CN112113507B - Two-dimensional plane displacement measuring device based on grating projection recognition - Google Patents
Two-dimensional plane displacement measuring device based on grating projection recognition Download PDFInfo
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- CN112113507B CN112113507B CN202011006258.4A CN202011006258A CN112113507B CN 112113507 B CN112113507 B CN 112113507B CN 202011006258 A CN202011006258 A CN 202011006258A CN 112113507 B CN112113507 B CN 112113507B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The utility model provides a two-dimentional plane displacement measuring device's structure based on grating projection discernment relates to high-accuracy digital displacement measurement technique, solves among the prior art of measurement, and the light path is complicated, the measurement resolution is low, and shortcoming such as difficult industrial field application. The structure includes: the device comprises a two-dimensional grating, a reading head, a light source and a mounting plate; the two-dimensional grating is arranged in the mounting plate, and the mounting plate is provided with mounting holes; the reading head and the light source are respectively and correspondingly arranged on the upper side and the lower side of the two-dimensional grating. The invention avoids the influence of large volume, complex structure and the like when using the imaging lens, and has the advantages of simple structure, small volume and convenient application. When the two-dimensional displacement sensor is matched with a grating of two-dimensional coding, the two-dimensional displacement measurement with high resolution and high precision can be realized, the increasingly developed industrial requirements of China are met, and the two-dimensional displacement sensor has important application value. The image sensor is directly attached to the two-dimensional calibration grating, the complex light path structure of an imaging lens is omitted, and the resolution capability of two-dimensional displacement measurement is improved based on an image processing algorithm.
Description
Technical Field
The invention relates to a high-precision digital displacement measurement technology, in particular to a two-dimensional plane displacement measurement device based on grating projection identification.
Background
The photoelectric displacement measurement technology is a high-precision digital displacement measurement technology integrating light, mechanical and electrical functions, and becomes a key technology in the fields of industrial manufacturing, aerospace, military equipment and the like due to the advantages of high measurement precision, wide measurement range, strong anti-interference performance, easiness in realizing large-range measurement and the like. Along with the development of ultra-precision machining equipment, a large-range numerical control machine tool and other equipment, the traditional one-dimensional measurement technology cannot meet the increasingly developed measurement requirements, and the development of a high-resolution and high-precision two-dimensional displacement measurement technology is urgently needed.
The realization of absolute displacement measurement based on an image processing algorithm is a novel measurement means at present. According to research, the information of the pixel array is obtained, so that the high-accuracy and high-power displacement subdivision can be realized more easily than the traditional measuring method based on the sub-pixel algorithm. Therefore, the study of image-based linear displacement measurement technology is a necessary means for realizing high-precision and high-resolution measurement. However, according to analysis, although the magnification imaging using the imaging lens in the current research is easy to improve the measurement resolution, the volume is increased, and the imaging lens is susceptible to vibration, virtual focus and the like. Meanwhile, the two-dimensional displacement measurement method based on the imaging lens is complex in structure and does not utilize practical application.
The existing two-dimensional displacement measurement technology is mainly realized by an interference measurement method based on a diffraction grating. Under the limitation of the complexity of the optical path and the like, the technology for realizing the measurement of the two-dimensional displacement by using the interference measurement method is still in the laboratory research stage at present, and is less in practical field application. In addition, a two-dimensional displacement measurement method based on an image processing algorithm has been studied (for example, a study made by xianhaojie, university of fertilizer industry, document 1), but a method for realizing image acquisition based on a camera adopts an imaging lens, so that the longitudinal volume of a measurement device is large, and the measurement device is easily influenced by virtual focus, vibration and the like, and is not beneficial to industrial application.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a two-dimensional plane displacement measuring device based on grating projection recognition, which solves the defects of complex optical path, low measurement resolution, difficulty in industrial field application and the like in the prior art.
The technical scheme adopted by the invention for solving the technical problem is as follows:
a two-dimensional plane displacement measuring device based on grating projection recognition is disclosed, the structure comprises: the device comprises a two-dimensional grating, a reading head, a light source and a mounting plate; the two-dimensional grating is arranged in the mounting plate, and mounting holes are formed in the mounting plate; the reading head and the light source are respectively and correspondingly arranged on the upper side and the lower side of the two-dimensional grating to form a contrast relation.
Preferably, the two-dimensional grating is tightly fixed with the mounting plate through a frame on the mounting plate.
Preferably, the reading head comprises: the reading head comprises a reading head bracket, an image sensor, two reading head magnets and a data output connector; the reading head support is in an inverted U shape, and the image sensor is positioned in the groove of the reading head support; the two reading head magnetic attractors are respectively positioned below the two support legs of the reading head support; the data output connector is connected with the image sensor and outputs data collected by the image sensor.
Preferably, the top of the reading head support is provided with a reading head mounting hole, and the reading head support is connected with a moving end of external equipment through the reading head mounting hole.
Preferably, the distance between the image sensor and the two-dimensional grating is less than 1 mm.
Preferably, the image sensor is an area array image sensor.
Preferably, the light source includes: the device comprises a parallel light source, two light source magnets, a light source bracket and a power interface; the light source bracket is in a regular U-shaped structure, and the parallel light source is positioned in the U-shaped groove of the light source bracket; the two light source magnets are respectively positioned above the two support legs of the light source bracket; the power interface is positioned on the bottom side surface of the light source bracket.
Preferably, the reading head and the light source are respectively arranged on the upper side and the lower side of the two-dimensional grating through two reading head magnetic attraction pieces and two light source magnetic attraction pieces, the two reading head magnetic attraction pieces and the two light source magnetic attraction pieces are respectively in contact with the two-dimensional grating, and when the light source moves, the reading head moves along with the light source.
Preferably, the surfaces of the two reading head magnetic attractors and the two light source magnetic attractors are smooth.
Preferably, the parallel light source is a 460nm short wavelength light source.
The invention has the beneficial effects that: the invention provides a structure of a two-dimensional displacement measuring device based on grating projection recognition. The device directly attaches the image sensor to the two-dimensional calibration grating, and can directly identify the pattern on the two-dimensional calibration grating based on the irradiation of the parallel light source. Due to the adoption of the grating projection identification method, the influences of large volume, complex structure and the like when an imaging lens is used can be avoided, and the method has the advantages of simple structure, small volume and convenience in application. When the invention is used for matching with the grating with two-dimensional coding, the two-dimensional displacement measurement with high resolution and high precision can be realized, the increasingly developed industrial requirements of China are met, and the invention has important application value. Because the image sensor is directly close to the two-dimensional calibration grating, the complex light path structure of the imaging lens is omitted, and the resolution capability of measuring the two-dimensional displacement can be greatly improved based on an image processing algorithm.
Drawings
Fig. 1 is a schematic structural diagram of a two-dimensional displacement measurement device based on grating projection recognition.
Fig. 2 is a schematic view of a reading head structure of a two-dimensional displacement measurement device based on grating projection recognition.
Fig. 3 is a schematic view of a light source structure of a two-dimensional displacement measurement device based on grating projection recognition.
In the figure: 1. the two-dimensional grating comprises a two-dimensional grating body, 2, a frame, 3, a reading head, 31, a reading head support, 32, an image sensor, 33, a first reading head magnetic attraction body, 34, a second reading head magnetic attraction body, 35, a data output connector, 36, a reading head mounting hole, 4, a light source, 41, a parallel light source, 42, a first light source magnetic attraction body, 43, a second light source magnetic attraction body, 44, a light source support, 45, a power interface, 5 and a mounting hole.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
As shown in fig. 1, a two-dimensional plane displacement measuring device based on grating projection recognition comprises: the device comprises a two-dimensional grating 1, a frame 2, a reading head 3, a light source 4 and a mounting hole 5. The reading head 3 and the light source 4 are respectively positioned on the top side and the bottom side of the two-dimensional grating 1 to form a correlation. The two-dimensional grating 1 is arranged on the frame 2, the two-dimensional grating 1 and the mounting plate can be clamped through the frame 2, and the moving range of the reading head 3 and the light source 4 is limited through the frame 2. The mounting hole 5 is used for providing a mounting position for fixing the two-dimensional plane displacement measuring device based on grating projection identification.
As shown in fig. 2, the reading head includes: the reading head comprises a reading head support 31, an image sensor 32, a first reading head magnet 33, a second reading head magnet 34, a data output connector 35 and a reading head mounting hole 36. The reading head support 31 is an inverted U-shaped support, and the image sensor 32 is positioned in a groove of the reading head support 31; the first reading head magnet 33 and the second reading head magnet 34 are respectively positioned below two support legs of the reading head bracket 31; the data output connector 35 is connected to the image sensor 32, and is configured to output the acquired data of the image sensor 32.
The reading head mounting hole 36 is located on the top side of the reading head support 31. The reading head bracket 31 is connected with the moving end of equipment such as a numerical control machine tool and the like through the reading head mounting hole 36
The first reading head magnet 33 and the second reading head magnet 34 are respectively in contact with the two-dimensional grating 1. When the moving end of the numerical control device drives the reading head 3 to move, the first reading head magnet 33 and the second reading head magnet 34 slide on the upper surface of the two-dimensional grating 1.
The first reading head magnet 33 and the second reading head magnet 34 are made of a material with strong magnetism and used for adsorbing the light source 4.
Wherein the image sensor 32 is an area array image sensor; the lower surfaces of the first reading head magnet 33 and the second reading head magnet 34 should be smooth, so that the reading heads can smoothly slide on the upper surface of the two-dimensional grating 1. The image sensor 32 is arranged on the bottom side of the reading head support 31, and the distance between the image sensor and the two-dimensional grating 1 is less than 1 mm.
As shown in fig. 3, the light source includes: the light source device comprises a parallel light source 41, a first light source magnet 42, a second light source magnet 43, a light source bracket 44 and a power interface 45. The light source bracket 44 is a bracket with a regular U-shaped structure, and the parallel light source 41 is positioned in a U-shaped groove of the light source bracket 44; the first light source magnet 42 and the second light source magnet 43 are respectively located on the upper surfaces of the two legs of the light source bracket 44; the power interface 45 is located on the bottom side of the light source holder 44.
The collimated light source 41 is used to emit a collimated light source upward and illuminate the two-dimensional grating 1.
The first light source magnet 42 and the second light source magnet 43 are respectively in contact with the two-dimensional grating 1 and can slide.
The first light source magnet 42 and the second light source magnet 43 are made of a material with strong magnetism, and attract the first reading head magnet 33 and the second reading head magnet 34. The light source 4 will be firmly fixed to the underside of the readhead 3 by magnetic attraction and as the readhead 3 moves, the light source 4 will also follow the movement.
The power interface 45 is used to supply power to the light source 4.
Wherein, to reduce the diffraction effect, the collimated light source 41 may be a 460nm short wavelength light source. The upper surfaces of the first light source magnet 42 and the second light source magnet 43 should be smooth, so that the light source 4 can smoothly slide on the lower surface of the two-dimensional grating 1.
Claims (6)
1. A structure of a two-dimensional plane displacement measuring device based on grating projection recognition is characterized by comprising: the device comprises a two-dimensional grating, a reading head, a light source and a mounting plate; the two-dimensional grating is arranged in the mounting plate, and mounting holes are formed in the mounting plate; the reading head and the light source are respectively and correspondingly arranged on the upper side and the lower side of the two-dimensional grating to form a contrast relation; the reading head comprises: the reading head comprises a reading head bracket, an image sensor, two reading head magnets and a data output connector; the reading head support is in an inverted U shape, and the image sensor is positioned in the groove of the reading head support; the two reading head magnetic attractors are respectively positioned below the two support legs of the reading head support; the data output connector is connected with the image sensor and outputs data acquired by the image sensor; the distance between the image sensor and the two-dimensional grating is less than 1 mm; the light source includes: the device comprises a parallel light source, two light source magnets, a light source bracket and a power interface; the light source bracket is in a regular U-shaped structure, and the parallel light source is positioned in the U-shaped groove of the light source bracket; the two light source magnets are respectively positioned above the two support legs of the light source bracket; the power supply interface is positioned on the bottom side surface of the light source bracket; the reading head and the light source are arranged on the upper side and the lower side of the two-dimensional grating respectively through two reading head magnetic attraction pieces and two light source magnetic attraction pieces, the two reading head magnetic attraction pieces and the two light source magnetic attraction pieces are respectively in contact with the two-dimensional grating, and when the light source moves, the reading head moves along with the light source.
2. The structure of a two-dimensional plane displacement measuring device based on grating projection recognition as claimed in claim 1, wherein the two-dimensional grating is tightly fixed with the mounting plate through a frame on the mounting plate.
3. The structure of a two-dimensional plane displacement measuring device based on grating projection recognition of claim 1, wherein the top of the reading head support is provided with a reading head mounting hole, and the reading head support is connected with the moving end of an external device through the reading head mounting hole.
4. The structure of a two-dimensional plane displacement measuring device based on grating projection recognition as claimed in claim 1, wherein the image sensor is an area array image sensor.
5. The structure of claim 1, wherein the surfaces of the two reading head magnets and the two light source magnets are smooth.
6. The structure of a two-dimensional plane displacement measuring device based on grating projection recognition as claimed in claim 1, wherein the parallel light source is a 460nm short wavelength light source.
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| CN108775869A (en) * | 2018-03-23 | 2018-11-09 | 中国科学院长春光学精密机械与物理研究所 | Realize the grating displacement measuring system and method that long stroke three-D displacement measures |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US10168189B1 (en) * | 2017-06-29 | 2019-01-01 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis |
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| CN101042542A (en) * | 2006-03-21 | 2007-09-26 | Asml荷兰有限公司 | Displacement measurement systems lithographic apparatus and device manufacturing method |
| CN102375343A (en) * | 2010-08-18 | 2012-03-14 | 上海微电子装备有限公司 | Workbench position measuring system |
| CN104019744A (en) * | 2014-06-10 | 2014-09-03 | 清华大学 | Two-dimension self-calibration gauge point detection alignment system |
| CN106813578A (en) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | A kind of two-dimensional grating measuring system |
| CN108775869A (en) * | 2018-03-23 | 2018-11-09 | 中国科学院长春光学精密机械与物理研究所 | Realize the grating displacement measuring system and method that long stroke three-D displacement measures |
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