CN100422688C - Contact surface topography measuring method and instrument based on vertical displacement scanning - Google Patents
Contact surface topography measuring method and instrument based on vertical displacement scanning Download PDFInfo
- Publication number
- CN100422688C CN100422688C CNB2006102000694A CN200610200069A CN100422688C CN 100422688 C CN100422688 C CN 100422688C CN B2006102000694 A CNB2006102000694 A CN B2006102000694A CN 200610200069 A CN200610200069 A CN 200610200069A CN 100422688 C CN100422688 C CN 100422688C
- Authority
- CN
- China
- Prior art keywords
- displacement
- worktable
- grating
- scanning
- inductance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention discloses a contact type surface topography measuring method based on vertical displacement scan and a device thereof. The present invention uses a computer to drive a working table to vertically displace so as to carry out measurement, and the distance of vertical movement of the working table, which is scanned and collected, is used as measurement data. The measurement data are input in the computer as Z coordinates collected on the X-Y-Z coordinates, a plurality of coordinate measuring data are repeatedly collected through the movement of the working table, and the workpiece surface topography which is measured is obtained after the measurement data are processed by the computer. The present invention is used for fixing the position of a focusing object lens, the data are measured through the movement of the working table, and the measuring precision is greatly improved. The present invention realizes non-contact measurement with high precision and wide measuring range, and has the characteristics of high speed and high cost performance. The present invention can realize two-dimensional and three-dimensional non-contact type composite measurement to overall dimensions, shapes, wave amplitude and surface roughness degrees of different material members.
Description
Technical field
The present invention relates to a kind of contact surface topography measuring method and measuring instrument, belong to the measurement mechanism technical field based on vertical displacement scanning.
Background technology
The contact surface topography measuring instrument kind of using is more at present, for example Britain Rank Taylor Hobson company develops and the Form Talysurf series of products of production, but for existing contact measuring surface form instrument, there are some common problems in they:
(1) owing to is that contact pilotage is in the rotation of doing around balance pivot, so there is the errors of principles of traditional contact pin type measuring method in the measuring process;
(2) nonlinearity erron when being operated in the inelastic region, inductance is arranged;
(3) can not carry out large range measuring, as curved surface, groove and little arc measuring etc.;
(4) range is big more, and the errors of principles of measurement, nonlinearity erron and ergometry are just big more.
The problems referred to above have reflected the defective of these instruments, and it is restricted when carrying out large range measuring.
Summary of the invention
The object of the present invention is to provide a kind of function strong, the contact surface topography measuring method and the measuring instrument based on vertical displacement scanning of high performance-price ratio are realized high resolving power, wide range and high-precision measurement.
Contact surface topography measuring method based on vertical displacement scanning of the present invention is to realize like this, workpiece is placed on movably on the three-dimensional perpendicular displacement scanning workbench, surface with contact inductance displacement sensor measuring workpieces, computing machine drives table veritcal movement according to the zero shift signal of sensor, make the zero shift signal of contact inductance displacement sensor be approximately zero, promptly measure lever always in the equilibrium position, the distance of scanning of diffraction grating displacement transducer and collecting work platform vertical moving is as measurement data, the Z coordinate that collects on this X-Y-Z coordinate as worktable in the input computing machine, pass through travelling table, the measurement data of a plurality of coordinates of repeated acquisition is through the workpiece surface appearance that can obtain measuring after the Computer Processing.
Above-mentioned contact surface topography measuring method based on vertical displacement scanning, fixation reflex grating on worktable, utilize laser to incide reflection grating, behind diffraction of reflection grating, form+1 grade and-1 grade of two bundle diffraction light, will+1 grade and-1 order diffraction light reflected back grating and converge at another point on the grating by the right-angle prism that places the reflection grating both sides, behind the secondary diffraction, will on the photodetector of placing perpendicular to Y-axis, form interference fringe; When table veritcal movement, will cause the phase shift of interference fringe, can obtain the displacement data of workpiece by the variation of surveying striped.
Measuring instrument of the present invention, it comprises inductance displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo telecontrol equipment, the contact inductance displacement sensor that is used to survey inductance zero shift signal is installed in the top of vertical displacement scanning worktable, the zero shift signal input digit servo motion device of inductance displacement sensor, the digital servo telecontrol equipment outputs control signals to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, on three-dimensional perpendicular displacement scanning workbench, be provided with and be used for the diffraction grating displacement transducer that the perpendicular displacement to worktable scans and gathers, the computing machine in the signal input digit servo motion device of diffraction grating displacement transducer.
Above-mentioned measuring instrument, inductance displacement sensor is made up of magnetic core (1), telefault (2), fulcrum (3), lever (4) and contact pilotage (5), lever (4) two ends on the fulcrum (3) are respectively equipped with contact pilotage (5) and magnetic core (1), magnetic core (1) inserts in the telefault (2), the signal input digit servo motion device of telefault (2).
Above-mentioned measuring instrument, three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (11) and diffraction grating displacement transducer (8); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (11), and the vertical displacement scanning worktable is provided with diffraction grating displacement transducer (8).
Above-mentioned measuring instrument, the vertical displacement scanning worktable is made up of the worktable (7) of oblique mechanism (10), piezoelectric ceramics (9) and place work piece (6); The oblique mechanism of translator (10) is installed on the X-Y worktable (11), and oblique mechanism (10) top is provided with piezoelectric ceramics (9), and piezoelectric ceramics (9) top is the worktable (7) of place work piece (6).
Above-mentioned measuring instrument, the digital servo telecontrol equipment is made up of computing machine (12), X-Y direction motor-drive circuit (13), oblique mechanism motor-drive circuit (14), inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16) and driver circuit for piezoelectric ceramics (17); The input end of computing machine (12) connects the output terminal of inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (12) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (14) and X-Y direction motor-drive circuit (13); Computing machine (12) is handled the signal from telefault (2) and diffraction grating displacement transducer (8), and the motor of control and drive pressure electroceramics (12), oblique mechanism (13) and X-Y worktable (11) is realized the digital servo motion.
Above-mentioned measuring instrument, diffraction grating displacement transducer (11) is made up of reflection grating (18), right-angle prism (19), photelectric receiver (20) and He-Ne laser instrument (21), reflection grating (18) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (21) is installed in reflection grating (18) the place ahead, two right-angle prisms (19) are located at 45 degree positions, reflection grating (18) both sides respectively, and reflection grating (18) the place ahead also is provided with photelectric receiver (19).
Measurement mechanism of the present invention is made up of contact inductance displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo telecontrol equipment, and has made up the contact surface topography measurement mechanism of whole closed-loop control jointly with other assemblies.This method is different from the metering system of traditional measurement mechanism rotating lever, computing machine removes to drive worktable to realize the servo motion of vertical displacement scanning according to the zero shift signal controlling piezoelectric ceramics and the motor of contact inductance displacement sensor, the zero shift signal that makes the contact inductance displacement sensor is zero, promptly measure lever always in the equilibrium position, avoid the problem of existing contact surface topography measurement mechanism, improved the precision of measuring.Adopt the displacement of the interference fringe surveying work platform that optical grating diffraction obtains simultaneously, obtain the measurement data of worktable vertical direction displacement, improved measuring accuracy greatly by the phase shift variations of measuring interference fringe.If the grating constant that the present invention selects is 1/1200mm, when its interference fringe changed one-period, the grating amount of movement was 1/4800mm, is 200nm, and through twice diffraction, and to signal 20 segmentations, final measurement data can reach the resolution of 5nm.Therefore the present invention has really realized the measurement of high precision, wide range, and has the advantages that speed is fast, cost performance is high.The present invention can to overall size, shape, waviness and the surfaceness of different materials member two, Three-dimension Contact formula composite measurement, comprise arbitrary surface topography measurement, sphere and aspherical profile measurement etc., also can carry out non-cpntact measurement the physical dimension of MEMS, shape, vibration etc.
Description of drawings
Accompanying drawing 1 is a structural representation of the present invention;
Accompanying drawing 2 is a measurement schematic flow sheet of the present invention;
Accompanying drawing 3 is the structural representation of diffraction grating displacement transducer.
Embodiment
Embodiments of the invention.As shown in Figure 1, measuring instrument of the present invention mainly comprises inductance displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo telecontrol equipment three parts, the contact inductance displacement sensor is used for surveying in measuring process by the caused inductance zero shift of workpiece surface appearance signal, be installed in the top of vertical displacement scanning worktable, the zero shift signal input digit servo motion device of inductance displacement sensor is placed the workpiece that needs measurement above the three-dimensional perpendicular displacement scanning workbench; The digital servo telecontrol equipment is used for record, handle each data, and according to the data output control signal that obtains to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, thereby driving the motion of three-dimensional perpendicular displacement scanning workbench makes the zero shift signal of inductance displacement sensor be approximately zero, the diffraction grating displacement transducer is installed on three-dimensional perpendicular displacement scanning workbench, the diffraction grating displacement transducer is used for the perpendicular displacement of worktable is scanned and gathers, and the computing machine in the sweep signal input digit servo motion device of diffraction grating displacement transducer is handled the back as measurement result.
The inductance displacement sensor of present embodiment is made up of magnetic core (1), telefault (2), fulcrum (3), lever (4) and contact pilotage (5), lever (4) two ends on the fulcrum (3) are separately installed with contact pilotage (5) and magnetic core (1), magnetic core (1) inserts in the telefault (2), the signal input digit servo motion device of telefault (2), by the effect of lever (4), the displacement signal of contact pilotage (5) is converted to the inductance signal of telefault (2).
Three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (11) and diffraction grating displacement transducer (8); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (11), and diffraction grating displacement transducer (8) is installed on the vertical displacement scanning worktable; Wherein, the vertical displacement scanning worktable is made up of oblique mechanism (10), piezoelectric ceramics (9) and worktable (7); It divides thick, smart two-stage drive, and thick the driving finished by oblique mechanism (10) and servomotor thereof, and the inclined-plane gradient of oblique mechanism (10) is 1: 10, screw mandrel pitch is 1mm, servomotor is exported 10000 pulse/commentaries on classics, and then per step perpendicular displacement amount is 10nm, and stroke is designed to 10mm.Oblique mechanism (10) is installed on the X-Y worktable (11), and smart the driving finished by piezoelectric ceramics (9), and its design runlength is 30 μ m; Oblique mechanism (10) top is piezoelectric ceramics (9), and piezoelectric ceramics (9) top is the worktable (7) of place work piece (6).
The digital servo telecontrol equipment is made up of computing machine (12), X-Y direction motor-drive circuit (13), oblique mechanism motor-drive circuit (14), inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16) and driver circuit for piezoelectric ceramics (17); The input end of computing machine (12) connects the output terminal of inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (12) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (14) and X-Y direction motor-drive circuit (13); Computing machine (12) is handled the signal from telefault (2) and diffraction grating displacement transducer (8), and the motor of control and drive pressure electroceramics (12), oblique mechanism (13) and X-Y worktable (11) is realized the digital servo motion.
Diffraction grating displacement transducer (11) is made up of reflection grating (18), right-angle prism (19), photelectric receiver (20) and He-Ne laser instrument (21), reflection grating (18) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (21) is installed in reflection grating (18) the place ahead, two right-angle prisms (19) are installed in 45 degree positions, reflection grating (18) both sides respectively, a photelectric receiver (19) has also been installed in reflection grating (18) the place ahead, the signal input diffraction grating displacement transducer signal treatment circuit (16) of photelectric receiver (19).
During work, workpiece (6) is placed on the worktable (7), move to motor-driven lower edge X-direction at X, obtain the X coordinate of a measurement point, the contact pilotage (5) of lever (4) one sides contacts the surface of measured workpiece (6) all the time, and move up and down because of the fluctuating of surface profile, driving lever (4) rotates around fulcrum (3), thereby cause the displacement of magnetic core (1) in telefault (2), its zero-bit of inductance signal bias, this signal is through amplifying, and the A/D conversion process is sent and computing machine (12), and Z drives oblique mechanism (10) vertical moving to (being vertical direction) drive motor by computing machine (12) control, and through piezoelectric ceramics (9) fine setting, drive workpiece (6) vertical moving thereupon, finally make lever (4) get back to the equilibrium position, whether whether lever (4) gets back to the equilibrium position is in zero-bit by the signal of telefault (2) and judges.At this moment the distance of workpiece (6) vertical moving is scanned and is collected by diffraction grating displacement transducer (8), this distance is the change of workpiece (6) surface profile on this measurement point vertical direction, this signal is through photoelectric signal processing circuit (preposition amplification, segmentation, sensing, counting) deliver to computing machine, be a Z who collects to coordinate, so repeat this process, can obtain a series of data, deliver to computing machine and can obtain measurement result through surface profile evaluation software processes.
Displacement for accurate measurement worktable (7), on three-dimensional perpendicular displacement scanning workbench, reflection grating is installed, laser incides reflection grating, behind diffraction of reflection grating, form+1 grade and-1 grade of two bundle diffraction light, will+1 grade and-1 order diffraction light reflected back grating and converge at another point on the grating by the right-angle prism that places both sides, behind the secondary diffraction, will on the photodetector of placing perpendicular to Y-axis, form interference fringe; When worktable (7) vertical movement, will cause the phase shift of interference fringe, can obtain the displacement data of workpiece (6) by the variation of surveying striped.Grating move d/4 apart from the time, the striped phase shift is 2 π, promptly changes one-period.The grating that native system adopts, its grating constant is 1/1200mm, so interference fringe is when changing one-period, the grating amount of movement is 1/4800mm, is 200nm, through twice diffraction, and to signal 20 segmentations, can reach the resolution of 5nm.
Claims (8)
1. contact surface topography measuring method based on vertical displacement scanning, it is characterized in that: workpiece is placed on movably on the three-dimensional perpendicular displacement scanning workbench, surface with contact inductance displacement sensor measuring workpieces, computing machine drives table veritcal movement according to the zero shift signal of sensor, make the zero shift signal of contact inductance displacement sensor be approximately zero, promptly measure lever always in the equilibrium position, the distance of scanning of diffraction grating displacement transducer and collecting work platform vertical moving is as measurement data, the Z coordinate that collects on this X-Y-Z coordinate as worktable in the input computing machine, pass through travelling table, the measurement data of a plurality of coordinates of repeated acquisition is through the workpiece surface appearance that can obtain measuring after the Computer Processing.
2. the contact surface topography measuring method based on vertical displacement scanning according to claim 1, it is characterized in that: fixation reflex grating on worktable, utilize laser to incide reflection grating, behind diffraction of reflection grating, form+1 grade and-1 grade of two bundle diffraction light, will+1 grade and-1 order diffraction light reflected back grating and converge at another point on the grating by the right-angle prism that places the reflection grating both sides, behind the secondary diffraction, will on the photodetector of placing perpendicular to Y-axis, form interference fringe; When table veritcal movement, will cause the phase shift of interference fringe, can obtain the displacement data of workpiece by the variation of surveying striped.
3. measuring instrument of realizing claim 1 or 2 described measuring methods, it comprises inductance displacement sensor, three-dimensional perpendicular displacement scanning workbench and digital servo telecontrol equipment, it is characterized in that: the contact inductance displacement sensor that is used to survey inductance zero shift signal is installed in the top of vertical displacement scanning worktable, the zero shift signal input digit servo motion device of inductance displacement sensor, the digital servo telecontrol equipment outputs control signals to the piezoelectric ceramics of three-dimensional perpendicular displacement scanning workbench and the drive motor of three directions, on three-dimensional perpendicular displacement scanning workbench, be provided with and be used for the diffraction grating displacement transducer that the perpendicular displacement to worktable scans and gathers, the computing machine in the signal input digit servo motion device of diffraction grating displacement transducer.
4. measuring instrument according to claim 3, it is characterized in that: inductance displacement sensor is made up of magnetic core (1), telefault (2), fulcrum (3), lever (4) and contact pilotage (5), lever (4) two ends on the fulcrum (3) are respectively equipped with contact pilotage (5) and magnetic core (1), magnetic core (1) inserts in the telefault (2), the signal input digit servo motion device of telefault (2).
5. measuring instrument according to claim 3 is characterized in that: three-dimensional perpendicular displacement scanning workbench is made up of vertical displacement scanning worktable, X-Y worktable (11) and diffraction grating displacement transducer (8); Vertically moving vertical displacement scanning worktable is installed on the X-Y worktable (11), and the vertical displacement scanning worktable is provided with diffraction grating displacement transducer (8).
6. measuring instrument according to claim 5 is characterized in that: the vertical displacement scanning worktable is made up of the worktable (7) of oblique mechanism (10), piezoelectric ceramics (9) and place work piece (6); The oblique mechanism of translator (10) is installed on the X-Y worktable (11), and oblique mechanism (10) top is provided with piezoelectric ceramics (9), and piezoelectric ceramics (9) top is the worktable (7) of place work piece (6).
7. measuring instrument according to claim 3 is characterized in that: the digital servo telecontrol equipment is made up of computing machine (12), X-Y direction motor-drive circuit (13), oblique mechanism motor-drive circuit (14), inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16) and driver circuit for piezoelectric ceramics (17); The input end of computing machine (12) connects the output terminal of inductance displacement sensor signal processing circuit (15), diffraction grating displacement transducer signal treatment circuit (16), and the output terminal of computing machine (12) connects driver circuit for piezoelectric ceramics (17), oblique mechanism motor-drive circuit (14) and X-Y direction motor-drive circuit (13).
8. measuring instrument according to claim 3, it is characterized in that: diffraction grating displacement transducer (11) is made up of reflection grating (18), right-angle prism (19), photelectric receiver (20) and He-Ne laser instrument (21), reflection grating (18) is installed on the vertical displacement scanning worktable, He-Ne laser instrument (21) is installed in reflection grating (18) the place ahead, two right-angle prisms (19) are located at 45 degree positions, reflection grating (18) both sides respectively, and reflection grating (18) the place ahead also is provided with photelectric receiver (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006102000694A CN100422688C (en) | 2006-04-27 | 2006-04-27 | Contact surface topography measuring method and instrument based on vertical displacement scanning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006102000694A CN100422688C (en) | 2006-04-27 | 2006-04-27 | Contact surface topography measuring method and instrument based on vertical displacement scanning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1831473A CN1831473A (en) | 2006-09-13 |
| CN100422688C true CN100422688C (en) | 2008-10-01 |
Family
ID=36993897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006102000694A Expired - Fee Related CN100422688C (en) | 2006-04-27 | 2006-04-27 | Contact surface topography measuring method and instrument based on vertical displacement scanning |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100422688C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4705142B2 (en) * | 2008-10-10 | 2011-06-22 | パナソニック株式会社 | 3D shape measurement method |
| CN103499309B (en) * | 2013-10-11 | 2016-04-27 | 中国科学院光电技术研究所 | A kind of automatic interference detection system with environmental feedback and method |
| JP6768442B2 (en) * | 2016-10-12 | 2020-10-14 | 株式会社キーエンス | Shape measuring device |
| CN109813226B (en) * | 2019-04-16 | 2019-07-16 | 山东中科普锐检测技术有限公司 | A kind of three-dimensional shape measuring apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2116190U (en) * | 1991-07-27 | 1992-09-16 | 哈尔滨工业大学 | Miniature three dimensions measuring stand |
| WO2003060425A1 (en) * | 2002-01-15 | 2003-07-24 | Intek Plus Co., Ltd. | Optical apparatus for measuring the two and three-dimensional shape of an object |
| CN1529123A (en) * | 2004-01-19 | 2004-09-15 | 哈尔滨工业大学 | Shaping ring light-beam differiential confocal sensor with high space resolution capability |
-
2006
- 2006-04-27 CN CNB2006102000694A patent/CN100422688C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2116190U (en) * | 1991-07-27 | 1992-09-16 | 哈尔滨工业大学 | Miniature three dimensions measuring stand |
| WO2003060425A1 (en) * | 2002-01-15 | 2003-07-24 | Intek Plus Co., Ltd. | Optical apparatus for measuring the two and three-dimensional shape of an object |
| CN1529123A (en) * | 2004-01-19 | 2004-09-15 | 哈尔滨工业大学 | Shaping ring light-beam differiential confocal sensor with high space resolution capability |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1831473A (en) | 2006-09-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105547344B (en) | A kind of test equipment calibrating installation and its calibration method | |
| CN201503259U (en) | Full-automatic multi-functional sensor geometrical measurement system | |
| CN101762253B (en) | System and method for multi-sensor-based on-line multi-dimension measurement of special-shaped shaft-type workpieces | |
| CN100387931C (en) | Wide range and high precision free curved surface measuring method | |
| CN109458958A (en) | A kind of scaling method of turntable center position in four axis vision measurement device | |
| CN204944429U (en) | A kind of full-automatic dimensional measurement system | |
| CN106352823B (en) | A kind of composite coordinate measuring system based on more sighting devices | |
| CN104730293B (en) | A kind of caliberating device of white light interference atomic force scan-probe and scaling method thereof | |
| CN102661723A (en) | Six-axial numerical-control three-dimensional quick laser measurer | |
| CN102937418A (en) | Scanning type object surface three-dimensional shape measurement method and device | |
| CN101419044B (en) | Micron-nano grade three-dimensional measurement '331' system and measurement method thereof | |
| CN1680073A (en) | Machining apparatus | |
| CN109520420A (en) | A kind of space coordinate at rotation of rotary table center determines method | |
| CN205192431U (en) | Case valve barrel parameter automatic checkout device | |
| CN109269422A (en) | A kind of experimental method and device of the check and correction of dot laser displacement sensor error | |
| CN100422688C (en) | Contact surface topography measuring method and instrument based on vertical displacement scanning | |
| CN102375343A (en) | Workbench position measuring system | |
| CN100483071C (en) | Contactless surface topography measuring method and instrument based on vertical displacement scanning | |
| CN2867287Y (en) | Non-contact type surface topographic measuring instrument based on vertical displacement scanning | |
| CN111060056B (en) | Reconstruction device and reconstruction method for accurately reconstructing parallel contour | |
| CN219319352U (en) | Calibrating device for large-size three-coordinate measuring machine | |
| CN2867288Y (en) | Non-contact type surface topographic measuring instrument based on vertical displacement scanning | |
| KR100292610B1 (en) | The noncontact measuring system of curved shell plates in ship building using camera and laser displacement sensor | |
| CN201016702Y (en) | Bidimensional displacement transducer and big-range surface morphology measuring apparatus employing the same | |
| CN110864624A (en) | One-machine dual-purpose measuring instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081001 Termination date: 20150427 |
|
| EXPY | Termination of patent right or utility model |