CN111384872A - Rotary driving platform and control method thereof - Google Patents
Rotary driving platform and control method thereof Download PDFInfo
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- CN111384872A CN111384872A CN202010049898.7A CN202010049898A CN111384872A CN 111384872 A CN111384872 A CN 111384872A CN 202010049898 A CN202010049898 A CN 202010049898A CN 111384872 A CN111384872 A CN 111384872A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
Abstract
The invention belongs to the field of precision driving, and particularly relates to a rotary driving platform and a control method thereof. The inchworm type piezoelectric driving platform solves the technical problems of complex structure and difficult control of the inchworm type piezoelectric driving platform. The rotary driving platform comprises a driving unit, a clamping unit, a rotor, a screw and a base; the driving unit and the clamping unit are installed on the base through screws; the rotary driving platform enables the driving unit and the clamping unit to work alternately and cooperatively through the time sequence control of the voltage signal, can realize large-stroke high-precision rotary motion, and can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro-operation robots, biotechnology, aerospace and the like.
Description
Technical Field
The invention relates to a micro-nano precise driving platform, in particular to a rotary driving platform and a control method thereof.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, intelligent robots, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving platform. The traditional driving platform has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving platform. The piezoelectric driving platform has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. The inchworm piezoelectric driving platform can ensure higher output precision and bearing capacity while obtaining larger output stroke, and is widely concerned by researchers. The inchworm-type driving platform generally needs two clamping units and one driving unit, and the multi-path time sequence control has the problems of complex structure and difficult control, and is not beneficial to the practical application of inchworm-type piezoelectric driving. Therefore, there is a need for an inchworm-type piezoelectric driving platform with simplified structure and control.
Disclosure of Invention
The present invention is directed to a rotary driving platform and a control method thereof, which solve the above problems of the prior art. The invention uses a group of driving units and a group of clamping units to work cooperatively through signal control, realizes large-stroke rotary driving, and can effectively simplify the structure and control of the platform.
The above object of the present invention is achieved by the following technical solutions:
a rotary driving platform comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are installed on the base through the screw; the rotary driving platform enables the driving unit and the clamping unit to work cooperatively through sequential control, and drives the rotor to rotate.
The driving unit comprises three piezoelectric stacks, a flexible hinge mechanism and three pre-tightening wedges; the three piezoelectric stacks are arranged in the flexible hinge mechanism, two piezoelectric stacks are arranged along the x direction, and the other piezoelectric stack is arranged along the y direction and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises six thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped convex part at the top is in contact with the rotor, one piezoelectric stack arranged along the y direction and any one piezoelectric stack arranged along the x direction are electrically extended at the same time, and the arc-shaped convex part can be pushed to tightly prop against the rotor and drive the rotor to rotate.
The clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped bulge part is in contact with the rotor, and the arc-shaped bulge part can be pushed to prop against the rotor to realize clamping by the electric extension of the piezoelectric stack.
A method of controlling a rotary drive platform, comprising the steps of:
①, in the initial state, adjusting screws are used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor, two groups of voltage signals are used for respectively controlling the driving unit and the clamping unit, and the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
②, the driving unit drives the rotor to rotate;
③, clamping the rotor by a clamping unit;
④, restoring the drive unit to initial state;
⑤, restoring the clamp unit to the initial state and ending a motion period;
and ⑥, repeating the above steps, and alternately operating the driving unit and the clamping unit, wherein the driving platform can realize large-stroke high-precision rotary motion.
The main advantages of the invention are: the group of driving units and the group of clamping units work alternately and cooperatively through time sequence control, and the structure and the control of the platform can be effectively simplified while micro-nano large-stroke rotary motion is realized. The platform can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a schematic view of the flexible hinge mechanism of the drive unit of the present invention;
FIG. 3 is a schematic view of the clamping unit flexible hinge mechanism of the present invention;
fig. 4 shows voltage signals applied to the piezoelectric stacks II and III of the driving unit and the piezoelectric stacks I of the clamping unit.
In the figure:
1. a clamping unit; 2, a rotor; a drive unit;
4. a base; 5, a screw; 1-1, piezoelectric stack I;
1-2, pre-tightening a wedge block I; 1-3, a flexible hinge mechanism I; 3-1, a flexible hinge mechanism II;
3-2, pre-tightening the wedge block II; 3-3, piezoelectric stack II; 3-4, pre-tightening the wedge block III;
3-5, piezoelectric stack III; 3-6, piezoelectric stack IV; 3-7, pre-tightening the wedge block IV;
3-1-1. thin wall flexible hinge; 1-3-1. thin wall flexible hinge.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, a rotary driving platform mainly comprises a driving unit (3), a clamping unit (1), a rotor (2), a screw (5) and a base (4), wherein the driving unit (3) and the clamping unit (1) are installed on the base (4) through the screw (5); the rotary driving platform enables the driving unit (3) and the clamping unit (1) to work cooperatively through time sequence control, and drives the rotor (2) to rotate.
The driving unit (3) comprises a flexible hinge mechanism II (3-1), a pre-tightening wedge II (3-2), a piezoelectric stack II (3-3), a pre-tightening wedge III (3-4), a piezoelectric stack III (3-5), a piezoelectric stack IV (3-6) and a pre-tightening wedge IV (3-7); the piezoelectric stack II (3-3), the piezoelectric stack III (3-5) and the piezoelectric stack IV (3-6) are arranged in the flexible hinge mechanism II (3-1) and are pre-tightened through a pre-tightening wedge II (3-2), a pre-tightening wedge III (3-4) and a pre-tightening wedge IV (3-7) respectively, wherein the piezoelectric stack II (3-3) and the piezoelectric stack IV (3-6) are arranged along the x direction, and the piezoelectric stack III (3-5) is arranged along the y direction; the flexible hinge mechanism II (3-1) comprises six thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism II (3-1) and the rotor (2) can be adjusted through the screws (5), the arc-shaped convex part at the top is contacted with the rotor (2), the piezoelectric stack III (3-5) and the piezoelectric stack II (3-3) are simultaneously subjected to electric elongation, or the piezoelectric stack III (3-5) and the piezoelectric stack IV (3-6) are simultaneously subjected to electric elongation to push the arc-shaped convex part to jack the rotor and drive the rotor to rotate.
The clamping unit (1) comprises a piezoelectric stack I (1-1), a pre-tightening wedge block I (1-2) and a flexible hinge mechanism I (1-3); the piezoelectric stack I (1-1) is arranged in the flexible hinge mechanism I (1-3) and is pre-tightened through a pre-tightening wedge block I (1-2); the flexible hinge mechanism I (1-3) comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism I (1-3) and the rotor (2) can be adjusted through the screws (5), the arc-shaped convex part is in contact with the rotor (2), and the piezoelectric stack I (1-1) can be electrically extended to push the arc-shaped convex part to prop against the rotor (2) to realize clamping. .
A method of controlling a rotary drive platform, comprising the steps of:
①, in an initial state, adjusting a screw (5) to control an initial pretightening force between a flexible hinge mechanism II (3-1), a flexible hinge mechanism I (1-3) and a rotor (2), and respectively controlling a driving unit (3) and a clamping unit (1) by adopting two groups of voltage signals, wherein piezoelectric stacks of the driving unit (3) and the clamping unit (1) are not electrified;
②, the driving unit (3) pushes the rotor (2) to rotate;
③, clamping the rotor (2) by a clamping unit (1);
④, the driving unit (3) is restored to the initial state;
⑤, the clamping unit (1) is restored to the initial state, and one motion cycle is finished;
and ⑥, repeating the steps, and alternately working the driving unit (3) and the clamping unit (1), wherein the driving platform can realize large-stroke high-precision rotary motion.
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
①, the initial state is that the adjusting screw (5) controls the initial pre-tightening force between the flexible hinge mechanism II (3-1), the flexible hinge mechanism I (1-3) and the rotor (2) and two groups of voltage signals U are adopted1、U2The piezoelectric stacks II (3-3) and III (3-5) in the driving unit (3) and the piezoelectric stack I (1-1) in the clamping unit (1) are respectively controlled. The piezoelectric stacks II (3-3), III (3-5) and I (1-1) are all uncharged;
Step ④, U1The drive unit (3) recovers: the piezoelectric stacks II (3-3) and III (3-5) lose power and return to the initial state, the flexible hinge mechanism II (3-1) also returns to the initial state, and the rotor (2) is still kept at the position after rotating for an angle;
⑥, repeating the above steps, alternately operating the driving unit (3) and the clamping unit (1), and realizing large-stroke high-precision rotary motion of the driving platform, and respectively loading the same voltage signal U on the piezoelectric stacks IV (3-6) and III (3-5) in the driving unit (3) and the piezoelectric stack I (1-1) in the clamping unit (1)1、U2And repeating the steps to realize the large-stroke rotary motion in the opposite direction.
According to the rotary driving platform and the control method thereof, the group of driving units and the group of clamping units alternately and cooperatively work through sequential control of voltage signals, the large-stroke forward and reverse rotation precision driving can be realized, and the rotary driving platform has the characteristics of small heat, stability in driving, reliability and high efficiency.
Claims (4)
1. A rotary drive platform, comprising: the clamping device comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are installed on the base through the screw; the rotary driving platform enables the driving unit and the clamping unit to work alternately and cooperatively through time sequence control, and drives the rotor to rotate.
2. The rotary drive platform of claim 1, wherein: the driving unit comprises three piezoelectric stacks, a flexible hinge mechanism and three pre-tightening wedges; the three piezoelectric stacks are arranged in the flexible hinge mechanism, two piezoelectric stacks are arranged along the x direction, and the other piezoelectric stack is arranged along the y direction and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises six thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped convex part at the top is in contact with the rotor, one piezoelectric stack arranged along the y direction and any one piezoelectric stack arranged along the x direction are electrically extended at the same time, and the arc-shaped convex part can be pushed to tightly prop against the rotor and drive the rotor to rotate.
3. The rotary drive platform of claim 1, wherein: the clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped bulge part is in contact with the rotor, and the arc-shaped bulge part can be pushed to prop against the rotor to realize clamping by the electric extension of the piezoelectric stack.
4. A method of controlling a rotary drive platform as claimed in claim 1, wherein: the method comprises the following steps:
①, in the initial state, adjusting screws are used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor, two groups of voltage signals are used for respectively controlling the driving unit and the clamping unit, and the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
②, the driving unit drives the rotor to rotate;
③, clamping the rotor by a clamping unit;
④, restoring the drive unit to initial state;
⑤, restoring the clamp unit to the initial state and ending a motion period;
and ⑥, repeating the above steps, and alternately operating the driving unit and the clamping unit, wherein the driving platform can realize large-stroke high-precision rotary motion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010049898.7A CN111384872B (en) | 2020-01-08 | 2020-01-08 | Rotary driving platform and control method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010049898.7A CN111384872B (en) | 2020-01-08 | 2020-01-08 | Rotary driving platform and control method thereof |
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| CN111384872A true CN111384872A (en) | 2020-07-07 |
| CN111384872B CN111384872B (en) | 2023-10-27 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112713805A (en) * | 2020-12-22 | 2021-04-27 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | Rotary driving device based on piezoelectric stack |
| CN113078845A (en) * | 2021-04-27 | 2021-07-06 | 吉林大学 | Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof |
| CN114172405A (en) * | 2021-12-14 | 2022-03-11 | 山东大学 | Piezoelectric rotary driver and use method thereof |
| CN116388609A (en) * | 2023-05-26 | 2023-07-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
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2020
- 2020-01-08 CN CN202010049898.7A patent/CN111384872B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112713805A (en) * | 2020-12-22 | 2021-04-27 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | Rotary driving device based on piezoelectric stack |
| CN112713805B (en) * | 2020-12-22 | 2022-04-22 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | Rotary driving device based on piezoelectric stack |
| CN113078845A (en) * | 2021-04-27 | 2021-07-06 | 吉林大学 | Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof |
| CN113078845B (en) * | 2021-04-27 | 2022-04-12 | 吉林大学 | Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof |
| CN114172405A (en) * | 2021-12-14 | 2022-03-11 | 山东大学 | Piezoelectric rotary driver and use method thereof |
| CN114172405B (en) * | 2021-12-14 | 2023-08-15 | 山东大学 | Piezoelectric rotary driver and application method thereof |
| CN116388609A (en) * | 2023-05-26 | 2023-07-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
| CN116388609B (en) * | 2023-05-26 | 2023-08-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
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