CN209104131U - A kind of wafer locating unit - Google Patents
A kind of wafer locating unit Download PDFInfo
- Publication number
- CN209104131U CN209104131U CN201822048086.1U CN201822048086U CN209104131U CN 209104131 U CN209104131 U CN 209104131U CN 201822048086 U CN201822048086 U CN 201822048086U CN 209104131 U CN209104131 U CN 209104131U
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- Prior art keywords
- wafer
- lifting
- lifting arm
- locating
- positioning
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The utility model discloses a kind of wafer locating units in semiconductor manufacturing equipment, including cabinet, cabinet surface is provided with pedestal, front and back is correspondingly arranged on two positioning seats on pedestal, baffle is vertically arranged in the middle part of positioning seat, two positioning protrusion are symmetrically set on positioning seat, the front and rear sides of wafer material frame are respectively supported on corresponding positioning seat, lifting lift mechanism is provided with below wafer material frame, the lifting lift mechanism includes the lifting arm of two or so corresponding distributions, lifting arm axis is vertical with positioning seat length direction, the setting of lifting arm incline upward, it is arranged at intervals with several locating slots in the axial direction on the upside of lifting arm, the groove that lifting arm passes through can be held by offering on the upside of pedestal and cabinet；Lift drive mechanism is provided in the cabinet.Wafer can be transported to straight down in wafer material frame by the utility model, mobile steady, will not scratch wafer.
Description
Technical field
The utility model belongs to semiconductor manufacturing equipment, in particular to a kind of wafer locating unit.
Background technique
Wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle, therefore referred to as wafer；
It can be processed on silicon and is fabricated to various circuit component structures, and become the IC products for having specific electrical functionality.
In wafer level packaging, test process, need often to shift or select wafer.The work that wafer is shifted or selected in magazine
The manual mode taken or vacuum WAND is drawn is generallyd use during industry.Taking manually, there are following risks: being easy because hand is straight
Contact and cause contamination of products, electrostatic injury the problems such as and lead to product defects；It artificially acts improper and wafer is caused to rupture.
Vacuum WAND draws wafer, and there are following risks: sucking pen, sucker directly contact crystal column surface and be easy to cause scratch；Wafer is in magazine
In intensively pile up, inconvenient, operating efficiency is low；It is easy wafer occurs because dying or adsorbing loosely to fall.
Utility model content
The purpose of the utility model is to provide a kind of wafer locating units, wafer can be transported to crystalline substance straight down
It is mobile steady in circle material frame, wafer will not be scratched.
Purpose of the utility model is realized as follows: a kind of wafer locating unit, including cabinet, cabinet surface are set
It is equipped with pedestal, front and back is correspondingly arranged on two positioning seats on pedestal, and baffle, left and right on positioning seat are vertically arranged in the middle part of positioning seat
It is symmetrical arranged there are two positioning protrusion, the front and rear sides of wafer material frame are respectively supported on corresponding positioning seat, below wafer material frame
Be provided with lifting lift mechanism, the lifting lift mechanism includes the lifting arms of two or so corresponding distributions, lifting arm axis with
Positioning seat length direction is vertical, the setting of lifting arm incline upward, is arranged at intervals with several positioning in the axial direction on the upside of lifting arm
The groove that lifting arm passes through can be held by offering on the upside of slot, pedestal and cabinet；Lift drive mechanism is provided in the cabinet.
When utility model works, lifting arm rises through wafer material frame, and several wafers correspondence is put into each of lifting arm
In locating slot, lifting arm descends each wafer of general who has surrendered to be sent into wafer material frame again, and bottom is supported on pair of the lower supporting rod of wafer material frame
It answers in locating slot, crystal round fringes protrude into the correspondence locating slot of pressure pin.Compared with prior art, the beneficial effect of the utility model
Fruit is: two lifting arms while going up and down, can smoothly drive each wafer to move up and down, wafer material frame will by four pressure pins
Wafer positioning, the protection baffle of two sides can play the role of protecting wafer.
The lift drive mechanism includes being vertically arranged on the downside of lifting arm as a further improvement of the utility model,
Connecting rod, the connecting rod are equipped at least two, and at least two connecting rods protrude into cabinet inside and lower end is fixedly connected with lifting
Seat, is symmetrically arranged at least 4 gib blocks around lifting seat, and every gib block matches with a upright guide rail setting, lifting seat
The left and right sides is equipped with lead screw, and lead screw axis is vertically arranged, and the upper and lower ends of lead screw are rotatably supported in respectively on a bearing block, silk
One end of thick stick is connect with motor drive, and feed screw nut is arranged on lead screw, and feed screw nut is connected by attachment base and lifting seat transmission
It connects.Motor drives lead screw rotation, and the feed screw nut on lead screw moves up and down, and lifting seat is driven to move up and down, and lifting seat, which drives, to be risen
Drop arm moves up and down.
The wafer material frame includes the deckle board of two correspondences setting, frame as a further improvement of the utility model,
A pair of symmetrical upper pressure pin and a pair of symmetrical lower supporting rod are provided between plate, upper pressure pin inner shafts are arranged to interval
There are several locating slots, it is axially spaced on the upside of lower supporting rod to be provided with several locating slots, in the locating slot of wafer material frame front and rear sides
It is placed with protection baffle, each locating slot between two protection baffles is arranged in a one-to-one correspondence with each locating slot on lifting arm, and two
Deckle board bottom is fixedly connected with two or so the locating rods being correspondingly arranged；The deckle board is bonded with corresponding baffle, the locating rod
It is bonded with two positioning protrusion of correspondence.The front side of wafer material frame and rear side are positioned by the baffle of positioning seat, it is preceding
Corresponding two positioning protrusion and locating rod cooperate afterwards, and the left and right side of wafer material frame is positioned.
It is equipped with positioning plate on any positioning seat vertically as a further improvement of the utility model, is set on positioning plate
It is equipped with telescopic locating piece.After wafer material frame puts position well on positioning seat, deckle board is contacted with locating piece, and locating piece is pressed into
In groove.
The pedestal includes two side frame items being symmetrical set as a further improvement of the utility model, and two
Backing plate is provided between side frame item.The groove that lifting arm passes through can be held by offering on backing plate.
Detailed description of the invention
Fig. 1 is the top view of the utility model.
Fig. 2 is the schematic diagram of internal structure of cabinet.
Fig. 3 is the top view of lifting seat.
Fig. 4 is the sectional view along AA in Fig. 2.
Fig. 5 is the three-dimensional structure diagram of wafer material frame.
Wherein, 1 cabinet, 2 pedestals, 2a side frame item, 2b backing plate, 3 positioning seats, 3a baffle, 4 positioning protrusion, 5 wafer material frames,
5a deckle board, the upper pressure pin of 5b, 5c lower supporting rod, 5d locating rod, 5e locating slot, 6 lifting arms, 6a locating slot, 7 connecting rods, 8 lifting seats, 9
Gib block, 10 upright guide rails, 11 lead screws, 11a feed screw nut, 12 bearing blocks, 13 motors, 14 attachment bases, 15 positioning plates, 15a are fixed
Position block.
Specific embodiment
It as shown in Figs. 1-5, is a kind of wafer locating unit, including cabinet 1,1 surface of cabinet are provided with pedestal 2, bottom
Front and back is correspondingly arranged on two positioning seats 3 on seat 2, and baffle 3a, bilateral symmetry on positioning seat 3 are vertically arranged in the middle part of positioning seat 3
There are two positioning protrusion 4, the front and rear sides of wafer material frame 5 to be respectively supported on corresponding positioning seat 3 for setting, 5 lower section of wafer material frame
It is provided with lifting lift mechanism, the lifting lift mechanism includes the lifting arm 6 of two or so corresponding distributions, 6 axis of lifting arm
Vertical with 3 length direction of positioning seat, 6 incline upward of lifting arm setting, 6 upside of lifting arm is arranged at intervals with several in the axial direction
Locating slot 6a, pedestal 2 and 1 upside of cabinet, which offer, can hold the groove that lifting arm 6 passes through；Lifting driving is provided in cabinet 1
Mechanism.The lift drive mechanism includes the connecting rod 7 for being vertically arranged in 6 downside of lifting arm, and connecting rod 7 is equipped at least two,
At least two connecting rods 7 protrude into 1 inside of cabinet and lower end is fixedly connected with lifting seat 8, and at least 4 are symmetrically arranged with around lifting seat 8
Root gib block 9, every gib block 9 match with a upright guide rail 10 setting, and lead screw 11 is equipped at left and right sides of lifting seat 8,
The setting of 11 axis vertical of lead screw, the upper and lower ends of lead screw 11 are rotatably supported in respectively on a bearing block 12, one end of lead screw 11 with
Motor 13 is sequentially connected, and feed screw nut 11a is arranged on lead screw 11, and feed screw nut 11a is driven by attachment base 14 and lifting seat 8
Connection.Wafer material frame 5 includes the deckle board 5a of two correspondences setting, and a pair of symmetrical pop-up is provided between deckle board 5a
Several locating slot 5e, lower supporting rod 5c are axially arranged at intervals on the inside of bar 5b and a pair of symmetrical lower supporting rod 5c, upper pressure pin 5b
Upside is axially spaced to be provided with several locating slot 5e, is placed with protection baffle in the locating slot 5e of 5 front and rear sides of wafer material frame,
Each locating slot 5e and each locating slot 6a on lifting arm 6 between two protection baffles is arranged in a one-to-one correspondence, two bottoms deckle board 5a
It is fixedly connected with two or so the locating rod 5d being correspondingly arranged；Deckle board 5a is bonded with corresponding baffle 3a, and locating rod 5d and front and back are right
Two positioning protrusion 4 fitting answered.Positioning plate 15 is equipped on any positioning seat 3 vertically, it is telescopic fixed to be provided on positioning plate 15
Position block 15a.Pedestal 2 includes being provided with backing plate 2b between two side frame the 2a, two side frame 2a being symmetrical set.
When the present apparatus works, motor 13 drives lead screw 11 to rotate, and the feed screw nut 11a on lead screw 11 is moved up and down, and drives
Lifting seat 8 moves up and down, and lifting seat 8 drives lifting arm 6 to move up and down, and lifting arm 6 rises through wafer material frame 5, by several crystalline substances
Circle correspondence is put into each locating slot 6a of lifting arm 6, and lifting arm 6 descends each wafer of general who has surrendered to be sent into wafer material frame 5, bottom branch again
In the correspondence locating slot 5e of the lower supporting rod 5c of wafer material frame 5, crystal round fringes are protruded into the correspondence locating slot 5e of pressure pin 5b for support.
The advantages of present apparatus, is: two lifting arms 6 while going up and down, can smoothly drive each wafer to move up and down, wafer material frame 5 is logical
It crosses four pressure pins to position wafer, the protection baffle of two sides can play the role of protecting wafer.
The utility model is not limited to above-described embodiment, on the basis of technical solution disclosed by the utility model, this
For the technical staff in field according to disclosed technology contents, not needing creative labor can be special to some of which technology
Sign makes some replacements and deformation, these replacements and deformation are within the protection scope of the present utility model.
Claims (5)
1. a kind of wafer locating unit, which is characterized in that including cabinet, cabinet surface is provided with pedestal, front and back on pedestal
It is correspondingly arranged there are two positioning seat, positioning seat middle part is vertically arranged with baffle, two positioning are symmetrically set on positioning seat
Protrusion, the front and rear sides of wafer material frame are respectively supported on corresponding positioning seat, are provided with lifting lift mechanism below wafer material frame,
The lifting lift mechanism includes the lifting arm of two or so corresponding distributions, and lifting arm axis is vertical with positioning seat length direction,
The setting of lifting arm incline upward, lifting arm upside are arranged at intervals with several locating slots in the axial direction, and pedestal and cabinet upside are
The groove that lifting arm passes through can be held by offering；Lift drive mechanism is provided in the cabinet.
2. a kind of wafer locating unit according to claim 1, which is characterized in that the lift drive mechanism includes
The connecting rod being vertically arranged on the downside of lifting arm, the connecting rod are equipped at least two, and at least two connecting rods protrude into cabinet
Portion and lower end are fixedly connected with lifting seat, and at least 4 gib blocks are symmetrically arranged with around lifting seat, and every gib block is vertical with one
Guide rail matches setting, is equipped with lead screw at left and right sides of lifting seat, lead screw axis is vertically arranged, and the upper and lower ends of lead screw turn respectively
Dynamic to be supported on a bearing block, one end of lead screw is connect with motor drive, and feed screw nut is arranged on lead screw, and feed screw nut passes through
Attachment base and lifting seat are sequentially connected.
3. a kind of wafer locating unit according to claim 1 or 2, which is characterized in that the wafer material frame includes
The deckle board of two correspondences setting is provided with a pair of symmetrical upper pressure pin and a pair of symmetrical subiculum between deckle board
Bar, for upper pressure pin inner shafts to several locating slots are arranged at intervals with, lower supporting rod upside is axially spaced to be provided with several locating slots, crystalline substance
Justify and be placed with protection baffle in the locating slot of material frame front and rear sides, on each locating slots and lifting arm between two protection baffles
Each locating slot is arranged in a one-to-one correspondence, and two deckle board bottoms are fixedly connected with two or so the locating rods being correspondingly arranged；The deckle board with
Corresponding baffle fitting, the locating rod are bonded with two positioning protrusion of correspondence.
4. a kind of wafer locating unit according to claim 3, which is characterized in that vertical on any positioning seat
Equipped with positioning plate, telescopic locating piece is provided on positioning plate.
5. a kind of wafer locating unit according to claim 1 or 2, which is characterized in that the pedestal includes two
The side frame item being symmetrical set is provided with backing plate between two side frame items.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822048086.1U CN209104131U (en) | 2018-12-07 | 2018-12-07 | A kind of wafer locating unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822048086.1U CN209104131U (en) | 2018-12-07 | 2018-12-07 | A kind of wafer locating unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209104131U true CN209104131U (en) | 2019-07-12 |
Family
ID=67162545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822048086.1U Active CN209104131U (en) | 2018-12-07 | 2018-12-07 | A kind of wafer locating unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209104131U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110752175A (en) * | 2019-09-19 | 2020-02-04 | 上海提牛机电设备有限公司 | Wafer supporting mechanism |
| CN111243996A (en) * | 2020-03-23 | 2020-06-05 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Positioning device in wafer cleaning equipment |
| CN112992747A (en) * | 2021-02-10 | 2021-06-18 | 江苏亚电科技有限公司 | Wafer cleaning feeding and discharging device |
-
2018
- 2018-12-07 CN CN201822048086.1U patent/CN209104131U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110752175A (en) * | 2019-09-19 | 2020-02-04 | 上海提牛机电设备有限公司 | Wafer supporting mechanism |
| CN111243996A (en) * | 2020-03-23 | 2020-06-05 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Positioning device in wafer cleaning equipment |
| CN111243996B (en) * | 2020-03-23 | 2023-03-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Positioning device in wafer cleaning equipment |
| CN112992747A (en) * | 2021-02-10 | 2021-06-18 | 江苏亚电科技有限公司 | Wafer cleaning feeding and discharging device |
| CN112992747B (en) * | 2021-02-10 | 2022-01-25 | 江苏亚电科技有限公司 | Wafer cleaning feeding and discharging device |
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