CN111162690A - Piezoelectric driving device and control method thereof - Google Patents
Piezoelectric driving device and control method thereof Download PDFInfo
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- CN111162690A CN111162690A CN202010049865.2A CN202010049865A CN111162690A CN 111162690 A CN111162690 A CN 111162690A CN 202010049865 A CN202010049865 A CN 202010049865A CN 111162690 A CN111162690 A CN 111162690A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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Abstract
The invention belongs to the field of precision driving, and particularly relates to a piezoelectric driving device and a control method thereof. The inchworm type piezoelectric driving device solves the technical problems of complex structure and difficult control of the inchworm type piezoelectric driving device. The device comprises a driving unit, a clamping unit, a rotor, a screw and a base; the driving unit and the clamping unit are installed on the base through screws; the device enables the driving unit and the clamping unit to alternately and cooperatively work through the time sequence control of the voltage signal, can realize large-stroke high-precision rotary motion, and can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro-operation robots, biotechnology, aerospace and the like.
Description
Technical Field
The invention relates to a micro-nano precise driving device, in particular to a piezoelectric driving device and a control method thereof.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, intelligent robots, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving device. The traditional driving device has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving device. The piezoelectric driving device has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. The inchworm piezoelectric driving device can ensure higher output precision and bearing capacity while obtaining larger output stroke, and is widely concerned by researchers. The inchworm-type driving device generally needs two clamping units and one driving unit, and adopts multi-path time sequence control, so that the problems of complex structure and difficult control exist, and the inchworm-type piezoelectric driving device is not beneficial to practical application. Therefore, it is necessary to design a piezoelectric driving device which can simplify the structure and control.
Disclosure of Invention
The present invention is directed to a piezoelectric driving device and a control method thereof, which solve the above problems of the prior art. The invention enables a group of driving units and a group of clamping units to alternately and cooperatively work through the time sequence control of voltage signals, can realize large-stroke high-precision rotary driving, and can effectively simplify the structure and control of the device.
The above object of the present invention is achieved by the following technical solutions:
a piezoelectric driving device comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are installed on the base through the screw; the piezoelectric driving device enables the driving unit and the clamping unit to work cooperatively through time sequence control, and drives the rotor to rotate.
The driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism is isosceles trapezoid-like and comprises four semi-arc thin-wall flexible hinges, the wall thickness of the semi-arc thin-wall flexible hinges on the same edge is the same, the wall thickness of the semi-arc thin-wall flexible hinges on the left edge and the right edge is different, the top arc-shaped protrusion is in contact with the rotor, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted through the screws, and the piezoelectric stack can push the arc-shaped protrusion to tightly prop the rotor and drive the rotor to rotate after being electrically.
The clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through the screws, the arc-shaped protrusion is in contact with the rotor, and the arc-shaped protrusion can be pushed to prop against the rotor to realize clamping by the electric extension of the piezoelectric stack.
A control method of a piezoelectric driving apparatus, comprising the steps of:
①, in the initial state, adjusting screws are used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor, two groups of voltage signals are used for respectively controlling the driving unit and the clamping unit, and the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
②, the driving unit drives the rotor to rotate;
③, clamping the rotor by a clamping unit;
④, restoring the drive unit to initial state;
⑤, restoring the clamp unit to the initial state and ending a motion period;
⑥, repeating the above steps, and alternately operating the driving unit and the clamping unit, wherein the driving device can realize large-stroke high-precision rotary motion.
The main advantages of the invention are: the group of driving units and the group of clamping units alternately and cooperatively work through the time sequence control of voltage signals, so that the micro-nano large-stroke rotary motion can be realized, and the structure and the control of the device can be effectively simplified. The device can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a schematic view of the flexible hinge mechanism of the drive unit of the present invention;
FIG. 3 is a schematic view of the clamping unit flexible hinge mechanism of the present invention;
fig. 4 is a voltage signal applied to the piezoelectric stacks of the driving unit and the clamping unit.
In the figure:
1. a drive unit; 2, a rotor; 3, a base;
4. a clamping unit; 5, a screw; 1-1, piezoelectric stack I;
1-2, pre-tightening a wedge block I; 1-3, a flexible hinge mechanism I; 4-1, piezoelectric stack II;
4-2, pre-tightening the wedge block II; 4-3, a flexible hinge mechanism II; 1-3-1, arc bulge I;
1-3-2, a semi-arc thin-wall flexible hinge; 4-3-1, arc bulge II; 4-3-2. thin wall flexible hinge.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, a piezoelectric driving device mainly includes a driving unit (1), a clamping unit (4), a rotor (2), a screw (5) and a base (3), wherein the driving unit (1) and the clamping unit (4) are mounted on the base (3) through the screw (5); the piezoelectric driving device enables the driving unit (1) and the clamping unit (4) to work cooperatively through time sequence control, and drives the rotor (2) to rotate.
The driving unit (1) comprises a flexible hinge mechanism I (1-3), a pre-tightening wedge I (1-2) and a piezoelectric stack I (1-1); the piezoelectric stack I (1-1) is arranged in the flexible hinge mechanism I (1-3) and is pre-tightened through a pre-tightening wedge block I (1-2); the flexible hinge mechanism I (1-3) is of an isosceles trapezoid-like shape and comprises four semi-arc thin-wall flexible hinges, the wall thicknesses of the semi-arc thin-wall flexible hinges on the same edge are the same, the wall thicknesses of the semi-arc thin-wall flexible hinges on the left edge and the right edge are different, the arc-shaped bulge I (1-3-1) is in contact with the rotor (2), the initial pre-tightening force between the flexible hinge mechanism I (1-3) and the rotor (2) can be adjusted through the screw (5), and the piezoelectric stack I (1-1) can be extended by electricity to push the arc-shaped bulge I (1-3-1) to tightly press the rotor (2) and drive the rotor (2.
The clamping unit (4) comprises a piezoelectric stack II (4-1), a pre-tightening wedge II (4-2) and a flexible hinge mechanism II (4-3); the piezoelectric stack II (4-1) is arranged in the flexible hinge mechanism II (4-3) and is pre-tightened through a pre-tightening wedge block II (4-2); the flexible hinge mechanism II (4-3) comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism II (4-3) and the rotor (2) can be adjusted through the screws (5), the arc-shaped bulge II (4-3-1) is in contact with the rotor (2), and the piezoelectric stack II (4-1) can be electrically extended to push the arc-shaped bulge II (4-3-1) to prop against the rotor (2) to realize clamping.
A control method of a piezoelectric driving apparatus, comprising the steps of:
①, in an initial state, adjusting a screw (5) to control initial pretightening force between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2), and respectively controlling the driving unit (1) and the clamping unit (4) by adopting two groups of voltage signals, wherein piezoelectric stacks of the driving unit (1) and the clamping unit (4) are not electrified;
②, the driving unit (1) pushes the rotor (2) to rotate;
③, clamping the rotor (2) by a clamping unit (4);
④, the driving unit (1) is recovered to the initial state;
⑤, the clamping unit (4) is restored to the initial state, and one movement cycle is finished;
⑥, repeating the above steps, and alternately operating the driving unit (1) and the clamping unit (4), wherein the device can realize large-stroke high-precision rotary motion.
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
①, in the initial state, adjusting the screw (5) to control the initial pre-tightening force between the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2) and adopting two groups of voltage signals U1、U2The piezoelectric stacks I (1-1) in the driving unit (1) and the piezoelectric stacks II (4-1) in the clamping unit (4) are respectively controlled. The piezoelectric stack I (1-1) and the piezoelectric stack II (4-1) are not electrified;
⑥, repeating the above steps, and alternately operating the driving unit (1) and the clamping unit (4), wherein the driving device can realize large-stroke high-precision rotary motion.
According to the piezoelectric driving device and the control method thereof, the group of driving units and the group of clamping units alternately and cooperatively work through sequential control of voltage signals, large-stroke precise rotary driving can be realized, and the piezoelectric driving device has the characteristics of small heat, stable driving, reliability and high efficiency.
Claims (4)
1. A piezoelectric actuator, characterized by: the clamping device comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are installed on the base through the screw; the piezoelectric driving device enables the driving unit and the clamping unit to work alternately and cooperatively through the time sequence control of signals, and can realize rotary motion.
2. A piezoelectric driving apparatus according to claim 1, wherein: the driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism is isosceles trapezoid-like and comprises four semi-arc thin-wall flexible hinges, the wall thickness of the semi-arc thin-wall flexible hinges on the same edge is the same, the wall thickness of the semi-arc thin-wall flexible hinges on the left edge and the right edge is different, the top arc-shaped protrusion is in contact with the rotor, the initial pre-tightening force between the flexible hinge mechanism and the rotor can be adjusted through the screws, and the piezoelectric stack can push the arc-shaped protrusion to tightly prop the rotor and drive the rotor to rotate after being electrically.
3. A piezoelectric driving apparatus according to claim 1, wherein: the clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through a pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through the screws, the arc-shaped protrusion is in contact with the rotor, and the arc-shaped protrusion can be pushed to prop against the rotor to realize clamping by the electric extension of the piezoelectric stack.
4. A control method of a piezoelectric driving apparatus according to claim 1, characterized in that: the method comprises the following steps:
①, in the initial state, adjusting screws are used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor, two groups of voltage signals are used for respectively controlling the driving unit and the clamping unit, and the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
②, the driving unit drives the rotor to rotate;
③, clamping the rotor by a clamping unit;
④, restoring the drive unit to initial state;
⑤, restoring the clamp unit to the initial state and ending a motion period;
⑥, repeating the above steps, and alternately operating the driving unit and the clamping unit, wherein the driving device can realize the rotation motion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010049865.2A CN111162690B (en) | 2020-01-08 | 2020-01-08 | Piezoelectric driving device and control method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010049865.2A CN111162690B (en) | 2020-01-08 | 2020-01-08 | Piezoelectric driving device and control method thereof |
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| CN111162690B CN111162690B (en) | 2023-08-25 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
| CN108233764A (en) * | 2017-12-05 | 2018-06-29 | 吉林大学 | Using the piezoelectric driven precision rotation driving device of special-shaped hinge transmission mechanism |
| CN109818527A (en) * | 2019-04-02 | 2019-05-28 | 吉林大学 | Isosceles trapezoid stick-slip piezoelectric linear actuator |
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2020
- 2020-01-08 CN CN202010049865.2A patent/CN111162690B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723893A (en) * | 2012-07-03 | 2012-10-10 | 吉林大学 | Micro-nano simulation rotating drive device |
| CN108233764A (en) * | 2017-12-05 | 2018-06-29 | 吉林大学 | Using the piezoelectric driven precision rotation driving device of special-shaped hinge transmission mechanism |
| CN109818527A (en) * | 2019-04-02 | 2019-05-28 | 吉林大学 | Isosceles trapezoid stick-slip piezoelectric linear actuator |
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