CN106338524A - Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof - Google Patents
Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof Download PDFInfo
- Publication number
- CN106338524A CN106338524A CN201610709591.9A CN201610709591A CN106338524A CN 106338524 A CN106338524 A CN 106338524A CN 201610709591 A CN201610709591 A CN 201610709591A CN 106338524 A CN106338524 A CN 106338524A
- Authority
- CN
- China
- Prior art keywords
- optical element
- image
- light source
- element surface
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 63
- 230000006378 damage Effects 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000003384 imaging method Methods 0.000 title claims abstract description 9
- 230000033001 locomotion Effects 0.000 claims abstract description 37
- 238000006073 displacement reaction Methods 0.000 claims abstract description 20
- 239000006185 dispersion Substances 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims description 7
- 238000012634 optical imaging Methods 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims description 6
- 230000035939 shock Effects 0.000 claims description 6
- 230000001771 impaired effect Effects 0.000 claims description 5
- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 12
- 238000010191 image analysis Methods 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/103—Scanning by mechanical motion of stage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/108—Miscellaneous
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a microscopic scanning imaging acquisition device for vertical optical element surface damage and a method thereof. The device comprises a two-dimensional scanning motion platform, a one-dimensional focusing shaft, a automatic zoom microscope, a area array color CCD, a coaxial light source, a ring light source, a dispersion confocal displacement sensor, a system controller, an industrial control computer, a seismic isolation platform and a display. The device of the invention can automatically acquire and store images, can automatically complete image splicing, has image analysis capability, and can count quantity and dimension of damage spots in an image. According to the invention, online rapid high-precision microscopic scanning imaging acquisition and damage detection of vertical optical element surface in an optical path can be realized. The device of the invention has a wide application prospect and considerable social and economic benefits.
Description
Technical field
The present invention relates to optical element surface damage check field, especially vertically optical element surface damages micro- scanning
Imaging capture device and method.
Background technology
There is a kind of damage measure experiment in Experiments of Optics, need the degree of injury to optical element for the testing laser intensity,
Because stricter to the size detection required precision damaging, must be amplified being imaged by high magnification numbe microscope and spell
Connect and can realize.The shortcoming of existing commercial microscopes is, is only used for offline inspection, detection efficiency is too low, element is placed
Gesture is high, splice low precision and expensive.In addition, frequent installation makes optical element position in the optical path and appearance
State repeatability is difficult to ensure, have impact on the reliability of experimental data to a certain extent.Therefore need a kind of new detection means badly
The online high precision test realizing optical element surface degree of impairment that can be simple and quick with method.
Content of the invention
In order to solve the problems, such as above-mentioned prior art, the present invention is intended to provide a kind of vertical optical element surface damages
Micro- scanning imagery harvester and method.The method that the present invention utilizes moving sweep and image mosaic, overcomes commercial microscopes
Deficiency, can achieve quick high accuracy scanning that vertical optical element surface damages and detect.
For achieving the above object, according to an aspect of the present invention, there is provided it is micro- that a kind of vertical optical element surface damages
Scanning imagery harvester is it is characterised in that this device includes: two-dimensional scan motion platform (2), one-dimensional focusing axle (1), optics
Imaging system, the confocal displacement transducer of dispersion (3), system controller (8), industrial computer (9), shock insulation platform (11)；
Wherein, described one-dimensional focusing axle (1) is arranged on shock insulation platform (11), can be perpendicular to vertical optical element
Move on direction；
Described two-dimensional scan motion platform (2) is arranged on one-dimensional focusing axle (1), can be parallel to vertical optical element table
Two dimensional motion is carried out on the plane of movement in face；
Described optical imaging system is arranged on described two-dimensional scan motion platform (2), and described optical system is used for scanning
Gather the image of described vertical optical element surface；
The confocal displacement transducer (3) of described dispersion is arranged on described two-dimensional scan motion platform (2), for measure with perpendicular
The distance of straight optical element surface；
Described system controller (8) is integrated with light source control, camera lens zoom motor control, the control of lens focusing axle and scans
The function that motion platform controls；
After described industrial computer (9) is connected with system controller (8), for the intensity of light source, camera lens amplification, camera lens position
Put and be automatically adjusted with imaging definition.
According to a further aspect of the invention, there is provided a kind of carry out vertical optical element using the device described in claim 2
Surface damage micro- scanning imagery acquisition method is it is characterised in that the method comprises the following steps:
Step 1, the confocal displacement transducer of dispersion (3) measures the surface of vertical optical element initial sweep point and automatic zoom
Angle between the distance of microlens (6) and vertical optical element surface and two-dimensional scan motion platform kinetic coordinate system is by mistake
Difference；
Step 2, one-dimensional focusing axle (1) drives automatic zoom microlens (6) to move forward and backward, in conjunction with laser displacement sensor
(3) return value, and image definition decision criteria, determine image space it is ensured that detected optical element surface is located at mirror
In the depth of field of head；
Step 3, two-dimensional scan motion platform (2) controls automatic zoom microlens (6) according to the path planned to light
Element surface (12) carries out image scanning and gathers and transfer data to industrial computer (9)；One-dimensional focusing axle 1 is according to planning simultaneously
Good compensation way carries out real-Time Compensation to the distance of automatic zoom microlens (6)；
Step 4, industrial computer (9) by the image mosaic collecting be big visual field image it is ensured that spliced image is basic
Do not see seam, and complete the identification of impaired loci and statistics in image；
Step 5, the identification of impaired loci in image and statistical result is preserved and is exported.
The present invention adopts confocal displacement transducer to detect initial sweep distance and optical element and the scanning fortune of optical element
Relative attitude angle between moving axis.Ensure that object distance is constant using the front and back position of focusing axle real-time regulation camera lens.Using bidimensional electricity
Moving platform realizes the surface damage scanning of optical element.High-precision image mosaic is finally achieved using independently developed software
And damage check, it is achieved thereby that the quick online damage check of optical element.
The innovative point of the present invention is to design a set of micro- scanning imagery harvester, to the vertical optical element table placed
After face carries out image scanning and image mosaic, the high-resolution having obtained optical element surface damages image, to spliced figure
The overall information damaging as carrying out Treatment Analysis to obtain.Achieve image resolution ratio when detection range is more than 50 millimeters micro- better than 1
The detection of rice requires.
Brief description
Fig. 1 is that in the embodiment of the present invention, vertically optical element surface damages the graphics of micro- scanning imagery harvester.
Fig. 2 is the flow chart that in the present invention, vertically optical element surface damages micro- scanning imagery acquisition method.
Specific embodiment
For making the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
Fig. 1 is the graphics of the vertical optical element micro- scanning imagery harvester disclosed in one embodiment of the invention,
Fig. 2 is the flow chart of vertically optical element micro- scanning imagery harvester work in one embodiment of the invention, as shown in figure 1,
The inventive system comprises: two-dimensional scan motion platform 2, one-dimensional focusing axle 1, automatic zoom microlens 6, face battle array are colored
Ccd7, coaxial light source 5, annular light source 4, the confocal displacement transducer of dispersion 3, system controller 8, industrial computer 9, shock insulation platform 11 and
Display 10.Wherein:
The mode that battle array colour ccd 7 in described face is threaded connection is connected with the end of automatic zoom microlens 6, coaxial
The mode that light source 5 is threaded connection is connected with the coaxial light source interface of automatic zoom microlens 6, annular light source 4 is enclosed within certainly
The front position of dynamic zoom microlens 6, automatic zoom microlens 6 and the confocal displacement transducer of dispersion 3 pass through adaptor
Mode is arranged on two-dimensional scan motion platform 2, and two-dimensional scan motion platform 2 is arranged on one-dimensional focusing axle 1, one-dimensional focusing axle
1 is arranged on shock insulation platform 11.
The moving surface of described two-dimensional scan motion platform 2 is basically parallel to vertical optical element surface 12.
The direction of motion of described one-dimensional focusing axle 1 is basically perpendicular to optical element surface 12.
The resolution of the optical imaging system of described automatic zoom microlens 6 dough-making powder battle array colour ccd7 composition is from 0.3 μm
Adjustable to 3.45 μm.
Described automatic zoom microlens 6 can zoom and operating distance does not change automatically.
When described coaxial light source 5 is opened, ccd7 collects bright field image, and when described annular light source 4 is opened, ccd7 gathers
Obtain darkfield image.
The certainty of measurement of described confocal displacement transducer 3 is 0.9 μm, and maximum allowable optical element inclination angle is ± 10 °, returns
Absolute distance between optical element surface 12 and sensor.Scanning motion platform drives confocal displacement transducer along optical element
Horizontal motion l, sensor measurement distance difference x, this distance difference x and quantity of motion l can be used for being calculated optical element
Horizontal direction angle, thus calculating defocusing amount during microlens scanning, during scanning, pass through the side that moves forward and backward of focusing axle
Formula compensates to defocusing amount.
Described system controller 8 is integrated with light source control, camera lens zoom motor control, lens focusing axle controls and scanning is transported
The function that moving platform controls.
After described industrial computer 9 is connected with system controller 8, can to the intensity of light source, camera lens amplification, lens location and
Imaging definition is automatically adjusted.
In one embodiment, from three-dimensional high-precision motion platform as one-dimensional focusing axle and two-dimensional scan motion platform,
The stroke of three-dimensional platform is all 50mm, and absolute fix precision is 5 μm.The automatic zoom microlens being 12 times from zoom ratio, join
Close 2/3 cun of colour plane battle array ccd, white axis light and ring light to be imaged.Selection work is apart from the confocal displacement of dispersion of 60mm
Sensor, the surface distance of detection optical element.
The invention also proposes a kind of vertical optical element surface damages micro- scanning imagery acquisition method, the method bag
Include following steps:
Step 1, distance and attitude measurement.The confocal displacement transducer of dispersion 3 measures the surface of optical element initial sweep point
With respect to the angle between automatic zoom microlens distance and optical element surface and two-dimensional scan motion platform kinetic coordinate system
Degree error.Concrete measuring method is that scanning motion platform drives confocal displacement transducer along optical element horizontal motion l,
Sensor measurement distance value of delta x, this distance difference δ x and quantity of motion l can be used for being calculated the horizontal direction of optical element
Angle [alpha]；In the same manner, scanning motion platform drives confocal displacement transducer to move h along optical element vertical direction, sensor measurement away from
From value of delta y, this distance difference δ y and quantity of motion h can be used for being calculated the vertical direction angle beta of optical element.
Step 2, accurate focusing.One-dimensional focusing axle 1 drives automatic zoom microlens 6 vertical with respect to optical element 12
Plane moves forward and backward, in conjunction with the return value of laser displacement sensor 3, and image definition decision criteria, find optimal imaging
Position is it is ensured that detected optical element surface is located in the depth of field of camera lens.
Step 3, automatically scanning.Two-dimensional scan motion platform 2 controls automatic zoom microlens 6 according to the path planned
Carry out image scanning to optical element surface 12 to gather and transfer data to industrial computer software.Simultaneously one-dimensional focusing axle 1 according to
The compensation way planned carries out real-Time Compensation to the distance of automatic zoom microlens 6.
Step 4, post processing of image.The image being big visual field by the image mosaic collecting by design software algorithm, protects
Demonstrate,prove spliced image and substantially do not see seam, and complete the identification of impaired loci and statistics in image.
Step 5, result exports.Information useful to image and statistical result etc. is preserved and is exported, main output knot
Fruit is divided into several classifications as follows according to demand, including element record, damage check result, system operation daily record, original image, divides
Cloth schematic diagram etc..
In the present embodiment, develop special-purpose software for described device and method, can achieve a key scanning, image mosaic and
Process, specific software workflow such as Fig. 2.
Carry out the surface damage test experience of optical element using the detection means described in the present embodiment and detection method,
Test result indicate that, the detection means of this patent design and detection method are easy to use, can quickly realize optical element surface
The online Overlap-scanning damaging, detection efficiency is high, and image mosaic effect is preferable, does not substantially see seam, the peace to optical element
Dress Gesture is not high, and installation cost is less than commercial microscopes.
Particular embodiments described above, has carried out detailed further to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, be should be understood that the specific embodiment that the foregoing is only the present invention, be not limited to the present invention, all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvement done etc., should be included in the guarantor of the present invention
Within the scope of shield.
Claims (8)
1. the micro- scanning imagery harvester that a kind of vertical optical element surface damages is it is characterised in that this device includes: two
Dimension scanning motion platform (2), one-dimensional focusing axle (1), optical imaging system, the confocal displacement transducer of dispersion (3), system controller
(8), industrial computer (9), shock insulation platform (11)；
Wherein, described one-dimensional focusing axle (1) is arranged on shock insulation platform (11), can be in the direction perpendicular to vertical optical element
Upper motion；
Described two-dimensional scan motion platform (2) is arranged on one-dimensional focusing axle (1), can be parallel to vertical optical element surface
Two dimensional motion is carried out on plane of movement；
Described optical imaging system is arranged on described two-dimensional scan motion platform (2), and described optical system is used for scanning collection
The image of described vertical optical element surface；
The confocal displacement transducer (3) of described dispersion is arranged on described two-dimensional scan motion platform (2), for measurement and vertical light
Learn the distance of element surface；
Described system controller (8) is integrated with light source control, camera lens zoom motor control, the control of lens focusing axle and scanning motion
The function of platform courses；
After described industrial computer (9) is connected with system controller (8), for the intensity of light source, camera lens amplification, lens location and
Imaging definition is automatically adjusted.
2. device according to claim 1 is it is characterised in that described optical imaging system includes automatic zoom microlens
(6), face battle array colour ccd (7), coaxial light source (5) and annular light source (4), described face battle array colour ccd (7) is arranged on described automatic
The coaxial light source interface of the end of zoom microlens (6), described coaxial light source (5) and described automatic zoom microlens (6)
Connect, described annular light source (4) is arranged on the front position of automatic zoom microlens (6).
3. device according to claim 1 it is characterised in that described optical imaging system resolution from 0.3 μm to
3.45 it is μm adjustable.
4. device according to claim 2 is it is characterised in that described automatic zoom microlens (6) can zoom automatically
And operating distance does not change.
5. device according to claim 2 is it is characterised in that in scanning collection image, open described coaxial light source 5
Afterwards, face battle array colour ccd (7) collects bright field image, and after opening annular light source 4, face battle array colour ccd (7) collects details in a play not acted out on stage, but told through dialogues
Image.
6. device according to claim 1 is it is characterised in that the certainty of measurement of described confocal displacement transducer (3) is 0.9
μm, maximum allowable optical element inclination angle is ± 10 °.
7. device according to claim 1 is it is characterised in that also include:
Display (10), for showing the image that described optical imaging system scanning collection arrives.
8. a kind of carry out vertical optical element surface using the device described in claim 2 and damage micro- scanning imagery collection side
Method is it is characterised in that the method comprises the following steps:
Step 1, the surface that the confocal displacement transducer of dispersion (3) measures vertical optical element initial sweep point is micro- with automatic zoom
Angular error between the distance of camera lens (6) and vertical optical element surface and two-dimensional scan motion platform kinetic coordinate system；
Step 2, one-dimensional focusing axle (1) drives automatic zoom microlens (6) to move forward and backward, in conjunction with laser displacement sensor (3)
Return value, and image definition decision criteria, determine image space it is ensured that detected optical element surface is located at camera lens
In the depth of field；
Step 3, two-dimensional scan motion platform (2) controls automatic zoom microlens (6) according to the path planned to optics unit
Part surface (12) carries out image scanning and gathers and transfer data to industrial computer (9)；One-dimensional focusing axle 1 is according to having planned simultaneously
Compensation way carries out real-Time Compensation to the distance of automatic zoom microlens (6)；
Step 4, industrial computer (9) by the image mosaic collecting be big visual field image it is ensured that spliced image is seen not substantially
Go out seam, and complete the identification of impaired loci and statistics in image；
Step 5, the identification of impaired loci in image and statistical result is preserved and is exported.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610709591.9A CN106338524A (en) | 2016-08-23 | 2016-08-23 | Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610709591.9A CN106338524A (en) | 2016-08-23 | 2016-08-23 | Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106338524A true CN106338524A (en) | 2017-01-18 |
Family
ID=57825553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610709591.9A Pending CN106338524A (en) | 2016-08-23 | 2016-08-23 | Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106338524A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108152302A (en) * | 2017-12-27 | 2018-06-12 | 合肥知常光电科技有限公司 | A kind of detection device and method of curved optical device beauty defects |
| CN109283184A (en) * | 2018-09-03 | 2019-01-29 | 浙江大学 | A kind of beauty defects measurement method based on spectral confocal sensor |
| CN110133000A (en) * | 2019-05-10 | 2019-08-16 | 邱凯旋 | A kind of full microscope visual imaging surface detecting machine |
| CN110411346A (en) * | 2019-08-12 | 2019-11-05 | 哈尔滨工业大学 | A kind of aspherical fused quartz element surface microdefect method for rapidly positioning |
| CN110425976A (en) * | 2019-08-30 | 2019-11-08 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | A kind of automation microscope detection device and detection system |
| CN112584047A (en) * | 2020-12-11 | 2021-03-30 | 苏州优纳医疗器械有限公司 | Control method for continuous scanning imaging of area-array camera |
| CN112903694A (en) * | 2021-01-18 | 2021-06-04 | 苏州华兴源创科技股份有限公司 | Flying shoot detection system and method |
| CN113125448A (en) * | 2021-04-16 | 2021-07-16 | 中国科学院自动化研究所 | Surface defect detection system and method |
| CN113484326A (en) * | 2021-07-06 | 2021-10-08 | 南开大学 | Integrated laser damage surface observation system |
| CN113673782A (en) * | 2021-09-06 | 2021-11-19 | 中导光电设备股份有限公司 | Multi-microscope scanning photographing path optimization method and device |
| CN113970548A (en) * | 2021-09-09 | 2022-01-25 | 联宝(合肥)电子科技有限公司 | Scanning device and visual detection system |
| CN115326804A (en) * | 2022-09-02 | 2022-11-11 | 哈尔滨工业大学 | Automatic evaluation device and method for surface damage initiation and damage growth of fused quartz element |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4829374A (en) * | 1986-11-17 | 1989-05-09 | Kanzaki Paper Manufacturing Co., Ltd. | Surface inspection apparatus |
| JP2000131241A (en) * | 1998-10-29 | 2000-05-12 | Canon Inc | Inspection device and inspecting method for optical element |
| CN1587980A (en) * | 2004-09-15 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Complete optical fiber probe scanning type near-field optical microscope |
| CN103245303A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院激光聚变研究中心 | Multi-pose large-caliber plane optical element surface shape detecting device and method |
| CN103674977A (en) * | 2013-12-24 | 2014-03-26 | 中国科学院自动化研究所 | Detection device for detecting surface damage of large-diameter optical element and corresponding detection method thereof |
-
2016
- 2016-08-23 CN CN201610709591.9A patent/CN106338524A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4829374A (en) * | 1986-11-17 | 1989-05-09 | Kanzaki Paper Manufacturing Co., Ltd. | Surface inspection apparatus |
| JP2000131241A (en) * | 1998-10-29 | 2000-05-12 | Canon Inc | Inspection device and inspecting method for optical element |
| CN1587980A (en) * | 2004-09-15 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Complete optical fiber probe scanning type near-field optical microscope |
| CN103245303A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院激光聚变研究中心 | Multi-pose large-caliber plane optical element surface shape detecting device and method |
| CN103674977A (en) * | 2013-12-24 | 2014-03-26 | 中国科学院自动化研究所 | Detection device for detecting surface damage of large-diameter optical element and corresponding detection method thereof |
Non-Patent Citations (7)
| Title |
|---|
| ZHENGTAO ZHANG等: "Surface Flaws Detection Algorithms for Large Aperture Optical Element", 《PROCEEDINGS OF THE 2015 INTERNATIONAL CONFERENCE ON ADVANCED MECHATRONIC SYSTEMS》 * |
| 张彬等: "球面光学元件表面疵病的自动检测技术研究", 《光学仪器》 * |
| 李艾星: "基于机器视觉的大口径精密光学元件表面疵病的识别研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
| 杨甬英等: "光学元件表面缺陷的显微散射暗场成像及数字化评价系统", 《光学学报》 * |
| 王为农等编著: "《影像测量仪技术基础》", 31 March 2010, 中国商业出版社 * |
| 迟健男主编: "《视觉测量技术》", 30 June 2011, 机械工业出版社 * |
| 陶显等: "基于机器视觉的大口径光学元件表面损伤检测技术研究进展", 《PROCEEDINGS OF THE 33RD CHINESE CONTROL CONFERENCE》 * |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108152302A (en) * | 2017-12-27 | 2018-06-12 | 合肥知常光电科技有限公司 | A kind of detection device and method of curved optical device beauty defects |
| CN109283184A (en) * | 2018-09-03 | 2019-01-29 | 浙江大学 | A kind of beauty defects measurement method based on spectral confocal sensor |
| CN110133000A (en) * | 2019-05-10 | 2019-08-16 | 邱凯旋 | A kind of full microscope visual imaging surface detecting machine |
| CN110411346A (en) * | 2019-08-12 | 2019-11-05 | 哈尔滨工业大学 | A kind of aspherical fused quartz element surface microdefect method for rapidly positioning |
| CN110425976A (en) * | 2019-08-30 | 2019-11-08 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | A kind of automation microscope detection device and detection system |
| CN112584047B (en) * | 2020-12-11 | 2021-10-01 | 苏州优纳医疗器械有限公司 | Control method for continuous scanning imaging of area-array camera |
| CN112584047A (en) * | 2020-12-11 | 2021-03-30 | 苏州优纳医疗器械有限公司 | Control method for continuous scanning imaging of area-array camera |
| CN112903694A (en) * | 2021-01-18 | 2021-06-04 | 苏州华兴源创科技股份有限公司 | Flying shoot detection system and method |
| CN113125448A (en) * | 2021-04-16 | 2021-07-16 | 中国科学院自动化研究所 | Surface defect detection system and method |
| CN113484326A (en) * | 2021-07-06 | 2021-10-08 | 南开大学 | Integrated laser damage surface observation system |
| CN113673782A (en) * | 2021-09-06 | 2021-11-19 | 中导光电设备股份有限公司 | Multi-microscope scanning photographing path optimization method and device |
| CN113673782B (en) * | 2021-09-06 | 2024-02-23 | 中导光电设备股份有限公司 | Multi-microscope scanning photographing path optimization method and device |
| CN113970548A (en) * | 2021-09-09 | 2022-01-25 | 联宝(合肥)电子科技有限公司 | Scanning device and visual detection system |
| CN113970548B (en) * | 2021-09-09 | 2023-09-01 | 联宝(合肥)电子科技有限公司 | Scanning device and vision detection system |
| CN115326804A (en) * | 2022-09-02 | 2022-11-11 | 哈尔滨工业大学 | Automatic evaluation device and method for surface damage initiation and damage growth of fused quartz element |
| CN115326804B (en) * | 2022-09-02 | 2024-05-14 | 哈尔滨工业大学 | Automatic evaluation device and method for initiating surface damage and increasing damage of fused quartz element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106338524A (en) | Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof | |
| CN110006905B (en) | Large-caliber ultra-clean smooth surface defect detection device combined with linear area array camera | |
| CN106056587B (en) | Full view line laser structured light three-dimensional imaging caliberating device and method | |
| CN107121093A (en) | A kind of gear measurement device and measuring method based on active vision | |
| CN102135236B (en) | Automatic non-destructive testing method for internal wall of binocular vision pipeline | |
| CN110411346B (en) | Method for quickly positioning surface micro-defects of aspheric fused quartz element | |
| CN107356608A (en) | The quick dark field detection method of heavy caliber fused quartz optical component surface microdefect | |
| CN103728315B (en) | Heavy-calibre element surface detection apparatus and damage accordingly method for rapidly positioning | |
| CN103674977B (en) | Optical elements of large caliber element surface damage detection device and corresponding detection method | |
| CN106405826B (en) | A kind of galvanometer scanning system and scan method of double light path imaging | |
| CN110954024A (en) | Connecting piece vision measuring device and measuring method thereof | |
| CN108805870A (en) | A kind of detection method of the connector with needle stand | |
| CN114113114A (en) | Automatic process method for detecting and repairing micro-defects on surface of large-diameter element | |
| CN110873718A (en) | Steel plate surface defect detection system and method based on machine vision | |
| CN209992407U (en) | Large-caliber ultra-clean smooth surface defect detection device combined with linear array camera | |
| CN110823531B (en) | Digital optical bench | |
| US10162189B2 (en) | Device, system and method for the visual alignment of a pipettor tip and a reference point marker | |
| CN105699704B (en) | The imaging automatic regulating apparatus of a kind of white light interference atomic force probe system and control method thereof | |
| CN104913731A (en) | Laser differential confocal microscope measurement and control system | |
| CN113066736A (en) | High-precision, large-breadth and high-throughput six-dimensional wafer detection system | |
| CN208000190U (en) | A kind of high speed pendulum mirror performance index detection device | |
| CN108833789A (en) | A kind of real-time autofocus and auto focusing method | |
| WO2018005404A1 (en) | Method and system for measuring geometric parameters of through holes | |
| CN113791086A (en) | Method and device for measuring surface defects of fan-shaped section blade based on computer vision | |
| CN206944930U (en) | A kind of pcb board hole location detecting device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170118 |