CN104019744A - Two-dimension self-calibration gauge point detection alignment system - Google Patents
Two-dimension self-calibration gauge point detection alignment system Download PDFInfo
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Abstract
A two-dimension self-calibration gauge point detection alignment system comprises a zero signal reader, a two-dimension workbench, a grating ruler auxiliary calibration plate, a reading head detection part and a measuring reference frame. The grating ruler auxiliary calibration plate comprises grating rulers with zero gauge points in the X direction and in the Y direction. The reading head detection part comprises a grating ruler reading head and a mounting support. The alignment system achieves gauge point alignment based on a grating ruler detection alignment principle and a zero signal detection principle. The reading head detects zero gauge point signals on the grating ruler auxiliary calibration plate to transmit the signals to the zero signal reader, meanwhile, the two-dimension workbench records the position coordinates of the two-dimension workbench and transmits the signals to the zero signal reader, and the position coordinates of the zero gauge points are obtained. The two-dimension self-calibration gauge point detection alignment system can be applied to the two-dimension self-calibration technology, and nanoscale resolution and alignment precision are achieved. Signal reading time delay is small, and the two-dimension self-calibration gauge point detection alignment system can be applied to workbench dynamic and high-speed calibration. The entire structure is relatively simple, the performance is high, and the two-dimension self-calibration gauge point detection alignment system is not sensitive to environments.
Description
Technical field
The present invention relates to a kind of detection alignment system, particularly a kind of two-dimentional self-calibration reference points detection alignment system.
Background technology
Ultra precise workbench is more and more extensive in the application in precision engineering field, to the measuring accuracy of multidimensional worktable, require also more and more higher, at ultraprecise manufacture field (as high-end litho machine), its multidimensional measure precision often needs to reach even Subnano-class of nanoscale.For the problem of calibrating of ultra precise workbench measuring system, the development of self-calibration technology has brought new solution.Wherein, the aided measurement device of self-calibrating method based on adopting gauge point precision to demarcate object lower than quilt is as medium, by this aided measurement device, obtain and the measurement data of different positions and pose is compared, eliminate the impact of this aided measurement device gauge point positional precision, and then obtain the calibration function of precision stage, realize the demarcation of ultra precise workbench systematic error.
Meanwhile, optical grating measuring system is widely used in numerous electromechanical equipments as a kind of typical displacement transducer.The measuring principle of optical grating measuring system is mainly based on Moire fringe principle and diffraction interference principle.Optical grating measuring system based on Moire fringe principle becomes the first-selection of numerous electromechanical equipment displacement measurements as many merits such as a kind of full-fledged displacement transducer are long with its range finding, cost is low, be easy to debug.Along with the development of grating scale in commercial Application, its precision can reach nanometer scale at present, and minimum resolution can reach 1.25nm, is more satisfactory measuring sensor.
For the aided measurement device using in traditional self-calibration scheme, be an optical flat with grid groove, in self-calibration process, need to utilize optical microscope measuring system this optical flat to be carried out to detection and the aligning of gauge point.This scheme all has exposure in many patent papers, and the optical flat that the size that for example American scholar Ye is used in research paper " An exact algorithm forself-calibration of precision metrology stages " is 100 * 100mm is as aided measurement device; Tsing-Hua University's patent documentation 200510011385.2 (open day is on September 4th, 2005), utilizes a kind of grid glass plate to do aided measurement device, and completes the self-calibration of XY two-dimentional work bench; The scholar Hu of Tsing-Hua University, in article " A holistic self-calibration algorithm for X – Y precision metrology systems ", mention, in two-dimentional work bench self-calibration process, used the aided measurement device of being made by chromium plating quartz glass plate or chromium plating K9 glass plate, and in conjunction with optical microscope, optical flat has been carried out to gauge point and aim at detection.The scheme of using in above document, all relates to the use of optical microscope and imageing sensor, and this Scheme Characteristics is technology comparative maturity, and the degree of modularity is higher, and alignment result is directly perceived.But this scheme exists obvious drawback and deficiency, because optical device used is subject to the restriction of optical diffraction limit, the highest alignment precision, be only 100nm left and right, this has affected the effect of final self-calibration to a great extent; Secondly, owing to adopting optical microscope to coordinate imageing sensor to do detection system, relate to a large amount of view data and process problem, cause signals collecting frequency lower, only can carry out static alignment in this case, be difficult to aim at and demarcate in working table movement process, this causes to a great extent, and self-calibration process time is long, inefficiency; Moreover, owing to adopting the equipment such as optical microscope and imageing sensor, certainly will bring problem and the high problem of system complexity that cost is high; And this scheme can be subject to certain environmental impact, so higher to the requirement of working environment.
Consider drawback and the limitation of technique scheme, seek a kind of grating scale that utilizes as the reference points detection alignment system of measuring testing tool, this alignment system can be realized the reference points detection of two-dimentional self-calibration and aim at; This alignment system detection technique is ripe, environmental sensitivity is low, and it is even higher that resolution and precision can reach nanoscale; Detection signal is easy to process, and it is little that signal is read time delay, can be applied to worktable dynamically, demarcate at a high speed; Simultaneously this detection system also have simple for structure, volume is little, quality is light, be easy to install, convenient application and cost performance advantages of higher.Adopt this detection alignment system as the reference points detection alignment device of two-dimentional self-calibration, can effectively reduce the deficiency of traditional optical detection alignment system in self-calibration application, make self-calibration effect promoting.This reference points detection alignment system also can be applicable to other need to aim at the equipment detecting, as three coordinate measuring machine, semiconductor detection etc.
Summary of the invention
Consider drawback and the limitation of technique scheme, the object of the invention is to seek a kind of grating scale that utilizes as the reference points detection alignment system of measuring testing tool, to realize the reference points detection of two-dimentional self-calibration, aim at; Make detection signal be easy to process, it is little that signal is read time delay, can be applied to worktable dynamically, demarcate at a high speed; Make simultaneously this detection system have simple for structure, volume is little, quality is light, be easy to install, convenient application and cost performance advantages of higher.
Technical scheme of the present invention is as follows:
A two-dimentional self-calibration reference points detection alignment system, is characterized in that: comprise that zero signal reads instrument, grating scale auxiliary calibration plate, read head test section and measuring basis frame; Described grating scale auxiliary calibration plate is provided with directions X conduit, Y-direction conduit, indicate the directions X grating scale of zero mark point and indicate the Y-direction grating scale of zero mark point; The directions X grating scale that indicates zero mark point is arranged on respectively in directions X conduit and Y-direction conduit with the Y-direction grating scale that indicates zero mark point; Between conduit, be parallel to each other in the same way and spacing equates; Described read head test section comprises directions X the first grating ruler reading head and Y-direction the first grating ruler reading head; Described zero signal reads instrument and two-dimentional work bench interconnects by signal wire; Described grating scale auxiliary calibration plate is positioned on two-dimentional work bench, three angles of scaling board are respectively by the first limited block, the second limited block, the 3rd limited block is fixed on two-dimentional work bench, and the both sides at the 4th angle of scaling board are fixed by the first datum strip and the second datum strip that are arranged on two-dimentional work bench respectively; Directions X first grating ruler reading head of described read head test section is arranged on the face of measuring basis frame directions X one side by the first mounting bracket; Y-direction the first grating ruler reading head is arranged on the face of measuring basis frame Y-direction one side by the second mounting bracket; Described measuring basis frame is arranged on the portal frame of two-dimentional work bench.
Technical characterictic of the present invention is also: described read head test section also comprises directions X the second grating ruler reading head and Y-direction the second grating ruler reading head; Wherein directions X the second grating ruler reading head is arranged on the face of measuring basis frame directions X opposite side by the 3rd mounting bracket; Y-direction the second grating ruler reading head is arranged on the face of measuring basis frame Y-direction opposite side by the 4th mounting bracket.
Zero signal of the present invention reads instrument for the high-speed, multi-path grating signal disposal system based on FPGA.
The directions X channel lengths of grating scale auxiliary calibration plate of the present invention is 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0.3-0.8mm; Y-direction channel lengths is 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0-0.5mm; X, Y-direction conduit form the difference in height that the degree of depth is 0.2mm-0.4mm.
The Y-direction grating scale that indicates the directions X grating scale of zero mark point and indicate zero mark point of the present invention, all adopting thickness is the one dimension reflection-type grating of 0.2mm-0.5mm, resolution is 1.25nm.
Grating ruler reading head the first mounting bracket of the present invention, the second mounting bracket, the 3rd mounting bracket and the 4th mounting bracket (48) are L-type structure, by alloy aluminum materials processing, are made.
The profile of measuring basis frame of the present invention is rectangular structure, is provided with many rows for regulating the installation adjustment hole of oneself height and horizontal level on the top of this measuring basis frame.
A kind of two-dimentional self-calibration reference points detection alignment system provided by the present invention has the following advantages and high-lighting effect: this alignment system can be realized the reference points detection of two-dimentional self-calibration and aim at, overcome the shortcoming of traditional detection alignment system in self-calibration application, make worktable under dynamic, high-speed case, detect aligning, realized the demarcation of high-speed and high-efficiency, and detection signal is easy to process, and it is little that signal is read time delay; This alignment system detection technique is ripe, environmental sensitivity is low, and it is even higher that resolution and precision can reach nanoscale; Simultaneously this detection system also have simple for structure, volume is little, quality is light, be easy to install, convenient application and cost performance advantages of higher.Adopt this detection alignment system as the reference points detection alignment device of two-dimentional self-calibration, can effectively reduce the deficiency of traditional optical detection alignment system in self-calibration application, self-calibration effect is significantly promoted.This reference points detection alignment system also can be applicable to other need to aim at the equipment detecting, as three coordinate measuring machine, semiconductor detection etc.
Accompanying drawing explanation
Fig. 1 is a kind of two-dimentional self-calibration reference points detection alignment system schematic diagram of the present invention.
Fig. 2 is the detection alignment modules schematic diagram of a kind of two-dimentional self-calibration reference points detection alignment system of the present invention.
Fig. 3 is that the present invention detects alignment modules and in directions X and Y-direction, aims at the vertical view detecting.
Fig. 4 is auxiliary calibration plate of the present invention and channel structure schematic diagram thereof.
Fig. 5 is the schematic diagram of the another kind of embodiment in read head of the present invention test section.
In figure: 1-zero signal reads instrument, 2-two-dimentional work bench, 3-grating scale auxiliary calibration plate, 4-read head test section, 5-measuring basis frame; 31-indicate the directions X grating scale of zero mark point; 32-indicate the Y-direction grating scale of zero mark point; 33-directions X conduit, 34-Y-direction conduit, the 35-the first datum strip, the 36-the second datum strip, the 37-the first limited block, the 38-the second limited block, the 39-the three limited block; 41-directions X the first grating ruler reading head, the 42-the first mounting bracket, 43-Y-direction the first grating ruler reading head, the 44-the second mounting bracket; 45-directions X the second grating ruler reading head, the 46-the three mounting bracket, 47-Y-direction the second grating ruler reading head, the 48-the four mounting bracket.
Embodiment
Below in conjunction with accompanying drawing, structure of the present invention, principle and embodiment are described in further detail.
Please refer to Fig. 1, Fig. 1 is a kind of two-dimentional self-calibration reference points detection alignment system schematic diagram of the present invention.As shown in Figure 1, this two dimension self-calibration reference points detection alignment system comprises: zero signal reads instrument 1, two-dimentional work bench 2, grating scale auxiliary calibration plate 3, read head test section 4, measuring basis frame 5;
Described zero signal reads instrument 1 and interconnects by signal wire with two-dimentional work bench 2; Described grating scale auxiliary calibration plate 3 comprises: directions X conduit 33, and Y-direction conduit 34, indicates the directions X grating scale 31 of zero mark point, indicate Y-direction grating scale 32, the first datum strip 35, the second datum strips 36 of zero mark point, the first limited block 37, the second limited block 38, the three limited blocks 39; Described read head test section 4 comprises: directions X the first grating ruler reading head 41, the first mounting brackets 42, Y-direction the first grating ruler reading head 43, the second mounting brackets 44; Described measuring basis frame 5 is arranged on the portal frame of two-dimentional work bench 2, has porous regulatory function is installed, and the installation site of Z-direction is provided.
Please refer to Fig. 2, Fig. 2 is the detection alignment modules schematic diagram of a kind of two-dimentional self-calibration reference points detection alignment system of the present invention.Described grating scale auxiliary calibration plate 3 upper surfaces are carved with directions X conduit 33, and Y-direction conduit 34, is parallel to each other between conduit in the same way and spacing equates, are respectively used to install the directions X grating scale 31 that indicates zero mark point and the Y-direction grating scale 32 that indicates zero mark point; Be positioned on two-dimentional work bench 2, directions X is made benchmark by the first datum strip 35, and Y-direction is made benchmark by the second datum strip 36, and grating scale auxiliary calibration plate 3 three angles of residue are respectively by the first limited block 37, the second limited block 38, the three limited blocks 39 are done spacing being fixed on two-dimentional work bench 2; Directions X first grating ruler reading head 41 of described read head test section 4 is arranged on the first mounting bracket 42, and the first mounting bracket 42 is arranged on the face of directions X one side of measuring basis frame 5; Y-direction the first grating ruler reading head 43 is arranged on the second mounting bracket 44, and the second mounting bracket 44 is arranged on the face of Y-direction one side of measuring basis frame 5.
Please refer to Fig. 3, Fig. 3 is that the present invention detects alignment modules and in directions X and Y-direction, aims at the vertical view detecting.It is the one dimension reflection-type grating of 0.2mm-0.5mm that the described directions X grating scale that indicates zero mark point 31 all adopts thickness range with the Y-direction grating scale 32 that indicates zero mark point, and resolution reaches as high as 1.25nm.Described grating ruler reading head the first mounting bracket 42, the second mounting bracket 44, be L-type structure, by alloy aluminum materials processing, made.Described measuring basis frame 5 is alloy aluminum material, and its profile is rectangular structure, and upper end has many rows adjustment hole is installed, and while being arranged on two-dimentional work bench 2, height and horizontal level are adjustable.
In conjunction with Fig. 1, Fig. 2 and Fig. 3, set forth measuring system principle, described zero signal reads instrument 1 for the high-speed, multi-path grating signal disposal system based on FPGA, is connected respectively with Y-direction the first grating ruler reading head 43 with the first grating ruler reading head 41 of directions X in read head test section 4 by signal wire; When described two-dimentional work bench 2 moves in a certain gauge point position, directions X the first grating ruler reading head 41, by detecting grating scale auxiliary calibration plate 3, be marked with the directions X grating scale 31 of zero mark point, obtain zero mark point signal, and this signal is transferred to zero signal reads instrument 1, simultaneously two-dimentional work bench 2 records this moment self X-axis position coordinates and signal be transferred to zero signal read instrument 1, obtain the position coordinates of this zero mark point X-axis; In like manner, when two-dimentional work bench 2 moves in respective markers point position, Y-direction the first grating ruler reading head 43, by detecting grating scale auxiliary calibration plate 3, be marked with the Y-direction grating scale 32 of zero mark point, obtain zero mark point signal, and this signal be transferred to zero signal read instrument 1, simultaneously two-dimentional work bench 2 records this moment self Y-axis position coordinates and signal be transferred to zero signal read instrument 1, obtain the position coordinates of this zero mark point Y-axis.
When getting X, Y-axis coordinate information, complete the detection of a zero mark point on auxiliary calibration plate 3.Method, to the operation of residue gauge point, completes in self-calibration process the detection of all gauge points, aligning and writing function according to this.
Please refer to Fig. 4, Fig. 4 is auxiliary calibration plate of the present invention and conduit schematic diagram thereof.As shown in Figure 4, described grating scale auxiliary calibration plate 3 is alloy aluminum material, and on its front, directions X and Y-direction are processed with respectively for the conduit of grating scale is installed, and described conduit is parallel to each other between in the same way and spacing equates; Wherein directions X conduit 33 length are 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0.3-0.8mm; Y-direction conduit 34 length are 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0-0.5mm; X, Y-direction conduit form the difference in height that the degree of depth is 0.2mm-0.4mm.
Please refer to Fig. 5, Fig. 5 is the another kind of read head of the present invention test section embodiment schematic diagram.The another kind of embodiment of described read head test section 4 comprises directions X the second grating ruler reading head 45 and Y-direction the second grating ruler reading head 47; Wherein directions X the second grating ruler reading head 45 is arranged on by the 3rd mounting bracket 46 on the face of directions X opposite side of measuring basis frame 5; Y-direction the second grating ruler reading head 47 is arranged on by the 4th mounting bracket 48 on the face of Y-direction opposite side of measuring basis frame 5.
The measuring system providing in above-mentioned embodiment and organization plan can be realized the reference points detection of two-dimentional self-calibration and aim at; This alignment system detection technique is ripe, environmental sensitivity is low, and it is even higher that resolution and precision can reach nanoscale; Detection signal is easy to process, and it is little that signal is read time delay, can be applied to worktable dynamically, demarcate at a high speed; Simultaneously this detection system also have simple for structure, volume is little, quality is light, be easy to install, convenient application and cost performance advantages of higher.Adopt this detection alignment system as the reference points detection alignment device of two-dimentional self-calibration, can effectively reduce the deficiency of traditional optical detection alignment system in self-calibration application, when self-calibration effect is greatly improved in precision, demarcate efficiency and be also significantly improved, can realize worktable high-speed and high-efficiency dynamic calibration.This reference points detection alignment system also can be applicable to such as precision machine tool, semiconductor detection etc. other and need to aim in the equipment detecting.
Claims (8)
1. a two-dimentional self-calibration reference points detection alignment system, is characterized in that: comprise that zero signal reads instrument (1), grating scale auxiliary calibration plate (3), read head test section (4) and measuring basis frame (5);
Described grating scale auxiliary calibration plate (3) is provided with directions X conduit (33), Y-direction conduit (34), indicate the directions X grating scale (31) of zero mark point and indicate the Y-direction grating scale (32) of zero mark point; The Y-direction grating scale (32) that indicates the directions X grating scale (31) of zero mark point and indicate zero mark point is arranged on respectively in directions X conduit (33) and Y-direction conduit (34); Between conduit, be parallel to each other in the same way and spacing equates; Described read head test section (4) comprises directions X the first grating ruler reading head (41) and Y-direction the first grating ruler reading head (43); Described zero signal reads instrument (1) and interconnects by signal wire with two-dimentional work bench (2);
Described grating scale auxiliary calibration plate (3) is positioned on two-dimentional work bench (2), three angles of scaling board are respectively by the first limited block (37), the second limited block (38), it is upper that the 3rd limited block (39) is fixed on two-dimentional work bench (2), and the both sides at the 4th angle of scaling board are fixing by the first datum strip (35) and the second datum strip (36) that are arranged on two-dimentional work bench (2) respectively;
Directions X first grating ruler reading head (41) of described read head test section (4) is arranged on the face of measuring basis frame (5) directions X one side by the first mounting bracket (42); Y-direction the first grating ruler reading head (43) is arranged on the face of measuring basis frame (5) Y-direction one side by the second mounting bracket (44); Described measuring basis frame (5) is arranged on the portal frame of two-dimentional work bench (2).
2. a kind of two-dimentional self-calibration reference points detection alignment system according to claim 1, is characterized in that: described read head test section (4) also comprises directions X the second grating ruler reading head (45) and Y-direction the second grating ruler reading head (47); Wherein directions X the second grating ruler reading head (45) is arranged on the face of measuring basis frame (5) directions X opposite side by the 3rd mounting bracket (46); Y-direction the second grating ruler reading head (47) is arranged on the face of measuring basis frame (5) Y-direction opposite side by the 4th mounting bracket (48).
3. a kind of two-dimentional self-calibration reference points detection alignment system according to claim 1 and 2, is characterized in that: described zero signal reads instrument (1) for the high-speed, multi-path grating signal disposal system based on FPGA.
4. a kind of two-dimentional self-calibration reference points detection alignment system according to claim 1 and 2, it is characterized in that: directions X conduit (33) length of described grating scale auxiliary calibration plate (3) is 50mm-150mm, width is 5mm-10mm, and the degree of depth is 0.3-0.8mm; Y-direction conduit (34) length is 50mm-150mm, and width is 5mm-10mm, and the degree of depth is 0-0.5mm; Directions X and Y-direction conduit form the difference in height that the degree of depth is 0.2mm-0.4mm.
5. a kind of two-dimentional self-calibration reference points detection alignment system according to claim 1 and 2, it is characterized in that: it is the one dimension reflection-type grating of 0.2mm-0.5mm that the described directions X grating scale (31) that indicates zero mark point and the Y-direction grating scale (32) that indicates zero mark point all adopt thickness, and resolution is 1.25nm.
6. a kind of two-dimentional self-calibration reference points detection alignment system according to claim 1, is characterized in that: described the first mounting bracket (42) and the second mounting bracket (44) are L-type structure, by alloy aluminum materials processing, are made.
7. a kind of two-dimentional self-calibration reference points detection alignment system according to claim 2, is characterized in that: described the 3rd mounting bracket (46) and the 4th mounting bracket (48) are L-type structure, by alloy aluminum materials processing, are made.
8. a kind of two-dimentional self-calibration reference points detection alignment system according to claim 1 and 2, it is characterized in that: the profile of described measuring basis frame (5) is rectangular structure, on the top of this measuring basis frame, be provided with many rows for regulating the installation adjustment hole of oneself height and horizontal level.
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