13 | 2019-08-22 | Corning Incorporated | Apparatus and method for inspecting a glass sheet |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101530009B1 (en) * | 2008-12-19 | 2015-06-22 | 한미반도체 주식회사 | Wafer Vision Inspection Apparatus |
| CN102081047B (en) * | 2009-11-27 | 2015-04-08 | 法国圣-戈班玻璃公司 | Method and system for distinguishing defects of substrate |
| CN103175839A (en) * | 2011-12-21 | 2013-06-26 | 北京兆维电子(集团)有限责任公司 | Processing method and system for detection of offset plate surface |
| KR102200691B1 (en) | 2014-06-02 | 2021-01-13 | 삼성디스플레이 주식회사 | Inspecting apparatus |
| JP6788837B2 (en) * | 2017-01-06 | 2020-11-25 | 日本電気硝子株式会社 | Glass plate inspection method and its manufacturing method and glass plate inspection equipment |
| KR102358582B1 (en) * | 2017-08-23 | 2022-02-04 | 삼성전자 주식회사 | Inspection apparatus for identifying an optical characteristic of a cover glass of mobile terminal and a method for the same |
| JP6963725B2 (en) * | 2017-10-13 | 2021-11-10 | 日本電気硝子株式会社 | Glass plate inspection method and inspection equipment and glass plate manufacturing method |
| WO2019160711A1 (en) * | 2018-02-13 | 2019-08-22 | Corning Incorporated | Apparatus and methods for processing a substrate |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2921660B2 (en) * | 1995-10-07 | 1999-07-19 | 川崎重工業株式会社 | Article shape measuring method and device |
| JP2000333047A (en) * | 1999-05-25 | 2000-11-30 | Rohm Co Ltd | Optical image pickup device and optical image pickup method |
| JP2002181714A (en) * | 2000-12-19 | 2002-06-26 | Ishikawajima Harima Heavy Ind Co Ltd | Thin plate inspection device |
| JP4307872B2 (en) * | 2003-03-18 | 2009-08-05 | オリンパス株式会社 | Board inspection equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106370667A (en) * | 2016-07-28 | 2017-02-01 | 广东技术师范学院 | Visual detection apparatus and method for quality of corn kernel |
| WO2019160769A1 (en) * | 2018-02-13 | 2019-08-22 | Corning Incorporated | Apparatus and method for inspecting a glass sheet |
Also Published As
| Publication number | Publication date |
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| KR100898208B1 (en) | 2009-05-18 |
| KR20070085606A (en) | 2007-08-27 |
| JP2006226801A (en) | 2006-08-31 |
| WO2006088150A1 (en) | 2006-08-24 |
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