CN217225552U

CN217225552U - A novel multi-functional manipulator for wafer transmission

Info

Publication number: CN217225552U
Application number: CN202220400831.8U
Authority: CN
Inventors: 王孝军; 范亚飞
Original assignee: Yunzhe Semiconductor Technology Zhejiang Co ltd
Current assignee: Yunzhe Semiconductor Technology Zhejiang Co ltd
Priority date: 2022-02-25
Filing date: 2022-02-25
Publication date: 2022-08-19
Anticipated expiration: 2032-02-25

Abstract

The utility model discloses a novel multi-functional manipulator for wafer transmission, which comprises an outer shell, the base is installed to the bottom of shell, the base includes base and lower base, it is fixed that last base passes through the leg joint with lower base, install the reciprocating device on the support, the reciprocating device is including reciprocating the lead screw, the guide rail, the belt pulley and reciprocating motor, install rotary mechanism on the chassis of reciprocating device, rotary mechanism is driven by rotary mechanism speed reducer and rotary mechanism DD motor, be fixed with a cask above the rotary mechanism, fixed multi-joint's arm telescopic system above the cask. In this a novel multifunctional manipulator for wafer transmission, improved the precision, the stability of wafer transmission manipulator, reduced the whole size of manipulator under the condition that satisfies the function safety when in order to ensure wafer conveying and the size space that reduces whole equipment, under the condition that satisfies the function, the less competitiveness of size is big more, the manipulator operation is more stable, and the wafer is safer.

Description

A novel multi-functional manipulator for wafer transmission

Technical Field

The utility model relates to a manipulator equipment technical field, specifically speaking relates to a novel multifunctional manipulator for wafer transmission.

Background

As is known, the workshops of the wafer manufacturing plants are ultra-clean workshops, which are expensive to manufacture, and require a large amount of energy to maintain the cleanliness of the clean workshops, so the capacity of the wafer manufacturing plants per unit space determines the competitiveness of the wafer manufacturing plants to a large extent. Therefore, the equipment used in the wafer manufacturing factory is very precise, the equipment material is also clean material, and the size of the equipment is reduced as much as possible under the condition of not influencing the safety and the capacity so as to improve the utilization rate of the space and reduce the production cost.

With the rapid development of semiconductor technology, the process of wafer is more and more complex, and the requirement for wafer transfer in wafer manufacturing is higher and higher, and the frequency is faster and faster. As wafer size, throughput, and cost per wafer increase, the need for safety during wafer transfer increases. During the manufacturing process, the single wafer transfer is performed by the multi-axis robot, and the precision and size of the multi-axis robot also determine the stability, precision and competitiveness of a semiconductor wafer manufacturing apparatus.

At present, wafer transfer manipulators on the market are monopolized by foreign companies such as European and American days, and similar wafer transfer manipulators do not exist in China. However, in Europe and America, due to monopoly and blockade of the technology, the wafer transfer manipulators exported to China are secondary products, so that equipment manufacturers for manufacturing domestic semiconductor wafers can only passively use the secondary products in Europe and America, the size, the wafer transfer precision and the safety of domestic wafer manufacturing equipment can not reach the highest level in Europe and America, and the competitiveness of domestic equipment is reduced. These manipulators all have the following disadvantages: 1. the precision is not high and the stability is not enough; 2. the size of the robot is generally large, and the size of the apparatus is increased as a whole when the robot is mounted on a semiconductor device, thereby reducing the competitiveness of the apparatus. With the improvement of the manufacturing process of the wafer, the requirements on the performance and the stability of the equipment are higher and higher, and the defects which are not obvious before are amplified, so that the reputation of the domestic wafer manufacturing equipment is seriously influenced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a novel multi-functional manipulator for wafer transmission to solve the problem that proposes among the above-mentioned background art.

In order to realize the above-mentioned purpose, the utility model provides a novel multifunctional manipulator for wafer transmission, which comprises an outer shell, the base is installed to the bottom of shell, and the base includes base and lower base, it is fixed that last base passes through the leg joint with lower base, install reciprocating device on the support, reciprocating device is including reciprocating lead screw, guide rail, belt pulley and reciprocating motor, installs rotary mechanism on reciprocating device's the chassis, and rotary mechanism is driven by rotary mechanism speed reducer and rotary mechanism DD motor, is fixed with a cask above the rotary mechanism, fixed articulated arm telescopic system above the cask, arm telescopic system comprises first joint, second joint and third joint, first joint, second joint and third joint loop through the belt pulley subassembly and connect.

Preferably, a grating ruler is installed on the support.

Preferably, two belt pulleys are respectively installed in the first joint and the second joint and distributed at two ends of the joints, and the two belt pulleys at the joint of the first joint and the second joint are directly connected.

Preferably, the belt pulley assembly comprises a motor end belt pulley, a rotating end belt pulley, a first joint right end belt pulley, a first joint left end belt pulley, a second joint right end belt pulley, a second joint left end belt pulley and a third joint belt pulley, and a motor for driving the joint to move is installed and hidden in the barrel.

Preferably, a sheet counter is additionally arranged on the third joint pulley.

Preferably, a jig is attached to the third joint.

Preferably, a vacuum hole is formed in the fixing jig of the third joint and connected with the jig.

Compared with the prior art, the beneficial effects of the utility model are that:

in this a novel multifunctional manipulator for wafer transmission, improved the precision, the stability of wafer transmission manipulator, reduce the whole size of manipulator under the condition of satisfying the function safety when in order to ensure wafer conveying and the size space that reduces whole equipment, higher precision is in order to adapt to new processing procedure, and under the condition of satisfying the function, the less competitiveness that the size is big more, and the manipulator operation is more stable, and the wafer is safe more.

Drawings

Fig. 1 is one of the overall structural diagrams of the present invention;

fig. 2 is a second schematic view of the overall structure of the present invention;

fig. 3 is a schematic top view of the present invention.

The various reference numbers in the figures mean:

1. a housing; 2. a lower base; 3. an upper base; 4. a support; 41. a rotating mechanism speed reducer; 42. a rotation mechanism DD motor; 43. a cylinder; 5. a screw rod moves up and down; 6. a grating scale; 7. a control system; 8. an up-down moving motor; 9. a pulley assembly; 91. a motor-end pulley; 92. a rotating end pulley; 93. a belt pulley at the right end of the first joint; 94. a first joint left end belt pulley; 95. a belt pulley at the right end of the second joint; 96. a second joint left end belt pulley; 97. a third articulated pulley; 10. a first joint; 11. a second joint; 111. a sheet counter; 112. a rotary joint; 113. a third joint; 114. a vacuum hole; 12. and a vacuum digital display screen.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second", "third", "fourth", "fifth", "sixth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", "third", "fourth", "fifth", "sixth" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Example 1

The utility model provides a novel multifunctional manipulator for wafer transfer, as shown in figures 1-3, comprising a shell 1, a control system 7 is arranged on the outer wall of the shell 1, a base is arranged on the bottom of the shell 1, the base comprises an upper base 3 and a lower base 2, an aluminum alloy flat plate is adopted, mounting holes and fixing holes are arranged on the upper surface, the upper base 3 and the lower base 2 are connected and fixed through a bracket 4 to form a firm structure, an up-down moving device is arranged on the bracket 4, the up-down moving device comprises an up-down moving lead screw 5, a guide rail, a belt pulley and an up-down moving motor 8, a rotating mechanism is arranged on the chassis of the up-down moving device, the rotating mechanism is driven by a rotating mechanism speed reducer 41 and a rotating mechanism DD motor 42, the rotating mechanism DD motor 42 not only reduces the size of the rotating mechanism, but also increases the rotating precision of the rotating mechanism, a round barrel 43 is fixed on the rotating mechanism, the barrel 43 is fixed with a multi-joint arm telescopic system, the barrel 43 not only plays a role of fixing and supporting, but also can contain a multi-joint power motor and protect an air pipe, a motor wire and a data wire, the arm telescopic system is composed of a first joint 10, a second joint 11 and a third joint 113, and the first joint 10, the second joint 11 and the third joint 113 are connected sequentially through a belt pulley assembly 9.

In the embodiment, in order to reduce the overall size of the mechanism, a motor and belt pulley reverse installation method is adopted to provide power for the up-and-down movement, meanwhile, in order to increase the up-and-down movement precision, a grating ruler 6 is installed on the support 4, and errors generated by the up-and-down movement motor 8, the belt pulley and the up-and-down movement screw rod 5 can be compensated through the grating ruler 4.

Specifically, two belt pulleys are respectively arranged in the first joint 10 and the second joint 11 and are distributed at two ends of the joints, and the two belt pulleys at the joint of the first joint 10 and the second joint 11 are directly connected.

Further, the pulley assembly 9 includes a motor end pulley 91, a rotation end pulley 92, a first joint right end pulley 93, a first joint left end pulley 94, a second joint right end pulley 95, a second joint left end pulley 96 and a third joint pulley, and the motor for driving the joint to move is installed and hidden in the drum 43.

Further, in order to ensure the accuracy, a sheet counter 111 is attached to the third joint pulley 97, and an error between the belt and the pulley is compensated by the sheet counter 111, and the sheet counter 111 is attached to the third joint pulley 97 through a rotary joint 112.

Example 2

In order to meet different requirements, on the basis of embodiment 1, a jig is installed on the third joint 113, and different jigs are installed to meet different applications in combination with different wafer transfer requirements.

Further, in order to fix the wafer in the moving process, a vacuum hole 114 is formed in the fixing jig of the third joint 113, the vacuum hole 114 is connected with the jig, so that the jig can be fixed and mounted conveniently, and a vacuum digital display screen 12 is further mounted on the top of the housing 1 and used for vacuum digital display.

The utility model discloses a novel multifunctional manipulator for wafer transmission is when using, at first place the device stably, and with its switch on, drive the chassis rotation that reciprocates the device through rotary mechanism speed reducer 41 and rotary mechanism DD motor 42, then drive rotatory end belt pulley 92 through motor end belt pulley 91 and rotate, rotatory end belt pulley 92 directly links to drive first joint right-hand member belt pulley 93 and rotates, first joint right-hand member belt pulley 93 drives first joint left end belt pulley 94 and rotates, first joint left end belt pulley 94 drives second joint right-hand member belt pulley 95 and rotates, second joint right-hand member belt pulley 95 drives second joint left end belt pulley 96 and rotates, can realize the activity in proper order of each joint, two belt pulleys in every joint are direct to pass through the sawtooth belt and link to each other, guarantee power transmission.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A novel multifunctional manipulator for wafer transfer, includes shell (1), its characterized in that: the bottom of the shell (1) is provided with a base which comprises an upper base (3) and a lower base (2), the upper base (3) and the lower base (2) are connected and fixed through a bracket (4), an up-down moving device is arranged on the bracket (4), the up-down moving device comprises an up-down moving screw rod (5), a guide rail, a belt pulley and an up-down moving motor (8), a rotating mechanism is arranged on a chassis of the up-down moving device, the rotating mechanism is driven by a rotating mechanism speed reducer (41) and a rotating mechanism DD motor (42), a round barrel (43) is fixed on the rotating mechanism, a multi-joint arm extension system is fixed on the barrel (43), the arm extension system consists of a first joint (10), a second joint (11) and a third joint (113), the first joint (10), the second joint (11) and the third joint (113) are connected through a belt pulley assembly (9) in sequence.

2. The novel multi-functional robot for wafer transfer of claim 1, characterized in that: and a grating ruler (6) is arranged on the support (4).

3. The novel multi-functional robot for wafer transfer of claim 1, characterized in that: two belt pulleys are respectively arranged in the first joint (10) and the second joint (11) and distributed at two ends of the joints, and the two belt pulleys at the joint of the first joint (10) and the second joint (11) are directly connected.

4. The novel multi-functional robot for wafer transfer of claim 1, characterized in that: the belt pulley assembly (9) comprises a motor end belt pulley (91), a rotating end belt pulley (92), a first joint right end belt pulley (93), a first joint left end belt pulley (94), a second joint right end belt pulley (95), a second joint left end belt pulley (96) and a third joint belt pulley (97), and a motor for driving joint motion is installed and hidden in the round barrel (43).

5. The novel multi-functional robot for wafer transfer of claim 4, characterized in that: and a sheet counter (111) is additionally arranged on the third joint belt pulley (97).

6. The novel multi-functional robot for wafer transfer of claim 1, characterized in that: and a jig is arranged on the third joint (113).

7. The novel multi-functional robot for wafer transfer of claim 6, characterized in that: and a vacuum hole (114) is formed in the fixing jig of the third joint (113), and the vacuum hole (114) is connected with a jig.