CN104730743A - Vacuum attaching equipment - Google Patents
Vacuum attaching equipment Download PDFInfo
- Publication number
- CN104730743A CN104730743A CN201510150754.XA CN201510150754A CN104730743A CN 104730743 A CN104730743 A CN 104730743A CN 201510150754 A CN201510150754 A CN 201510150754A CN 104730743 A CN104730743 A CN 104730743A
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- Prior art keywords
- base station
- mechanical arm
- base stations
- fit
- substrate
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
Abstract
The invention provides vacuum attaching equipment which is used for conducting attachment on a base plate to be attached after taking the base plate to be attached from a manipulator. The vacuum attaching equipment comprises two base stations which are oppositely arranged and a supporting part; the supporting part is used for supporting the portion, extending into the portion between the two base stations, of the manipulator when the base plate to be attached is taken from the manipulator to make the base plate to be attached which is attached to the manipulator keep horizontal, and the supporting part is arranged on at least one base station. By means of the vacuum attaching equipment, the flatness degree of the base plate can be guaranteed when adsorption rods absorb the base plate, the attaching precision is improved, and the man-hour of a single piece is reduced.
Description
Technical field
The present invention relates to display panel manufacturing technology field, particularly relate to a kind of vacuum abutted equipment.
Background technology
In the packaging technology of TFT-LCD industry, usual employing vacuum abutted equipment (Vacuum AlignerSystem, be called for short VAS) lower baseplate glass of the upper substrate glass and coating LC (liquid crystal) that are coated with Sealant (sealant) is carried out contraposition laminating under vacuum, thus obtain adhesive substrates.
As shown in Figure 1, vacuum abutted equipment generally includes the lower base station 20 be fixed on pedestal and the upper base station 10 coordinated with lower base station 20.Upper base station 10 central part is provided with upper chamber 11, is provided with sorbing substrate 12 (Table) in upper chamber 11, upper sorbing substrate 12 is provided with multiple absorption bar 13 (Support Pad) moving up and down; Lower base station 20 central part is provided with lower chambers 21, is provided with lower sorbing substrate 22 in lower chambers 21, and lower sorbing substrate 22 is provided with support bar 23 moving up and down.
As depicted in figs. 1 and 2, when vacuum abutted equipment works, first, the tooth fork of mechanical arm 40 stretches in vacuum abutted equipment, absorption bar 13 on the upper base station 10 of vacuum abutted equipment from mechanical arm 40 (Robot Hand) by get coating Sealant upper substrate glass 50, absorption bar again on move surface upper substrate glass 50 being moved to upper sorbing substrate 12, then, by the vacuum suction of upper sorbing substrate 12, upper substrate glass 50 is fixed on the surface of upper sorbing substrate 12; Then, by mechanical arm 40, the lower baseplate glass of coating LC is placed on support bar, support bar moves down surface lower baseplate glass being moved to lower sorbing substrate 22 again, then by the vacuum suction of lower sorbing substrate 22, lower baseplate glass is fixed on the surface of lower sorbing substrate 22; Upper base station 10 slowly falls under the drive of power system, fits tightly, complete laminating work with lower base station 20.
Current existing vacuum abutted equipment also exists following problem:
As shown in Figure 2, when the tooth fork of mechanical arm 40 (Robot Fork) puts in equipment, because of tooth fork and upper substrate glass gravity, the tooth fork front end of mechanical arm 40 has reclinate phenomenon, cause the absorption bar of base station 10 can offset when vacsorb upper substrate glass 50, thus affect the Anawgy accuracy of vacuum abutted equipment; In addition, due to own wt reason, the tooth fork of mechanical arm 40, when putting in equipment, has certain hour vibration, treats its several seconds time of stable needs, adds extra production time per piece (TactTime).
Summary of the invention
The object of the present invention is to provide a kind of vacuum abutted equipment, it can ensure flatness when adsorbing bar absorption substrate, improves Anawgy accuracy, and reduces production time per piece.
Technical scheme provided by the present invention is as follows:
A kind of vacuum abutted equipment, after being got substrate to be fit from mechanical arm, fits substrate to be fit; Described vacuum abutted equipment comprises:
Two base stations be oppositely arranged;
And during for being got substrate to be fit from mechanical arm, the part stretched between two base stations of mechanical arm is supported, to make the support component of the substrate maintenance level to be fit that mechanical arm adsorbs, described support component is arranged at least one base station.
Further, described support component is arranged at least one base station movably, has the first state and the second state,
In described first state, described support component moves between the two relative surfaces of two base stations, to support the part stretched between two base stations of mechanical arm, makes the substrate maintenance level to be fit that mechanical arm adsorbs;
In described second state, outside the region between the two relative surfaces that described support component moves to two base stations, with enable two base stations relatively near and by baseplate-laminating to be fit.
Further, described base station comprises first end and second end relative with described first end, and wherein mechanical arm stretches between two base stations from described base station first end, and described support component is arranged on the second end of described base station.
Further, described support component comprises:
For the support portion stretching to the part between two base stations of supported mechanical hand;
And be movably connected on base station, for the moving part of mobile described support portion.
Further, described support portion is a framed structure, has for the hollow area stretching to the partial insertion between two base stations for mechanical arm.
Further, described moving part comprises: one end and described support portion are fixed, the other end is arranged at least one connecting link on base station movably, described connecting link can move back and forth on the direction on the surface perpendicular to base station, and when described first state, described support portion is driven to move between the two relative surfaces of two base stations, when described second state, outside the region between the two relative surfaces driving described support portion to move to two base stations.
Further, described two base stations comprise the first base station and are positioned at the second base station below described first base station, wherein,
The surface of described first base station is provided with movably for adsorbing the substrate to be fit got from mechanical arm, and on the direction on the surface perpendicular to base station, carries out reciprocating multiple absorption bar;
The surface of described second base station is provided with for supporting the substrate to be fit got from mechanical arm, and carries out reciprocating multiple support bar on the direction on the surface perpendicular to base station.
Further, described connecting link is arranged on described first base station, and to be driven by same driving mechanism with described absorption bar and move back and forth.
Further, described connecting link is arranged on described second base station.
Beneficial effect of the present invention is as follows:
Vacuum abutted equipment provided by the present invention, by arranging a support component, can when being got substrate to be fit from mechanical arm, the part (as tooth fork) stretched between two base stations of mechanical arm is supported, on the one hand, make the substrate maintenance level to be fit that mechanical arm adsorbs, thus the flatness of the to be fit substrate of the absorption bar on guarantee base station when drawing substrate to be fit, reduce base station from the side-play amount of mechanical arm by substrate to be fit when getting substrate to be fit, improve Anawgy accuracy, on the other hand, the mechanical arm stretched between base station can also be made can to reach steady state (SS) fast, minimizing mechanical arm stretches into the stabilization time after equipment, thus reduce production time per piece (Tact Time).
Accompanying drawing explanation
Fig. 1 represents the structural representation of vacuum abutted equipment of the prior art;
Fig. 2 represents the schematic diagram that the tooth of mechanical arm bends due to gravity;
Fig. 3 represents the structural representation of the vacuum abutted equipment in a kind of embodiment provided by the present invention.
Fig. 4 represents the side view of Fig. 3.
Embodiment
Be described principle of the present invention and feature below in conjunction with accompanying drawing, example, only for explaining the present invention, is not intended to limit scope of the present invention.
For vacuum abutted equipment in prior art bending due to gravity from the part between base station of stretching to of mechanical arm by mechanical arm when getting substrate to be fit and to tremble, thus affect Anawgy accuracy and increase the technical matters of extra production time per piece, the invention provides a kind of vacuum abutted equipment, it can improve Anawgy accuracy, and reduces production time per piece.
Vacuum abutted equipment provided by the present invention, after being got substrate to be fit from mechanical arm, fits substrate to be fit.As shown in Figure 3 and Figure 4, described vacuum abutted equipment comprises:
Two base stations 100 be oppositely arranged, each base station 100 comprises the surface for adsorbing fixing substrate to be fit, and the surface of two base stations 100 is relative;
And support component 200, described support component 200 is arranged at least one base station 100, during for being got substrate 500 to be fit from mechanical arm 400, the part stretched between two base stations 100 of mechanical arm 400 is supported, to make the substrate to be fit 500 maintenance level of absorption on mechanical arm 400.
Vacuum abutted equipment provided by the present invention, by arranging a support component 200, can when being got substrate 500 to be fit from mechanical arm 400, the part (as: the tooth fork of mechanical arm 400) stretched between two base stations 100 of mechanical arm 400 is supported, on the one hand, make the substrate to be fit 500 maintenance level of absorption on mechanical arm 400, thus can ensure that base station 100 is when drawing substrate 500 to be fit, substrate 500 to be fit is in horizontality, thus reduce base station 100 from the side-play amount of mechanical arm 400 by substrate 500 to be fit when getting substrate 500 to be fit, improve Anawgy accuracy, on the other hand, the part stretched between base station 100 of mechanical arm 400 can also be made can to reach steady state (SS) fast, thus reduce mechanical arm 400 and stretch into the stabilization time after equipment, reduce production time per piece (Tact Time).
In the present invention, when part (as: the tooth fork of the mechanical arm 400) length stretched between two base stations 100 of mechanical arm 400 enough (can stretch between two base stations 100 from one end of base station 100, and outside region between the two relative surfaces of stretching out two base stations 100 from the other end of base station 100) time, position beyond region between the two relative surfaces that described support component 200 can be set directly at two base stations 100, and can not hinder from two base stations 100 after mechanical arm 400 is got substrate 500 to be fit relatively close.But, the partial-length stretched between two base stations 100 of mechanical arm 400 is larger, easilier to bend due to gravity, therefore, the length of the length and substrate to be fit 500 that stretch to the part between two base stations 100 of usual mechanical arm 400 matches, like this, when being got substrate 500 to be fit from mechanical arm 400, support component 200 need between the two relative surfaces of two base stations 100, with the part stretched between two base stations 100 of supported mechanical hand 400, but like this support component 200 two base stations 100 relatively near time can to base station 100 produce interfere, and hinder the motion of base station 100.
Therefore, in order to avoid support component 200 hinders the motion of base station 100, in embodiment provided by the present invention, preferably, described support component 200 is arranged at least one base station 100 movably, has the first state and the second state, wherein,
In described first state, described support component 200 moves between the two relative surfaces of two base stations 100, to support the part stretched between two base stations 100 of mechanical arm 400, makes the substrate to be fit 500 maintenance level of absorption on mechanical arm 400;
In described second state, outside the region between the two relative surfaces that described support component 200 moves to two base stations 100, with make two base stations 100 can relatively near and substrate 500 to be fit is fitted.
Adopt such scheme, support component 200 can move, when being got substrate 500 to be fit from mechanical arm 400 (during the first state), support component 200 can move between the two relative surfaces of two base stations 100, to support the part stretched between two base stations 100 of mechanical arm 400, and when being got after substrate 500 to be fit completes (namely during the second state) from mechanical arm 400, position beyond region between the two relative surfaces that support component 200 can move to two base stations 100, when substrate to be fit 500 on two base station 100 surfaces being fitted to make two base stations 100 relatively close, this support component 200 can not produce with base station 100 interferes.
In addition, usually, the front end stretching to the part (tooth fork) between two base stations 100 of mechanical arm 400 is easier can bend and flutter phenomenon because of Action of Gravity Field, therefore, in an embodiment of the present invention, preferably, as shown in the figure, described base station 100 comprises first end and second end relative with described first end, and wherein mechanical arm 400 stretches between two base stations 100 from described base station 100 first end, and described support component 200 is arranged on the second end of described base station 100.
Adopt such scheme, support component 200 is at least arranged on the second end of base station 100, namely, support component 200 is arranged on the position corresponding to front end stretching to the part between two base stations 100 of mechanical arm 400, and the front end for the part stretched between two base stations 100 to mechanical arm 400 supports.Should be understood that, in actual applications, described support component 200 also can be arranged on other positions, only there is provided a kind of preferred setting position of support component 200 at this, but does not limit to the concrete setting position of support component 200.
In embodiment provided by the present invention, preferably, as shown in Figure 3 and Figure 4, described support component 200 comprises:
For the support portion 201 stretching to the part between two base stations 100 of supported mechanical hand 400;
And be movably connected on base station 100, for the moving part of mobile described support portion 201.
In such scheme, supported by the part stretched between two base stations 100 of the 201 pairs of mechanical arms 400 in support portion, and make support portion 201 can move to diverse location under the first state and the second state by moving part.
Wherein, preferably, as shown in Figure 3 and Figure 4, described support portion 201 can be a framed structure, and this framed structure has one for the hollow area stretching to the partial insertion between two base stations 100 for mechanical arm 400.When being got substrate 500 to be fit from mechanical arm 400, the front end of the part stretched between two base stations 100 of mechanical arm 400 can be inserted in the hollow area of this framed structure, thus is supported by this framed structure.
Should be understood that, in other embodiments of the invention, the concrete structure of described support portion 201 can have multiple implementation, such as: described support portion 201 can also be a beam structure etc., will not enumerate in this specific implementation for support portion 201.
In addition, in embodiment provided by the present invention, preferably, as shown in Figure 3 and Figure 4, described moving part comprises: one end and described support portion 201 are fixed, and the other end is arranged at least one connecting link 202 on base station 100 movably,
Wherein, described connecting link 202 can move back and forth on the direction on the surface perpendicular to base station 100, and when described first state, drives described support portion 201 to move between the two relative surfaces of two base stations 100,
When described second state, outside the region between the two relative surfaces driving described support portion 201 to move to two base stations 100.
Adopt such scheme, described moving part adopts connecting link 202 to realize, and this connecting link 202 can carry out linear reciprocation movably on the direction on the surface perpendicular to base station 100, move to diverse location to drive support portion 201 respectively when the first state and the second state.Particularly, when the first state, described connecting link 202 drive described support portion 201 stretch out base station 100 surface and between two base stations 100, to support mechanical arm 400, when the second state, outside the region that described connecting link 202 drives described support portion 201 to move between two relative surfaces that described support portion 201 moves to two base stations 100, that is, be retracted to this connecting link 202 place base station 100 inner.
It should be noted that, in other embodiments of the invention, described moving part also can adopt other modes to realize, such as:
Described moving part can move back and forth on the direction on surface being parallel to base station 100, namely, described moving part can carry out translation, when the first state, described support portion 201 is driven to move between two base stations 100, and when the second state, the position beyond the region between the two relative surfaces driving described support portion 201 to move to two base stations 100;
Or, the first end of described moving part is movably connected on base station 100, second end connects described support portion 201, and the second end can rotate around first end, thus when the first state, described moving part drives described support portion 201 to move between two base stations 100, when the second state, the position beyond the region between the two relative surfaces that described moving part drives described support portion 201 to turn to two base stations 100.
Should be understood that, provide only the preferred implementation of moving part in an embodiment of the present invention, but be not limit the concrete structure of moving part, the specific implementation for moving part will not enumerate at this.
It should be noted that, as shown in Figure 1, vacuum abutted equipment of the prior art, two base stations 100 are for be oppositely arranged up and down, wherein, due to when being got substrate 50 to be fit from mechanical arm 40 on upper base station 10, substrate 50 to be fit carries out absorption by the adsorptive power of the multiple absorption bars 13 on upper base station 10 to be fixed, support is there is no below it, thus can not keep level because the tooth fork of mechanical arm 400 is bending, and lower base station 20 is when being got substrate 50 to be fit from mechanical arm 40, support because the multiple support bars 23 on lower base station 20 are positioned at below substrate 50 to be fit, thus substrate 500 to be fit can ensure its flatness, therefore, vacuum abuttedly to arrange provided by the present invention, described support portion 201 200 can only on upper base station 10 supporting the part stretched between two base stations 100 of mechanical arm 400 from mechanical arm 400 by when getting substrate 500 to be fit.
In embodiment provided by the present invention, as shown in Figure 3 and Figure 4, the second base station 102 that described two base stations 100 comprise the first base station 101 and are positioned at below described first base station 101, wherein,
The surface of described first base station 101 is provided with multiple absorption bar 103 movably, and described absorption bar 103 for adsorbing the substrate to be fit 500 got from mechanical arm 400, and moves back and forth on the direction on the surface perpendicular to base station 100;
The surface of described second base station 102 is provided with multiple support bar 104, and described support bar 104 for supporting the substrate to be fit 500 got from mechanical arm 400, and moves back and forth on the direction on the surface perpendicular to base station 100;
Wherein, described connecting link 202 can be arranged on the first base station 101, and described connecting link 202 is driven by same driving mechanism with described absorption bar 103 and moves back and forth.
Adopt such scheme, described connecting link 202 is arranged on the first base station 101, when the first base station 101 is got substrate 500 to be fit from mechanical arm 400, described connecting link 202 moves down, stretch out the surface of the first base station 101, and described support portion 201 is moved between two base stations 100, mechanical arm 400 is supported; And after the absorption bar 103 on the first base station 101 drawn substrate 500 to be fit, described connecting link 202 moves, and it is inner to be retracted to the first base station 101.Further, described connecting link 202 can be driven by same driving mechanism with described absorption bar 103, and structure is more simple, without the need to setting up driving mechanism for connecting link 202 separately.
Should be understood that, in other embodiments of the invention, described connecting link 202 also can be adopt different driving mechanisms to drive from described absorption bar 103.Further, in other embodiments provided by the present invention, described connecting link 202 also can be arranged on described second base station 102.When the first base station 101 is got substrate 500 to be fit from mechanical arm 400, described connecting link 202 moves, stretch out the surface of the second base station 102, and described support portion 201 is moved between two base stations 100, mechanical arm 400 is supported; And after the absorption bar 103 on the first base station 101 drawn substrate 500 to be fit, described connecting link 202 moves down, and is retracted in the second base station 102.
The laminating operation process of the vacuum abutted equipment in the preferred embodiment of the present invention is below described:
As shown in Figure 3 and Figure 4, when carrying out laminating operation, first, the multiple absorption bars 103 on the first base station 101 move down, and connecting link 202 moves down, to be moved to support portion 201 between two base stations 100 simultaneously;
Then, the tooth fork of mechanical arm 400 extend between absorption bar 103, and its front end supported portion 201 supported;
Then, adsorb bar 103 and draw substrate 500 to be fit from the tooth fork of mechanical arm 400;
Then, mechanical arm 400 shifts out this vacuum abutted equipment, absorption bar 103 and connecting link 202 move, thus substrate to be fit 500 moves to the surface of the first base station 101, and is fixed by the adsorption of the first base station 101;
Then, the support bar 104 of the second base station 102 moves, the tooth fork of mechanical arm 400 extend between multiple support bar 104, and the substrate to be fit 500 on mechanical arm 400 is supported by support bar 104;
Then, mechanical arm 400 shifts out this vacuum abutted equipment, and support bar 104 moves down, and substrate 500 to be fit is moved to the surface of the second base station 102, and adsorbs fixing by the surface of the second base station 102 by substrate 500 to be fit;
Finally, two base stations 100 are relatively close, adsorb fixing substrate to be fit 500 on the surface respectively fit two of two base stations 100 together.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (9)
1. a vacuum abutted equipment, after being got substrate to be fit from mechanical arm, fits substrate to be fit; It is characterized in that, described vacuum abutted equipment comprises:
Two base stations be oppositely arranged;
And during for being got substrate to be fit from mechanical arm, the part stretched between two base stations of mechanical arm is supported, to make the support component of the substrate maintenance level to be fit that mechanical arm adsorbs, described support component is arranged at least one base station.
2. vacuum abutted equipment according to claim 1, is characterized in that,
Described support component is arranged at least one base station movably, has the first state and the second state,
In described first state, described support component moves between the two relative surfaces of two base stations, to support the part stretched between two base stations of mechanical arm, makes the substrate maintenance level to be fit that mechanical arm adsorbs;
In described second state, outside the region between the two relative surfaces that described support component moves to two base stations, with enable two base stations relatively near and by baseplate-laminating to be fit.
3. vacuum abutted equipment according to claim 1, is characterized in that,
Described base station comprises first end and second end relative with described first end, and wherein mechanical arm stretches between two base stations from described base station first end, and described support component is arranged on the second end of described base station.
4. vacuum abutted equipment according to claim 2, is characterized in that,
Described support component comprises:
For the support portion stretching to the part between two base stations of supported mechanical hand;
And be movably connected on base station, for the moving part of mobile described support portion.
5. vacuum abutted equipment according to claim 4, is characterized in that,
Described support portion is a framed structure, has for the hollow area stretching to the partial insertion between two base stations for mechanical arm.
6. vacuum abutted equipment according to claim 4, is characterized in that,
Described moving part comprises: one end and described support portion are fixed, the other end is arranged at least one connecting link on base station movably, described connecting link can move back and forth on the direction on the surface perpendicular to base station, and when described first state, described support portion is driven to move between the two relative surfaces of two base stations, when described second state, outside the region between the two relative surfaces driving described support portion to move to two base stations.
7. vacuum abutted equipment according to claim 4, is characterized in that,
Described two base stations comprise the first base station and are positioned at the second base station below described first base station, wherein,
The surface of described first base station is provided with movably for adsorbing the substrate to be fit got from mechanical arm, and on the direction on the surface perpendicular to base station, carries out reciprocating multiple absorption bar;
The surface of described second base station is provided with for supporting the substrate to be fit got from mechanical arm, and carries out reciprocating multiple support bar on the direction on the surface perpendicular to base station.
8. vacuum abutted equipment according to claim 7, is characterized in that,
Described connecting link is arranged on described first base station, and to be driven by same driving mechanism with described absorption bar and move back and forth.
9. vacuum abutted equipment according to claim 7, is characterized in that,
Described connecting link is arranged on described second base station.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510150754.XA CN104730743B (en) | 2015-03-31 | 2015-03-31 | Vacuum abutted equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510150754.XA CN104730743B (en) | 2015-03-31 | 2015-03-31 | Vacuum abutted equipment |
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| Publication Number | Publication Date |
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| CN104730743A true CN104730743A (en) | 2015-06-24 |
| CN104730743B CN104730743B (en) | 2018-07-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510150754.XA Active CN104730743B (en) | 2015-03-31 | 2015-03-31 | Vacuum abutted equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108466834A (en) * | 2018-04-08 | 2018-08-31 | 合肥研力电子科技有限公司 | Efficient short side attaches mechanism |
| CN109703163A (en) * | 2018-12-26 | 2019-05-03 | 深圳市华星光电技术有限公司 | A kind of vacuum attaching machine |
| CN110703473A (en) * | 2019-10-29 | 2020-01-17 | 武汉华星光电技术有限公司 | Equipment for binding vacuum adsorption base and display panel |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1447165A (en) * | 2002-03-25 | 2003-10-08 | Lg.菲利浦Lcd株式会社 | LCD binding machine and method of mfg. LCD |
| CN1808223A (en) * | 2005-01-19 | 2006-07-26 | 富士通株式会社 | Apparatus and method for manufacturing laminated substrate |
| CN1936678A (en) * | 2005-09-02 | 2007-03-28 | 株式会社日立工业设备技术 | Base plate assembling apparatus and method |
| CN101888959A (en) * | 2007-12-05 | 2010-11-17 | 平田机工株式会社 | Substrate conveying apparatus and method of controlling the apparatus |
| TW201348107A (en) * | 2012-04-04 | 2013-12-01 | 尼康股份有限公司 | Object carrier system, exposure apparatus, flat-panel display manufacturing method, device manufacturing method, object holding device, object carrier device, object carrying method, and object exchange method |
-
2015
- 2015-03-31 CN CN201510150754.XA patent/CN104730743B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1447165A (en) * | 2002-03-25 | 2003-10-08 | Lg.菲利浦Lcd株式会社 | LCD binding machine and method of mfg. LCD |
| CN1808223A (en) * | 2005-01-19 | 2006-07-26 | 富士通株式会社 | Apparatus and method for manufacturing laminated substrate |
| CN1936678A (en) * | 2005-09-02 | 2007-03-28 | 株式会社日立工业设备技术 | Base plate assembling apparatus and method |
| CN101888959A (en) * | 2007-12-05 | 2010-11-17 | 平田机工株式会社 | Substrate conveying apparatus and method of controlling the apparatus |
| TW201348107A (en) * | 2012-04-04 | 2013-12-01 | 尼康股份有限公司 | Object carrier system, exposure apparatus, flat-panel display manufacturing method, device manufacturing method, object holding device, object carrier device, object carrying method, and object exchange method |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108466834A (en) * | 2018-04-08 | 2018-08-31 | 合肥研力电子科技有限公司 | Efficient short side attaches mechanism |
| CN109703163A (en) * | 2018-12-26 | 2019-05-03 | 深圳市华星光电技术有限公司 | A kind of vacuum attaching machine |
| WO2020133839A1 (en) * | 2018-12-26 | 2020-07-02 | 深圳市华星光电技术有限公司 | Vacuum aligner machine |
| CN110703473A (en) * | 2019-10-29 | 2020-01-17 | 武汉华星光电技术有限公司 | Equipment for binding vacuum adsorption base and display panel |
| CN110703473B (en) * | 2019-10-29 | 2022-05-31 | 武汉华星光电技术有限公司 | Equipment for binding vacuum adsorption base and display panel |
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| Publication number | Publication date |
|---|---|
| CN104730743B (en) | 2018-07-27 |
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