TWI452648B - Substrate transfer apparatus - Google Patents

Substrate transfer apparatus Download PDF

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Publication number
TWI452648B
TWI452648B TW100137234A TW100137234A TWI452648B TW I452648 B TWI452648 B TW I452648B TW 100137234 A TW100137234 A TW 100137234A TW 100137234 A TW100137234 A TW 100137234A TW I452648 B TWI452648 B TW I452648B
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support
substrate
transfer device
support portion
disposed
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TW100137234A
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Chinese (zh)
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TW201316441A (en
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Tien Tsai Chuang
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Shuz Tung Machinery Ind Co Ltd
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Description

基板移載裝置Substrate transfer device

本發明係關於一種基板移載裝置,尤指一種在搬移過程中除了承載基板外,兼能托住一焊接於該基板側邊的電子裝置。The invention relates to a substrate transfer device, in particular to an electronic device which can support a side of the substrate in addition to the carrier substrate during the moving process.

一般而言,平面顯示器(例如:液晶面板)的自動化零件組裝作業包括將一些電子零件(例如:軟性電路板或軟硬複合電路板)焊接於玻璃基板側邊的對應位置上;而在這些零件之組裝過程中,待加工之基板係藉由一基板移載裝置將其移送至一安裝位置進行焊接作業,或在完成焊接作業後運往下一作業區。In general, automated component assembly operations for flat panel displays (eg, liquid crystal panels) include soldering electronic components (eg, flexible circuit boards or soft and hard composite circuit boards) to corresponding locations on the sides of the glass substrate; During the assembly process, the substrate to be processed is transferred to a mounting position by a substrate transfer device for welding, or after the welding operation is completed, to the next working area.

如台灣第I227535號專利提到如第十及十一圖所示的基板移載裝置1,其係用來運送四周安裝有電子零件42之玻璃基板41。該基板移載裝置1包括一可旋轉之移動機構30、設於該移動機構30上的一支撐板10及套設於該支撐板10周圍的一零件輔助框32。該支撐板10連同其上的吸盤12係用來支撐並吸附該玻璃基板41。該零件輔助框32係用來托住焊接於該玻璃基板41周圍的電子零件42。For example, the Taiwan Patent No. I227535 refers to the substrate transfer device 1 as shown in the tenth and eleventh drawings for transporting the glass substrate 41 on which the electronic component 42 is mounted. The substrate transfer device 1 includes a rotatable moving mechanism 30, a support plate 10 disposed on the moving mechanism 30, and a component auxiliary frame 32 sleeved around the support plate 10. The support plate 10, together with the suction cup 12 thereon, is used to support and adsorb the glass substrate 41. The part auxiliary frame 32 is used to hold the electronic component 42 soldered around the glass substrate 41.

如第十二及十三圖所示,台灣第I227535號專利更提到該基板移載裝置1可加裝一基板輔助框20,套設於該支撐板10的四周圍,以擴大該基板移載裝置1之承載面來支撐一個比上述玻璃基板41還大之大型玻璃基板41’。然而,為了對應托住該大型玻璃基板41’周圍的電子零件42’,上述之零件輔助框32還必須替換為一更大之零件輔助框32’,以套設於該基板輔助框20的外圍。As shown in the twelfth and thirteenth drawings, the Taiwan Patent No. I227535 further mentions that the substrate transfer device 1 can be attached with a substrate auxiliary frame 20, which is sleeved around the support plate 10 to enlarge the substrate transfer. The bearing surface of the carrier device 1 supports a large glass substrate 41' which is larger than the above-mentioned glass substrate 41. However, in order to support the electronic component 42' around the large glass substrate 41', the above-mentioned component auxiliary frame 32 must also be replaced with a larger part auxiliary frame 32' to be sleeved on the periphery of the substrate auxiliary frame 20. .

本發明提供一種與習知結構不同的基板移載裝置,以有效承載基板及托住焊接於基板周邊的電子零件。The present invention provides a substrate transfer device different from the conventional structure to effectively carry the substrate and hold the electronic components soldered to the periphery of the substrate.

大體而言,本發明之基板移載裝置包括一移動機構、一支撐部及一撐扶條。該支撐部係設於該移動機構,用來水平地支撐該基板。該撐扶條係沿X方向設置於該支撐部,且能相對於該支撐部由該支撐部上的一原始位置沿X方向水平地向外移動到該支撐部上的一第一撐扶位置,去托住該基板側邊之該電子零件。較佳地,該撐扶條更可沿Y方向於該支撐部上被手動調整而變換位置,以轉換到一與該電子零件對應之位置,使撐托效果更穩當。In general, the substrate transfer device of the present invention includes a moving mechanism, a support portion and a support bar. The support portion is disposed on the moving mechanism for horizontally supporting the substrate. The support bar is disposed on the support portion along the X direction, and is horizontally outwardly movable from the original position on the support portion in the X direction to a first support position on the support portion relative to the support portion. To support the electronic component on the side of the substrate. Preferably, the support bar is manually adjusted in the Y direction on the support portion to change position to switch to a position corresponding to the electronic component, so that the support effect is more stable.

又,為使該基板與該電子零件在焊接作業完成後仍能維持良好焊接效果,該撐扶條的外形係特別地被設計由其內側端逐漸往外側端漸細,以減緩該基板移載裝置在運送基板過程中可能產生的振動傳導至該電子零件。較佳地,該撐扶條係選由彈性材料(例如:鋼板或鋼條)製成,以減緩振動傳導。一般而言,在焊接作業完成之初,焊料或導電膠可能尚未完全硬化,因此任何的振動都可能降低該基板與該電子零件之間剛形成的結合力,甚至導致該電子零件鬆托。Moreover, in order to maintain a good welding effect between the substrate and the electronic component after the welding operation is completed, the shape of the support bar is specially designed to gradually taper from the inner end to the outer end to slow the substrate transfer. The vibrations that may be generated by the device during transport of the substrate are conducted to the electronic component. Preferably, the brace is made of an elastic material (for example: steel plate or steel bar) to mitigate vibration conduction. In general, at the beginning of the soldering operation, the solder or conductive paste may not be completely hardened, so any vibration may reduce the bonding force just formed between the substrate and the electronic component, and even cause the electronic component to be loosened.

此外,為因應不同尺寸的基板,該基板移載裝置的支撐部包括一主框、一可拆離地設在該主框周圍的外框以及設於該主框與該外框上之複數吸盤。該內、外框共同形成一承載面,以與該些吸盤共同支撐並吸附一較大尺寸之基板。如待承載之基板尺寸較小時,該外框可適時地被拆離該基板移載裝置而不用。無論如何,該撐扶條也能因應不同尺寸的基板而相對地移動到上述之第一撐扶位置,以托住較小基板側邊之電子零件,或是更向外移動到一第二撐扶位置,以托住較大基板側邊之電子零件。相較於先前技術,本發明之撐扶條係被安排可相對於該主框或外框而活動到一托住電子零件的位置,如此可不需更換輔助框就能有效地因應不同尺寸基板周邊電子零件的需要。In addition, in order to respond to substrates of different sizes, the support portion of the substrate transfer device includes a main frame, an outer frame detachably disposed around the main frame, and a plurality of suction cups disposed on the main frame and the outer frame . The inner and outer frames collectively form a bearing surface for supporting and adsorbing a larger-sized substrate together with the suction cups. When the size of the substrate to be carried is small, the outer frame can be detached from the substrate transfer device in time. In any case, the support bar can also be relatively moved to the first support position corresponding to the different size of the substrate to support the electronic components on the side of the smaller substrate or to move outward to a second support. Support the position to support the electronic parts on the side of the larger substrate. Compared with the prior art, the support bar of the present invention is arranged to be movable relative to the main frame or the outer frame to a position for holding the electronic component, so that the peripheral frame of different sizes can be effectively responded without replacing the auxiliary frame. The need for electronic parts.

至於本發明的其它發明內容與更詳細的技術及功能說明,將揭露於隨後的說明。Other inventive aspects and more detailed technical and functional descriptions of the present invention are disclosed in the following description.

第一~七圖係顯示本發明之基板移載裝置100的一個較佳例子。其中,第一圖指出該移載裝置100係用以將一基板80送往一焊接位置去焊接一電子零件81,並續將該基板80連同該焊接之該電子零件81運往下一工作站。如第二圖所示,該移載裝置100主要包括一移動機構5、一支撐部6及設於該支撐部6相對之兩排撐扶條7。The first to seventh drawings show a preferred example of the substrate transfer device 100 of the present invention. The first figure indicates that the transfer device 100 is used to send a substrate 80 to a soldering location to solder an electronic component 81, and continue to transport the substrate 80 along with the soldered electronic component 81 to the next workstation. As shown in the second figure, the transfer device 100 mainly includes a moving mechanism 5, a support portion 6, and two rows of support bars 7 disposed opposite the support portion 6.

該支撐部6包括一基座61、設於該基座61上的複數X向導軌62、至少一主框63及位在該主框63上之複數真空吸盤64。如第一及三圖所示,該支撐部6之基座61係設於該移動機構5,該主框63係固定於該基座61上且略微地架高於該些X向導軌62之上方,而該移動機構5係用以帶動該支撐部6沿X、Y及Z方向移動,且繞著Z軸轉動。The support portion 6 includes a base 61, a plurality of X-direction guide rails 62 disposed on the base 61, at least one main frame 63, and a plurality of vacuum suction cups 64 positioned on the main frame 63. As shown in the first and third figures, the base 61 of the support portion 6 is disposed on the moving mechanism 5, and the main frame 63 is fixed on the base 61 and slightly above the X-direction guide rails 62. Above, the moving mechanism 5 is used to drive the support portion 6 to move in the X, Y and Z directions and to rotate around the Z axis.

大體而言,該支撐部6之主框62與吸盤64主要係用來水平地支撐並吸附該基板80,而該些撐扶條7主要係用來托住該基板80側邊之電子零件81。具體而言,每一撐扶條7係沿X方向設置於該支撐部6,且能相對於該支撐部6由該支撐部6上的一原始位置(第二或四圖)沿X方向水平地向外移動到該支撐部6上的一第一撐扶位置(第一或五圖),去托住該基板80側邊之一電子零件81。較佳地,每一撐扶條7係由其內側端逐漸往外側端漸細,且更佳地是由彈性材料製成,以減緩該移動機構5行進中產生的振動傳導至所撐扶的電子零件81。In general, the main frame 62 and the suction cup 64 of the support portion 6 are mainly used to horizontally support and adsorb the substrate 80, and the support bars 7 are mainly used to support the electronic components 81 on the side of the substrate 80. . Specifically, each of the support bars 7 is disposed on the support portion 6 in the X direction, and can be horizontally aligned with respect to the support portion 6 by an original position (second or fourth figure) on the support portion 6 in the X direction. The ground is moved outward to a first support position (first or fifth figure) on the support portion 6 to support one of the electronic components 81 on the side of the substrate 80. Preferably, each of the support bars 7 is gradually tapered from the inner end to the outer end, and more preferably made of an elastic material to slow the transmission of vibration generated by the movement of the moving mechanism 5 to the support. Electronic part 81.

如第二圖所示,該移載裝置100更包括四組X向載送裝置。每一X向載送裝置包括一承座91及連接該承座91之一驅動機構92(例如:氣壓缸),以將該些撐扶條7由各自之原始位置(第四圖)向外移送至對應之第一撐扶位置(第五圖)。其中,每一承座91係可滑動地垂直跨設於平行的兩X向導軌62,且每一驅動機構92係設於該基座62之底部,用以驅動該承座91向外移動,而該些撐扶條7係兩兩一組地設於一個承座91上。如此,該些驅動機構92得以分別驅動該些承座91沿著該些X向導軌62位移,以將其上該些撐扶條7由其原始位置向外移送至對應之第一撐扶位置,或反向移回原位。As shown in the second figure, the transfer device 100 further includes four sets of X-direction carrying devices. Each X-direction carrying device includes a socket 91 and a driving mechanism 92 (for example, a pneumatic cylinder) connected to the socket 91 to extend the supporting bars 7 from their original positions (fourth drawing) Transfer to the corresponding first support position (fifth figure). Each of the sockets 91 is slidably disposed vertically on the parallel two X-direction rails 62, and each driving mechanism 92 is disposed at the bottom of the base 62 for driving the socket 91 to move outward. The support bars 7 are arranged on a socket 91 in groups of two. In this manner, the driving mechanisms 92 are respectively driven to displace the plurality of sockets 91 along the X-direction guide rails 62 to transfer the support bars 7 from the original position thereof to the corresponding first support positions. , or move back to the original position.

在本實施例中,每一X向載送裝置之承座91係一長條體且沿Y方向設置,且該承座91沿其長度方向界定有複數定位槽910,供該些撐扶條7的一端選擇地性定位。如此,該些撐扶條7可根據所對應之電子零件81之位置,分別被手動調整至一與該電子零件81對應之位置,以提升撐托效果。In this embodiment, the socket 91 of each X-direction carrying device is a long strip body and is disposed along the Y direction, and the socket 91 defines a plurality of positioning slots 910 along the length direction thereof for the support rods. One end of 7 selects the local positioning. In this way, the support bars 7 can be manually adjusted to a position corresponding to the electronic component 81 according to the position of the corresponding electronic component 81 to enhance the supporting effect.

如第六圖所示,該移載裝置100的支持部6可增設一外框65及設於該外框65上之複數吸盤66。該外框65係套設於該主框63的四周而與該主框63共同形成一承載面。如此,該主框63、外框65及該些吸盤64、66可用來承載並吸附比該基板80更大之一大型基板82,如第七圖所示。As shown in the sixth figure, the support portion 6 of the transfer device 100 can be provided with an outer frame 65 and a plurality of suction cups 66 disposed on the outer frame 65. The outer frame 65 is sleeved around the main frame 63 to form a bearing surface together with the main frame 63. As such, the main frame 63, the outer frame 65, and the suction cups 64, 66 can be used to carry and adsorb a larger substrate 82 than the substrate 80, as shown in the seventh figure.

此外,為因應該大型基板82之需要,每一X向載送裝置將其上之撐扶條7沿著該些X向導軌62由該第一撐扶位置(第五圖)向外移送到該支撐部6上的一第二撐扶位置(第七圖),去托住該大型基板82側邊之一電子零件83。相較於先前技術,本發明之撐扶條係被安排可相對於該主框或該外框而活動到一托住電子零件的位置,如此可不需更換輔助框就能有效地因應不同尺寸基板周邊電子零件的需要。In addition, in order to meet the needs of the large substrate 82, each X-direction carrying device moves the support bar 7 thereon along the X-direction guide rails 62 from the first support position (fifth figure). A second supporting position (seventh drawing) on the supporting portion 6 supports one of the electronic components 83 on the side of the large substrate 82. Compared with the prior art, the support bar of the present invention is arranged to be movable relative to the main frame or the outer frame to a position for holding the electronic component, so that the substrate can be effectively adapted to different sizes without replacing the auxiliary frame. The need for peripheral electronic components.

第八及九圖係用以顯示該移載裝置100的實際運作情形。如第八圖所示,該移載裝置100之移載裝置5已經將一基板80帶到一熱壓著裝置3的一焊接位置,以安裝一電子零件81。該焊接位置係位於該熱壓著裝置3的一熱壓頭31與一支撐台32之間,且在該焊接位置時,該基板80與該電子零件81係分別被該移載裝置100之支撐部6與該熱壓著裝置3的一升降台33所平坦地支撐著。待該基板與該電子零件81焊接完成後,該熱壓頭31會先拉升回到其原位,隨後該支撐部6及該升降台33同時被推升至一高度,如第九圖所示,使得焊接好的該基板80與該電子零件81能維持其平坦的狀態脫離該支撐台32。此時,該移載裝置100之撐扶條7可順勢伸出該支撐部6至該升降台33旁邊的空隙中,去托住剛焊接之電子零件81。最後,該移載裝置5再帶動該支撐部6往X方向位移,以將該支撐部6上之基板80及電子零件81送離該焊接位置。The eighth and ninth figures are used to show the actual operation of the transfer device 100. As shown in the eighth diagram, the transfer device 5 of the transfer device 100 has brought a substrate 80 to a soldering position of a heat pressing device 3 to mount an electronic component 81. The welding position is located between a thermal head 31 of the hot pressing device 3 and a support table 32. In the welding position, the substrate 80 and the electronic component 81 are respectively supported by the transfer device 100. The portion 6 and the lifting table 33 of the heat pressing device 3 are supported flat. After the substrate and the electronic component 81 are soldered, the thermal head 31 is first pulled back to its original position, and then the support portion 6 and the lifting platform 33 are simultaneously pushed up to a height, as shown in FIG. It is shown that the soldered substrate 80 and the electronic component 81 can be maintained in a flat state away from the support table 32. At this time, the support bar 7 of the transfer device 100 can extend the support portion 6 to the space beside the lifting platform 33 to support the newly soldered electronic component 81. Finally, the transfer device 5 further drives the support portion 6 to move in the X direction to lift the substrate 80 and the electronic component 81 on the support portion 6 away from the soldering position.

從上述說明中,可以理解到本發明之移載裝置,不但能承載基板外,也能有效托住焊接於基板周邊的電子零件,更能因應不同尺寸基板而調整其基板承載面之大小或電子零件之托住範圍。From the above description, it can be understood that the transfer device of the present invention not only can carry the substrate, but also can effectively support the electronic components soldered on the periphery of the substrate, and can adjust the size or electron of the substrate bearing surface according to the different size substrates. The range of support for the part.

無論如何,任何人都可以從上述例子的說明獲得足夠教導,並據而了解本發明內容確實不同於先前技術,且具有產業上之利用性,及足具進步性。是本發明確已符合專利要件,爰依法提出申請。In any event, anyone can obtain sufficient teaching from the description of the above examples, and it is understood that the present invention is indeed different from the prior art, and is industrially usable and progressive. It is the invention that has indeed met the patent requirements and has filed an application in accordance with the law.

100...移載裝置100. . . Transfer device

3...熱壓著裝置3. . . Hot pressing device

31...熱壓頭31. . . Hot head

32...支撐台32. . . Support table

33...升降台33. . . Lifts

5...移動機構5. . . Mobile agency

6...支撐部6. . . Support

61...基座61. . . Pedestal

62...X向導軌62. . . X-direction rail

63...主框63. . . Main frame

64...真空吸盤64. . . Vacuum chuck

65...外框65. . . Outer frame

66...吸盤66. . . Suction cup

7...撐扶條7. . . Support bar

80...基板80. . . Substrate

81...電子零件81. . . Electronic parts

82...大型基板82. . . Large substrate

91...承座91. . . Seat

910...定位槽910. . . Positioning slot

92...驅動機構92. . . Drive mechanism

第一圖,係本發明移載裝置之一較佳實施例之示意圖。The first figure is a schematic view of a preferred embodiment of the transfer device of the present invention.

第二圖,係該較佳實施例之立體分解圖。The second drawing is an exploded perspective view of the preferred embodiment.

第三圖,係該較佳實施例之剖面圖及其局部放大圖。The third drawing is a cross-sectional view of the preferred embodiment and a partial enlarged view thereof.

第四圖,係該較佳實施例之局部上視圖,顯示其撐托條位於一原始位置。The fourth figure is a partial top view of the preferred embodiment showing its support strips in an original position.

第五圖,係類似於第四圖,顯示該撐托條位於一第一支撐位置。The fifth figure, similar to the fourth figure, shows that the support strip is in a first support position.

第六圖,顯示較佳實施例增設一外框之示意圖。Figure 6 is a schematic view showing the addition of an outer frame in the preferred embodiment.

第七圖,係類似於第五圖,顯示該撐托條位於一第二支撐位置。The seventh figure is similar to the fifth figure, showing that the support strip is located at a second support position.

第八圖,顯示較佳實施例與一熱壓著裝置之局部斷面圖。Figure 8 is a partial cross-sectional view showing the preferred embodiment and a heat pressing device.

第九圖,顯示較佳實施例之支撐部與該熱壓著裝置之升降台同步上升後的情形。Fig. 9 is a view showing a state in which the support portion of the preferred embodiment is raised in synchronization with the lifting table of the heat pressing device.

第十圖,顯示習知基板移載裝置的上視圖。Figure 10 shows a top view of a conventional substrate transfer device.

第十一圖,係習知基板移載裝置沿著第十圖A-A線剖視之斷面圖。Figure 11 is a cross-sectional view of a conventional substrate transfer device taken along line A-A of Figure 10.

第十二圖,顯示習知基板移載裝置增設一基板輔助框的上視圖。Figure 12 is a top plan view showing the addition of a substrate auxiliary frame to a conventional substrate transfer device.

第十三圖,係習知基板移載裝置沿著第十二圖B-B線剖視之斷面圖。Figure 13 is a cross-sectional view of the conventional substrate transfer device taken along line B-B of Figure 12.

100...移載裝置100. . . Transfer device

5...移動機構5. . . Mobile agency

6...支撐部6. . . Support

61...基座61. . . Pedestal

62...X向導軌62. . . X-direction rail

63...主框63. . . Main frame

7...撐扶條7. . . Support bar

80...基板80. . . Substrate

81...電子零件81. . . Electronic parts

91...承座91. . . Seat

Claims (10)

一種移載裝置,用來承載一基板及該基板側邊的至少一電子零件;該移載裝置包括:一移動機構;一支撐部,設於該移動機構,用來水平地支撐該基板;及一撐扶條,係沿X方向設置於該支撐部,且該撐扶條能相對於該支撐部由該支撐部上的一原始位置沿X方向水平地向外移動到該支撐部上的一第一撐扶位置,去托住該基板側邊之該電子零件。A transfer device for carrying a substrate and at least one electronic component on a side of the substrate; the transfer device includes: a moving mechanism; a support portion disposed on the moving mechanism for horizontally supporting the substrate; a support bar is disposed on the support portion along the X direction, and the support bar can be horizontally outwardly moved from the original position on the support portion to the support portion by an original position on the support portion The first support position is to hold the electronic component on the side of the substrate. 如申請專利範圍第1項所述的移載裝置,其中該撐扶條係由其內側端逐漸往外側端漸細。The transfer device of claim 1, wherein the support strip is gradually tapered from an inner end to an outer end. 如申請專利範圍第2項所述的移載裝置,其中該撐扶條係由彈性材料製成。The transfer device of claim 2, wherein the support bar is made of an elastic material. 如申請專利範圍第1項所述的移載裝置,更包括一X向載送裝置,其中該支撐部包括一基座及一X向導軌;該基座設於該移動機構;該X向載送裝置及該X向導軌均設於該基座,且該X向載送裝置係用以使該撐扶條於該X向導軌上位移,使得該撐扶條能於該原始位置及該第一撐扶位置之間移動。The transfer device of claim 1, further comprising an X-direction carrying device, wherein the supporting portion comprises a base and an X-direction guide rail; the base is disposed on the moving mechanism; The feeding device and the X-direction guide rail are both disposed on the base, and the X-direction carrying device is configured to displace the support bar on the X-direction rail, so that the support bar can be in the original position and the first Move between the support positions. 如申請專利範圍第4項所述的移載裝置,其中該X向載送裝置包括至少一承座及一驅動機構;該承座係可滑動地設於該X向導軌,其中該承座係沿Y方向配置之長條體,且沿其長度方向界定有複數定位槽;該撐扶條係選擇地性定位於該承座的任一定位槽;且該驅動機構用以驅動該承座連同該撐扶條於該X向導軌位移。The transfer device of claim 4, wherein the X-direction carrying device comprises at least one socket and a driving mechanism; the socket is slidably disposed on the X-direction rail, wherein the bearing system is a strip body disposed along the Y direction, and defining a plurality of positioning grooves along the length direction thereof; the support strip is selectively positioned in any of the positioning slots of the socket; and the driving mechanism is used to drive the socket together The support bar is displaced on the X-direction rail. 如申請專利範圍第4或5項所述的移載裝置,其中該支撐部更包括設於該基座上的一主框及設於該主框上之複數吸盤;且該主框及該些吸盤係用來承載並吸附該基板。The transfer device of claim 4, wherein the support portion further comprises a main frame disposed on the base and a plurality of suction cups disposed on the main frame; and the main frame and the plurality of A suction cup is used to carry and adsorb the substrate. 如申請專利範圍第6項所述的移載裝置,其中該支撐部更包括設於該基座上的一外框及設於該外框上之複數吸盤;該外框係套設於該主框的四周而與該主框共面;且該主框、外框及該些吸盤可用來承載並吸附比該基板大之一大型基板。The transfer device of claim 6, wherein the support portion further comprises an outer frame disposed on the base and a plurality of suction cups disposed on the outer frame; the outer frame is sleeved on the main The frame is coplanar with the main frame; and the main frame, the outer frame and the suction cups can be used to carry and adsorb one large substrate larger than the substrate. 如申請專利範圍第7項所述的移載裝置,其中該X向載送裝置更能承載該撐扶條於該X向導軌上由該第一撐扶位置向外移動到該支撐部上的一第二撐扶位置,去托住該大型基板側邊之一電子零件。The transfer device of claim 7, wherein the X-direction carrying device is more capable of carrying the support bar on the X-direction rail and is moved outward from the first support position to the support portion. A second support position is used to support one of the electronic components on the side of the large substrate. 如申請專利範圍第1項所述的移載裝置,更包括另一撐扶條,沿X方向設置於該支撐部;其中該兩撐扶條分別設於該支撐部的兩相對側;該另一撐扶條亦能相對於該支撐部由該支撐部上的一原始位置向外移動到該支撐部上的另一位置,去托住該基板另一側邊之一電子零件。The transfer device of claim 1, further comprising another support bar disposed on the support portion along the X direction; wherein the two support bars are respectively disposed on opposite sides of the support portion; A support bar can also be moved outward from an original position on the support portion to another position on the support portion relative to the support portion to support an electronic component on the other side of the substrate. 如申請專利範圍第1或2項所述的移載裝置,其中該支撐部包括一主框、一外框及設於該主框與該外框上之複數吸盤;該主框及其上的吸盤係用來水平地支撐並吸附該基板;該外框及其上之吸盤係可拆離地套設於該主框四周,使得該外框與該主框共面,用以與該主框共同支撐一個比該基板大之大型基板。The transfer device of claim 1 or 2, wherein the support portion comprises a main frame, an outer frame, and a plurality of suction cups disposed on the main frame and the outer frame; the main frame and the main frame thereof The suction cup is configured to horizontally support and adsorb the substrate; the outer frame and the suction cup thereon are detachably sleeved around the main frame, so that the outer frame is coplanar with the main frame for use with the main frame Together, it supports a large substrate larger than the substrate.
TW100137234A 2011-10-14 2011-10-14 Substrate transfer apparatus TWI452648B (en)

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