CN111130383A - Inchworm type driving platform and control method thereof - Google Patents
Inchworm type driving platform and control method thereof Download PDFInfo
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- CN111130383A CN111130383A CN202010049863.3A CN202010049863A CN111130383A CN 111130383 A CN111130383 A CN 111130383A CN 202010049863 A CN202010049863 A CN 202010049863A CN 111130383 A CN111130383 A CN 111130383A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/16—Mechanical energy storage, e.g. flywheels or pressurised fluids
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Abstract
The invention belongs to the field of precision driving, and particularly relates to an inchworm-type driving platform and a control method thereof. The inchworm type piezoelectric driving platform solves the technical problems of complex structure and difficult control of the inchworm type piezoelectric driving platform. The rotary driving platform comprises a driving unit, a clamping unit, a rotor, a screw and a base; the driving unit and the clamping unit are installed on the base through screws; the rotary driving platform enables the driving unit and the clamping unit to work alternately and cooperatively through the time sequence control of the voltage signal, can realize large-stroke high-precision rotary motion, and can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro-operation robots, biotechnology, aerospace and the like.
Description
Technical Field
The invention relates to a micro-nano precise driving platform, in particular to an inchworm type driving platform and a control method thereof.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, intelligent robots, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving platform. The traditional driving platform has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving platform. The piezoelectric driving platform has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. The inchworm piezoelectric driving platform can ensure higher output precision and bearing capacity while obtaining larger output stroke, and is widely concerned by researchers. The inchworm-type driving platform generally needs two clamping units and one driving unit, and the multi-path time sequence control has the problems of complex structure and difficult control, and is not beneficial to the practical application of inchworm-type piezoelectric driving. Therefore, there is a need for an inchworm-type piezoelectric driving platform with simplified structure and control.
Disclosure of Invention
The invention aims to provide an inchworm-type driving platform and a control method thereof, and solves the problems in the prior art. According to the invention, through the time sequence control of the voltage signal, a group of driving units and a group of clamping units alternately work in a cooperative manner, so that the large-stroke high-precision rotary driving can be realized, and the structure and the control of the platform can be effectively simplified.
The above object of the present invention is achieved by the following technical solutions:
an inchworm-type driving platform comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are installed on the base through the screw; the inchworm-type driving platform enables the driving unit and the clamping unit to work cooperatively through time sequence control, and drives the rotor to rotate.
The driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted by the screw; the flexible hinge mechanism is a parallelogram-like structure and comprises eight thin-wall flexible hinges, the arc-shaped bulge part is in contact with the rotor, and the piezoelectric stack can push the arc-shaped bulge part to prop against the rotor and drive the rotor to rotate when being electrically extended.
The clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted by the screw; the flexible hinge mechanism comprises four thin-wall flexible hinges, the arc-shaped convex part is in contact with the rotor, and the piezoelectric stack can push the arc-shaped convex part to prop against the rotor to realize clamping after being electrically extended.
A control method of an inchworm type driving platform comprises the following steps:
①, in the initial state, adjusting screws are used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor, two groups of voltage signals are used for respectively controlling the driving unit and the clamping unit, and the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
②, the driving unit drives the rotor to rotate;
③, clamping the rotor by a clamping unit;
④, restoring the drive unit to initial state;
⑤, restoring the clamp unit to the initial state and ending a motion period;
and ⑥, repeating the above steps, and alternately operating the driving unit and the clamping unit, wherein the driving platform can realize large-stroke high-precision rotary motion.
The main advantages of the invention are: the group of driving units and the group of clamping units work alternately and cooperatively through the time sequence control of voltage signals, so that micro-nano large-stroke rotary motion can be realized, and the structure and the control of the platform can be effectively simplified. The platform can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a schematic view of the flexible hinge mechanism of the drive unit of the present invention;
FIG. 3 is a schematic view of the clamping unit flexible hinge mechanism of the present invention;
fig. 4 is a voltage signal applied to the piezoelectric stacks of the driving unit and the clamping unit.
In the figure:
1. a drive unit; 2, a rotor; 3, a base;
4. a clamping unit; 5, a screw; 1-1, piezoelectric stack I;
1-2, pre-tightening a wedge block I; 1-3, a flexible hinge mechanism I; 4-1, piezoelectric stack II;
4-2, pre-tightening the wedge block II; 4-3, flexible hinge mechanism II.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, an inchworm-type driving platform mainly comprises a driving unit (1), a clamping unit (4), a rotor (2), a screw (5) and a base (3), wherein the driving unit (1) and the clamping unit (4) are installed on the base (3) through the screw (5); the inchworm-type driving platform enables the driving unit (1) and the clamping unit (4) to work cooperatively through time sequence control, and drives the rotor (2) to rotate.
The driving unit (1) comprises a flexible hinge mechanism I (1-3), a pre-tightening wedge I (1-2) and a piezoelectric stack I (1-1); the piezoelectric stack I (1-1) is arranged in the flexible hinge mechanism I (1-3) and is pre-tightened through a pre-tightening wedge block I (1-2); the screw (5) can adjust the initial pretightening force between the flexible hinge mechanism I (1-3) and the rotor (2); the flexible hinge mechanism I (1-3) is a parallelogram-like structure and comprises eight thin-wall flexible hinges, the arc-shaped bulge part is in contact with the rotor (2), and the piezoelectric stack I (1-1) can be extended by electricity to push the arc-shaped bulge part to prop against the rotor (2) and drive the rotor (2) to rotate.
The clamping unit (4) comprises a piezoelectric stack II (4-1), a pre-tightening wedge II (4-2) and a flexible hinge mechanism II (4-3); the piezoelectric stack II (4-1) is arranged in the flexible hinge mechanism II (4-3) and is pre-tightened through a pre-tightening wedge block II (4-2); the screw (5) can adjust the initial pretightening force between the flexible hinge mechanism II (4-3) and the rotor (2); the flexible hinge mechanism II (4-3) comprises four thin-wall flexible hinges, the arc-shaped convex part is in contact with the rotor (2), and the piezoelectric stack II (4-1) can push the arc-shaped convex part to prop against the rotor (2) to realize clamping when being electrically stretched.
A control method of an inchworm type driving platform comprises the following steps:
①, in an initial state, adjusting a screw (5) to control initial pretightening force between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2), and respectively controlling the driving unit (1) and the clamping unit (4) by adopting two groups of voltage signals, wherein piezoelectric stacks of the driving unit (1) and the clamping unit (4) are not electrified;
②, the driving unit (1) pushes the rotor (2) to rotate;
③, clamping the rotor (2) by a clamping unit (4);
④, the driving unit (1) is recovered to the initial state;
⑤, the clamping unit (4) is restored to the initial state, and one movement cycle is finished;
and ⑥, repeating the steps, and alternately working the driving unit (1) and the clamping unit (4), wherein the driving platform can realize large-stroke high-precision rotary motion.
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
①, in the initial state, adjusting the screw (5) to control the initial pre-tightening force between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2) and adopting two groups of voltage signals U1、U2The piezoelectric stacks I (1-1) in the driving unit (1) and the piezoelectric stacks II (4-1) in the clamping unit (4) are respectively controlled. The piezoelectric stack I (1-1) and the piezoelectric stack II (4-1) are not electrified;
step ④, U1The drive unit (1) recovers: the piezoelectric stack I (1-1) loses power and returns to the initial state, the flexible hinge mechanism I (1-3) also returns to the initial state, and the rotor (2) is still kept at the position after rotating for an angle;
and ⑥, repeating the steps, and alternately working the driving unit (1) and the clamping unit (4), wherein the driving platform can realize large-stroke high-precision rotary motion.
According to the inchworm-type driving platform and the control method thereof, the group of driving units and the group of clamping units alternately and cooperatively work through time sequence control of voltage signals, large-stroke precise rotation driving can be realized, and the inchworm-type driving platform has the characteristics of small heat, stability in driving, reliability and high efficiency.
Claims (4)
1. The utility model provides an inchworm type drive platform which characterized in that: the clamping device comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are installed on the base through the screw; the inchworm type driving platform enables the driving unit and the clamping unit to work alternately and cooperatively through sequential control of signals, and rotary motion can be achieved.
2. The inchworm-type drive platform of claim 1, wherein: the driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted by the screw; the flexible hinge mechanism is a parallelogram-like structure and comprises eight thin-wall flexible hinges, the arc-shaped convex part is in contact with the rotor, and the piezoelectric stack can push the arc-shaped convex part to tightly jack the rotor and drive the rotor to rotate after being electrically extended.
3. The inchworm-type drive platform of claim 1, wherein: the clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted by the screw; the flexible hinge mechanism comprises four thin-wall flexible hinges, the arc-shaped convex part is in contact with the rotor, and the piezoelectric stack can push the arc-shaped convex part to prop against the rotor to realize clamping after being electrically extended.
4. A method of controlling an inchworm-type drive platform according to claim 1, wherein: the method comprises the following steps:
①, in the initial state, adjusting screws are used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor, two groups of voltage signals are used for respectively controlling the driving unit and the clamping unit, and the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
②, the driving unit drives the rotor to rotate;
③, clamping the rotor by a clamping unit;
④, restoring the drive unit to initial state;
⑤, restoring the clamp unit to the initial state and ending a motion period;
and ⑥, repeating the above steps, and alternately operating the driving unit and the clamping unit to drive the platform to rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010049863.3A CN111130383B (en) | 2020-01-08 | 2020-01-08 | Inchworm type driving platform and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010049863.3A CN111130383B (en) | 2020-01-08 | 2020-01-08 | Inchworm type driving platform and control method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN111130383A true CN111130383A (en) | 2020-05-08 |
| CN111130383B CN111130383B (en) | 2023-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010049863.3A Active CN111130383B (en) | 2020-01-08 | 2020-01-08 | Inchworm type driving platform and control method thereof |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
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2020
- 2020-01-08 CN CN202010049863.3A patent/CN111130383B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
Non-Patent Citations (1)
| Title |
|---|
| JIANMING WEN ET AL.: "A Novel Linear Walking Type Piezoelectric Actuator Based on the Parasitic Motion of Flexure Mechanisms", 《IEEE ACCESS》 * |
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| CN111130383B (en) | 2023-08-25 |
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