4 5 9 1 3 0 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（1 ) 【發明背景】 本發明爲適用於檢測液晶顯示（以下稱L C D )用途等 相關玻璃基板的缺陷檢查用基板檢查裝置。 LCD用玻璃基板的缺陷檢查’計進行所謂巨視觀察及 微視觀察兩種》巨視觀察係將照明光照射在玻璃基板表面 ，由檢測人員以目視觀察反射光的光學變化以檢測出玻璃 基板表面的傷痕等缺陷。微視觀察係將巨視觀察所檢查出 來的缺陷部分以顯微鏡放大加以觀察。 檢測時如使用同一夾具進行巨視觀察與微視觀察時， 是將玻璃基板保持在基板檢查裝置的夾具上，將夾具朝向 檢測員加以前後擺動以目視觀察玻璃基板的表面。如需觀 察背面時，可將夾具反轉，如上所述將夾具朝向檢測員加 以前後擺動以目視觀察玻璃基板的背面》 對於巨視觀察所檢査出的缺陷加以微視觀察時，可將 上述夾具保持水平狀態在水平面內移動，由固定在玻璃基 板上方的顯微鏡進行巨視觀察。 如分別以不同裝置進行巨視觀察及微視觀察時，在完 成巨視觀察後，將玻璃基板由巨視夾具取下，以滾輪等移 至微視觀察用的另一夾具進行觀察。 【發明槪要】 近年隨著L C D的大型化，其複數面的坡璃基板亦有大 型化趨勢，其重量亦隨之增加。支撐這種大型玻璃基板的 夾具，在進行微視觀察時容易受振動的影響，爲防止振動 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------- Λ 1 裝 - ----訂------I!竣 (請先閱讀背面之注意事項再填寫本頁) 4- 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 _____B7____ 五、發明說明（2) 的產生而有提高夾具重量與強度的需求。不過使用同一夾 具進行巨視觀察與微視觀察時，如提高夾具重量及強度， 雖在微視觀察時不易產生振動，但在巨視觀察時爲擺動重 大夾具需要大馬力的馬達及考量抑制該馬達所產生內部振 動，因此夾具擺動的自由度亦受限制。 如分別在不同地方進行巨視觀察及微視觀察時，在完 成巨視觀察後，需將玻璃基板由夾具取出，以滾輪等移置 微視觀察夾具。因此玻璃基板的搬動距離將增長，玻璃基 板的檢測作業亦更加煩雜，將增加其作業時間。如在同一 地方並排設置巨視檢查裝置與微視檢查裝置時，因兩裝置 間需配置轉送玻璃基板的滾輪裝置，不但在設計及配置的 自由度將受限制，裝置所需空間亦需加大。 本發明的目的在提供改善巨視觀察時的振動影響，及 在短時間內有效且容易地進行玻璃基板檢查的基板檢查裝 置。 爲解決上述課題，本發明對於目視檢查基板的巨視觀 察或將前述基板的影像加以放大檢査的微視觀察用基板檢 查裝置，提供具備持穩前述基板進行前述微視觀察的微視 檢查用夾具，及持穩前述基板以可擺動自如地裝設在鄰接 於前述微視檢查用夾具且可插脫在前述微視檢查用夾具上 方的巨視檢查用夾具爲特徵的基板檢查裝置。 又本發明在上述基板檢查裝置中，提供微視觀察用頭 部與前述微視檢查用夾頭，在平行於前述基板面的平面內 ，可移動自如地狀態設置爲特徵的基板檢查裝置。 ^- (請先閱讀背面之注意事項再填寫本頁) -Γ - 裝 --—丨訂-------！故 經濟部智慧財產局員工消費合作杜印製 A7 ____B7 ________ 五、發明說明（3) 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，爲以經過前述基板的方向之一爲軸可擺動前述 基板爲特徵的基板檢查裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，爲可向前述退避方向成交差方向移動爲特徵的 基板檢查裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，其中心係位於前述基板面上，且可旋轉前述基 板爲特徵的基板檢查裝置 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，爲可將前述基板以所需傾斜角加以傾斜狀態下 ，向前後方向移動爲特徵的基板檢查裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，可在前述基板近於垂直的傾斜狀態下，將前述 基板向前後方向（γ方向）、平行方向（X方向）、昇降 方向（Z方向）移動爲特徵的基板檢査裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 査用夾具，是以構成整體方式裝有指針供檢測基板上缺陷 的座標位置，爲特徵的基板檢査裝置。 再以本發明在上述基板檢查裝置中*提供前述巨視檢 查用夾具，是在前述巨視檢查用夾具上方或退避位置，可 進行前述巨視觀察爲特徵的基板檢查裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，並在此巨視檢查用夾具前端部位，設有旋轉自 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ill· — —!— I I ---II ^ — — — — — — —II r (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 459130 A7 __. _B7_. _ 五、發明說明（4) 如且可在軸方向旋轉的支撐構件的夾具機構爲特徵的基板 檢查裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，在其前端部位，設有旋轉自如且以軸方向旋轉 的支撐構件，及旋轉此支撐構件以擺動前述巨視檢查用夾 具的擺動旋轉機構爲特徵的基板檢查裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，在其前端部位，設有旋轉自如且以軸方向旋轉 的支撐構件，及備有可整體平行移動這些檢査用夾具及支 撐構件的平行移動機構爲特徵的基板檢查裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具，在其前端部位，設有旋轉自如且以軸方向旋 轉的支撐構件，及裝有可整體昇降這些巨視撿查用夾具及 支撐構件的昇降機構爲特徵的基板檢查裝置。 再以本發明在上述基板檢查裝置中，提供前述巨視檢 查用夾具’此巨視檢查用夾具前端部位，設有旋轉自如且 以軸方向旋轉的支撐構件，及旋轉此支撐構件以擺動前述 巨視檢査用夾具的擺動旋轉機構，及可整體平行移動這些 檢查用夾具及支撐構件的平行移動機構，及可整體昇降這 些巨視檢査用夾具及支撐構件的昇降機構爲特徵的基板檢 查裝置。 【發明的實施形態】 玆參照附圖，將本發明的實施形態之一說明如下。 本if張尺度適用中國國家標準（CNS)A4規格（210 X 297公楚) (請先閱讀背面之注f項再填窝本頁) 裝--------訂---------破 45 91 3 Ο Α7 __ Β7_____ 五、發明說明（5 ) (請先閱讀背面之注意事項再填寫本頁) 第1圖及第2圖爲適用於LCD用玻璃基板缺陷檢查的基 板檢查裝置構成圖，第1圖爲正視圖，第2圖爲下視圖。此 基板檢查裝置爲具備可收納複數張玻璃基板1的卡匣站2， 及檢查裝置3(執行對玻璃基板1進行目視檢查的巨視觀察 或將玻璃基板ί的畫像加以放大進行檢查的微視觀察工作 )，及自動運送機4 (取出收納在卡厘站2內待檢查玻璃基 板1並持穩送往檢查裝置3，將檢查裝置3已檢查過的玻璃 基板i取出並持穩送回卡匣站2)，以及夾具機構5(持穩 玻璃基板1並可向X方向、Y方向及Z方向移動、擺動、旋 轉自如的夾具）。這些卡匣站2、自動運送機4、檢査裝置 3及夾具機構5，係以X方向依序配置，如第1圖所示*> 上述卡匣站2，爲備有收納複數張待檢査玻璃基板1的 第1卡匣2a，及收納複數張已檢査玻璃基板1的第2卡匣 2b。這些第1及第2卡匣2a、2b係平行於自動運送機4的 移動方向（箭頭方向B : Y方向）並排配列。 經濟部智慧財產局員工消費合作社印製 自動運送機4可向箭頭A方向移動，備有一對前端裝 有手的多關節機械臂4a、4b之外，另設一對以上下配置可 同時運送兩張玻璃基板1的手，採用雙臂方式。此自動運 送機4，是以機械臂4a將收納於第1卡匣2a的待檢查玻璃 基板1取出持穩，持續向箭頭A方向移動後旋轉1 80度，定 位於檢查裝置3 ’由另一自動運送機4b將放置在微視檢查 用夾具6的已檢査玻璃基板1取出，同時以另一機械臂4a 將待檢查的玻璃基板放置於檢查裝置3內微視檢查用夾具6 。然後將自動運送機4移向箭頭A方向後旋轉ί 8 0度，定位 本紙張尺度適用申國國家標準（CNS)A4規格（2】〇 X 297公釐） ™ s ~ — — 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4 5 9 13 0 A7 _____B7____ 五、發明說明（0 ) 於第2卡匣2b，將另一機械臂4b所持已檢査玻璃基板1收 納於第2卡匣2b。然後重復上述將自動運送機4移向箭頭A 方向定位於第1卡匣2 a的動作。 又自動運送機4，可昇降自如地沿箭頭C方向（Z方向 )調整高度，以便取出收納於第1卡匣2 a內的待檢查玻璃 基板1，及載置或取出檢查裝置3內的玻璃基板I，以及將 已檢查玻璃基板1收納於第2卡匣2b位置。 檢查裝置3備有持穩觀察玻璃基板1的微視檢查用夾具 6，以便在同一卡匣站內進行巨視觀察及微視觀察。此微視 檢查用夾具6，係固定於檢查裝置3的基盤上，其下方以含 蓋玻璃基板1範圍以指定間隔配置複數個昇降釘7，可昇降 (Z方向）將微視檢查用夾具6上面的玻璃基板丨提昇指定 高度。 檢查裝置3的上部，裝有巨視觀察用照明裝置8。微視 檢查用夾具的上部，裝有微視觀察用顯微鏡9 (微視觀察 用頭部）。此顯微鏡9，對於門型手臂9 a可移動自如（X 方向）地加以裝設。門型手臂9a可沿著挾住檢查用夾具兩 側的導軌（Y方向）移動。因此顯微鏡9可對微視檢査用 夾具6上的玻璃基板1在}CY方向自由移動。 如第3圖所示，夾具機構5係在旋轉軸1 〇介由內藏馬 達的旋轉源1 1設置支撐構件1 2，貫穿支撐構件1 2的前端 部位1 3且固定在旋轉軸1 3設置E字形巨視檢查用夾具i 4 所構成。 此巨視檢查用夾具1 4，係與旋轉軸1 〇 —體，可由微視 ---- ΙΓΙΙΓ1Ι — —--裝------— 訂·'--I----線 (請先閱讀背面之注意事項再填寫本頁) 5 9 1 3 0 Α7 _ - Β7 五、發明說明（7) 檢查用夾具6上方朝後退的X方向（旋轉軸】〇的軸方向， 朝微視檢查用夾具6上方可插脫方向）移動，且可對旋轉 軸10擺動 '傾動、反轉（箭頭C方向），對上述後退方向 (X方向）成父差方向移動（前後方向：γ方向，平行方 向、昇降方向：Z方向），微視檢査用夾具6可在玻璃基板 1平面上大約中心部位旋轉（箭頭D方向）。亦可將玻璃基 板1依箭頭C方向反轉，因此可將玻璃基板的背面反轉，朝 向檢測人員Q。 這種巨視檢查用夾具1 4，可將玻璃基板.丨以傾斜狀態 加以前後移動’亦可將玻璃基板i以傾斜狀態加分別以前 後、平f了、昇降等方向移動。 具體而S ’巨視檢查用夾具14，是以上述旋轉軸10爲 中心（X軸方向爲中心）以箭頭C方向旋轉自如地加以設 置。又巨視檢查用夾具14是以支撐構件12的前端部位的旋 轉軸1 3爲旋轉中心’可向前頭〇方向旋轉自如地加以設置 。其中使巨視檢查用夾具14旋轉的機構，是由旋轉源1丨的 動力軸1 5 (旋轉軸）以同步皮帶丨7將位於支撐構件丨2下 面由不同半徑所構成的皮帶輪旋轉體〖6相連接，此旋轉體 1 6與旋轉軸1 3是以同步皮帶1 8加以相連接。 當旋轉源1 1旋轉驅動，將介由同步皮帶丨7傳到旋轉體 l· 6，再介由同步皮帶1 8傳到旋轉體丨3將巨視檢查用夾具 14加以旋轉，如第4圖（a ) ( b )所示。該圖（a )爲支 撐構件1 2與巨視檢查用夾具14，朝向同一方向的狀態，稱 爲夾具旋轉零度。同一圖（b )爲巨視檢查用夾具1 4對支 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐_ (請先閱讀背面之注f項再填寫衣頁) 裳-!1訂丨丨1!線 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 4 5 9 1 3 Ο A7 B7 五、發明說明（） 撐構件1 2旋轉90度狀態，稱爲夾具旋轉90度。 又第3及4圖爲巨視檢查用夾具Η上載有LCD用玻璃 基板的狀態。 又爲指示缺陷的X y座標的指針手段’在巨視檢查用夾 具14備有類似第5圖所示構成雷射指針用雷射光源1 9 a、 19b。這些雷射光源19a、19b設在巨視檢查用夾具14框架 上（巨視檢查用夾具1 4的周緣）所形成的各導軌20a ( X 座標）、20b ( y座標）上並可移動自如。如在巨視檢查用 夾具14上設定基準座標系x-y之後，各雷射光19a、19b所 射出雷射光L 1、L2交差點的X、y座標將與各雷射光源 1 9a、1 9b位置的X座標與y座標一致，所以可由這兩座標 求得雷射光L 1、L2交差點的xy座標。雷射光源I 9a的位 置表示X座標，雷射光源1 9b的位置表示y座標。因此只要 移動雷射光源1 9a、19b，將雷射光L1、L2的交差點對準 玻璃基板1上面的缺陷，就可求出缺陷的座標。 又以雷射光源19a、19b分別連接在馬達與皮帶，由馬 達的旋轉驅動，可在各標尺導軌20a、20b上自動移動的構 成爲宜。至於各射光源19a、19b的移動可由後述操作部27 的檢測人員Q來操作。 又指針手段並不限於第5圖所示的X Y雷射指針，但由 於基板1會擺動、旋轉，爲正確且容易求出缺陷位置的座 標，以裝設在巨視檢查用夾具1 4上爲宜。 又巨視檢查用夾具1 4上面，設有的吸著機構以持穩玻 璃基板1的周緣部。此吸著機構具有足夠的吸著力，不致 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ----^-------1| > 裝！ 訂--- - ----線 7 {請先閱讀背面之注意事項再填寫本頁) 4 5 9 1 3 0 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（9) 因夾具機構5的擺動、反轉而發生基板1脫離巨視檢查用夾 具14。 如第2圖所示，夾具機構5設有旋轉驅動機構2 1、擺 動旋轉機構22、前後移動機構23、平行移動機構24及昇 降機構25。如第3圖所示，旋轉驅動機構2 1驅動旋轉源1 1 將巨視檢查用夾具14以箭頭所示方向旋轉，具有如第4圖 (a)所示的夾具旋轉零度或同圖（b)所示的夾具旋轉90 度的任意旋轉角度，或360度等旋轉運動的機能。 擺動旋轉機構22，如第3圖所示，具備旋轉旋轉軸10 的驅動源，旋轉此旋轉軸1 0，使夾具機構（支撐構件1 2與 巨視檢査用夾具構件1 4的整體）5向C方向擺動、傾動或 反轉的機能。 前後移動機構23，如第3圖所示，具有哼旋轉軸1〇及 夾具機構5整體移向第2圖所示Y方向，即檢測人員Q的前 後方向移動的機能。 平行移動機構24，如第3圖所示，具有將旋轉軸1〇及 夾具機構5整體移向第2圖所示X方向，即檢測人員Q的左 右方向移動的機能。 昇降機構25，如第1圖所示，具有將旋轉軸1 〇及巨視 檢查用夾具1 4移向Z方向，即檢測人員Q的上下方向昇降 的機能。 上述夾具機構5的構成精緻小巧，在巨視檢查用夾具 14上載置玻璃基板，由吸著機構吸住持穩，即可執行旋轉 運動、擺動運動、前後移動、平行移動及昇降運動。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） {請先閱讀背面之注意事項再填寫本頁) 裝！ 訂·--------線 45 9 1 3 0 經濟部智慧財產局員工消費合作杜印製 A7 B7 五、發明說明（1α> 控制部26爲控制基板檢査裝置全體動作，接受操作部 27的指令控制自動運送機4的動作在卡匣站2與檢查裝置3 之間運送玻璃基板1，同時控制上述旋轉驅動機構2丨、擺 動旋轉機構22、前後移動機構23、平行移動機構24及昇 降機構25的動作，使夾具機構5發揮旋轉運動、擺動（傾 動、反轉）運動、前後（Υ方向）移動、平行（X方向） 移動及昇降（Ζ方向）等機能。又控制部26亦具有由巨視 檢查用夾具1 4上的雷射光源1 9 a、1 9 b的位置求出如缺陷 位置的座標等機能。 操作部27，係設置在檢查裝置3的檢測人員Q在觀察 地方，具有傳送檢測人員Q對控制部26所作旋轉運動、擺 動運動、前後移動、平行移動及昇降的指令。又操作部27 亦具有對自動運送機4的動作指令、檢查裝置3的巨視觀察 所需照明裝置8的開、關指令、爲巨視觀察而移動顯微鏡9 並加以定位的指令等機能。又操作部27因圖示的關係、設 置於第2圖內檢測人員Q的側面，實際上均設置在檢測人 員Q的前方。 將上述裝置的作用加以說明如下。 自動運送機4 >驅使一對機械臂4a、4b，例如以機械 臂4a將收納於第1卡匣2a的待檢查玻璃基板1取出並持穩 ，再向箭頭A方向移動後旋轉18〇度定位於檢查裝置3，將 玻璃基板1載置於檢査裝置3內的微視檢查用夾具6上。如 果檢查裝置3內還留有已檢查的玻璃基板1時，在送入待檢 査玻璃基板1到檢查裝置3以前，另一機械臂4b會由微視 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公楚） (請先閱讀背面之注意事項再填寫本頁) ί------ 訂---------線 45 9 1 3 0 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 杜 印 製 Α7 Β7 五、發明說明（n) 檢查用夾具6先將已檢查的玻璃基板1取出，同時由機械臂 4a將待檢查的玻璃基板1放在微視檢查用夾具6上。 在運送玻璃基扳時，自動運送機4將如第1圖所示’向 箭頭B方向昇降，調整爲適合於取出第1卡匣2a所收納的 待檢査玻璃基板1，將玻璃基板1送進檢查裝置3或由檢查 裝置3取出時亦可調整爲適合於作業的高度。 由自動運送機4送進檢査裝置3的待檢查玻璃基板1， 首先進行巨視觀察，然後進行微視觀察。這些巨視觀察及 微視觀察是由檢測人員Q利用操作部27將操作指令送到控 制部26，由控制部26控制旋轉驅動機構2 1、擺動旋轉機 構22、前後移動機構23、平行移動機構24或昇降機構25 的任一或多數機構的組合同時運作，以進行觀察。 首先由X方向觀看檢查裝置3的微視檢查用夾具6，藉 第6〜1 0圖加以說明巨視觀察。檢查裝置3內的玻璃基板1 需如第6圖所示正確載置於微視檢查用夾具6上。然後由昇 降釘7的上昇，將玻璃基板1推高至所需高度，如第7圖所 不 ° 然後由平行移動機構24的運作將夾具機構5移向X方 向，即第1及2圖的右側方向移動，如第8圖所示，支撐構 件1 2及巨視檢查用夾具14，將穿過昇降釘之間插入玻璃基 板1的下方。此時如玻璃基板1偏離正規位置時，夾具機構 5除在X方向外，可由前後移動機構23的運作，向前後方 向（Y方向）移動將載置在巨視檢查用夾具14上的玻璃基 板1調正。又由未圖示的定位機構將玻璃基板丨定位在基準 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） {請先閱讀背面之注意事項再填寫本頁} * ----- I I 訂· — 丨-線 45913 0 A7 B7 五、發明說明（12) 位置後’以吸著作用將玻璃基板1，保持在巨視檢查用夾 具1 4上。 這時侯，如第9圖所示，使各昇降釘7下降，以便將玻 璃基板1載放在夾具機構5的巨視檢查用夾具14上面。 之後，可由前後移動機構23的運作，將夾具機構5移 向檢測人員Q側；再由昇降機構2 5將夾具機構5提昇到， 即使旋轉也不會接觸到檢查裝置3的內壁或微視檢査用夾 具6之後；由擺動旋轉機構22的運作以旋轉軸1 〇爲中心， 在指定角度範圍內前後擺動玻璃基板1，由檢測人員Q以 目視進行巨視察。 由於夾具機構5的擺動及向檢測人員Q方向移動，可 將玻璃基板1由水平狀態改變爲傾斜狀態，並且向檢測人 員Q靠近，如第1 0圖所示。至於夾具機構5的擺動、靠近 檢測人員Q的移動及昇降，可同時運作，亦可分別運作。 第1 0圖中的R 1爲夾具機構5的擺動、向檢測人員Q側移動 及昇降等同時運作時的支持構件12的軌跡，該圖中R2係將 向檢測人員Q方向移動及昇降運作分開進行時的支持構件 12的軌跡例。 對於擺動玻璃基板1進行巨視觀察時的巨視檢查用夾 具14在夾具機構5的動作，更具體地加以說明如下。首先 將巨視檢查用夾具1 4，以昇降機構25上昇至不干擾微視檢 查用夾具6而易於觀察的位置，同時由前後移動機構23將 巨視檢查用夾具1 4加以前後移動’靠近檢測人員Q。然後 由擺動旋轉機構22將之傾斜至指定角度。此時由照明裝置 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注i項再填寫本頁) 訂---------媳 經濟部智慧財產局員工消費合作杜印製 45 913 0 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（13) 8對準傾斜的巨視檢查用夾具1 4上面玻璃基板1，加以照 射以便進行巨視檢查。 換言之，完成玻璃基板1的傾斜定位後，照明裝置8就 會點亮照明玻璃基板1。將照明光對準玻璃基板1的表面照 射’利用其反射光的光學變化，由檢測人員Q以目視觀察 玻璃基板1表面的傷痕等缺陷。這種巨視觀察在觀察玻璃 基板1表面反射光的光學變化，因此需由檢測人員Q利用 擺動旋轉機構22的運作，將夾具機構5調整爲所希望的利 於觀察玻璃基板1表面反射光的位置進行檢査。 又傾斜巨視檢查用夾具14時，是預先將巨視檢查用夾 具丨4提昇，所以巨視檢查用夾具丨4與微視檢查用夾具6不 致於相接觸。 再以巨視檢查用夾具1 4，是由擺動旋轉機構2 2加以擺 動，利用照明裝置8對於擺動中的玻璃基板1的照射進行巨 視檢查。 再以如第3圖所示，巨視檢查用夾具1 4，是由旋轉驅 動機構2 1向箭頭D方向旋轉，將玻璃基板1調整在容易觀 察其表面缺陷的角度，例如第4圖（b)所示，將夾具角度 旋轉90度或360度。再由照明裝置8加以照射進行巨視檢 查。 再以巨視檢查用夾具1 4，是由擺動旋轉機構22將巨視 檢查用夾具14旋轉爲近於垂直狀態後，以前後移動機構23 移近（Y方向）檢測人員Q，再以平行移動機構24對於撿 測人員Q做左右方向（X方向）移動，同時由昇降機構25 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） '---^-------〇裝--------訂---------線 1 (請先閱讀背面之注§項再填窝本頁) A7 B7 45913〇 五、發明說明（14) 以Z方向昇降，將玻璃基板丨移到最容易觀察其表面的缺陷 位置，例如檢測人員Q的前方位置。 這時候檢測人員Q可操作操作部2 7，將巨視檢査用夾 具14向XYZ方向移動，例如將缺陷G移到檢測人員q的眼 前，因此檢測人員Q不需移動或變動其位置，即可在最容 易觀察處檢測。又有些玻璃基板1的缺陷，是以穿透光較 容易辨識，所以應準備反射光爲宜。 再以進行玻璃基板1背面的巨視觀察時，如第丨1圖所 示，夾具機構5是由玻璃基板1的表面巨視觀察狀態，利用 擺動旋轉機構22以旋轉軸1 〇爲中心反轉。然後將玻璃基板 背面朝向檢測人員Q的狀態下以傾斜方向定位，即可如上 所述，點亮照明裝置8，照明玻璃基板1的背面。如此可由 照明光照射玻璃板1的背面，由檢測人員Q以目視觀察反 射光的光學變化，檢測玻璃板丨背面的傷痕等缺陷，完成 巨視觀察。 又玻璃基板1表面或背面的巨視觀察時，可能發生如 第1 2圖所示，照明裝置8的照射領域W不能含蓋全部玻璃 基板1。這時候夾具機構5 >可藉由平行移動機構24的運 作，將巨視檢查用夾具1 4平行移向X或Y方向。如將巨視 檢查用夾具14在X方向移動，即如第13圖所示，可將玻璃 基板1移向圖的右側方向，使缺陷G移入照射領域內。 又玻璃基板1可能形成規則性的缺陷。此時僅將玻璃 基板1以橫向載置擺動（如第4圖所示）’可能發生無法檢 出玻璃基板1的缺陷。這時候檢測人員Q需利用操作部27 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)4 5 9 1 3 0 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (1) [Background of the Invention] The present invention is suitable for inspection of glass substrate defects such as liquid crystal display (hereinafter referred to as LCD) applications. Use substrate inspection equipment. Defect inspection of glass substrates for LCD uses two types of so-called macro-view observation and micro-view observation. The giant-view observation system illuminates the illumination light on the surface of the glass substrate, and the inspector visually observes the optical change of the reflected light to detect the surface of the glass substrate. Defects such as scars. The microscopic observation system observes the defect portion inspected by the macroscopic observation under a microscope magnification. When using the same jig for macroscopic and microscopic observation during inspection, the glass substrate is held on the jig of the substrate inspection device, and the jig is swung back and forth toward the inspector to visually observe the surface of the glass substrate. If you need to observe the back side, you can turn the jig upside down, and swing the jig toward the inspector as described above to visually observe the back side of the glass substrate. "For microscopic observation of defects detected by giant vision observation, the above jig can be held. The horizontal state moves in a horizontal plane, and macroscopic observation is performed by a microscope fixed above a glass substrate. For example, when performing macro-view observation and micro-view observation with different devices, after completing the macro-view observation, remove the glass substrate from the macro-view fixture and use a roller or the like to move to another micro-view observation fixture for observation. [Inventive Notes] In recent years, with the increase in the size of L C D, the slope glass substrates of multiple surfaces have also become larger, and their weight has also increased. The jig supporting such a large glass substrate is susceptible to vibration during microscopic observation. In order to prevent vibration, the paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) ------- -Λ 1 Pack----- Order ------ I! End (Please read the notes on the back before filling this page) 4- Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives Paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) A7 _____B7____ V. The invention description (2) has the need to increase the weight and strength of the fixture. However, when using the same fixture for macro-vision observation and micro-vision observation, if the weight and strength of the fixture are increased, although it is not easy to generate vibration during micro-vision observation, a large-horsepower motor is required to swing a large fixture during macro vision observation. Internal vibration is generated, so the degree of freedom of the jig swinging is also limited. For example, when the macro-view observation and micro-view observation are performed in different places, after the macro-view observation is completed, the glass substrate needs to be taken out of the fixture, and the micro-view observation fixture is moved by a roller or the like. Therefore, the moving distance of the glass substrate will increase, and the inspection operation of the glass substrate will become more complicated, which will increase its operation time. If the macro-vision inspection device and the micro-vision inspection device are arranged side by side in the same place, since a roller device transferring glass substrates needs to be arranged between the two devices, not only the freedom of design and configuration will be restricted, but the space required for the device will also need to be increased. An object of the present invention is to provide a substrate inspection device that improves the influence of vibrations during macroscopic observation and effectively and easily inspects glass substrates in a short time. In order to solve the above problems, the present invention provides a microscopic inspection substrate inspection device for macroscopic observation for visual inspection of a substrate or magnification inspection of an image of the substrate, and provides a microscopic inspection jig for holding the substrate to perform the microscopic observation, And a substrate inspection device characterized in that the substrate is oscillatingly mounted on a macro-vision inspection jig adjacent to the micro-vision inspection jig and is detachable above the micro-vision inspection jig. The present invention also provides a substrate inspection apparatus in which the head for microscopic observation and the chuck for microscopic inspection are characterized by being movably arranged in a plane parallel to the substrate surface. ^-(Please read the notes on the back before filling out this page) -Γ-Pack --- 丨 Order -------! Therefore, the consumer cooperation of the Intellectual Property Bureau of the Ministry of Economic Affairs printed A7 ____B7 ________ V. Description of the invention (3) The present invention provides the aforementioned inspection fixture for macroscopic inspection in the above-mentioned substrate inspection device, in order to pass through the substrate in one of the directions A substrate inspection device characterized in that the shaft can swing the aforementioned substrate. According to the present invention, in the above-mentioned substrate inspection apparatus, the above-mentioned inspection apparatus for giant-vision inspection is provided, which is a substrate inspection apparatus characterized by being movable in the retreat direction and the difference direction. According to the present invention, in the above-mentioned substrate inspection device, the above-mentioned macro inspection inspection jig is provided, the center of which is located on the substrate surface and the substrate can be rotated, and the substrate inspection device is characterized in that the substrate can be rotated. The jig inspection jig is a substrate inspection device characterized in that the substrate can be moved forward and backward in a state where the substrate is tilted at a desired tilt angle. According to the present invention, in the above-mentioned substrate inspection device, the jig inspection jig is provided, and the substrate can be moved forward and backward (γ direction), parallel direction (X direction), and ascending and descending directions in a state where the substrate is inclined almost vertically. (Z direction) A substrate inspection device characterized by movement. According to the present invention, in the above-mentioned substrate inspection device, the aforementioned macro-vision inspection jig is provided, which is a substrate inspection device that is integrally equipped with a pointer for detecting a coordinate position of a defect on a substrate. According to the present invention, the above-mentioned macro inspection inspection jig is provided in the above-mentioned substrate inspection apparatus, and is a substrate inspection apparatus characterized in that the above-mentioned macro inspection can be performed above or in a retracted position of the macro inspection inspection jig. According to the present invention, in the above-mentioned substrate inspection device, the aforementioned macro-vision inspection jig is provided, and the front end portion of the macro-vision inspection jig is provided with a rotation from the paper scale and applicable Chinese National Standard (CNS) A4 specification (210 X 297 mm) ) Ill · — —! — II --- II ^ — — — — — — — II r (Please read the notes on the back before filling out this page) Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs 459130 A7 __. _B7_ _ V. Description of the invention (4) A substrate inspection device featuring a clamp mechanism of a support member that can be rotated in the axial direction. According to the present invention, in the above-mentioned substrate inspection device, the macro-vision inspection jig is provided, and a front end portion is provided with a support member that can rotate freely and rotate in the axial direction, and the support member is rotated to swing the macro-vision inspection jig. A substrate inspection device featuring a rotating mechanism. According to the present invention, in the above-mentioned substrate inspection apparatus, the aforementioned macroscopic inspection jig is provided, and a support member that can rotate freely and rotate in an axial direction is provided at a front end portion thereof, and these inspection jigs and support members can be moved in parallel as a whole. A substrate inspection device featuring a parallel moving mechanism. According to the present invention, in the above-mentioned substrate inspection device, the aforementioned macro-vision inspection jig is provided, and a support member which can rotate freely and rotate in the axial direction is provided at the front end portion thereof, and these macro-vision inspection jigs and supports can be lifted and lowered as a whole. A substrate inspection device featuring a component lifting mechanism. According to the present invention, in the above-mentioned substrate inspection device, the aforementioned macro-vision inspection jig is provided. The front end portion of the macro-vision inspection jig is provided with a support member that can rotate freely and rotate in the axial direction, and the support member is rotated to swing the macro-vision inspection device. A swinging and rotating mechanism of the jig, a parallel moving mechanism capable of moving the inspection jigs and supporting members in parallel as a whole, and a substrate inspection device including the lifting mechanism of the macro inspection inspection jig and supporting members as a whole. [Embodiment of the Invention] One embodiment of the present invention will be described below with reference to the drawings. This if size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 cm) (please read the note f on the back before filling in this page). -------- Order ----- ---- Break 45 91 3 〇 Α7 __ Β7 _____ 5. Description of the invention (5) (Please read the precautions on the back before filling in this page) Figures 1 and 2 are substrates suitable for LCD glass substrate defect inspection The structure of the inspection device is shown in Fig. 1. Fig. 1 is a front view and Fig. 2 is a bottom view. This substrate inspection apparatus is provided with a cassette station 2 capable of storing a plurality of glass substrates 1 and an inspection apparatus 3 (performing macroscopic observation for visual inspection of the glass substrate 1 or microscopic observation for enlarging an image of the glass substrate 1) for inspection Work), and automatic conveyor 4 (remove the glass substrate 1 to be inspected and stored in the Cali station 2 and keep it steady and send it to the inspection device 3, and take out the glass substrate i that has been inspected by the inspection device 3 and return it to the cassette. Station 2), and fixture mechanism 5 (a fixture that holds the glass substrate 1 and can move, swing, and rotate freely in the X, Y, and Z directions). These cassette stations 2, automatic conveyor 4, inspection device 3, and jig mechanism 5 are sequentially arranged in the X direction, as shown in Fig. 1 * > The above-mentioned cassette station 2 is provided with a plurality of sheets to be inspected The first cassette 2a of the glass substrate 1 and a plurality of second cassettes 2b of the inspected glass substrate 1 are housed. These first and second cassettes 2a, 2b are arranged side by side parallel to the moving direction (arrow direction B: Y direction) of the automatic conveyor 4. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the automatic conveyor 4 can be moved in the direction of arrow A. In addition to a pair of multi-joint robot arms 4a and 4b with a hand at the front end, a pair of above and below configurations can be transported simultaneously. The hand of the glass substrate 1 is double-armed. This automatic conveyor 4 uses a robot arm 4a to take out and hold the glass substrate 1 to be inspected stored in the first cassette 2a and keeps it moving. It continues to move in the direction of arrow A and rotates 180 degrees to position the inspection device 3 'from another The automatic conveyor 4 b takes out the inspected glass substrate 1 placed in the microscopic inspection jig 6, and simultaneously places the glass substrate to be inspected in the microscopic inspection jig 6 in the inspection device 3 with another robot arm 4 a. Then move the automatic conveyer 4 to the direction of arrow A and rotate ί 80 degrees to position the paper size to apply the national standard of China (CNS) A4 (2) 0X 297 mm) ™ s ~ — — Ministry of Economic Affairs Intellectual Property The paper size printed by the Bureau ’s Consumer Cooperative is applicable to China National Standard (CNS) A4 (210 X 297 mm) 4 5 9 13 0 A7 _____B7____ 5. Description of the invention (0) In the second cassette 2b, another machine The inspected glass substrate 1 held by the arm 4b is stored in the second cassette 2b. Then, the above-mentioned operation of moving the automatic conveyor 4 in the direction of the arrow A to the first cassette 2 a is repeated. The automatic conveyor 4 can adjust the height in the direction of the arrow C (Z direction) in order to remove the glass substrate 1 to be inspected stored in the first cassette 2 a, and to place or remove the glass in the inspection device 3 The substrate I and the inspected glass substrate 1 are stored in the position of the second cassette 2b. The inspection device 3 is provided with a micro-vision inspection jig 6 for holding and observing the glass substrate 1 in order to perform macro-vision observation and micro-vision observation in the same cassette station. The microvision inspection jig 6 is fixed on the base plate of the inspection device 3, and a plurality of lifting pins 7 are arranged at a specified interval in a range including the cover glass substrate 1 below, and the microvision inspection jig 6 can be raised and lowered (Z direction). The upper glass substrate 丨 lifts the specified height. The inspection device 3 is provided with an illumination device 8 for macroscopic observation. At the upper part of the microscopic inspection jig, a microscopic observation microscope 9 (head for microscopic observation) is attached. This microscope 9 is provided with a portal arm 9 a that can move freely (X direction). The portal arm 9a can be moved along the guide rails (Y direction) holding both sides of the inspection jig. Therefore, the microscope 9 can freely move the glass substrate 1 on the microscopic inspection jig 6 in the} CY direction. As shown in FIG. 3, the clamp mechanism 5 is provided on the rotation shaft 10. A support member 12 is provided through a rotation source 11 with a built-in motor, and the front end portion 13 of the support member 12 is fixed to the rotation shaft 13. E-shaped macroscopic inspection fixture i 4. This giant-vision inspection jig 14 is connected to the rotating shaft 10-body, and can be ordered by the micro-view ---- ΙΓΙΙΓ1Ι -------------------------- Read the precautions on the back before filling in this page) 5 9 1 3 0 Α7 _-Β7 V. Description of the invention (7) The X direction (rotation axis) of the inspection jig 6 above the backward direction, the direction of the microscopic inspection It can be moved with the upper direction of the clamp 6), and can swing to the rotation axis 10, tilt, reverse (arrow C direction), and move in the direction of parenthesis to the backward direction (X direction) (front-back direction: γ direction, parallel Direction, lifting direction: Z direction), the micro-vision inspection jig 6 can be rotated around the center of the glass substrate 1 plane (direction of arrow D). Since the glass substrate 1 can also be reversed in the direction of the arrow C, the back surface of the glass substrate can be reversed to the inspector Q. This jig inspection jig 14 can move the glass substrate back and forth in an inclined state ', and can also move the glass substrate i in the inclined state and move forward, backward, horizontally, and vertically. Specifically, the S 'macroscopic inspection jig 14 is rotatably provided with the rotation axis 10 as a center (X-axis direction as a center) and an arrow C direction. The macro-vision inspection jig 14 is rotatably provided with the rotation shaft 13 at the front end portion of the support member 12 as the center of rotation. Among them, the mechanism for rotating the giant-vision inspection jig 14 is a rotation source 1 丨 power shaft 15 (rotation shaft) with a timing belt 丨 7 will be located below the support member 丨 2 pulley rotation body composed of different radii 〖6 phase The rotating body 16 and the rotating shaft 13 are connected by a timing belt 18. When the rotation source 11 is driven to rotate, it will be transmitted to the rotating body 1.6 via the timing belt 丨 7, and then transmitted to the rotating body 1 through the timing belt 18, and the giant vision inspection jig 14 will be rotated, as shown in FIG. 4 ( a) (b). This figure (a) shows a state in which the supporting member 12 and the macroscopic inspection jig 14 face the same direction, and this is referred to as zero rotation of the jig. The same figure (b) is a jig inspection fixture. 1 4 pairs of paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm_ (please read the note f on the back before filling in the clothes page). 1 Order 丨 丨 1! Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by the Consumers’ Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 5 9 1 3 〇 A7 B7 V. Description of the invention () The supporting member 12 is rotated 90 degrees, This is called a jig rotation of 90 degrees. Figs. 3 and 4 show a state in which the glass substrate for LCD is mounted on the macro inspection inspection jig. A pointer means for indicating the X y coordinate of a defect is also provided in the macro inspection inspection jig 14. The laser light sources 19 a and 19 b for the laser pointer are configured as shown in FIG. 5. These laser light sources 19 a and 19 b are provided on the frame of the macro-vision inspection jig 14 (the periphery of the macro-vision inspection jig 14) and each guide 20 a is formed. (X coordinate), 20b (y coordinate) and can move freely. For example, after the reference coordinate system xy is set on the giant vision inspection jig 14, the X, L, L2 at the intersection of the laser light L1, L2 emitted by each laser light 19a, 19b. The y-coordinate will correspond to the X-coordinate of each laser light source at positions 19a, 19b The y coordinates are the same, so the xy coordinates of the intersection of the laser light L1, L2 can be obtained from these two coordinates. The position of the laser light source I 9a represents the X coordinate, and the position of the laser light source 19b represents the y coordinate. Therefore, as long as the laser is moved, The light sources 19a and 19b can obtain the coordinates of the defects by aligning the intersection of the laser light L1 and L2 with the defects on the glass substrate 1. The laser light sources 19a and 19b are respectively connected to the motor and the belt. It is preferable that the rotary drive is capable of automatically moving on each of the ruler guide rails 20a and 20b. As for the movement of each of the radiation light sources 19a and 19b, it can be operated by the inspector Q of the operation unit 27 described later. The pointer means is not limited to that shown in FIG. The XY laser pointer shown above, but because the substrate 1 will oscillate and rotate, it is better to install it on the macro-view inspection jig 14 for accurate and easy to find the coordinates of the defect position. A suction mechanism is provided to stabilize the peripheral edge portion of the glass substrate 1. This suction mechanism has sufficient suction force so that the paper size does not apply the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ---- ^ ------- 1 | > Install! Order -------- Line 7 {Please read the notes on the back before filling this page) 4 5 9 1 3 0 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy The swinging and reversing of the jig mechanism 5 causes the substrate 1 to escape from the jig 14 for macroscopic inspection. As shown in Fig. 2, the jig mechanism 5 is provided with a rotation drive mechanism 21, a swing rotation mechanism 22, a forward-backward movement mechanism 23, a parallel movement mechanism 24, and a lifting mechanism 25. As shown in FIG. 3, the rotation driving mechanism 2 1 drives the rotation source 1 1 to rotate the jig inspection jig 14 in a direction indicated by an arrow, and the jig shown in FIG. 4 (a) is rotated by zero degrees or the same as (b). The jig shown is capable of rotating at any angle of 90 degrees, or the function of rotating motion such as 360 degrees. As shown in FIG. 3, the swing rotation mechanism 22 is provided with a drive source for rotating the rotation shaft 10, and rotates this rotation shaft 10 to make the clamp mechanism (the entire support member 12 and the macroscopic inspection clamp member 14) 5 to C The function of swinging, tilting or reversing. As shown in FIG. 3, the forward-backward movement mechanism 23 has a function of moving the entire humming axis 10 and the clamp mechanism 5 in the Y direction shown in FIG. 2, that is, the forward and backward directions of the detection person Q. As shown in Fig. 3, the parallel moving mechanism 24 has a function of moving the entire rotation axis 10 and the jig mechanism 5 in the X direction shown in Fig. 2, that is, the right-and-left direction of the detector Q. As shown in FIG. 1, the lifting mechanism 25 has a function of moving the rotation axis 10 and the macro-view inspection jig 14 to the Z direction, that is, the vertical direction of the inspector Q. The structure of the above-mentioned clamp mechanism 5 is exquisite and small. A glass substrate is placed on the giant inspection inspection jig 14 and is held and held by the suction mechanism to perform rotation motion, swing motion, forward and backward movement, parallel movement, and lifting movement. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) {Please read the precautions on the back before filling this page) Pack! Order · -------- Line 45 9 1 3 0 Consumer cooperation of Intellectual Property Bureau of the Ministry of Economic Affairs Du printed A7 B7 V. Description of the invention (1α > The control section 26 controls the overall operation of the substrate inspection device and accepts the operation section The command of 27 controls the operation of the automatic conveyor 4 to transport the glass substrate 1 between the cassette station 2 and the inspection device 3, and at the same time controls the rotation driving mechanism 2 丨, the swing rotation mechanism 22, the forward and backward movement mechanism 23, the parallel movement mechanism 24, and The movement of the lifting mechanism 25 causes the clamp mechanism 5 to perform functions such as rotational motion, swing (tilt, reverse) motion, forward and backward (Υ direction) movement, parallel (X direction) movement, and lifting (Z direction). The control unit 26 also It has functions such as determining the coordinates of the defect position from the positions of the laser light sources 1 9 a and 19 b on the macroscopic inspection fixture 14. The operation unit 27 is where the inspector Q provided in the inspection device 3 is observing the place, It has instructions for transmitting the rotation movement, swing movement, forward and backward movement, parallel movement, and lifting of the control unit 26 to the inspector Q. The operation unit 27 also has instructions for the operation of the automatic conveyor 4 and the inspection device 3 Functions such as an instruction for turning on and off the lighting device 8 required for visual observation, an instruction to move the microscope 9 for positioning for macroscopic observation, etc. The operation unit 27 is provided on the side of the inspector Q in FIG. 2 due to the relationship shown in the figure. Actually, they are all set in front of the inspector Q. The function of the above-mentioned device will be described below. The automatic conveyor 4 > drives a pair of robot arms 4a, 4b, for example, the robot arm 4a will be stored in the first cassette 2a. The inspection glass substrate 1 is taken out and held steady, and then moved in the direction of the arrow A and rotated 180 degrees to locate the inspection device 3, and the glass substrate 1 is placed on the microscopic inspection jig 6 in the inspection device 3. If the inspection device 3 When the inspected glass substrate 1 is still inside, before the glass substrate 1 to be inspected is sent to the inspection device 3, the other robot arm 4b will be based on the Chinese paper standard (CNS) A4 (210 X). (297 Gongchu) (Please read the precautions on the back before filling out this page) ί ------ Order --------- Line 45 9 1 3 0 Employee Consumption Cooperation of Intellectual Property Bureau, Ministry of Economy Du Yin System A7 B7 V. Description of the invention (n) For inspection The tool 6 first takes out the inspected glass substrate 1, and at the same time, the robotic arm 4a places the glass substrate 1 to be inspected on the microscopic inspection jig 6. When the glass substrate is transported, the automatic conveyor 4 will be as shown in FIG. As shown in the figure, it moves up and down in the direction of arrow B, and is adjusted to be suitable for taking out the glass substrate 1 to be inspected stored in the first cassette 2a. Working height: The glass substrate 1 to be inspected is inspected by the automatic conveyer 4 into the inspection device 3, and the macroscopic observation is performed first, and then the microscopic observation is performed. In these macroscopic and microscopic observations, the inspector Q sends an operation instruction to the control section 26 using the operation section 27, and the control section 26 controls the rotation driving mechanism 21, the swing rotation mechanism 22, the forward and backward movement mechanism 23, and the parallel movement mechanism 24. Or any one or a combination of a plurality of mechanisms of the lifting mechanism 25 operate simultaneously for observation. First, the microscopic inspection jig 6 of the inspection device 3 is viewed from the X direction, and macroscopic observation will be described with reference to FIGS. 6 to 10. The glass substrate 1 in the inspection device 3 needs to be correctly placed on the microscopic inspection jig 6 as shown in FIG. 6. Then, the lifting pin 7 is raised to push the glass substrate 1 to a desired height, as shown in FIG. 7, and then the clamp mechanism 5 is moved to the X direction by the operation of the parallel movement mechanism 24, that is, in FIGS. 1 and 2. Moving in the right direction, as shown in FIG. 8, the support member 12 and the macroscopic inspection jig 14 are inserted between the lifting pins and inserted below the glass substrate 1. At this time, if the glass substrate 1 deviates from the normal position, the clamp mechanism 5 can be moved forward and backward (Y direction) by the operation of the forward and backward movement mechanism 23 in addition to the X direction, and the glass substrate 1 placed on the giant inspection inspection jig 14 Correct. The glass substrate is positioned by the positioning mechanism (not shown) at the standard. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) {Please read the precautions on the back before filling this page} *- --- II Order · — 丨 -Line 45913 0 A7 B7 V. Description of the invention (12) After the position, hold the glass substrate 1 on the inspection fixture 14 for giant vision. At this time, as shown in Fig. 9, the lifting pins 7 are lowered so that the glass substrate 1 is placed on the macroscopic inspection jig 14 of the jig mechanism 5. After that, the clamp mechanism 5 can be moved to the Q side of the inspector by the operation of the forward-backward movement mechanism 23; the clamp mechanism 5 can be lifted by the lifting mechanism 25, so that it will not touch the inner wall of the inspection device 3 or micro-vision even if rotated After the inspection jig 6; the operation of the swing and rotation mechanism 22 is centered on the rotation axis 10, and the glass substrate 1 is swung back and forth within a specified angle range, and the inspector Q performs a macro inspection visually. Due to the swing of the clamp mechanism 5 and the movement toward the inspector Q, the glass substrate 1 can be changed from a horizontal state to an inclined state and approached to the inspector Q, as shown in Fig. 10. As for the swing of the jig mechanism 5, the movement of the approaching person Q, and the raising and lowering, they can be operated simultaneously or separately. R1 in FIG. 10 is the trajectory of the support member 12 when the jig mechanism 5 is swinging, moving to the Q side of the inspector and lifting, etc., and R2 in the figure separates the movement and lifting operation in the Q direction of the inspector. An example of the trajectory of the support member 12 in progress. The operation of the macroscopic inspection jig 14 during the macroscopic observation of the swing glass substrate 1 in the jig mechanism 5 will be described more specifically as follows. First, the macro-vision inspection jig 14 is raised by the lifting mechanism 25 to a position that is easy to observe without disturbing the micro-vision inspection jig 6, and the macro-vision inspection jig 14 is moved forward and backward by the forward-backward movement mechanism 23 'close to the inspector Q . Then, it is tilted to a specified angle by the swing rotation mechanism 22. At this time, the paper size of the lighting device applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the note i on the back before filling this page) Order --------- 媳 Economy Printed by the Intellectual Property Office of the Ministry of Intellectual Property, Du Printed 45 913 0 A7 B7 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (13) 8 Align the tilted giant vision inspection jig 1 4 Above the glass substrate 1 and irradiate For macroscopic inspection. In other words, after the tilt positioning of the glass substrate 1 is completed, the lighting device 8 will illuminate the lighting glass substrate 1. The illumination light is directed toward the surface of the glass substrate 1 and is illuminated. The inspector Q visually observes defects such as a flaw on the surface of the glass substrate 1 by using the optical change of the reflected light. This macroscopic observation observes the optical change of the reflected light on the surface of the glass substrate 1. Therefore, it is necessary for the inspector Q to use the operation of the swing rotation mechanism 22 to adjust the clamp mechanism 5 to a desired position for observing the reflected light on the surface of the glass substrate 1. an examination. When the macro-vision inspection jig 14 is tilted, the macro-vision inspection jig 丨 4 is raised in advance, so that the macro-vision inspection jig 丨 4 and the micro-vision inspection jig 6 do not come into contact with each other. Further, the macroscopic inspection jig 14 is swung by the swing rotation mechanism 22, and the macroscopic inspection is performed by the illumination device 8 on the irradiation of the glass substrate 1 during the swing. As shown in FIG. 3, the giant inspection inspection jig 14 is rotated by the rotation driving mechanism 21 in the direction of the arrow D, and the glass substrate 1 is adjusted at an angle where it is easy to observe the surface defects. For example, FIG. 4 (b) As shown, rotate the clamp angle 90 or 360 degrees. The light is irradiated by the lighting device 8 for macroscopic inspection. The macro-vision inspection jig 14 is rotated by the swing rotation mechanism 22 to a near-vertical state, and then the forward-backward movement mechanism 23 moves closer to the person Q (Y direction), and then the parallel movement mechanism 24 The picker Q moves left and right (X direction), and at the same time, the paper size is adapted to the Chinese National Standard (CNS) A4 (210 X 297 mm) by the lifting mechanism 25. --- ^ ------- 〇 Install -------- Order --------- Line 1 (Please read the note § on the back before filling in the page) A7 B7 45913 05. Description of the invention (14) Z direction Lift and move the glass substrate to the position where it is most easy to observe the surface defect, such as the position in front of the inspector Q. At this time, the inspector Q can operate the operation part 27 and move the macro inspection inspection jig 14 in the XYZ direction. For example, the defect G is moved in front of the inspector q. Therefore, the inspector Q does not need to move or change its position. The easiest to observe. In addition, some defects of the glass substrate 1 are easier to recognize by transmitted light, so it is better to prepare reflected light. When the macroscopic observation of the back surface of the glass substrate 1 is performed, as shown in FIG. 1, the clamp mechanism 5 is viewed from the surface of the glass substrate 1, and the swing rotation mechanism 22 is used to rotate the rotation axis 100 as the center. Then, the rear surface of the glass substrate is positioned in the oblique direction with the back of the glass substrate 1 facing the inspector Q. As described above, the lighting device 8 is lit and the back surface of the glass substrate 1 is illuminated. In this way, the back surface of the glass plate 1 can be irradiated with the illuminating light, and the inspector Q can visually observe the optical change of the reflected light, detect defects such as flaws on the back surface of the glass plate 丨, and complete the macroscopic observation. In addition, during macroscopic observation of the front or back surface of the glass substrate 1, it may happen that, as shown in Fig. 12, the irradiation area W of the lighting device 8 cannot cover the entire glass substrate 1. At this time, the jig mechanism 5 can be moved in parallel to the X or Y direction by the operation of the parallel movement mechanism 24. When the macroscopic inspection jig 14 is moved in the X direction, that is, as shown in Fig. 13, the glass substrate 1 can be moved to the right side of the figure, and the defect G can be moved into the irradiation area. Moreover, the glass substrate 1 may form regular defects. At this time, only the glass substrate 1 is swung in the lateral direction (as shown in Fig. 4) ', and the defects of the glass substrate 1 may not be detected. At this time, the inspector Q needs to use the operation section 27. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page)
• IB B9 K 丨！訂---------線. 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 4 5 9 1 3 ^ A7 _ _ B7 五、發明說明（1δ) 操作夾具機構5由旋轉驅動機構2 1驅動旋轉旋轉源1 1。此 旋轉驅動係介由同步皮帶1 7傳到旋轉體1 6，再由同步帶1 8 傳到巨視檢查用夾具1 4的旋轉軸。 由此可使巨視檢查用夾具1 4旋轉，例如第4 ( b )圖 所示’成爲旋轉9 0度的狀態。在夾具旋轉9 0度狀態下，具 有規則性缺陷的玻璃基板丨可由照明光的照射進行巨視觀 察。又玻璃基板1表面所形成規則性缺陷如互爲直交的兩 組時，如將巨視檢查用夾具14設定在45度旋轉角度狀態下 ，即可同時觀察兩組缺陷。 例如夾具在旋轉90度狀態下，需觀察由玻璃基板1表 面所反射的光學變化，亦可由檢測人員Q操作擺動旋轉機 構22，將夾具機構5調整在所希望的傾斜度。 又如上所述，在夾具旋轉90度狀態下進行玻璃基板1 背面的巨視觀察時，可由檢測人員Q操作夾具機構5，由 擺動旋轉機構22的運作加以反轉玻璃基板1，進行其背面 的巨視觀察。 在旋轉90度狀態下進行玻璃基板1表面或背面的巨視 觀察時，照明裝置8的照射領域W不能含蓋全部玻璃基板1 時，可由平行移動機構24的運作將夾具機構5向X方向平 行移動或Y方向前後移動，亦可向Z方向昇降，將缺陷G 移在檢測人員Q容易觀察的位置。 如上所述各巨視觀察中，如在玻璃基板1表面或背面 檢出缺陷時，如第5圖所示，由構成雷射指針的各雷射光 源19a、19b射出雷射光LI、L2，由檢測人員Q以手動將 本紙張尺度適用t國國家標準<CNS)A4规格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝！ —訂--------線 459130 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（1ό) 雷射光L1、L2的交差點’依循標尺導軌20a、20b引導至 缺陷G的位置上。如屬自動操作時，由檢測人員Q操作操 作部27，將雷射光源19a、19b 沿標尺導軌20a、20b移 動。 當各雷射光LI、L2的交差點位於缺陷G上時’假設雷 射光源1 9a指在X座標，雷射光源19b指在y座標，即表示 玻璃基板1上的缺陷G是在（X、y )座標上而求出缺陷G 的位置。此缺陷G的座標（X、y )將被儲存在控制部26 的記憶體內。 完成巨視觀察後，夾具機構5將經由旋轉驅動機構2 1 、擺動旋轉機構22、前後移動機構23、平行移動機構24 及昇降機構25的運作使玻璃基板1恢復水平狀態。然後上 昇昇降釘7支撐玻璃基板1，此時夾具機構5停止對玻璃基 板1的吸著作用，可將巨視檢査用夾具14由玻璃基板1下 方抽出，由微視檢查用夾具6上方退出。最後下降昇降釘7 ，將玻璃基板1載置於微視檢查用夾具6上面。 接著進行微視觀察。微視觀察是對巨視觀察所查出玻 璃基板1的缺陷G部分，利用顯微鏡9加以放大觀察。顯微 鏡9是根據巨視觀察所查出缺陷G的座標（X、y )在門型 臂9a上向X方向移動，門型臂9a向Y方向移動以便在玻璃 基板1的上方，任意向XY各方向移動。顯微鏡9將停止在 玻璃基板1的缺陷上方，捕捉缺陷G的放大像。此放大像 可由CDD等撮影裝置撮取，在監視電影幕放出。 完成巨視觀察及微視觀察時，自動運送機4已由另一 本紙張又度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注§項再填窝本頁)• IB B9 K 丨! Order --------- line. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by 4 5 9 1 3 ^ A7 _ _ B7 V. Description of Invention (1δ) Operation The clamp mechanism 5 is driven by the rotation drive mechanism 21 to rotate the rotation source 11. This rotation drive is transmitted through the timing belt 17 to the rotating body 16 and then from the timing belt 18 to the rotation axis of the giant inspection fixture 14. As a result, the macroscopic inspection jig 14 can be rotated, for example, as shown in Fig. 4 (b), it is rotated 90 degrees. When the jig is rotated 90 degrees, the glass substrate with regular defects can be viewed by macroscopic illumination by the illumination light. When the regular defects formed on the surface of the glass substrate 1 are two groups orthogonal to each other, if the macro-vision inspection jig 14 is set at a 45-degree rotation angle state, the two groups of defects can be observed at the same time. For example, when the jig is rotated by 90 degrees, it is necessary to observe the optical changes reflected from the surface of the glass substrate 1. The inspector Q can also operate the swing rotation mechanism 22 to adjust the jig mechanism 5 at a desired inclination. As described above, when the macroscopic observation of the back surface of the glass substrate 1 is performed while the jig is rotated 90 degrees, the inspector Q can operate the jig mechanism 5 and the glass substrate 1 can be reversed by the operation of the swing rotation mechanism 22 to perform the macroscopic observation on the back surface. Observed. When the macroscopic observation of the front or back surface of the glass substrate 1 is performed at a rotation of 90 degrees, when the irradiation area W of the lighting device 8 cannot cover the entire glass substrate 1, the clamp mechanism 5 can be moved in parallel in the X direction by the operation of the parallel movement mechanism 24 Or it can move up and down in the Y direction, and it can also move up and down in the Z direction, and move the defect G to a position that the inspector Q can easily observe. In each of the macroscopic observations described above, when a defect is detected on the front or back of the glass substrate 1, as shown in FIG. 5, the laser light sources 19a and 19b constituting the laser pointer emit laser light LI and L2, and the detection Personnel Q manually applies the paper size to the national standard < CNS) A4 specification (210 X 297 mm) (please read the precautions on the back before filling this page). Install! —Order -------- Line 459130 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (1) The intersection of the laser light L1 and L2 'follows the guide rails 20a and 20b to the defect G Position. In the case of automatic operation, the inspector Q operates the operation unit 27 to move the laser light sources 19a and 19b along the scale guide rails 20a and 20b. When the intersection point of each laser light LI, L2 is located on the defect G ', assuming that the laser light source 19a refers to the X coordinate, and the laser light source 19b refers to the y coordinate, that means that the defect G on the glass substrate 1 is in (X, y) to find the position of defect G. The coordinates (X, y) of the defect G are stored in the memory of the control unit 26. After the macroscopic observation is completed, the clamp mechanism 5 will restore the glass substrate 1 to a horizontal state via the operation of the rotation driving mechanism 21, the swing rotation mechanism 22, the forward and backward movement mechanism 23, the parallel movement mechanism 24, and the lifting mechanism 25. Then, the raising and lowering nails 7 support the glass substrate 1. At this time, the gripper mechanism 5 stops sucking the glass substrate 1. The jig inspection jig 14 can be pulled out from below the glass substrate 1, and exited from above the microvision inspection jig 6. Finally, the lifting nail 7 is lowered, and the glass substrate 1 is placed on the microscopic inspection jig 6. Microscopy was followed. The microscopic observation is a magnification observation using a microscope 9 on the defect G portion of the glass substrate 1 detected by the macroscopic observation. The microscope 9 is based on the coordinates (X, y) of the defect G detected by the macroscopic observation. It moves on the gate arm 9a in the X direction, and the gate arm 9a moves in the Y direction so as to be above the glass substrate 1 in any direction of XY. mobile. The microscope 9 stops above the defect of the glass substrate 1 and captures an enlarged image of the defect G. This magnified image can be captured by a photographing device such as a CDD and displayed on a surveillance movie screen. At the completion of the macro and micro vision observations, the automatic conveyor 4 has been re-applied to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) from another sheet of paper (please read the note § on the back before filling in the book) page)
·1111111 - I1IIIIII 459130 A7 __B7_____ 五、發明說明（17) 自動臂4a持穩待檢查玻璃基板1。因此當另一自動臂4b由 檢查裝置3內取出已檢查玻璃基板1的同時，自動臂4 a即 (請先閲讚背面之注§項再填寫本頁) 將玻璃基板1裝載於檢查裝置3內。自動運送機4將向箭頭 A方向旋轉，定位於第2卡匣2b位置，而另一自動臂4b將 所持穩的已檢查玻璃基板1收納於第2卡匣的2b，然後再 移向箭頭A方向定位於第1卡匣2a位置。 上述實施形態是對玻璃基板1加以目視檢查的巨視觀 察或對玻璃基板1的畫像加以放大檢查的微視觀察的基板 裝置，裝設保持玻璃基板1供進行微視觀察的固定微視檢 查用夾具6，及在保持玻璃基板1進行微視檢査用夾具6上 方裝設可擺動自如且可向XYZ各方向移動的巨視檢查用夾 具1 4，可在同一位置同時進行巨視觀察及微視觀察，不同 於以往分別以不同裝置進行巨視觀察及微視觀察，可減少 裝設裝置的空間，達成裝置的精小化。 如上所述可在同一位置進行巨視觀察及微視觀察，不 必在巨視觀察及微視觀察的不同裝置間傳送玻璃基板1， 可縮短玻璃基板1的檢查時間，而可縮短全程的作業時間 〇 經濟部智慧財產局員工消費合作社印製 換言之，在檢查裝置3的同一位置可進行巨視觀察及 微視觀察，不需像以往分別移送玻璃基板到不同裝置進行 巨視觀察及微視觀察，只要將玻璃基板1改放在巨視撿查 用夾具14或微視檢查用夾具6，即可同時進行巨視觀察及 微視觀察，可縮短檢查時間。由自動運送機4將收納於卡 匣站2的玻璃基板1取出，移送至檢查裝置3之後，在檢查 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 459130 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（1δ) 裝置3內進行巨視觀察及微視觀察，可縮短將完成巨視/微 視觀察檢查的玻璃基板1，以自動運送機4從檢查裝置3取 出並移送至卡匣站2的一連檢査操作時間，而提升檢查效 率。 又如將微視檢查用夾具6加以固定，即可不受振動的 影響進行檢査，可獲得經顯微鏡9所放大，缺陷G的更鮮 明高畫質畫像，提升微視觀察的性能。也可將巨視檢查用 夾具14分裝爲可退避’以提升玻璃基板1的擺動的自由度 及設計的自由度。 巨視觀察時，需將巨視檢查用夾具1 4作旋轉運動、擺 動運動、前後移動、平行移動及昇降等，例如首先將巨視 檢查用夾具1 4上昇，接著加以傾斜進行巨視檢查，然後加 以擺動進行巨視檢查，再依照玻璃基板1的缺陷種類（缺 陷的方向）加以旋轉，以適合於檢測人員Q的觀察角度進 行巨視檢查，最後以前後移動拉向檢測人員Q並對檢測人 員Q做左右移動再加以Ζ方向的昇降，將玻璃基板1上面的 缺陷調整在最適合檢測人員Q觀察的位置，例如移到檢測 人員Q前方。還可再旋轉巨視檢查用夾具1 4將玻璃基板1 反轉，進行玻璃基板1背面的巨視觀察。 換言之，在檢查裝置3的巨視觀察時，可將支撐玻璃 基板1的巨視檢查用夾具14，加以旋轉運動、擺動運動、 前後移動、平行移動及昇降等，由檢測人員Q操作操作部 27就可輕易地進行玻璃基板1的表面及背面的巨視觀察。 又將巨視檢查用夾具1 4加以前後移動（Υ方向）及平 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填窝參頁) 裝· 1111111-I1IIIIII 459130 A7 __B7_____ V. Description of the invention (17) The robotic arm 4a holds the glass substrate 1 to be inspected firmly. Therefore, when the other robotic arm 4b takes out the inspected glass substrate 1 from the inspection device 3, the robotic arm 4a (please read the note § on the back of the page before filling this page) loads the glass substrate 1 on the inspection device 3. Inside. The automatic conveyor 4 will rotate in the direction of the arrow A and be positioned at the position of the second cassette 2b, and the other automatic arm 4b stores the held and inspected glass substrate 1 in the 2b of the second cassette, and then moves to the arrow The A direction is positioned at the position of the first cassette 2a. The above embodiment is a substrate device for macroscopic observation for visual inspection of the glass substrate 1 or microscopic observation for magnified inspection of the image of the glass substrate 1, and a fixed microscopic inspection fixture holding the glass substrate 1 for microscopic observation is provided. 6, and a macro-vision inspection jig 1 is installed on the glass substrate 1 for micro-vision inspection. The macro-vision inspection and micro-vision observations can be performed at the same position at the same time. In the past, macro-vision observation and micro-vision observation were performed with different devices, which can reduce the space for installing the device and achieve miniaturization of the device. As described above, macroscopic observation and microscopic observation can be performed at the same location, and it is not necessary to transfer the glass substrate 1 between different devices of the macroscopic observation and microscopic observation, which can shorten the inspection time of the glass substrate 1 and shorten the entire working time. Printed by the Consumer Cooperative of the Ministry of Intellectual Property Bureau. In other words, the macro inspection and micro vision observation can be performed at the same position of the inspection device 3, without the need to transfer the glass substrate to different devices for macro vision observation and micro vision observation. 1 Change to the macro-vision inspection jig 14 or micro-vision inspection jig 6 to perform macro-vision observation and micro-vision observation at the same time, which can shorten the inspection time. The glass substrate 1 stored in the cassette station 2 is taken out by the automatic conveyer 4 and transferred to the inspection device 3. After the paper size is checked, the Chinese national standard (CNS) A4 specification (210 X 297 mm) is applied. 459130 A7 B7 Economy Printed by the Consumer Cooperative of the Ministry of Intellectual Property Bureau. 5. Description of the invention (1δ) The macroscopic observation and microscopic observation are performed in the device 3, which can shorten the glass substrate 1 that will complete the macroscopic / microscopic observation inspection. 3 Take out and transfer to the continuous inspection operation time of cassette station 2 to improve inspection efficiency. Another example is that the microscopic inspection jig 6 is fixed, so that inspection can be performed without being affected by vibration, and a sharper high-quality image of the defect G, which is magnified by the microscope 9, can be obtained, and the microscopic observation performance is improved. The jig 14 for macroscopic inspection may be divided into retreats to increase the degree of freedom of swinging and design of the glass substrate 1. During macroscopic observation, the macroscopic inspection fixture 14 needs to be rotated, swung, moved back and forth, parallel, and lifted. For example, first raise the macroscopic inspection fixture 14 and tilt it for macroscopic inspection and then swing it. Macro inspection, and then rotate according to the defect type (direction of defect) of the glass substrate 1 to perform macro inspection at an observation angle suitable for the inspector Q. Finally, move forward and backward to the inspector Q and move the inspector Q left and right. By lifting in the Z direction, the defect on the glass substrate 1 is adjusted to a position most suitable for inspection by the inspector Q, for example, moved in front of the inspector Q. It is also possible to rotate the macroscopic inspection jig 14 to invert the glass substrate 1 to perform macroscopic observation of the back surface of the glass substrate 1. In other words, during the macroscopic observation of the inspection device 3, the macroscopic inspection jig 14 supporting the glass substrate 1 can be rotated, swung, moved back and forth, moved in parallel, lifted, etc., and the inspector Q can operate the operation unit 27. The macroscopic observation of the front and back surfaces of the glass substrate 1 can be easily performed. Move the jig inspection jig 14 back and forth (Υ direction) and the size of the plain paper to the Chinese National Standard (CNS) A4 (210 X 297 mm) (please read the precautions on the back before filling in the reference page) Hold
* IV -I I! —訂---------炊 459130 A7 B7* IV -I I! —Order --------- Cooking 459130 A7 B7
IQ 五、發明說明（） 行移動（X方向），可修正玻璃基板1在進行巨視觀察時 偏離基準位置的偏差。 {請先閱讀背面之注意事項再填寫本頁) 又夾具機構5，是由支撐構件12，及對此支撐構件12 的前端可旋轉自如的巨視檢查用夾具1 4所構成’並備有將 支撐構件12與巨視檢查用夾具14整體加以旋轉運動、擺動 運動、前後移動、平行移動及昇降的各機構’可降低夾具 機構5的製造成本及精小化。 再以巨視觀察時，可將巨視檢查用夾具14傾斜，前後 移向檢測人員Q，亦可對檢測人員Q做左右方向的移動及Z 方向的昇降，可將玻璃基板調整爲檢測人員Q容易觀察的 傾斜角1亦可不增加檢測人員Q與玻璃基板1的間隔，將 玻璃基板1拉近到容易觀察其表面或背面的位置，使檢測 人員Q在巨視觀察時更容易檢查出缺陷G。 經濟部智慧財產局員工消費合作杜印製 又巨視觀察時，即使照明裝置8的照射領域W不夠廣 ，可由平行移動機構24的操作，將巨視檢査用夾具14向 X-Y方向作平行移動或向Z方向昇降，即可對大型玻璃基板 1做全面照射。又檢測人員Q可不必移動觀察位置，如對檢 測人員Q前方的容易觀察視野範圍加以部分照射，將巨視 檢查用夾具14向X-Y方向進行光柵掃描（raster scan)。 尤其對於大型玻璃基板1的巨視觀察最爲有效。亦可使用 照射領域W較窄的照明裝置8。例如使用照射領域W較窄 的照明裝置8對大玻璃基板1做巨視照明時，僅能照射到局 部，這時可將巨視檢查用夾具1 4向X方向或Z方向移動， 即可觀察到玻璃基板1的全部。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 45 913 0 A7 B7 五、發明說明（2〇) (諳先閱讀背面之注意事項再填寫本頁) 對於形成規則性型樣缺陷的玻璃基板1，只要由旋轉 驅動機構21的旋轉將巨視檢查用夾具14旋轉90度或45度 等狀態，即可做巨視觀察，換言之，對於形成規則性型樣 缺陷的玻璃基板1，僅由檢測人員Q對操作部27給予旋轉 指令，即可做巨視觀察。 由巨視觀察檢查出玻璃基板1有缺陷G時，可由構成 各雷射光源19a、19b，將雷射光LI、L2的交差點對準缺 陷G的位置，即可輕易地求出缺陷G的座標（X，y )。此 缺陷G的座標（X，y )，可供微視觀察時定位缺陷位置的 資料。. 此缺陷G的座標（X，y )，是由裝設在巨視檢査用夾 具1 4上的各雷射光源1 9 a、1 9 b所測定，所以夾具機構5即 使有旋轉運動、擺動運動、前後移動、平行移動及昇降等 運動，亦不致於影響巨視檢查用夾具14上固有的座標系X-y，可經常由同一座標系x-y獲得缺陷G的座標（X ’ y ) 値。 經濟部智慧財產局員工消費合作社印製 微視觀察時，是根據巨視觀察所檢出的巨視檢査用夾 具1 4上固有座標系x-y所測定缺陷座標（X，y )値定位顯 微鏡9，所以即使巨視觀察時，夾具機構5有旋轉運動' 擺 動運動、前後移動、平行移動及昇降等運動，亦可將顯微 鏡準確定位在微視檢查用夾具6上面的玻璃基板1的缺陷G 的位置。 本發明並不僅限定於上述這一種實施形態’，可改變爲 下記不同形態。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 459130 A7 _ B7 五、發明說明（21) (請先閲讀背面之注意事項再填寫本頁) 例如夾具機構5可裝設馬達等旋轉源3 0，如第i 4圖所 示，將此旋轉源3 0的旋轉輸出連結在旋轉軸3 1。亦可將此 旋轉軸3 1介由連結構件3 2連結在上述旋轉軸1 〇。這種構 成亦與上述實施形態一樣，在進行巨視觀察時，仍可將夾 具機構5做旋轉運動、擺動運動、前後移動、平行移動及 昇降等運動。 夾具機構5可由檢查裝置3退避而在其鄰接的位置進行 巨視觀察。亦可將此檢查裝置3的鄰接位置做爲巨視站的 專用位置。換言之，夾具機構5的巨視檢查用夾具14，可 在鄰接於檢查裝置3的位置對旋轉軸1 0做擺動、傾動、反 轉（箭頭C方向），可對於上述退避方向（X方向）成交 差方向移動（前後方向：Y方向、平行方向，昇降方向：Z 方向）f可在玻璃基板1表面的約中心位置旋轉微視檢査 用夾具6 (箭頭D方向）。又在此檢査裝置3相鄰接位置的 上方設有巨視照明裝置。 經濟部智慧財產局員工消費合作社印製 如此可與上述實施形態同樣，例如將巨視撿查用夾具 14，加以上昇，再傾斜進行巨視檢查，再擺動進行巨視檢 查，然後旋轉玻璃基板1將玻璃基板1依其缺陷的種類（缺 陷的方向）調整爲適合於檢測人員Q觀察的角度進行巨視 檢査，再拉向檢測人員Q的Y方向移動，及對檢測人員Q 做左右移動及Z方向的昇降，將玻璃基板1的缺陷調整在最 適合於檢測人員Q觀察的位置，如移向檢測人員Q前面。 最後將巨視檢查用夾具14加以旋轉使玻璃基板1反轉，以 便觀察玻璃基板1背面。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 459130 A7 B7 五、發明說明（22) 如此可在檢查裝置3相鄰接位置進行巨視觀察，不但 與上述第1實施形態具有相同效果，且檢查裝置3所容易受 微視觀察用顯微鏡9及門型臂9 a等反射光的亂反射，以及 這些亂反射光對背景的影響等均可避免，因此可提高巨視 觀察的精度。但是需將夾具機構5退避所費時間使作業時 間比上述實施形態稍增，但提高目視的巨視觀察精度，足 可彌補其缺點。 【圖面之簡單說明】 【第1圖】本發明基板檢查裝置之一實施形態正視構 成圖。 【第2圖】本發明基板檢查裝置之一實施形態下視構 成圖。 【第3圖】本發明基板檢查裝置之一實施形態的夾具 機構具體構成圖。 【第4圖】本發明基板檢查裝置之一實施形態的夾具 機構旋轉說明圖。 【第5圖】由本發明基板檢查裝置之一實施形態的夾 具機構求出缺陷座標方法說明圖。 【第6圖】本發明基板檢查裝置之一實施形態的巨視 觀察操作說明圖。 【第7圖】本發明基板檢查裝置之一實施形態的巨視 觀察操作說明圖。 【第8圖】本發明基板檢查裝置之一實施形態的巨視 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閲讀背面之注意事項再填寫本頁) 裝--------訂！ !!線 1 - 經濟部智慧財產局員工消費合作社印製IQ V. Description of the invention () The line movement (X direction) can correct the deviation of the glass substrate 1 from the reference position during macroscopic observation. {Please read the precautions on the back before filling in this page.) The fixture mechanism 5 is composed of a support member 12 and a giant vision inspection fixture 14 that can rotate freely at the front end of the support member 12. The mechanism 12 that rotates, swings, moves back and forth, moves in parallel, and lifts the member 12 and the jig 14 for inspection as a whole can reduce the manufacturing cost and downsizing of the jig mechanism 5. When observing with giant vision, the giant inspection inspection jig 14 can be tilted and moved back and forth toward the inspector Q. The inspector Q can also be moved left and right and raised and lowered in the Z direction. The glass substrate can be adjusted so that the inspector Q can easily observe. The inclination angle of 1 can also not increase the interval between the inspector Q and the glass substrate 1, and bring the glass substrate 1 closer to a position where it is easy to observe the surface or the back thereof, so that the inspector Q can more easily detect the defect G when the macroscopic observation is performed. In the case of consumer cooperation with the Intellectual Property Bureau of the Ministry of Economic Affairs, when printed by Du Shi, even if the irradiation area W of the lighting device 8 is not wide enough, the giant inspection inspection jig 14 can be moved in the XY direction or Z by the operation of the parallel moving mechanism 24. The large glass substrate 1 can be fully irradiated when the direction is raised and lowered. In addition, the inspector Q does not need to move the observation position. For example, if the easy-to-observe visual field in front of the inspector Q is partially irradiated, the macroscopic inspection jig 14 is raster scanned in the X-Y direction. Particularly, it is most effective for macroscopic observation of the large glass substrate 1. It is also possible to use a lighting device 8 having a narrow irradiation range W. For example, when using the illumination device 8 with a narrow irradiation area W to illuminate the large glass substrate 1, only the local area can be irradiated. At this time, the macroscopic inspection fixture 14 can be moved in the X direction or the Z direction, and the glass substrate can be observed. All of 1. This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 45 913 0 A7 B7 V. Description of the invention (2) (谙 Please read the notes on the back before filling this page) For the regular type As long as the glass substrate 1 with the same defect is rotated by the rotation driving mechanism 21 to rotate the macrovision inspection jig 14 by 90 or 45 degrees, the macroscopic observation can be performed. In other words, for the glass substrate 1 with regular pattern defects, Only by the inspector Q giving a rotation instruction to the operation unit 27, macroscopic observation can be performed. When the defect G is detected on the glass substrate 1 by macroscopic observation, the coordinates of the defect G can be easily obtained by arranging the laser light sources 19a and 19b and aligning the intersection of the laser light LI and L2 with the position of the defect G ( X, y). The coordinates (X, y) of this defect G can be used to locate the location of the defect during microscopic observation. The coordinates (X, y) of this defect G are measured by the laser light sources 1 9 a and 1 9 b installed on the jig 14 for inspection. Therefore, the jig mechanism 5 can rotate or swing , Forward and backward movements, parallel movements, and elevating movements will not affect the coordinate system Xy inherent to the macroscopic inspection fixture 14, and the coordinate (X 'y) of the defect G can often be obtained from the same coordinate system xy. When the microscopic observation is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the defect coordinates (X, y) measured by the intrinsic coordinate system xy on the macroscopic inspection fixture 14 detected by the macroscopic observation are located on the microscope 9. During the macroscopic observation, the clamp mechanism 5 has a rotation motion, a swing motion, a back-and-forth movement, a parallel movement, and a lifting movement, and the microscope can also be accurately positioned at the position of the defect G of the glass substrate 1 on the microscopic inspection fixture 6. The present invention is not limited to the one embodiment described above, and may be modified into the following different modes. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 459130 A7 _ B7 V. Description of the invention (21) (Please read the notes on the back before filling this page) For example, the fixture mechanism 5 can be installed A rotation source 30 such as a motor is connected to a rotation shaft 31 as shown in Fig. I4. This rotating shaft 31 may be connected to the rotating shaft 10 via a connecting member 32. This structure is also the same as the above-mentioned embodiment. When performing macroscopic observation, the gripper mechanism 5 can still be rotated, swung, moved back and forth, parallel, and lifted. The jig mechanism 5 can be retracted by the inspection device 3 to perform macroscopic observation at its adjacent position. The adjoining position of this inspection device 3 may also be used as a dedicated position for the giant viewing station. In other words, the macroscopic inspection jig 14 of the jig mechanism 5 can swing, tilt, and reverse the rotation axis 10 at the position adjacent to the inspection device 3 (arrow C direction), and can make a difference in the retreat direction (X direction). Directional movement (front-rear direction: Y direction, parallel direction, lifting direction: Z direction) f The microscopic inspection jig 6 (arrow D direction) can be rotated at approximately the center position on the surface of the glass substrate 1. A giant-view illumination device is provided above the adjacent position of the inspection device 3. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs can print the same as the above embodiment. For example, the jig inspection jig 14 is raised, then tilted for the macro inspection, and then swung for the macro inspection, and then the glass substrate 1 is rotated to place the glass substrate. 1 According to the type of defect (the direction of the defect), adjust it to an angle suitable for the inspection of Q by the inspector, and then pull it to move in the Y direction of the inspector Q, and move the inspector Q left and right and up and down in the Z direction. The defect of the glass substrate 1 is adjusted to a position most suitable for inspection by the inspector Q, such as moving toward the front of the inspector Q. Finally, the macroscopic inspection jig 14 is rotated to invert the glass substrate 1 so that the rear surface of the glass substrate 1 can be observed. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 459130 A7 B7 V. Description of the invention (22) In this way, macroscopic observation can be performed at the adjacent position of the inspection device 3, which is not only the same as the first embodiment described above. It has the same effect, and the inspection device 3 is susceptible to the random reflection of reflected light such as the microscopic observation microscope 9 and the portal arm 9 a, and the influence of these random reflected light on the background can be avoided. Therefore, the macroscopic observation can be improved. Precision. However, it takes time to withdraw the jig mechanism 5 to make the working time slightly longer than the above embodiment. However, improving the macroscopic observation accuracy of the visual observation can sufficiently make up for its shortcomings. [Brief description of the drawing] [Fig. 1] An embodiment of a substrate inspection apparatus of the present invention is a front view composition diagram. [Fig. 2] A bottom view composition view of one embodiment of a substrate inspection apparatus of the present invention. [Fig. 3] A specific configuration diagram of a jig mechanism according to an embodiment of the substrate inspection apparatus of the present invention. [Fig. 4] An explanatory view of rotation of a jig mechanism according to an embodiment of a substrate inspection apparatus of the present invention. [Fig. 5] An explanatory diagram of a method for obtaining a defect coordinate by a clamping mechanism according to an embodiment of the substrate inspection apparatus of the present invention. Fig. 6 is an explanatory view of a macroscopic observation operation of an embodiment of a substrate inspection apparatus of the present invention. Fig. 7 is an explanatory view of a macroscopic observation operation of an embodiment of a substrate inspection apparatus of the present invention. [Figure 8] The giant paper of one of the embodiments of the substrate inspection device of the present invention is a Chinese paper standard (CNS) A4 (210 X 297 mm). (Please read the precautions on the back before filling this page) ------- Order! !! Line 1-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs
TO 459130 A7 _____B7 ___ 五、發明說明（23) 觀察操作說明圖。 【第9圖】本發明基板檢查裝置之一實施形態的巨視 觀察操作說明圖。 【第10圖】本發明基板檢查裝置之一實施形態的巨視 觀察操作說明圖。 【第11圖】本發明基板檢査裝置之一實施形態在進行 玻璃基板背面巨視觀察操作時的夾具機構旋轉說明圖。 【第1 2圖】本發明基板檢查裝置之一實施形態在進行 玻璃基板平行移動之說明圖。 【第1 3圖】本發明基板檢查裝置之一實施形態在進行 玻璃基板平行移動之說明圖。 【第14圖】本發明基板檢査裝置之一實施形態的夾具 機構變形例構成圖。 主要元件照表 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作杜印製 1 基 板 2 卡 匣 站 2a，2b 卡 匣 3 檢 查 裝 置 4 白 動 運 送 機 4a ， 4b 機 械 臂 5 夾 具 機 構 6 檢 查 用 夾 具 7 昇 降 釘 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ^26 - 45 913 0 A7 B7 五、發明說明（24) 經濟部智慧財產局員工消費合作社印製 8 照 明 裝 置 9 顯 微 鏡 9a 門 型 手 臂 10 旋 轉 軸 11 旋 轉 源 12 支 撐 構 件 13 前 r.i: r 珊 部 14 巨 視 檢 查 用 夾具 15 動 力 軸 16 旋 轉 體 17 - 18 同 步 皮 帶 19a ’ 19b 雷 射 光 源 20a， 20b 標 尺 導 軌 21 旋 轉 驅 動 機 構 22 擺 動 旋 轉 機 構 23 前 後 移 動 機 構 24 平 行 移 動 機 構 25 昇 降 機 構 26 控 制 部 27 操 作 部 30 旋 轉 源 3 1 旋 轉 軸 <請先閱讀背面之注意事項再填寫本頁> 裝 --II訂--------線 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）TO 459130 A7 _____B7 ___ V. Description of the invention (23) Observe the operation instructions. Fig. 9 is an explanatory view of a macroscopic observation operation of an embodiment of a substrate inspection apparatus of the present invention. Fig. 10 is an explanatory view of a macroscopic observation operation of an embodiment of a substrate inspection apparatus of the present invention. [Fig. 11] An explanatory view of the rotation of a jig mechanism when performing a macroscopic observation operation on a rear surface of a glass substrate according to an embodiment of the substrate inspection device of the present invention. [Fig. 12] An explanatory view of one embodiment of the substrate inspection apparatus of the present invention in which a glass substrate is moved in parallel. [Fig. 13] An explanatory view of one embodiment of the substrate inspection apparatus of the present invention in which a glass substrate is moved in parallel. [Fig. 14] Fig. 14 is a configuration diagram of a modification of the jig mechanism according to an embodiment of the substrate inspection apparatus of the present invention. Main components according to the table (please read the precautions on the back before filling out this page) Consumption cooperation by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 Printed substrate 2 Cassette station 2a, 2b Cassette 3 Inspection device 4 White moving conveyors 4a, 4b Robotic arm 5 Fixture mechanism 6 Inspection fixture 7 Lifting nails The paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) ^ 26-45 913 0 A7 B7 V. Description of the invention (24) Intellectual property of the Ministry of Economic Affairs Printed by the Bureau's Consumer Cooperatives 8 Lighting device 9 Microscope 9a Gate arm 10 Rotary shaft 11 Rotary source 12 Support member 13 Front ri: r Shanbe 14 Jig inspection fixture 15 Power shaft 16 Rotating body 17-18 Timing belt 19a '19b Laser light sources 20a, 20b Ruler guide 21 Rotary drive mechanism 22 Swing and rotation mechanism 23 Forward and backward movement mechanism 24 Parallel movement mechanism 25 Lifting mechanism 26 Control section 27 Operating section 30 Rotation source 3 1 Rotation Shaft < Please read the precautions on the back before filling in this page > Binding --II order -------- line This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm)