CN107622786A - Two-stage Piezoelectric Driving micro-nano locating platform - Google Patents
Two-stage Piezoelectric Driving micro-nano locating platform Download PDFInfo
- Publication number
- CN107622786A CN107622786A CN201711091282.0A CN201711091282A CN107622786A CN 107622786 A CN107622786 A CN 107622786A CN 201711091282 A CN201711091282 A CN 201711091282A CN 107622786 A CN107622786 A CN 107622786A
- Authority
- CN
- China
- Prior art keywords
- motion platform
- platform
- degree
- level
- level motion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of two-stage Piezoelectric Driving micro-nano locating platform, including pedestal, one-level motion platform, one-level motion platform compliant mechanism, second degree of motion platform, second degree of motion platform movement guide mechanism and piezoelectric ceramic actuator；The one-level motion platform is assemblied in the pedestal by the one-level motion platform compliant mechanism, and the one-level motion platform compliant mechanism includes one-level motion platform displacement amplifying mechanism and one-level motion platform movement guide mechanism；The second degree of motion platform is assemblied in one-level motion platform by the second degree of motion platform movement guide mechanism；The piezoelectric ceramic actuator includes one-level motion platform piezoelectric ceramic actuator and second degree of motion platform piezoelectric ceramic actuator, and the one-level motion platform piezoelectric ceramic actuator and the second degree of motion platform piezoelectric ceramic actuator drive the one-level motion platform and the second degree of motion platform respectively.
Description
Technical field
The present invention relates to micro-nano precision positioning field, and in particular to a kind of big stroke micro-nano positioning of two-stage Piezoelectric Driving is flat
Platform.
Background technology
With microelectronic engineering, Precision Machining and Ultraprecision Machining, the section such as biomedical engineering, precision optics engineering
The fast development of technology, in various fields, all there is an urgent need to micron order, the precision of even Subnano-class displacement resolution to determine
Position system.Micro-nano locating platform is that have micro-/ nano positioning resolution and the positioner of precision, is the important set of microtechnic
Into part, have broad application prospects and important researching value.
Due to piezoelectric ceramic actuator have high resolution, frequency response it is fast, without friction, not by magnetic interference and without profit
Many advantages, such as sliding and be widely used in micro-nano location technology.But some shortcomings existing for piezoelectric ceramic actuator
Limit its further development and application.As piezoelectric ceramic actuator output displacement is small, it usually needs design displacement equations machine
Structure amplifies piezoelectric ceramic actuator output displacement, to meet the larger application scenario for positioning stroke of needs, and positioning table home row
Connect each other between journey and positioning precision, locating speed three, mutually restrict.It is big that some application scenarios need alignment system to have
While positioning stroke, also need possess the abilities such as fast positioning or high accuracy positioning, some application scenarios are simultaneously to positioning in addition
Platform space size has certain limitations.
Modern science and technology and continuous development also positioning stroke, positioning precision and the positioning to micro-nano alignment system of industry
Speed proposes higher and higher requirement.Therefore, solves the lance between the big stroke of locating platform and high accuracy, high locating speed
Shield, the compact-sized locating platform of the big stroke with novel mechanism form, high accuracy, high locating speed is developed, is had important
Theory significance and practical value.
The content of the invention
The invention provides one kind to have dual-positioning structure, is driven with piezoelectric ceramic actuator, and compact-sized list is certainly
By spending big stroke micro-nano locating platform, the current big stroke micro-nano locating platform locating speed of solution is low, positioning precision does not reach will
The problems such as volume of summing is big.
In order to solve the above-mentioned technical problem, the present invention adopts the following technical scheme that：Two-stage Piezoelectric Driving micro-nano locating platform,
Including pedestal, one-level motion platform, one-level motion platform compliant mechanism, second degree of motion platform, second degree of motion platform motion guide
Mechanism and piezoelectric ceramic actuator；
The one-level motion platform is assemblied in the pedestal by the one-level motion platform compliant mechanism, the one-level
Motion platform compliant mechanism includes one-level motion platform displacement amplifying mechanism and one-level motion platform movement guide mechanism；
The second degree of motion platform is assemblied in one-level motion platform by the second degree of motion platform movement guide mechanism；
The piezoelectric ceramic actuator includes one-level motion platform piezoelectric ceramic actuator and second degree of motion platform piezoelectricity is made pottery
Porcelain driver, the one-level motion platform piezoelectric ceramic actuator and the second degree of motion platform piezoelectric ceramic actuator drive respectively
Move the one-level motion platform and the second degree of motion platform.
Further, the one-level motion platform displacement amplifying mechanism is a flexible eight bar enlargers, described flexible eight
Bar enlarger includes two input end arms and two output end arms；The one-level motion platform piezoelectric ceramic actuator is installed on described
Among two input end arms；One output end arms is connected with pedestal, and another output end arms is connected with the one-level motion platform.
Further, the one-level motion platform movement guide mechanism is the compound parallel four-bar of semicircle flexible hinge composition
Mechanism, it is symmetrical along the two-stage Piezoelectric Driving micro-nano Positioning platform movement central axis, it is connected to the pedestal and described
Between one-level motion platform.
Further, the second degree of motion platform movement guide mechanism is made up of multigroup flexible leaf spring, and flexible leaf spring is along institute
It is symmetrical to state two-stage Piezoelectric Driving micro-nano Positioning platform movement central axis, each leaf spring one end and the second degree of motion platform
Connection, the other end are connected with one-level motion platform；The second degree of motion platform piezoelectric ceramic actuator drives along the two-stage piezoelectricity
Dynamic micro-nano Positioning platform movement axis is installed between the one-level motion platform and the second degree of motion platform.
Further, the one-level fortune among the one-level motion platform displacement amplifying mechanism two input end arms
Moving platform piezoelectric ceramic actuator passes through the one-level motion platform displacement amplifying mechanism and one-level motion platform motion guide machine
The elastic-restoring force of hinge carrys out pretension in structure.
Further, the second degree of motion platform piezoelectricity between the one-level motion platform and the second degree of motion platform
Ceramic driver is by the elastic-restoring force of hinge in the second degree of motion platform movement guide mechanism come pretension.
Further, institute is passed through along the two-stage Piezoelectric Driving micro-nano Positioning platform movement central axial direction, a through hole
Pedestal and one-level motion platform side are stated, the second degree of motion platform displacement sensor is detected for installing.
Further, the upper end of through hole is machined with a screw hole in the susceptor, and sensor is fixed for mounting screw.
Further, uniform multiple tapped through holes on the second degree of motion platform, precision positioning is needed for fixation
Object.
Further, the one-level motion platform displacement amplifying mechanism one exports end arms and one-level motion platform coupling part
There are multiple through holes.
The beneficial effects of the invention are as follows：
(1) dual-positioning structure makes locating platform under conditions of with big positioning stroke, while has higher positioning
Speed and positioning precision.
(2) the compound parallel four-bar guiding mechanism formed using flexible eight bar enlargers and semicircle flexible hinge is effective
Locating platform size is reduced, compound parallel four-bar guiding mechanism has while providing the larger movement travel of one-level motion platform
Smaller concentrated stress.
(3) multiple tapped through holes uniform on second degree of motion platform, and one-level motion platform displacement amplifying mechanism one are defeated
Two-stage Piezoelectric Driving micro-nano Positioning platform movement portion can be mitigated by going out end arms and multiple through holes of one-level motion platform coupling part
The quality divided, improve locating platform locating speed.
(4) one-level motion platform piezoelectric ceramic actuator and second degree of motion platform piezoelectric ceramic actuator are all flat by positioning
The elastic-restoring force of corresponding flexible hinge carrys out pretension in platform, simple and reliable for structure without manufacturing and designing extra pre-tightening mechanism.
(5) locating platform can use wire cutting integration processing, have without assembling, without friction, need not lubricate
Advantage.
(6) motion platform integrally uses symmetric design, can be reduced and added with balanced structure internal stress, Reducing distortion error
Influence of the work error temperature change to precision.
Brief description of the drawings
Fig. 1 is the general structure schematic diagram of the embodiment of the present invention.
Fig. 2 is Fig. 1 top view.
Fig. 3 is the view after splitting after assembly sensor of the embodiment of the present invention.
In figure：1st, pedestal, 2, one-level motion platform, 3, second degree of motion platform, 4, piezoelectric ceramic actuator, 41, two level fortune
Moving platform piezoelectric ceramic actuator, 42, one-level motion platform piezoelectric ceramic actuator, 5, one-level motion platform compliant mechanism, 51,
One-level motion platform displacement amplifying mechanism, 511, flexible eight bar enlargers input end arms, 512 and two output end arms, 52, one
Level motion platform movement guide mechanism, 6 second degree of motion platform movement guide mechanisms, 7, locating platform fixing hole, 8, sensor it is solid
Determine screw hole, 9, tapped through hole, 10, mass reducing holes, 11, capacitance sensor, 12, holding screw.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
As depicted in figs. 1 and 2, a kind of two-stage Piezoelectric Driving micro-nano locating platform, including pedestal 1, one-level motion platform 2,
One-level motion platform compliant mechanism 5, second degree of motion platform 3, second degree of motion platform movement guide mechanism 6 and Piezoelectric Ceramic
Device 4；
There are multiple locating platform fixing holes 7 on pedestal 1, for locating platform to be fixed on into Isolating Platform；
One-level motion platform 2 is assemblied in pedestal 1 by one-level motion platform compliant mechanism 5, and one-level motion platform is submissive
Mechanism 5 includes one-level motion platform displacement amplifying mechanism 51 and one-level motion platform movement guide mechanism 52.
One-level motion platform displacement amplifying mechanism 51 is flexible eight bar enlargers in the present embodiment, flexible eight bars amplification
Mechanism includes two input end arms 511 and two and exports end arms 512.One-level motion platform piezoelectric ceramic actuator 42 is installed on two inputs
Among end arms 511；One output end arms is connected with pedestal 1, and another output end arms is connected with the one-level motion platform 2.One-level is transported
Moving platform displacement amplifying mechanism 51 is used to amplify the output displacement of one-level motion platform piezoelectric ceramic actuator 42.One-level motion platform
Piezoelectric ceramic actuator 42 passes through in one-level motion platform displacement amplifying mechanism 51 and one-level motion platform movement guide mechanism 52
The elastic-restoring force of hinge carrys out pretension.
One-level motion platform movement guide mechanism 52 is compound parallel the four of semicircle flexible hinge composition in the present embodiment
Linkage, it is symmetrical along the two-stage Piezoelectric Driving micro-nano Positioning platform movement central axis, it is connected to the pedestal and institute
State between one-level motion platform.One-level motion platform movement guide mechanism 52 is used to provide support with leading to one-level motion platform 2
To.
One-level motion platform displacement amplifying mechanism 51 1, which exports end arms and the coupling part of one-level motion platform 2, multiple quality
Lightening core 10, for mitigating the quality of Positioning platform movement component, improve locating speed.
Second degree of motion platform 3 is assemblied in one-level motion platform 2 by second degree of motion platform movement guide mechanism 6.
Second degree of motion platform movement guide mechanism 6 is made up of multigroup flexible leaf spring in the present embodiment, and flexible leaf spring is along two
Level Piezoelectric Driving micro-nano Positioning platform movement central axis is symmetrical, and each leaf spring one end is connected with second degree of motion platform 3, separately
One end is connected with one-level motion platform 2.Second degree of motion platform movement guide mechanism 6 is used to provide support to second degree of motion platform 3
With guiding.Second degree of motion platform piezoelectric ceramic actuator 41 is installed on one along two-stage Piezoelectric Driving micro-nano Positioning platform movement axis
Between level motion platform 2 and second degree of motion platform 3, second degree of motion platform piezoelectric ceramic actuator 41 is put down by the second degree of motion
The elastic-restoring force of hinge carrys out pretension in platform movement guide mechanism 6.
Uniform multiple tapped through holes 9 on second degree of motion platform 3, the object of precision positioning is needed for fixed, and can mitigated
Motion platform quality, improve locating speed.
As shown in figure 3, along two-stage Piezoelectric Driving micro-nano Positioning platform movement central axial direction, a through hole passes through pedestal 1
It is in the present embodiment an electric capacity for installing the sensor of detection second degree of motion platform displacement with the side of one-level motion platform 2
Sensor 11.The upper end of through hole is machined with a sensor fixing screw hole 8 in pedestal 1, and it is tight to have installed one additional in the present embodiment
Determine screw 12 and carry out fixed capacity sensor 11.
Motion platform integrally uses symmetric design, can be reduced processing with balanced structure internal stress, Reducing distortion error and missed
Influence of the poor temperature change to precision.
The output displacement of second degree of motion platform piezoelectric ceramic actuator 42 passes through one-level motion platform displacement amplifying mechanism 51
Amplification, exported by an output end arms, the output end arms is connected with one-level motion platform 2, promotes one-level motion platform 2 to move.
One-level motion platform movement guide mechanism 52 supports and guides one-level motion platform 2 to move.Flexible eight bar enlargers coordinate multiple
The big stroke linear motion of one-level motion platform 2 can be realized by closing parallelogram lindage, can realize that being assemblied in one-level motion puts down
The big stroke motion of second degree of motion platform 3 in platform 2.Second degree of motion platform piezoelectric ceramic actuator 41 directly drives second degree of motion and put down
Short distance can be achieved under the support of second degree of motion platform movement guide mechanism 6 and guiding and transport at a high speed for platform 3, second degree of motion platform 3
It is dynamic.One-level motion platform 2 and second degree of motion platform 3 is set to move and be engaged by using certain control strategy, two-stage piezoelectricity
Driving micro-nano locating platform can still have higher locating speed, positioning precision under with big stroke location condition.
The beneficial effects of the invention are as follows：
(1) dual-positioning structure makes locating platform under conditions of with big positioning stroke, while has higher positioning
Speed and positioning precision.
(2) the compound parallel four-bar guiding mechanism formed using flexible eight bar enlargers and semicircle flexible hinge is effective
Locating platform size is reduced, compound parallel four-bar guiding mechanism has while providing the larger movement travel of one-level motion platform
Smaller concentrated stress.
(3) multiple tapped through holes uniform on second degree of motion platform, and one-level motion platform displacement amplifying mechanism one are defeated
Two-stage Piezoelectric Driving micro-nano Positioning platform movement portion can be mitigated by going out end arms and multiple through holes of one-level motion platform coupling part
The quality divided, improve locating platform locating speed.
(4) one-level motion platform piezoelectric ceramic actuator and second degree of motion platform piezoelectric ceramic actuator are all flat by positioning
The elastic-restoring force of corresponding flexible hinge carrys out pretension in platform, simple and reliable for structure without manufacturing and designing extra pre-tightening mechanism.
(5) locating platform can use wire cutting integration processing, have without assembling, without friction, need not lubricate
Advantage.
(6) motion platform integrally uses symmetric design, can be reduced and added with balanced structure internal stress, Reducing distortion error
Influence of the work error temperature change to precision.
Claims (10)
1. two-stage Piezoelectric Driving micro-nano locating platform, it is characterised in that：Including pedestal, one-level motion platform, one-level motion platform
Compliant mechanism, second degree of motion platform, second degree of motion platform movement guide mechanism and piezoelectric ceramic actuator；
The one-level motion platform is assemblied in the pedestal by the one-level motion platform compliant mechanism, the one-level motion
Platform compliant mechanism includes one-level motion platform displacement amplifying mechanism and one-level motion platform movement guide mechanism；
The second degree of motion platform is assemblied in one-level motion platform by the second degree of motion platform movement guide mechanism；
The piezoelectric ceramic actuator includes one-level motion platform piezoelectric ceramic actuator and second degree of motion platform piezoelectric ceramics drives
Dynamic device, the one-level motion platform piezoelectric ceramic actuator and the second degree of motion platform piezoelectric ceramic actuator drive institute respectively
State one-level motion platform and the second degree of motion platform.
2. two-stage Piezoelectric Driving micro-nano locating platform according to claim 1, it is characterised in that：The one-level motion platform
Displacement amplifying mechanism is a flexible eight bar enlargers, and the flexible eight bars enlarger includes two input end arms and two output ends
Arm；The one-level motion platform piezoelectric ceramic actuator is installed among the two inputs end arms；One output end arms connects with pedestal
Connect, another output end arms is connected with the one-level motion platform.
3. two-stage Piezoelectric Driving micro-nano locating platform according to claim 1, it is characterised in that：The one-level motion platform
Movement guide mechanism is the compound parallelogram lindage of semicircle flexible hinge composition, is positioned along the two-stage Piezoelectric Driving micro-nano flat
The axisymmetrical distribution of the platform centre of motion, is connected between the pedestal and the one-level motion platform.
4. two-stage Piezoelectric Driving micro-nano locating platform according to claim 1, it is characterised in that：The second degree of motion platform
Movement guide mechanism is made up of multigroup flexible leaf spring, and flexible leaf spring is along the two-stage Piezoelectric Driving micro-nano Positioning platform movement center
Axisymmetrical is distributed, and each leaf spring one end is connected with the second degree of motion platform, and the other end is connected with one-level motion platform；It is described
Second degree of motion platform piezoelectric ceramic actuator is installed on described one along the two-stage Piezoelectric Driving micro-nano Positioning platform movement axis
Between level motion platform and the second degree of motion platform.
5. two-stage Piezoelectric Driving micro-nano locating platform according to claim 2, it is characterised in that：Transported installed in the one-level
The one-level motion platform piezoelectric ceramic actuator that moving platform displacement amplifying mechanism two is inputted among end arms passes through the one-level
The elastic-restoring force of motion platform displacement amplifying mechanism and hinge in one-level motion platform movement guide mechanism carrys out pretension.
6. two-stage Piezoelectric Driving micro-nano locating platform according to claim 4, it is characterised in that：Transported installed in the one-level
Second degree of motion platform piezoelectric ceramic actuator is transported by the second degree of motion platform between moving platform and the second degree of motion platform
The elastic-restoring force of hinge carrys out pretension in action-oriented mechanism.
7. two-stage Piezoelectric Driving micro-nano locating platform according to claim 1, it is characterised in that：Driven along the two-stage piezoelectricity
Dynamic micro-nano Positioning platform movement central axial direction, a through hole passes through the pedestal and one-level motion platform side, for installing
Detect the second degree of motion platform displacement sensor.
8. two-stage Piezoelectric Driving micro-nano locating platform according to claim 1, it is characterised in that：Through hole in the susceptor
Upper end be machined with a screw hole, for mounting screw fix sensor.
9. two-stage Piezoelectric Driving micro-nano locating platform according to claim 1, it is characterised in that：Put down in the second degree of motion
Uniform multiple tapped through holes on platform, for the fixed object for needing precision positioning.
10. two-stage Piezoelectric Driving micro-nano locating platform according to claim 1, it is characterised in that：The one-level motion is flat
Platform displacement amplifying mechanism one, which exports end arms and one-level motion platform coupling part, multiple through holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711091282.0A CN107622786B (en) | 2017-11-08 | 2017-11-08 | Two-stage piezoelectric driving micro-nano positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711091282.0A CN107622786B (en) | 2017-11-08 | 2017-11-08 | Two-stage piezoelectric driving micro-nano positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107622786A true CN107622786A (en) | 2018-01-23 |
| CN107622786B CN107622786B (en) | 2020-10-27 |
Family
ID=61098844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711091282.0A Active CN107622786B (en) | 2017-11-08 | 2017-11-08 | Two-stage piezoelectric driving micro-nano positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107622786B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109140148A (en) * | 2018-09-05 | 2019-01-04 | 三英精控（天津）仪器设备有限公司 | A kind of series voltage driving nanopositioning stage |
| CN109857062A (en) * | 2019-03-25 | 2019-06-07 | 浙江大学 | Double drive electrichydraulic control formula precision machining system and its control method |
| CN110058404A (en) * | 2019-04-26 | 2019-07-26 | 广东工业大学 | A kind of big stroke micro-nano beat platform of piezoelectric driven integral type |
| CN110189791A (en) * | 2019-05-31 | 2019-08-30 | 中国工程物理研究院机械制造工艺研究所 | The adjustable micro-nano platform of initial angular errors based on two-way preload |
| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
| CN111193436A (en) * | 2020-01-08 | 2020-05-22 | 浙江师范大学 | Stepping type driving device |
| CN111600505A (en) * | 2020-05-27 | 2020-08-28 | 东华大学 | Load-adjustable large-stepping-amplitude linear piezoelectric motor |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN1716456A (en) * | 2005-04-28 | 2006-01-04 | 武汉理工大学 | Nano grade positioning precision one dimension displacement work table |
| CN101860256A (en) * | 2010-04-02 | 2010-10-13 | 大连理工大学 | High-precision adjustable-speed linear micro-displacement work table |
| JP5064955B2 (en) * | 2007-09-28 | 2012-10-31 | 株式会社日立ハイテクノロジーズ | Fine movement stage, fine movement actuator device, and magnetic head inspection device |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN203813694U (en) * | 2014-04-22 | 2014-09-03 | 长安大学 | Stepping type precise piezoelectric linear actuator |
| CN106847346A (en) * | 2017-03-31 | 2017-06-13 | 西安交通大学 | The big distance high frequency sound precisely locating platform of XY θ Three Degree Of Freedoms |
-
2017
- 2017-11-08 CN CN201711091282.0A patent/CN107622786B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN1716456A (en) * | 2005-04-28 | 2006-01-04 | 武汉理工大学 | Nano grade positioning precision one dimension displacement work table |
| JP5064955B2 (en) * | 2007-09-28 | 2012-10-31 | 株式会社日立ハイテクノロジーズ | Fine movement stage, fine movement actuator device, and magnetic head inspection device |
| CN101860256A (en) * | 2010-04-02 | 2010-10-13 | 大连理工大学 | High-precision adjustable-speed linear micro-displacement work table |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN203813694U (en) * | 2014-04-22 | 2014-09-03 | 长安大学 | Stepping type precise piezoelectric linear actuator |
| CN106847346A (en) * | 2017-03-31 | 2017-06-13 | 西安交通大学 | The big distance high frequency sound precisely locating platform of XY θ Three Degree Of Freedoms |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109140148A (en) * | 2018-09-05 | 2019-01-04 | 三英精控（天津）仪器设备有限公司 | A kind of series voltage driving nanopositioning stage |
| CN109857062A (en) * | 2019-03-25 | 2019-06-07 | 浙江大学 | Double drive electrichydraulic control formula precision machining system and its control method |
| CN110058404A (en) * | 2019-04-26 | 2019-07-26 | 广东工业大学 | A kind of big stroke micro-nano beat platform of piezoelectric driven integral type |
| CN110189791A (en) * | 2019-05-31 | 2019-08-30 | 中国工程物理研究院机械制造工艺研究所 | The adjustable micro-nano platform of initial angular errors based on two-way preload |
| CN110189791B (en) * | 2019-05-31 | 2024-01-30 | 中国工程物理研究院机械制造工艺研究所 | Initial corner error adjustable micro-nano platform based on bidirectional pre-tightening |
| CN110415760A (en) * | 2019-07-25 | 2019-11-05 | 天津大学 | High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform |
| CN111193436A (en) * | 2020-01-08 | 2020-05-22 | 浙江师范大学 | Stepping type driving device |
| CN111193436B (en) * | 2020-01-08 | 2024-04-23 | 浙江师范大学 | Stepping driving device |
| CN111600505A (en) * | 2020-05-27 | 2020-08-28 | 东华大学 | Load-adjustable large-stepping-amplitude linear piezoelectric motor |
| CN111600505B (en) * | 2020-05-27 | 2021-11-12 | 东华大学 | Load-adjustable large-stepping-amplitude linear piezoelectric motor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107622786B (en) | 2020-10-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107622786A (en) | Two-stage Piezoelectric Driving micro-nano locating platform | |
| CN103225728B (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN102214593B (en) | Processing-object-supporting mechanism, supporting method, and conveying system including the mechanism | |
| CN103331748B (en) | Miniaturized flexible micro clamp based on piezoelectric driving | |
| CN102969030B (en) | Plane type precise two-dimensional micrometric displacement platform | |
| KR20100101603A (en) | Slide stage, and slide stage movable in x- and y-directions | |
| CN102182899A (en) | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof | |
| CN110421532B (en) | Piezoelectric ceramic driven micro-nano servo platform | |
| CN105666225A (en) | Ultra-precise low-speed ball screw linear feeding device | |
| CN101887761A (en) | Two-degree-of-freedom micro-positioning platform | |
| TWI572542B (en) | Workpiece cable assembly | |
| CN207465245U (en) | A kind of manipulator two-way floating mechanism | |
| CN105006255B (en) | A kind of three DOF micro-positioning workbench | |
| JP7199374B2 (en) | positioning device | |
| CN105904443A (en) | Two-degree-of-freedom flexible parallel mechanism for motion decoupling | |
| US20210164545A1 (en) | Relative Translation System | |
| CN204966059U (en) | Little positioning table of three degrees of freedom | |
| CN108398264B (en) | RV speed reducer and test bench connection tool and RV speed reducer test bench | |
| CN1214892C (en) | Magnetic suspension method for guide rail with ultra precise and micro displacement | |
| CN2536348Y (en) | Unitary platform with movements in two dimensions | |
| CN114812368A (en) | High-bandwidth large-stroke space three-degree-of-freedom parallel flexible precision positioning platform | |
| CN101871549A (en) | Three-degree-of-freedom precision-positioning workbench | |
| US20210247216A1 (en) | Cantilever Linear Motion Reference Device Employing Two-Layer Air Suspension | |
| CN111628624A (en) | KK linear motor module | |
| TWI708653B (en) | Stage device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |