CN105444680B - A kind of two-dimensional grating ruler with zero mark - Google Patents
A kind of two-dimensional grating ruler with zero mark Download PDFInfo
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- CN105444680B CN105444680B CN201510777450.6A CN201510777450A CN105444680B CN 105444680 B CN105444680 B CN 105444680B CN 201510777450 A CN201510777450 A CN 201510777450A CN 105444680 B CN105444680 B CN 105444680B
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- 239000000758 substrate Substances 0.000 claims abstract description 44
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 16
- 239000004411 aluminium Substances 0.000 claims abstract description 16
- 238000007747 plating Methods 0.000 claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 18
- 238000010586 diagram Methods 0.000 description 14
- 238000005530 etching Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005269 aluminizing Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Abstract
The present invention relates to a kind of two-dimensional grating ruler with zero mark, it is characterised in that：It includes a substrate,Some groups of light and shade the barcode size or text fields of the parallel unequal interval setting of the horizontal and vertical difference of substrate,Light and shade the barcode size or text field described in every group is a zero mark,The horizontal and vertical parallel groove body being of same size that is equidistantly provided with of the substrate forms two-dimensional grating,Remove the substrate of all described light and shade the barcode size or text fields other regions plate set aluminium film formed plating aluminium zones,Light and shade the barcode size or text field described in every group includes the transmission region that some parallel unequal intervals are set,Also plating sets aluminium film formation plating aluminium zones between adjacent two transmission region described in every group in light and shade the barcode size or text field,All groove bodies in described light and shade the barcode size or text field are the first groove body,All groove bodies overseas positioned at all light and shade bar code areas are the second groove body,The depth all same of all first groove bodies,The depth all same of all second groove bodies,The depth and the depth of second groove body of each first groove body differ.
Description
Technical field
The present invention relates to a kind of grating scale, especially with regard to a kind of two-dimensional grating ruler with zero mark.
Background technology
With the continuous development of manufacturing industry, modern industry is more and more urgent to the demand of high-acruracy survey.Using grating
Ruler measures displacement due to having the advantages that high sensitivity, strong antijamming capability, is widely used in accurate measurement, precision adds
The technical fields such as work.Using the method for incremental count, that is, what is measured is relative displacement for optical grating ruler measurement displacement.In order to determine
Absolute position in one-dimensional grating ruler, it is necessary to configure more than one zero mark.One-dimensional grating ruler with multiple zero marks is (such as
Shown in Fig. 1, Fig. 2), zero mark is by one group be inscribed in respectively on key light grid and indication grating not equidistant bar shaped code character
Into, when the bar code on key light grid and indication grating is completely superposed, one sharp pulse of output, as absolute zero position.Using not
Equally spaced mode arranges multiple zero marks, is for the spacing according to two neighboring zero mark, it is instant to obtain mobile station
Absolute position, it is easy to use.
Two-dimensional grating ruler can realize the accurate measurement of two-dimensional directional displacement, be more advantageous to eliminating Abbe error.Two-dimentional light
Grid ruler can also use the zero mark similar with one-dimensional grating ruler, but to being covered with the two-dimentional key light grid of grid in plane and
Speech, the placement position of zero mark is into problem.According to existing technology, since the zero mark of two-dimensional grating ruler can only be placed
In the place of two-dimentional key light grid surrounding blank, in order to find zero-bit, it is therefore desirable to reading head is returned into edge, it is inconvenient for use,
And the effective area of two-dimensional grating can be caused to be reduced due to occupying for zero locatino grating.
The content of the invention
In view of the above-mentioned problems, the object of the present invention is to provide a kind of two-dimensional grating ruler with zero mark, make multiple zero-bits
Label placement can realize that the zero signal of two dimensions exports respectively in two-dimensional grating plane, improve measurement sensitivity and
Speed.
To achieve the above object, the present invention takes following technical scheme：A kind of two-dimensional grating ruler with zero mark, it is special
Sign is：It includes a substrate, and the parallel unequal interval of the horizontal and vertical difference of substrate sets some groups of light and shade bar code areas
Domain, light and shade the barcode size or text field described in every group are a zero mark, and the horizontal and vertical of the substrate parallel is equidistantly provided with
The groove body being of same size forms two-dimensional grating, and the other regions for removing the substrate of all described light and shade the barcode size or text fields are plated
If aluminium film forms plating aluminium zones, light and shade the barcode size or text field described in every group includes the transparent area that some parallel unequal intervals are set
Domain, also plating sets aluminium film and is formed and aluminizes area between adjacent two transmission region described in every group in light and shade the barcode size or text field
Domain, all groove bodies in described light and shade the barcode size or text field are the first groove body, overseas positioned at all light and shade bar code areas
All groove bodies be the second groove body, the depth all same of all first groove bodies, the depth of all second groove bodies is homogeneous
Together, the depth of each first groove body and the depth of second groove body differ.
The substrate is glass substrate, steel plate or plastic plate.
Due to taking above technical scheme, it has the following advantages the present invention：1st, the present invention is due to the transverse direction on substrate
Unequal interval parallel respectively with longitudinal direction is provided with some groups of light and shade the barcode size or text fields, and every group of light and shade the barcode size or text field is a zero-bit
Mark, therefore can realize and multiple zero marks are arranged in two-dimensional grating face, so as to improve effectively making for two-dimensional grating
It is simple in structure, easy to use with area.2nd, it is instant to obtain mobile station according to the distance between two adjacent zero marks by the present invention
Absolute position, the horizontal and vertical zero signal of mobile station can be controlled to export respectively.3rd, the present invention is aligned when in use
High sensitivity, can realize rapid alignment, effectively improve measurement accuracy.
Brief description of the drawings
Fig. 1 is the structure diagram of one-dimensional grating ruler of the prior art with zero mark；
Fig. 2 is the structure diagram of zero mark partial enlargement in Fig. 1；
Fig. 3 is the structure diagram with zero mark in two-dimensional grating plane of the present invention；
Fig. 4 is the structure diagram of substrate of the present invention；
Fig. 5 is the structure diagram of present invention spin coating photoresist on the basis of Fig. 4；
Fig. 6 is the structure diagram of present invention holographic exposure on the basis of Fig. 5；
Fig. 7 is the structure diagram that the present invention develops on the basis of Fig. 6 and dries afterwards；
Fig. 8 is the structure diagram of present invention ion beam etching on the basis of Fig. 7；
Fig. 9 is the structure diagram of present invention cleaning residual photoresist on the basis of Fig. 8；
Figure 10 is present invention structure diagram of spin coating photoresist again on the basis of Fig. 9；
Figure 11 is the structure diagram that the present invention is exposed on the basis of Figure 10；
Figure 12 is that the present invention carries out development and the structure diagram dried afterwards on the basis of Figure 11；
Figure 13 is the structure diagram that the present invention aluminizes on the basis of Figure 12；
Figure 14 is the structure diagram that the present invention carries out acetone ultrasonic cleaning on the basis of Figure 13.
Embodiment
The present invention is described in detail below with reference to the accompanying drawings and embodiments.
As shown in figure 3, the present invention proposes a kind of two-dimensional grating ruler with zero mark, it includes a substrate 1, substrate 1
The parallel unequal interval of horizontal and vertical difference some groups of light and shade the barcode size or text fields 2 are set, and substrate 1 is horizontal and vertical parallel
It is equidistantly provided with the groove body being of same size and forms two-dimensional grating.Remove other areas of the substrate 1 of all light and shade the barcode size or text fields 2
Domain, which is plated, sets aluminium film formation plating aluminium zones 3.Every group of light and shade the barcode size or text field 2 includes some be arranged in parallel and width not etc. saturating
Light region 21, also plating sets aluminium film and is formed and aluminizes between adjacent two transmission region 21 in every group of light and shade the barcode size or text field 2
Region 3.Groove body in light and shade the barcode size or text field 2 is the first groove body, and the groove body outside light and shade the barcode size or text field 2 is the
Two groove bodies, the depth all same of all first groove bodies, the depth all same of all second groove bodies, and the depth of every one first groove body
Differed with the depth of the second groove body, thus form on substrate 1 along it laterally, the two-dimensional grating that is longitudinally arranged, every group
Light and shade the barcode size or text field 2 is used as a zero mark, realizes that each zero mark is arranged in two-dimensional grating.According to two-phase
The distance between adjacent zero mark, obtains the instant absolute position of mobile station, and the present invention can control mobile station both direction
Zero signal exports respectively.
In above-described embodiment, substrate 1 is quartz glass substrate, steel plate or plastic plate.
Below by the production method of the specific embodiment two-dimensional grating ruler with zero mark that the present invention will be described in detail, its
Comprise the following steps：
1) a prefabricated substrate 1 is cleaned, on substrate 1 spin coating first layer photoresist 4, and first layer photoresist 4 is carried out
Obtain being dispersed with the first photoresist mask (such as Fig. 4~7) of two-dimensional points horizontal and vertical parity check code after holographic exposure, development and rear baking on substrate 1.
2) ion beam etching is carried out to the substrate 1 with the first photoresist mask, obtains 11 He of the first groove body on substrate 1
Second groove body 12, the depth of all first groove bodies 11 of control is identical, and the depth of all second groove bodies 12 is identical, and every one first groove
Body 11 and the depth of the second groove body 12 differ, and detailed process is：
Carry out ion beam etching as shown in figure 8, being blocked first using one first shutter to obtain some depth identical
First groove body 11, then blocks progress ion beam etching using one second shutter and obtains the second identical groove body of some depth
12.Control the depth of every one first groove body 11 and the depth of the second groove body 12 to differ at the same time, can compensate for a certain extent
Since diffraction efficiency caused by the presence of light and shade the barcode size or text field changes, ensured with this after aluminizing in the non-zero order of whole substrate 1
Diffraction efficiency is as consistent as possible.Wherein, the manufacturing process of the first shutter：According to all light and shade bars of Fig. 3 on a metallic plate
Shape code region hollow out；The manufacturing process of second shutter：It is overseas according to all light and shade bar code areas of Fig. 3 on another metallic plate
Position hollow out.
3) cleaning base plate 1, removes remaining first layer photoresist 4 on substrate 1, and two-dimensional grating is formd (as schemed in substrate 1
Shown in 9).
After removing remaining first layer photoresist 4, two-dimensional grating is formed on substrate 1.(ion beam is carried out on substrate 1
During etching, the partial etching for having first layer photoresist 4 falls first layer photoresist 4, and the partial etching of no first layer photoresist 4 falls
Part substrate 1), so the distribution of two-dimensional grating is consistent with the two-dimensional lattice code division cloth on the first photoresist mask.
4) spin coating second layer photoresist 5 (as shown in Figure 10) again on prepared two-dimensional grating, obtains band photoetching
The two-dimensional grating of glue 5.
5) mask plate 6 with zero mark, and light and shade the barcode size or text field on mask plate 6 and substrate 1 are placed in substrate 1
The region of upper first groove body 11 is corresponding, (as shown in figure 11), development, rear baking is exposed, so as to obtain band zero on substrate 1
Second photoresist mask (as shown in figure 12) of position mark.The manufacturing process of mask plate 6 with zero mark：First in another base
The top surface plating last layer aluminium of plate, then use and delineates machine engraving and go to need the region of printing opacity to form each light and shade bar as shown in Figure 3
Shape code region.
6) aluminized (as shown in figure 13) to the substrate 1 with the second photoresist mask.
7) substrate 1 is cleaned by ultrasonic, so as to obtain the two-dimensional grating ruler with multiple zero marks：
When substrate 1 is cleaned by ultrasonic, as shown in figure 14, aluminium film 7 on second layer photoresist 5 is deposited on substrate 1 just
It can be together stripped with second layer photoresist 5, form transmission region.So as to substrate 1 it is horizontal and vertical formed respectively it is some
Group width differs, light and shade the barcode size or text field of no periodic, obtains multiple zero marks.
In above-described embodiment, acetone can be selected to carry out being cleaned by ultrasonic substrate 1 in step 7).
The design method of the light and shade coding of zero mark of the present invention is compiled using the light and shade of general one-dimensional grating zero mark
The design method of code.What zero signal of the present invention obtained is the Zero-order diffractive of two-dimensional grating, and displacement measurement uses two-dimensional grating
Non-zero order diffraction.
The various embodiments described above are merely to illustrate the present invention, wherein the change of manufacture craft, with transmission zero level or reflection zero
Level obtains zero-bit, the adjustment at zero mark interval etc. and can all be varied from, every on the basis of technical solution of the present invention
The equivalents of upper progress and improvement, should not exclude outside protection scope of the present invention.
Claims (2)
- A kind of 1. two-dimensional grating ruler with zero mark, it is characterised in that：It includes a substrate, horizontal and vertical point of the substrate Not parallel unequal interval sets some groups of light and shade the barcode size or text fields, and light and shade the barcode size or text field described in every group is a zero mark, The horizontal and vertical parallel groove body being of same size that is equidistantly provided with of the substrate forms two-dimensional grating, removes all stated clearly Other regions of the substrate of dark the barcode size or text field, which are plated, sets aluminium film formation plating aluminium zones, light and shade the barcode size or text field described in every group Include the transmission region that some parallel unequal intervals are set, positioned at described in every group in light and shade the barcode size or text field adjacent two described in Also plating sets aluminium film formation plating aluminium zones between transmission region, and all groove bodies in described light and shade the barcode size or text field are first Groove body, all groove bodies overseas positioned at all light and shade bar code areas are the second groove body, the depth of all first groove bodies All same, the depth all same of all second groove bodies, the depth of each first groove body and the depth of second groove body Degree differs.
- A kind of 2. two-dimensional grating ruler with zero mark as claimed in claim 1, it is characterised in that：The substrate is glass base Piece, steel plate or plastic plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510777450.6A CN105444680B (en) | 2015-11-13 | 2015-11-13 | A kind of two-dimensional grating ruler with zero mark |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510777450.6A CN105444680B (en) | 2015-11-13 | 2015-11-13 | A kind of two-dimensional grating ruler with zero mark |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105444680A CN105444680A (en) | 2016-03-30 |
| CN105444680B true CN105444680B (en) | 2018-05-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510777450.6A Active CN105444680B (en) | 2015-11-13 | 2015-11-13 | A kind of two-dimensional grating ruler with zero mark |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106404014B (en) * | 2016-11-23 | 2018-08-21 | 广州市精谷智能科技有限公司 | A kind of incremental angle encoder pattern zero potential reference point coding method and mask plate |
| CN109668513B (en) * | 2019-01-18 | 2024-01-12 | 国奥科技(深圳)有限公司 | Linear rotation grating ruler |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85100127A (en) * | 1985-04-01 | 1986-07-30 | 清华大学 | Plane zero locatino grating |
| CN1924711A (en) * | 2006-09-11 | 2007-03-07 | 中国科学技术大学 | Method for producing absolute zero-position alignment marks by semi-reflective zero-position grating |
| CN202501826U (en) * | 2012-03-21 | 2012-10-24 | 珠海市怡信测量科技有限公司 | Linear grating ruler |
| CN202522198U (en) * | 2012-03-29 | 2012-11-07 | 珠海市怡信测量科技有限公司 | Absolute linear grating ruler |
| CN103994723A (en) * | 2014-06-10 | 2014-08-20 | 广东工业大学 | Macro and micro composite grating ruler measurement system based on vertical and horizontal transformation amplification segmentation |
| CN104019744A (en) * | 2014-06-10 | 2014-09-03 | 清华大学 | Two-dimension self-calibration gauge point detection alignment system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004239855A (en) * | 2003-02-07 | 2004-08-26 | Mitsutoyo Corp | Reflex photoelectric encoder |
-
2015
- 2015-11-13 CN CN201510777450.6A patent/CN105444680B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85100127A (en) * | 1985-04-01 | 1986-07-30 | 清华大学 | Plane zero locatino grating |
| CN1924711A (en) * | 2006-09-11 | 2007-03-07 | 中国科学技术大学 | Method for producing absolute zero-position alignment marks by semi-reflective zero-position grating |
| CN202501826U (en) * | 2012-03-21 | 2012-10-24 | 珠海市怡信测量科技有限公司 | Linear grating ruler |
| CN202522198U (en) * | 2012-03-29 | 2012-11-07 | 珠海市怡信测量科技有限公司 | Absolute linear grating ruler |
| CN103994723A (en) * | 2014-06-10 | 2014-08-20 | 广东工业大学 | Macro and micro composite grating ruler measurement system based on vertical and horizontal transformation amplification segmentation |
| CN104019744A (en) * | 2014-06-10 | 2014-09-03 | 清华大学 | Two-dimension self-calibration gauge point detection alignment system |
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| CN105444680A (en) | 2016-03-30 |
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