CN106452165B - Inchworm type precise linear micro-driver based on compliant mechanism - Google Patents
Inchworm type precise linear micro-driver based on compliant mechanism Download PDFInfo
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- H—ELECTRICITY
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
Abstract
The invention discloses an inchworm type precise linear micro-driver based on a compliant mechanism, which comprises a driving mechanism, 2 clamping mechanisms and a rotor, wherein the driving mechanism consists of 4 driving branched chains which are symmetrically arranged and 1 pair of stators, the driving branched chains consist of 2 lever structures, and the driving branched chains are connected to the stators by flexible hinges and can do reciprocating micro-displacement motion relative to the stators; the clamping mechanism consists of 3 pairs of flexible hinges, 1 pair of rod groups and 1 pair of clamping pieces which are symmetrically arranged, and the 2 clamping mechanisms are symmetrically connected to the two ends of the driving mechanism through the rod pieces; the rotor is a slender cylindrical structure, is arranged at the symmetrical center of the micro-driver, is matched with the clamping mechanism through the hole, is matched with the driving mechanism through the through groove and can move in the hole and the through groove. The clamping mechanism is driven by the driving mechanism to reciprocate, and the clamping mechanism drives the rotor to do linear motion in a motion mode simulating the motion law of inchworm. The micro-driver can be used in the fields of ultra-precision machining, precision engineering, micro-electro-mechanical systems, bioengineering, semiconductor manufacturing and the like.
Description
Technical Field
The invention relates to an inchworm type precise linear micro-actuator based on a compliant mechanism, belongs to the field of precise micro-operation, and is mainly applied to the high-end scientific and technical fields of ultra-precision machining, precise engineering, Micro Electro Mechanical Systems (MEMS), microelectronic engineering, biological engineering, semiconductor manufacturing and the like.
Background
With the rapid development of the fields of micro-machining, ultra-precision machining and measurement, precision optical engineering, bioengineering, modern medicine, semiconductor manufacturing, aerospace and the like, the traditional linear actuator is limited by the working principle and the mechanical structure thereof, so that the requirements of ultra-precision and high-precision positioning cannot be met, and the ultra-precision linear micro-actuator with nano-scale and sub-nano-scale precision is urgently needed to realize the functions thereof. The inchworm type linear driver is a driver which can imitate the motion law of biological inchworms in nature and can realize micro-displacement accumulation to obtain a large stroke. However, the inchworm-type linear driver at present has the problems of low running speed, small output load, poor motion stability and the like.
The flexible mechanism is a novel mechanism which transmits and converts movement, force or energy by adopting elastic deformation of a flexible component, has the advantages of no friction, no lubrication, integral manufacture, high movement sensitivity and the like, and can be used for the structural design of an inchworm type precise linear micro-driver. The piezoelectric ceramic actuator has the characteristics of good stability, quick response, large output force, accurate positioning and the like, is suitable for being used as an actuator of an inchworm type driver clamping mechanism and a driving mechanism, and can meet the working requirements of output force, response speed and precision required by a micro driver.
Disclosure of Invention
The invention aims to provide a precise linear micro-driver designed based on the motion law of bionic inchworm of a compliant mechanism, and the designed driver has the advantages of large stroke, high resolution, large output load, capability of bidirectional motion and the like.
The technical scheme adopted by the invention is as follows:
the micro-actuator of the invention comprises a clamping mechanism, a driving mechanism and a rotor. The design principle of the micro-driver is shown in fig. 1, the clamping unit is divided into a first clamping unit 2 and a second clamping unit 4 which are respectively positioned at the front end and the rear end of the driving unit 3, the output unit 1 is positioned at the symmetrical center of the clamping unit and the driving unit, and the working process of the structure imitating the law of inchworm motion is as follows: FIG. 1(a) shows the microactuator in an inoperative state; fig. 1(b) shows the second clamp unit 4 in an operating state, which clamps the output unit 1; fig. 1(c) shows the driving unit 3 in an operating state, the unit is extended to both sides, the first clamping unit 2 is pushed to move to the left, the second clamping unit 4 moves to the right, and the output unit 1 follows the second clamping unit 4 to move to the right; fig. 1(d) shows the first clamping unit 2 in an operating state, which clamps the output shaft 1; fig. 1(e) shows the second clamping unit 4 in the inactive state, the second clamping unit 4 releases the output shaft 1, the driving unit 3 is also in the inactive state, the unit contracts, the first clamping unit 2 is driven to move to the right, the second clamping unit 4 moves to the left, and the output unit 1 follows the first clamping unit 2 to move to the right; FIG. 1(f) shows the microactuator in an inactive state, completing one cycle of motion. By repeating this cycle, the output unit 1 can be continuously moved rightward, and the reverse movement of the output unit 1 can be realized by changing the driving order of the first clamp unit 2 and the second clamp unit 4.
The clamping mechanism is realized by a clamping mechanism which is composed of a pair of symmetrical 2-to-round flexible hinges, a pair of right-angle flexible hinges, a pair of rod groups and a pair of clamping sheets, as shown in fig. 2. The first right-circular flexible hinge 6 and the second right-circular flexible hinge 17 form a first pair of right-circular flexible hinges, the third right-circular flexible hinge 7 and the fourth right-circular flexible hinge 16 form a second pair of right-circular flexible hinges, and the first pair of right-circular flexible hinges and the second pair of right-circular flexible hinges are connected in series to transmit the input force and displacement of the driving end 5 to a first pair of rod pieces consisting of a first rod piece 8 and a second rod piece 14; the first right-angle flexible hinge 9 and the second right-angle flexible hinge 15 form a first pair of right-angle flexible hinges, and can transmit the force and displacement transmitted to the first pair of rod sets to the first clamping piece 11 and the second clamping piece 13, so that the clamping pieces can generate displacement and force required by clamping the output shaft. The first pair of right-circular flexible hinges, the second pair of right-circular flexible hinges, the first pair of rod groups and the first pair of right-angle flexible hinges form a lever amplification mechanism which can amplify input force and displacement of the driving end 5 of the clamping mechanism. For stable clamping of the mover, the clamping pieces 11 and 13 are designed as cylindrical recesses 12. In order to facilitate the installation of the rotor, the front and the back of the clamping mechanism are provided with output holes 10.
The driving mechanism is shown in fig. 3, and the function of the driving unit can be realized by the driving mechanism, and the driving mechanism is composed of 4 symmetrically arranged driving branched chains and 1 pair of stators. The driving branched chain consists of 2 lever structures. The first lever structure consists of a branched chain driving end 18, a fifth straight-circular flexible hinge 19, a fourth right-angle flexible hinge 25 and a third rod piece 23, wherein the branched chain driving end 18 transmits micro displacement through the fifth straight-circular flexible hinge 19 to serve as an input end of the first lever structure, the fourth right-angle flexible hinge 25 serves as a lever fulcrum, the third rod piece 23 serves as a lever, displacement of a joint of the third rod piece 23 and the sixth straight-circular flexible hinge 20 is amplified, and the displacement is transmitted to the fourth rod piece 24 through the sixth straight-circular flexible hinge 20 and the seventh straight-circular flexible hinge 21 which are connected in series; the second lever structure is composed of a sixth right-circular flexible hinge 20, a seventh right-circular flexible hinge 21, a third right-angle flexible hinge 22, a fourth rod 24 and a connecting rod 26, wherein the sixth right-circular flexible hinge 20 and the seventh right-circular flexible hinge 21 which are connected in series are input ends of the second lever structure, the third right-angle flexible hinge 22 is a fulcrum of the second lever structure, and the fourth rod 24 is a lever and can amplify the displacement of the input end of the second lever structure to the connecting rod 26 for connecting the clamping mechanism. The driving branched chain amplifies the input displacement of the input end of the branched chain by 2 stages through 2 lever structures connected in series, and the movement stroke of the driver is improved. When the first driving branch 29 and the fourth driving branch 34 are driven, they can realize the movement along the negative direction X, and when the driving is released, they can realize the movement along the positive direction X due to the elastic restoring movement of each flexible hinge; when the second driving branched chain 30 and the third driving branched chain 33 are driven, they can realize the motion along the positive direction of X, when the driving is released, they can realize the motion along the negative direction of X due to the elastic restoring motion of each flexible hinge, and then the 4 driving mechanism branched chains can perform the reciprocating motion left and right. The first driving branched chain 29, the second driving branched chain 30, the third driving branched chain 33 and the fourth driving branched chain 34 are connected to the first stator 31 and the second stator 32 through the third right-angle type flexible hinge 22, the stators are fixed, the driving branched chains do reciprocating linear motion relative to the stators, and the motion characteristic can simulate the inchworm motion law. In order to facilitate the mounting of the mover, a rectangular through slot 27 is designed.
As shown in fig. 4, the mover is an elongated cylindrical structure, and two ends of the mover are respectively provided with a section of thread 35 for coupling a load. The rotor passes through the rectangular through slot 27 of the driving mechanism and the output hole 10 of the clamping mechanism respectively.
As shown in fig. 5, the micro actuator is composed of a mover 36, a first clamping mechanism 37, a driving mechanism 38, and a second clamping mechanism 39. The first clamping mechanism 37 and the second clamping mechanism 39 are connected to both ends of the drive mechanism 38 via the connecting rod 26. The driving mechanism 38 drives the first clamping mechanism 37 and the second clamping mechanism 39 via the connecting rod 26 to be reciprocatingly linearly movable. The mover 36 is disposed at the symmetrical center of the entire driver and can move linearly under the constraint of the moving pair formed by the rectangular through slot 27 of the driving mechanism and the output hole 10 of the clamping mechanism. The mover 36 is coupled to the clamping mechanism through the output hole 10, and is coupled to the driving mechanism through the rectangular through groove 27, and is movable in the output hole 10 and the rectangular through groove 27. The mover 36 can be clamped or released by the first clamping piece 11 and the second clamping piece 13, and can move along with the clamping mechanism when clamped, and can move freely at the output hole 10 of the clamping mechanism when released. The micro-driver has the structural characteristics that the driving mechanism drives the clamping mechanism to do reciprocating linear motion, and the clamping mechanism drives the rotor to do linear motion.
Compared with the prior art, the invention has the following advantages and beneficial effects:
(1) the micro-driver of the invention adopts the flexible hinge to transmit micro-displacement motion, and has the characteristic of high precision compared with the traditional micro-driver;
(2) according to the micro-driver, the clamping mechanism adopts 2 symmetrically arranged compliant structures to transmit clamping force and 1 pair of clamping sheets with cylindrical groove structures to clamp the rotor in a bilateral clamp mode, and the micro-driver has the characteristics of large clamping force, firm and stable clamping and strong bearing capacity;
(3) according to the micro-actuator, the driving branched chain of the driving mechanism adopts a two-stage lever structure to realize the guiding effect and the elastic recovery effect of precise linear motion, and has the characteristics of large single-step output displacement and high motion resolution;
(4) the micro-actuator adopts the driving mechanism to drive the clamping mechanism, the clamping mechanism drives the rotor to move to realize the motion law of the bionic inchworm, and the slender cylindrical shaft is used as the rotor of the actuator, so that the micro-actuator has the characteristic of high motion speed.
(5) In the micro-driver, the clamping mechanisms are symmetrically arranged on the driving mechanism, and the micro-driver has the characteristic of realizing the bidirectional movement of the rotor by changing the clamping sequence of the 2 clamping mechanisms.
Drawings
FIG. 1 is a schematic diagram of the micro-actuator design of the present invention;
FIG. 2 is a schematic diagram of the clamping mechanism of the present invention;
FIG. 3 is a schematic view of the drive mechanism of the present invention;
FIG. 4 is a schematic diagram of a mover structure of the present invention;
FIG. 5 is a schematic diagram of the overall structure of the microactuator of the present invention;
in fig. 1, an output unit, 2, a first clamping unit, 3, a driving unit, 4, a second clamping unit;
in fig. 2, 5, a driving end of a clamping mechanism, 6, a first right-angle flexible hinge, 7, a third right-angle flexible hinge, 8, a first rod, 9, a first right-angle flexible hinge, 10, an output hole, 11, a first clamping piece, 12, a cylindrical groove, 13, a second clamping piece, 14, a second rod, 15, a second right-angle flexible hinge, 16, a fourth right-angle flexible hinge, 17, and a second right-angle flexible hinge;
in fig. 3, 18, a branched chain driving end, 19, a fifth right-circular flexible hinge, 20, a sixth right-circular flexible hinge, 21, a seventh right-circular flexible hinge, 22, a third right-angle flexible hinge, 23, a third rod, 24, a fourth rod, 25, a fourth right-angle flexible hinge, 26, a connecting rod, 27, a rectangular through groove, 28, a fixing hole, 29, a first driving branched chain, 30, a second driving branched chain, 31, a first stator, 32, a second stator, 33, a third driving branched chain, 34, and a fourth driving branched chain;
in fig. 4, 35, threads;
in fig. 5, 36, a mover, 37, a first clamping mechanism, 38, a driving mechanism, 39, and a second clamping mechanism.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1-5, an inchworm-type precise linear micro-actuator based on a compliant mechanism according to the present invention comprises: the clamping mechanism comprises an output unit 1, a first clamping unit 2, a driving unit 3, a second clamping unit 4, a clamping mechanism driving end 5, a first right-circular flexible hinge 6, a third right-circular flexible hinge 7, a first rod 8, a first right-angle flexible hinge 9, an output hole 10, a first clamping piece 11, a cylindrical groove 12, a second clamping piece 13, a second rod 14, a second right-angle flexible hinge 15, a fourth right-circular flexible hinge 16, a second right-circular flexible hinge 17, a branched chain driving end 18, a fifth right-circular flexible hinge 19, a sixth right-circular flexible hinge 20, a seventh right-circular flexible hinge 21, a third right-angle flexible hinge 22, a third rod 23, a fourth rod 24, a fourth right-angle flexible hinge 25, a connecting rod 26, a rectangular through groove 27, a fixing hole 28, a first driving branched chain 29, a second driving branched chain 30, a first stator 31, a second stator 32, a third rod 24, a fourth rod 25, a connecting rod, A third driving branch 33, a fourth driving branch 34, a screw 35, a mover 36, a first clamping mechanism 37, a driving mechanism 38, and a second clamping mechanism 39.
According to the design principle diagram of the micro-actuator shown in fig. 1, the key point of the design is that the driving mechanism can drive the clamping mechanism to realize reciprocating linear motion, the clamping mechanism can clamp and release the rotor, and the rotor can be driven to move along with the clamping mechanism. As shown in fig. 2, in order to enable the clamping mechanism to realize the clamping function, the clamping mechanism adopts a symmetrical double-side clamp-to-clamp mode to clamp and release the mover. Because the piezoelectric ceramic driver or the single-ring motor has the characteristic of large driving force, the driving end of the clamping mechanism can be driven by the piezoelectric ceramic driver or the single-ring motor. When the drive end driver drives, the clamping mechanism clamps the rotor tightly; when the drive is released, the clamping mechanism releases the rotor due to the elastic recovery action of the flexible hinge. The first clamping piece 11 and the second clamping piece 13 are designed into a cylindrical groove 12, the surface of the groove 12 can be coated with friction materials, static friction force between the clamping pieces and the rotor is increased, and clamping is more reliable. In order to facilitate the assembly of the mover 36, the output holes 10 designed at the two ends of the clamping mechanism are better in coaxiality with the rectangular through groove 27 of the driving mechanism.
As shown in fig. 3, the 4 symmetrically arranged driving branched chains realize reciprocating motion by means of elastic deformation of the flexible hinges, the driving branched chains are connected to the stator by adopting right-angle flexible hinges, and the driving branched chains perform reciprocating micro-displacement motion relative to the stator. To form the first lever structure, the distance from the sixth right circular type flexible hinge 20 to the fifth right circular type flexible hinge 19 should be greater than the distance from the fifth right circular type flexible hinge 19 to the fourth right angle type flexible hinge 25; to form the second lever structure, the distance from the seventh right-angle circular type flexible hinge 21 to the connecting rod 26 should be greater than the distance from the seventh right-angle circular type flexible hinge 21 to the third right-angle type flexible hinge 22. The width of the rectangular through groove 27 is slightly larger than the diameter of the mover, so that friction between the mover and the mover during movement is avoided. In order to realize the fixation of the stator, the driving branched chain moves back and forth relative to the stator, and the height of the stator is larger than that of the driving branched chain. The fixing hole 28 is used for fixing the stator.
As shown in fig. 4, in order to facilitate the connection of the mover 36 to other loads, a section of thread 35 is designed at each of the two ends. In order to realize that the friction of the mover 36 is small during the movement along the rectangular through groove 27 and the output hole 10, the precision requirement of the machined surface of the mover 36 is high, and lubricating oil can be required to be added in a contact area.
As shown in FIG. 5, the overall structure of the micro-actuator is that a first clamping mechanism 37 and a second clamping mechanism 39 are respectively arranged at two ends of a driving mechanism 38, a rotor 36 is arranged in the whole mechanism, when the micro-actuator imitates the law of inchworm motion, the working states of the mechanisms are as follows, ① the second clamping mechanism 39 clamps the rotor 36, ② simultaneously drives 4 driving branches of the driving mechanism 38, the first driving branch 29 and the fourth driving branch 34 can drive the first clamping mechanism 37 to move along the x negative direction, the second driving branch 30 and the third driving branch 33 can drive the second clamping mechanism 39 to move along the x positive direction, the rotor 36 follows the second clamping mechanism 39 to move along the x positive direction one step, ③ the first clamping mechanism 37 clamps the rotor 36, ④ the second clamping mechanism 39 releases the rotor 36, ⑤ simultaneously releases 4 driving branches, each flexible hinge of the driving branches returns to drive the first clamping mechanism 37 to move along the x positive direction, the second clamping mechanism 39 moves along the x negative direction, the rotor 36 follows the first clamping mechanism 37 to move along the x positive clamping mechanism 39 again, the first clamping mechanism 37 can be circularly, the rotor 36 can be moved along the positive clamping mechanism ⑥, and the rotor 36 can be moved continuously, and the linear clamping mechanism can be moved along the positive clamping mechanism 36, and the linear clamping mechanism 36 can be controlled to move continuously, and the linear clamping mechanism 37 can be moved along the positive clamping mechanism 36, and the.
The designed micro-driver is suitable for being processed by adopting a wire cut electrical discharge machining technology, and the mover is processed by adopting a traditional processing method. The material of the microactuator determines the motion performance of the microactuator, and the material thereof is required to be flexible and strong. The flexibility determines the motion sensitivity and the motion stroke of the micro-driver; since the microactuator requires high frequency driving, it is necessary to ensure that the strength limit of the material is satisfactory in order to prevent its failure during operation. The soft and strong material is selected, so that the performance requirement of the micro-actuator can be met, and spring steel, beryllium bronze and the like can be selected as the manufacturing material of the micro-actuator.
The micro-driver with high precision, high motion resolution and high motion speed can be better realized through the embodiment.
Although the embodiments of the present invention have been described with reference to the accompanying drawings, it is not intended to limit the scope of the present invention, and it should be understood by those skilled in the art that various modifications and variations can be made without inventive efforts by those skilled in the art based on the technical solution of the present invention.
Claims (3)
1. An inchworm-type precise linear micro-actuator based on a compliant mechanism is characterized by comprising a driving mechanism, 2 clamping mechanisms and a rotor, wherein the two clamping mechanisms are respectively connected to two ends of the driving mechanism through connecting rods;
the driving mechanism consists of 4 driving branched chains and 1 pair of stators which are symmetrically arranged, the driving branched chains consist of 2 lever structures, the driving branched chains are connected to the stators by flexible hinges and can do reciprocating micro-displacement motion relative to the stators; the driving branched chain consists of 2 lever structures; the first lever structure consists of a branched chain driving end, a fifth straight-circular flexible hinge, a fourth right-angle flexible hinge and a third rod piece, wherein the branched chain driving end transmits micro displacement through the fifth straight-circular flexible hinge to serve as an input end of the first lever structure; the second lever structure consists of a sixth straight-circular flexible hinge, a seventh straight-circular flexible hinge, a third right-angle flexible hinge, a fourth rod piece and a connecting rod, wherein the sixth straight-circular flexible hinge and the seventh straight-circular flexible hinge which are connected in series are input ends of the second lever structure; the driving branched chain amplifies the input displacement of the input end of the branched chain by 2 stages through 2 lever structures connected in series; the first driving branched chain, the second driving branched chain, the third driving branched chain and the fourth driving branched chain are connected to the first stator and the second stator through third right-angle type flexible hinges, the stators are fixed, and the driving branched chains perform reciprocating linear motion relative to the stators;
the clamping mechanism consists of 2 pairs of right-circular flexible hinges, 1 pair of right-angle flexible hinges, 1 pair of rod groups and 1 pair of clamping sheets which are symmetrically arranged; the 2 clamping mechanisms are symmetrically connected to two ends of the driving mechanism through rod pieces;
the rotor is of a slender cylindrical structure and is arranged at the symmetrical center of the micro driver, the rotor is matched with the clamping mechanism through the hole and matched with the driving mechanism through the through groove and can move in the hole and the through groove; the first right-circular flexible hinge and the second right-circular flexible hinge form a first pair of right-circular flexible hinges, the third right-circular flexible hinge and the fourth right-circular flexible hinge form a second pair of right-circular flexible hinges, and the first pair of right-circular flexible hinges and the second pair of right-circular flexible hinges are connected in series to transmit the input force and displacement of the driving end to a first pair of rod pieces formed by the first rod piece and the second rod piece; the first right-angle flexible hinge and the second right-angle flexible hinge form a first pair of right-angle flexible hinges, and can transmit force and displacement transmitted to the first pair of rod sets to the first clamping piece and the second clamping piece, so that the clamping piece can generate displacement and force required by clamping the output shaft; the first pair of right-angle flexible hinges, the second pair of right-angle flexible hinges, the first pair of rod groups and the first pair of right-angle flexible hinges form a lever amplification mechanism which can amplify the input force and displacement at the driving end of the clamping mechanism;
the micro-driver adopts a driving mechanism to drive the clamping mechanism to do reciprocating linear motion through a rod piece, and the clamping mechanism clamps the rotor through a clamping piece to drive the rotor to do linear motion in a motion mode simulating the motion law of inchworm; the 4 driving branched chains are symmetrically arranged, and under the driving action, the first driving branched chain and the fourth driving branched chain can realize the motion along the X negative direction, and the second driving branched chain and the third driving branched chain can realize the motion along the X positive direction; when the drive is released, the first drive branched chain and the fourth drive branched chain can realize the return motion along the positive X direction, and the second drive branched chain and the third drive branched chain can realize the return motion along the negative X direction; in order to facilitate the connection of the rotor with other loads, two sections of threads are respectively designed at two ends of the rotor.
2. The microactuator of claim 1 wherein the actuating arm is comprised of 2 lever structures; the first lever structure consists of 1 straight round flexible hinge, 1 right-angle flexible hinge and 1 rod piece, the second lever structure consists of 2 straight round flexible hinges, 1 right-angle flexible hinge and 1 rod piece, and the 2 lever structures are connected in series to form secondary amplification.
3. The microactuator of claim 1 wherein the clamping segment has a cylindrical recess configuration.
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| CN201610988858.2A CN106452165B (en) | 2016-11-10 | 2016-11-10 | Inchworm type precise linear micro-driver based on compliant mechanism |
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| WO2004030196A2 (en) * | 2002-09-27 | 2004-04-08 | University Of Waterloo | Micro-positioning device |
| CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
| CN206283428U (en) * | 2016-11-10 | 2017-06-27 | 江西理工大学 | A kind of Inchworm type precision straight line microdrive based on compliant mechanism |
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