CN202696499U - Micro-nano level bionic multi-degree-of-freedom driving device - Google Patents
Micro-nano level bionic multi-degree-of-freedom driving device Download PDFInfo
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- CN202696499U CN202696499U CN 201220317854 CN201220317854U CN202696499U CN 202696499 U CN202696499 U CN 202696499U CN 201220317854 CN201220317854 CN 201220317854 CN 201220317854 U CN201220317854 U CN 201220317854U CN 202696499 U CN202696499 U CN 202696499U
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Abstract
The utility model relates to a micro-nano level bionic multi-degree-of-freedom driving device and belongs to the field of precision and ultra-precision machining. The micro-nano level bionic multi-degree-of-freedom driving device mainly comprises a stator, a rotor and an output shaft, wherein a rotary driving mechanism and a linear driving mechanism are connected to the rotor; and the output shaft is a variable interface rotating shaft. According to the micro-nano level bionic multi-degree-of-freedom driving device disclosed by the utility model, a flexible hinge structure is driven by a high-precision piezoelectric actuator for relevant clamping; the stepped ultra-precision rotating motion of the rotor around a fixing shaft is realized by controlling piezoelectric clamping mechanisms in an upper layer and a lower layer of the rotor and a piezoelectric driving mechanism connected onto the lower layer; and meanwhile, the linear stepped movement along the orientation is realized by controlling flexible hinge mechanisms connected onto the upper layer and the lower layer of the rotor. The micro-nano level bionic multi-degree-of-freedom driving device disclosed by the utility model can be applied to the field of high-precision driving and processing and has the advantages of less investment, low cost, quick response and high benefit. The ultra-precision stepped rotating motion around the orientation and the linear stepped motion along the orientation can be realized.
Description
Technical field
The utility model relates to the precision and ultra-precision machining field, particularly the bionical multiple degrees of freedom drive unit of a kind of micro/nano level.Can be applied to the science and technology field at super-precision machine tools, the detection of material test specimen nanometer dynamic performance, semiconductor manufacturing, accurate ultra microfabrication and measuring technique, modern medicine and bio-genetics, MEMS (micro electro mechanical system) (MEMS), precision optics, Aero-Space, robot, the contour tip of military technology.
Background technology
The development of modern science and technology makes human research field expand to microcosmos, requirement to precision positioning, micro-displacement is more and more higher, especially in the science and technology field at accurate ultra microfabrication and measuring technique, MEMS (micro electro mechanical system) (MEMS), nanosecond science and technology, semiconductor manufacturing, modern medicine and bio-genetics, Aero-Space science and technology, the contour tip of military technology, it is especially important that precision positioning, micro-displacement seem.Traditional drive unit can not satisfy its required precision such as macroscopical large scale drive units such as common electric machine, feed screw nut, turbine and worms.Therefore, the scientific research personnel of various countries goes all out in the more superior novel high-precision drive unit of research performance.Piezoelectric actuator has that volume is little, displacement resolution is high, frequency response is high, noiseless, heating less, High power output, conversion efficiency advantages of higher, be applied to more and more in microposition and the precision and ultra-precision machining.Drive unit in the past often exists that physical dimension is bigger than normal, stepping accuracy is low, come and go repetitive positioning accuracy low, be difficult to the shortcoming such as processing.Therefore, be necessary to design a kind of positioning accuracy and repetitive positioning accuracy all higher, be applicable to simultaneously rotate the microminiature precision driver of exporting with rectilinear motion.
Summary of the invention
The purpose of this utility model is to provide a kind of micro/nano level bionical multiple degrees of freedom drive unit, has solved the problems referred to above that prior art exists.The utlity model has the characteristics that clamp is stable, load output is larger, can realize large stroke motion, straight line simultaneously and rotatablely move the functions such as output develops simultaneously.The method of rotatablely move module and Linear Moving Module that adopts the utility model realize rotating rotatablely moving of sub-axis and along the rectilinear motion of this axis; Wherein upper strata clamp piece, lower floor's clamp piece and the rotary actuation hinge by rotor moves by certain sequential, realizes that output shaft is around the rotation step motion of central shaft; By certain sequential motion, realize the straight line step motion of output shaft by rotor upper strata clamp piece, lower floor's clamp piece and linear drives hinge.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
The bionical multiple degrees of freedom drive unit of micro/nano level comprises output shaft 7, stator 10 and rotor, and the output of described output shaft 7 has link and uses screwed hole, and is connected with rotor upper strata clamp 6 by screw; Described stator 10 is the cylinder of an end opening, and its inwall and rotor upper strata clamp 6, rotor lower floor clamp 1 be interference fits respectively;
Described rotor comprises rotor upper strata clamp piece 6, upper strata clamp piezoelectric stack 17, linear drives hinge I 15, linear drives piezoelectric stack I 11, linear drives hinge II 3, linear drives piezoelectric stack II 5, rotary actuation hinge 2, rotary actuation piezoelectric stack 13, rotor lower floor clamp piece 1 and lower floor's clamp piezoelectric stack 18, wherein, described upper strata clamp piezoelectric stack 17 is encapsulated in the rotor upper strata clamp piece 6, linear drives hinge I 15 is connected with rotor upper strata clamp piece 6 by screw I 9, and linear drives piezoelectric stack I 11 is packaged in the linear drives hinge I 15; Linear drives hinge II 3 is connected with rotor upper strata clamp piece 6 by screw II 8, and linear drives piezoelectric stack II 5 is packaged in the linear drives hinge II 3; Rotary actuation hinge 2 is connected with linear drives hinge I 15, linear drives hinge II 3 by screw III 14, screw IV 4 respectively; Rotary actuation piezoelectric stack 13 is packaged in the rotary actuation hinge 2; Rotor lower floor clamp piece 1 is connected with rotary actuation hinge 2 by screw V 12, screw VI 16; Lower floor's clamp piezoelectric stack 18 is packaged in the rotor lower floor clamp piece 1.
Described rotor is without winding structure.
Described output shaft 7 is the rotating shaft of type variable interface.
Described rotary actuation hinge 2 is the flexible hinge that amplifies of Z-type.
Described linear drives hinge I 15 and linear drives hinge II 3 are the flexible hinge that amplifies of rhombus.
Described stator 10 has the function of serving as external shell.
The beneficial effects of the utility model are: simple in structure, novel, volume is little; Have the advantages that clamp is stable, load output is larger, and can realize large stroke motion, straight line and rotatablely move the functions such as output develops simultaneously; Can be applied to precision finishing machine, MEMS (micro electro mechanical system) and robot field, improve system's fine motion precision, reduced physical dimension; Can greatly improve simultaneously the driving precision of generic drive, reduce complexity and the size of structure, and have that cost is low, small investment, instant effect, benefit advantages of higher; The utility model has extremely important meaning for the development in China precision and ultra-precision machining field, and it must have broad application prospects in various fields such as Precision Machining, semiconductor manufacturing, Aero-Space, military science and technology.Practical.
Description of drawings
Accompanying drawing described herein is used to provide further understanding of the present utility model, consists of the application's a part, and illustrative example of the present utility model and explanation thereof are used for explaining the utility model, do not consist of improper restriction of the present utility model.
Fig. 1 is overall structure schematic diagram of the present utility model;
Fig. 2 is that schematic diagram cuts open in axle survey of the present utility model office;
Fig. 3 is that master of the present utility model looks schematic diagram;
Fig. 4 is the A-A cross-sectional schematic of Fig. 3;
Fig. 5 is the B-B cross-sectional schematic of Fig. 3.
Among the figure:
1. rotor lower floor clamp piece; 2. rotary actuation hinge; 3. linear drives hinge II;
4. screw IV; 5. linear drives piezoelectric stack II; 6. rotor upper strata clamp piece;
7. output shaft; 8. screw II; 9. screw I;
10. stator; 11. linear drives piezoelectric stack I; 12. screw V;
13. rotary actuation piezoelectric stack; 14. screw III; 15. linear drives hinge I;
16. screw VI; 17. upper strata clamp piezoelectric stack; 18. lower floor's clamp piezoelectric stack.
Embodiment
Further specify detailed content of the present utility model and embodiment thereof below in conjunction with accompanying drawing.
To shown in Figure 5, the bionical multiple degrees of freedom drive unit of micro/nano level of the present utility model comprises output shaft 7, stator 10 and rotor referring to Fig. 1, and the output of described output shaft 7 has link and uses screwed hole, and is connected with rotor upper strata clamp 6 by screw; Described stator 10 is the cylinder of an end opening, and its inwall and rotor upper strata clamp 6, rotor lower floor clamp 1 be interference fits respectively;
Described rotor comprises rotor upper strata clamp piece 6, upper strata clamp piezoelectric stack 17, linear drives hinge I 15, linear drives piezoelectric stack I 11, linear drives hinge II 3, linear drives piezoelectric stack II 5, rotary actuation hinge 2, rotary actuation piezoelectric stack 13, rotor lower floor clamp piece 1 and lower floor's clamp piezoelectric stack 18, wherein, described upper strata clamp piezoelectric stack 17 is encapsulated in the rotor upper strata clamp piece 6, linear drives hinge I 15 is connected with rotor upper strata clamp piece 6 by screw I 9, and linear drives piezoelectric stack I 11 is packaged in the linear drives hinge I 15; Linear drives hinge II 3 is connected with rotor upper strata clamp piece 6 by screw II 8, and linear drives piezoelectric stack II 5 is packaged in the linear drives hinge II 3; Rotary actuation hinge 2 is connected with linear drives hinge I 15, linear drives hinge II 3 by screw III 14, screw IV 4 respectively; Rotary actuation piezoelectric stack 13 is packaged in the rotary actuation hinge 2; Rotor lower floor clamp piece 1 is connected with rotary actuation hinge 2 by screw V 12, screw VI 16; Lower floor's clamp piezoelectric stack 18 is packaged in the rotor lower floor clamp piece 1.
Described rotor is without winding structure.
Described output shaft 7 is the rotating shaft of type variable interface.
Described rotary actuation hinge 2 is the flexible hinge that amplifies of Z-type.
Described linear drives hinge I 15 and linear drives hinge II 3 are the flexible hinge that amplifies of rhombus.
Described stator 10 has the function of serving as external shell.
To shown in Figure 5, specific works process of the present utility model is as follows referring to Fig. 1:
The realization that the rotor stepping rotatablely moves, initial condition: upper strata clamp piezoelectric stack 17, linear drives piezoelectric stack I 11, linear drives piezoelectric stack II 5, rotary actuation piezoelectric stack 13, lower floor's clamp piezoelectric stack 18 are all not charged, system is in free state, and this moment, rotor also was in the state of moving about; When rotor is realized rotatablely moving: be packaged in lower floor's clamp piezoelectric stack 18 energisings in the rotor lower floor clamp piece 1, because inverse piezoelectric effect, 18 elongations of lower floor's clamp piezoelectric stack, the flexible hinge distortion in the drive rotor lower floor clamp piece 1, thereby with rotor lower floor clamp piece 1 and stator 10 clampings; Be packaged in the rotary actuation piezoelectric stack 13 energising elongations in the rotary actuation hinge 2, under the effect of inverse piezoelectric effect, rotary actuation hinge 2 deforms, because the middle part of rotary actuation hinge 2 is by screw V 12, screw VI 16 and rotor lower floor clamp piece 1 are fixing, and rotary actuation hinge 2 is flexible hinges of Z-type, its two ends can be extended round about, its two ends are by passing through screw III 14 again, screw IV 4 and linear drives hinge I 15, linear drives hinge II 3 connects, and linear drives hinge I 15, linear drives hinge II 3 is connected with the screw II by screw I 9 respectively again and is connected connection with rotor upper strata clamp piece, thereby produced a pair of turning pair at rotor upper strata clamp piece 6, rotatablely moving of certain angle can occur in rotor upper strata clamp piece 6; Be packaged in the upper strata clamp piezoelectric stack 17 energising elongations in the rotor upper strata clamp piece 6, thus the distortion of the flexible hinge in the drive rotor upper strata clamp piece 6, with rotor upper strata clamp piece 6 and stator 10 clampings; 18 outages of lower floor's clamp piezoelectric stack, under the effect of elastic force, the flexible hinge in the rotor lower floor clamp piece 1 recovers former length, thereby rotor lower floor clamp piece 1 and stator 10 are broken away from; 13 outages of rotary actuation piezoelectric stack, former length is recovered at the two ends of rotary actuation hinge 2, because rotary actuation hinge 2 is connected connection by screw V 12, screw VI 16 respectively with rotor lower floor clamp piece, thereby rotor driven lower floor clamp piece 1 rotates to the angle the same with rotor upper strata clamp piece 6.So just finished a step that rotatablely moves of rotor, repeating above motion can be so that rotor be realized step-type rotatablely moving, and its theoretical corner be infinity.
The straight-line realization of rotor stepping, initial condition: upper strata clamp piezoelectric stack 17, linear drives piezoelectric stack I 11, linear drives piezoelectric stack II 5, rotary actuation piezoelectric stack 13, lower floor's clamp piezoelectric stack 18 are all not charged, system is in free state, and this moment, rotor also was in the state of moving about; When rotor was realized rectilinear motion: the upper strata clamp piezoelectric stack 17 that is packaged in the rotor upper strata clamp piece 6 got electric elongation, thus the distortion of the flexible hinge in the drive rotor upper strata clamp piece 6, with rotor upper strata clamp piece 6 and stator 10 clampings; Be packaged in the linear drives piezoelectric stack I 11 in the linear drives hinge I 15, be packaged in the linear drives piezoelectric stack II 5 energising elongations in the linear drives hinge II 3, because linear drives hinge I 15 and linear drives hinge II 3 all are the rhombus flexible hinge, so linear drives hinge I 15 and linear drives hinge II 3 deform, because being connected with linear drives hinge II respectively to be connected with the screw II by screw I 9, linear drives hinge I 15 is connected connection with rotor upper strata clamp piece again, and rotor upper strata clamp piece 6 clamping, certain distance so the lower extreme point of linear drives hinge I 15 and linear drives hinge II 3 can move upward, because rotary actuation hinge 2 is respectively by screw III 14, screw IV 4 and linear drives hinge I 15, linear drives hinge II 3 connects, the middle part of rotary actuation hinge 2 is by screw V 12 simultaneously, screw VI 16 is connected connection with rotor lower floor clamp piece, certain distance so rotor driven lower floor clamp piece 1 moves up; The lower floor's clamp piezoelectric stack 18 that is packaged in the rotor lower floor clamp piece 1 gets electric elongation, thus the flexible hinge generation deformation in the drive rotor lower floor clamp piece 1, with rotor lower floor clamp piece 1 and stator 10 clampings; Be packaged in upper strata clamp piezoelectric stack 17 outages in the rotor upper strata clamp piece 6, recover former length, thereby rotor upper strata clamp piece 6 and stator 10 are unclamped; Be packaged in the linear drives piezoelectric stack I 11 in the linear drives hinge I 15, be packaged in the former length of linear drives piezoelectric stack II 5 power interruption recoverings in the linear drives hinge II 3, thereby linear drives hinge I 15 and linear drives hinge II 3 are recovered former length under the effect of elastic force, because being connected with the screw II by screw I 9 respectively, linear drives hinge I 15 upper end of being connected with linear drives hinge II is connected connection with rotor upper strata clamp piece again, the lower end of linear drives hinge I 15 and linear drives hinge II 3 is respectively by screw III 14, screw IV 4 is connected connection with the rotary actuation hinge, the middle part of rotary actuation hinge 2 is by screw V 12, screw VI 16 is connected connection with rotor lower floor clamp piece, at this moment, rotor lower floor clamp piece 1 with stator 10 clampings, so can rotor driven upper strata clamp piece 6 certain distance that moves up.So just finished a straight-line step of rotor stepping, repeating above operation can be so that rotor be done the stepping rectilinear motion along fixed-direction.
Rotor upper strata clamp piece 6 is connected connection by screw screw II, screw I with output shaft, thereby the stepping around fixed axis that can realize output shaft 7 rotatablely moves and along the stepping rectilinear motion of fixed-direction.The motion of whole multiple degrees of freedom driver has strict sequential logic.Change sequential, can change rotation and straight-line direction, and owing to having adopted the piezoelectric stack driving, it has the advantages that clamp is stable, load output is larger, and can realize large stroke motion, straight line and rotatablely move the functions such as output develops simultaneously.
The above is preferred embodiment of the present utility model only, is not limited to the utility model, and for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection range of the present utility model.
Claims (6)
1. the bionical multiple degrees of freedom drive unit of micro/nano level comprises output shaft (7), stator (10) and rotor, it is characterized in that: the output of described output shaft (7) has link and uses screwed hole, and is connected with rotor upper strata clamp (6) by screw; Described stator (10) is the cylinder of an end opening, and its inwall and rotor upper strata clamp (6), rotor lower floor clamp (1) be interference fits respectively;
Described rotor comprises rotor upper strata clamp piece (6), upper strata clamp piezoelectric stack (17), linear drives hinge I (15), linear drives piezoelectric stack I (11), linear drives hinge II (3), linear drives piezoelectric stack II (5), rotary actuation hinge (2), rotary actuation piezoelectric stack (13), rotor lower floor clamp piece (1) and lower floor's clamp piezoelectric stack (18), wherein, described upper strata clamp piezoelectric stack (17) is encapsulated in the rotor upper strata clamp piece (6), linear drives hinge I (15) is connected with rotor upper strata clamp piece (6), and linear drives piezoelectric stack I (11) is packaged in the linear drives hinge I (15); Linear drives hinge II (3) is connected with rotor upper strata clamp piece (6), and linear drives piezoelectric stack II (5) is packaged in the linear drives hinge II (3); Rotary actuation hinge (2) is connected with linear drives hinge I (15), linear drives hinge II (3) respectively; Rotary actuation piezoelectric stack (13) is packaged in the rotary actuation hinge (2); Rotor lower floor clamp piece (1) is connected with rotary actuation hinge (2); Lower floor's clamp piezoelectric stack (18) is packaged in the rotor lower floor clamp piece (1).
2. the bionical multiple degrees of freedom drive unit of micro/nano level according to claim 1 is characterized in that: described rotor is for without winding structure.
3. the bionical multiple degrees of freedom drive unit of micro/nano level according to claim 1 is characterized in that: described output shaft (7) is the rotating shaft of type variable interface.
4. the bionical multiple degrees of freedom drive unit of micro/nano level according to claim 1 is characterized in that: described rotary actuation hinge (2) amplifies hinge for Z-type is flexible.
5. the bionical multiple degrees of freedom drive unit of micro/nano level according to claim 1 is characterized in that: described linear drives hinge I (15) and linear drives hinge II (3) are the flexible hinge that amplifies of rhombus.
6. the bionical multiple degrees of freedom drive unit of micro/nano level according to claim 1 is characterized in that: described stator (10) is held concurrently and is external shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220317854 CN202696499U (en) | 2012-07-03 | 2012-07-03 | Micro-nano level bionic multi-degree-of-freedom driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220317854 CN202696499U (en) | 2012-07-03 | 2012-07-03 | Micro-nano level bionic multi-degree-of-freedom driving device |
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| Publication Number | Publication Date |
|---|---|
| CN202696499U true CN202696499U (en) | 2013-01-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220317854 Withdrawn - After Issue CN202696499U (en) | 2012-07-03 | 2012-07-03 | Micro-nano level bionic multi-degree-of-freedom driving device |
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|---|---|
| CN (1) | CN202696499U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102751899A (en) * | 2012-07-03 | 2012-10-24 | 吉林大学 | Micro nano bionic multi-degree of freedom driving device |
| CN104753393A (en) * | 2015-02-05 | 2015-07-01 | 西安交通大学 | Dual piezoelectric stack steeping rotary actuator containing curved beam structure and method |
-
2012
- 2012-07-03 CN CN 201220317854 patent/CN202696499U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102751899A (en) * | 2012-07-03 | 2012-10-24 | 吉林大学 | Micro nano bionic multi-degree of freedom driving device |
| CN102751899B (en) * | 2012-07-03 | 2014-10-22 | 吉林大学 | Micro nano bionic multi-degree of freedom driving device |
| CN104753393A (en) * | 2015-02-05 | 2015-07-01 | 西安交通大学 | Dual piezoelectric stack steeping rotary actuator containing curved beam structure and method |
| CN104753393B (en) * | 2015-02-05 | 2017-02-01 | 西安交通大学 | Dual piezoelectric stack steeping rotary actuator containing curved beam structure and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130123 Effective date of abandoning: 20141022 |
|
| RGAV | Abandon patent right to avoid regrant |