CN104913731A - Laser differential confocal microscope measurement and control system - Google Patents
Laser differential confocal microscope measurement and control system Download PDFInfo
- Publication number
- CN104913731A CN104913731A CN201410647640.1A CN201410647640A CN104913731A CN 104913731 A CN104913731 A CN 104913731A CN 201410647640 A CN201410647640 A CN 201410647640A CN 104913731 A CN104913731 A CN 104913731A
- Authority
- CN
- China
- Prior art keywords
- laser
- control
- main control
- scanning
- data acquisition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a laser differential confocal microscope measurement and control system. In the system, an object plane scanning mode is used and two dimensional scanning is realized through the control to an objective table; an objective lens driver driven by piezoelectric ceramics is used to carry out axial scanning. The two components have corresponding position sensors which output a voltage signal related to the position. The system collects and processes image information returned by the measurement and control system and realizes high-precision scanning three-dimensional imaging of a sample. The system has the advantages of high resolution, high precision, absolute position aiming, a bipolar tracking ability, a large measurement scope and the like. And the system can be widely applied to fields of biomedical engineering, material engineering, microelectronic manufacturing, gene engineering, precision measurement and the like.
Description
Technical field
The invention belongs to confocal microscopy field, particularly relate to the micro-TT&C system of a kind of laser differential confocal, this systemic-function is good, stable performance, there is the advantages such as high resolving power, high precision, absolute position aiming, bipolarity tracking power and measurement range are large, the fields such as biomedical engineering, material engineering, micro-electronic manufacturing, genetic engineering and precision measurement can be widely used in.
Background technology
Along with the develop rapidly of Aero-Space, auto industry and advanced manufacturing industry, more and more urgent to the requirement of measuring three-dimensional morphology during large scale freedom curved surface high-precision real.Traditional contact topography measurement method measurement range is limited, and easily cause damage to testee surface, and measuring speed is slow, efficiency is low, measuring process is difficult to realize robotization.Optical touchless measuring three-dimensional morphology, owing to having the advantages such as noncontact, robotization, high precision, high-level efficiency, is widely used in the fields such as the processing and manufacturing of workpiece, defects detection and historical relic's protection.Along with the development of laser technology, computer technology, the First commercialization eighties in 20th century confocal microscope comes out, and really achieves three-dimensional imaging.Confocal microscope has extremely significantly advantage: confocal microscope successively can scan the different aspects of object, thus obtains a large amount of object faultage images; The data obtained can utilize computing machine to carry out image procossing; Meanwhile, confocal microscope has higher lateral resolution and longitudinal frame; For transparent and translucent object, the structural images of its inside can be obtained; Can also observe active somatic cell, obtain the information in living cells, and quantitative test is carried out to the information obtained.
To compare traditional optical microscopy, confocal optical path can carry out three-dimensional imaging, its axial location is measured and is axially focused curve realization mainly through its " bell ", but when existing confocal optical path utilizes light intensity response directly to measure, exist many-sided not enough, as signal to noise ratio (S/N ratio) is low, be subject to the interference of environmental background light; Poor linearity, is subject to the non-linear effects of intensity response curve ab section, reduces chromatography precision; Measure without actual zero point, be not easy to carry out absolute tracking measurement; Be subject to sample inclination and surface roughness properties impact, be unfavorable for the high-acruracy survey of micro/nano-scale; Horizontal resolution characteristic is not mated with azimuthal resolution, and axial resolution reaches nanometer scale, and transverse resolution only reaches about 0.4 μm (for visible ray), and its result seriously limits raising of confocal microscope system spatial resolving power etc.
Owing to there is above-mentioned principle defect, existing confocal microscope can not meet the measurement demand of modern scientific research to optical high resolution and High tomographic ability, test at day by day meticulous micro photo-electro-mechanical micro-nano device, the physical dimension of IC wafers and mask plate and defects detection, the hollow transparent target ball inside and outside contour of laser fusion and wall thickness high resolution detection, numerous field tests such as material subsurface defect detection, not only require that confocal microscope system has high axial resolution, but also require that there is high horizontal resolution characteristic, and also require to carry out tomography in some occasion, namely high-resolution imaging is carried out to physical dimension meticulous inside and outside transparent sample.Thus, improve confocal microscope system resolution characteristic and tomography ability, become the theory and technology problem that micro-imaging technique field is urgently to be resolved hurrily, to High Frontier Studies such as promotion micro photo-electro-mechanical technology, biochemical technology, biomedicine, microelectronics and materialogies, there is important impetus.
Summary of the invention
The defect existed for above-mentioned prior art and deficiency, the object of the invention is to, there is provided a kind of laser differential confocal micro-TT&C system, this systemic-function is good, stable performance, there is the advantages such as high resolving power, high precision, absolute position aiming, bipolarity tracking power and measurement range are large, the fields such as biomedical engineering, material engineering, micro-electronic manufacturing, genetic engineering and precision measurement can be widely used in.
In order to realize above-mentioned task, the present invention adopts following technical solution:
The micro-TT&C system of a kind of laser differential confocal, it is characterized in that, comprise light intensity sensor-based system, data acquisition system (DAS), scanning system, control system, main control computer and display system, light intensity is converted into easy to handle voltage signal by described light intensity sensor-based system, obtained by described data acquisition system (DAS), give described main control computer simultaneously and carry out data processing; This main control computer is controlled described scanning system by control system, realize the scanning to sample, meanwhile, the position signalling that described acquisition system obtains now gives main control computer, carries out display translation after main control computer process completes by described display system.
In the micro-TT&C system of this laser differential confocal, described control system comprises two-dimension translational platform control module, object lens driving control unit, Laser control unit, white light control module and power supply unit, this two-dimension translational platform control module selects P-563.3CD type nanometer translation stage, this object lens driving control unit selects P-725.4CD type objective driver, and described object lens driving control unit is connected with main control computer by USB serial ports with two-dimension translational platform control module; Described Laser control unit selects Changchun NPD projects laser company limited 405nm to be with fiber coupled laser, and this Laser control unit is connected with main control computer by RS232 serial ports; Described white light control module selects direct current voltage reulation optical fiber source GCI-0601 to complete light-source brightness from 0% to 100% continuously adjustabe, and the white light CCD in this white light control module is connected with main control computer by USB serial ports.
In the micro-TT&C system of this laser differential confocal, the data collecting card of described data acquisition system (DAS) selects X Series PC I-e bus-type NI-6353, this data acquisition system (DAS) has data acquisition, modulating output and digital output function, obtain intensity signal and positional information by data acquisition function, use modulating output function and digital output function to realize scan control; This TT&C system uses object plane scan mode, is placed in by sample on objective table, by the control realization two-dimensional scan to objective table; This TT&C system uses the objective driver of Piezoelectric Ceramic to carry out axial scan, and two-dimensional scan and the parts of axial surface sweeping have corresponding position transducer to export the voltage signal relevant with position.
The invention has the beneficial effects as follows:
This TT&C system comprises two kinds of signals: control signal and data-signal.Control signal comprises: Sample Scan motion control signal (flat scanning and axial scan), pattern switch-over control signal and laser control signal.Data-signal comprises: light intensity signal and sample position signal.Motion control signal is controlled the motion of two-dimension translational platform and objective driver by USB port controlled motion controller by industrial computer, in addition, analog control signal is sent by multifunctional data acquiring, is connected to motion controller by bnc interface, controlled motion.Pattern switch-over control signal is sent by the digital output end of multifunctional data acquisition card, pilot relay, then controls conducting and the closedown of white light, to coordinate the conversion of white light patterns and zlasing mode.Industrial computer controls the switch of laser instrument by RS232 communication port and power controls.Light intensity signal comprises front burnt light intensity signal and rear burnt light intensity signal, and position signalling comprises translation stage position signalling (X, Y position) and axial location signal (Z position), and this write signal is all undertaken gathering by data collecting card sending host computer to by PCI-e bus.
During measurement, first carry out coarse adjustment by Microscope base lifting table adjustment sample position, then use objective driver to finely tune.After setting scanning position, carry out the setting of scan pattern and sweep parameter, click and start scanning, system starts scanning, in scanning process, is shown in real time, until scan task terminates by the signal got through bitmap display.After the end of scan, enter data processing module and complete three-dimensional reconstruction.Testing result shows, this system run all right, can obtain Sample Scan image clearly, and can carry out three-dimensional reconstruction according to the data message obtained.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is further explained.
Fig. 1 is TT&C system the general frame;
Fig. 2 is microscope observing and controlling structural drawing;
Fig. 3 is differential confocal microscope control box structure;
Fig. 4 is controller internal register structure;
Fig. 5 is control mode Change-over knot composition;
Fig. 6 is software system function module sketch;
Fig. 7 is white-light visualization observing and controlling flow process.
Embodiment
TT&C system of the present invention comprises six systems: light intensity sensor-based system, data acquisition system (DAS), scanning system, control system, main control computer and display system.Light intensity is converted into easy to handle voltage signal by light intensity sensor-based system, is obtained by data acquisition system (DAS), gives main control computer simultaneously and carries out data processing.On the other hand, main control computer is controlled scanning system by control system, realizes the scanning to sample, and meanwhile, the position signalling that acquisition system obtains now gives main control computer.Carry out display translation by display system after main control computer process completes, the overall frame of TT&C system as shown in Figure 1.
By analyzing, this TT&C system uses object plane scan mode, sample is placed on objective table, by the control realization two-dimensional scan to objective table, the objective driver of Piezoelectric Ceramic is used to carry out axial scan, meanwhile, these two parts have corresponding position transducer to export the voltage signal relevant to position.The core component of data acquisition system (DAS) is multifunctional data acquisition card, and multifunction card has three functions: data acquisition, modulating output and numeral export.Obtain intensity signal and positional information by data acquisition function, use modulating output function and digital output function to realize scan control, as shown in Figure 2, in figure, dotted line is control signal to system microscope observing and controlling structure, and solid line is measuring-signal.
Objective driver drives the motion of object lens Z-direction, for realizing Z-direction scanning.Driver controller is connected with industrial computer by USB serial ports, object lens Z-direction can be driven to move by software command, read current location, also data collecting card modulating output function can be passed through, drive object lens by certain undulation, gathered the position sensor signal of current drive by analog input function.Two-dimension translational platform drives sample to move upward in X/Y side, realizes flat scanning.Connecting drives identical with investigating method and object lens.
Data acquisition snaps fits into industrial computer inside, by bussing technique, the data of adopting is sent to industrial computer internal memory.Simultaneously, use bussing technique, the serial data tablet in industrial computer internal memory is carried in buffer memory, and then send corresponding waveform signal, data acquisition and modulating output process using the rising edge of outside trigger pulse or negative edge as opening flag, in this, as the synchronizing signal of two tasks.Meanwhile, the break-make of the digital output function generation Transistor-Transistor Logic level pilot relay of Usage data collection card realizes the top level control of white light with this.Laser controller is connected with industrial computer by RS232 serial ports, can change laser power by software command, reads current power.
Utilize the zero crossing of differential confocal curve can realize the Real-time Collection of system.In order to the Real-time Collection of the zero crossing of coupled system, devise zero cross fired module, this system adopts hardware zero cross fired to aim at the method measured, hardware zero cross fired aims at the method measured, its principle is by carrying out Zero-cross comparator to differential confocal axial response curve, produce trigger pulse, utilize trigger pulse as control signal, in conjunction with Micro-displacement Driving technology, the hi-Fix of accurate acquisition differential confocal micrometering system object lens, simultaneously in order to improve antijamming capability, have studied and use Intensity threshold to control the enable method of comparer to judge that whether sensor light intensity signal is credible.Because confocal response exists side-lobe signal and sample away from the detector signal close to zero during objective focus positions, false zero cross fired signal will be caused.In order to avoid the interference of these signals, by the threshold value of electric resistance partial pressure setting light intensity signal voltage.In order to reduce the time of Signal transmissions, adopt the method that two-way light intensity directly compares.According to the principle of comparer, the result obtained, with then carry out Zero-cross comparator with above-mentioned two signal subtractions consistent, eliminates the link that signal transmits in subtraction circuit.
TT&C system comprises two-dimension translational platform control module, object lens driving control unit, Laser control unit, white light control module and power supply unit.Meanwhile, the terminals of data collecting card use the connection terminal of NI company.In order to the integrity design of coupled system, native system further comprises the micro-TT&C system control box of differential confocal.The white light source being used as illumination adopts the direct current voltage reulation optical fiber source GCI-0601 of Daheng Xinshijiyuan Science & Technology Co., Ltd.'s (Daheng's photoelectricity), this light source adopts 150W EKE quartz halogen lamp, when colour temperature is 3200K(largest light intensity), light-source brightness is from 0% to 100% continuously adjustabe (knob), adopt optical fiber beam, make the homogeneity of emergent light spot better, meet the demand of this project.
For the degree of modularity that elevator system designs, the mode that laser adopts optical fiber to import, short wavelength light source is employed in order to improve the resolution of confocal microscope in detection light path, differential confocal scanning imagery part adopts the light source of laser instrument as differential confocal microscope of 405nm wavelength, native system have employed Changchun NPD projects laser company limited 405nm and is with fiber coupled laser, this laser light beam power stability <3%, temperature drift <50urad/ ° of C, polarization 100:1, light drift < 0.5mrad, peak power 30mW, power is continuous variable in 0% ~ 100% scope, and the output power of software to laser instrument can be adopted to automatically adjust, facilitate the Automated condtrol of system, meet needs of the present invention.
In microscopic system, the device of 220V Alternating Current Power Supply is needed to comprise white light controller, laser controller; What need low-voltage DC supply comprises photomultiplier, zero-cross triggering circuit and system indicator.Low-voltage DC supply uses 220V Alternating Current Power Supply, the integrated linear space flight Chaoyang power supply that ± 15V/2A, ﹢ 12V/2A and ﹢ 5V/2A direct current exports.This power supply has good interference free performance, and the feature of low ripple, and Fig. 3 is differential confocal microscope control box structure.White light controller in control box is connected in TT&C system through relay system, is realized the software exchange of white light/laser by the digital output function of data collecting card.Meanwhile, Chaoyang power supply is photomultiplier, and trigger circuit and system indicator provide direct supply.External signal is by shielding coaxial cable Access Control case and being connected with terminal box, and modulating output port outputs to external interface by coaxial cable, for outside simultaneously.
The control mode of objective driver has two kinds equally: digital control approach and analog control mode.Digital control approach uses USB port communication, and digital control approach uses host computer instruction to control the movement of objective driver, and the advantage of which is that control accuracy is high, but the communication speed of the communication mode of USB is slower.Analog input control mode is the movement using external analog signal to control objective driver, and the advantage of analog control mode is control rate block.Meanwhile, external analog signal uses the modulating output function of multifunctional data acquisition card to produce, as long as the sampling precision of data collecting card is enough high, the mobile accuracy of translation stage just can be guaranteed.
The control mode of step motion mode uses digital control approach, digital control approach can realize the hi-Fix of object lens, simultaneously, digital control approach is simple to operate, instruction cycle and sweep time match, and therefore, focus at sample, under computed tomography scanning and sensing scanning pattern, the step motion control of object lens uses digital control approach just to become optimal selection.The control mode of vibratory movement mode can be realized by digital control and analogue enlargement two kinds of modes.The digital control approach of concussion motion is completed by controller internal register, and Fig. 4 is controller internal register structure.The inside of objective driver is made up of five parts: wave table, mode selector, waveform generator, biased and Waveform switch.Waveform setting up procedure is also correlated with this five moieties into close.The first step, uses Wave data in waveform instruction definition register, and waveform is by the nonvolatile memory that is written into corresponding to selected wave table; Second step, is connected the wave table selected with waveform generator; 3rd, can be adjusted the multiplicity of waveform and generation rate by waveform generator, start waveform generator, waveform generator starts to export, after waveform generator is started working, datalogger is also started working automatically, the duty of wave recording generator.In addition, bias operation can be carried out by instruction to waveform generator.
Analog control mode is different from digital control approach, it uses external analog signal to carry out motion control to objective driver, this needs to arrange the register parameters of controller inside, controller is made to enter analog control scheme, the structure that controller Mathematical model control mode is changed as shown in Figure 5, has analog-and digital-two kinds of control modes in figure middle controller.Realize the conversion to control mode by instruction, control source is then the signal of analog input port.
Microscope software systems are for realizing the control to microscope hardware system, and the light source switching of the stepper drive of the driving of galvanometer during stepper drive, beam flying as two-dimensional scan translation stage during Sample Scan, objective driver, laser and white light, laser power control, ccd image acquisition parameter control; For realizing the collection to light intensity, scanning position transducing signal; For realizing the above-mentioned synchronous coordination with energy; For realizing data processing, preservation, display.For realizing above-mentioned functions, devise software system function module as shown in Figure 6.Microscope generic module is made up of each hardware classes module, data processing module and Coordination module, major function be by above-mentioned hardware module as a whole cooperation control realize microscopical observation measurement function, image data is processed, shows for subsequent analysis.
Measure display module and mainly comprise microscope work control module and realtime curve module, operator and microscopical interactive module, major function is the functional parameter being controlled each hardware of microscope by Windows control, setting microscopic examination measurement pattern and parameter, in real time display microscope white light ccd image or laser scanning image.
Data analysis display module mainly comprises data file generic module, 3-D display generic module, data analysis module and Image Super-resolution restoration module, and Coordination module, major function reads and writes microscopical measurement data by data file class, at Windows view with X-Y scheme form display data, in three dimensions measurement data is shown by 3-D display generic module, by image restoration resume module view data, obtain super resolution image, realize fundamental measurement function by data analysis module.Math block is the set of various mathematical algorithm, comprise Gaussian filter algorithm, fitting of a polynomial algorithm, sort algorithm, least-squares algorithm, and one-dimensional Fourier transform and Transform algorithm thereof, two-dimensional Fourier transform and Transform algorithm thereof, digital convolution algorithm, digital correlation algorithm, provide underlying algorithm support to data processing, data analysis, image restoration.
White-light visualization function observing and controlling flow process is relatively simple, and as shown in Figure 7: hardware initialization part comprises CCD initialization, objective driver initialization also runs to driver half trip, and the initialization of two-dimension translational platform also runs to half trip.Start white-light visualization and open white light realization by the digital output function closedown laser of software transfer data collecting card.Focus and be aligned by and manually reconcile microscope stage realization, without software, Fig. 7 is white-light visualization observing and controlling flow process.Differential confocal microscopy is because the employing of its image space is relative to two detectors of out of focus distribution symmetrical before and after confocal position, there is the axial response district of corresponding confocal zero crossing and approximately linear, therefore chromatography matching, zero cross fired and sensing measurement three kinds of measurement patterns can be realized.The scanning of axis (Z-direction) and horizontal (X-direction, Y-direction) can be realized in addition.
General technical staff of the technical field of the invention also can understand in addition to the foregoing, can change combination further in this explanation and illustrated specific embodiment.Illustrate although the present invention gives diagram with regard to its preferred embodiment, person skilled in the art is understood that, in the spirit and scope of the present invention limited in the attached claims, also can make all changes and variation to the present invention.
Claims (4)
1. the micro-TT&C system of laser differential confocal, it is characterized in that, comprise light intensity sensor-based system, data acquisition system (DAS), scanning system, control system, main control computer and display system, light intensity is converted into easy to handle voltage signal by described light intensity sensor-based system, obtained by described data acquisition system (DAS), give described main control computer simultaneously and carry out data processing; This main control computer is controlled described scanning system by control system, realize the scanning to sample, meanwhile, the position signalling that described acquisition system obtains now gives main control computer, carries out display translation after main control computer process completes by described display system.
2. the micro-TT&C system of a kind of laser differential confocal as claimed in claim 1, it is characterized in that, described control system comprises two-dimension translational platform control module, object lens driving control unit, Laser control unit, white light control module and power supply unit, this two-dimension translational platform control module selects P-563.3CD type nanometer translation stage, this object lens driving control unit selects P-725.4CD type objective driver, and described object lens driving control unit is connected with main control computer by USB serial ports with two-dimension translational platform control module; Described Laser control unit selects Changchun NPD projects laser company limited 405nm to be with fiber coupled laser, and this Laser control unit is connected with main control computer by RS232 serial ports; Described white light control module selects direct current voltage reulation optical fiber source GCI-0601 to complete light-source brightness from 0% to 100% continuously adjustabe, and the white light CCD in this white light control module is connected with main control computer by USB serial ports.
3. the micro-TT&C system of a kind of laser differential confocal as claimed in claim 1, it is characterized in that, the data collecting card of described data acquisition system (DAS) selects X Series PC I-e bus-type NI-6353, this data acquisition system (DAS) has data acquisition, modulating output and digital output function, obtain intensity signal and positional information by data acquisition function, use modulating output function and digital output function to realize scan control.
4. the micro-TT&C system of a kind of laser differential confocal as claimed in claim 1, is characterized in that, this TT&C system uses object plane scan mode, is placed in by sample on objective table, by the control realization two-dimensional scan to objective table; This TT&C system uses the objective driver of Piezoelectric Ceramic to carry out axial scan, and two-dimensional scan and the parts of axial surface sweeping have corresponding position transducer to export the voltage signal relevant with position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410647640.1A CN104913731A (en) | 2014-11-16 | 2014-11-16 | Laser differential confocal microscope measurement and control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410647640.1A CN104913731A (en) | 2014-11-16 | 2014-11-16 | Laser differential confocal microscope measurement and control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104913731A true CN104913731A (en) | 2015-09-16 |
Family
ID=54083001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410647640.1A Pending CN104913731A (en) | 2014-11-16 | 2014-11-16 | Laser differential confocal microscope measurement and control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104913731A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105674914A (en) * | 2016-03-03 | 2016-06-15 | 浙江大学 | Automatic-tracking-based profile measurement system and method for free-form-surface optical element |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN106769966A (en) * | 2016-12-14 | 2017-05-31 | 中国科学院国家空间科学中心 | A kind of control system and control method of ground ultraviolet absorbability aerosol monitoring instrument |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101498833A (en) * | 2009-03-06 | 2009-08-05 | 北京理工大学 | Ultra-discrimination differential confocal microscope with macro-micro view field observation |
-
2014
- 2014-11-16 CN CN201410647640.1A patent/CN104913731A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101498833A (en) * | 2009-03-06 | 2009-08-05 | 北京理工大学 | Ultra-discrimination differential confocal microscope with macro-micro view field observation |
Non-Patent Citations (4)
| Title |
|---|
| （澳）M.顾: "《共焦显微术的三维成像原理》", 31 January 2000 * |
| 沈金华: "激光共聚焦信号处理及控制技术的研究", 《中国优秀硕士学位论文全文数据库工程科技Ⅱ辑》 * |
| 董申 等: "《基于原子力显微镜的纳米机械加工与检测技术》", 31 December 2012 * |
| 郭俊杰等: "用于惯性约束聚变靶丸测量的激光差动共焦传感器", 《光学精密工程》 * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105674914A (en) * | 2016-03-03 | 2016-06-15 | 浙江大学 | Automatic-tracking-based profile measurement system and method for free-form-surface optical element |
| CN106769966A (en) * | 2016-12-14 | 2017-05-31 | 中国科学院国家空间科学中心 | A kind of control system and control method of ground ultraviolet absorbability aerosol monitoring instrument |
| CN106769966B (en) * | 2016-12-14 | 2019-05-17 | 中国科学院国家空间科学中心 | A kind of control system and control method of ground ultraviolet absorbability aerosol monitoring instrument |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN106767406B (en) * | 2016-12-20 | 2022-08-16 | 华南理工大学 | Micro-nano positioning system and full closed-loop online control method for compliant mechanism platform by micro-nano positioning system |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN108267095B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Bilateral dislocation differential confocal detection method and device for free-form surface morphology |
| CN108362221B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for detecting nanometer precision of free-form surface morphology |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104913731A (en) | Laser differential confocal microscope measurement and control system | |
| CN104568873B (en) | A kind of laser scanning co-focusing microscope being imaged to fluorescent material | |
| CN103376068B (en) | The acquisition methods of laser three-D pattern proving installation and object plane three-dimensional information thereof | |
| CN103674977B (en) | Optical elements of large caliber element surface damage detection device and corresponding detection method | |
| CN102538672B (en) | CMOS (complementary metal-oxide-semiconductor)-machine-vision-based component size measuring system and measurement test method | |
| CN109765242A (en) | A kind of high-resolution smooth surface quality measuring device of high detection efficiency and method | |
| CN103852878A (en) | Microscopic section rapid digital scanning device and method with real-time focusing function | |
| CN101126834B (en) | In plane scanning method and system for point scanning laser confocal microscope | |
| CN103728315B (en) | Heavy-calibre element surface detection apparatus and damage accordingly method for rapidly positioning | |
| CN103115580B (en) | Based on three-dimensional hole shape detection method and the system of optical coherence tomography scanning | |
| CN104568390A (en) | Bilateral dislocation differential confocal measuring method | |
| CN109974583B (en) | Non-contact optical element surface shape measuring device and method | |
| CN106338524A (en) | Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof | |
| CN2916659Y (en) | Modular scanning probe microscope | |
| CN101231158A (en) | Device for fast detecting exiguity object three-dimensional contour dimension based on liquid zoom lens | |
| CN104567674A (en) | Bilateral fitting confocal measuring method | |
| CN107121065A (en) | A kind of portable phase quantitative testing device | |
| CN209623618U (en) | A kind of non-contact optical element surface surface shape measurement device | |
| CN110057313A (en) | A kind of automatic laser focusing shape measurement system | |
| CN106338498A (en) | Water content distribution detection device and application thereof | |
| CN204116229U (en) | A kind of fluorescent microscopic imaging device with axial positioning function | |
| CN103292739A (en) | Actuator-free surface shape accurate measurement device and method | |
| CN112213331A (en) | Surface wave long-level point defect characterization device and method based on machine vision | |
| CN103955050A (en) | Multi-light-path microscope system | |
| CN100507459C (en) | Instrument for testing response characteristic of detector surface, and testing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150916 |