JP3929358B2 - Holder device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a holder device for holding a specimen such as a glass substrate of a flat panel display (FPD) such as a liquid crystal display.
[0002]
[Prior art]
Macro inspection is performed on the glass substrate of the liquid crystal display using macro illumination. In this macro inspection, the surface of the glass substrate is irradiated with macro illumination light for observation, and defective portions such as scratches, chips, dirt, and dust are visually detected from changes in reflected light from the glass substrate surface.
[0003]
On the surface of the glass substrate, for example, a line or rectangular pattern is formed with regularity. On the glass substrate of the liquid crystal display, ribs are formed as a pattern constituting a rectangular TFT.
[0004]
The present applicant observed defects on the glass substrate by changing the incident angle of the macro illumination light with respect to the TFT patterns regularly arranged in a lattice pattern when the macro illumination light was irradiated from above the glass substrate at a predetermined angle. However, I found out how the appearance of defects changes. In other words, when the appearance of the defect was examined by changing the glass substrate mounting angle to 90 ° with respect to the incident direction of the macro illumination light, the direction of the pattern rotated 90 °, so reflection from the defect on the elongated pattern It turns out that the conditions change.
[0005]
For example, if the arrangement of the glass substrate is such that the long side of the rectangular pattern is perpendicular to the irradiation direction of the macro illumination light, the illumination direction is orthogonal to the long side rib and the short side rib The illumination direction becomes parallel.
[0006]
Also, if the short side of the rectangular pattern is perpendicular to the irradiation direction of the macro illumination light, the illumination direction is orthogonal to the short side rib and the illumination direction is parallel to the long side rib. Become.
[0007]
When the irradiation direction of the macro illumination light is changed to 90 ° with respect to the short patterns having different aspect ratios as described above, the generation conditions of the scattered light and the diffracted light are changed. Therefore, the illumination direction is changed with respect to such a lattice pattern. The Applicant has confirmed that the defects that could not be seen become visible.
[0008]
[Problems to be solved by the invention]
However, in the substrate inspection apparatus with macro illumination, rotating the glass substrate by 90 ° within the apparatus main body has not been realized for the following reason.
[0009]
The glass substrate is placed and fixed on the holder. In order to rotate the glass substrate while the glass substrate is fixed to the holder, it is conceivable to rotate the holder that is one size larger than the glass substrate and the fixing portion integrally.
[0010]
For this reason, since the diagonal length of the holder becomes the diameter of the rotating circumference, the turning diameter when the glass substrate and the holder are rotated is increased, and the size of the inspection apparatus main body is increased in proportion to this. Become.
[0011]
In addition, when providing a rotating device that raises and rotates the glass substrate from the lower part of the holder, the rotation support portion holds the glass substrate provided in a frame-shaped holder capable of transmitting illumination horizontally, It is necessary to equip the plate.
[0012]
Thus, in the method of raising and lowering the second rotation support part for placing and rotating the glass substrate from below the supporting bars and the glass plate, the second rotation support part must be equipped and supported by this. The bars and glass plates are separated and the strength is significantly reduced.
[0013]
Further, since a transmission illumination device is provided at the lower part of the holder, it is difficult to provide a mechanism such as a rotation device.
[0014]
Therefore, it has not been realized to incorporate the rotating device into the substrate holder of the substrate inspection apparatus for the above reasons.
[0015]
As another idea, a method is conceivable in which a glass substrate is rotated by 90 ° and re-transferred by a glass substrate transfer device provided in parallel with the substrate inspection apparatus. In this case, the glass substrate being inspected by the robot of the glass substrate transfer device is once taken out and the glass substrate is rotated outside the substrate inspection device, and then the glass substrate is returned to the inspection microscope with macro illumination again. This results in a large loss of inspection tact time.
[0016]
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a holder device that can minimize a space and can rotate a glass substrate within the device body.
[0017]
[Means for Solving the Problems]
The present invention provides a lift pin support comprising a holder main body on which a plurality of arc-shaped openings are formed concentrically to place a glass substrate, and a plurality of lift pins for supporting the glass substrate on the holder main body through the arc-shaped openings. And a drive unit that moves the lift pins up and down to move the lift pins up and down through the arcuate openings and rotates the lift pin support in a raised state. It is a holder apparatus.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[0019]
1 to 3 are configuration diagrams of the holder device, in which FIG. 1 is a front view, FIG. 2 is a top view, and FIG. 3 is a side view. This holder device is applied to a substrate inspection device that performs macro inspection and micro inspection on a glass substrate 1 of a liquid crystal display, for example. The glass substrate 1 includes a large size of 1250 × 1100 mm, for example.
[0020]
A base 3 is provided in the inspection apparatus main body 2, and a holder main body 4 is provided on the base 3. The holder body 4 is formed with a plurality of arc-shaped openings 5-1 to 5-4 as shown in FIG. Further, a plurality of arc-shaped openings 6 are also formed on the inner peripheral side of these openings 5-1 to 5-4. These openings 5-1 to 5-4, 6 are formed concentrically around the center position 7.
[0021]
Of these, the openings 5-1 and 5-2 are formed at the outermost peripheral position, are formed symmetrically with respect to each other via the center position 7, and have a spread angle of 90 degrees or more and within 180 degrees when viewed from the center position 7. Is formed.
[0022]
The openings 5-3 and 5-4 are formed on the inner peripheral side of the openings 5-1 and 5-2, and are located at the center positions of the openings 5-1 and 5-2. 7 and are formed symmetrically with respect to each other, and are formed with a spread angle of 90 degrees or more and 180 degrees or less when viewed from the center position 7.
[0023]
Each of the openings 5-1 to 5-4 and 6 supports a plurality of arc frames 8 formed concentrically around the center position 7 and the arc frames 8 with each other. The plurality of support frames 9 are formed in the radial direction of the concentric circles to be formed.
[0024]
A rotating mechanism 10 is provided below the holder body 4 as shown in FIG. The rotating mechanism 10 lifts the glass substrate 1 above the holder body 4 through the openings 5-1 to 5-4 formed in the holder body 4 and rotates the glass substrate 1 by, for example, approximately 90 degrees.
[0025]
Specifically, as shown in FIGS. 1 and 2, the driving unit 11 and a lift pin mechanism 12 provided at a driving end of the driving unit 11 are included. The drive unit 11 has a function of moving the lift pin mechanism 12 up and down and a function of rotating the lift pin mechanism 12.
[0026]
As shown in FIG. 2, the lift pin mechanism 12 includes lift pin support bars 13 and 14 provided in directions orthogonal to each other, and lift pins 15 to 15 provided upright at both ends of the lift pin support bars 13 and 14. 18 and. Among the lift pins 15 to 18, the lift pins 15 and 16 are provided at positions corresponding to the openings 5-1 and 5-2 of the holder body 4, and the lift pins 17 and 18 are openings of the holder body 4. It is provided at a position corresponding to 5-3 and 5-4.
[0027]
Therefore, when the lift pin mechanism 12 is lifted by the drive unit 11, the lift pins 15 and 16 protrude through the openings 5-1 and 5-2 of the holder body 4 to the surface side of the holder body 4 by a predetermined height, and The lift pins 17 and 18 also protrude from the surface side of the holder body 4 by a predetermined height through the openings 5-3 and 5-4 of the holder body 4.
[0028]
Further, when the lift pin mechanism 12 is rotated while being lifted by the drive unit 11, the lift pins 15 and 16 move in an arc shape along the openings 5-1 and 5-2 and the lift pins 17 and 18. Also move in an arc along each of the openings 5-3 and 5-4.
[0029]
A swing mechanism 20 that swings the holder body 4 is provided below the base 3 as shown in FIG. That is, the hinges 21 are rotatably provided to the hinge support members 22 at both ends as viewed from the front side of the base 3. These hinge support members 22 are fixed to the base 2. The pivot shafts of the hinges 21 are provided in the horizontal direction (X direction) when viewed from the front side in order to swing the holder body 4 in the direction of raising the holder body 4 or returning it to the horizontal state (arrow A direction).
[0030]
These hinges 21 slide with respect to the respective linear guides 23 provided on the back surface of the holder body 4.
[0031]
These linear guides 23 slide with respect to the hinge 21 when the holder main body 4 is raised to cause the holder main body 4 to protrude to the front side. The lower end of the holder main body 4 is lowered from the front side edge portion of the base 3 by swinging the holder main body 4.
[0032]
Further, a link 24 and a jack 25 for swinging the holder body 4 in the direction of the arrow A are provided below the base 3.
[0033]
The link 24 is formed in a fixed length, and is provided between an extended end portion 26 that extends downward from the base 3 and a support member 27 that is provided at the lower portion of the holder body 4. The link 24 is rotatable at each fulcrum 26a and 27a with respect to the extended end portion 26 and the support member 27, respectively.
[0034]
The jack 25 includes a telescopic rod 25 a and is provided between the support member 27 side and the track 28 in the link 24. The jack 25 is rotatably connected to a fulcrum 29 with respect to the link 24 at the tip of the telescopic rod 25a, and the lower end of the jack 25 can be rotated to a fulcrum 31 with respect to a variable portion 30 movable on the linear track 28. It is connected. The variable unit 30 moves on a linear track 28 provided in the Y direction.
[0035]
The lower end portion of the jack 25 is connected to the variable portion 30 on the linear track 28, but is not limited thereto, and may be fixed to a lower leg or the like of the inspection apparatus main body 2.
[0036]
Therefore, when the telescopic rod 25a of the jack 25 extends and the variable portion 30 moves to the front side on the linear track 28, the tip of the telescopic rod 25a of the jack 25 applies pressure to the support member 27 side of the link 24. At this time, since the other end of the jack 25 moves to the front side on the track 28 and the length of the link 24 is fixed, the jack 25 rotates around the fulcrum 31 as the telescopic rod 25a of the jack 25 extends. The link 24 rotates around the fulcrum 26a by the extension of the telescopic rod 25a of the jack 25.
[0037]
When the link 24 rotates around the fulcrum 26a, the length of the link 24 is fixed. Therefore, the fulcrum 27a connected between the link 24 and the support member 27 of the holder body 4 has the length of the link 24 as a radius. It moves on an arc centered on the fulcrum 26a.
[0038]
Therefore, when the link 24 rotates around the fulcrum 26a, the holder body 4 is raised in the direction of the arrow A with the hinge 21 as the swing center.
[0039]
When the holder body 4 is raised, the distance between the fulcrums 26a and 27a at both ends of the link 24 is fixed, and the distance between the fulcrum 26a of the link 24 and the hinge 21 is also fixed. Accordingly, when considering a triangle composed of the three fulcrum points 26a and 27a and the hinge 21, it can be seen that the distance between the fulcrum 27a and the hinge 21 is gradually shortened as the link 24 rotates about the fulcrum 26a.
[0040]
However, since the distance between the fulcrum 27a and the hinge 21 is gradually shortened, the holder body 4 slides on the straight guides 23 to the front side, and the edge that is the lower end side of the holder body 4 is the edge portion of the upper surface of the base 3 It protrudes to the front side.
[0041]
As the extension of the telescopic rod 25a of the jack 25 increases, the amount of rotation of the link 24 increases as the other end of the jack 25 moves to the front side on the track 28, and the rising angle of the holder body 4 increases. Accordingly, the amount of protrusion from the edge portion of the upper surface of the base 3 at the lower end side edge of the holder body 4 increases.
[0042]
When the rising angle of the holder body 4 increases as described above, the protruding amount of the edge on the lower end side of the holder body 4 increases, so that the edge on the lower end side of the holder body 4 is the edge on the upper surface of the base 3. Lower than part.
[0043]
Thus, if the lower end side edge of the holder main body 4 is lowered from the edge portion of the upper surface of the base 3, the distance between the upper portion of the glass substrate 1 described on the holder main body 4 and the observer approaches, for example, large glass. Without looking up at the upper end portion of the substrate 4 and over the entire surface of the large glass substrate 4, for example, a defect portion existing in the glass substrate 4 by capturing light in a reflection direction that differs depending on the direction of the defect portion such as a scratch or unevenness. Can be reliably identified.
[0044]
Further, since the other end of the jack 25 is moved to the front side and the back side on the track 28, the inclination angle of the holder body 4 can be increased by moving the jack 25 to the front side, and the jack 25 is moved to the back side. By moving, the height position of the holder body 4 when it is in a horizontal state can be lowered.
[0045]
Further, on the bases 3 at both ends of the holder main body 4, Y-direction moving mechanisms 40 and 41 are provided in parallel to each other. Between these moving mechanisms 40, 41, a gate pole arm 42 is provided so as to straddle the upper part of the holder body 4. The gate pole arm 42 is provided so as to be movable in the Y direction with respect to the moving mechanisms 40, 41, and the microscope 43 is provided so as to be movable in the X direction with respect to the gate pole arm 42.
[0046]
Although not shown, a macro illumination device is provided above the holder body 4, and a line transmission illumination device 44 is provided below the holder body 4. The line transmission illumination device 44 emits line illumination light parallel to the X direction using an optical fiber. The microscope 43 is placed on two illumination system guides 44 and 45 provided in parallel to each other in the Y direction. It moves in the Y direction in synchronization with the movement in the Y direction. Therefore, even if the microscope 43 moves in the XY direction, the area of the glass substrate 1 including the field of view of the microscope 43 is transmitted and illuminated.
[0047]
Further, on the front side of the inspection apparatus main body 2, an operation unit 47 for performing various operation instructions for performing a macro inspection and a micro inspection of the glass substrate 1 is provided.
[0048]
Next, the operation of the apparatus configured as described above will be described.
[0049]
On the holder body 4 in a horizontal state, a large glass substrate 1 having a size of 1250 × 1100 mm, for example, is placed. In this state, when illumination light is irradiated onto the surface of the glass substrate 1 from the macro illumination device provided above the holder body 4, the observer observes the change in the reflected light from the glass substrate 1, For example, defective portions such as scratches, chips, dirt, and dust adhesion on the surface of the glass substrate 1 are inspected.
[0050]
Further, when the telescopic rod 25a of the jack 25 is extended and the variable portion 30 moves to the front side on the linear track 28, the distal end of the telescopic rod 25a presses the support member 27 side of the link 24, so the telescopic rod 25a The jack 25 rotates about the fulcrum 31 and the link 24 rotates about the fulcrum 26a due to the extension of the telescopic rod 25a. Therefore, when the link 24 rotates around the fulcrum 26a, the holder body 4 is raised in the direction of the arrow A with the hinge 21 as the swing center.
[0051]
At this time, as the link 24 rotates around the fulcrum 26a, the distance between the fulcrum 27a and the hinge 21 gradually decreases, so that the holder body 4 slides on the linear guides 23 to the front side, and the lower end of the holder body 4 The side edge protrudes to the front side of the edge part of the upper surface of the base 3.
[0052]
As the extension of the telescopic rod 25a of the jack 25 increases, the rising angle of the holder body 4 increases as the other end of the jack 25 moves to the front side on the track 28, and accordingly, the lower end side of the holder body 4 increases. The protruding amount of the edge from the edge portion of the upper surface of the base 3 is increased, and the edge which is the lower end side of the holder body 4 is lowered from the edge portion of the upper surface of the base 3.
[0053]
The rising angle of the holder body 4 at this time can be set by the magnitude of extension of the telescopic rod 25a and the moving distance of the jack 25 on the linear track 28. When the telescopic rod 25a is continuously expanded and contracted, and the jack 25 is reciprocated on the linear track 28, the holder body 4 can swing continuously in the direction of the arrow A.
[0054]
In such a state that the holder main body 4 is set to an arbitrary rising angle or is continuously oscillating, the observer observes a change in light from the glass substrate 1, for example, the surface of the glass substrate 1. Macro inspection can be performed for defects such as scratches, chips, dirt, and dust adhesion.
[0055]
By the way, the applicant of the present application is that the pattern shape state on the glass substrate 1 when the glass substrate 1 is irradiated with illumination light, and the reflection conditions such as scattered light and diffracted light from minute irregularities change depending on the incident angle of the illumination light. Was confirmed by experiments.
[0056]
Also, the reflection conditions from the glass substrate 1 may differ depending on the relative relationship between the incident direction of illumination light and the pattern directionality, or the relative relationship between the directionality of linear defects such as chips and cracks. Confirmed by experiment.
[0057]
Thus, when it is desired to reliably detect various kinds of scratches, chips, dust, cracks, etc. on the surface of the glass substrate 1, the arrangement direction of the glass substrate 1 is rotated by 90 °, for example, or the glass substrate 1 is rotated 360 °. It is necessary to observe the macro.
[0058]
In such a case, the extension of the telescopic rod 25a of the jack 25 is returned to the original position, and the position of the other end of the jack 25 on the linear track 28 is returned to the original position. Thereby, the holder main body 4 returns to the original horizontal state.
[0059]
When the holder body 4 is in a horizontal state, the drive unit 11 raises the lift pin mechanism 12. When the lift pin mechanism 12 is lifted, the lift pins 15 and 16 among the lift pins 15 to 18 enter the openings 5-1 and 5-2 from the back side of the holder body 4, and the openings 5-1 and 5 are provided. -2 protrudes to the surface side of the holder body 4. At the same time, the lift pins 17 and 18 also enter the openings 5-3 and 5-4 from the back side of the holder body 4, and project to the front side of the holder body 4 through the openings 5-3 and 5-4. Become.
[0060]
And each lift pin 15-18 contact | abuts to the back surface of the glass substrate 1 on the holder main body 4, respectively, and raises the glass substrate 1 only predetermined height above the holder main body 4 by further raise of each lift pin 15-18.
[0061]
Next, the drive unit 11 rotates the lift pin mechanism 12 by, for example, 90 degrees with the lift pin mechanism 12 raised, that is, with the glass substrate 1 lifted above the holder body 4. Thereby, the direction of the glass substrate 1 is rotated by 90 degrees, for example.
[0062]
Next, the drive unit 11 lowers the lift pin mechanism 12. When the lift pin mechanism 12 is lowered, the glass substrate 1 held on the lift pins 15 to 18 is placed on the holder body 4 again. At this time, the glass substrate 1 is rotated by 90 degrees, for example, but since the shape is formed in a substantially square shape, the glass substrate 1 can be placed on the holder body 4. In addition, even if the glass substrate 1 is formed in a somewhat rectangular shape, it can be placed on the holder main body 4 again after, for example, 90-degree rotation.
[0063]
Thus, when the glass substrate 1 is again placed on the holder body 4 after being rotated, for example, 90 degrees, the illumination light is again irradiated on the surface of the glass substrate 1 from the macro illumination device, and the observer can The change in the reflected light is observed, and for example, a defective portion such as a scratch, a chip, a dirt, and a dust adhesion on the surface of the glass substrate 1 is inspected.
[0064]
Thereby, the glass substrate 1 is rotated by, for example, 90 °, and the relative relationship between the incident direction of the illumination light and the pattern directionality, or the relative relationship between the directionality of linear defects such as chippings and cracks. When the reflection conditions from different glass substrates 1 are changed, various kinds of scratches, chips, dust, cracks, etc. on the surface of the glass substrate 1 can be reliably detected.
[0065]
In the same manner as described above, the observer observes the change in the light from the glass substrate 1 while the holder body 4 is set to an arbitrary rising angle or is continuously swung, for example, glass. It is possible to perform macro inspection for defective portions such as scratches, chips, dirt, and dust adhesion on the surface of the substrate 1.
[0066]
When performing the micro inspection, the holder body 4 is installed in a horizontal state, the portal post arm 42 is moved in the Y direction with respect to the moving mechanisms 40 and 41, and the microscope 43 is moved in the X direction with respect to the gate post arm 42. Then, the microscope 43 is disposed above the defective portion detected by the macro inspection. At the same time, the line transmission illumination device 44 moves in the Y direction in synchronization with the movement of the microscope 43 in the Y direction, and transmits and illuminates the region of the glass substrate 1 including the field of view of the microscope 43. Thereby, an enlarged image of the defective portion is obtained by the microscope 43, and this image is displayed on, for example, a monitor device, and a macro inspection is performed.
[0067]
As described above, in the above-described embodiment, the holder main body 4 is formed with the plurality of arc-shaped openings 5-1 to 5-4, and the lift pins 15 to 18 of the lift pin mechanism 12 are respectively connected to the openings 5-1. Is raised through ~ 5-4 to lift the glass substrate 1 above the holder body 4 by a predetermined height. In this state, the lift pin mechanism 12 is rotated, for example, 90 degrees, and then the lift pin mechanism 12 is lowered to lower the holder body. Therefore, the space can be minimized without increasing the size of the inspection apparatus, and the glass substrate 1 can be rotated at an arbitrary angle, for example, 90 °.
[0068]
Since the rotation of the glass substrate 1 is performed above the holder main body 4, the space when the glass substrate 1 rotates is substantially the same as the installation space of the holder main body 4, which is unnecessary for rotating the glass substrate 1. Does not take up space.
[0069]
Accordingly, the glass substrate 1 is rotated by 90 °, for example, and depends on the relative relationship between the incident direction of illumination light and the pattern directionality, or the relative relationship between the directionality of linear defects such as chips and cracks. When the reflection condition from the glass substrate 1 is changed, various kinds of scratches, chips, dust, cracks and the like on the surface of the glass substrate 1 can be reliably detected.
[0070]
Moreover, if it is a system which raises and lifts each lift pin 15-18, the large-sized glass substrate 1 of 1250 * 1100mm can respond, for example.
[0071]
In addition, such a device can reduce the tact time of the inspection of the glass substrate 1 as compared with a method in which the device is once transported out of the inspection device by the transport device and rotated by 90 ° and re-transported.
[0072]
When the glass substrate 1 is raised and rotated, the glass substrate 1 is supported by the lift pins 15 to 18, so that the glass substrate 1 is supported by point contact and does not affect the surface of the glass substrate 1. .
[0073]
And four lift pins 15-18 are respectively passed through the openings 5-1 and 5-2 formed at the outermost peripheral position and the openings 5-3 and 5-4 formed on the inner peripheral side thereof. Since the glass substrate 1 is supported, the glass substrate 1 can be supported at each of the four points of each corner portion, and can be supported and rotated with good stability.
[0074]
Each of the openings 5-1 to 5-4, 6 is formed by a plurality of arc frames 8 formed concentrically and a plurality of support frames 9 that support the arc frames 8 with each other. The transmitted illumination light from the transmitted illumination device provided below the holder main body 4 can be applied to the glass substrate 1 through the openings 5-1 to 5-4 and 6, and the decrease in the amount of transmitted illumination light can be reduced.
[0075]
Furthermore, without affecting a moving body such as a transmission illumination device provided below the holder body 4, the driving unit 11 is provided in the inspection microscope body with macro illumination, and the glass substrate 1 is placed at an arbitrary angle, for example, It can be rotated 90 °.
[0076]
Note that the present invention is not limited to the above-described embodiment, and can be variously modified without departing from the scope of the invention in the implementation stage.
[0077]
Furthermore, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent requirements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. If the effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.
[0078]
For example, in the above-described embodiment, the case where the sample is applied to the macro inspection of the glass substrate 1 of the liquid crystal display as a specimen has been described. However, the present invention is not limited to this, and a transparent substrate used for a flat panel display such as a plasma display or an EL display is used. Applicable to inspection. Furthermore, the present invention can be applied to all devices that change the orientation of specimens such as various substrates and flat plates.
[0079]
Further, the shape of each of the openings 5-1 to 5-4, 6 is not limited to the above-described embodiment, and may be any shape that can rotate the lift pin mechanism 12 by, for example, 90 degrees. For example, the mechanism 12 is not limited to 90 degrees, and may be shaped to be rotatable by an arbitrary angle such as 45 degrees or 180 degrees. Further, the lift pin mechanism 12 is not limited to the four lift pins 15 to 18, and at least three or more lift pins may be provided.
[0080]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to provide a holder device that can minimize the space and can rotate the glass substrate within the apparatus main body.
[Brief description of the drawings]
FIG. 1 is a front configuration diagram showing an embodiment of a holder device according to the present invention.
FIG. 2 is a top structural view showing an embodiment of a holder device according to the present invention.
FIG. 3 is a side configuration diagram showing an embodiment of a holder device according to the present invention.
[Explanation of symbols]
1: Glass substrate 2: Inspection apparatus body 3: Base 4: Holder bodies 5-1 to 5-4, 6: Opening portion 7: Center position 8: Arc frame 9: Support frame 10: Rotating mechanism 11: Drive unit 12: Lift pin mechanisms 13, 14: Lift pin support bars 15-18: Lift pin 20: Swing mechanism 21: Hinge 22: Hinge support member 23: Linear guide 24: Link 25: Jack 26: Extension end 27: Support member 28: Straight Orbit 30: Variable section 40, 41: Movement mechanism 42: Portal arm 43: Microscope 44: Line transmission illumination device 45, 46: Illumination system guide 47: Operation section

Claims (7)

A holder body in which a plurality of arc-shaped openings are concentrically formed and a glass substrate is placed;
A lift pin support comprising a plurality of lift pins for supporting the glass substrate on the holder body through the arcuate opening;
A drive unit that raises and lowers the lift pin support, moves the lift pins up and down through the arc-shaped openings, and rotates the lift pin support in a raised state;
A holder device comprising:   The holder body includes a macro illuminating device that irradiates illumination light on the surface of the glass substrate placed thereon, and holds the glass substrate under illumination of the macro illuminating device so that an arbitrary rising angle is obtained. The holder device according to claim 1, further comprising a swing mechanism that swings the holder body. Claim wherein each of said arcuate openings through which the lift pins, which in the center the concentric center point concentrically outermost peripheral position 90 degrees or more, characterized in that it is formed in the angular range within 180 degrees The holder device according to 1.   In the state where the lift pin support is raised to support the glass substrate, the driving unit rotates the lift pin support to rotate the glass substrate to a predetermined angle, and then lowers the lift pin support. The holder device according to claim 1, wherein the glass substrate is placed on the holder body. The drive unit controls rotation of the lift pin support to change the arrangement direction of the glass substrate, and changes a reflection condition by a pattern on the glass substrate with respect to an incident direction of illumination light that illuminates the glass substrate. The holder device according to claim 1 or 4, characterized in that: The driving unit controls rotation of the lift pin support to change the arrangement direction of the glass substrate, and changes a reflection condition due to a linear defect on the glass substrate with respect to an incident direction of illumination light that illuminates the glass substrate. The holder device according to claim 1 or 4. The holder body has a plurality of arc frame disposed concentrically, according to claim 1, characterized in that it comprises a support frame, wherein the supporting each other a plurality formed each arcuate frame in the radial direction of the arc frame Holder device.

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