KR102200691B1 - Inspecting apparatus - Google Patents

Abstract

An inspection device is provided. The inspection apparatus includes a stage on which a multilayer structure including a first layer and a second layer is mounted on an upper surface, and is opposite to the first side surface of the multilayer structure and selectively provides light to the side surface of the first layer or the side surface of the second layer. A first light irradiation unit providing a, an image pickup unit positioned on the stage and receiving scattered light generated by the light provided from the first light irradiation unit to obtain image information of the multilayer structure, the multilayer structure based on the image information It may include a control unit for detecting foreign material information.

Description

Inspection device {INSPECTING APPARATUS}

The present invention relates to an inspection apparatus.

With the development of semiconductor technology, a display device that has been reduced in size and weight is creating a lot of demand. For example, as the above-described display devices, there are a liquid crystal display (LCD) and an organic light emitting diode display (OLED), and the liquid crystal display and organic light emitting display devices are miniaturized, lightweight, and low power. It has advantages such as consumption and is widely used.

Meanwhile, display devices on the market today are reducing the overall thickness of the display device by directly attaching a window or a touch panel to the display panel using a transparent adhesive such as resin in the modularization process.

In the process of forming a multi-layered structure by adhering components such as windows and touch panels to the display panel using resin or the like, there is a possibility that foreign substances may be inserted therebetween. Therefore, after adhesion is made, it is checked whether or not a foreign material exists between the display panel and the component.

However, the conventional inspection apparatus photographed the multi-layered structure through a camera and detected only whether a defect or a defective state existed in the photographed image.

Therefore, according to the conventional inspection apparatus, there is a disadvantage that it is difficult to check whether the foreign material is present on the surface of the multilayer structure or whether the foreign material is present in the multilayer structure only by detecting the presence of the foreign material in the multilayer structure. There was a disadvantage that it was difficult to determine which layer of the multilayer structure was present.

An object to be solved by the present invention is to provide an inspection device capable of clearly detecting whether a defect, a defective state, a foreign substance, or the like is present in any position and layer of a multilayer structure.

In an inspection apparatus according to an embodiment of the present invention for solving the above problems, a stage on which a multilayer structure including a first layer and a second layer is mounted on an upper surface, and the first side surface of the multilayer structure A first light irradiation unit that selectively provides light to the side of the layer or the side of the second layer, located on the stage, and receives scattered light generated by the light provided from the first light irradiation unit to receive image information of the multilayer structure. It may include an image capture unit to be acquired, and a control unit for detecting foreign material information of the multi-layered structure based on the image information.

In the inspection apparatus according to an embodiment of the present invention for solving the above problem, the first light irradiation unit includes a first light source unit for emitting light toward a first side of the multilayer structure, the first light source unit and the multilayer A first light transmission control including a first shutter positioned between the first side surfaces of the structure and positioned at a portion corresponding to the side surface of the first layer and a second shutter positioned at a portion corresponding to the side surface of the second layer May contain wealth.

In the inspection apparatus according to an embodiment of the present invention for solving the above problem, the first shutter and the second shutter may be controlled to be opened at different timings by the control unit.

In the inspection apparatus according to an embodiment of the present invention for solving the above problem, the first light irradiation unit is positioned between the first light transmission control unit and the first side of the multi-layered structure and controls the first light transmission It may further include a first lens unit for converting the light transmitted through the portion into the form of sheet light.

In the inspection apparatus according to an embodiment of the present invention for solving the above problems, the first layer facing the second side of the multilayer structure and selectively irradiating light to the side of the first layer or the side of the second layer It may further include a two-light irradiation unit.

In the inspection apparatus according to an embodiment of the present invention for solving the above problem, the structure of the second light irradiation unit may be the same as the structure of the first light irradiation unit.

In an inspection apparatus according to another embodiment of the present invention for solving the above problems, a stage in which a multilayer structure including a first layer and a second layer is seated on an upper surface, faces a first side surface of the multilayer structure, and A first light irradiation unit that provides a first color light to the side of the first layer and provides a second color light to the side of the second layer, located on the stage, by the first color light and the second color light An image pickup unit configured to receive the generated scattered light to obtain image information of the multilayer structure, and a control unit configured to detect foreign material information of the multilayer structure based on the image information.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the first light irradiation unit includes a first light source unit for emitting light toward a first side of the multilayer structure, the first light source unit and the multilayer A first light conversion member located between the first side surfaces of the structure and converting the light emitted from the first light source into the first color light, and a first light converting member that converts the light emitted from the first light source into the second color light It may include a first light conversion unit including two light conversion members.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the first light conversion member is a first color filter, and the second light conversion member is a color different from the first color filter. It may be a two-color filter.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the first light source unit may emit white light.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the multi-layer structure further includes a third layer, and the first light conversion unit, the light emitted from the first light source unit to the third A third light conversion member for converting light into a third color provided on a side of the layer, wherein a color of the third color light may be different from a color of the first color light and the second color light.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the first color light is located between the first light conversion unit and the first side of the multilayer structure and converted by the first light conversion unit. Alternatively, a first lens unit for converting the second color light into a sheet light form may be further included.

In an inspection apparatus according to another embodiment of the present invention for solving the above problems, a stage on which a multilayer structure including a first layer and a second layer is mounted on an upper surface, and the first side surface of the multilayer structure A first light irradiation unit that provides a first color light to the side of the first layer, a second light irradiation unit that faces the second side of the multilayer structure and provides a second color light to the side of the second layer, and on the top of the stage An image pickup unit that receives the scattered light generated by at least one of the first color light and the second color light to obtain image information of the multilayer structure, and detects foreign material information of the multilayer structure based on the image information It may include a control unit.

In the inspection apparatus according to another embodiment of the present invention for solving the above problems, the first light irradiation unit, a first light source unit for emitting a first color light toward a first side of the multilayer structure, the first It may include a first light transmission control unit including a first opening corresponding to the layer.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the first light irradiation unit is positioned between the first light transmission control unit and the first side of the multilayer structure, and the first light transmission It may further include a first lens unit for converting the first color light transmitted through the adjustment unit into the form of sheet light.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the second light irradiation unit includes a second light source unit for emitting a second color light toward a second side surface of the multilayer structure, and the second It may include a second light transmission control unit including a second opening corresponding to the layer.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the second light irradiation unit is positioned between the second light transmission control unit and the second side surface of the multilayer structure and the second light transmission It may further include a second lens unit for converting the second color light transmitted through the adjustment unit into the form of sheet light.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the first light irradiation unit and the second light irradiation unit, the first color light and the second light to the multilayer structure by the control unit. It can be controlled to provide color light simultaneously.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the colors of the first color light and the second color light may be different from each other.

In the inspection apparatus according to another embodiment of the present invention for solving the above problem, the multi-layer structure further includes a third layer, the multi-layer structure facing the third side and the side of the third layer It may further include a third light irradiation unit for providing the first color light and the third color light of a color different from the second color light.

Details of other embodiments are included in the detailed description and drawings.

According to the embodiments of the present invention, there are at least the following effects.

According to the present invention, defects in a multilayer structure can be more effectively detected.

The effects according to the present invention are not limited by the contents exemplified above, and more various effects are included in the present specification.

1 is a diagram showing a schematic configuration of an inspection apparatus according to an embodiment of the present invention.
2 and 3 are views for explaining the first light transmission control unit shown in FIG. 1.
4 and 5 are views for explaining the function of the first lens unit shown in FIG. 1.
6 is a view for explaining a foreign matter detection process of the inspection apparatus according to an embodiment of the present invention.
7 is a diagram showing a schematic configuration of an inspection apparatus according to another embodiment of the present invention.
8 is a view showing the front of the light conversion unit shown in FIG.
9 is a view for explaining the function of the light conversion unit shown in FIG. 7.
10 is a view for explaining a foreign matter detection process of the inspection apparatus according to another embodiment of the present invention.
11 to 13 are views showing a schematic configuration of an inspection apparatus according to another embodiment of the present invention.
14 to 16 are diagrams for explaining a foreign body detection process of an inspection apparatus according to another embodiment of the present invention.

Advantages and features of the present invention, and a method of achieving them will become apparent with reference to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms different from each other, and only these embodiments make the disclosure of the present invention complete, and common knowledge in the technical field to which the present invention belongs It is provided to completely inform the scope of the invention to those who have it, and the invention is only defined by the scope of the claims. The same reference numerals refer to the same components throughout the specification. In the drawings, the sizes and relative sizes of layers and regions may be exaggerated for clarity of description.

Although the first, second, and the like are used to describe various components, it goes without saying that these components are not limited by these terms. These terms are only used to distinguish one component from another component. Therefore, it goes without saying that the first component mentioned below may be the second component within the technical idea of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In addition, terms such as "comprises" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, but one or more other features or numbers, The possibility of the presence or addition of steps, actions, components, parts, or combinations thereof is not precluded.

Spatially relative terms "below", "beneath", "lower", "above", "upper", etc., as shown in the figure It may be used to easily describe the correlation between the device or components and other devices or components. Spatially relative terms should be understood as terms including different directions of the device during use or operation in addition to the directions shown in the drawings. For example, if an element shown in the figure is turned over, an element described as “below or beneath” another element may be placed “above” another element. Accordingly, the exemplary term “below” may include both directions below and above. The device may be oriented in other directions as well, in which case spatially relative terms may be interpreted according to the orientation.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 is a diagram showing a schematic configuration of an inspection apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the inspection apparatus 10 according to an embodiment of the present invention includes a stage 110 supporting a multilayer structure 900 as an inspection object on an upper surface, a first light irradiation unit 130, and an imaging unit ( 150) and a control unit 170 may be included.

The multi-layered structure 900, which is an inspection object of the inspection apparatus 10, may include a first layer and a second layer. Hereinafter, throughout the present specification, the multilayer structure 900 is a display panel 910, a polarizing plate 930 disposed on the display panel 910, a resin layer 950 disposed on the polarizing plate 930, and a resin layer ( A case in which a structure including a touch panel 970 positioned on the touch panel 950 and a protective film 990 positioned on the touch panel 970 is described as an example, and the first layer is in the multilayer structure 900. Any one of the included polarizing plate 930, resin layer 950, touch panel 970, and protective film 990, and the second layer is a polarizing plate 930 included in the multilayer structure 900, and resin The layer 950, the touch panel 970, and the protective film 990 will be described as meaning any other one different from the first layer. However, this is only for convenience of description, and is not limited thereto.

The first light irradiation unit 130 is a part that provides light to the side of the multilayer structure 900, and is located on at least two sides of the polarizing plate 930, the resin layer 950, the touch panel 970, and the protective film 990. It is a part that selectively provides light. The first light irradiation unit 130 may be disposed to face the first side surface 900a of the multilayer structure 900 and may be located above the stage 110 as shown in the drawing, but is limited thereto. It is not.

The first light irradiation unit 130 may include a first light source unit 131 and a first light transmission control unit 133, and may further include a first lens unit 135.

The first light source part 131 is a part that emits light toward the first side surface 900a of the multilayer structure 900. In some embodiments, the first light source unit 131 may include a laser or a light emitting diode that emits light.

The first light transmission control part 133 is a part that transmits or blocks light emitted from the first light source part 131. The first light transmission control unit 133 may be positioned between the first side surface 900a of the multilayer structure 900 and the first light source unit 131.

The first light transmission control unit 133 may include an openable shutter.

2 and 3 are views for explaining the first light transmission control unit shown in Fig. 1, and more specifically, Fig. 2 is a front view of the first light transmission control unit shown in Fig. 1, and Fig. 3 is It is a view for explaining the operation of the first light transmission control unit shown in FIG.

1 to 2, the first light transmission control unit 133 may include shutters (SH1, SH2, SH3, SH4) that are provided in the body portion (B) and the body portion (B) and open and close. .

There is no limit to the number of shutters (SH1, SH2, SH3, SH4). Although it is shown that four shutters SH1, SH2, SH3, and SH4 are provided in the drawing, this is only an example, and the number of them can be changed appropriately. In some embodiments, the number of shutters SH1, SH2, SH3, and SH4 may be the same as the number of layers to be inspected in the multilayer structure 900, but is not limited thereto and may be appropriately changed as necessary.

In some embodiments, each of the shutters SH1, SH2, SH3, and SH4 may be positioned in a portion corresponding to each of the inspection target layers in the multilayer structure 900. For example, assuming that the layer to be inspected in the multilayer structure 900 is the polarizing plate 930, the resin layer 950, the touch panel 970, and the protective film 990 layer, each of the shutters SH1, SH2, SH3, and SH4 The polarizing plate 930, the resin layer 950, the touch panel 970, and the protective film 990 may be positioned at corresponding portions. In other words, the first shutter SH1 may be positioned at substantially the same level (or substantially the same plane) as the protective film 990, and the second shutter SH2 may be at the same level as the touch panel 970. Can be located in Also, the third shutter SH3 may be positioned at the same level as the resin layer 950, and the fourth shutter SH4 may be positioned at the same level as the polarizing plate 930.

Each of the shutters SH1, SH2, SH3, and SH4 may selectively transmit or block light emitted from the first light source 131 by independently performing an opening and closing operation.

In some embodiments, each of the shutters SH1, SH2, SH3, and SH4 may be implemented as a microshutter, which is a type of microelectromechanical system (MEMS). The microshutter has a characteristic of being deformed by electrostatic force depending on whether an electric field is applied, and the first light transmission control unit 133 can directly transmit or block light according to the operation of the microshutter using the deformation characteristic of the microshutter. I can.

1 to 3, the shutters SH1, SH2, SH3, and SH4 of the first light transmission control unit 133 may individually open and close, and the shutters SH1, SH2, SH3, and SH4 ) Each can be open for a different time from each other. In other words, when any one of the shutters SH1, SH2, SH3, and SH4 is opened, the other shutters may be kept closed. For example, as shown in FIG. 3, while the first shutter SH1 is open, the shutters other than the first shutter SH1, that is, the second shutter SH2, the third shutter SH3, and the fourth shutter SH4 Can remain closed rather than open. In addition, some of the light L1 emitted from the first light source unit 131 may pass through the opened first shutter SH1, and other light may be the closed second shutter SH2 and the third shutter SH3. And a fourth shutter (SH4). Likewise, although not shown in the drawing, while the second shutter SH2 is open, the first shutter SH1, the third shutter SH3, and the fourth shutter SH4 can remain closed, and the first light source unit ( Some of the light emitted from 131 (L2) may pass through the open second shutter (SH2), and other light is closed, the first shutter (SH1), the third shutter (SH3), and the fourth shutter ( SH4) can be blocked. Hereinafter, for convenience of explanation, among the light emitted from the first light source unit 131, an open first shutter (SH1), an open second shutter (SH2), an open third shutter (SH3), and an open fourth shutter. The light transmitted through each of the SH4 is referred to as a first light L1, a second light L2, a third light L3, and a fourth light L4.

The opening and closing operation of each of the shutters SH1, SH2, SH3, and SH4 may be controlled by the controller 170.

Referring back to FIG. 1, the first lens unit 135 may be positioned between the first light transmission control unit 133 and the first side surface 900a of the multilayer structure 900. The first lens unit 135 is a part that converts the light that has passed through the first light transmission control unit 133 among the light emitted from the first light source unit 131 into a form of sheet light.

4 and 5 are diagrams for explaining the function of the first lens unit shown in FIG. 1, FIG. 4 is a diagram illustrating a shape of light viewed from the side, and FIG. 5 is a diagram illustrating a shape of light viewed from an upper surface. It is a drawing shown as. 4 and 5, the first lens unit 135 diffuses the light transmitted through the first light transmission control unit 133 among the light emitted from the first light source unit 131 in the form of sheet light or flat light. It can perform the function of making. That is, when viewed from the side, the light transmitted through the first lens unit 135 may have a parallel light form as shown in FIG. 4, and when viewed from the top, sheet light or It may have a planar light form. In some embodiments, the first lens unit 135 may include a cylindrical-lens or the like. In addition, in addition to the cylindrical lens, it may be provided with a structure including other lenses capable of diffusing light.

Referring back to FIG. 1, the imaging unit 150 may be positioned above the stage 110.

The imaging unit 150 is a part that acquires image information by receiving light (or scattered light) generated when light irradiated by the first light irradiation unit 130 is scattered by a foreign material existing in the multilayer structure 900. In some embodiments, the imaging unit 150 may include a charge-coupled device (CCD) or a Complementary Metal Oxide Semiconductor (CMOS) capable of acquiring image information (or image) by receiving the scattered light, but is limited thereto. no.

The control unit 170 is a part that detects foreign material information of the multi-layered structure 900 based on the image information acquired by the imaging unit 150. In some embodiments, the controller 170 may detect the foreign material information based on at least one of color, saturation, or contrast included in the image information. For example, when a foreign material exists in the multilayer structure 900, a portion where the foreign material exists may appear relatively bright due to scattered light. In this case, the control unit 170 may detect foreign material information by analyzing the brightness of the image information (or image). However, this is only an example, and there is no limitation on how the control unit 170 detects foreign material information.

In addition, the control unit 170 may control the overall operation of the inspection device 10, for example, may control the opening and closing operation of each of the shutters (SH1, SH2, SH3, SH4).

Meanwhile, the inspection apparatus 10 may further include a second light irradiation unit 130 ′. The second light irradiation unit 130 ′ may be disposed to face the other side surfaces of the multilayer structure 900 except for the first side surface 900a. In an exemplary embodiment, the second light irradiation unit 130 ′ may be disposed to face the second side surface 900b of the multilayer structure 900 as shown in the drawing, but is not limited thereto. The configuration of the second light irradiation unit 130 ′ may be the same as that of the first light irradiation unit 130. Further, although not shown in the drawings, the inspection apparatus 10 may further include a light irradiation unit facing the side surface of the multilayer structure 900 excluding the first side surface 900a and the second side surface 900a.

6 is a view for explaining a foreign matter detection process of the inspection apparatus according to an embodiment of the present invention.

Referring to FIGS. 1 to 6, a case where the multilayer structure 900 includes first to fifth foreign matters P1 to P5 will be described as an example.

In the case of the second foreign material P2, it may be detected as follows. The inspection device 10 drives the first light source unit 131 to emit light. In addition, the first shutter (SH1) of the first light transmission control unit 131 is opened, and the second shutter (SH2), the third shutter (SH3), and the fourth shutter (SH4) are maintained in a closed state. Of the light emitted from the first light source unit 131, only the first light L1 passes through the first light transmission control unit 131. Further, the first light L1 passes through the first lens unit 135 and is transformed into a sheet light form, and is incident on the side of the protective film 990 corresponding to the first shutter SH1. In addition, the first light L1 is scattered by the second foreign material P2 positioned between the touch panel 970 and the protective film 990 to generate the first scattered light L1', and the imaging unit 150 Receives the first scattered light L1' to obtain image information. The controller 170 analyzes the image information acquired by the imaging unit 150 to detect the presence of the second foreign object P2. In addition, the control unit 170 can control the opening and closing of each shutter (SH1, SH2, SH3, SH4) of the first light transmission control unit 131, the second foreign material (P2) is a protective film 990 or protection Positioning between the film 990 and the touch panel 970 is detected. Meanwhile, the first foreign matter P1 and the second foreign matter P2 can be removed when the protective film 990 is peeled off. Finally, the control unit 170 determines that even if the second foreign matter P2 exists, it is a foreign matter defective. I can't.

In the case of the third foreign material P3, it may be detected as follows. The inspection device 10 drives the first light source unit 131 to emit light. In addition, the second shutter SH2 of the first light transmission control unit 131 is opened, and the first shutter SH1, the third shutter SH3, and the fourth shutter SH4 are maintained in a closed state. Of the light emitted from the first light source unit 131, only the second light L2 passes through the first light transmission control unit 131. Further, the second light L2 passes through the first lens unit 135 and is transformed into a sheet light form, and is incident on the side surface of the touch panel 970 corresponding to the second shutter SH2. In addition, the second light L2 is scattered by the third foreign material P3 positioned between the touch panel 970 and the resin layer 950 to generate the second scattered light L2', and the imaging unit 150 Receives the second scattered light L2' to obtain image information. The controller 170 analyzes the image information acquired by the imaging unit 150 to detect the presence of the third foreign object P3. In addition, the control unit 170 can control the opening and closing of each shutter (SH1, SH2, SH3, SH4) of the first light transmission control unit 131, the third foreign material (P3) is the touch panel 970 or touch It is detected that it is positioned between the panel 970 and the resin layer 950. Meanwhile, the third foreign material P3 actually corresponds to a foreign material located inside the multi-layered structure 900. Finally, the control unit 170 determines the presence or absence of the third foreign material P3 and the location of the multi-layered structure ( It can be determined that there is a foreign substance defect in 900).

The same is true for the fourth foreign material P4. That is, the third shutter (SH3) is opened, the first shutter (SH1), the second shutter (SH2), and the fourth shutter (SH4) are closed to provide a third light (L3) on the side of the resin layer 950 Then, the third scattered light L3' is generated by the fourth foreign object P4, and the imaging unit 150 acquires image information based on the third scattered light L3'. Then, the controller 170 analyzes the image information to detect that the fourth foreign material P4 exists between the resin layer 950 or the resin layer 950 and the polarizing plate 930, and finally, the multilayer structure 900 It can be determined that there is a foreign substance defect in the inside.

In the case of the fifth foreign object P5, the fourth shutter SH4 is opened, the first shutter SH1, the second shutter SH2, and the third shutter SH3 are closed to provide the fourth light to the polarizing plate 930. When (L4) is provided, the fourth scattered light L4' is generated by the fifth foreign object P5, and the imaging unit 150 acquires image information by the fourth scattered light L4'. And the control unit 170 analyzes the image information to detect that the fifth foreign material P4 exists between the polarizing plate 930 or the polarizing plate 930 and the display panel 910, and finally inside the multilayer structure 900 It can be determined that foreign matter defects exist.

According to the present invention, it is possible to detect not only the presence of foreign matters in the multilayered structure 900 but also the location of the foreign matters, so that whether there is an actual foreign matter defect in the multilayered structure 900 and the location of the foreign matters in the multilayered structure 900 There is an advantage of being able to detect accurately.

7 is a diagram showing a schematic configuration of an inspection apparatus according to another embodiment of the present invention.

Referring to FIG. 7, an inspection apparatus 20 according to another embodiment of the present invention includes a stage 210 supporting a multilayer structure 900 as an inspection object on an upper surface, a first light irradiation unit 230, and an image pickup unit ( 150) and a control unit 170 may be included.

The stage 210 is a part that supports the multilayer structure 900 on the upper surface.

The first light irradiation unit 230 is a part that provides light to the side of the multilayer structure 900, and is located on two or more sides of the polarizing plate 930, the resin layer 950, the touch panel 970, and the protective film 990. It is a part that selectively provides light. The first light irradiation unit 230 may be disposed to face the first side surface 900a of the multilayer structure 900, similar to the first light irradiation unit (130 of FIG. 1) described above in the description of FIG. 1. As shown, it may be located above the stage 210, but is not limited thereto.

The first light irradiation unit 230 may include a first light source unit 231 and a first light conversion unit 233, and may further include a first lens unit 235.

The first light source part 231 is a part that emits light toward the first side surface 900a of the multilayer structure 900. In some embodiments, the first light source unit 131 may include a laser or a light emitting diode that emits light, and in some embodiments, the color of light emitted from the first light source unit 231 may be white.

The first light conversion unit 233 is a part that converts the color of light emitted from the first light source unit 231. The first light conversion unit 233 may be positioned between the first side surface 900a of the multilayer structure 900 and the first light source unit 131.

The first light transmission control unit 133 may include a light conversion member for converting a color of incident light.

8 and 9 are views for explaining the first light conversion unit shown in FIG. 7, and more specifically, FIG. 8 is a front view of the first light conversion unit shown in FIG. 7, and FIG. 9 is It is a diagram for explaining the function of the illustrated first light conversion unit.

7 to 9, the first light conversion unit 133 may include a body portion (B) and a light conversion member (CF1, CF2, CF3, CF4) provided in the body portion (B).

There is no limit to the number of light conversion members CF1, CF2, CF3, and CF4. Although it is shown that four light conversion members CF1, CF2, CF3, and CF4 are provided in the drawing, this is only an example and the number of light conversion members CF1, CF2, CF3, and CF4 can be changed appropriately. In some embodiments, the number of light conversion members CF1, CF2, CF3, and CF4 may be the same as the number of layers to be inspected in the multilayer structure 900, but is not limited thereto and may be appropriately changed as necessary.

In some embodiments, each of the light conversion members CF1, CF2, CF3, and CF4 may be located in a portion corresponding to each of the inspection target layers in the multilayer structure 900. For example, assuming that the layer to be inspected in the multilayer structure 900 is the polarizing plate 930, the resin layer 950, the touch panel 970, and the protective film 990 layer, the light conversion members CF1, CF2, CF3, and CF4 Each may be positioned at a portion corresponding to the polarizing plate 930, the resin layer 950, the touch panel 970, and the protective film 990. In other words, the first light conversion member CF1 may be positioned at substantially the same level (or substantially the same plane) as the protective film 990, and the second light conversion member CF2 may include the touch panel 970 and the It can be located at substantially the same level. In addition, the third light conversion member CF3 may be positioned at substantially the same level as the resin layer 950, and the fourth light conversion member CF4 may be positioned at substantially the same level as the polarizing plate 930.

Each of the light conversion members CF1, CF2, CF3, and CF4 may convert incident light into different colors. For example, assuming that the first color is red, the second color is green, the third color is blue, and the fourth color is yellow, the first light conversion member CF1 is the first light source unit 230 as shown in FIG. 9. It is possible to convert the light emitted and incident from the first color light (L-CF1) into red light, and the second light conversion member CF2 converts the incident light emitted from the first light source unit 230 into second color light. It can be converted to green light, which is (L-CF2). Similarly, the third light conversion member CF3 may convert light emitted from the first light source unit 230 and incident thereto into blue light, which is a third color light L-CF3, and the fourth light conversion member CF4 Light emitted from the first light source unit 230 and incident thereon may be converted into yellow light, which is the fourth color light L-CF2. However, the above-described color is only an example for convenience of description, and the color of light converted by each light conversion member may be changed.

In some embodiments, the light conversion members CF1, CF2, CF3, and CF4 may be made of color filters (or color filters). For example, the first light conversion member CF1 may be made of a red color filter, and the second light conversion member CF2 may be made of a green color filter. In addition, the third light conversion member CF3 may be formed of a blue color filter, and the fourth light conversion member CF4 may be formed of a yellow color filter. However, this is only an example, and any configuration capable of converting the color of incident light may be applied to the light conversion members CF1, CF2, CF3, and CF4. For example, it will be said that a wavelength conversion member including a fluorescent material can also be applied to the present invention. Referring back to FIG. 7, the first lens unit 235 includes the first light conversion unit 233 and the multilayer structure 900. It may be positioned between the first side surfaces 900a. The first lens unit 235 may convert light that has passed through the first light control unit 233 among the light emitted from the first light source unit 231 into a form of sheet light. In addition, a detailed description of the first lens unit 235 is the same as described above in the descriptions of FIGS. 1, 4, and 5, and thus will be omitted.

The imaging unit 250 may be positioned above the stage 210.

The imaging unit 250 is a part that acquires image information by receiving light (or scattered light) generated when light irradiated by the first light irradiation unit 230 is scattered by a foreign material existing in the multilayer structure 900. In some embodiments, the image pickup unit 250 may acquire color image information (or color image) by receiving the scattered light, and may include a charge-coupled device (CCD) or a Complementary Metal Oxide Semiconductor (CMOS) for this. , But is not limited thereto.

The controller 270 is a part that detects foreign material information of the multi-layered structure 900 based on image information acquired by the imaging unit 250. In some embodiments, the controller 270 may detect the foreign material information based on at least one of color, saturation, or contrast included in the image information, and in particular, may detect the foreign material information based on the color information. In addition, the control unit 270 may pre-store color information of light provided to each layer of the multilayer structure 900, and based on this, it is possible to determine on which layer the foreign material is located. In addition, the control unit 270 may control the overall operation of the inspection device 20.

The inspection device 20 may further include a second light irradiation unit 230 ′. The second light irradiation unit 230 ′ may be disposed to face the other side surfaces of the multilayer structure 900 except for the first side surface 900a. In an exemplary embodiment, the second light irradiation unit 230 ′ may be disposed to face the second side surface 900b of the multilayer structure 900 as shown in the drawing, but is not limited thereto. The configuration of the second light irradiation unit 230 ′ may be the same as the first light irradiation unit 230. In addition, although not shown in the drawings, the inspection device 20 may further include a light irradiation unit facing the side surface of the multilayer structure 900 except for the first side surface 900a and the second side surface 900a.

10 is a view for explaining a foreign matter detection process of the inspection apparatus according to another embodiment of the present invention.

Referring to FIGS. 7 to 10, a case in which the multilayer structure 900 includes first to fifth foreign matters P1 to P5 will be described as an example.

The inspection device 20 drives the first light source unit 231 to emit light, and the light emitted from the first light source unit 231 is a first light conversion member CF1 and a first light conversion member CF1 of the first light conversion unit 233. The first color light (L-CF1), the second color light (L-CF2), and the second color light (L-CF2), respectively, pass through the second light conversion member CF2, the third light conversion member CF3, and the fourth light conversion member CF4. It is converted into three-color light (L-CF3) and fourth color light (L-CF4). In addition, each of the first color light (L-CF1), the second color light (L-CF2), the third color light (L-CF3), and the fourth color light (L-CF4) reflects the first lens unit 235. Transmitted and transformed into sheet light, the protective film 990, the touch panel 970, the resin layer 950, and the polarizing plate 930 are incident on each side.

The first color light (L-CF1), second color light (L-CF2), third color light (L-CF3), and fourth color light (L-CF4) incident into the multilayer structure 900 are The second foreign body (P2), the third foreign body (P3), the fourth foreign body (P4), and the fifth foreign body (P5) scatter each of the first color scattered light (L-CF1'), the second color scattered light (L-). CF2'), the third color scattered light (L-CF3'), and the fourth color scattered light (L-CF4'), and the image pickup unit 250 generates the first color scattered light (L-CF1'), and the second Color image information is obtained by receiving the color scattered light L-CF2', the third color scattered light L-CF3', and the fourth color scattered light L-CF4'. The controller 270 analyzes the color image information acquired by the imaging unit 250 to determine whether a foreign object exists in the multilayer structure 900. .

For example, the first color light (L-CF1) is red, the second color light (L-CF2) is green, the third color light (L-CF3) is blue, and the fourth color light (L-CF4) is yellow. In the case of light, a portion corresponding to the second foreign object P2 may be displayed as a red dot in the color image information. In addition, a portion corresponding to the third foreign body P3 may be indicated by a green dot, a portion corresponding to the fourth foreign body P4 may be indicated by a blue dot, and a portion corresponding to the fifth foreign body P5 It can be marked with a yellow dot. The controller 270 may detect the presence of the second foreign material P2, the third foreign material P3, the fourth foreign material P4, and the fifth foreign material P5 through color analysis of the color image information. In addition, the control unit 270 determines which layer is each of the second foreign matter P2, the third foreign matter P3, the fourth foreign matter P4, and the fifth foreign matter P5 based on the color information of the light provided to each pre-stored layer. It can detect whether it is located in.

That is, the control unit 270 can detect the presence and location of each of the foreign substances (P2, P3, P4, P5) through a single inspection process to determine whether or not there is an actual defect in the multilayer structure 900. Can be detected.

Exemplarily, the first foreign matter P1 and the second foreign matter P2 can be removed when the protective film 990 is peeled off, and the control unit 270 determines that even if the second foreign matter P2 exists, it is a foreign matter defect. Otherwise, if the third foreign matter P3, the fourth foreign matter P4, and the fifth foreign matter P5 exist, it may be determined as a foreign matter defective.

According to the present invention, it is possible to detect not only the presence of foreign matters in the multilayered structure 900 but also the location of the foreign matters, so that whether there is an actual foreign matter defect in the multilayered structure 900 and the location of the foreign matters in the multilayered structure 900 There is an advantage of being able to detect accurately. In addition, since it is possible to determine whether a foreign substance is defective in the multi-layered structure 900 through a single inspection process, there is an additional advantage of shortening the inspection time.

11 to 13 are views showing a schematic configuration of an inspection apparatus according to another embodiment of the present invention, and FIG. 11 is a plan view as viewed from above, and FIG. 12 is a view showing an inspection apparatus according to another embodiment of the present invention. 11 is a cross-sectional view of the inspection device of FIG. 11 taken along the line I-I', and FIG. 13 is a cross-sectional view of the inspection device of FIG. 11 taken along the line II-II'.

11 to 13, the inspection apparatus 30 according to another embodiment of the present invention includes a stage 310 supporting a multilayer structure 900 as an inspection object on an upper surface, and a first light irradiation unit 330a. , The second light irradiation unit 330b, the imaging unit 150, and the control unit 170 may be included, and at least one of the third light irradiation unit 330c and the fourth light irradiation unit 330d may be further included. . Hereinafter, for convenience of description, a case where the inspection device 30 further includes a third light irradiation unit 330c and a fourth light irradiation unit 330d will be described as an example.

The stage 310 is a part supporting the multilayer structure 900 on the upper surface.

The first light irradiation part 330a is a part that provides light to the first side surface 900a of the multilayer structure 900, and the polarizing plate 930, the resin layer 950, the touch panel 970, and the protective film 990 It is a part that selectively provides light to any one of the sides. The first light irradiation unit 330a may be disposed to face the first side surface 900a of the multilayer structure 900, similar to the first light irradiation unit (130 of FIG. 1) described above in the description of FIG. As shown, it may be located above the stage 310, but is not limited thereto.

The first light irradiation unit 330a may include a first light source unit 331a and a first light transmission control unit 333a, and may further include a first lens unit 335a.

The first light source part 331a is a part that emits first color light toward the first side surface 900a of the multilayer structure 900. In some embodiments, the first light source part 331a may include a laser or a light emitting diode that emits light.

The first light transmission control part 333a is a part that transmits only a part of the first color light emitted from the first light source part 331a. The first light transmission control part 333a may be located between the first side surface 900a of the multilayer structure 900 and the first light source part 331a.

The first light transmission control part 333a may include a first opening H1, and the first opening H1 may be located at a portion corresponding to the protective film 990 of the multilayer structure 900. That is, the light emitted from the first light source portion 331a may pass through the first opening portion H1 of the first light transmission control portion 333a to be provided to the protective film 990.

The first lens unit 335a may be positioned between the first light transmission control layer 333a and the first side surface 900a of the multilayer structure 900. The first lens unit 333a may convert the first color light transmitted through the first light transmission control layer 333a among the light emitted from the first light source unit 331a into a form of sheet light. In addition, a detailed description of the first lens unit 335a is the same as described above in the descriptions of FIGS. 1, 4, and 5, and thus will be omitted.

The second light irradiation unit 330b is a portion that provides light to the second side surface 900b of the multilayer structure 900, and includes a polarizing plate 930, a resin layer 950, a touch panel 970, and a protective film 990. It is a part that selectively provides light to any one of the sides. The second light irradiation unit 330b may be disposed to face the second side surface 900b of the multilayer structure 900, and may be located above the stage 310 as shown in the drawing, but is limited thereto. It is not.

The second light irradiation unit 330b may include a second light source unit 331b and a second light transmission control unit 333b, and may further include a second lens unit 335b.

The second light source part 331b is a part that emits second color light toward the second side surface 900b of the multilayer structure 900, and in some embodiments, the second color light is emitted from the first light source part 331b. It may be light of a color different from the first color light. In some embodiments, the second light source part 331b may include a laser or a light emitting diode that emits light.

The second light transmission control part 333b is a part that transmits only a part of the second color light emitted from the second light source part 331b. The second light transmission control part 333b may be positioned between the second side surface 900b of the multilayer structure 900 and the second light source part 331b.

The second light transmission control unit 333b may include a second opening H2, and the second opening H2 may be located at a portion corresponding to the touch panel 970 of the multilayer structure 900. That is, the light emitted from the second light source unit 331b may pass through the second opening portion H2 of the second light transmission control unit 333b to be provided to the touch panel 970.

The second lens unit 335b may be positioned between the second light transmission control unit 333b and the second side surface 900b of the multilayer structure 900. In addition, a detailed description of the second lens unit 335b is the same as or similar to those described above in the descriptions of FIGS. 1, 4, and 5, and thus will be omitted.

The third light irradiation unit 330c can provide light to the third side surface 900c of the multilayer structure 900, similar to the first light irradiation unit 330a and the second light irradiation unit 330b, and the multilayer structure It may be disposed to face the third side surface 900c of 900.

The third light irradiation unit 330c may include a third light source unit 331c and a third light transmission control unit 333c, and may further include a third lens unit 335c.

The third light source part 331c is a part that emits light of a third color toward the third side surface 900c of the multilayer structure 900. In some embodiments, the third color light is the first color light and the second light. It may be light of a color different from the color light. In some embodiments, the third light source part 331c may include a laser or a light emitting diode that emits light.

The third light transmission control part 333c is a part that transmits only a part of the third color light emitted from the third light source part 331c. The third light transmission control unit 333c may be located between the third side surface 900c of the multilayer structure 900 and the third light source unit 331c.

The third light transmission control part 333c may include a third opening H3, and the third opening H3 may be located at a portion corresponding to the resin layer 950 of the multilayer structure 900. That is, the light emitted from the third light source part 331c may pass through the third opening H3 of the third light transmission control part 333c to be provided to the resin layer 950.

The third lens unit 335c may be positioned between the c-th light transmission control unit 333c and the third side surface 900c of the multilayer structure 900. In addition, a detailed description of the third lens unit 335c is the same as or similar to those described above in the descriptions of FIGS.

The fourth light irradiation unit 330d may provide light to the fourth side surface 900d of the multilayer structure 900 and may be disposed to face the fourth side surface 900d of the multilayer structure 900.

The fourth light irradiation unit 330d may include a fourth light source unit 331d and a fourth light transmission control unit 333d, and may further include a fourth lens unit 335d.

The fourth light source part 331d is a part that emits light of a fourth color toward the fourth side surface 900d of the multilayer structure 900, and in some embodiments, the fourth color light is the first color light and the second light. It may be light of a color different from the color light. In some embodiments, the fourth light source part 331d may include a laser or a light emitting diode that emits light.

The fourth light transmission control part 333d is a part that transmits only a part of the fourth color light emitted from the fourth light source part 331d. The fourth light transmission control unit 333d may be located between the fourth side surface 900c of the multilayer structure 900 and the fourth light source unit 331d.

The fourth light transmission control unit 333d may include a fourth opening H4, and the fourth opening H4 may be located at a portion corresponding to the polarizing plate 930 of the multilayer structure 900. That is, the light emitted from the fourth light source part 331d may pass through the fourth opening H4 of the fourth light transmission control part 333d to be provided to the polarizing plate 930.

The fourth lens unit 335d may be positioned between the fourth light transmission control unit 333d and the fourth side surface 900d of the multilayer structure 900. In addition, a detailed description of the fourth lens unit 335d is the same as or similar to those described above in the descriptions of FIGS. 1, 4 and 5, and thus will be omitted.

The imaging unit 350 receives light (or scattered light) generated by scattering the light irradiated from each light irradiation unit 330a, 330b, 330c, 330d by a foreign material existing in the multilayer structure 900 to acquire image information This is the part. In some embodiments, the image pickup unit 350 may acquire color image information (or color image) by receiving the scattered light, and may include a charge-coupled device (CCD) or a Complementary Metal Oxide Semiconductor (CMOS) for this. , But is not limited thereto.

The controller 370 is a part that detects foreign material information of the multi-layered structure 900 based on image information acquired by the imaging unit 350. In some embodiments, the controller 370 may detect the foreign material information based on at least one of color, saturation, or contrast included in the image information, and in particular, may detect the foreign material information based on the color information. In addition, the control unit 370 may pre-store color information of light provided to each layer of the multilayer structure 900, and based on this information, it is possible to determine on which layer the foreign material is located. Other than that, the control unit 370 may control the overall operation of the inspection device 30, and illustratively, the first light irradiation unit 330a, the second light irradiation unit 330b, the third light irradiation unit 330c, and the fourth light Driving timing of the light source units 331a, 331b, 331c, and 331d included in each of the irradiation units 330d may be controlled.

14 to 16 are views for explaining a foreign matter detection process of an inspection apparatus according to another embodiment of the present invention, and more specifically, FIG. 14 is a plan view as viewed from the top of light provided to a multilayer structure, and FIG. 15 is 14 is a cross-sectional view taken along line III-III', and FIG. 16 is a cross-sectional view of FIG. 14 taken along line IV-IV'.

Referring to FIGS. 12 to 16, a case in which the multilayer structure 900 includes first to tenth foreign matters P1 to P10 is described as an example, and the first to fifth foreign matters P1 to P5 Is located on the Ⅲ- Ⅲ'phase, and the sixth to 10th foreign bodies (P6 to P10) are assumed to be located on the Ⅳ- Ⅳ'.

The inspection device 30 simultaneously drives the first light source portion 331a, the second light source portion 331b, the third light source portion 331c, and the fourth light source portion 331d to provide a first color light (L-C1) and a second color. Light (L-C2), third color light (L-C3), and fourth color light (L-C4) light are emitted.

The first color light L-C1 passes through the first opening H1 and is provided to the first lens unit 335a, and the first color light L-C1 passes through the first lens unit 335a is It is transformed into a sheet light form and incident on the side surface of the protective film 990 in the direction of the first side surface 900a of the multilayer structure 900.

The second color light L-C2 passes through the second opening H2 and is provided to the second lens unit 335b, and the second color light L-C1 passes through the second lens unit 335a is It is deformed in the form of sheet light and is incident on the side surface of the touch panel 970 in the direction of the second side surface 900b of the multilayer structure 900.

The third color light L-C3 passes through the third opening H3 and is provided to the third lens unit 335c, and the third color light L-C3 passes through the third lens unit 335c is It is transformed into a sheet light shape and incident on the side surface of the resin layer 950 in the direction of the third side surface 900c of the multilayer structure 900.

In addition, the fourth color light L-C4 passes through the fourth opening H4 and is provided to the fourth lens unit 335d, and the fourth color light L-C4 passes through the fourth lens unit 335d. Is transformed into a sheet light form and is incident on the side surface of the polarizing plate 930 in the direction of the fourth side surface 900d of the multilayer structure 900.

The first color light (L-C1) enters the protective film 990 of the multilayer structure 900, and the first color scattered light (L-C1') and the seventh foreign material (P7) by the second foreign material (P2) The first color scattered light (not shown) is generated. In addition, the second color light (L-C2) enters the touch panel 970 of the multilayer structure 900, and the second color scattered light (L-C2') and the eighth foreign material (P8) by the third foreign material (P3). ) To generate the second color scattered light (not shown). Similarly, the third color light (L-C3) is incident into the resin layer 950 of the multilayer structure 900, and the third color scattered light (not shown) and the ninth foreign material P9 by the fourth foreign material P4. 3rd color scattered light (L-C3') is generated due to ). Likewise, the fourth color light (L-C4) enters the polarizing plate 930 of the multilayer structure 900 and becomes the fourth color scattered light (not shown) and the tenth foreign material P10 by the fifth foreign material P5. The resulting fourth color scattered light (L-C4') is generated.

The image pickup unit 350 captures first color scattered light (L-C1'), second color scattered light (L-C2'), third color scattered light (L-C3'), and fourth color scattered light (L-C4'). By receiving light, color image information is obtained. The control unit 370 analyzes the color image information acquired by the imaging unit 350 to determine whether a foreign object exists in the multilayer structure 900. .

Exemplarily, the first color light (L-C1) is red light, the second color light (L-C2) is green light, the third color light (L-C3) is blue light, and the fourth color light (L-C4) is yellow. In the case of light, portions corresponding to the second foreign material P2 and the seventh foreign material P7 may be displayed as red dots in the color image information. In addition, a portion corresponding to the third foreign body P3 and the eighth foreign body P8 may be indicated by a green dot, and the portion corresponding to the fourth foreign body P4 and the ninth foreign body P9 may be indicated by a blue dot. In addition, portions corresponding to the fifth foreign body P5 and the tenth foreign body P10 may be indicated by yellow dots. The controller 370 analyzes the color of the color image information to determine the second foreign body P2, the third foreign body P3, the fourth foreign body P4 and the fifth foreign body P5, the seventh foreign body P7, and the eighth. The presence or absence of the foreign material P8, the ninth foreign material P9, and the tenth foreign material P10 may be detected. In addition, the control unit 370 can detect which layer each foreign material (P2, P3, P4, P5, P7, P8, P9, P10) is located on based on the color information of the light provided to each previously stored layer. have.

That is, the control unit 370 can detect the presence and location of each of the foreign substances (P2, P3, P4, P5, P7, P8, P9, P10), and whether there is an actual defect in the multilayer structure 900 Whether or not it can be detected through a single inspection process.

Exemplarily, the first foreign material P1, the second foreign material P2, the sixth foreign material P6, and the seventh foreign material P7 may be removed when the protective film 990 is peeled off, and the controller 370 is Even if the second foreign matter (P2) or the seventh foreign matter (P7) exists, it may not be judged as a foreign matter defect. Other than the third foreign matter (P3), the fourth foreign matter (P4), the fifth foreign matter (P5), and the eighth If the foreign matter P8, the ninth foreign matter P9, and the tenth foreign matter P10 exist, it may be determined as a foreign matter defective.

According to the present invention, it is possible to detect not only the presence of foreign matters in the multilayered structure 900 but also the location of the foreign matters, so that whether there is an actual foreign matter defect in the multilayered structure 900 and the location of the foreign matters in the multilayered structure 900 There is an advantage of being able to detect accurately. In addition, since it is possible to determine whether a foreign substance is defective in the multi-layered structure 900 through a single inspection process, there is an additional advantage of shortening the inspection time.

Although the embodiments of the present invention have been described with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various different forms, and those skilled in the art to which the present invention pertains. It will be understood that the present invention can be implemented in other specific forms without changing the technical spirit or essential features of the present invention. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not limiting.

10, 20, 30: inspection device
110, 210, 310: stage
130, 230, 330a: first light irradiation unit
130', 230', 330b: second light irradiation unit
330c, 330d: third light irradiation unit, fourth light irradiation unit
150, 250, 350: imaging unit
170, 270, 370: control unit
900: multi-layered structure
910: display panel
930: polarizer
950: resin layer
970: touch panel
990: protective film

Claims (20)

delete delete delete delete delete delete A stage on which a multilayer structure including a first layer and a second layer is mounted on an upper surface;
A first light irradiation unit facing a first side surface of the multilayer structure, providing a first color light to a side surface of the first layer, and providing a second color light to a side surface of the second layer;
An imaging unit located on the stage and configured to receive image information of the multilayer structure by receiving the first color light and the scattered light generated by the second color light; And
A control unit for detecting foreign material information of the multilayer structure based on the image information; Inspection device comprising a. The method of claim 7,
The first light irradiation unit,
A first light source unit for emitting light toward a first side of the multilayer structure;
A first light conversion member located between the first light source part and the first side surface of the multilayer structure, converting the light emitted from the first light source part into the first color light, and the light emitted from the first light source part A first light conversion unit including a second light conversion member for converting light into two colors;
Inspection device comprising a. The method of claim 8,
The first light conversion member is a first color filter,
The second light conversion member is a second color filter having a different color from the first color filter. The method of claim 8,
The first light source unit is an inspection device for emitting white light. The method of claim 8,
The multilayer structure further includes a third layer,
The first light conversion unit,
Further comprising a third light conversion member for converting the light emitted from the first light source to the third color light provided on the side of the third layer,
The color of the third color light is different from the color of the first color light and the second color light. The method of claim 8,
Further comprising a first lens unit located between the first light conversion unit and the first side surface of the multilayer structure and converting the first color light or the second color light converted by the first light conversion unit into a sheet light form Inspection device. A stage on which a multilayer structure including a first layer and a second layer is mounted on an upper surface;
A first light irradiation unit facing the first side surface of the multilayer structure and providing a first color light to the side surface of the first layer;
A second light irradiation unit facing the second side surface of the multilayer structure and providing a second color light to the side surface of the second layer;
An image pickup unit positioned above the stage and receiving scattered light generated by at least one of the first color light and the second color light to obtain image information of the multilayer structure; And
A control unit for detecting foreign material information of the multilayer structure based on the image information;
Inspection device comprising a. The method of claim 13,
The first light irradiation unit,
A first light source unit for emitting a first color light toward a first side of the multilayer structure;
A first light transmission control unit including a first opening corresponding to the first layer;
Inspection device comprising a. The method of claim 14,
The first light irradiation unit,
An inspection apparatus further comprising a first lens unit positioned between the first light transmission control unit and the first side surface of the multilayer structure and converts the first color light transmitted through the first light transmission control unit into a sheet light form. The method of claim 14,
The second light irradiation unit,
A second light source unit emitting second color light toward a second side of the multilayer structure;
A second light transmission control unit including a second opening corresponding to the second layer;
Inspection device comprising a. The method of claim 16,
The second light irradiation unit,
The inspection apparatus further comprising a second lens unit positioned between the second light transmission control unit and the second side surface of the multilayer structure and converts the second color light transmitted through the second light transmission control unit into a sheet light form. The method of claim 13,
The first light irradiation unit and the second light irradiation unit,
An inspection apparatus controlled to simultaneously provide the first color light and the second color light to the multilayer structure by the control unit. The method of claim 13,
The first color light color and the second color light color is different from each other. The method of claim 13,
The multilayer structure further includes a third layer,
A third light irradiation unit facing the third side surface of the multilayer structure and providing a third color light having a color different from the first color light and the second color light to the side surface of the third layer; Inspection device further comprising a.

Images