CN112865593B - Bionic impact piezoelectric driver with high output performance and control method thereof - Google Patents
Bionic impact piezoelectric driver with high output performance and control method thereof Download PDFInfo
- Publication number
- CN112865593B CN112865593B CN202110022136.2A CN202110022136A CN112865593B CN 112865593 B CN112865593 B CN 112865593B CN 202110022136 A CN202110022136 A CN 202110022136A CN 112865593 B CN112865593 B CN 112865593B
- Authority
- CN
- China
- Prior art keywords
- flexible
- straight beam
- mass block
- flexible straight
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011664 nicotinic acid Substances 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims abstract description 9
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 238000005452 bending Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 5
- 230000001154 acute effect Effects 0.000 claims 1
- 210000002683 foot Anatomy 0.000 abstract description 7
- 230000009182 swimming Effects 0.000 abstract description 2
- 210000003371 toe Anatomy 0.000 abstract description 2
- 241000269350 Anura Species 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 241000256247 Spodoptera exigua Species 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003592 biomimetic effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to a bionic impact piezoelectric driver with high output performance and a control method thereof, belonging to the field of precision machinery. The driver consists of a load platform, a flexible driving mechanism, a guide rail sliding block, a friction force adjusting device and a base. Wherein, the load platform, the flexible driving mechanism and the guide rail sliding block are connected through screws. The friction adjusting device and the guide rail sliding block are respectively fixed on the base, and the initial gap between the friction foot and the guide rail sliding block can be adjusted by rotating the pre-tightening screw, so that the friction force applied to the guide rail sliding block can be adjusted. The bionic impact piezoelectric driver is provided by referring to the structure of webs between the rear legs and the toes of the frogs and the motion mode of the rear legs during swimming, and solves the problem of low comprehensive output performance of the traditional inertia impact type piezoelectric driver caused by narrow working bandwidth.
Description
Technical Field
The invention relates to a bionic impact piezoelectric driver with high output performance, belongs to the field of precision machinery, and has extremely high application value in the fields of biomedicine and micro-nano operation.
Background
In recent years, with the rapid development of various scientific and technological fields, the precision driving technology is continuously updated, wherein the piezoelectric driving is one of the research hotspots of the students due to its advantages of small volume, fast response and no electromagnetic interference.
With the development of the piezoelectric precision driving technology, piezoelectric drivers based on different principles and different structures have been developed. They are widely applied to the fields of precision machinery and instruments, bioengineering, micro-nano operation, ultra-precision machining and the like. According to the driving principle, the piezoelectric actuators can be largely classified into an inchworm type, an ultrasonic type, a stick-slip type, an inertial impact type, and the like. The inchworm type piezoelectric actuator is complex in structure and control system, the ultrasonic type actuator is serious in abrasion and heating and short in service life, and the stick-slip type actuator has a rollback phenomenon. The above disadvantages limit their development and use to some extent.
The inertial impact type piezoelectric actuator has attracted extensive attention due to its advantages of simple structure, convenient control, no rollback and the like. In recent years, various improvements have been made to impact inertia piezoelectric actuators by researchers in various countries in order to meet various demands. However, a common problem is that their stable operating bandwidth is narrow, typically within 100Hz, and therefore the overall output performance is low.
In order to enlarge the stable working bandwidth and improve the comprehensive output performance, the invention provides a bionic impact piezoelectric driver by using the structure of webs between the rear legs and toes of a frog and the motion mode of the rear legs during swimming. A parallel hexagonal flexible hinge is designed, and inertia mass blocks are symmetrically distributed on two sides in the advancing direction. The sawtooth type electric signal is used as an excitation signal, the piezoelectric stack is periodically deformed, inertia impact force is generated, and the guide rail sliding block is driven to move forward. The output performance of the driver can be varied by varying the excitation signal and the inertial mass.
Disclosure of Invention
In order to enlarge the stable working bandwidth, the unification of high motion precision and high motion speed of the driver is realized. The invention discloses a bionic impact piezoelectric driver with high output performance.
The technical scheme adopted by the invention for realizing the purpose is as follows:
a bionic impact piezoelectric driver with high output performance comprises a load platform, a compliant driving mechanism, a guide rail slide block, a friction force adjusting device and a base; the load platform, the flexible driving mechanism, the guide rail sliding block and the base are arranged from top to bottom; the guide rail sliding block and the friction force adjusting device are fixed in the same plane of the base through screws; the compliant driving mechanism is excited by a sawtooth wave electric signal, and the guide rail sliding block can move along the y direction according to an impact inertia principle.
The compliant driving mechanism comprises a parallel hexagonal flexible hinge, a piezoelectric stack and a pre-tightening wedge block; the inertia mass block I, the flexible straight beam I, the fixed beam I, the flexible straight beam II, the inertia mass block II, the flexible straight beam III, the fixed beam II and the flexible straight beam IV are arranged in a clockwise end-to-end mode to form a parallel hexagonal flexible hinge; the inertia mass block I, the flexible straight beam IV, the inertia mass block II, the flexible straight beam II and the flexible straight beam III are distributed in an axial symmetry way around the fixed beam I and the fixed beam II; the mounting holes for fixing the flexible driving mechanism are arranged on the fixed beam I and the fixed beam II; the piezoelectric stack is embedded between the inertia mass block I and the inertia mass block II in an interference fit mode through a pre-tightening wedge block; the piezoelectric stack which is electrified and extended can enable the flexible straight beam I, the flexible straight beam II, the flexible straight beam III and the flexible straight beam IV to generate bending deformation and drive the inertia mass block I and the inertia mass block II to move along the positive y direction.
The friction adjusting device comprises an L-shaped flexible hinge and a pre-tightening screw; the L-shaped flexible hinge comprises a fixed end, a friction foot and a flexible adjusting beam; the L-shaped flexible hinge can be fixed on the base through the fixed end; the pre-tightening screw is in elastic contact with the flexible adjusting beam through a threaded hole formed in the base; the friction foot is in contact with the surface of the guide rail sliding block; by adjusting the pre-tightening screw, the friction force between the friction foot and the guide rail sliding block can be changed.
Another object of the present invention is to provide a method for controlling a biomimetic impact piezoelectric actuator with high output performance, comprising the steps of:
firstly, before working, a pretightening screw in a friction force adjusting device is adjusted to enable a guide rail sliding block to be subjected to proper friction force;
secondly, inputting sawtooth-shaped electric signals to the piezoelectric stack, when the voltage amplitude is slowly increased, the piezoelectric stack is gradually extended based on the inverse piezoelectric effect, the parallel hexagonal flexible hinge is stretched, and the flexible straight beam I, the flexible straight beam II, the flexible straight beam III and the flexible straight beam IV generate bending deformation and drive the inertial mass block I and the inertial mass block II to move along the positive y direction;
when the voltage amplitude is sharply reduced to 0V, the piezoelectric stack is rapidly contracted, the parallel hexagonal flexible hinge is restored to the initial state, and the inertia mass block I and the inertia mass block II generate inertia impact force in the positive y direction at the moment, so that the guide rail sliding block moves in the positive y direction;
and fourthly, stable stepping can be realized by repeating the steps, and different output effects can be obtained by changing the mass of the inertia mass block I and the mass of the inertia mass block II, adjusting the friction force adjusting device and changing the excitation signal.
The invention has the beneficial effects that: the structure is simple, the control is convenient, no backspacing exists, the stable working frequency bandwidth can reach 275Hz, the corresponding speed reaches 1.218mm/s, the comprehensive performance is obviously improved compared with the traditional inertia impact piezoelectric driver, and the practical application value is realized.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic diagram of the structure of a bionic impact piezoelectric actuator with high output performance according to the present invention;
FIG. 2 is a schematic view of a portion of the compliant drive mechanism of the present invention;
FIG. 3 is a top view of a parallel hexagonal flexible hinge of the present invention;
FIG. 4 is a schematic view of a portion of the friction adjusting device of the present invention;
FIG. 5 is a schematic diagram of the operation of a high output bionic impact piezoelectric actuator according to the present invention;
fig. 6 is a graph of speed versus frequency, measured at a drive voltage of 100V, according to the present invention.
In the figure: 1. a load platform; 2. a compliant drive mechanism; 2.1, a parallel hexagonal flexible hinge; 2.1.1, an inertia mass block I; 2.1.2, a flexible straight beam I; 2.1.3, fixing the beam I; 2.1.4, a flexible straight beam II; 2.1.5, an inertia mass block II; 2.1.6, a flexible straight beam III; 2.1.7, fixing a beam II; 2.1.8, mounting holes; 2.1.9, a flexible straight beam IV; 2.2, piezoelectric stacking; 2.3, pre-tightening the wedge block; 3. a guide rail slider; 4. a friction force adjusting device; 5. a base.
Detailed Description
The invention will be further explained below with reference to the drawings in the examples.
Referring to fig. 1 to 4, the invention provides a bionic impact piezoelectric actuator with high output performance, which comprises a load platform (1), a compliant driving mechanism (2), a guide rail sliding block (3), a friction force adjusting device (4) and a base (5); the load platform (1), the flexible driving mechanism (2), the guide rail sliding block (3) and the base (5) are arranged from top to bottom; the guide rail sliding block (3) and the friction force adjusting device (4) are fixed in the same plane of the base (5) through screws; the flexible driving mechanism (2) is excited by a sawtooth wave electric signal, and the guide rail sliding block (3) can move along the y direction according to an impact inertia principle.
The compliant driving mechanism (2) comprises a parallel hexagonal flexible hinge (2.1), a piezoelectric stack (2.2) and a pre-tightening wedge block (2.3); the inertia mass block I (2.1.1), the flexible straight beam I (2.1.2), the fixed beam I (2.1.3), the flexible straight beam II (2.1.4), the inertia mass block II (2.1.5), the flexible straight beam III (2.1.6), the fixed beam II (2.1.7) and the flexible straight beam IV (2.1.9) are arranged in a clockwise end-to-end manner to form a parallel hexagonal flexible hinge (2.1); the inertia mass block I (2.1.1), the flexible straight beam I (2.1.2), the flexible straight beam IV (2.1.9), the inertia mass block II (2.1.5), the flexible straight beam II (2.1.4) and the flexible straight beam III (2.1.6) are distributed in an axial symmetry way relative to the fixed beam I (2.1.3) and the fixed beam II (2.1.7); the mounting holes (2.1.8) for fixing the flexible driving mechanism (2) are arranged on the fixed beam I (2.1.3) and the fixed beam II (2.1.7); the piezoelectric stack (2.2) is embedded between the inertial mass block I (2.1.1) and the inertial mass block II (2.1.5) in an interference fit mode through the pre-tightening wedge block (2.3); the piezoelectric stack (2.2) which is electrified to stretch can enable the flexible straight beam I (2.1.2), the flexible straight beam II (2.1.4), the flexible straight beam III (2.1.6) and the flexible straight beam IV (2.1.9) to generate bending deformation and drive the inertia mass block I (2.1.1) and the inertia mass block II (2.1.5) to move along the positive y direction.
The friction force adjusting device (4) comprises an L-shaped flexible hinge (4.1) and a pre-tightening screw (4.2); the L-shaped flexible hinge (4.1) comprises a fixed end (4.1.1), a friction foot (4.1.2) and a flexible adjusting beam (4.1.3); the L-shaped flexible hinge (4.1) can be fixed on the base (5) through the fixed end (4.1.1); the pre-tightening screw (4.2) is in elastic contact with the flexible adjusting beam (4.1.3) through a threaded hole formed in the base (5); the friction foot (4.1.2) is in surface contact with the guide rail sliding block (3); by adjusting the pre-tightening screw (4.2), the friction force between the friction foot (4.1.2) and the guide rail sliding block (3) can be changed.
Referring to fig. 5, a schematic process diagram of a bionic impact piezoelectric actuator with high output performance provided by the present invention, a complete motion process based on the inertial impact driving principle is summarized as follows, and mainly includes three steps:
the method comprises the following steps: at the time t0, the flexible driving mechanism (2) is in an initial state, and a pre-tightening screw (4.2) in the friction force adjusting device (4) is adjusted to enable the guide rail sliding block (3) to be subjected to proper friction force;
step two: from the moment t0 to the moment t1, when the voltage amplitude is slowly increased, based on the inverse piezoelectric effect, the piezoelectric stack (2.2) gradually extends, the parallel hexagonal flexible hinge (2.1) is stretched, the flexible straight beam I (2.1.2), the flexible straight beam II (2.1.4), the flexible straight beam III (2.1.6) and the flexible straight beam IV (2.1.9) generate bending deformation, and the inertial mass block I (2.1.1) and the inertial mass block II (2.1.5) are driven to move along the positive y direction;
step three: when the voltage amplitude is sharply reduced to 0V from t1 to t2, the piezoelectric stack (2.2) rapidly contracts, the parallel hexagonal flexible hinge (2.1) restores to the initial state, and the inertia mass block I (2.1.1) and the inertia mass block II (2.1.5) generate inertia impact force in the positive y direction at the moment, so that the guide rail sliding block (3) moves in the positive y direction;
stable stepping can be realized by repeating the steps, and different output effects can be obtained by changing the mass of the inertia mass block I (2.1.1) and the mass of the inertia mass block II (2.1.5), adjusting the friction force adjusting device (4) and changing the excitation signal.
Fig. 6 is a speed curve obtained under the conditions that the driving voltage U is 100V and the input frequency f is different, it can be seen that the stable operating frequency bandwidth is significantly improved, and can reach 275Hz, and the corresponding driving speed is 1.218 mm/s.
The above description is not intended to limit the present invention in any way on the structure and shape thereof. Any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention still fall within the scope of the technical solution of the present invention.
Claims (3)
1. A bionic impact piezoelectric driver with high output performance is characterized in that: comprises a load platform (1), a flexible driving mechanism (2), a guide rail, a slide block (3), a friction force adjusting device (4) and a base (5); the load platform (1), the flexible driving mechanism (2), the sliding block (3), the guide rail and the base (5) are arranged from top to bottom; the guide rail and the friction force adjusting device (4) are fixed in the same plane of the base (5) through screws; the slide block moves on the guide rail, and the extending direction of the guide rail departing from the friction force adjusting device (4) is the positive y direction; the flexible driving mechanism (2) is excited by a sawtooth wave electric signal, and the sliding block (3) can move along the y direction according to an impact inertia principle; the compliant driving mechanism (2) comprises a hexagonal flexible hinge (2.1), a piezoelectric stack (2.2) and a pre-tightening wedge block (2.3); the flexible hinge comprises an inertia mass block I (2.1.1), a flexible straight beam I (2.1.2), a fixed beam I (2.1.3), a flexible straight beam II (2.1.4), an inertia mass block II (2.1.5), a flexible straight beam III (2.1.6), a fixed beam II (2.1.7) and a flexible straight beam IV (2.1.9) which are arranged in a clockwise end-to-end manner to form a hexagonal flexible hinge (2.1); the flexible straight beam IV (2.1.9) and the flexible straight beam I (2.1.2) are parallel to each other and respectively extend out of the inertial mass block I (2.1.1), the extending direction and the positive y direction or the negative y direction form an acute angle, and the other end of the flexible straight beam IV and the flexible straight beam I are respectively connected with the fixed beam II (2.1.7) and the fixed beam I (2.1.3); the inertia mass block I (2.1.1), the flexible straight beam I (2.1.2) and the flexible straight beam IV (2.1.9) are symmetrically distributed about an axis formed by a connecting line of the fixed beam I (2.1.3) and the fixed beam II (2.1.7) with the inertia mass block II (2.1.5), the flexible straight beam II (2.1.4) and the flexible straight beam III (2.1.6); mounting holes (2.1.8) for fixing the flexible driving mechanism (2) are formed in the fixed beam I (2.1.3) and the fixed beam II (2.1.7); the piezoelectric stack (2.2) is embedded between the inertial mass block I (2.1.1) and the inertial mass block II (2.1.5) in an interference fit mode through the pre-tightening wedge block (2.3); the piezoelectric stack (2.2) which is electrified to stretch can enable the flexible straight beam I (2.1.2), the flexible straight beam II (2.1.4), the flexible straight beam III (2.1.6) and the flexible straight beam IV (2.1.9) to generate bending deformation and drive the inertia mass block I (2.1.1) and the inertia mass block II (2.1.5) to move along the positive y direction or the negative y direction.
2. The bionic impact piezoelectric actuator with high output performance according to claim 1, wherein: the friction force adjusting device (4) comprises an L-shaped flexible hinge (4.1) and a pre-tightening screw (4.2); the L-shaped flexible hinge (4.1) comprises a fixed end (4.1.1), a friction foot (4.1.2) and a flexible adjusting beam (4.1.3); the L-shaped flexible hinge (4.1) is fixed on the base (5) through the fixed end (4.1.1); the pre-tightening screw (4.2) is in elastic contact with the flexible adjusting beam (4.1.3) through a threaded hole formed in the base (5); the friction foot (4.1.2) is in surface contact with the sliding block (3); the friction force between the friction foot (4.1.2) and the sliding block (3) can be changed by adjusting the pre-tightening screw (4.2).
3. The control method of a bionic impact piezoelectric actuator with high output performance according to claim 1 or 2, characterized in that: the method comprises the following steps:
firstly, before working, a pretightening screw (4.2) in a friction force adjusting device (4) is adjusted to obtain proper friction force with a sliding block (3);
secondly, inputting sawtooth-shaped electric signals to the piezoelectric stack (2.2), when the voltage amplitude is slowly increased, the piezoelectric stack (2.2) is gradually extended, the hexagonal flexible hinge (2.1) is stretched, the flexible straight beam I (2.1.2), the flexible straight beam II (2.1.4), the flexible straight beam III (2.1.6) and the flexible straight beam IV (2.1.9) generate bending deformation, and the inertia mass block I (2.1.1) and the inertia mass block II (2.1.5) are driven to move along the positive y direction or the negative y direction;
when the voltage amplitude is sharply reduced to 0V, the piezoelectric stack (2.2) rapidly contracts, the hexagonal flexible hinge (2.1) rapidly recovers to the initial state, and the inertia mass block I (2.1.1) and the inertia mass block II (2.1.5) generate inertia impact force in the positive y direction or the negative y direction so that the sliding block (3) moves along the positive y direction or the negative y direction;
and fourthly, stable large-stroke motion can be realized by repeating the steps, and different output effects can be obtained by changing the mass of the inertia mass block I (2.1.1) and the mass of the inertia mass block II (2.1.5), adjusting the friction force adjusting device (4) or changing the excitation signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110022136.2A CN112865593B (en) | 2021-01-08 | 2021-01-08 | Bionic impact piezoelectric driver with high output performance and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110022136.2A CN112865593B (en) | 2021-01-08 | 2021-01-08 | Bionic impact piezoelectric driver with high output performance and control method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112865593A CN112865593A (en) | 2021-05-28 |
| CN112865593B true CN112865593B (en) | 2022-04-29 |
Family
ID=76005300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110022136.2A Active CN112865593B (en) | 2021-01-08 | 2021-01-08 | Bionic impact piezoelectric driver with high output performance and control method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112865593B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113258825B (en) * | 2021-05-31 | 2022-05-27 | 吉林大学 | Piezoelectric driver control method based on stick-slip and impact principle coupling |
| CN115021613B (en) * | 2022-06-22 | 2024-09-06 | 吉林大学 | Impact driver with friction asymmetry and inertial mass coupling and coupling driving method |
| CN115085581B (en) * | 2022-07-25 | 2024-06-04 | 山东大学 | Stick-slip driver and method for actively inhibiting rollback movement |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8912707B2 (en) * | 2011-07-13 | 2014-12-16 | Academia Sinica | Friction-driven actuator |
| CN109713934A (en) * | 2019-01-07 | 2019-05-03 | 南京航空航天大学 | A kind of submissive actuating mechanism of creeping |
| CN110370229A (en) * | 2019-07-12 | 2019-10-25 | 佛山科学技术学院 | Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism |
| CN111600505B (en) * | 2020-05-27 | 2021-11-12 | 东华大学 | Load-adjustable large-stepping-amplitude linear piezoelectric motor |
| CN111711381B (en) * | 2020-06-16 | 2021-10-22 | 武汉大学 | Stick-slip piezoelectric driver for realizing bidirectional driving and control method |
-
2021
- 2021-01-08 CN CN202110022136.2A patent/CN112865593B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN112865593A (en) | 2021-05-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112865593B (en) | Bionic impact piezoelectric driver with high output performance and control method thereof | |
| CN109217717B (en) | Device and method for restraining rollback movement of parasitic piezoelectric driver by arc-shaped structure hinge | |
| CN112803829B (en) | Friction asymmetric inertia piezoelectric linear driving device and method | |
| CN111711381B (en) | Stick-slip piezoelectric driver for realizing bidirectional driving and control method | |
| CN111049421A (en) | Piezoelectric linear driving device simulating sliding plate movement design and control method | |
| CN109586611A (en) | A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface | |
| CN110912444B (en) | Bionic creeping type piezoelectric actuator | |
| CN110798094B (en) | Piezoelectric linear precision driving device based on parasitic inertia principle | |
| CN110768571B (en) | Bionic creeping type piezoelectric precision driving device based on parasitic inertia principle | |
| CN112838787A (en) | Stick-slip piezoelectric driver with two-stage amplification mechanism and driving method thereof | |
| CN210490748U (en) | Piezoelectric stick-slip driver based on L-shaped flexible hinge | |
| CN113258825B (en) | Piezoelectric driver control method based on stick-slip and impact principle coupling | |
| CN112865597A (en) | Time-lag effect inertial piezoelectric driver based on flexible hinge | |
| CN214256158U (en) | Stick-slip piezoelectric driver with two-stage amplification mechanism | |
| CN110829882B (en) | T-shaped piezoelectric driving device | |
| CN107124119A (en) | A kind of pair of butterfly stator piezoelectricity straight line driver | |
| CN214506903U (en) | Piezoelectric linear driving device simulating animal tree climbing movement design | |
| CN113938052B (en) | Piezoelectric stick-slip driver based on two-stage lever amplifying mechanism | |
| US7671512B2 (en) | Impact drive actuator | |
| CN113078844B (en) | Device and method for expanding inertia force to improve performance of piezoelectric actuator | |
| CN110855179B (en) | Creeping type piezoelectric precision driving device | |
| CN112886859A (en) | Piezoelectric linear driving device and driving method for simulating animal tree climbing movement design | |
| CN109818524B (en) | Piezoelectric precision driving device and method based on bird wing-shaped bionic flexible mechanism | |
| CN112910310A (en) | Inertial impact type piezoelectric driver capable of carrying large load and driving method thereof | |
| CN110798093B (en) | Linear piezoelectric precision driving platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |