KR20070016576A - Panel display clamping apparatus and transfering and inspecting apparatuses having the same - Google Patents

Panel display clamping apparatus and transfering and inspecting apparatuses having the same Download PDF

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Publication number
KR20070016576A
KR20070016576A KR1020050071367A KR20050071367A KR20070016576A KR 20070016576 A KR20070016576 A KR 20070016576A KR 1020050071367 A KR1020050071367 A KR 1020050071367A KR 20050071367 A KR20050071367 A KR 20050071367A KR 20070016576 A KR20070016576 A KR 20070016576A
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KR
South Korea
Prior art keywords
substrate
clamping device
upper chuck
chuck
vacuum nozzle
Prior art date
Application number
KR1020050071367A
Other languages
Korean (ko)
Other versions
KR101139371B1 (en
Inventor
김민석
Original Assignee
주식회사 에이디피엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 에이디피엔지니어링 filed Critical 주식회사 에이디피엔지니어링
Priority to KR1020050071367A priority Critical patent/KR101139371B1/en
Priority claimed from TW95128337A external-priority patent/TWI312179B/en
Publication of KR20070016576A publication Critical patent/KR20070016576A/en
Application granted granted Critical
Publication of KR101139371B1 publication Critical patent/KR101139371B1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/42Measurement or testing during manufacture
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups

Abstract

The present invention relates to a substrate clamping device, a transfer device and an inspection device for mechanically fixing and transporting one side of the substrate by suction by vacuum, and for this purpose, between the upper chuck and the upper chuck in the substrate clamping device. Including a lower chuck for holding it through a substrate, and at least one of the opposite surface of the upper chuck and the lower chuck is provided with a vacuum nozzle for adsorbing and fixing the substrate, by a substrate clamping device The fixed substrate is characterized in that it can be prevented from being separated during transfer or cracks in the contact surface.
Substrate, Transfer Table, Vacuum Nozzle, Shock Absorbing Member

Description

Substrate clamping device, transfer device and inspection device {PANEL DISPLAY CLAMPING APPARATUS AND TRANSFERING AND INSPECTING APPARATUSES HAVING THE SAME}

1 is a plan view showing a substrate transfer device provided with a substrate clamping device.

2 is a side view of a substrate clamping device according to the present invention;

3A and 3B are perspective views in which a vacuum nozzle is formed in a substrate clamping device according to the present invention.

Figure 4a is a block diagram provided with a vacuum nozzle in the substrate clamping device according to the present invention.

Figure 4b is a configuration diagram provided with a vacuum nozzle on the substrate clamping device according to a modification of the present invention.

5 is an installation state in which the substrate is fixed by the vacuum nozzle of the substrate clamping device according to the present invention.

6 is a configuration diagram in which a vacuum nozzle is formed on a substrate clamping device according to another embodiment of the present invention.

<Code Description of Main Parts of Drawing>

100 ... Government 100a ... Upper

100b ... lower chuck 110 ... vacuum nozzle

120 Air flow 130 Air suction

140 ... shock absorbing member 150 ... through hole

200 ... Vertical Transfer Unit 300 ... Horizontal Transfer Unit

400 ... Transfer Plate 500 ... Substrate

600 (700) ... Clamping device 800 ... Conveying table

The present invention relates to a substrate clamping device, a transfer device, and an inspection device thereof, and more particularly, a substrate clamping device and a substrate transfer device for preventing a substrate from being separated or changed from being fixed by increasing a substrate holding force for transferring the substrate. It relates to a device and a substrate inspection device.

In a flat panel display (FPD), scratches or various stains may be formed on a substrate in a manufacturing process, and a display substrate inspection apparatus is used for the purpose of reducing scratch rate by inspecting scratches or various stains. For example, In-Line FPD Automatic Optical Inspection captures an image of an object to be inspected using an optical lens and a CCD camera while guiding a TFT LCD substrate, a display substrate such as a PDP, a color filter, etc. The processing algorithm can be applied to detect various defects that the user wants to find.

1 is a view showing a substrate transfer device provided with a substrate clamping device for inspection on a substrate.

As shown in FIG. 1, a conveying table 800 is formed to float a central portion of the substrate 500, and the substrate 500 loaded into the conveying table 800 is formed at opposite ends of the conveying table 800. ) Is provided with a clamping device 700 that can transfer. As described above, the substrate 500 passes through the upper portion of the transfer table 800 while both opposing side ends are supported by the clamping device 700. When the size of the substrate is large, the center of the substrate is caused by the weight of the substrate. Since deflection occurs in the flat state, the air gap may be formed on the transfer table 800 so that the substrate 500 may be transferred in the air-floating state. In addition, a vision device (not shown), such as a CCD camera, which is transferred and inspects an abnormality of a substrate, may be installed at an upper portion of the transfer table 800.

However, in recent years, as the large area of the substrate 500 and the high speed transfer of the substrate 500 progress rapidly, when the conventional clamping device 700 fixes the substrate by the mechanical fixing force of the cylinder, the substrate 500 is removed. Due to the limitation of the substrate holding force for fixing, there is a problem that the substrate is separated from the fixed state of the clamping device 700 during the transfer of the substrate 500. In addition, even if the substrate 500 is not completely separated, there is a problem that the sliding occurs by a predetermined distance from the position fixed by the clamping device 700, thereby causing cracks on the substrate 500.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems of the prior art, and provides a substrate clamping device, a transfer device, and an inspection device for tightly fixing a substrate to prevent the substrate from being separated or flowed from the substrate clamping device. It is.

In order to achieve the above object, the present invention provides a substrate clamping apparatus, comprising: an upper chuck and a lower chuck for holding it through a substrate between the upper chuck and at least any of opposing surfaces of the upper chuck and the lower chuck. One vacuum nozzle for adsorbing and fixing the substrate is formed.

At this time, at least one of the upper chuck and the lower chuck facing through hole is formed, the vacuum nozzle may be installed in the through hole, the vacuum nozzle may be arranged in at least one row on the opposite surface, the opposite At least one of the cotton may be provided with a shock absorbing member including any one of PEEK, polymer polyethylene, fluorine resin compound to prevent damage due to contact of the substrate.

The present invention provides a substrate transfer apparatus, comprising a lower chuck for holding a substrate between an upper chuck and the upper chuck and adsorbing the substrate on at least one of opposite surfaces of the upper chuck and the lower chuck. The substrate clamping device is formed with a vacuum nozzle for the purpose, and the substrate clamping device is provided on one side or both sides and a conveying table for supporting the substrate by pneumatic.

The present invention includes a substrate inspection apparatus, comprising a substrate transfer device provided with the substrate clamping device, and a camera inspection unit for inspecting an abnormality of the substrate to be transferred.

An embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Referring again to FIG. 1, which illustrates a substrate transfer apparatus referred to in the related art, a substrate transfer apparatus according to the present invention includes a transfer table 800 that floats a central portion of a substrate 500, and one side of the transfer table 800. Or a clamping device 600 provided at both opposite side ends and provided with a vacuum nozzle formed on at least one opposing surface facing the upper chuck and the lower chuck.

The substrate inspection apparatus according to the present invention includes a conveying table 800 that floats the center of the substrate 500, a clamping device 600 installed at one side or opposite side ends of the conveying table 800, It includes a camera inspection unit (not shown) for inspecting the abnormality of the substrate.

2 is a view showing the side of the substrate clamping device provided in the substrate transfer device.

As shown in FIG. 2, the substrate clamping device 600 according to the present invention includes a plate-shaped upper chuck 100a and a lower chuck for holding a substrate 500 inserted between the upper chuck 100a. 100b is provided, and a vacuum nozzle 110 for adsorbing and fixing the substrate 500 is formed on the opposite surface of the upper chuck 100a and the lower chuck 100b.

First, a substrate clamping apparatus including an upper chuck 100a and a lower chuck 100b on which the vacuum nozzle 110 is provided will be described.

The substrate clamping device according to the present embodiment includes a fixing part 100 including an upper chuck 100a and a lower chuck 100b to fix one side of the substrate 500 by mechanical compression and suction by vacuum. Vertical transfer part 200 for moving the government unit 100 in the vertical direction, and a direction toward or away from the substrate 500 according to the size of the substrate 500 (hereinafter referred to as the width direction of the substrate) It includes a horizontal transfer unit 300 for moving the fixing part 100 and the transfer plate 400 for moving the fixing part 100 in the direction in which the substrate 500 is transferred.

For example, the fixing part 100 for holding one side or both sides of the substrate 500 is composed of an upper chuck 100a and a lower chuck 100b movable up and down spaced apart from the upper chuck 100a by a predetermined interval. do. The opposite surface of the upper chuck (100a) and the lower chuck (100b) is provided with a vacuum nozzle 110 for adsorbing the substrate 500 by a vacuum, a detailed description thereof will be described later. The lower chuck 100b is in contact with one side of the upper chuck 100a, and the substrate 500 rises along the contact surface of the upper chuck 100a when the substrate 500 enters between the upper chuck 100a and the lower chuck 100b. The substrate 500 is configured to be fixed. At this time, since the substrate 500 has a thin thickness of about 0.7mm, the distance between the upper chuck 100a and the lower chuck 100b can be adjusted by fine lifting adjustment of the lower chuck 100b.

The vertical moving part for elevating the fixing part 100 moves the fixing part 100 in the vertical direction to position the substrate 500 at a height corresponding thereto according to the size or processing process of the substrate 500. It is connected to the fixed part 100 through a vertical transfer means consisting of a conventional pneumatic cylinder.

The horizontal transfer part 300 for moving the fixing part 100 in the width direction of the substrate 500 is connected to one side of the vertical transfer part 200 through a horizontal transfer means. The horizontal transfer means may be used a conventional hydraulic, pneumatic cylinder that can move in the horizontal direction. In this case, the horizontal transfer part 300 retracts the fixing part 100 away from the substrate in order to prevent interference with the substrate 500 during the loading or unloading of the substrate 500. After carrying in, the substrate 500 is moved in a direction toward the substrate 500 to move to a position where the substrate 500 can be fixed.

The transport plate 400 for transporting the fixed part 100 along a transport table supports the fixed part 100, the vertical transport part 200, and the horizontal transport part 300 at a bottom thereof, and on one side of the transport table. Or it consists of a configuration which is slidable through the conveyance path formed along the longitudinal direction on both sides.

Hereinafter, the upper chuck and the lower chuck which can adsorb | suck a board | substrate by a vacuum are demonstrated in detail.

3A and 3B are views illustrating a vacuum nozzle provided in a substrate clamping device, and FIGS. 4A and 4B are views illustrating a configuration in which a vacuum nozzle is provided in a substrate clamping device and variations thereof, and FIG. 5 is a vacuum nozzle of the substrate clamping device. It is a figure which shows the installation state in which the board | substrate was fixed by this.

As shown in Figures 3a to 5, the fixing part 100 for fixing the substrate is composed of an upper chuck (100a) and a lower chuck (100b), of the upper chuck (100a) and lower chuck (100b) At least one of the opposing surfaces is provided with a vacuum nozzle 110 for adsorbing and fixing the substrate 500. That is, at least one of the upper chuck 100a and the lower chuck 100b facing each other has a through hole 150 penetrating through the upper chuck 100a and the lower chuck 100b and the vacuum nozzle 110. ) Is installed in the through hole 150. In this case, the vacuum nozzle 110 may be formed on any one of the opposing surfaces of the upper chuck (100a) and the lower chuck (100b), formed on both opposing surfaces of the upper chuck (100a) and lower chuck (100b). May be When the vacuum nozzles 110 are formed on all of the opposing surfaces, the upper chuck 100a and the lower chuck 100b face each other so as to simultaneously adsorb the same point on one side and the other side of the substrate 500. It is preferable to form the vacuum nozzles 110 on the same axis as the beams, respectively. In the present embodiment, the vacuum nozzle is provided in the through hole 150, but as a modification, the air inlet 130 is connected to the through hole 150 and the through hole 150. The substrate may be adsorbed.

The vacuum nozzle 110 has a contact surface in contact with the substrate 500 as an upper surface thereof, an air passage 120 through which air is sucked is formed, and the air passage 120 sucks air. It is connected to the air suction unit 130 to serve as a pump. In addition, the vacuum nozzle 110 may be arranged in at least one row on the opposite surface, for example, a plurality of the vacuum nozzle 110 may be arranged in a predetermined pattern in the form of a matrix.

The opposite surface of the upper chuck 100a and the lower chuck 100b may be provided with an impact absorbing member having a strength lower than that of the substrate 500 to prevent damage to the substrate 500. In the present embodiment, the shock absorbing member may be used including at least one of a polyetheretherketone (PEEK), a high-performance polyethylene resin, a polymer polyethylene, a fluoropolymer, a fluorocarbon compound, and the like. Can be.

6 is a view illustrating a configuration of a vacuum nozzle in a substrate clamping device according to another embodiment.

In another embodiment, as shown in FIG. 6, the fixing part 100 ′ may be provided with a vacuum pad 110 ′ serving as the vacuum nozzle. That is, the vacuum pad 110 ′ may be configured in the shape of an adsorption plate having minute holes so that adsorption is performed through the entire contact surface when the vacuum pad 110 ′ contacts the substrate 500. In addition, a plurality of air passages 120 ′ may be connected to a bottom of the vacuum pad 110 ′ at predetermined intervals so that air may be sucked through the air suction unit 130.

Referring to the operation of the present invention made of such a configuration as follows.

First, when the substrate 500 is loaded into the substrate transfer apparatus, the clamping apparatus mechanically fixes one side or both sides of the substrate 500 by a cylinder, and then sucks and fixes air, thereby fixing the substrate ( 500 moves along the transfer table of the substrate transfer device.

For example, when the substrate 500 enters between the upper chuck 100a and the lower chuck 100b of the clamping device, the lower chuck 100b is transferred upward and the substrate 500 is moved between the upper chuck 100a and the lower chuck. It is fixed between 100b. In this case, the substrate 500 is damaged by friction when the substrate 500 is in contact with the upper chuck 100a and the lower chuck 100b by an impact absorbing member provided on the opposite surface of the upper chuck 100a and the lower chuck 100b. Reduce as much as possible. As the shock absorbing member for this purpose, a material such as polyether ether ketone (PEEK), polymer polyethylene, or fluororesin compound may be used.

Subsequently, when the substrate 500 is fixed by the mechanical force of the upper chuck 100a and the lower chuck 100b, the vacuum nozzle 110 formed on the opposite surface of the upper chuck 100a and the lower chuck 100b is opened. By sucking the air formed on the contact surface with the substrate 500 and fixing it again, the clamping device with respect to the substrate 500 is increased. In this case, the vacuum nozzle 110 may be formed on any one surface of the opposing surface of the upper chuck (100a) and the lower chuck (100b), may be formed on all of the opposing surface, if the vacuum nozzle is formed on all of the opposing surface It is preferable that the nozzle 110 is configured to be disposed on the same axis on the upper chuck 100a and the lower chuck 100b to simultaneously adsorb one side and the other side of the substrate 500. The substrate 500 is mechanically fixed by the upper chuck 100a and the lower chuck 100b, and the clamping device is fixed to the substrate 500 by the vacuum suction of the vacuum nozzle 110. It is conveyed along the conveying table by the clamping device.

As described above, the present invention can fix the substrate 500 by vacuum adsorption through the vacuum nozzle 110 as well as mechanical fixation by the pneumatic cylinder method, so that the clamping device can be used in the process of transferring the substrate 500 at high speed. It is possible to prevent the deviation from the, and the exact position and the aligned position of the substrate 500 does not change to ensure the reliability of the transfer of the substrate 500, and the cracks generated by sliding the substrate 500 in a fixed state It can prevent it beforehand.

While the invention has been shown and described with respect to specific embodiments thereof, it will be appreciated that the invention can be variously modified and modified without departing from the spirit or scope of the invention as provided by the following claims. It will be clear to those skilled in the art that they can easily know.

As described above, according to the present invention, when the substrate held in the substrate clamping apparatus moves at a high speed, the substrate is prevented from being separated from the substrate clamping apparatus, thereby securing reliability of substrate transfer and thereby increasing product productivity. There is an advantage.

In addition, the present invention has the effect that it is possible to prevent the position of the aligned substrate is changed to enable the exact position transfer of the substrate.

In addition, the present invention has the advantage that it is possible to prevent the occurrence of scratches or cracks on the surface of the substrate by the holding of the mechanical substrate clamping device.

Claims (7)

  1. In a substrate clamping device,
    Upper Chuck,
    A lower chuck for holding the substrate between the upper chuck and a substrate;
    And at least one of the opposing surfaces of the upper chuck and the lower chuck to form a vacuum nozzle for adsorbing and fixing the substrate.
  2. The method according to claim 1,
    At least one of the upper chuck and the lower chuck facing through hole is formed, the substrate clamping device, characterized in that the vacuum nozzle is installed in the through hole.
  3. The method according to claim 1 or 2,
    And said vacuum nozzle is arranged in at least one row on said opposing surface.
  4. The method according to claim 1 or 2,
    At least one of the opposing surfaces
    Substrate clamping device, characterized in that the shock absorbing member for preventing damage to the substrate is provided.
  5. The method according to claim 4,
    The shock absorbing member is a substrate clamping device comprising at least one of PEEK, high molecular polyethylene, fluorine resin compound.
  6. In the substrate transfer apparatus,
    The substrate clamping device according to claim 1 or 2,
    And a conveying table provided at one side or both sides of the substrate clamping device to pneumatically support the substrate.
  7. In the substrate inspection apparatus,
    A substrate transfer device provided with a substrate clamping device according to claim 1,
    Substrate inspection apparatus comprising a camera inspection unit for inspecting the abnormality of the substrate to be transferred.
KR1020050071367A 2005-08-04 2005-08-04 Panel display clamping apparatus and transfering and inspecting apparatuses having the same KR101139371B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020050071367A KR101139371B1 (en) 2005-08-04 2005-08-04 Panel display clamping apparatus and transfering and inspecting apparatuses having the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020050071367A KR101139371B1 (en) 2005-08-04 2005-08-04 Panel display clamping apparatus and transfering and inspecting apparatuses having the same
TW95128337A TWI312179B (en) 2005-08-04 2006-08-02 Clamping apparatus, substrate transfer apparatus, and in-line fpd automatic optical inspection apparatus
CNB2006101038707A CN100437967C (en) 2005-08-04 2006-08-04 Clamping device, substrate transmitting device, and on-line fpd automatic optical detection device

Publications (2)

Publication Number Publication Date
KR20070016576A true KR20070016576A (en) 2007-02-08
KR101139371B1 KR101139371B1 (en) 2012-06-28

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Application Number Title Priority Date Filing Date
KR1020050071367A KR101139371B1 (en) 2005-08-04 2005-08-04 Panel display clamping apparatus and transfering and inspecting apparatuses having the same

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KR (1) KR101139371B1 (en)
CN (1) CN100437967C (en)

Cited By (2)

* Cited by examiner, † Cited by third party
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KR101456665B1 (en) * 2013-04-10 2014-11-04 주식회사 선익시스템 Apparatus for clamping substrate
CN104517880A (en) * 2013-09-27 2015-04-15 应用材料意大利有限公司 Apparatus for aligning a substrate

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JP2009173433A (en) * 2008-01-28 2009-08-06 Panasonic Corp Substrate detection device and substrate carrying device
JP4560615B2 (en) * 2008-09-08 2010-10-13 AvanStrate株式会社 Glass plate transfer roller inspection device
KR101056705B1 (en) * 2011-05-09 2011-08-12 한국뉴매틱(주) Vacuum gripper device
CN103135264B (en) * 2011-11-30 2016-10-26 上海中航光电子有限公司 Shading element processing unit (plant)
KR101451506B1 (en) * 2013-04-17 2014-10-17 삼성전기주식회사 Pcb transfer device in noncontact way
CN104860066B (en) * 2015-04-30 2017-11-03 洛阳理工学院 A kind of glass base plate transport device
CN105460617B (en) * 2015-12-25 2017-07-14 重庆市合川区金星玻璃制品有限公司 glass carrier
CN105712076B (en) * 2016-04-06 2018-09-21 广州达意隆包装机械股份有限公司 A kind of sheets clamp device
KR102015356B1 (en) * 2019-01-31 2019-09-03 주식회사 이엔씨 테크놀로지 Inspection equipment for inspecting flexible display device and stage apparatus used therein
KR102071353B1 (en) * 2019-02-13 2020-01-30 주식회사 이엔씨 테크놀로지 Inspection equipment for inspecting flexible display device and stage apparatus used therein

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KR200173017Y1 (en) * 1995-06-20 2000-03-02 김영환 Wafer transporting unit
JP2000286185A (en) * 1999-03-31 2000-10-13 Nec Kansai Ltd Spin chuck
US6343905B1 (en) * 1999-12-17 2002-02-05 Nanometrics Incorporated Edge gripped substrate lift mechanism
JP3958594B2 (en) * 2002-01-30 2007-08-15 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method
JP2003284220A (en) * 2002-03-20 2003-10-03 Yazaki Corp Arcing preventing member
KR100582344B1 (en) * 2003-12-09 2006-05-22 삼성코닝정밀유리 주식회사 Apparatus for inspecting a glass substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101456665B1 (en) * 2013-04-10 2014-11-04 주식회사 선익시스템 Apparatus for clamping substrate
CN104517880A (en) * 2013-09-27 2015-04-15 应用材料意大利有限公司 Apparatus for aligning a substrate

Also Published As

Publication number Publication date
CN100437967C (en) 2008-11-26
KR101139371B1 (en) 2012-06-28
CN1909203A (en) 2007-02-07

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