KR20060053847A - Method for inspecting defects of glass plate and apparatus thereof - Google Patents

Abstract

(Problem) An object of the present invention is to provide a defect inspection method and apparatus for a glass plate that can be detected by imaging with reflected scattered light and can be reliably detected even if it is not detected with imaging with transmitted scattered light. .

(Measures) The defect inspection apparatus 10 of embodiment is the red reflection scattered light which reflected on the upper surface 12B of the glass substrate 12, and the blue reflection scattered light which reflected on the lower surface 12C of the glass substrate 12. And the defect are inspected based on the green reflected scattered light reflected from the end face 12A of the glass substrate 12. In other words, the present invention cuts the transmitted scattered light by the B band cut filter 28 and the R band cut filter 30, thereby inspecting the defects. Therefore, the present invention can detect the image by the reflected scattered light. Even if it is a fault which cannot be detected by imaging, it can reliably detect.

Description

The defect inspection method of the glass plate and its apparatus {METHOD FOR INSPECTING DEFECTS OF GLASS PLATE AND APPARATUS THEREOF}

1 is an enlarged perspective view of a defect inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a side view of the defect inspection apparatus shown in FIG. 1. FIG.

It is explanatory drawing which shows the image image | photographed by the CCD camera which is a fault inspection apparatus shown in FIG.

It is a side view of the fault inspection apparatus which concerns on other embodiment of this invention.

It is a schematic diagram for demonstrating the fault which arises in a glass plate.

(Description of Major Symbols in the Drawing)

10, 50: defect inspection apparatus,

12: glass substrate,

12A: end of glass substrate,

12B: upper surface of the glass substrate,

12C: lower surface of the glass substrate,

13: inspection site,

14: first prism,

16: second prism,

18, 52, 54, 56: CCD camera,

20: image processing apparatus,

22, 24, 26: LED,

28: B band cut filter,

30: R band cut filter,

32: shooting lens,

34: camera body,

36: CCD area sensor,

38: memory,

4O: Automatic Discrimination Device

TECHNICAL FIELD The present invention relates to a defect inspection method of a glass plate and a device for detecting defects such as chipping of the end face of the glass plate and its vicinity, that is, chipping of the glass plate periphery (near the edges), edge defects, and the like, which are not chamfered.

For example, the glass substrate for a display cut | disconnects the plate glass manufactured by the predetermined thickness (for example, about 0.5-2.8 mm) to the magnitude | size corresponding to a product, and chamfers this, or the minute which formed on the surface It is commercialized by grinding to remove unevenness and undulation.

Before shipment, the glass substrate commercialized is inspected by a defect inspection device for defects such as chipping and edge defects, such as chipping and edge defects, and unchamfering, which occur in the cross section and in the vicinity thereof (for example, a patent). Document 1).

Here, the above-described defects will be described, and chipping 1 as shown in FIG. 5 is an extremely small defect occurring in the boundary portion 2D of the upper surface 2B and the end portion 2A of the glass substrate 2, and the edge defect ( 3) is a relatively large defect occurring from the upper surface 2B to the end 2A. In addition, the unchamfered part 4 may generate | occur | produce in the edge part 2A, such as abrasion of a chamfering grindstone, and this also is judged to be a fault. These defects have a predetermined threshold value set to the size thereof, and when the threshold value is exceeded, the glass plate is treated as a defective product.

Moreover, the test | inspection of the said fault with respect to a glass plate is not limited to the glass substrate for a display, but is also performed also in the glass plate used for other uses, such as a glass plate for building and a glass plate for automobiles.

By the way, the defect inspection apparatus disclosed in patent document 1 irradiates the edge part and its vicinity of a glass substrate by spot illumination, for example, image | photographs the upper surface side of a glass substrate with a camera through a prism, and The lower surface side is imaged by the same camera through another prism (paragraph [0017] of Patent Document 1). Then, the obtained image is processed, the presence or absence of a defect is detected, and the size or the like is compared with a predetermined threshold value to determine good or bad.

[Patent Document 1] Japanese Unexamined Patent Publication No. 2002-62267

By the way, in the defect inspection apparatus of the glass plate using light like patent document 1, when the upper surface of a glass plate is imaged with a camera, for example, the reflected scattered light of the illumination irradiated from the upper surface side and the transmitted scattered light of the illumination irradiated from the lower surface side It is to be included. The brightness of the reflected scattered light at this time is usually 10 to 20% of the brightness of the transmitted scattered light, and the transmitted scattered light is predominantly bright.

Here, when the defect which arises in the upper surface of a glass plate can be detected by imaging with reflection scattered light, but it cannot be detected by imaging with transmission scattered light (for example, when a transparent and shallow edge defect etc. generate | occur | produce) ), In the defect inspection apparatus of Citation Document 1, the reflected scattered light due to the defect generated on the upper surface side is imaged by being superimposed on the transmitted scattered light that is brighter than the light, so that the SN ratio is deteriorated and the problem that the defect cannot be detected. there was.

This invention is made | formed in view of such a situation, and an object of this invention is to provide the defect inspection method and apparatus of a glass plate which can detect the fault which generate | occur | produced in the cross section of the glass plate and its vicinity, ie, the periphery of glass plate (near edge). It is done.

Means to solve the problem

In order to achieve the above object, the invention according to claim 1 irradiates any primary color light other than the primary color light toward the other surface of the glass plate while irradiating the primary color light of any one of the three primary colors toward one surface of the glass plate. A defect inspection method of inspecting a defect of a glass plate by capturing one surface of the glass plate by an image pickup means through a filter for cutting primary color light irradiated toward the first prism and at least the other surface. The other surface is picked up by the imaging means through a filter for cutting the primary prism irradiated toward the second prism and at least the one surface, and the one surface of the glass plate based on the image picked up by the imaging means, And a defect inspection method which detects a defect existing on the other side by a detection means.

In order to achieve the above object, the invention according to claim 5 includes a first illuminating means for irradiating the primary color light of any one of the three primary colors toward one surface of the glass plate, and a circle other than the primary color light toward the other surface of the glass plate. A defect inspection apparatus for inspecting a defect of a glass plate by using a second lighting means for irradiating color light, wherein one surface of the glass plate is picked up through a filter that cuts primary colors of light irradiated toward the first prism and at least the other surface. In addition, based on the image pickup means which picks up the other surface of the said glass plate with the 2nd prism and the filter which cuts the primary color light irradiated toward at least one said surface, based on the image picked up by the said imaging means, Provided is a defect inspection apparatus comprising a detection means for detecting a defect present on one surface of the glass plate and the other surface.

According to the invention of Claims 1 and 5, the primary color light of any one of the three primary colors is irradiated from the first lighting means toward one surface of the glass plate, and the other primary color light is directed from the second lighting means toward the other surface of the glass plate. Irradiate different primary colors of light. And the one surface of the glass plate is imaged by the imaging means via the filter which cuts the 1st prism and the primary color light irradiated toward the said other surface at least, and the other surface of the glass plate is the 2nd prism and at least said one side. The imaging means picks up an image through the filter for cutting the primary color light emitted toward the surface. And the fault which exists in one surface and the other surface of a glass plate is detected by a detection means based on the image image | photographed by this imaging means.

That is, the present invention has a basic concept of forming a filter for cutting another primary color light in the imaging system on the side irradiating the primary color light, and inspecting the defect with the optical image in which the other primary color light is cut. Therefore, the transmitted scattered light is cut by the filter and the reflected scattered light is incident on the imaging means, so that the defect generated in the glass plate can be reliably detected.

In the invention according to claim 2, in the invention of the defect inspection method according to claim 1, the light is irradiated toward the end of the glass plate, and the end of the glass plate is picked up by the image pickup means, and the image picked up by the image pickup means. Based on this, the defects existing at the end of the glass plate are detected by the detecting means.

Invention of Claim 6 has the 3rd illumination means which irradiates light toward the edge part of the said glass plate in the invention of the fault inspection apparatus of Claim 5, The edge part of a glass plate is imaged by the said imaging means, Based on the image picked up by the above-mentioned, the fault which exists in the edge part of the said glass plate is detected by the said detection means, It is characterized by the above-mentioned.

According to the invention of Claims 2 and 6, the light is irradiated from the third illumination means toward the end of the glass plate, and the end of the glass plate is imaged by the image pickup means, and the image of the glass plate is based on the image picked up by the image pickup means. The defect which exists in the edge part is detected by the said detection means. The edge part of a glass plate can also be imaged by the same imaging means. The light irradiated from the third illuminating means is not particularly limited because the influence of the transmitted scattered light on the image capturing means is small, that is, one of the light of R, G, and B may be white light.

In order to achieve the above object, the invention according to claim 3 irradiates any primary color light other than the primary color light toward the other surface of the glass plate while irradiating the primary color light of any one of the three primary colors toward one surface of the glass plate. A defect inspection method of inspecting a defect of a glass plate by carrying out imaging of one surface of the glass plate by a first imaging means through a filter for cutting primary color light irradiated toward at least the other surface, and the other surface of the glass plate. Is picked up by the 2nd imaging means through the filter which cuts the primary color light irradiated toward at least one said surface, and one side of the said glass plate based on the image picked up by the said 1st imaging means and the 2nd imaging means. A defect inspection method of a glass plate is provided by detecting the defect which exists in a surface and the other surface by a detection means.

In order to achieve the above object, the invention according to claim 7 includes a first illuminating means for irradiating the primary color light of any one of the three primary colors toward one side of the glass plate, and a circle other than the primary color light toward the other side of the glass plate. A defect inspection apparatus for inspecting a defect of a glass plate by using a second illuminating means for irradiating color light, wherein the first imaging image captures one surface of the glass plate through a filter that cuts primary color light irradiated toward at least the other surface. Means for photographing the other surface of the glass plate through a filter for cutting the primary color light irradiated toward at least the one surface, and an image captured by the first image pickup means and the second image pickup means. The defect inspection apparatus of the glass plate was provided based on the detection means which detects the fault which exists in the one surface and the other surface of the said glass plate. Provided.

According to the invention of Claims 3 and 7, the primary color light of any one of the three primary colors is irradiated from the first lighting means toward one surface of the glass plate, and the other primary color light is directed from the second lighting means toward the other surface of the glass plate. Irradiate other primary colors. And the circle | surface which irradiates the other surface of the glass plate at least toward the said one surface, while image | photographing one surface of the glass plate by the 1st imaging means through the filter which cuts the primary color light irradiated toward the said other surface at least. An image is picked up by the second imaging means through a filter for cutting color light. And the fault which exists in one surface and the other surface of a glass plate is detected by a detection means based on the image picked up by the 1st and 2nd imaging means. Basically, although it is the same as invention of Claim 1, 5, you may form an imaging means for every imaging system like Claim 3, 7. When a CCD camera is applied as the imaging means, since a compact and lightweight CCD camera is commercially available at low cost, the device can be made compact and can be provided at low cost, without increasing the size and cost of the apparatus.

In the invention according to claim 4, in the invention of the defect inspection method according to claim 3, the light is irradiated toward the end of the glass plate to image the end of the glass plate by the third imaging means, and the image is captured by the third imaging means. Based on the image, the defect which exists in the edge part of the said glass plate is detected by the said detection means, It is characterized by the above-mentioned.

Invention of Claim 8 WHEREIN: In the invention of the fault inspection apparatus of Claim 7, it has 3rd lighting means which irradiates light toward the edge part of the said glass plate, and 3rd imaging means which image | photographs the edge part of a glass plate, and is 3rd Based on the image picked up by the image pick-up means, the defects existing at the end of the glass plate are detected by the detection means.

According to invention of Claim 4 and 8, light is irradiated toward the edge part of a glass plate from a 3rd lighting means, the edge part of a glass plate is imaged by a 3rd imaging means, and it exists in the edge part of a glass plate based on the image picked up. The defect to be detected is detected by the detection means. Basically, although it is the same as invention of Claim 2, 6, you may separately form 3rd imaging means which image | photographs an edge part like Claim 4, 8.

Best Mode for Carrying Out the Invention

EMBODIMENT OF THE INVENTION Hereinafter, the defect inspection method of the glass plate concerning this invention and preferable embodiment of this apparatus are described in detail along an accompanying drawing.

The defect inspection apparatus 10 shown in FIG. 1 test | inspects the fault (refer FIG. 5) which arises in the cross section of the glass substrate 12 for liquid crystal displays, and its vicinity, ie, the peripheral part (near edge) of the glass substrate 12. FIG. The main part perspective view is shown. 2 is a side view of the defect inspection apparatus 10 shown in FIG. 1, and the arrow in the figure has shown the light irradiation direction and the reflection direction. This defect inspection apparatus 10 is arrange | positioned adjacent to the conveying apparatus which is not shown in figure which conveys the glass substrate 12, and the fault is detected by the defect inspection apparatus 10 during the glass substrate 12 conveyance.

The defect inspection apparatus 10 uses the 1st prism 14, the 2nd prism 16, a CCD camera (equivalent to imaging means; 18), and an image processing apparatus (equivalent to detection means; 20) like FIG. It is set as the main structure, 1st prism 14 is arrange | positioned facing the upper surface (equivalent to one surface; 12B) of the glass substrate 12, and the 2nd prism 16 is the lower surface of the glass substrate 12 ( It corresponds to the other side; It is arrange | positioned facing 12C). In addition, the said upper surface and lower surface of the glass substrate 12 demonstrated here are the surface of 12 A of vicinity of the edge part of the glass substrate 12. As shown in FIG.

The 1st, 2nd prism 14 and 16 is the prism of the same shape in which the entrance surface 14A, 16A, the reflection surface 14B, 16B, and the emission surface 14C, 16C were formed. According to the first and second prisms 14 and 16, as shown in FIG. 2, the light beams incident on the incident surfaces 14A and 16A are totally reflected at the reflecting surfaces 14B and 16B and are converted in the 90 ° direction to emit light. It exits from surface 14C, 16C outside. The first and second prisms 14 and 16 are arranged such that the respective entrance surfaces 14A and 16A face each other with the glass substrate 12 interposed therebetween, while the exit surfaces 14C and 16C are coplanar. It is arranged to be located on the image.

The CCD camera 18 is arrange | positioned facing the edge part 12A so that the edge part 12A of the glass substrate 12 clamped between the 1st prism 14 and the 2nd prism 16 may be directly image | photographed. In addition, the CCD camera 18 is arranged at a position to image the light beam emitted from the emission surface 14C of the first prism 14, and the light beam emitted from the emission surface 16C of the second prism 16. It is arrange | positioned at the position which image | photographs. Thereby, the camera 18 can simultaneously image the edge part 12A, the upper surface 12B, and the lower surface 12C which are the test | inspection site 13 of the glass substrate 12 like FIG.

In addition, the defect inspection apparatus 10 is provided with many illumination means for illuminating the inspection part 13.

These lighting means are the LED 22,22 which irradiates red primary color light R toward the upper surface 12B of the glass substrate 12, and the blue primary color light toward the lower surface 12C of the glass substrate 12. LED 24 and 24 which irradiate B, and LED 26 which irradiate green G primary color light toward the edge part 12A of the glass substrate 12 are comprised.

The LEDs 22 and 22 are disposed at positions irradiating the upper surface 12B of the glass substrate 12 through the first prism 14, and the LEDs 24 and 24 are also similarly provided with the second prism ( It is arrange | positioned at the position which irradiates the upper surface 12B of the glass substrate 12 via 16). In this way, by irradiating the upper surface 12B or the lower surface 12C with two or three or more LEDs, respectively, the light receiving amount distribution of the reflected scattered light reflected from the upper surface 12B and the lower surface 12C is examined. 13) It can be approached uniformly in the whole area, and the inspection accuracy can be improved.

Moreover, the B band cut filter 28 is arrange | positioned facing the exit surface 14C of the 1st prism 14. As shown in FIG. The B band cut filter 28 is a filter which cuts blue light, whereby blue light of the light emitted from the exit surface 14C of the first prism 14 is cut by the B band cut filter 28. The light other than that is imaged by the CCD camera 18. In other words, the transmitted scattered light that is irradiated from the blue LEDs 24 and 24 and transmitted through the glass substrate 12 is cut by the B band cut filter 28 and thus is not captured by the CCD camera 18.

Similarly, the R band cut filter 30 is disposed opposite to the exit surface 16C of the second prism 16. The R band cut filter 30 is a filter which cuts red light, whereby red light of the light emitted from the exit surface 16C of the second prism 16 is cut by the R band cut filter 30. The light other than that is imaged by the CCD camera 18. That is, transmitted scattered light irradiated from the red LEDs 22 and 22 and transmitted through the glass substrate 12 is cut by the R band cut filter 30 and thus is not captured by the CCD camera 18.

Green light irradiated from the LED 26 is reflected at the end portion 12A of the glass substrate 12, and the reflected scattered light is directly imaged by the CCD camera 18. As a result, the CCD camera 18 includes the red reflected scattered light reflected from the upper surface 12B of the glass substrate 12, the blue reflected scattered light reflected from the lower surface 12C of the glass substrate 12, and the glass substrate. The green reflected scattered light reflected by the end portion 12A of (12) is simultaneously imaged.

The camera 18 is composed of a photographing lens 32 and a camera body 34. In the camera main body 34, the CCD area sensor 36 shown with the broken line in FIG. 2 is arrange | positioned, and the light receiving surface of this CCD area sensor 36 is provided in the imaging position of the imaging lens 32. As shown in FIG. The video signal output from the CCD area sensor 36 is output to the image processing apparatus 20 of FIG.

The image processing apparatus 20 acquires a feature amount such as a roll area, a dark area or a total area from the video signal output from the CCD sensor 36. And the image processing apparatus 20 compares the feature amount with each threshold value memorize | stored in the memory 38, and controls the automatic discrimination apparatus 40, when a feature amount exceeds a threshold value, The glass substrate 12 is distinguished as a defective product. In addition, when the level of the video signal exceeds a predetermined threshold, it may be determined that a defect exists.

Next, the operation of the defect inspection apparatus 10 configured as described above will be described.

While operating the defect inspection apparatus 10 in the state of FIG. 1, each LED 22, 24, 26 is turned on to illuminate the inspection region 13 of the glass substrate 12. And the glass substrate 12 is conveyed in the arrow direction in FIG. 1 by a conveyance apparatus which is not shown in figure, and the defect inspection of the glass substrate 12 is started.

In the defect inspection, the CCD camera 18 includes red reflected scattered light reflected from the upper surface 12B of the glass substrate 12, blue reflected scattered light reflected from the lower surface 12C of the glass substrate 12, and The green reflected scattered light reflected by the end portion 12A of the glass substrate 12 is simultaneously imaged. 3 shows an image of the glass substrate 12 captured by the CCD camera 18.

And when the video signal output from the CCD sensor 36 of the camera 18 is output to the image processing apparatus 20, the image processing apparatus 20 will feature the amount of features, such as an area | region, from the video signal. Get. Then, the image processing apparatus 20 compares the feature amount with each threshold stored in the memory 38. And when the feature amount exceeds the threshold, the automatic discrimination apparatus 40 is controlled to distinguish the glass substrate 12 as a defective product.

Thus, the defect inspection apparatus 10 of embodiment is red reflection scattered light which reflected on the upper surface 12B of the glass substrate 12, blue reflection scattered light which reflected on the lower surface 12C of the glass substrate 12, and Based on the green reflected scattered light reflected from the end portion 12A of the glass substrate 12, that is, the scattered light is cut by the B band cut filter 28 and the R band cut filter 30 to inspect the defect. For this reason, it is possible to detect in imaging with reflected scattered light, but it is possible to reliably detect even a defect (for example, transparent and shallow edge defect) that cannot be detected in imaging with transmitted scattered light.

Moreover, in embodiment, although the upper surface 12B was irradiated with red light and the lower surface 12C was irradiated with blue light, it is not limited to this. In short, the present invention has a basic concept of forming a filter for cutting another primary color light in the imaging system on the side irradiating the primary color light and inspecting the defect with the optical image in which the other primary color light is cut. Therefore, the upper surface 12B may be irradiated with blue light, for example, and the lower surface 12C may be irradiated with red light. In this case, the R band cut filter 30 is disposed on the upper surface 12B side, and the lower surface 12C What is necessary is just to arrange | position B band cut filter 28 to the side. In addition, although LED which irradiates green light is applied as LED26 which is a 3rd lighting means, since this influence of the transmitted scattered light to the CCD camera 18 is small, it is not specifically limited. That is, one of the light of R, G, and B may be sufficient, or white light, such as a fluorescent lamp, may be sufficient.

Moreover, in embodiment, although the illumination light from LED 22,24 was irradiated to the inspection part 13 through the 1st prism 14 and the 2nd prism 16, it is not limited to this, The 1st prism (14) You may directly irradiate the inspection site 13 without passing through the second prism. In addition, the luminaire is not limited to the LED, and the light guide cable is provided in succession from the light source of primary color light formed separately from the defect inspection apparatus 10, and the light guide cable is connected to the inspection site 13 from the light exit end of the light guide cable. You may make it irradiate color light.

4 is a side view showing the configuration of the defect inspection apparatus 50 of another embodiment, and the same or similar members as those in the defect inspection apparatus 10 shown in FIG. 2 are denoted by the same reference numerals, and description thereof will be omitted.

The defect inspection apparatus 50 of FIG. 4 formed the CCD cameras 52, 54, 56 for every imaging system, without using a prism, As these CCD cameras 52, 54, 56 are shown in FIG. A CCD camera equipped with an area sensor or a line sensor having a smaller number of pixels than the CCD camera 18 is applied.

According to this defect inspection apparatus 50, in the CCD camera 52 which image | photographs the upper surface 12B of the glass substrate 12, the blue light (blue transmission scattered light) from the LED 24 is a B band cut filter 28 ), Red reflected scattered light reflected from the upper surface 12B of the glass substrate 12 is imaged. In addition, since the red light (red transmitted scattered light) from the LED 22 is cut by the R band cut filter 30 in the CCD camera 54 which image | photographs the lower surface 12C of the glass substrate 12, glass Blue reflected scattered light reflected by the lower surface 12C of the substrate 12 is imaged. And the CCD camera 56 image | photographs the green reflection scattered light which reflected at the edge part 12A of the glass substrate 12. FIG. The image processing apparatus 20 (refer FIG. 1) detects the fault (refer FIG. 5) which generate | occur | produced in the glass substrate 12 based on the video signal output from CCD camera 52, 54, 56. FIG. This detection method is omitted since it has been described above.

Thus, even if CCD cameras 52, 54, 56 are formed for each imaging system without using a prism, defects generated in the glass substrate 12 can be reliably detected in the same manner as in the defect inspection apparatus 10 of FIG. have.

Japanese Laid-Open Patent Publication No. Hei 4-37711 discloses a method for inspecting a color liquid crystal display panel. This inspection method uses a filter which selectively extracts the primary color corresponding to each color of the color filter from the light source of the white light to the glass substrate in which the color filter for color display is incorporated, and through each filter, the primary color light Is a method of inspecting the presence or absence of a defect of a color filter for each color. This inspection method is similar to the present invention in that primary color light is used as inspection light, but the present invention forms a filter for cutting another primary color light in an imaging system on the side to which the primary color light is irradiated. The basic concept is to inspect the defect by the optical image which cut color light. Therefore, the inspection method is fundamentally different from the inspection method of the present invention and Japanese Patent Laid-Open No. 4-37711.

In FIG. 1 of JP-A-2003-148927, a three-dimensional shape inspection apparatus using an active sensing method is disclosed. The inspection apparatus includes a ring-shaped light emitting body that transmits light of different wavelengths (red light, green light, blue light) to the inspection object, and a color CCD camera into which the reflected light of the light reflected from the inspection object is incident. When light of different wavelengths is irradiated to the inspection object 4 at different irradiation angles, the inspection object seen from the color CCD camera is colored by different colors depending on the shape of the surface. By analyzing the coloring pattern of this image, the uneven | corrugated state of a test object is judged. This inspection method is similar to the present invention in that primary color light is used as inspection light, but the present invention forms a filter for cutting another primary color light in an imaging system on the side to which the primary color light is irradiated. The basic concept is to inspect the defect by the optical image which cut color light. Therefore, the inspection method is completely different from the present invention and Japanese Patent Laid-Open No. 2003-148927.

According to the defect inspection method and apparatus of the glass plate which concern on this invention as above-mentioned, while irradiating the primary color light of any one of the three primary colors from the 1st lighting means toward the one surface of a glass plate, Image pick-up by means of imaging means through a filter for irradiating primary color light other than the primary color light toward the other side of the glass plate, and cutting one side of the glass plate to the first prism and at least the primary color light irradiated toward the other side In addition, the other surface of the glass plate is picked up by the imaging means through a filter for cutting the primary prism irradiated toward the second prism and at least the one surface, and the glass plate based on the image picked up by the imaging means. Defects existing on one side and the other side of the surface are detected by the detecting means, so that the defects generated on the glass plate can be reliably detected. Can.

Claims (8)

As a defect inspection method of irradiating the primary color light of any one of the three primary colors toward one side of the glass plate, and irradiating other primary color light other than the primary color light toward the other side of the glass plate, the defect inspection of the glass plate, One surface of the glass plate is picked up by the image pickup means through a filter for cutting the primary color light irradiated toward the first prism and at least the other surface, and the other surface of the glass plate is at least the one surface of the second prism. Imaging by the imaging means through a filter for cutting the primary color light emitted toward The defect inspection method which detects the fault which exists in the one surface and the other surface of the said glass plate by the detection means based on the image image | photographed by the said imaging means. The defect of the glass plate of Claim 1 which irradiates light toward the edge part of the said glass plate, image | photographs the edge part of the glass plate by the said imaging means, and based on the image image | photographed by the said imaging means, the fault which exists in the edge part of the said glass plate is said It detects by a detection means, The defect inspection method of a glass plate characterized by the above-mentioned. As a defect inspection method of irradiating the primary color light of any one of the three primary colors toward one surface of the glass plate, and irradiating other primary color light other than the primary color light toward the other surface of the glass plate, the defect inspection of the glass plate, Primary color light irradiated on the other side of the glass plate at least toward the one side while image | photographing the one surface of the glass plate by the 1st imaging means through the filter which cuts the primary color light irradiated toward the said other surface at least. Is picked up by the second imaging means through a filter for cutting The defect inspection method of a glass plate characterized by detecting the fault which exists in the one surface and the other surface of the said glass plate based on the image image | photographed by the said 1st imaging means and the 2nd imaging means. 4. The defect of Claim 3 which irradiates light toward the edge part of the said glass plate, image | photographs the edge part of a glass plate by a 3rd imaging means, and exists in the edge part of the said glass plate based on the image imaged by the 3rd imaging means. Detecting defects by the detection means. The defect of a glass plate using the 1st lighting means which irradiates the primary color light of any one of three light primary colors toward one side of a glass plate, and the 2nd lighting means which irradiates other primary color light other than the said primary color light toward the other surface of a glass plate. As a defect inspection device for inspecting One surface of the glass plate is imaged through a filter that cuts the first prism and the primary color light radiated toward at least the other surface, and the other surface of the glass plate is irradiated toward the second prism and the at least one surface. Imaging means for imaging through a filter for cutting primary color light to be used; Detection means for detecting defects existing on one side and the other side of the glass plate based on the image picked up by the imaging unit; The defect inspection apparatus provided with. The edge part of the said glass plate of Claim 5 which has the 3rd illumination means which irradiates light toward the edge part of the said glass plate, image | photographs the edge part of the glass plate by the said imaging means, and based on the image imaged by the imaging means. The defect inspection apparatus of the glass plate characterized by detecting the fault which exists in the said detection means. The defect of a glass plate using the 1st lighting means which irradiates the primary color light of any one of three light primary colors toward one side of a glass plate, and the 2nd lighting means which irradiates other primary color light other than the said primary color light toward the other surface of a glass plate. As a defect inspection device for inspecting First imaging means for imaging one surface of the glass plate through a filter for cutting primary color light irradiated toward at least the other surface; Second imaging means for imaging the other side of the glass plate through a filter for cutting the primary color light irradiated toward at least the one side; Detection means for detecting defects present in one surface and the other surface of the glass plate based on the images picked up by the first imaging means and the second imaging means; The defect inspection apparatus of the glass plate characterized by the above-mentioned. The said glass plate of Claim 7 which has the 3rd illumination means which irradiates the light toward the edge part of the said glass plate, and the 3rd imaging means which image | photographs the edge part of the glass plate, and is based on the image image | photographed by the 3rd imaging means. The defect inspection apparatus of the glass plate characterized by detecting the defect which exists in the edge part of this by the said detection means.

Images