CN113612406B - Piezoelectric driver based on differential motion principle and control method thereof - Google Patents
Piezoelectric driver based on differential motion principle and control method thereof Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Abstract
The invention discloses a piezoelectric driver based on a differential motion principle and a control method thereof, wherein the piezoelectric driver comprises a base, a differential unit, a rotor unit and an initial gap adjusting unit; the rotor unit and the initial gap adjusting unit are respectively fixed on the base through screws, and the differential unit is vertically fixed on the initial gap adjusting unit; the differential unit comprises a differential flexible hinge, a left piezoelectric stack and a right piezoelectric stack, and the left piezoelectric stack and the right piezoelectric stack are symmetrically arranged in the differential flexible hinge through pre-tightening screws respectively; the rotor unit comprises a guide rail and a sliding block which is connected on the guide rail in a sliding way, and an initial gap between a driving pin of the differential flexible hinge and the sliding block is adjusted through an initial gap adjusting unit. The sliding block slides on the guide rail under the drive of the differential flexible hinge, and the Z-shaped flexible hinge group can generate elastic deformation by simultaneously applying a cooperative driving electric signal to the left piezoelectric stack and the right piezoelectric stack, so that the differential motion can be synthesized and output to realize the function of inhibiting the rollback motion.
Description
Technical Field
The invention relates to the field of precision positioning, in particular to a piezoelectric driver based on a differential motion principle and a control method thereof. Compared with the piezoelectric driver developed by the existing stick-slip type, inertial type, parasitic type and other driving principles, the piezoelectric driver based on the differential motion principle and the control method thereof provided by the invention realize the inhibition of the rollback motion of the stick-slip type piezoelectric driver from the driving principle, greatly improve the output performance and the service life of the piezoelectric driver, and can be used for realizing rollback-free and high-precision positioning in the fields of precision positioning, precision/ultra-precision machining, precision optical systems, micromanipulation and the like.
Background
Along with the continuous improvement of the requirements of micro/nano positioning, processing and operation in the fields of precision positioning, precision/ultra-precision processing, precision optical systems and the like, the requirements on a precision positioning platform are also becoming urgent. The piezoelectric stack based on the inverse piezoelectric effect has the advantages of high rigidity, high resolution, quick response and the like, so that the piezoelectric stack is favored by a large number of researchers, and becomes a main flow driving element of a driver. Currently, researchers have developed piezoelectric actuators of various driving principles, such as direct-push type, inchworm-like type, stick-slip type, inertial type, parasitic type, and the like. The stroke of the direct-push piezoelectric driver is very limited, often only tens of micrometers, and the application occasions of the direct-push piezoelectric driver are limited. While the inchworm-type piezoelectric actuator can output long-stroke linear motion, the structure is complex, and the piezoelectric actuator usually needs 3 or more piezoelectric stacks and is driven according to a specific time sequence, so that the control and operation processes are complex. While piezoelectric actuators of the type such as stick-slip, inertial, and parasitic are capable of outputting long-stroke linear motion, the structure and control of these types of piezoelectric actuators are relatively simple, but there is generally a rollback motion during operation, which not only reduces the output performance of the actuator, but also shortens the service life of the actuator.
In view of the above, in the field of piezoelectric drivers, the rollback motion is a hot problem of research, and needs to be solved. Therefore, a new piezoelectric driving principle needs to be provided, a corresponding device and a corresponding method are developed, and the suppression of the rollback motion is realized on the basis of keeping the simple structure, simple control and large stroke of the existing stick-slip type, inertial type and parasitic type piezoelectric drivers.
Disclosure of Invention
The invention aims to provide a piezoelectric driver based on a differential motion principle and a control method thereof, which solve the problems existing in the prior art. The piezoelectric driver based on the differential motion principle has the advantages that the structure is simple, the control method is flexible, the initial gap between the driving pin of the differential flexible hinge and the sliding block can be adjusted through the knob of the fine adjustment mechanism, and under the proper initial gap, the differential motion can be output at the driving pin of the differential flexible hinge through the cooperative driving of the two piezoelectric stacks in the driving unit, so that the inherent rollback motion of the stick-slip type equal-pressure piezoelectric driver is effectively restrained. The invention provides a solution for researching and inhibiting the backspacing motion of the viscous sliding type, parasitic type, inertial type and other types of piezoelectric drivers, and has wide application prospects in the fields of precise positioning, precise/ultra-precise machining, precise optical systems, micromanipulation and the like.
The above object of the present invention is achieved by the following technical solutions, in combination with the accompanying drawings:
the control method of the piezoelectric driver based on the differential motion principle is characterized in that the piezoelectric driver comprises a base 1, a differential unit, a rotor unit and an initial gap adjusting unit; the rotor unit and the initial gap adjusting unit are respectively fixed on the base 1, and the differential unit is vertically fixed on the initial gap adjusting unit; the differential unit comprises a differential flexible hinge 4, a left piezoelectric stack 5, a right piezoelectric stack 8 and two pre-tightening screws 9, wherein the differential flexible hinge 4 is of a symmetrical structure as a whole and comprises a fixing frame 401, a fixing hole 402, a piezoelectric stack mounting groove 403, a pre-tightening screw mounting hole 404, a Z-shaped flexible hinge group 405 and a driving pin 406; the piezoelectric stack mounting groove 403 is embedded in the fixing frame 401, the front end of the piezoelectric stack mounting groove 403 is connected with the Z-shaped flexible hinge group 405, and the rear end of the piezoelectric stack mounting groove 403 is connected with the fixing frame 401; the Z-shaped flexible hinge group 405 connects the driving pins 406 with the piezoelectric stack mounting grooves 403 on two sides respectively; the left piezoelectric stack 5 and the right piezoelectric stack 8 are respectively arranged in the piezoelectric stack mounting groove 403 through the pre-tightening screw 9, and the pre-tightening screw 9 acts on the rear end surface of the piezoelectric stack mounting groove 403 through the pre-tightening screw mounting hole 404 on the fixing frame 401; the left piezoelectric stack 5 and the right piezoelectric stack 8 have the same structure, and the whole left piezoelectric stack 5 is of a sphere-shaped structure with one end being a plane and the other end being a sphere; the front end of the piezoelectric stack mounting groove 403 is of a parallel symmetrical structure provided with a U-shaped groove, and the rear end of the piezoelectric stack mounting groove 403 is of an H-shaped structure; the Z-shaped flexible hinge set 405 is composed of 4Z-shaped hinges symmetrically distributed, one end of each Z-shaped hinge is connected with the driving pin 406, and the other end is connected with the piezoelectric stack mounting groove 403; the rotor unit comprises a guide rail 6 and a sliding block 7 which is connected to the guide rail 6 in a sliding way, and the sliding block 7 slides on the guide rail 6 under the driving of the differential motion output by the differential flexible hinge 4; the initial gap adjusting unit is used for adjusting the initial gap between the driving pin 406 of the differential flexible hinge 4 and the sliding block 7; simultaneously, a cooperative driving electric signal is applied to the left piezoelectric stack 5 and the right piezoelectric stack 8, and the Z-shaped flexible hinge group 405 is elastically deformed, so that differential motion is synthesized and output to inhibit rollback motion;
the control method of the piezoelectric driver includes the steps of:
step one, when the moment 0, the piezoelectric driver is in an initial state, the driving foot 406 is in the position A, the initial clearance delta y between the driving foot 406 and the sliding block 7 is changed through the initial clearance adjusting unit, and the output displacement of the sliding block 7 is measured at the same time, when no horizontal hysteresis part exists in the output displacement curve, the corresponding clearance is defined as zero clearance; thereafter, the initial gap Δy is appropriately enlarged;
step two, a first stage: at 0 to t 1 In a period of time, with the driving voltage U applied to the right piezoelectric stack r The right piezoelectric stack 8 will slowly elongate and push the differential flexible hinge 4 to elastically deform during which the drive leg 406 undergoes a displacement x from position a 1 And y 1 Reaching position B; in this process, the phase differenceIs defined as +.>
Step three, a second stage: at t 1 ～t 2 During a period of time, a driving voltage U is applied to the left and right piezoelectric stacks l And U r Maintaining a synchronous growth, the left piezoelectric stack 5 and the right piezoelectric stack 8 correspondingly produce the same amount of elongation during which the drive foot 406 is moved forward along the y-axis by a displacement y 2 Until contacting the slide 7 at the position C and generating a contact force P;
fourth, third stage: at t 2 ～t 3 During a period of time, the driving voltage U l Continue to grow, and U r Start to fall, the two change amplitudes are the same, and the change amplitude is defined as the push voltage U push During this time, the left piezoelectric stack 5 is elongated, while the right piezoelectric stack 8 is contracted, both varying to the same extent; in this process, the driving foot 406 moves positively in the x-axis from position C to position D, and due to the relative movement, a static friction force f will be generated and will drive the slider 7 as a driving force to produce the same displacement x in the x-axis positive direction as the driving foot 406 2 ；
Fifth, fourth stage: at t 3 ～t 4 In the period of time, the driving voltage U is opposite to the voltage variation in the third stage l And U r Maintaining synchronous descent, the left piezoelectric stack 5 and the right piezoelectric stack 8 produce the same amount of contraction during which the drive foot 406 moves negatively along the y-axis from position D to position E, with a corresponding displacement y 3 And is separated from the slider 7; during this process, the slide 7 remains stationary all the time because no relative movement of the drive foot 406 and the slide 7 in the x-axis direction occurs;
step six, fifth stage: at t 4 ～t 5 During the time period, the drive leg 406 is rapidly moved by displacement x in the negative x-axis direction from position E, as opposed to the fourth stage voltage change 2 To position B, prepare for the next cycle; in the process, the driving pin 406 and the sliding block 7 are always kept in a separated state, and the sliding block 7 cannot generate retreating movement;
step seven, at t 5 ～t n-1 In the time period, the driver repeats steps three to six, and the driving foot 406 correspondingly generates periodic differential motion to periodically contact and separate with the sliding block 7, so as to drive the sliding block 7 to perform long-stroke and non-rollback linear motion on the guide rail 6;
step eight, at t n-1 ～t n During the time period, when the slider is running to the target point, the drive foot 406 experiences a displacement x from position E 3 And y 4 Returning to position a, the end of this driving process.
Further, the initial gap adjusting unit comprises a fine adjusting mechanism 2 and a vertical plate 3, the fine adjusting mechanism 2 comprises a fine adjusting knob 201, a locking screw 203, a lower sliding table 204 and an upper sliding table 205, the lower sliding table 204 is fixed on the base 1, the upper sliding table 205 is connected to the lower sliding table 204 in a sliding manner and is limited by the locking screw 203, and the fine adjusting knob 201 is used for adjusting the relative displacement of the upper sliding table 205 and the lower sliding table 204; the vertical plate 3 is fixed on the upper surface of the upper sliding table 205, the differential flexible hinge 4 is fixed on the vertical surface of the vertical plate 3 through a screw, and the adjustment of the initial gap between the driving pin 406 of the differential flexible hinge 4 and the sliding block 7 of the rotor unit is realized through rotating the fine tuning knob 201.
Further, the guide rail 6 of the sub-unit is fixed on the boss of the base 1 by a screw, and the position of the slide block 7 is opposite to the position of the driving foot 406 of the differential flexible hinge 4.
Further, the differential motion process is as follows:
when the voltage U is applied to the left piezoelectric stack 5 only l The elongation of the left piezoelectric stack 5 is expressed as:
x l ＝n l d 33 U l
wherein n is l The number of layers d of the piezoelectric ceramic sheet of the left piezoelectric stack 5 33 For its piezoelectric constant, U l To the magnitude of the voltage applied thereto;
thereafter, the displacement x l The outputs in the x-direction and y-direction at the drive leg 406 after amplification by the differential flexible hinge 4 are:
x lout ＝A x x l
y lout ＝A y x l
wherein A is x 、A y The displacement magnification factors of the differential flexible hinge 4 along the x axis and the y axis are respectively;
similarly, when the voltage U is applied to the right piezoelectric stack 8 only r At this time, the right piezoelectric stack 8 is elongated by x r And the output displacement of the drive foot in the x-direction and the y-direction are expressed as:
x r ＝n r d 33 U r
x rout ＝A x x r
y rout ＝A y x r
wherein n is r The number of layers d of the piezoelectric ceramic sheets of the right piezoelectric stack 8 33 For its piezoelectric constant, U r To the magnitude of the voltage applied thereto;
when the voltage U is applied to the left piezoelectric stack 5 and the right piezoelectric stack 8 simultaneously l 、U r When the differential flexible hinge 4 shifts x the left piezoelectric stack 5 l Displacement x produced by right piezoelectric stack 8 r The combination is performed and output at the driving foot 406 for driving the slide 7 to slide on the guide rail 6, and the output motion is expressed as:
x out ＝x lout -x rout ＝A x (x l -x r )
y out ＝y lout +y rout ＝A y (x l +x r )
the upper two indicate the output x of the drive pin 406 along the x-axis out Depending on the displacement x produced by the left piezoelectric stack 5 l And the displacement x produced by the right piezoelectric stack 8 r The difference x of the displacement of (2) l -x r While driving the output y of the foot in the y-axis direction out Depending on the displacement x produced by the left piezoelectric stack 5 l And the displacement x produced by the right piezoelectric stack 8 r X of the displacement sum of (2) l +x r 。
Further, by adjusting the driving electric signals U of the left piezoelectric stack 5 and the right piezoelectric stack 8 L And U R I.e. the regulation and control of the movement speed of the slide 7 is achieved.
The invention has the beneficial effects that:
the piezoelectric driver based on the differential motion principle and the control method thereof can realize the inhibition of the rollback motion of the stick-slip type driver, the parasitic type driver, the inertial type driver and the like from the driving principle, and greatly improve the output performance and the service life of the driver. The invention has the advantages of simple structure, flexible control, wide application range and strong universality, the movement speed of the sliding block can be adjusted by adjusting the amplitude and the frequency of the cooperative driving electric signal under the set initial clearance, and the sliding block has unlimited travel in theory.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention and not to limit the invention unduly
FIG. 1 is a schematic perspective view of a piezoelectric actuator based on the principle of differential motion according to the present invention;
FIG. 2 is a schematic perspective view of the fine adjustment mechanism according to the present invention;
FIG. 3 (a) is a schematic perspective view of a vertical plate according to the present invention;
FIG. 3 (b) is a schematic view of another perspective view of the riser according to the present invention;
FIG. 4 is a schematic perspective view of a differential flexible hinge according to the present invention;
FIG. 5 is a timing control diagram of the electrical signals corresponding to the diamond-shaped tracks output by the present invention;
FIG. 6 is a timing control diagram of the coordinated driving electrical signals corresponding to the differential motion output by the present invention;
FIG. 7 is a trace of differential motion output by different phase differences of the co-drive electrical signals according to the present invention;
FIG. 8 is a trace of differential motion output at different unloading voltages while maintaining the phase difference of the co-drive electrical signals and the pushing voltage unchanged;
FIG. 9 is a trace of differential motion output at different driving voltages while maintaining the phase difference of the co-driving electric signals and the unloading voltage unchanged;
FIG. 10 is a schematic diagram of a process of implementing linear driving by an equivalent mechanism of the differential motion principle of the present invention; wherein, the liquid crystal display device comprises a liquid crystal display device,
(a) A state diagram is shown when the driving foot is positioned at the initial position A;
(b) Schematic diagram of the process state for driving the foot from position a to position B;
(c) Schematic diagram of the process state for driving the foot from position B to position C;
(d) Schematic diagram of the process state for driving the foot from position C to position D;
(e) Schematic diagram of the process state for driving the foot from position D to position E;
(f) Schematic diagram of the process state for driving the foot from position E to position B;
(g) Schematic diagram of the process state for driving the foot from position E to position a;
FIG. 11 is a graph showing the output displacement of the slider over time at different initial gaps when triangular waves with a voltage amplitude of 150V and a driving frequency of 1Hz are applied to the right piezoelectric stack alone;
FIG. 12 is a graph of output displacement of a slider over time for different magnitudes of unload voltage with initial gap, drive frequency, and the like;
FIG. 13 is a graph showing the output displacement of the slider over time at different magnitudes of the push voltage with the unloading voltage, the initial gap, and the drive frequency maintained constant;
FIG. 14 is a graph showing the output displacement of the slider over time at different drive frequencies with the unloading voltage, the pushing voltage, and the initial gap maintained constant;
in the figure:
1-a base; 2-a fine adjustment mechanism; 3-vertical plates; 4-differential flexible hinges; 5-left piezoelectric stack; 6, a guide rail; 7-a slide block; 8-right piezoelectric stack; 9-pre-tightening the screw; 201-a fine tuning knob; 202-positioning holes; 203-locking screws; 204-lower sliding table; 205-upper slipway; 401-fixing frame; 402-fixing holes; 403-piezoelectric stack mounting slots; 404-pretension screw mounting holes; 405-Z flexible hinge set; 406-drive pins.
Detailed Description
The details of the present invention and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a piezoelectric driver based on a differential motion principle includes a base 1, a differential unit, a mover unit, and an initial gap adjustment unit; the rotor unit and the initial gap adjusting unit are respectively fixed on the base 1 through screws, and the differential unit is vertically fixed on the initial gap adjusting unit; the differential unit comprises a differential flexible hinge 4, a left piezoelectric stack 5 and a right piezoelectric stack 8, wherein the left piezoelectric stack 5 and the right piezoelectric stack 8 are symmetrically arranged in the differential flexible hinge 4 through pre-tightening screws 9 respectively, so that the synthesis and output of differential motion are realized; the mover unit includes a guide rail 6 and a slider 7 slidably connected to the guide rail 6, the slider 7 slides on the guide rail 6 under the driving of the differential motion outputted from the differential flexible hinge 4, and an initial gap between the driving leg 406 of the differential flexible hinge 4 and the slider 7 is adjusted by an initial gap adjusting unit.
Further, as shown in fig. 2 and 3, the initial gap adjustment unit includes a fine adjustment mechanism 2 and a vertical plate 3, the fine adjustment mechanism 2 includes a fine adjustment knob 201, a positioning hole 202, a locking screw 203, a lower sliding table 204 and an upper sliding table 205, the lower sliding table 204 is fixed on the base 1 through a screw, the upper sliding table 205 is slidably connected on the lower sliding table 204 and can be limited through the locking screw 203, the fine adjustment knob 201 is fixed at the tail end of the lower sliding table 204 through a bracket and is abutted with the upper sliding table 205, and is used for adjusting the relative displacement between the upper sliding table 205 and the lower sliding table 204, the upper sliding table 205 is provided with a plurality of positioning holes 202, the vertical plate 3 is fixed on the upper surface of the upper sliding table 205 through a screw and the positioning hole 202, and the differential flexible hinge 4 is fixed on the vertical surface of the vertical plate 3 through a screw. The adjustment of the initial gap between the driving leg 406 of the differential flexible hinge 4 and the slider 7 of the mover unit is achieved by turning the trimming knob 201 of the trimming mechanism 2, and the self-locking of the trimming mechanism 2 is achieved by adjusting the locking screw 203.
As shown in fig. 4, further, the differential unit includes a differential flexible hinge 4, a left piezoelectric stack 5, a right piezoelectric stack 8, and two pre-tightening screws 9, where the differential flexible hinge 4 is a symmetrical structure, and includes a fixing frame 401, a fixing hole 402, a piezoelectric stack mounting groove 403, a pre-tightening screw mounting hole 404, a Z-shaped flexible hinge set 405, and a driving leg 406. The fixing frame 401 is of a C-shaped structure, and 4 fixing holes 402 are uniformly distributed on the fixing frame; the piezoelectric stack mounting groove 403 is embedded in the fixing frame 401, the front end of the piezoelectric stack mounting groove is of a parallel symmetrical structure provided with a U-shaped groove and is connected with the Z-shaped flexible hinge group 405, and the rear end of the piezoelectric stack mounting groove is of an H-shaped structure and is connected with the fixing frame 401; the Z-shaped flexible hinge group 405 connects the piezoelectric stack mounting groove 403 with the driving pin 406, the Z-shaped flexible hinge group 405 is composed of 4Z-shaped hinges symmetrically distributed, one end of each Z-shaped hinge is connected with the driving pin 406, and the other end is connected with the piezoelectric stack mounting groove 403; the differential flexible hinge 4 is fixed on the front end surface of the vertical plate 3 through a fixing hole 402 and a screw on the fixing frame 401. The pretensioning screw 9 acts on the rear end face of the piezoelectric stack mounting groove 403 through the pretensioning screw mounting hole 404, and is used for adjusting the pretensioning force of the piezoelectric stack. The left piezoelectric stack 5 and the right piezoelectric stack 8 are respectively and symmetrically arranged in the two piezoelectric stack mounting grooves 403 of the differential flexible hinge 4 in parallel through two pre-tightening screws 9, and the pre-tightening forces among the left piezoelectric stack 5, the right piezoelectric stack 8 and the piezoelectric stack mounting grooves 403 can be respectively adjusted through adjusting the two pre-tightening screws 9.
Further, the mover unit includes a guide rail 6 and a slider 7, the guide rail 6 is fixed on a boss of the base 1 by a screw, and the slider 7 slides on the guide rail 6 under the driving action of the differential motion output by the driving foot 406.
As shown in fig. 5, a timing control diagram of the electrical signals corresponding to the diamond-shaped trace output by the piezoelectric driver of the present invention is shown, and the diamond-shaped trace is the envelope of all the differential motions output by the present invention. Wherein U is L For driving the electric signal of the left piezoelectric stack 5, U R Is the driving electrical signal for the right piezoelectric stack 8.
As shown in fig. 6, a timing control diagram of the cooperative driving electric signals corresponding to the differential motion output by the present invention is shown, wherein the phase difference of the cooperative driving electric signals affects the overall shape size of the differential motion track, the unloading voltage affects the y-direction shape size of the differential motion track, and the pushing voltage affects the x-direction shape size of the differential motion track. By applying a cooperative driving electric signal to the left piezoelectric stack 5 and the right piezoelectric stack 8 at the same time, the Z-shaped flexible hinge group 405 will be elastically deformed, and differential motion can be synthesized and output to realize the function of suppressing the rollback motion.
As shown in fig. 7 to 9, fig. 7 is a track shape of differential motion output under different phase differences of the cooperative driving electric signals according to the present invention; FIG. 8 is a trace of differential motion output at different unloading voltages while maintaining the phase difference of the co-drive electrical signals and the pushing voltage unchanged; fig. 9 is a trace shape of differential motion output under different pushing voltages while keeping the phase difference of the cooperative driving electric signals and the unloading voltage unchanged.
The differential motion principle of the present invention is described as follows:
when the voltage U is applied to the left piezoelectric stack 5 only l When it is, its elongation can be expressed as:
x l ＝n l d 33 U l
wherein n is l The number of layers d of the piezoelectric ceramic sheet of the left piezoelectric stack 5 33 For its piezoelectric constant, U l To the magnitude of the voltage applied thereto.
Thereafter, the displacement x l Amplified by the differential flexible hinge 4 and output at the driving foot:
x lout ＝A x x l
y lout ＝A y x l
wherein A is x 、A y The displacement magnification of the differential flexible hinge 4 along the x axis and the y axis are respectively shown.
Similarly, when the voltage U is applied to the right piezoelectric stack 8 only r The elongation and the output displacement of the driving foot can be expressed as:
x r ＝n r d 33 U r
x rout ＝A x x r
y rout ＝A y x r
also, n r The number of layers d of the piezoelectric ceramic sheets of the right piezoelectric stack 8 33 For its piezoelectric constant, U r To the magnitude of the voltage applied thereto.
When the voltage U is applied to the left piezoelectric stack 5 and the right piezoelectric stack 8 simultaneously l 、U r The differential flexible hinge 4 will generate the position of the left piezoelectric stack 5Shift x l Displacement x produced by right piezoelectric stack 8 r The combination is carried out and output at the driving feet for driving the slide 7 to slide on the guide rail 6. The output motion can be expressed as:
x out ＝x lout -x rout ＝A x (x l -x r )
y out ＝y lout +y rout ＝A y (x l +x r )
this is the differential motion principle, the upper two of which show the output x of the drive foot 406 along the x-axis out Depending on the displacement x produced by the left piezoelectric stack 5 l And the displacement x produced by the right piezoelectric stack 8 r The difference x of the displacement of (2) l -x r While driving the output y of the foot in the y-axis direction out Depending on the displacement x produced by the left piezoelectric stack 5 l And the displacement x produced by the right piezoelectric stack 8 r X of the displacement sum of (2) l +x r 。
Taking forward driving as an example, when the phase difference of the triangular wave voltage is changed, the output track of the driving foot follows the phase difference based on the differential motion principleThe direction of movement is clockwise as shown in fig. 6. Further, the triangular wave voltage waveform is modified as shown in FIG. 5 when the discharge voltage U is changed respectively unload And a push voltage U push As shown in fig. 7 and 8, the output trajectory of the driving leg changes, and the direction of movement is clockwise.
Referring to fig. 5 and 9, the method for controlling the piezoelectric actuator based on the differential motion principle of the present invention comprises the following steps:
1. at time 0, the driver is in an initial state, the driving foot 406 is in position a, the knob of the fine adjustment mechanism 2 is adjusted, the initial gap deltay between the driving foot 406 and the slider 7 is changed, and simultaneously the output displacement of the slider 7 is measured, the corresponding gap is defined as zero gap when there is no horizontal hysteresis in the output displacement curve, as shown in fig. 10, after which the initial gap deltay is enlarged to a suitable extent, and the locking screw 203 is adjusted to fix the initial gap deltay, in this example 30 μm. As shown in fig. 10 (a).
2. The first stage: at 0 to t 1 In a period of time, along with the driving voltage U r The right piezoelectric stack 8 will slowly elongate and push the differential flexible hinge 4 to elastically deform during which the drive leg 406 undergoes a displacement x from position a 1 And y 1 Reaching position B. In this process, the phase differenceIs defined as +.>In this example, the phase difference +.>As shown in fig. 10 (b).
3. And a second stage: at t 1 ～t 2 During a period of time, the driving voltage U l And U r Maintaining a synchronous growth, the left piezoelectric stack 5 and the right piezoelectric stack 8 correspondingly produce the same amount of elongation during which the drive foot 406 is moved forward along the y-axis by a displacement y 2 Until it comes into contact with the slider 7 at position C and generates a contact force P. As shown in fig. 10 (c).
4. And a third stage: at t 2 ～t 3 During a period of time, the driving voltage U l Continue to grow, and U r Start to fall, the two change amplitudes are the same, and the change amplitude is defined as the push voltage U push In this example, the driving voltage is set to U push =50v. During this time, the left piezoelectric stack 5 expands, while the right piezoelectric stack 8 contracts, both varying to the same extent. In this process, the driving foot 406 moves positively in the x-axis from position C to position D, and due to the relative movement, a static friction force f will be generated and will drive the slider 7 as a driving force to produce the same displacement x in the x-axis positive direction as the driving foot 406 2 . As shown in fig. 10 (d).
5. Fourth stage: at the position oft 3 ～t 4 In the period of time, the driving voltage U is opposite to the voltage variation in the third stage l And U r Keep the synchronization falling (the voltage amplitude of this falling is defined as the unloading voltage U unload In this example set to U unload =60V), the left piezoelectric stack 5 and the right piezoelectric stack 8 produce the same amount of shrinkage, during which the drive foot 406 moves negatively along the y-axis from position D to position E, with a corresponding displacement y 3 And separate from the slide 7, during which the slide 7 remains stationary all the time because no relative movement of the drive foot 406 and the slide 7 in the x-axis direction occurs. As shown in fig. 10 (e).
6. Fifth stage: at t 4 ～t 5 During the time period, contrary to the fourth phase voltage change, which corresponds to the "slip" phase in the stick-slip piezoelectric actuator operation, the drive foot 406 rapidly moves displacement x from position E in the negative x-axis direction 2 To position B, ready for the next cycle. In this process, the driving foot 406 remains always separated from the slider 7, so that the slider 7 does not generate a retracting motion, i.e., the retracting motion is suppressed from the driving principle. As shown in fig. 10 (f).
7. At t 5 ～t n-1 In a period of time, the driver will repeat steps three to six, so that the driving leg 406 will generate periodic differential motion, and periodically contact and separate from the slider 7, so as to drive the slider 7 to perform long-stroke linear motion on the guide rail 6 without rollback.
8. At t n-1 ～t n During the time period, when the slider is running to the target point, the drive foot 406 experiences a displacement x from position E 3 And y 4 Returning to position a marks the end of this drive process. The above process is only exemplified by forward driving, and the driving electric signals U of the left piezoelectric stack 5 and the right piezoelectric stack 8 are similarly applied L And U R The reverse driving of the sliding block 7 can be realized by mutual exchange. As shown in fig. 10 (g).
By adjusting the driving electric signals U of the left piezoelectric stack 5 and the right piezoelectric stack 8 L And U R Can realize the regulation and control of the movement speed of the sliding block 7.
Referring to fig. 11, an experimental graph of the output displacement of the slider 7 with time is shown for the right piezoelectric stack 8 of the present invention, which is adjusted by 10 micrometers in the range of 0 micrometers to 20 micrometers in the initial gap ay under the independent action of the triangular wave voltage with the driving frequency of 1Hz and the voltage amplitude of 150V. As can be seen from the figure, when the initial clearance ay of the knob pair of the fine adjustment mechanism 2 is enlarged by 10 micrometers in order from 0 micrometers, the horizontal stagnation portion in the output displacement curve of the slider 7 increases accordingly.
Referring to FIG. 12, the invention is shown under the action of a cooperative driving electric signal with an initial gap of 30 μm and a driving frequency of 1Hz at an unloading voltage U unload In the range of 0V to 60V, 10V was adjusted in sequence, and the output displacement of the slider 7 was changed with time. It can be seen from the figure that the retracing movement portion of the output displacement curve of the slider 7 follows the unloading voltage U unload Is gradually reduced, indicating that the back-off movement of the driver is being gradually suppressed, when the voltage U is unloaded unload Above 50V, the retraction movement of the driver is completely inhibited.
Referring to fig. 13 and 14, fig. 13 shows the invention at the unloading voltage U unload 60V, initial gap delta y of 30 micrometers, and drive frequency of 1Hz under the action of a cooperative drive electric signal, under the action of a push voltage U push An experimental graph of the output displacement of the slide block 7 with time, which is in the range of 10V to 90V, and sequentially adjusts 10V;
FIG. 14 shows the driving voltage U according to the present invention push 50V, discharge voltage U unload An experimental graph of the output displacement of the sliding block 7 with time change by sequentially adjusting the driving frequency to 1Hz within the range of 1Hz to 10Hz under the action of a cooperative driving electric signal with an initial gap delta y of 30 microns at 60V; it can be seen that the initial gap Δy is maintained and the voltage U is unloaded unload On the premise of unchanged, the push voltage U is changed push The back-off movement of the driver is effectively suppressed at one of the drive frequencies.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The control method of the piezoelectric driver based on the differential motion principle is characterized in that the piezoelectric driver comprises a base (1), a differential unit, a rotor unit and an initial gap adjusting unit; the rotor unit and the initial gap adjusting unit are respectively fixed on the base (1), and the differential unit is vertically fixed on the initial gap adjusting unit; the differential unit comprises a differential flexible hinge (4), a left piezoelectric stack (5), a right piezoelectric stack (8) and two pre-tightening screws (9), wherein the differential flexible hinge (4) is of a symmetrical structure as a whole and comprises a fixing frame (401), a fixing hole (402), a piezoelectric stack mounting groove (403), a pre-tightening screw mounting hole (404), a Z-shaped flexible hinge group (405) and a driving pin (406); the piezoelectric stack mounting groove (403) is embedded in the fixing frame (401), the front end of the piezoelectric stack mounting groove (403) is connected with the Z-shaped flexible hinge group (405), and the rear end of the piezoelectric stack mounting groove (403) is connected with the fixing frame (401); the Z-shaped flexible hinge group (405) connects the driving pins (406) with the piezoelectric stack mounting grooves (403) on two sides respectively; the left piezoelectric stack (5) and the right piezoelectric stack (8) are respectively arranged in the piezoelectric stack mounting groove (403) through pre-tightening screws (9), and the pre-tightening screws (9) act on the rear end face of the piezoelectric stack mounting groove (403) through pre-tightening screw mounting holes (404) on the fixing frame (401); the left piezoelectric stack (5) and the right piezoelectric stack (8) have the same structure, and the whole left piezoelectric stack (5) is of a sphere-shaped structure with one end being a plane and the other end being a sphere; the front end of the piezoelectric stack mounting groove (403) is of a parallel symmetrical structure provided with a U-shaped groove, and the rear end of the piezoelectric stack mounting groove (403) is of an H-shaped structure; the Z-shaped flexible hinge group (405) consists of 4Z-shaped hinges which are symmetrically distributed, one end of each Z-shaped hinge is connected with a driving pin (406), and the other end is connected with a piezoelectric stack mounting groove (403); the rotor unit comprises a guide rail (6) and a sliding block (7) which is connected to the guide rail (6) in a sliding way, and the sliding block (7) slides on the guide rail (6) under the driving of the differential motion output by the differential flexible hinge (4); the initial clearance adjusting unit is used for adjusting the initial clearance between the driving pin (406) of the differential flexible hinge (4) and the sliding block (7); simultaneously, a cooperative driving electric signal is applied to the left piezoelectric stack (5) and the right piezoelectric stack (8), the Z-shaped flexible hinge group (405) generates elastic deformation, and differential motion is synthesized and output to restrain rollback motion;
the control method of the piezoelectric driver includes the steps of:
step one, when the moment 0, the piezoelectric driver is in an initial state, the driving pin (406) is in a position A, an initial gap delta y between the driving pin (406) and the sliding block (7) is changed through an initial gap adjusting unit, and meanwhile, the output displacement of the sliding block (7) is measured, and when no horizontal hysteresis part exists in an output displacement curve, the corresponding gap is defined as a zero gap; thereafter, the initial gap Δy is appropriately enlarged;
step two, a first stage: at 0 to t 1 In a period of time, with the driving voltage U applied to the right piezoelectric stack r The right piezoelectric stack (8) will slowly elongate and push the differential flexible hinge (4) to elastically deform during which the drive leg (406) undergoes a displacement x from position a 1 And y 1 Reaching position B; in this process, the phase differenceIs defined as +.>
Step three, a second stage: at t 1 ～t 2 During a period of time, a driving voltage U is applied to the left and right piezoelectric stacks l And U r Maintaining a synchronous growth, the left piezoelectric stack (5) and the right piezoelectric stack (8) correspondingly generate the same elongation, during which the driving foot (406) moves positively along the y-axis by a displacement y 2 Until contacting the slide block (7) at the position C and generating a contact force P;
fourth, third stage: at t 2 ～t 3 During a period of time, the driving voltage U l Continue to grow, and U r Start to fall, the two change amplitudes are the same, and the change amplitude is defined as the push voltage U push During this time, the left piezoelectric stack (5) is elongated, while the right piezoelectric stack (8) is contracted, both varying to the same extent; in this process, the driving foot (406) moves positively in the x-axis from position C to position D, and due to the relative movement, a static friction force f will be generated and act as a driving force to drive the slider (7) to positively displace in the x-axis the same displacement x as the driving foot (406) 2 ；
Fifth, fourth stage: at t 3 ～t 4 In the period of time, the driving voltage U is opposite to the voltage variation in the third stage l And U r While keeping the synchronous descent, the left piezoelectric stack (5) and the right piezoelectric stack (8) generate the same amount of shrinkage, during which the driving leg (406) moves negatively along the y-axis from position D to position E, with a corresponding displacement y 3 And is separated from the slide block (7); during this process, the slide (7) remains stationary all the time because no relative movement of the drive foot (406) and the slide (7) takes place in the x-axis direction;
step six, fifth stage: at t 4 ～t 5 During the time period, the drive leg (406) is moved rapidly from position E by a displacement x in the negative x-axis direction, as opposed to the fourth stage voltage change 2 To position B, prepare for the next cycle; in the process, the driving pin (406) and the sliding block (7) are always kept in a separated state, and the sliding block (7) cannot generate retreating movement;
step seven, at t 5 ～t n-1 In the time period, the driver repeats the steps three to six, and the driving pins (406) correspondingly generate periodic differential motion and periodically contact and separate with the sliding blocks (7), so as to drive the sliding blocks (7) to perform long-stroke and non-rollback linear motion on the guide rails (6);
step eight, at t n-1 ～t n During the time period, when the slider moves to the target point, the driving foot (406) experiences displacement x from the position E 3 And y 4 Returning to position a, the end of this driving process.
2. The method for controlling the piezoelectric driver based on the differential motion principle according to claim 1, wherein the initial gap adjusting unit comprises a fine adjusting mechanism (2) and a vertical plate (3), the fine adjusting mechanism (2) comprises a fine adjusting knob (201), a locking screw (203), a lower sliding table (204) and an upper sliding table (205), the lower sliding table (204) is fixed on the base (1), the upper sliding table (205) is slidably connected on the lower sliding table (204) and limited by the locking screw (203), and the fine adjusting knob (201) is used for adjusting the relative displacement of the upper sliding table (205) and the lower sliding table (204); the vertical plate (3) is fixed on the upper surface of the upper sliding table (205), the differential flexible hinge (4) is fixed on the vertical surface of the vertical plate (3) through screws, and the adjustment of the initial gap between the driving pin (406) of the differential flexible hinge (4) and the sliding block (7) of the rotor unit is realized through rotating the fine tuning knob (201).
3. A method of controlling a piezo-electric actuator based on the principle of differential motion according to claim 1, characterized in that the guide rail (6) of the mover unit is fastened to the boss of the base (1) by means of screws, the slider (7) being positioned opposite the driving foot (406) of the differential flexible hinge (4).
4. The method for controlling a piezoelectric actuator based on the principle of differential motion according to claim 1, wherein the differential motion process is:
when the voltage U is applied to the left piezoelectric stack (5) l When the elongation of the left piezoelectric stack (5) is expressed as:
x l ＝n l d 33 U l
wherein n is l The number of layers d of piezoelectric ceramic plates of the left piezoelectric stack (5) 33 For its piezoelectric constant, U l To the magnitude of the voltage applied thereto;
thereafter, the displacement x l The outputs in the x direction and the y direction at the driving pin (406) after being amplified by the differential flexible hinge (4) are respectively as follows:
x lout ＝A x x l
y lout ＝A y x l
wherein A is x 、A y The displacement magnification factors of the differential flexible hinge (4) along the x axis and the y axis are respectively;
similarly, when the voltage U is applied to the right piezoelectric stack (8) r At the time, the right piezoelectric stack (8) stretches by x r And the output displacement of the drive foot in the x-direction and the y-direction are expressed as:
x r ＝n r d 33 U r
x rout ＝A x x r
y rout ＝A y x r
wherein n is r The number of layers d of piezoelectric ceramic plates of the right piezoelectric stack (8) 33 For its piezoelectric constant, U r To the magnitude of the voltage applied thereto;
when the voltage U is applied to the left piezoelectric stack (5) and the right piezoelectric stack (8) respectively l 、U r When the differential flexible hinge (4) shifts x the left piezoelectric stack (5) l Displacement x generated by right piezoelectric stack (8) r Synthesizing and outputting at a driving foot (406) for driving a sliding block (7) to slide on a guide rail (6), and outputting motion expressed as:
x out ＝x lout -x rout ＝A x (x l -x r )
y out ＝y lout +y rout ＝A y (x l +x r )
the upper two expressions show the output x of the drive leg (406) along the x-axis direction out Dependent on the displacement x produced by the left piezoelectric stack (5) l And displacement x generated by the right piezoelectric stack (8) r The difference x of the displacement of (2) l -x r While driving the output y of the foot in the y-axis direction out Dependent on the displacement x produced by the left piezoelectric stack (5) l And displacement x generated by the right piezoelectric stack (8) r X of the displacement sum of (2) l +x r 。
5. A method of controlling a piezoelectric actuator based on the principle of differential motion according to claim 1, characterized in that the driving electrical signals U of the left piezoelectric stack (5) and the right piezoelectric stack (8) are regulated L And U R Is realized for the slide block (7)Is used for regulating and controlling the movement speed of the robot.
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