CN113078845B - Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof - Google Patents
Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
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Abstract
The invention relates to an asymmetric flexible hinge piezoelectric rotary positioning platform and a driving method thereof. The positioning platform comprises a base unit, a driving unit and a rotor. The driving unit comprises an asymmetric flexible hinge mechanism and a piezoelectric stack, the asymmetric flexible hinge mechanism is fixedly installed on a manual precise translation table of the basic unit through screws, and the rotor is installed on a central shaft of the basic unit in an interference fit mode. The driving method of the device comprises the following steps: when a continuous trapezoidal signal is applied to the piezoelectric stack, the asymmetric flexible hinge mechanism has different deformation of the left clamping arm and the right clamping arm due to asymmetric structure, and generates counterclockwise micro rotation around the semicircular flexible link to drive the rotor to realize rotary stepping motion. Has the advantages that: the structure is simple, the cost is low, the assembly and the control are convenient, and the output performance of stability, two-way, large stroke, high speed and high load is realized. Has good application prospect in the fields of precision machining, optics, precision instruments, micro-operation, micro-assembly and the like.
Description
Technical Field
The invention relates to the field of precision instruments, in particular to an asymmetric flexible hinge piezoelectric rotary positioning platform and a method.
Background
Precision driving devices have been applied to many fields such as science and industry, piezoelectric actuators have become research hotspots in recent years due to their characteristics of high precision, simple structure, fast response, easy control, etc., and researchers in various countries also design and develop piezoelectric driving devices with various structures and functions. Although most of the rotary drive apparatuses at present can achieve high-precision and high-speed output, their structures are relatively complicated. For example, in the literature (Novel inert piezoelectric actuator with high precision and stability based on a two-dimensional fixed-end beam structure, Smart Materials and Structures, 2019, 28015030), a piezoelectric bimorph rotary positioning platform is designed by using an asymmetric clamping mechanism, which can realize high-precision and high-stability movement, but has a complex structure, high requirements on processing and assembling precision, large retraction movement and low driving efficiency. An inchworm-type piezoelectric rotation driving device is reported in the literature (apex-drive rotation reactors by means of networks of inchworm motion, Sensors and Actuators A: physics, 2013, 194, 269-276), and although the device has the characteristics of high speed and high precision, the design structure and the assembly are complex. In conclusion, the piezoelectric rotary positioning platform which is developed by utilizing the structural asymmetry principle and has a simple and compact structure is not reported at present, so that the development of the piezoelectric rotary platform with the asymmetric flexible hinge can promote the application of the asymmetry principle in the design of the piezoelectric positioning platform, and a new thought is provided for the design of a piezoelectric driver.
Disclosure of Invention
The invention aims to provide an asymmetric flexible hinge piezoelectric rotary positioning platform and a method, which solve the problems in the prior art. According to the invention, by utilizing the asymmetric structure of the driving unit, in the driving process, the left clamping arm and the right clamping arm generate anticlockwise micro-rotation around the semicircular flexible link I, the right clamping arm drives the rotor to rotate anticlockwise under the action of friction force, and the reverse motion of the device can be realized by changing the symmetry of the driving waveform; the output performance can be adjusted by the clearance between the manual fine-adjustment driving unit of the precise translation stage and the rotor; the piezoelectric rotary positioning platform has the characteristics of simple and compact structure, easiness in processing and assembling, simplicity in control and low cost, and can realize stable, bidirectional, large-stroke and high-speed rotary motion.
The above object of the present invention is achieved by the following technical solutions:
asymmetric flexible hinge piezoelectricity rotational positioning platform, its characterized in that: comprises a base unit 1, a driving unit 2 and a rotor 3; the driving unit 2 is arranged on a manual precision translation table 1-3 of the base unit 1 through a screw; the rotor 3 adopts a deep groove ball bearing, and the inner ring of the rotor is arranged on a central shaft 1-1 of the base unit 1 in an interference fit manner.
The basic unit 1 consists of a central shaft 1-1, a base 1-2 and a manual precision translation table 1-3; the manual precision translation stage 1-3 is installed on the base 1-2 through screws and used for adjusting a contact gap between the driving unit 2 and the rotor 3.
The driving unit 2 comprises an asymmetric flexible hinge mechanism 2-1 and a piezoelectric stack 2-2; the asymmetric flexible hinge mechanism 2-1 consists of a left clamping arm 2-1-1, a semicircular flexible link II 2-1-2, a semicircular flexible link I2-1-3, a right clamping arm 2-1-4 and a parallel guide hinge 2-1-5; the piezoelectric stack 2-2 is arranged in a groove of the asymmetric flexible hinge mechanism 2-1 in an interference fit mode.
Another object of the present invention is to provide a method for controlling an asymmetric flexible hinge piezoelectric rotary positioning platform, comprising the following steps:
a) after the whole machine is assembled, firstly, adjusting a manual precision translation table 1-3 to enable a left clamping arm 2-1-1 and a right clamping arm 2-1-4 of an asymmetric flexible hinge mechanism 2-1 to gradually approach the outer ring surface of a rotor 3; the contact clearance between the asymmetric flexible hinge mechanism 2-1 and the rotor 3 is an important parameter influencing the output performance of the positioning platform, and can be adjusted by adjusting the manual precision translation stage 1-3 according to the actual application requirements, and if high-speed movement is required, a larger clearance can be set; if high output torque is required, the contact clearance can be reduced;
b) trapezoidal wave driving voltage is applied to the piezoelectric stack 2-2, and the piezoelectric stack 2-2 slowly extends under the action of the inverse piezoelectric effect; in the process, the piezoelectric stack 2-2 gradually pushes the asymmetric flexible hinge mechanism 2-1 to enable the parallel guide hinge 2-1-5 to generate elastic deformation, and drives the semicircular flexible link I2-1-3 to generate linear motion firstly, so that the asymmetric flexible hinge mechanism 2-1 gradually clamps the rotor 3; because the semicircular flexible link II 2-1-2 exists in the left clamping arm 2-1-1, the rigidity of the semicircular flexible link II is smaller than that of the right clamping arm 2-1-4, the left clamping arm 2-1-1 is subjected to bending deformation along with further increase of the driving voltage, so that the left clamping arm 2-1-1 and the right clamping arm 2-1-4 are subjected to deformation asymmetry, and further the left clamping arm 2-1-1 and the right clamping arm 2-1-4 integrally generate counterclockwise micro rotation around the semicircular flexible link I2-1-3, and the elastic deformation finally realizes that the right clamping arm 2-1-4 drives the rotor 3 to realize counterclockwise rotation; then, the driving voltage is kept in a high-voltage state for a period of time and then rapidly drops to zero, and the asymmetric flexible hinge mechanism 2-1 and the piezoelectric stack 2-2 rapidly return to the initial state to prepare for the next driving cycle;
c) if clockwise rotation is to be achieved, the control voltage applied to the piezoelectric stack 2-2 in the step b) is changed into a reverse trapezoidal wave driving voltage, and then the step b) is repeated; when the contact gap is fixed, the rotating speed of the rotor 3 can be regulated and controlled by adjusting the amplitude and the frequency of the driving voltage of the piezoelectric stack 2-2.
The invention has the beneficial effects that: the structure is simple and compact, the processing and the assembly are convenient, the control is simple, and the high-speed rotation of the rotor can be realized only by utilizing the asymmetric structure of the driving unit and the semicircular flexible link I; the adjustment of the platform output characteristic can be realized by adjusting the gap between the driving unit and the rotor; at a drive voltage of 80 volts and a frequency of 8 hertz, the drive speed exceeded 2500 micro radians/second. The positioning platform has wide application range and strong practicability, and has good application prospect in important scientific engineering fields such as precision machining, micro-clamping, micro-operation and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of an asymmetric flexible hinge mechanism with a piezoelectric stack according to the present invention;
FIG. 3 is a schematic diagram of the deformation of the asymmetric flexible hinge mechanism of the present invention under the displacement output of the piezoelectric element;
FIG. 4 is a schematic diagram of the counterclockwise driving voltage of the present invention;
FIG. 5 is a schematic diagram of the clockwise driving voltage of the present invention;
FIG. 6 is an actual motion output curve of the positioning platform of the present invention measured at different driving frequencies with driving voltage amplitude of 80V;
FIG. 7 is a graph showing the actual motion output curve of the positioning stage of the present invention at a driving frequency of 10 Hz and different driving voltage amplitudes.
In the figure: 1. a base unit; 1-1, a central shaft; 1-2, a base; 1-3, a manual precision translation stage; 2. a drive unit; 2-1, an asymmetric flexible hinge mechanism; 2-1-1, a left clamping arm; 2-1-2, a semicircular flexible link II; 2-1-3, a semicircular flexible link I; 2-1-4, a right clamping arm; 2-1-5, parallel guide hinges; 2-2, piezoelectric stack; 3. and a rotor.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1, the asymmetric flexible hinge piezoelectric rotary positioning platform of the present invention is characterized in that: comprises a base unit 1, a driving unit 2 and a rotor 3; the driving unit 2 is arranged on a manual precision translation table 1-3 of the base unit 1 through a screw; the rotor 3 adopts a deep groove ball bearing, and the inner ring of the rotor is arranged on a central shaft 1-1 of the base unit 1 in an interference fit manner.
Referring to fig. 1, the base unit 1 is composed of a central shaft 1-1, a base 1-2 and a manual precision translation stage 1-3; the manual precision translation stage 1-3 is installed on the base 1-2 through screws and used for adjusting a contact gap between the driving unit 2 and the rotor 3.
Referring to fig. 1 and 2, the driving unit 2 includes an asymmetric flexible hinge mechanism 2-1 and a piezoelectric stack 2-2; the asymmetric flexible hinge mechanism 2-1 consists of a left clamping arm 2-1-1, a semicircular flexible link II 2-1-2, a semicircular flexible link I2-1-3, a right clamping arm 2-1-4 and a parallel guide hinge 2-1-5; the piezoelectric stack 2-2 is arranged in a groove of the asymmetric flexible hinge mechanism 2-1 in an interference fit mode.
Referring to fig. 1 to 5, a method for controlling an asymmetric flexible hinge piezoelectric rotary positioning platform is specifically described, which includes the following steps:
a) after the whole machine is assembled, firstly, adjusting a manual precision translation table 1-3 to enable a left clamping arm 2-1-1 and a right clamping arm 2-1-4 of an asymmetric flexible hinge mechanism 2-1 to gradually approach the outer ring surface of a rotor 3; the contact clearance between the asymmetric flexible hinge mechanism 2-1 and the rotor 3 is an important parameter influencing the output performance of the positioning platform, and can be adjusted by adjusting the manual precision translation stage 1-3 according to the actual application requirements, and if high-speed movement is required, a larger clearance can be set; if high output torque is required, the contact clearance can be reduced;
b) trapezoidal wave driving voltage is applied to the piezoelectric stack 2-2, and the piezoelectric stack 2-2 slowly extends under the action of the inverse piezoelectric effect; in the process, the piezoelectric stack 2-2 gradually pushes the asymmetric flexible hinge mechanism 2-1 to enable the parallel guide hinge 2-1-5 to generate elastic deformation, and drives the semicircular flexible link I2-1-3 to generate linear motion firstly, so that the asymmetric flexible hinge mechanism 2-1 gradually clamps the rotor 3; because the semicircular flexible link II 2-1-2 exists in the left clamping arm 2-1-1, the rigidity of the semicircular flexible link II is smaller than that of the right clamping arm 2-1-4, the left clamping arm 2-1-1 is subjected to bending deformation along with further increase of the driving voltage, so that the left clamping arm 2-1-1 and the right clamping arm 2-1-4 are subjected to deformation asymmetry, and further the left clamping arm 2-1-1 and the right clamping arm 2-1-4 integrally generate counterclockwise micro rotation around the semicircular flexible link I2-1-3, and the elastic deformation finally realizes that the right clamping arm 2-1-4 drives the rotor 3 to realize counterclockwise rotation; then, the driving voltage is kept in a high-voltage state for a period of time and then rapidly drops to zero, and the asymmetric flexible hinge mechanism 2-1 and the piezoelectric stack 2-2 rapidly return to the initial state to prepare for the next driving cycle;
c) if clockwise rotation is to be achieved, the control voltage applied to the piezoelectric stack 2-2 in the step b) is changed into a reverse trapezoidal wave driving voltage, and then the step b) is repeated; when the contact gap is fixed, the rotating speed of the rotor 3 can be regulated and controlled by adjusting the amplitude and the frequency of the driving voltage of the piezoelectric stack 2-2.
Referring to fig. 6, it shows the actual motion output curve of the present invention measured at different driving voltage frequencies with the driving voltage amplitude of 80 v. FIG. 7 is an actual motion output curve of the present invention measured at a drive frequency of 10 Hz and at different drive voltage amplitudes. At a drive voltage of 80 volts and a frequency of 8 hertz, the drive speed exceeded 2500 micro radians/second.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.
Claims (2)
1. The utility model provides an asymmetric flexible hinge piezoelectricity rotational positioning platform which characterized in that: the rotary positioning platform comprises a base unit (1), a driving unit (2) and a rotor (3); the basic unit (1) consists of a central shaft (1-1), a base (1-2) and a manual precision translation table (1-3); the manual precision translation table (1-3) is used for adjusting a contact gap between the driving unit (2) and the rotor (3); the driving unit (2) comprises an asymmetric flexible hinge mechanism (2-1) and a piezoelectric stack (2-2); the asymmetric flexible hinge mechanism (2-1) consists of a left clamping arm (2-1-1), a semicircular flexible link II (2-1-2), a semicircular flexible link I (2-1-3), a right clamping arm (2-1-4) and a parallel guide hinge (2-1-5); the left clamping arm (2-1-1) is arranged at the left upper end of the asymmetric flexible hinge mechanism (2-1), the semicircular flexible link II (2-1-2) is arranged at the root part of the left clamping arm (2-1-1), and the right clamping arm (2-1-4) is arranged at the right upper end of the asymmetric flexible hinge mechanism (2-1); the upper end and the lower end of the semicircular flexible link I (2-1-3) are respectively connected with a left clamping arm, a right clamping arm and a parallel guide hinge (2-1-5); the piezoelectric stack (2-2) is arranged in the groove of the asymmetric flexible hinge mechanism (2-1) in an interference fit manner; the rotor (3) adopts a deep groove ball bearing, and the inner ring of the deep groove ball bearing is arranged on the central shaft (1-1) in an interference fit mode.
2. The driving method of the asymmetric flexible hinge piezoelectric rotary positioning platform based on claim 1 is characterized in that: the method comprises the following steps:
a) after the whole machine is assembled, firstly, adjusting a manual precision translation table (1-3) to enable a left clamping arm (2-1-1) and a right clamping arm (2-1-4) of an asymmetric flexible hinge mechanism (2-1) to gradually approach the outer ring surface of a rotor (3); the contact clearance between the asymmetric flexible hinge mechanism (2-1) and the rotor (3) is an important parameter influencing the output performance of the positioning platform, and can be adjusted by adjusting the manual precision translation stage (1-3) according to the actual application requirements, and if high-speed motion is required, a larger clearance can be set; if high output torque is required, the contact clearance can be reduced;
b) trapezoidal wave driving voltage is applied to the piezoelectric stack (2-2), and the piezoelectric stack (2-2) slowly extends under the action of the inverse piezoelectric effect; in the process, the piezoelectric stack (2-2) gradually pushes the asymmetric flexible hinge mechanism (2-1) to enable the parallel guide hinge (2-1-5) to generate elastic deformation and drive the semicircular flexible link I (2-1-3) to generate linear motion, so that the asymmetric flexible hinge mechanism (2-1) gradually clamps the rotor (3); because the semicircular flexible link II (2-1-2) exists in the left clamping arm (2-1-1), the rigidity of the semicircular flexible link II is smaller than that of the right clamping arm (2-1-4), the left clamping arm (2-1-1) is subjected to bending deformation along with further increase of driving voltage, so that the left clamping arm and the right clamping arm are subjected to deformation asymmetry, the left clamping arm (2-1-1) and the right clamping arm (2-1-4) integrally rotate anticlockwise slightly around the semicircular flexible link I (2-1-3), and the right clamping arm (2-1-4) drives the rotor (3) to rotate anticlockwise through elastic deformation; then, the driving voltage is kept in a high-voltage state for a period of time and then rapidly drops to zero, and the asymmetric flexible hinge mechanism (2-1) and the piezoelectric stack (2-2) rapidly return to an initial state to prepare for the next driving cycle;
c) if clockwise rotation motion is to be realized, the control voltage applied to the piezoelectric stack (2-2) in the step b) is changed into reverse trapezoidal wave driving voltage, and then the step b) is repeated; when the contact gap is constant, the rotating speed of the rotor (3) can be regulated and controlled by adjusting the amplitude and the frequency of the driving voltage of the piezoelectric stack (2-2).
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105897042A (en) * | 2016-06-06 | 2016-08-24 | 长春工业大学 | Asymmetrical diamond-shaped hinge quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof |
| CN205889188U (en) * | 2016-08-10 | 2017-01-18 | 陕西理工大学 | Connecting rod formula translation mechanism |
| CN107070300A (en) * | 2017-04-27 | 2017-08-18 | 西安交通大学 | A kind of double piezoelectric pile angular displacement actuator and method with clamper function |
| CN209313746U (en) * | 2019-01-23 | 2019-08-27 | 吉林大学 | A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface |
| CN110855181A (en) * | 2019-04-08 | 2020-02-28 | 浙江师范大学 | Rotation type piezoelectric drive device based on asymmetric triangle the hinge mechanism |
| CN111162692A (en) * | 2020-01-08 | 2020-05-15 | 浙江师范大学 | Clamp type piezoelectric driving platform and excitation method thereof |
| CN111384872A (en) * | 2020-01-08 | 2020-07-07 | 浙江师范大学 | Rotary driving platform and control method thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110912448B (en) * | 2019-04-08 | 2023-07-28 | 浙江师范大学 | Piezoelectric driving platform based on asymmetric triangle flexible hinge mechanism |
| CN110774260A (en) * | 2019-04-08 | 2020-02-11 | 浙江师范大学 | Ultra-precise piezoelectric micro-clamping manipulator |
-
2021
- 2021-04-27 CN CN202110459507.3A patent/CN113078845B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105897042A (en) * | 2016-06-06 | 2016-08-24 | 长春工业大学 | Asymmetrical diamond-shaped hinge quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof |
| CN205889188U (en) * | 2016-08-10 | 2017-01-18 | 陕西理工大学 | Connecting rod formula translation mechanism |
| CN107070300A (en) * | 2017-04-27 | 2017-08-18 | 西安交通大学 | A kind of double piezoelectric pile angular displacement actuator and method with clamper function |
| CN209313746U (en) * | 2019-01-23 | 2019-08-27 | 吉林大学 | A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface |
| CN110855181A (en) * | 2019-04-08 | 2020-02-28 | 浙江师范大学 | Rotation type piezoelectric drive device based on asymmetric triangle the hinge mechanism |
| CN111162692A (en) * | 2020-01-08 | 2020-05-15 | 浙江师范大学 | Clamp type piezoelectric driving platform and excitation method thereof |
| CN111384872A (en) * | 2020-01-08 | 2020-07-07 | 浙江师范大学 | Rotary driving platform and control method thereof |
Non-Patent Citations (2)
| Title |
|---|
| Development and analysis of a stick-slip rotary piezoelectric positioner achieving high velocity with compact structure;Jiru Wang 等;《Mechanical Systems and Signal Processing》;20200428;第1-14页 * |
| 等腰梯形压电黏滑直线驱动器设计与试验研究;董景石 等;《西安交通大学学报》;20190430;第51-57页 * |
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