CN113078844B - Device and method for expanding inertia force to improve performance of piezoelectric actuator - Google Patents
Device and method for expanding inertia force to improve performance of piezoelectric actuator Download PDFInfo
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- CN113078844B CN113078844B CN202110430001.XA CN202110430001A CN113078844B CN 113078844 B CN113078844 B CN 113078844B CN 202110430001 A CN202110430001 A CN 202110430001A CN 113078844 B CN113078844 B CN 113078844B
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- 230000005489 elastic deformation Effects 0.000 claims description 9
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Abstract
The invention relates to a device and a method for expanding inertia force to improve the performance of a piezoelectric actuator, and belongs to the field of precision machinery. The device comprises a spiral micrometer head, a base, a guide rail, a motion unit and an inertia force expansion unit. The inertia force expansion unit is fixed at the right end of the motion unit, the motion unit is connected with the guide rail through a screw, and the screw micrometer head and the guide rail are assembled on the base. According to the method, when the piezoelectric stack extends to enable the flexible hinge to extend, the reed is bent by utilizing the magnetic field force generated by reducing the distance between the opposite magnetic poles, so that the inertia force of the driver is distributed to the inertia mass block and the reed, the impact force during inertia impact is increased, and the output characteristic of the driver is improved. Has the advantages that: the impact inertia driver has simple structure and convenient control, can realize infinite stroke theoretically, expands inertia force by combining a magnetic field and a reed, and improves the output performance of the driver. Has wide application prospect in the fields of precision machinery and instruments, precision optics, biomedical engineering and the like.
Description
Technical Field
The invention relates to the field of precision machinery, in particular to a device and a method for expanding inertia force to improve the performance of a piezoelectric actuator. The invention introduces a magnetic field to the impact inertia driver, and the magnetic field can increase the elastic deformation energy of the reed to the inertia force and increase the inertia impact force, thereby improving the output performance of the driver. The method has a wide application prospect in the fields of precision machinery and instruments, precision optics, biomedical engineering and the like which need large-stroke and high-precision output.
Background
The piezoelectric driving device has the remarkable advantages of high output precision, small volume, quick response, electromagnetic interference resistance and the like, and is widely applied to the fields of micromanipulation, micro electro mechanical systems, precision and ultra-precision machining, precision optics and the like. The piezoelectric driving device converts electric energy into mechanical energy by utilizing the inverse piezoelectric effect of a piezoelectric material, and realizes the rotation or linear motion of the driving device by utilizing the mechanical deformation of the piezoelectric material. The impact inertia piezoelectric driver utilizes an asymmetric excitation electric signal, such as a sawtooth waveform, to enable the piezoelectric stack to generate different inertia forces in the processes of extension and contraction, namely the inertia force in the relative static process is smaller than the maximum static friction force, and the inertia force in the relative motion process is larger than the maximum static friction force. The piezoelectric driver utilizing the impact inertia principle has the advantages of simple structure, convenience in processing and assembly, flexibility in control, infinite theoretical stroke and the like, but in an actual experiment, due to the fact that overturning moment and the like influence the output performance of the driver, the phenomena of unstable single-step displacement, low driving speed and the like occur. The invention provides a method, which distributes the total inertia force of impact inertia to an inertia mass block and an inertia force expansion unit, thereby increasing the inertia force, avoiding the problem of overturning moment and achieving the purpose of improving the output performance such as the speed of an impact inertia driver.
Disclosure of Invention
The invention aims to provide a device and a method for expanding inertia force to improve the performance of a piezoelectric actuator, which solve the problem of low driving speed of the existing impact inertia piezoelectric actuator by distributing the inertia force to an inertia mass block and an inertia force expansion unit.
The above object of the present invention is achieved by the following technical solutions:
a device for expanding inertia force to improve the performance of a piezoelectric driver comprises a micrometer caliper head 1, a base 2, a guide rail 3, a motion unit and an inertia force expansion unit; the slide rail of the guide rail 3 is fastened on the base 2 through a screw 4, the micrometer screw head 1 is installed on the base 2 in an interference fit mode, positive pressure between the micrometer screw head 1 and the guide rail 3 is adjusted through rotating a rotating handle of the micrometer screw head 1, friction force borne by the sliding block is adjusted, the moving unit is connected with the guide rail 3 through the screw 4, and the inertia force expanding unit is fixed at the right end of the moving unit.
The motion unit consists of an L-shaped support frame 5, a flexible hinge 6, a piezoelectric stack 7, a wedge-shaped block 8 and an inertia mass block 9; the wedge-shaped block 5 preloads and installs the piezoelectric stack 7 in the groove of the flexible hinge 6; the inertial mass 9 is fastened at the free end of the flexible hinge by a screw 4; the flexible hinge 6 is mounted on the L-shaped support frame 5 by means of screws 4.
The inertia force expansion unit comprises a permanent magnet 10, a permanent magnet pair 11, a reed 14, a fixed block A12 and a fixed block B13; the permanent magnet 10 is adsorbed on the inertia mass block 9 of the motion unit, the permanent magnet pair 11 is adsorbed on two sides of the reed 14, and the permanent magnet 10 and the permanent magnet pair 11 have the same magnetic poles opposite to each other to form a mutual exclusion magnetic field; the spring plate 14 is clamped by a fixing block A12 and a fixing block B13 and fixed by a screw 4.
A method of expanding inertial forces to improve piezoelectric actuator performance, comprising the steps of:
a) finely adjusting a rotating handle of the screw micrometer head (1) and adjusting positive pressure between the rotating handle and the guide rail (3);
b) applying sawtooth waveform driving voltage to the piezoelectric stack 7, wherein in the process of slowly increasing the driving voltage, the piezoelectric stack 7 is slowly extended by the inverse piezoelectric effect, the flexible joint in the flexible hinge 6 is elastically deformed, the free end is linearly extended to drive the inertia mass block 9 to generate horizontal linear displacement, the distance between the permanent magnet 10 and the permanent magnet pair 11 is reduced, the permanent magnet pair 11 generates rightward displacement under the action of a magnetic field force, and the reed 14 is elastically deformed and stores elastic deformation energy;
c) when the driving voltage is rapidly reduced, the piezoelectric stack 7 is rapidly de-energized and rapidly recovers the original length, the flexible hinge 6 and the inertial mass block 9 are rapidly recovered after being deformed, the distance between the permanent magnet 10 and the permanent magnet pair 11 is increased, and the reed 14 releases elastic deformation energy and recovers deformation to form a total inertial force in a concentrated manner; because the inertia force is larger than the friction force borne by the slide block of the guide rail 3, the moving unit moves forwards by a step length under the action of the total inertia force; thus, a complete step cycle is completed, and the continuous step motion of the driver can be realized under the drive voltage of the periodic sawtooth wave.
The amplitude and the frequency of the driving voltage applied to the piezoelectric stack 7 are adjusted, so that the step size and the speed size of the driver can be adjusted; when a reverse periodic sawtooth wave drive voltage is applied to the piezoelectric stack 7, a reverse motion of the driver can be achieved.
The adjustment of the output performance can be realized by changing the size of the magnetic field in the inertial force expansion unit and the size of the reed 14.
The invention has the beneficial effects that: in the impact inertia piezoelectric actuator, the inertia mass is improved, so that the inertia force of the actuator can be increased, the output performance of the actuator is improved, and the impact inertia piezoelectric actuator has important value in the field needing large-stroke high-precision output. The method provided by the invention improves the inertia impact force by expanding the inertia force by using the magnetic field on the basis of ensuring that the ratio of the mass of the inertia mass block to the main inertia mass block is basically unchanged, namely, the inertia mass expanded in structure is separated from the inertia mass block, the load of a corresponding flexible hinge cannot be increased, and the service life of the flexible hinge is prolonged. Compared with the traditional driver which directly increases the inertia mass to improve the output performance, the invention expands the inertia force through the magnetic field, reduces the energy loss and the fatigue failure of the flexible hinge.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic perspective view of a high performance impact inertia piezoelectric actuator of the present invention;
FIG. 2 is a schematic perspective view of a motion unit of the high performance impact inertia piezoelectric actuator of the present invention;
FIG. 3 is a schematic perspective view of an inertial force expansion unit of the high performance impact inertial piezoelectric actuator of the present invention;
FIG. 4 is a schematic diagram of the operation of the inertial force extension unit and the operation of the non-inertial force extension unit of the high performance impact inertial piezoelectric actuator of the present invention;
fig. 5 is a graph comparing step characteristics from experimental testing of a high performance impact inertia piezoelectric actuator of the present invention.
In the figure: 1. a micrometer screw head; 2. a base; 3. a guide rail; 4. a screw; 5. an L-shaped support frame; 6. a flexible hinge; 7. a piezoelectric stack; 8. a wedge block; 9. the inertia mass is fast; 10. a permanent magnet; 11. a pair of permanent magnets; 12. a fixed block A; 13. a fixed block B; 14. a reed.
Detailed Description
The details and embodiments of the present invention are further described below with reference to the accompanying drawings. The drawings and examples are set forth as illustrative only and not as a practical limitation on this patent.
Referring to fig. 1 to 3, a device for expanding an inertia force to improve the performance of a piezoelectric actuator includes a micrometer caliper 1, a base 2, a guide rail 3, a motion unit, and an inertia force expansion unit; the slide rail of the guide rail 3 is fastened on the base 2 through a screw 4, the micrometer screw head 1 is installed on the base 2 in an interference fit mode, positive pressure between the micrometer screw head 1 and the guide rail 3 is adjusted through rotating a rotating handle of the micrometer screw head 1, friction force borne by the sliding block is adjusted, the moving unit is connected with the guide rail 3 through the screw 4, and the inertia force expanding unit is fixed at the right end of the moving unit.
The motion unit consists of an L-shaped support frame 5, a flexible hinge 6, a piezoelectric stack 7, a wedge-shaped block 8 and an inertia mass block 9; the wedge-shaped block 5 preloads and installs the piezoelectric stack 7 in the groove of the flexible hinge 6; the inertial mass 9 is fastened at the free end of the flexible hinge by a screw 4; the flexible hinge 6 is mounted on the L-shaped support frame 5 by means of screws 4.
The inertia force expansion unit comprises a permanent magnet 10, a permanent magnet pair 11, a reed 14, a fixed block A12 and a fixed block B13; the permanent magnet 10 is adsorbed on the inertia mass block 9 of the motion unit, the permanent magnet pair 11 is adsorbed on two sides of the reed 14, and the permanent magnet 10 and the permanent magnet pair 11 have the same magnetic poles opposite to each other to form a mutual exclusion magnetic field; the spring plate 14 is clamped by a fixing block A12 and a fixing block B13 and fixed by a screw 4.
The method for improving the output performance of the invention is to improve the inertia impact force; in an impulse inertia piezoelectric driver, increasing the ratio of the inertial mass to the primary inertial mass increases the output performance of the driver. However, in the conventional design, simply increasing the inertial mass increases the ratio of the inertial mass to the main inertial mass, and there are problems such as energy loss and fatigue failure of the flexible hinge. The method provided by the invention utilizes the magnetic field to expand the inertia force to improve the inertia impact force on the basis of ensuring that the ratio of the mass of the inertia mass block to the main inertia mass block is basically unchanged, thereby improving the output performance of the driver.
Referring to fig. 4, a method of expanding inertial forces to improve piezoelectric actuator performance includes the steps of:
a) finely adjusting a rotating handle of the screw micrometer head (1) and adjusting positive pressure between the rotating handle and the guide rail (3);
b) applying sawtooth waveform driving voltage to the piezoelectric stack 7, wherein in the process of slowly increasing the driving voltage, the piezoelectric stack 7 is slowly extended by the inverse piezoelectric effect, the flexible joint in the flexible hinge 6 is elastically deformed, the free end is linearly extended to drive the inertia mass block 9 to generate horizontal linear displacement, the distance between the permanent magnet 10 and the permanent magnet pair 11 is reduced, the permanent magnet pair 11 generates rightward displacement under the action of a magnetic field force, and the reed 14 is elastically deformed and stores elastic deformation energy;
c) when the driving voltage is rapidly reduced, the piezoelectric stack 7 is rapidly de-energized and rapidly recovers the original length, the flexible hinge 6 and the inertial mass block 9 are rapidly recovered after being deformed, the distance between the permanent magnet 10 and the permanent magnet pair 11 is increased, and the reed 14 releases elastic deformation energy and recovers deformation to form a total inertial force in a concentrated manner; because the inertia force is larger than the friction force borne by the slide block of the guide rail 3, the moving unit moves forwards by a step length under the action of the total inertia force; thus, a complete step cycle is completed, and the continuous step motion of the driver can be realized under the drive voltage of the periodic sawtooth wave.
The amplitude and the frequency of the driving voltage applied to the piezoelectric stack 7 are adjusted, so that the step size and the speed size of the driver can be adjusted; when a reverse periodic sawtooth wave drive voltage is applied to the piezoelectric stack 7, a reverse motion of the driver can be achieved.
The adjustment of the output performance can be realized by changing the size of the magnetic field in the inertial force expansion unit and the size of the reed 14.
Referring to the working schematic diagram of the inertial force expansion unit and the working schematic diagram of the inertial force expansion unit shown in fig. 4, under the same driving condition, the inertial mass generates the same displacement Δ x 1; the piezoelectric stack loses power, the driver is stepped forwards, the driver step delta S1 of the inertia force expansion unit is absent, the driver step delta S2 of the inertia force expansion unit is present, and the output performance of the driver is improved by increasing the inertia force expansion unit because delta S2 is larger than delta S1 under the action of elastic deformation energy.
Example 1
The driver movement unit is assembled as shown in fig. 2, with the following steps:
the piezoelectric stack 7 is pre-tightened in the groove of the flexible hinge 6 by a wedge-shaped block 8;
the inertial mass 9 is fastened at the free end of the flexible hinge by a screw 4;
the flexible hinge is mounted on an L-shaped support frame 5 with screws 4.
The inertial force extension unit is assembled as shown in fig. 3, and the steps are as follows:
the permanent magnet pair 11 is adsorbed on two sides of the reed 14; the permanent magnet 10 and the permanent magnet pair 11 are required to form mutually exclusive magnetic fields in opposite directions with the same magnetic pole;
the spring plate 14 is clamped by a fixing block A12 and a fixing block B13 and is fastened by a screw 4.
Example 2
The movement unit was mounted as in the embodiment of example 1;
installing the spiral micrometer head 1 on the base 2 in an interference fit manner;
the slide rail of the guide rail 3 is arranged on the base by a screw 4;
fixing the moving unit on the slide block of the guide rail 3 by using a screw 4;
the rotating handle of the spiral micrometer head 1 is rotated to adjust the positive pressure between the spiral micrometer head and the guide rail 3, so that the friction force applied to the slide block of the guide rail 3 is adjusted. The reasonable pre-tightening force and the contact condition guarantee that the piezoelectric actuator can work normally.
Example 3
Installing the inertial force development unit according to the implementation mode in the embodiment 1;
the driver of the inertial force development free unit was installed as in the embodiment of example 2;
adsorbing a permanent magnet 10 on an inertia mass block 9 of the driver;
fixing the inertia force expansion unit on an L-shaped support frame 5 of the motion unit by using a screw 4; it is required to ensure the heights of the permanent magnet 10 and the permanent magnet pair 11 to be consistent, and to avoid the generation of torsional force.
Example 4
The driver of the inertial force development free unit was installed as in the embodiment of example 2;
installing a driver with an inertial force extension unit according to the embodiment in the embodiment 3;
under the same driving conditions of 60V and 500Hz, sawtooth waveform driving voltages with 100 percent and 0 of symmetry are respectively input into a driver without an inertial force expansion unit and a driver with the inertial force expansion unit, and the drivers realize stepping under the action of inertial impact;
referring to fig. 5, the actual displacement output curve of the driver of the present invention is shown under the conditions of 60V voltage and 500Hz frequency. It is evident from the comparison that: the forward motion and the reverse motion are both step displacement of the driver with the inertia force expansion unit is obviously larger than that of the driver without the inertia force expansion unit, and the motion speed is obviously higher. Therefore, the movement speed of the impact inertia driver can be obviously improved by adding the inertia force expansion unit.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.
Claims (3)
1. An apparatus for expanding inertial force to improve performance of a piezoelectric actuator, comprising: the piezoelectric driver comprises a spiral micrometer head (1), a base (2), a guide rail (3), a motion unit and an inertia force expansion unit; the sliding rail of the guide rail (3) is fastened on the base (2) through a screw (4), the micrometer screw head (1) is installed on the base (2) in an interference fit mode, positive pressure between the sliding rail and a sliding block of the guide rail (3) is adjusted by rotating a rotating handle of the micrometer screw head (1), friction force borne by the sliding block is further adjusted, the moving unit is connected with the sliding block of the guide rail (3) through the screw (4), and the inertia force expansion unit is fixed at the right end of the moving unit;
the motion unit consists of an L-shaped support frame (5), a flexible hinge (6), a piezoelectric stack (7), a wedge-shaped block (8) and an inertia mass block (9); the piezoelectric stack (7) is preloaded and installed in the groove of the flexible hinge (6) by the wedge-shaped block (8); the inertial mass (9) is fastened at the free end of the flexible hinge by a screw (4); the flexible hinge (6) is arranged on the vertical side of the L-shaped support frame (5) through a screw (4); the horizontal edge of the L-shaped support frame (5) is connected with a slide block of the guide rail (3) by a screw (4);
the inertia force expansion unit comprises a permanent magnet (10), a permanent magnet pair (11), a reed (14), a fixed block A (12) and a fixed block B (13); the permanent magnet (10) is adsorbed on an inertia mass block (9) of the motion unit, the permanent magnet pair (11) is adsorbed on two sides of the reed (14), and the permanent magnet (10) and the permanent magnet pair (11) are opposite to each other in the same magnetic pole to form mutually exclusive magnetic field acting force; the reed (14) is clamped by the fixing block A (12) and the fixing block B (13) and is fixed on the horizontal side of the L-shaped support frame (5) by the screw (4).
2. A driving method of the apparatus for expanding inertial force to improve performance of a piezoelectric actuator according to claim 1, wherein: the inertia force of the inertia mass block (9) and the elastic deformation restoring force of the reed (14) simultaneously act on the motion unit, so that the motion unit is stepped forwards; the reed (14) is deformed by the acting force of the mutual repulsion magnetic field as a mode of expanding the inertia force, and the displacement output is increased to improve the output performance of the driver; the method specifically comprises the following steps:
a) finely adjusting a rotating handle of the screw micrometer head (1) and adjusting positive pressure between the slide rail and the guide rail (3);
b) applying sawtooth waveform driving voltage to the piezoelectric stack (7), wherein in the process of slowly increasing the driving voltage, the piezoelectric stack (7) is slowly extended by the inverse piezoelectric effect, the flexible joint in the flexible hinge (6) elastically deforms, the free end linearly extends to drive the inertia mass block (9) to horizontally linearly displace, the distance between the permanent magnet (10) and the permanent magnet pair (11) is reduced, the permanent magnet pair (11) generates rightward displacement under the action of mutually exclusive magnetic field acting force, and the reed (14) elastically deforms and stores elastic deformation energy due to the action of a magnetic field acting force on the upper end;
c) when the driving voltage is rapidly reduced, the piezoelectric stack (7) is rapidly de-energized and rapidly recovers to the original length, the flexible hinge (6) and the inertia mass block (9) are rapidly recovered, the distance between the permanent magnet (10) and the permanent magnet pair (11) is increased, and the reed (14) releases elastic deformation energy and recovers to deform to form a total inertia force in a concentrated manner; because the inertia force is larger than the friction force borne by the sliding block of the guide rail (3), the moving unit moves forwards by one step length under the action of the total inertia force; and completing a complete stepping period, and realizing continuous stepping motion of the driver under the drive voltage of the periodic sawtooth wave.
3. The driving method of a device for expanding inertial force to improve performance of a piezoelectric actuator as claimed in claim 2, wherein: the adjustment of the output performance can be realized by changing the size of the magnetic field in the inertia force expansion unit and the size of the reed (14).
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| TWI237618B (en) * | 2004-06-03 | 2005-08-11 | Ind Tech Res Inst | A long-distance nanometer positioning apparatus |
| CN102005964B (en) * | 2010-12-29 | 2012-10-24 | 南昌工程学院 | Magnetostriction type inertial impact micro linear motor |
| NL1038896C2 (en) * | 2011-06-24 | 2013-01-02 | Janssen Prec Engineering B V | Inertial drive system with friction release. |
| CN202586802U (en) * | 2012-05-07 | 2012-12-05 | 浙江师范大学 | Magnetic piezoelectric mixing action rotating driver |
| CN103391023A (en) * | 2013-07-25 | 2013-11-13 | 苏州大学 | Stick-slip driving cross-scale precise motion platform |
| CN104362890B (en) * | 2014-12-01 | 2017-01-18 | 苏州大学 | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement |
| CN105071687B (en) * | 2015-08-24 | 2017-03-08 | 苏州大学张家港工业技术研究院 | The stick-slip with sidepiece frictional force guiding mechanism drives across yardstick precisely locating platform |
| CN205490229U (en) * | 2016-01-07 | 2016-08-17 | 浙江师范大学 | Formula of bearing becomes asymmetric magnetic pressure electrical inertia rotary actuator of frictional force |
| CN107061605B (en) * | 2017-03-31 | 2019-10-22 | 南京航空航天大学 | The inertia forcer of piezoelectric stack actuator driving |
| CN108092546B (en) * | 2018-01-11 | 2018-11-23 | 西安交通大学 | A kind of large displacement piezoelectric actuator and actuation method based on bistable state beam |
| CN208782740U (en) * | 2018-07-17 | 2019-04-23 | 浙江师范大学 | A kind of asymmetric piezoelectricity straight line driver of plow-shape structure |
| CN109083590B (en) * | 2018-07-25 | 2020-02-21 | 哈尔滨工业大学 | Free mass block inverted impact type ultrasonic drilling device |
| CN109039149B (en) * | 2018-09-10 | 2019-12-03 | 合肥工业大学 | A kind of inertia Linear piezoelectric motor |
| CN112383241B (en) * | 2020-11-30 | 2024-02-02 | 扬州国翱智能机械有限公司 | Bidirectional inertia linear piezoelectric motor |
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