JP2006226801A - Inspection device for glass substrate, and inspection method of glass substrate - Google Patents

Inspection device for glass substrate, and inspection method of glass substrate Download PDF

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JP2006226801A
JP2006226801A JP2005040096A JP2005040096A JP2006226801A JP 2006226801 A JP2006226801 A JP 2006226801A JP 2005040096 A JP2005040096 A JP 2005040096A JP 2005040096 A JP2005040096 A JP 2005040096A JP 2006226801 A JP2006226801 A JP 2006226801A
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Prior art keywords
glass substrate
hole
inspection apparatus
device
edge
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JP2005040096A
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JP4747602B2 (en
Inventor
Shinichi Okamura
真一 岡村
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Central Glass Co Ltd
セントラル硝子株式会社
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens

Abstract

Kind Code: A1 An inspection apparatus capable of executing notches and hole shapes determined in a design specification and defects generated at edges of through holes that are naturally generated by processing of through holes with a single inspection apparatus. Offering is an issue.
A glass substrate is transported in the middle of a transport device, illuminated with a linear illuminator arranged perpendicular to the glass substrate transport direction, and perpendicular to the glass substrate transport direction. A camera that can move parallel to the glass substrate and whose optical axis is oriented perpendicularly to the glass substrate. Captures images of notches and through-holes in the glass substrate, and binarizes the captured images with an image processing device. Using a glass substrate inspection apparatus for processing, the size and shape of the notch, the position and size of the through hole, and the edge defect of the through hole are inspected.
[Selection] Figure 2

Description

  The present invention relates to a glass substrate inspection apparatus used for a flat panel display, and more particularly, to an inspection apparatus and an inspection method for performing a dimensional inspection for hole processing and notch processing of a glass substrate using a camera and an image processing apparatus.

  Glass substrates used for flat panel displays such as liquid crystal displays and plasma displays are made by cutting the glass plate into rectangles and then cutting the corners of the glass plate called orientation flats into positions close to the sides. The through hole is drilled.

  In such a glass substrate, if the size and shape of the notch and the position and size of the through hole are not as desired, problems may occur when assembling the display device, and the edge of the through hole will be hammered. If there is a defect called “debris”, the glass substrate is damaged.

  For this reason, the size and shape of the notch, the position and size of the through hole, and the presence or absence of defects near the edge of the through hole are inspected for the notch and through hole processed portion provided on the glass substrate. There is a need.

  A technique for optically inspecting the shape and dimensions is disclosed in Patent Document 1. The purpose of this optical system is to recognize the shape, and it is difficult to detect defects.

  As a glass substrate inspection device, the glass plate is illuminated with an illuminator arranged obliquely with respect to the traveling direction of the glass plate, and the light of the illuminated portion of the glass plate with a line camera having a field of view parallel to the illuminator Japanese Patent Application Laid-Open No. H10-228707 discloses a device that detects a defect of a cut edge of a glass plate by detecting the above.

  In addition, the glass plate is fixed to a stage that can move and rotate, the glass substrate is illuminated with fibers at various angles, and images are taken with a CCD camera from a direction perpendicular to the glass substrate and an oblique direction. An apparatus that detects a defect of a glass substrate by performing a valuation process is disclosed in Patent Document 3.

  In the apparatuses disclosed in Patent Documents 2 and 3, it is difficult to inspect the shape of a notch called an orientation flat even if various defects existing on the substrate can be detected.

  Furthermore, for a light-transmitting sheet, Patent Document 4 discloses a method of detecting a hole in a light-transmitting sheet as a defect in the light-transmitting sheet by imaging a moving light-transmitting sheet with a line camera. ing.

In this method, even if the position and size of the hole as a defect can be grasped, it is difficult to inspect the position accuracy and size accuracy of the processed through hole and the defect of the edge of the through hole. .
JP-A-6-137815 JP-A-1-169343 JP 2003-98122 A JP-A-11-304724

  In conventional inspection equipment, the illumination method and image processing are different in the inspection for the purpose of shape / dimension inspection and defect detection, and the inspection of the shape of notches and through holes in glass substrates used in flat panel displays. Inspection of defects that occur at the edge of the through hole must be performed by separate devices, and it is difficult to inspect the shape of notches and through holes and the defect that occurs at the edge of the through hole with one device. It was.

  The present invention provides an inspection apparatus capable of executing notches and hole shapes determined in the design specifications and defects generated at the edge of the through hole that are naturally generated by processing of the through hole with a single inspection apparatus. The issue is to provide

  The glass substrate inspection device of the present invention is a glass substrate inspection device used for a flat panel display, and the glass substrate is notched in a corner portion and a hole is formed in a through hole, and the glass substrate is conveyed. A stopping device for stopping the glass substrate at a predetermined position in the middle of the conveying device, and a linear illuminator arranged perpendicular to the conveying direction of the glass substrate from one surface of the stopped glass substrate And provided on the opposite side of the illuminator across the glass substrate, and movable in parallel to the glass substrate in a direction perpendicular to the transport direction of the glass substrate, with the optical axis oriented perpendicular to the glass substrate. And an image processing device that processes the images of the corner notches and the through holes of the glass substrate captured by the image capturing device. It is a glass substrate inspecting apparatus according to claim.

  Further, the glass substrate inspection apparatus of the present invention is characterized in that in the glass substrate inspection apparatus, the size and shape of the notch are inspected using the binarized image of the notch. Device.

  Further, the glass substrate inspection apparatus of the present invention uses the binarized image of the through hole in the glass substrate inspection apparatus to inspect defects in the position and size of the through hole and the edge of the through hole. The glass substrate inspection apparatus is characterized.

  Further, the glass substrate inspection apparatus of the present invention is the glass substrate inspection device, wherein the glass substrate is stopped at the stop position by supporting the glass substrate and the support device in the transport direction and / or in the direction perpendicular to the transport direction. A glass substrate inspecting apparatus characterized in that a moving apparatus for moving the glass substrate is provided.

  In the glass substrate inspection apparatus of the present invention, the glass substrate inspection device is provided with a moving device for moving the camera in the transport direction and / or the vertical direction of the glass substrate. Device.

  Further, the glass substrate inspection method of the present invention uses the glass substrate inspection device, the glass substrate moving device and / or the camera moving device, the optical axis of the camera and the center of the through hole are matched, An inspection method for a glass substrate, wherein an image of the through hole is captured and the through hole is inspected using the image.

  Further, according to the glass substrate inspection method of the present invention, the inspection of the defect of the edge of the through hole is performed by binarizing the circular edge of the through hole and the dark portion around the edge to make it dark. A method for inspecting a glass substrate using the glass substrate inspection apparatus, wherein a dark portion of an edge is measured with a length perpendicular to the edge, and a through-hole is inspected using the measured length of the dark portion. .

  The glass substrate inspection apparatus and inspection method of the present invention provide an apparatus that can easily inspect a glass substrate for a flat panel display that has been subjected to notch processing and through-hole processing.

    Most glass substrates used in flat panel displays are rectangular, and as shown in FIG. 1, notches are formed with respect to rectangular corners called orientation flats so that the front, back, and orientation of the glass substrate can be discriminated. Processing of 4, 5, 6, and 7 is performed. Moreover, the drilling which provides the through-holes 2 and 3 for filling with gas is performed. These notches and through-holes are processed at predetermined positions and in predetermined sizes based on the design specifications of the glass substrate.

  The glass substrate inspection apparatus of the present invention inspects the notch and the shape of the through hole of the glass substrate and the defect of the edge of the through hole, and stops the substrate being transferred, and illuminates the glass substrate. An image capturing device comprising a scattered light source that emits light and a camera that images the glass substrate illuminated by the scattered light, and a moving device that moves the camera to a predetermined position to capture a notch or a through-hole. And an image processing device for analyzing the captured image of the camera.

    FIG. 2 shows an example of the inspection apparatus of the present invention. The glass substrate 1 is moved in the direction indicated by the arrow in the figure by the transport roll 8, and the inspection is performed by stopping the glass substrate 1 with a stop device (not shown).

  The stop device stops the glass substrate 1 when the notch or the through hole comes to the position of the camera 9 in the transport direction. The stop device may be configured to automatically stop the transport roll 8 and stop the glass substrate based on a signal for detecting the edge of the glass substrate 1 using an optical glass substrate edge detection device, Alternatively, a physical stop object may be used to stop the transport roll 8 and stop the glass substrate when the glass comes into contact with the stop object. The physical stop object is allowed to be taken in and out in order to be able to be transported again by the transport roll after the inspection is completed.

  As shown in FIG. 2, the scattered light source 10 that illuminates the stopped glass substrate 1 with the scattered light 13, and the glass substrate 1 that is installed on the side where the scattered light 13 passes through the glass substrate 1 and is illuminated with the scattered light 13. The image of the glass substrate 1 is captured using an image capturing device including the camera 9 for capturing the image.

  It is preferable to use an area camera as the camera 9 for imaging the notch and the through hole of the glass substrate 1 stopped by the stopping device. Furthermore, it is preferable to use a telecentric lens so that the side surface of the through hole is not captured when imaging the through hole.

  The glass substrate 1 stopped by the stopping device is illuminated from below by a linear illuminator 15, and a through hole and a corner cutout of the glass substrate 1 are imaged by the camera 9 from above the glass substrate 1.

The illuminator includes a scattered light source 10 and a box cover 11, and it is desirable to use a linear fluorescent lamp as the scattered light source 10, but other light sources may be used as long as they can be illuminated with scattered light. Furthermore, in order to make the illumination of the scattered light 13 uniform, it is preferable to provide a diffusion plate 14 between the scattered light source 10 and the glass substrate 1.
The camera 9 is installed so that the optical axis of the camera 9 is perpendicular to the glass substrate 1. Further, the camera 9 can be moved in parallel to the glass substrate in a direction perpendicular to the direction of conveyance of the glass substrate by the conveyance roll 8 by a moving device (not shown). Instead of the fluorescent lamp 11, a spot illuminator that can move in conjunction with the camera 9 may be used.

  The image picked up by the camera 9 shown in FIG. 2 is binarized by the image processing device 12, and the binarized image is used to inspect and penetrate the shape of notches and through holes. Inspection of defects occurring at the hole edge is performed.

  As shown in FIG. 3, the cutout image 20 is cut at corners to form an oblique edge 22. Many glass substrates are processed with a chamfer 21, and the portion of the chamfer 21 is displayed as dark in the cutout image 20.

  From the image of the notch, it is possible to inspect the shape of the notch as follows, for example.

  By obtaining the coordinates of the intersection points P1, P2 between the edge line 22 of the notch and the edge line 23 and the edge line 24 other than the notch, and the coordinates of the intersection point P3 on the extension line of the edge line 23 and the edge line 24 The triangles P1, P2, and P3 are measured, and the size and shape of the notch are obtained. Compared with the values in the design specification, it is possible to determine whether or not the difference is below tolerance.

  Furthermore, in the glass substrate inspection apparatus of the present invention, the width of the chamfer 21 can be measured, and the chamfered shape can be inspected.

  FIG. 4 is an image of the through hole 30, and the glass substrate 1 is stopped by a stop device in the glass substrate transport direction so that the through hole 30 is directly below the camera 9, and the camera 9 is moved to move the through hole 30. Obtained by imaging.

  In order to satisfactorily inspect the through hole, it is desirable to match the center P4 of the through hole 30 with the optical axis of the camera 9.

  For this reason, the glass substrate 1 is supported using a suction support device such as a suction cup or a suction pad, and the suction support device is moved with high accuracy by a moving device including a servo motor or a pulse motor and a motor controller. It is preferable to provide such a moving device.

  The glass substrate inspection apparatus of the present invention is configured such that the movement of the camera 9 can be moved parallel to the glass substrate 1 in a direction perpendicular to the conveying direction. Furthermore, it is preferable to provide a moving device that enables the camera 9 to move in the same direction as the conveyance direction of the glass substrate 1 in parallel with the glass substrate 1 or move in a direction perpendicular to the glass substrate 1.

  The center of the through hole 30 and the optical axis of the camera 9 are obtained by obtaining the position of the through hole 30 in the image of the camera 9 by image processing, and moving the camera 9 and / or the glass substrate 1 based on the position of the through hole 30. Can be matched.

  The vicinity of the edge of the through hole 30 appears as a dark part 31 in the image. The defect 32 also appears in the image as dark at the edge of the through hole 30. The camera is installed perpendicular to the glass substrate, and the defect can be detected on either side of the glass substrate.

  The inspection of the shape of the through hole 30 and the inspection of defects can be performed as follows, for example.

  The coordinates of the center P4 of the through hole 30 and the radius r1 of the through hole 30 are measured from the image data, and the quality and position of the through hole 30 are inspected based on the difference from the design specification value.

  Furthermore, a defect called crack or chipping may occur at the edge of the through hole 30 due to the processing of the through hole 30. Such a defect appears in the image as a dark portion 32 that is larger than the dark portion 31 of the non-defective edge in the image.

  The defect of the edge of the through hole 30 can be detected as follows.

In the image of the through hole 30, a reference line is hypothesized in an appropriate direction parallel to the surface of the glass substrate from the center P4 of the through hole, and the reference line is rotated clockwise on the glass substrate surface. With respect to the rotation angle θ, the width t θ of the dark part near the edge is measured from the image, and for example, a graph as shown in FIG. 5 is created.

Width t 2 of the dark part of the defect is larger than the width t 1 of the dark part of the non-defective edge, with reference to the graph shown in FIG. 5, it is possible to determine the quality of machining of the edge.

  In capturing the image of the through hole 30, a light shielding plate (not shown) is provided between the diffusion plate 14 and the glass substrate 1, and the width of illumination illuminated by the scattered light 13 on the straight line is set to It is preferable that the field of view is 1.5 to 3 times, more preferably about 2 times.

  If the illumination width of the scattered light 13 is larger than 3 times the field of view of the camera 9, the brightness of the image of the defect becomes brighter and it becomes difficult to discriminate by binarization, and if it is smaller than 1.5 times, the field of view of the camera 9 There is a risk that the illumination may not be reflected as a whole or illumination unevenness is likely to occur, resulting in a decrease in inspection accuracy.

It is a top view which shows a glass substrate typically. It is the schematic which shows the inspection apparatus of this invention. It is a figure which shows typically the image binarized by the notch. It is a figure which shows typically the image binarized by the through-hole. It is a graph which shows the magnitude | size of the dark part digitized of the edge part of a through-hole.

Explanation of symbols

1 Glass substrate 2, 3 Through hole
4, 5, 6, 7 Notch 8 Transport roll 9 Camera 10 Fluorescent lamp 11 Box cover 12 Image processing device 13 Scattered light 14 Diffuser 15 Illuminator 22 Notch line 23 Chamfering 31 Edge of through hole 32 Defect-free part Dark part 33 of dark part due to defect

Claims (7)

  1.   A glass substrate inspection apparatus used for a flat panel display, wherein the glass substrate is notched in a corner portion and a hole is formed in a through hole, and the glass substrate is in the middle of a conveying device that conveys the glass substrate. A stop device for stopping the glass substrate at a predetermined position, a linear illuminator arranged perpendicularly to the transport direction of the glass substrate from one surface of the stopped glass substrate, and sandwiching the glass substrate, An image capturing device comprising a camera provided on the opposite side of the illuminator and movable in parallel to the glass substrate in a direction perpendicular to the conveying direction of the glass substrate and having an optical axis oriented perpendicular to the glass substrate And a glass substrate comprising: an image processing device for processing images of notches and through-holes in the corners of the glass substrate captured by the image capturing device. Inspection equipment.
  2.   The glass substrate inspection apparatus according to claim 1, wherein the size and shape of the notch are inspected using an image obtained by binarizing the notch.
  3.   The glass substrate inspection apparatus according to claim 1, wherein a defect of the position and size of the through hole and an edge of the through hole is inspected using a binarized image of the through hole.
  4.   2. A supporting device for sucking and supporting the glass substrate and a moving device for moving the supporting device in the transport direction and / or the direction perpendicular to the transport direction are provided at the stop position of the glass substrate. 4. The glass substrate inspection apparatus according to any one of items 3 to 3.
  5.   5. The glass substrate inspection apparatus according to claim 1, further comprising a moving device for moving the camera in a transport direction and / or in a direction perpendicular to the glass substrate.
  6.   A glass substrate moving device and / or a camera moving device aligns the optical axis of the camera with the center of the through hole, captures an image of the through hole, and inspects the through hole using the image. A glass substrate inspection method using the glass substrate inspection apparatus according to claim 1.
  7.   Inspection of defects at the edge of the through-hole makes the circular edge of the through-hole and the dark part around the edge "dark" by binarization processing, and measures the dark part of the edge with a length perpendicular to the circular edge of the through-hole 6. The method for inspecting a glass substrate using the glass substrate inspection apparatus according to claim 1, wherein the through hole is inspected using the measured length of the dark part.
JP2005040096A 2005-02-17 2005-02-17 Glass substrate inspection apparatus and inspection method Expired - Fee Related JP4747602B2 (en)

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JP2005040096A JP4747602B2 (en) 2005-02-17 2005-02-17 Glass substrate inspection apparatus and inspection method
KR20077012375A KR100898208B1 (en) 2005-02-17 2006-02-17 Glass substrate inspection equipment and inspection method
PCT/JP2006/302865 WO2006088150A1 (en) 2005-02-17 2006-02-17 Glass substrate inspection equipment and inspection method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9488598B2 (en) 2014-06-02 2016-11-08 Samsung Display Co., Ltd. Inspecting apparatus for inspecting a multilayer structure

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101530009B1 (en) * 2008-12-19 2015-06-22 한미반도체 주식회사 Wafer Vision Inspection Apparatus
CN102081047B (en) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 Method and system for distinguishing defects of substrate
CN103175839A (en) * 2011-12-21 2013-06-26 北京兆维电子(集团)有限责任公司 Processing method and system for detection of offset plate surface
JP2018112411A (en) * 2017-01-06 2018-07-19 日本電気硝子株式会社 Inspection method and production method of glass plate, and inspection equipment of glass plate
WO2019160711A1 (en) * 2018-02-13 2019-08-22 Corning Incorporated Apparatus and methods for processing a substrate
KR20190097929A (en) * 2018-02-13 2019-08-21 코닝 인코포레이티드 Apparatus and method for inspecting a glass sheet

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09101125A (en) * 1995-10-07 1997-04-15 Kawasaki Heavy Ind Ltd Article shape measuring method and device
JP2000333047A (en) * 1999-05-25 2000-11-30 Rohm Co Ltd Optical image pickup device and optical image pickup method
JP2002181714A (en) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd Thin plate inspection device
JP2004279335A (en) * 2003-03-18 2004-10-07 Olympus Corp Substrate inspection device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09101125A (en) * 1995-10-07 1997-04-15 Kawasaki Heavy Ind Ltd Article shape measuring method and device
JP2000333047A (en) * 1999-05-25 2000-11-30 Rohm Co Ltd Optical image pickup device and optical image pickup method
JP2002181714A (en) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd Thin plate inspection device
JP2004279335A (en) * 2003-03-18 2004-10-07 Olympus Corp Substrate inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9488598B2 (en) 2014-06-02 2016-11-08 Samsung Display Co., Ltd. Inspecting apparatus for inspecting a multilayer structure

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KR100898208B1 (en) 2009-05-18
KR20070085606A (en) 2007-08-27
WO2006088150A1 (en) 2006-08-24
JP4747602B2 (en) 2011-08-17

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