CN108199614A - Two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor and its driving method - Google Patents
Two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor and its driving method Download PDFInfo
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- CN108199614A CN108199614A CN201810081821.0A CN201810081821A CN108199614A CN 108199614 A CN108199614 A CN 108199614A CN 201810081821 A CN201810081821 A CN 201810081821A CN 108199614 A CN108199614 A CN 108199614A
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- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 5
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
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Abstract
A kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor and its driving method, to solve the technical problems such as thrust output of the current piezoelectricity stick-slip line motor caused by using single stator driving is small, stroke is short, precision is low.The present invention is made of asymmetric drive component, guide assembly, slide unit, pretightning force loader and fixed station.The asymmetric drive component adjusts its contact normal pressure between guide assembly, to realize the comprehensive regulation to frictional force by generating lateral displacement；Meanwhile the present invention by different Asymmetric Electric signal combination of stimulation asymmetric drive components, it can be achieved that output is reinforced and the movement multiple drive modes such as emergency stop type.The present invention has that simple in structure, load capacity is strong, and the features such as motion stabilization, has good application prospect in the micro-nanos such as optical precision instrument and semiconductor machining precision actuation and positioning field.
Description
Technical field
The present invention relates to a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor and its driving methods, belong to micro-
Receive precision actuation and field of locating technology.
Background technology
Due to the rapid development of micro-nano science and technology, traditional macroscopical large scale driving device, as common electric machine, gear pass
Dynamic, feed screw nut, worm and gear etc. have been difficult the required precision for meeting modern science and technology.All kinds of precision and ultra-precision machinings are with measuring skill
Art, MEMS, precision optics, semiconductor manufacturing, modern medicine and bio-genetics, aerospace, robot, military affairs
All there is an urgent need to submicron order, the precision actuation motors of micro/nano level for the science and technology field at the high tip such as technology.Piezoelectric material
The discovery of inverse piezoelectric effect and the appearance of piezoceramic material with superior function are so that the research of Precision Piezoelectric motor obtains
Extensive concern, and in precision actuation field show the prospect of being widely applied.
It is accurate since piezoelectric stack is small, frequency response is high, generates heat less, High power output, noiseless, steady performance
Processing and the widely used novel high-precision drive motor based on piezoelectric stack driving source in location technology.Traditional drive motor
Often there are the shortcomings of complicated, load output is small, and kinetic stability is poor, therefore, a kind of simple in structure, load capacity is designed
By force, and the micro/nano level stick-slip inertial drive motor of motion stabilization be very it is necessary to.
Invention content
To solve the problems such as complicated, load output is small, and kinetic stability is poor existing for traditional drive motor, this hair
It is bright to disclose a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor and its driving method.
The technical solution adopted in the present invention：
In order to achieve the above objectives, the present invention provides a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor, this is two-way
Micro-displacement scale-up version precision piezoelectricity stick-slip linear motor includes asymmetric drive component, guide assembly, slide unit, pretightning force loading
Device and fixed station.Described two asymmetric drive components are installed in parallel by the correspondence threaded hole of fixed station front end in fixation
On platform, the guide assembly is mounted on slide unit, and the slide unit is mounted on fixed station, and the pretightning force loader is mounted on solid
Ding Tai rear ends.
The asymmetric drive component includes square washer, hinge fixing bolt, pre-loading screw, asymmetric diamond shape and puts
Great institutions and piezoelectric stack；Piezoelectric stack is fixed on asymmetric diamond shape enlarger by the square washer and Ji meter screws
It is interior；The hinge fixing bolt is mounted on asymmetric diamond shape enlarger rear end；The asymmetric diamond shape enlarger
5025 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloys or Ti-13 titanium alloy materials can be used；It is described non-right
Single seamed edge geometry flexible hinge is provided on the right side of title formula diamond shape enlarger；The asymmetric diamond shape enlarger both sides are all provided with
Rigid connection beam I is equipped with, which connects two arc-shaped flexible hinge structures of homonymy；The asymmetric diamond shape
Enlarger rear end is provided with hinge fixing bolt mounting hole, and the screw thread of threaded hole is installed by hinge fixing bolt and hinge
Connection, fixed asymmetric diamond shape enlarger is on slide unit；The asymmetric diamond shape enlarger tail portion is provided with preload
Screw installs threaded hole, and the pre-loading screw installs axial pretightening of the threaded hole realization to piezoelectric stack by pre-loading screw；Institute
It states asymmetric diamond shape enlarger and is provided with gasket limiting slot；Rigidity is provided on the left of the asymmetric diamond shape enlarger
Tie-beam II, the arc-shaped flexible hinge is by being rigidly connected beam II and the crossbeam of front end is attached；It is described asymmetric
Semicircle driving foot is provided at the top of formula diamond shape enlarger；The asymmetric diamond shape enlarger front end is provided with horizontal stroke
Beam.
The guide assembly is biserial decussation roller guide rail；The guide assembly includes fixed guide rail, peripheral unit installation
Threaded hole, movable guiding rail, caging bolt, guide rail mounting hole, guide rail fixing bolt and roller rolling retainer component；The peripheral unit
Installation threaded hole can be connect with peripheral unit；The roller rolling retainer component respectively with movable guiding rail and fixed guide rail contact；Institute
It states caging bolt and is installed on fixed guide rail and movable guiding rail both ends；The guide rail mounting hole is pacified by guide rail fixing bolt and guide rail
It fills threaded hole to be threadedly coupled, fixed guide rail is installed on the guide rail mounting plane of slide unit.
The slide unit include guide rail installation threaded hole, guide rail mounting plane, pretightning force loader groove, upper limit screw,
Supporting rack, upper spring fixing bolt and upper sliding rail；The guide rail installation threaded hole is threadedly coupled with guide rail fixing bolt；Institute
It states guide assembly and threaded hole is installed on guide rail mounting plane by guide rail；The pretightning force loader groove and pretightning force
Top decoupling bulb contact on loader；The upper limit screw is mounted on the both ends of upper sliding rail；Support frame as described above with
Sliding boss mounting plane contacts；The lower spring fixing bolt installation fixed spring of upper spring fixing bolt cooperation；On described
Sliding rail is contacted with spherical rail plate.
The pretightning force loader includes manual adjusting screw rod and decoupling bulb；The external screw thread of the manual adjusting screw rod with
The internal thread of pretightning force loader installation threaded hole carries out threaded connection cooperation；The decoupling bulb and pretightning force loader groove
Contact.
The fixed station includes lower spring fixing bolt, spring, sliding boss mounting plane, hinge positive stop lug boss, hinge
Mounting plane, hinge installation threaded hole, lower limit screw, spherical rail plate, cushion block, base installing hole, lower slider track and
Pretightning force loader installs threaded hole；The lower spring fixing bolt installs fixed spring with spring fixing bolt is closed；It is described
Sliding boss mounting plane is contacted with supporting rack；The hinge positive stop lug boss limits the installation site of asymmetric drive component；
Asymmetric drive component is fixedly mounted in the hinge mounting plane and hinge installation threaded hole；The lower limit screw is mounted on
The both ends of lower slider track；It is moved in the sliding rail that the spherical shape rail plate is formed in upper sliding rail with lower slider track；Institute
Stating cushion block can be contacted with other peripheral units；Installation can be fixed in the base installing hole with other peripheral units；Institute
Lower slider track is stated to contact with spherical rail plate；The pretightning force loader installation threaded hole connects with pretightning force loader screw thread
It connects.
It is flexible that straight circular flexible hinge, straight beam-chamfering hinge, ellipse can be selected in the list seamed edge geometry flexible hinge
Hinge, V-arrangement flexible hinge, straight circle-chamfering flexible hinge, straight circle-oval flexible hinge, hyperbola flexible hinge or throwing
Object linear flexible hinge, the height of the straight circular flexible hinge is a1, hinge thickness is b1, straight radius of circle is c1, wherein b1<a1
And 2c1<a1；The height of the straight beam-chamfering hinge is a2, hinge thickness is b2, straight beam length is c2, wherein b2<a2And c2<
a2；The height of the ellipse flexible hinge is a3, a length of 2b of ellipse short shaft3, a length of 2c of transverse3, hinge thickness is d3,
Middle b3、c3Meet：x2/c3 2+y2/b3 2=1 and (c3>b3>0), d3<a3；The height of the V-arrangement flexible hinge is a4, hinge thickness is
b4, hinge width c4, the angle at V-arrangement angle is d4, wherein b4<a4, c4<a4And 0o<d4<180o；The straight circle-chamfering is flexible
The height of hinge is a5, hinge thickness is b5, hinge width c5, straight radius of circle is d5, wherein b5<a5, c5<a5And d5<c5；Institute
The height for stating straight circle-oval flexible hinge is a6, flexible hinge thickness is c6, a length of 2b of ellipse short shaft6, transverse is a length of
2d6, straight radius of circle is e6, wherein b6、d6Meet x2/b6 2+y2/d6 2=1 and (b6>d6>0), c6<a6, 2e6<a6；It is described parabola shaped
The height of flexible hinge is a7, it is parabolical burnt accurate away from for b7, hinge width c7, hinge thickness is d7, wherein b7Meet：y2=
4b7X, c7<a7, d7<a7；The height of the hyperbola flexible hinge is a8, hinge width c8, a length of 2b of hyperbola real axis8,
The a length of 2d of the imaginary axis8, wherein c8<a8And b8、d8Meet：x2/b8 2-y2/d8 2=1；The gasket limits well width as B, the rectangular pad
Piece width is C, and the value range of thickness b, wherein b is 1 ~ 2.5mm, B=（C+1）mm；The thickness of the semicircle driving foot is
The value range of N, wherein N are 6 ~ 9mm, and the semicircle sufficient end face of driving is accordingly coated with ceramic-like or glass fibre class friction material
Material.
In addition, in order to achieve the above object, the present invention provides a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip is straight
Line driving method, it is real which is based on a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor
It is existing；The driving method is mainly under the excitation of Asymmetric Electric signal, if being simultaneously D by two groups of symmetry1Electric signal difference
Two asymmetric drive components are inputted, wherein, symmetry D1Value range for 51 ~ 99%, guide assembly can be significantly increased
Positive thrust output；If it is simultaneously D by two groups of symmetry2Electric signal input two asymmetric drive components respectively, wherein,
Symmetry D2Value range for 1 ~ 49%, the reversed thrust output of guide assembly can be significantly increased；If simultaneously by one group of symmetry
For D1, another group of symmetry is D2Electric signal input two asymmetric drive components respectively, it can be achieved that guide assembly is moved through
Accurate emergency stop in journey.
The asymmetrical wave electric signal includes：It is sawtooth wave electric signal, power function wave electric signal, trapezoidal wave electric signal, non-right
Claim square wave electric signal or its arbitrary two kinds of signals combination.
Beneficial effects of the present invention：
The asymmetric drive component of the present invention is due to using asymmetric diamond shape enlarger so that asymmetric drive component
Stiffness Distribution is uneven in an axial direction, and excitation asymmetric drive component driving end generates lateral displacement, adjustment asymmetric driving
The normal pressure contacted between component and guide assembly increases the friction drive between asymmetric drive component and guide assembly,
Reduce the frictional resistance between asymmetric drive component and guide assembly, comprehensive regulation asymmetric drive component and guide rail group
Frictional force between part reduces displacement and rewinds rate, realizes the frictional force that process is entirely driven to piezoelectricity stick-slip horizontal driving device
Comprehensive regulation；Simultaneously under the excitation of Asymmetric Electric signal, by the way that the Asymmetric Electric signal input two of various combination is non-right
Title formula drive component is, it can be achieved that export the multiple drive modes such as reinforced and movement emergency stop type, and then be obviously improved piezoelectricity stick-slip
Line motor machinery output characteristics can reach nano grade positioning precision, grade movement travel under open loop condition.Have with current
Technology is compared, have it is simple in structure, load capacity is strong, and the features such as motion stabilization.
Description of the drawings
The structure that Fig. 1 show a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention is shown
It is intended to；
The asymmetric that Fig. 2 show a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention drives
Dynamic component structure diagram；
Fig. 3 show a kind of asymmetric water chestnut of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention
Shape enlarger structural scheme of mechanism；
Fig. 4 show a kind of the adoptable soft of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention
Property hinge schematic diagram；
Fig. 5 show a kind of guide assembly knot of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention
Structure schematic diagram；
The slide unit structure that Fig. 6 show a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention is shown
It is intended to I；
The slide unit structure that Fig. 7 show a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention is shown
It is intended to II；
Fig. 8 show a kind of pretightning force loading of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention
Device structure diagram；
Fig. 9 show a kind of fixed station structure of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention
Schematic diagram；
Figure 10 show a kind of Asymmetric Electric of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention
Signal drive waveforms schematic diagram；
Figure 11 show a kind of driving method of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor proposed by the present invention
Various combination excitation signal waveforms and its motion principle schematic diagram；
Figure 12 show the two-way micro-displacement scale-up version essence that a kind of asymmetric drive component proposed by the present invention is installed back-to-back
The structure diagram of close piezoelectricity stick-slip linear motor；
Figure 13 show the two-way micro-displacement scale-up version essence that a kind of asymmetric drive component proposed by the present invention is installed back-to-back
The various combination excitation signal waveforms and its motion principle schematic diagram of close piezoelectricity stick-slip linear motor driving method.
Specific embodiment
Specific embodiment one：Illustrate present embodiment with reference to Fig. 1 ~ Fig. 9, present embodiments provide for a kind of two-way microbits
The specific embodiment of scale-up version precision piezoelectricity stick-slip linear motor is moved, a kind of two-way micro-displacement scale-up version precision piezoelectricity glues
The specific embodiment of sliding linear motor is expressed as follows：
A kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor is by asymmetric drive component 1, guide assembly
2nd, slide unit 3, pretightning force loader 4 and fixed station 5 form.
The asymmetric drive component 1 includes square washer 1-1, hinge fixing bolt 1-2, pre-loading screw 1-3, non-right
Title formula diamond shape enlarger 1-4 and piezoelectric stack 1-5.The square washer 1-1 and pre-loading screw 1-3 consolidate piezoelectric stack 1-5
It is scheduled in asymmetric diamond shape enlarger 1-4.The square washer 1-1 uses wolfram steel material, it is therefore an objective to protect piezoelectric stack
1-5 prevents it from generating shear strain or local pressure unevenness, and the thickness of the square washer 1-1 is b, specifically, chooses rectangular pad
Best results when the thickness b of piece 1-1 is 1 ~ 2.5mm, the thickness of square washer 1-1 is 1.5mm in present embodiment.The piezoelectricity
It stacks 1-5 and PI or the product of NEC Corporation can be used.The hinge fixing bolt 1-2 is used for asymmetric diamond shape enlarger 1-4
Installation fix.The asymmetric diamond shape enlarger 1-4 is by single seamed edge geometry flexible hinge 1-4-1, I 1- of rigid connection beam
It is 4-2, hinge fixing bolt mounting hole 1-4-3, pre-loading screw installation threaded hole 1-4-4, gasket limiting slot 1-4-5, arc-shaped soft
Property hinge 1-4-6, II 1-4-7 of rigid connection beam, semicircle driving foot 1-4-8 and crossbeam 1-4-9 form.The asymmetric water chestnut
5025 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloys or Ti-13 titanium alloys can be used in shape enlarger 1-4
Material, asymmetric diamond shape enlarger 1-4 uses 7075 aluminum alloy materials in present embodiment.The asymmetric diamond shape is put
Single seamed edge geometry flexible hinge 1-4-1 is provided on the right side of great institutions 1-4, realizes that asymmetric diamond shape enlarger 1-4's is non-right
Claim structure；Straight circular flexible hinge, straight beam-chamfering hinge, ellipse can be selected in the list seamed edge geometry flexible hinge 1-4-1
Flexible hinge, V-arrangement flexible hinge, straight circle-chamfering flexible hinge, straight circle-oval flexible hinge, hyperbola flexible hinge
Or parabola shaped flexible hinge；The height of the straight circular flexible hinge is a1, hinge thickness is b1, straight radius of circle is c1, wherein
b1<a1And 2c1<a1；The height of the straight beam-chamfering hinge is a2, hinge thickness is b2, straight beam length is c2, wherein b2<a2
And c2<a2；The height of the ellipse flexible hinge is a3, a length of 2b of ellipse short shaft3, a length of 2c of transverse3, hinge thickness is
d3, wherein b3、c3Meet：x2/c3 2+y2/b3 2=1 and (c3>b3>0), d3<a3；The height of the V-arrangement flexible hinge is a4, hinge thickness
It spends for b4, hinge width c4, the angle at V-arrangement angle is d4, wherein b4<a4, c4<a4And 0o<d4<180o；Straight circle-the chamfering
The height of flexible hinge is a5, hinge thickness is b5, hinge width c5, straight radius of circle is d5, wherein b5<a5, c5<a5And d5<
c5；The height of the straight circle-ellipse flexible hinge is a6, flexible hinge thickness is c6, a length of 2b of ellipse short shaft6, transverse
A length of 2d6, straight radius of circle is e6, wherein b6、d6Meet x2/b6 2+y2/d6 2=1 and (b6>d6>0), c6<a6, 2e6<a6；The parabolic
The height of linear flexible hinge is a7, it is parabolical burnt accurate away from for b7, hinge width c7, hinge thickness is d7, wherein b7Meet：
y2=4b7X, c7<a7, d7<a7；The height of the hyperbola flexible hinge is a8, hinge width c8, hyperbola real axis is a length of
2b8, a length of 2d of the imaginary axis8, wherein c8<a8And b8、d8Meet：x2/b8 2-y2/d8 2=1.Single seamed edge geometry described in present embodiment is soft
Property hinge 1-4-1 select oval flexible hinge, wherein a3=6mm, b3=1mm, c3=2mm, d3=0.5mm.The asymmetric water chestnut
Shape enlarger 1-4 both sides are provided with I 1-4-2 of rigid connection beam, two circles of the rigid connection I 1-4-2 connection homonymies of beam
Arcuate flexible hinge 1-4-6 structures.The asymmetric diamond shape enlarger 1-4 rear ends are provided with the installation of hinge fixing bolt
Hole 1-4-3, the threaded connection that threaded hole 5-6 is installed by hinge fixing bolt 1-2 and hinge realize that asymmetric diamond shape amplifies
Direct fixations of the mechanism 1-4 on slide unit 3.The asymmetric diamond shape enlarger 1-4 tail portions are provided with pre-loading screw installation
Threaded hole 1-4-4, pre-loading screw 1-3 install threaded hole 1-4-4 by pre-loading screw and realize to the axial pre- of piezoelectric stack 1-5
Tightly.The asymmetric diamond shape enlarger 1-4 is provided with gasket limiting slot 1-4-5, and gasket limiting slot 1-4-5 width is B, square
Shape gasket 1-1 width is C, and the value range of thickness b, wherein b is 1 ~ 2.5mm, wherein B=（C+1）Mm, b in present embodiment
=1.5mm, B=7mm, C=6mm.The asymmetric diamond shape enlarger 1-4 is provided with rigid connection II 1-4-7 of beam, the circle
Arcuate flexible hinge 1-4-6 is attached by the crossbeam 1-4-9 of be rigidly connected II 1-4-7 of beam and front end.It is described asymmetric
Semicircle driving foot 1-4-8 is provided at the top of formula diamond shape enlarger 1-4, the thickness of the semicircle driving foot 1-4-8 is N,
The thickness of movable guiding rail 2-3 is M, wherein N<M can ensure effective contact area, improve transmission efficiency, the wherein value range of N
For 6 ~ 9mm, M=（N+2）Mm, N=6mm, M=8mm in present embodiment.The semicircle driving foot 1-4-8 end faces are accordingly coated with pottery
Porcelain class or glass fibre class friction material, the semicircle driving foot 1-4-8 driving guide assemblies 2 are for linear motion.It is described non-
Symmetrical diamond shape enlarger 1-4 front ends are provided with crossbeam 1-4-9.
The guide assembly 2 is biserial decussation roller guide rail, and the guide assembly 2 includes fixed guide rail 2-1, peripheral unit
Threaded hole 2-2, movable guiding rail 2-3, caging bolt 2-4, guide rail mounting hole 2-5, guide rail fixing bolt 2-6 and roller are installed to keep
Frame component 2-7.The peripheral unit installation threaded hole 2-2 can be connect with peripheral unit.The movable guiding rail 2-3 and asymmetric
1 contact face of drive component is coated with ceramic-like or glass fibre class friction material.The roller rolling retainer component 2-7 respectively with work
Dynamic guide rail 2-3 and fixed guide rail 2-1 contacts.The caging bolt 2-4 is used for the sports limiting of movable guiding rail 2-3.The guide rail
Mounting hole 2-5 is threadedly coupled with guide rail installation threaded hole 3-1 by guide rail fixing bolt 2-6 fixed guide rail 2-1 being fixed on cunning
On the guide rail mounting plane 3-2 of platform 3.
Stainless steel material can be used in the slide unit 3, and the slide unit 3 includes guide rail installation threaded hole 3-1, guide rail mounting plane
3-2, pretightning force loader groove 3-3, upper limit screw 3-4, supporting rack 3-5, upper spring fixing bolt 3-6 and upper sliding rail
3-7.The guide rail installation threaded hole 3-1 is threadedly coupled with guide rail fixing bolt 2-6.The guide rail is installed threaded hole 3-1 and is led
Rail mounting plane 3-2 fixes for installation of the guide assembly 2 on slide unit 3.The pretightning force loader groove 3-3 and pretightning force
Loader 4 contacts, which decouples the sports limiting of bulb 4-2 for 4 top of pretightning force loader.The upper limit screw 3-
4 are mounted on the both ends of upper sliding rail 3-7, for the sports limiting of spherical rail plate 5-8, it are avoided to skid off sliding rail
3-7.Support frame as described above 3-5 is contacted with slide unit mounting plane 5-3, is used to support slide unit 3.The upper spring fixing bolt 3-6 matches
Lower spring fixing bolt 5-1 is closed to fix for the installation of spring 5-2.The upper sliding rail 3-7 connects with spherical shape rail plate 5-8
It touches, for the slip of slide unit 3.
The pretightning force loader 4 includes manual adjusting screw rod 4-1 and decoupling bulb 4-2.The manual adjusting screw rod 4-1
Using high-alloy steel materials.The interior spiral shell of the external screw thread of the manual adjusting screw rod 4-1 and pretightning force loader installation threaded hole 3-3
Line carries out threaded connection cooperation, and screw can be realized by adjusting manual adjusting screw rod 4-1.It is carried out using bulb 4-2 is decoupled
Mobile decoupling, decoupling bulb 4-2 push slide unit 3 to be transported along the sliding rail straight line that upper sliding rail 3-7 and lower slider track 5-11 is formed
It is dynamic, complete the movement of asymmetric drive component 1.
The fixed station 5 can be used stainless steel material, the fixed station 5 include lower spring fixing bolt 5-1, spring 5-2,
Slide unit mounting plane 5-3, hinge positive stop lug boss 5-4, hinge mounting plane 5-5, hinge installation threaded hole 5-6, lower limit screw
5-7, spherical rail plate 5-8, cushion block 5-9, fixed station mounting hole 5-10, lower slider track 5-11 and the installation of pretightning force loader
Threaded hole 5-12.The lower spring fixing bolt 5-1 is fixed with spring fixing bolt 3-6 is closed for the installation of spring 5-2.Institute
Spring 5-2 is stated to move for the backhaul of slide unit 3.The sliding boss mounting plane 5-3 is contacted with supporting rack 3-5.The hinge
Positive stop lug boss 5-4 is used to limit the installation site of asymmetric drive component 1, and asymmetric drive component 1 can be rapidly completed
It is fixedly mounted.The hinge mounting plane 5-5 and hinge installation threaded hole 5-6 pacify for the fixed of asymmetric drive component 1
Dress.The lower limit screw 5-7 is mounted on the both ends of lower slider track 5-11, for the sports limiting of spherical rail plate 5-8.
It is moved in the sliding rail that the spherical shape rail plate 5-8 is formed in upper sliding rail 3-7 with lower slider track 5-11.The cushion block 5-
9 can be contacted with other peripheral units, have the function of damping, anti-skidding.The fixed station mounting hole 5-10 can with outside other
It encloses device and installation is fixed.The lower slider track 5-11 is contacted with spherical shape rail plate 5-8, for the slip of slide unit 3.Institute
It states pretightning force loader installation threaded hole 5-12 to be threadedly coupled with pretightning force loader 4, the precession by pretightning force loader 4 is long
The position of the adjustable slide unit 3 of degree, realizes pretightning force 4 adjusting to pretightning force of loader.
Specific embodiment two：Illustrate present embodiment with reference to Figure 10 ~ 11, present embodiment proposes a kind of two-way microbit
Move the specific embodiment of scale-up version precision piezoelectricity stick-slip linear motor driving method I, a kind of two-way micro-displacement scale-up version
Accurate piezoelectricity stick-slip linear motor driving method I is expressed as follows：
The driving method of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor, which can be divided into, exports reinforced and movement emergency stop
Type, mainly described two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor use asymmetric diamond shape enlarger 1-4,
So that Stiffness Distribution is uneven and generate lateral displacement in an axial direction for asymmetric drive component 1, adjustment asymmetric drive component 1
The normal pressure contacted between guide assembly 2, and then regulate and control the frictional force between asymmetric drive component 1 and guide assembly 2；
Meanwhile under the Asymmetric Electric signal excitation of various combination, realize and export the multiple drive modes such as reinforced and movement emergency stop type,
It is comprehensive to promote piezoelectricity stick-slip line motor machinery output characteristics.A kind of asymmetrical wave electric signal includes：Sawtooth wave electric signal,
Power function wave electric signal, trapezoidal wave electric signal, asymmetric square waves electric signal or its arbitrary two kinds of signals combination.In present embodiment
Asymmetrical wave electric signal selects sawtooth wave electric signal.
The reinforced driving method of output can be specially that forward direction is exported reinforced and reversely exported reinforced.Wherein, it ties
Close Figure 11（a）Illustrate, it is as follows that the reinforced forward direction of the output exports reinforced driving method：
The present invention is used as driving source by two asymmetric drive components 1 are in parallel,（a）Two groups of interior symmetry are 51% ~ 99%
Sawtooth wave electric signal, symmetry is 90% in present embodiment, is inputted two asymmetric drive components 1 respectively, can make
Asymmetric drive component 1 generates positive thrust output, and its thrust output promotes 1 times or more, output speed promoted 1 times with
On, delivery efficiency promotes 1 times or more.Its specific motion process is as follows：
The first step：t0For initial time, the piezoelectric stack 1-5 of two asymmetric drive components 1 does not power at this time, asymmetric
Free state is presented in formula diamond shape enlarger 1-4, and movable guiding rail 2-3 is contacted with semicircle driving foot 1-4-8, stationary；
Second step：t0To t1Moment, two groups of pumping signals are the slow rising edge of sawtooth wave, two piezoelectric stacks in time period
1-5 slowly increases with voltage and extends certain distance at a slow speed, since piezoelectric stack 1-5 is embedded in asymmetric diamond shape enlarger
Inside 1-4, therefore asymmetric diamond shape enlarger 1-4 will generate main motion in y-direction, y directions flexible deformation elongation with
Piezoelectric stack 1-5 elongations are equal, and main amoeboid movements of the asymmetric diamond shape enlarger 1-4 in y directions will make semicircle drive
Action spot 1-4-8 and movable guiding rail 2-3 is squeezed, and increases the maximum static friction between semicircle driving foot 1-4-8 and movable guiding rail 2-3
Power is not likely to produce sliding phenomenon, ensures that the sticking phenomenon, that is, movable guiding rail 2-3 and semicircle driving foot 1-4-8 in " viscous " stage are protected
It holds opposing stationary.It, will in x positive directions again because asymmetric diamond shape enlarger 1-4 is using asymmetric diamond shape enlarger
Generate additional hunt effect, the displacement of semicircle driving foot 1-4-8 is Δ x, this two asymmetric driving group moved
The guide rail 2-3 that directly innervates of part 1 generates Δ X displacements, and Δ X in x positive directions>2Δx；
Third walks：t1To t2Moment, two groups of pumping signals are sawtooth wave drastically failing edge, two piezoelectric stacks in time period
1-5 drastically declines with voltage and shortens certain distance rapidly and return back to initial length, and asymmetric diamond shape enlarger 1-4 is not
It is squeezed by piezoelectric stack 1-5, will also return back to original shape, semicircle driving foot 1-4-8 will simultaneously occur on x, y direction
The rapid movement that retracts, the rollback for driving foot 1-4-8 in y directions semicircle at this time move no longer Compressive activities guide rail 2-3, reduce
With the direct normal pressures of movable guiding rail 2-3 so that be easier sliding phenomenon to occur, while also reduce semicircle drive between the two
Rollbacks of the action spot 1-4-8 in x directions moves the interference to movable guiding rail 2-3, ensure that the sliding phenomenon in " cunning " stage is more increased
The generation of effect efficiently reduces the small displacement Δ l in x negative directions when movable guiding rail 2-3 is withdrawn, increases asymmetric
The step-length of formula drive component 1；
Displacement final movable guiding rail 2-3 is Δ s=Δ X- Δ l,（Δs>0）；
4th step：Carry out the process that second step is walked to third successively repeatedly, asymmetric drive component 1 will connect in x positive directions
Continuous step motion.
With reference to Figure 11（b）Illustrate, the reinforced reinforced driving method of reversely output of the output is as follows：
The present invention is used as driving source by two asymmetric drive components 1 are in parallel,（b）Two groups of interior symmetry are 1% ~ 49%
Sawtooth wave electric signal, symmetry is 10% in present embodiment, is inputted two piezoelectric stack 1-5 respectively, can make asymmetric
Drive component 1 generates reversed thrust output, and its thrust output promotes 1 times or more, and output speed promotes 1 times or more, output effect
Rate promotes 1 times or more.Its specific motion process is as follows：
The first step：t0For initial time, the piezoelectric stack 1-5 of two asymmetric drive components 1 does not power at this time, asymmetric
Free state is presented in formula diamond shape enlarger 1-4, and movable guiding rail 2-3 is contacted with semicircle driving foot 1-4-8, stationary；
Second step：t0To t1Moment, two groups of pumping signals are that sawtooth wave steeply rises edge, two piezoelectric stacks in time period
1-5 increased dramatically with voltage and extend certain distance rapidly, since piezoelectric stack 1-5 is embedded in asymmetric diamond shape enlarger
Inside 1-4, therefore asymmetric diamond shape enlarger 1-4 will generate main motion in y-direction, y directions flexible deformation elongation with
Piezoelectric stack 1-5 elongations are equal, and main amoeboid movements of the asymmetric diamond shape enlarger 1-4 in y directions will make semicircle drive
Action spot 1-4-8 and movable guiding rail 2-3 is squeezed, and because asymmetric diamond shape enlarger 1-4 uses asymmetric diamond shape enlarger
Structure will generate additional hunt effect in x positive directions, and the displacement of semicircle driving foot 1-4-8 is Δ x, and semicircle drive
The acceleration of action spot 1-4-8 is much larger than the acceleration of rail plate, then is more also easy to produce the sliding phenomenon in " cunning " stage, that is, slides and lead
Displacement of the displacement of rail much smaller than semicircle driving foot 1-4-8, two asymmetric drive components 1 of this movement directly promote
Movable guiding rail 2-3 is made to generate Δ l displacements, and Δ l in x positive directions<Δx；
Third walks：t1To t2Moment, two groups of pumping signals are the slow failing edge of sawtooth wave, two piezoelectric stacks in time period
1-5 slowly declines with voltage and shortens certain distance at a slow speed and return back to initial length, and asymmetric diamond shape enlarger 1-4 is not
It is squeezed by piezoelectric stack 1-5, will also return back to original shape, semicircle driving foot 1-4-8 will simultaneously occur on x, y direction
Retract at a slow speed movement, and there are maximum static friction forces between semicircle driving foot 1-4-8 and rail plate at this time, are not likely to produce sliding
Phenomenon ensures that the sticking phenomenon, that is, movable guiding rail 2-3 and semicircle driving foot 1-4-8 in " viscous " stage keep opposing stationary, semicircle
Shape driving foot 1-4-8 retracts to original state, and the displacement in x negative directions is Δ x, and two asymmetrics of this movement drive
The guide rail 2-3 that directly innervates of component 1 generates Δ X displacements, and Δ X in x negative directions>2Δx；
Displacement final movable guiding rail 2-3 is Δ s=Δ l- Δ X,（Δs<0）；
4th step：Carry out the process that second step is walked to third successively repeatedly, asymmetric drive component 1 will connect in x negative directions
Continuous step motion.
With reference to Figure 11（c）Illustrate, the movement emergency stop type driving method is as follows：
The present invention is used as driving source by two asymmetric drive components 1 are in parallel,（c）Two groups of interior symmetry are respectively 51% ~
99% and 1% ~ 49% sawtooth wave electric signal, symmetry is 90% and 10% in present embodiment, is inputted two piezo stacks respectively
Heap 1-5 can make one of asymmetric drive component 1 generate positive thrust output, another asymmetric drive component 1 produces
Raw reversed thrust output, it is final to realize accurate emergency stop in 2 motion process of guide assembly.Its specific motion process is as follows：
The first step：t0For initial time, the piezoelectric stack 1-5 of two asymmetric drive components 1 does not power at this time, asymmetric
Free state is presented in formula diamond shape enlarger 1-4, and movable guiding rail 2-3 is contacted with semicircle driving foot 1-4-8, stationary；
Second step：t0To t1Moment, one group of pumping signal are the slow rising edge of sawtooth wave, and one group of pumping signal is rapid for sawtooth wave
Rising edge, one of piezoelectric stack 1-5 slowly increases with voltage and extends certain distance at a slow speed in time period, asymmetric
Diamond shape enlarger 1-4 will generate main motion, y directions flexible deformation elongation and piezoelectric stack 1-5 elongation phases in y-direction
It will make semicircle driving foot 1-4-8 and movable guiding rail Deng, main amoeboid movements of the asymmetric diamond shape enlarger 1-4 in y directions
2-3 is squeezed, and increases the maximum static friction force between semicircle driving foot 1-4-8 and movable guiding rail 2-3, it is existing to be not likely to produce sliding
As ensureing that the sticking phenomenon, that is, movable guiding rail 2-3 and semicircle driving foot 1-4-8 in " viscous " stage keep opposing stationary, and because non-
Symmetrical diamond shape enlarger 1-4 uses asymmetric diamond shape enlarger, and additional parasitic fortune will be generated in x positive directions
Dynamic, the displacement of semicircle driving foot 1-4-8 is Δ x, this asymmetric drive component 1 moved directly innervates guide rail 2-
3 generate Δ x displacement in x positive directions；
Another piezoelectric stack 1-5 increased dramatically with voltage and extend certain distance rapidly, asymmetric diamond shape enlarger 1-4
Main motion will be generated in y-direction, and y directions flexible deformation elongation is equal with piezoelectric stack 1-5 elongations, asymmetric diamond shape
Main amoeboid movements of the enlarger 1-4 in y directions will be such that semicircle driving foot 1-4-8 and movable guiding rail 2-3 squeezes, and because non-right
Title formula diamond shape enlarger 1-4 uses asymmetric diamond shape enlarger, and additional hunt effect will be generated in x positive directions,
It is Δ x that semicircle, which drives the displacement of foot 1-4-8, and acceleration the adding much larger than rail plate of semicircle driving foot 1-4-8
Speed is then more also easy to produce the sliding phenomenon in " cunning " stage, i.e., the displacement of rail plate is much smaller than semicircle driving foot 1-4-8's
Displacement, the guide rail 2-3 that directly innervates of asymmetric drive component 1 of this movement generate Δ l displacements in x positive directions, and
Δl<Δx；Displacement in movable guiding rail 2-3 time periods is Δ x+ Δs l；
Third walks：t1To t2At the moment, drastically failing edge, one group of pumping signal are slow for sawtooth wave for sawtooth wave for one group of pumping signal
Failing edge, one of piezoelectric stack 1-5 drastically declines with voltage and shortens certain distance rapidly and return back to just in time period
Beginning length, asymmetric diamond shape enlarger 1-4 are not squeezed by piezoelectric stack 1-5, will also return back to original shape, semicircle
Drive foot 1-4-8 that the rapid movement that retracts will occur simultaneously on x, y direction, at this time semicircle driving foot 1-4-8 returning in y directions
Movement no longer Compressive activities guide rail 2-3 is moved back, is reduced and the direct normal pressures of movable guiding rail 2-3 so that be easier between the two
Sliding phenomenon occurs, while also reduces rollback movements of the semicircle driving foot 1-4-8 in x directions and movable guiding rail 2-3 is done
It disturbs, ensure that the sliding phenomenon in " cunning " stage more efficiently occurs, efficiently reduce when movable guiding rail 2-3 is withdrawn and born in x
Small displacement Δ l on direction；
Another piezoelectric stack 1-5 slowly declines with voltage and shortens certain distance at a slow speed and return back to initial length, asymmetric
Diamond shape enlarger 1-4 is not squeezed by piezoelectric stack 1-5, will also return back to original shape, and semicircle driving foot 1-4-8 will be
X, occur the movement that retracts at a slow speed on y directions simultaneously, and semicircle driving foot 1-4-8 and rail plate be there are maximum static friction force,
Sliding phenomenon is not likely to produce, ensures that the sticking phenomenon, that is, movable guiding rail 2-3 and semicircle driving foot 1-4-8 in " viscous " stage keep phase
To static, the displacement of semicircle driving foot 1-4-8 is Δ x, and the asymmetric drive component 1 of this movement, which directly innervates, leads
Rail 2-3 generates Δ x displacement in x negative directions；
Displacement final movable guiding rail 2-3 for Δ s=（Δx+Δl）-（Δl+Δx）=0；
4th step：Carry out the process that second step is walked to third, the essence that asymmetric drive component 1 will be realized in moving successively repeatedly
True emergency stop.
Specific embodiment three：Illustrate present embodiment with reference to Figure 10,12,13, present embodiment proposes a kind of non-right
The two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor driving method II that title formula drive component 1 is installed back-to-back it is specific
Embodiment, the two-way micro-displacement scale-up version precision piezoelectricity stick-slip straight line that a kind of asymmetric drive component is installed back-to-back
Driving method II is expressed as follows：
The driving side of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor that asymmetric drive component 1 is installed back-to-back
Method, which can be divided into, exports reinforced and movement emergency stop type, the two-way microbit that mainly described asymmetric drive component is installed back-to-back
It moves scale-up version precision piezoelectricity stick-slip linear motor and uses asymmetric diamond shape enlarger 1-4 so that asymmetric drive component 1
Stiffness Distribution is uneven and generate lateral displacement in an axial direction, is contacted between adjustment asymmetric drive component 1 and guide assembly 2
Normal pressure, and then regulate and control the frictional force between asymmetric drive component 1 and guide assembly 2；Meanwhile in the non-right of various combination
Claim under electric signal excitation, realize that output is reinforced and move the multiple drive modes such as emergency stop type, it is comprehensive to promote piezoelectricity stick-slip straight line
Motor machinery output characteristics.As shown in figure 12, a kind of asymmetrical wave electric signal includes：Sawtooth wave electric signal, power function wave
Electric signal, trapezoidal wave electric signal, asymmetric square waves electric signal or its arbitrary two kinds of signals combination.Asymmetrical wave in present embodiment
Electric signal selects sawtooth wave electric signal.
The reinforced driving method of output can be specially that forward direction is exported reinforced and reversely exported reinforced.Wherein, it ties
Close Figure 13（a）Illustrate, it is as follows that the reinforced forward direction of the output exports reinforced driving method：
The present invention is used as driving source by two asymmetric drive components 1 are in parallel,（a）Two groups of interior symmetry are respectively 51% ~
99% and 1% ~ 49% sawtooth wave electric signal, symmetry is 90% and 10% in present embodiment, by the sawtooth wave that symmetry is 90%
The sawtooth wave electric signal that symmetry is 10% is inputted right asymmetric formula and driven by electric signal input left asymmetric formula drive component 1
Dynamic component 1 can make asymmetric drive component 1 generate positive thrust output, and its thrust output promotes 1 times or more, output speed
Degree promotes 1 times or more, and delivery efficiency promotes 1 times or more.Its specific motion process is as follows：
The first step：t0For initial time, the piezoelectric stack 1-5 of two asymmetric drive components 1 does not power at this time, asymmetric
Free state is presented in formula diamond shape enlarger 1-4, and movable guiding rail 2-3 is contacted with semicircle driving foot 1-4-8, stationary；
Second step：t0To t1Moment, the electric signal that symmetry is 90% are the slow rising edge of sawtooth wave, and the interior left side of time period is pressed
Electricity stacks 1-5 and slowly increases with voltage and extend certain distance at a slow speed, due to piezoelectric stack 1-5 insertion asymmetric diamond shape amplifications
Inside mechanism 1-4, therefore asymmetric diamond shape enlarger 1-4 will generate main motion, the elongation of y directions flexible deformation in y-direction
Amount is equal with piezoelectric stack 1-5 elongations, and main amoeboid movements of the asymmetric diamond shape enlarger 1-4 in y directions will make semicircle
Shape drives foot 1-4-8 and movable guiding rail 2-3 to squeeze, and the maximum increased between semicircle driving foot 1-4-8 and movable guiding rail 2-3 is quiet
Frictional force is not likely to produce sliding phenomenon, ensures the sticking phenomenon, that is, movable guiding rail 2-3 and semicircle driving foot 1-4- in " viscous " stage
8 keep opposing stationary.Again because asymmetric diamond shape enlarger 1-4 is using asymmetric diamond shape enlarger, in x positive directions
Additional hunt effect will be generated, the displacement of semicircle driving foot 1-4-8 is Δ x, and left asymmetric formula drives in this movement
The guide rail 2-3 that directly innervates of component 1 generates Δ x displacement in x positive directions；
The electric signal that symmetry is 10% is that sawtooth wave steeply rises edge, in time period right side piezoelectric stack 1-5 with voltage drastically
Increase and extend certain distance rapidly, inside piezoelectric stack 1-5 insertion asymmetric diamond shape enlargers 1-4, thus it is non-right
Title formula diamond shape enlarger 1-4 will generate main motion in y-direction, and y directions flexible deformation elongation is extended with piezoelectric stack 1-5
Measure it is equal, main amoeboid movements of the asymmetric diamond shape enlarger 1-4 in y directions will make semicircle driving foot 1-4-8 with it is movable
Guide rail 2-3 is squeezed, and because asymmetric diamond shape enlarger 1-4 is using asymmetric diamond shape enlarger, will in x positive directions
Additional hunt effect is generated, the displacement of semicircle driving foot 1-4-8 is Δ x, and the acceleration of semicircle driving foot 1-4-8
Much larger than the acceleration of rail plate, then the sliding phenomenon in " cunning " stage is more also easy to produce, i.e. the displacement of rail plate is much smaller than
The displacement of semicircle driving foot 1-4-8, then right asymmetric formula drive component 1 directly innervates guide rail 2-3 during this is moved
Δ l displacements, and Δ l are generated in x negative directions<Δx；Then the displacements of final movable guiding rail 2-3 within the time period are Δ x- Δs
l；
Third walks：t1To t2Moment, the electric signal that symmetry is 90% are sawtooth wave drastically failing edge, and the interior left side of time period is pressed
Electricity stacks 1-5 and drastically declines with voltage and shorten certain distance rapidly and return back to initial length, asymmetric diamond shape enlarger
1-4 is not squeezed by piezoelectric stack 1-5, will also return back to original shape, semicircle driving foot 1-4-8 will be same on x, y direction
Shi Fasheng retracts rapidly movement, at this time semicircle driving foot 1-4-8 y directions rollback movement no longer Compressive activities guide rail 2-3,
It reduces and the direct normal pressures of movable guiding rail 2-3 so that be easier that sliding phenomenon occurs between the two, while also reduce half
Rollbacks of the circular drives foot 1-4-8 in x directions moves the interference to movable guiding rail 2-3, ensure that the sliding phenomenon in " cunning " stage
It is more efficient to occur, the small displacement Δ l in x negative directions when movable guiding rail 2-3 is withdrawn is efficiently reduced, this movement
The middle left asymmetric formula drive component 1 guide rail 2-3 that directly innervates generates Δ l displacements in x negative directions；
The electric signal that symmetry is 10% is the slow failing edge of sawtooth wave, and the interior right side piezoelectric stack 1-5 of time period is slow with voltage
Decline and shorten certain distance at a slow speed and return back to initial length, asymmetric diamond shape enlarger 1-4 is not by piezoelectric stack 1-5's
It squeezing, will also return back to original shape, the movement that retracts at a slow speed will simultaneously occur on x, y direction for semicircle driving foot 1-4-8, and
There are maximum static friction forces with rail plate by semicircle driving foot 1-4-8, are not likely to produce sliding phenomenon, ensure the viscous of " viscous " stage
Stagnant phenomenon, that is, movable guiding rail 2-3 keeps opposing stationary with semicircle driving foot 1-4-8, the displacement of semicircle driving foot 1-4-8
For Δ x, the guide rail 2-3 that directly innervates of right asymmetric formula drive component 1 generates Δ x displacement in x positive directions in this movement；
Then the displacement of final movable guiding rail 2-3 is the Δ x-2 Δ l of Δ s=2,（Δs>0）；
4th step：Carry out the process that second step is walked to third successively repeatedly, asymmetric drive component 1 will connect in x positive directions
Continuous step motion.
With reference to Figure 13（b）Illustrate, the reinforced reinforced driving method of reversely output of the output is as follows：
The present invention is used as driving source by two asymmetric drive components 1 are in parallel,（b）Two groups of interior symmetry are respectively 1% ~ 49%
With 51% ~ 99% sawtooth wave electric signal, symmetry is 10% and 90% in present embodiment, by the sawtooth wave electricity that symmetry is 10%
The sawtooth wave electric signal that symmetry is 90% is inputted the driving of right asymmetric formula by signal input left asymmetric formula drive component 1
Component 1 similarly, can make asymmetric drive component 1 generate reversed thrust output, and its thrust output promotes 1 times or more, output
Speed promotes 1 times or more, and delivery efficiency promotes 1 times or more.Its specific motion process is reinforced described specific with reference to positive output
Motion process.
The movement emergency stop type driving method can be specially positive movement emergency stop type and counter motion emergency stop type.Wherein, it ties
Close Figure 13（c）Illustrate, the positive movement emergency stop type driving method is as follows：
The present invention is used as driving source by two asymmetric drive components 1 are in parallel,（c）Two groups of interior symmetry are 51% ~ 99%
Sawtooth wave electric signal, symmetry is 90% in present embodiment, and sawtooth wave electric signal difference that two groups of symmetry are 90% is defeated
Enter the asymmetric drive component 1 of arranged on left and right sides, left asymmetric formula drive component 1 can be made to generate positive thrust output, right side
Asymmetric drive component 1 generates reversed thrust output, final accurate emergency stop during realizing 2 positive movement of guide assembly.Its
Specific motion process is as follows：
The first step：t0For initial time, the piezoelectric stack 1-5 of two asymmetric drive components 1 does not power at this time, asymmetric
Free state is presented in formula diamond shape enlarger 1-4, and movable guiding rail 2-3 is contacted with semicircle driving foot 1-4-8, stationary；
Second step：t0To t1Moment, two groups of pumping signals are the slow rising edge of sawtooth wave, two piezoelectric stacks in time period
1-5 slowly increases with voltage and extends certain distance at a slow speed, since piezoelectric stack 1-5 is embedded in asymmetric diamond shape enlarger
Inside 1-4, therefore asymmetric diamond shape enlarger 1-4 will generate main motion in y-direction, y directions flexible deformation elongation with
Piezoelectric stack 1-5 elongations are equal, and main amoeboid movements of the asymmetric diamond shape enlarger 1-4 in y directions will make semicircle drive
Action spot 1-4-8 and movable guiding rail 2-3 is squeezed, and increases the maximum static friction between semicircle driving foot 1-4-8 and movable guiding rail 2-3
Power is not likely to produce sliding phenomenon, ensures that the sticking phenomenon, that is, movable guiding rail 2-3 and semicircle driving foot 1-4-8 in " viscous " stage are protected
It holds opposing stationary.It, will in x positive directions again because asymmetric diamond shape enlarger 1-4 is using asymmetric diamond shape enlarger
Additional hunt effect is generated, the displacement of semicircle driving foot 1-4-8 is Δ x.Left asymmetric formula driving group in this movement
The guide rail 2-3 that directly innervates of part 1 generates Δ x displacement in x positive directions, and right asymmetric formula drive component 1 directly promotes to live
Dynamic guide rail 2-3 generates Δ x displacement in x negative directions；Then the displacements of movable guiding rail 2-3 within the time period are 0, the i.e. period
Interior movable guiding rail 2-3 is remained stationary as；
Third walks：t1To t2Moment, two groups of pumping signals are sawtooth wave drastically failing edge, two piezoelectric stacks in time period
1-5 drastically declines with voltage and shortens certain distance rapidly and return back to initial length, and asymmetric diamond shape enlarger 1-4 is not
It is squeezed by piezoelectric stack 1-5, will also return back to original shape, semicircle driving foot 1-4-8 will simultaneously occur on x, y direction
The rapid movement that retracts, the rollback for driving foot 1-4-8 in y directions semicircle at this time move no longer Compressive activities guide rail 2-3, reduce
With the direct normal pressures of movable guiding rail 2-3 so that be easier sliding phenomenon to occur, while also reduce semicircle drive between the two
Rollbacks of the action spot 1-4-8 in x directions moves the interference to movable guiding rail 2-3, ensure that the sliding phenomenon in " cunning " stage is more increased
The generation of effect efficiently reduces small displacement Δ l in the x direction when movable guiding rail 2-3 is withdrawn, and left side is non-in this movement
The symmetrical drive component 1 guide rail 2-3 that directly innervates generates Δ l displacements, right asymmetric formula drive component in x negative directions
The 1 guide rail 2-3 that directly innervates generates Δ l displacements in x positive directions；Then displacement final movable guiding rail 2-3 is 0, i.e., movable
Guide rail 2-3 is remained stationary as；
4th step：Carry out the process that second step is walked to third successively repeatedly, asymmetric drive component 1 will realize positive movement mistake
Accurate emergency stop in journey.
With reference to Figure 13（d）Illustrate, the counter motion emergency stop type driving method is as follows：
The present invention is used as driving source by two asymmetric drive components 1 are in parallel,（c）Two groups of interior symmetry are 1% ~ 49%
Sawtooth wave electric signal, symmetry is 10% in present embodiment, and the sawtooth wave electric signal that two groups of symmetry are 10% is inputted respectively
The asymmetric drive component 1 of arranged on left and right sides similarly, can make left asymmetric formula drive component 1 generate reversed thrust output,
Right asymmetric formula drive component 1 generates positive thrust output, final to realize that 2 counter motion of guide assembly is accurate anxious in the process
Stop.Its specific motion process specific motion process with reference to described in positive movement emergency stop type.
Summary content, the present invention provide a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor and its drive
Dynamic method, the two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor use asymmetric diamond shape enlarger so that
Stiffness Distribution is uneven and generate lateral displacement in an axial direction for asymmetric drive component, adjusts asymmetric drive component and guide rail
The normal pressure contacted between component, the frictional force between comprehensive regulation asymmetric drive component and guide assembly；The present invention carries
The driving method of confession can realize that output is reinforced and moves the multiple drive modes such as emergency stop type, and then be obviously improved piezoelectricity stick-slip
Line motor machinery output characteristics.Asymmetric diamond shape enlarger is assembled into asymmetric drive component with piezoelectric stack, fills
With simple, can easily be accommodated；Designed load maintainer can accurately ensure asymmetric drive component along linear drives.The present invention
With it is simple in structure, load capacity is strong, and the features such as motion stabilization, the micro-nanos such as optical precision instrument and semiconductor machining precision
Driving is with having good application prospect in positioning field.
Claims (8)
1. a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor, it is characterised in that：It is non-right that the linear motor includes
Title formula drive component（1）, guide assembly（2）, slide unit（3）, pretightning force loader（4）And fixed station（5）；Wherein, two it is non-right
Title formula drive component（1）It is installed in parallel in fixed station（5）Front end, guide assembly（2）Mounted on slide unit（3）On, slide unit（3）Peace
Mounted in fixed station（5）On, pretightning force loader（4）Mounted on fixed station（5）Rear end；The asymmetric drive component（1）
Including square washer（1-1）, hinge fixing bolt（1-2）, pre-loading screw（1-3）, asymmetric diamond shape enlarger（1-4）With
Piezoelectric stack（1-5）；The square washer（1-1）And pre-loading screw（1-3）By piezoelectric stack（1-5）It is fixed on asymmetric water chestnut
Shape enlarger（1-4）It is interior；The hinge fixing bolt（1-2）Mounted on asymmetric diamond shape enlarger（1-4）Rear end；
The asymmetric diamond shape enlarger（1-4）5025 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titaniums can be used
Alloy or Ti-13 titanium alloy materials；The asymmetric diamond shape enlarger（1-4）Right side is provided with single seamed edge geometry flexible hinge
Chain（1-4-1）；The asymmetric diamond shape enlarger（1-4）Both sides are both provided with rigid connection beam I（1-4-2）, the rigidity
Tie-beam connects two arc-shaped flexible hinges of homonymy（1-4-6）Structure；The asymmetric diamond shape enlarger（1-4）Afterwards
End set has hinge fixing bolt mounting hole（1-4-3）, pass through hinge fixing bolt（1-2）Threaded hole is installed with hinge（5-
6）Threaded connection, fixed asymmetric diamond shape enlarger（1-4）In slide unit（3）On；The asymmetric diamond shape enlarger
Structure（1-4）Tail portion is provided with pre-loading screw installation threaded hole（1-4-4）, the pre-loading screw（1-3）It is installed by pre-loading screw
Threaded hole（1-4-4）It realizes to piezoelectric stack（1-5）Axial pretightening；The asymmetric diamond shape enlarger（1-4）Setting
There is gasket limiting slot（1-4-5）；The asymmetric diamond shape enlarger（1-4）Left side is provided with rigid connection beam II（1-4-
7）, the arc-shaped flexible hinge（1-4-6）Pass through the beam II that is rigidly connected（1-4-7）With the crossbeam of front end（1-4-9）It carries out
Connection；The asymmetric diamond shape enlarger（1-4）Top is provided with semicircle driving foot（1-4-8）；The asymmetric
Diamond shape enlarger（1-4）Front end is provided with crossbeam（1-4-9）.
2. a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor according to claim 1, it is characterised in that：Institute
State guide assembly（2）For biserial decussation roller guide rail；The guide assembly（2）Including fixed guide rail（2-1）, peripheral unit installation
Threaded hole（2-2）, movable guiding rail（2-3）, caging bolt（2-4）, guide rail mounting hole（2-5）, guide rail fixing bolt（2-6）And rolling
Column retainer component（2-7）；The peripheral unit installs threaded hole（2-2）It can be connect with peripheral unit；The roller rolling retainer
Component（2-7）Respectively with movable guiding rail（2-3）With fixed guide rail（2-1）Contact；The caging bolt（2-4）Fixation is installed on to lead
Rail（2-1）And movable guiding rail（2-3）Both ends；The guide rail mounting hole（2-5）Pass through guide rail fixing bolt（2-6）It is installed with guide rail
Threaded hole（3-1）It is threadedly coupled, fixed guide rail is installed（2-1）In slide unit（3）Guide rail mounting plane（3-2）On.
3. a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor according to claim 1, it is characterised in that：Institute
State slide unit（3）Threaded hole is installed including guide rail（3-1）, guide rail mounting plane（3-2）, pretightning force loader groove（3-3）, the upper limit
Position screw（3-4）, supporting rack（3-5）, upper spring fixing bolt（3-6）With upper sliding rail（3-7）；The guide rail installs screw thread
Hole（3-1）With guide rail fixing bolt（2-6）It is threadedly coupled；The guide assembly（2）Threaded hole is installed by guide rail（3-1）Installation
In guide rail mounting plane（3-2）On；The pretightning force loader groove（3-3）With pretightning force loader（4）On top decoupling
Bulb（4-2）Contact；The upper limit screw（3-4）Mounted on upper sliding rail（3-7）Both ends；Support frame as described above（3-5）
With sliding boss mounting plane（5-3）Contact；The upper spring fixing bolt（3-6）The lower spring fixing bolt of cooperation（5-1）Peace
Fill fixed spring（5-2）；The upper sliding rail（3-7）With spherical rail plate（5-8）Contact.
4. a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor according to claim 1, it is characterised in that：Institute
State pretightning force loader（4）Including manual adjusting screw rod（4-1）With decoupling bulb（4-2）；The manual adjusting screw rod（4-1）'s
External screw thread installs threaded hole with pretightning force loader（5-12）Internal thread carry out threaded connection cooperation；The decoupling bulb（4-
2）With pretightning force loader groove（3-3）Contact.
5. a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor according to claim 1, it is characterised in that：Institute
State fixed station（5）Including lower spring fixing bolt（5-1）, spring（5-2）, sliding boss mounting plane（5-3）, hinge limit convex
Platform（5-4）, hinge mounting plane（5-5）, hinge installation threaded hole（5-6）, lower limit screw（5-7）, spherical rail plate（5-
8）, cushion block（5-9）, base installing hole（5-10）, lower slider track（5-11）Threaded hole is installed with pretightning force loader（5-12）；
The lower spring fixing bolt（5-1）With closing spring fixing bolt（3-6）Fixed spring is installed（5-2）；The sliding boss
Mounting plane（5-3）With supporting rack（3-5）Contact；The hinge positive stop lug boss（5-4）Limit asymmetric drive component（1）'s
Installation site；The hinge mounting plane（5-5）Threaded hole is installed with hinge（5-6）Asymmetric drive component is fixedly mounted
（1）；The lower limit screw（5-7）Mounted on lower slider track（5-11）Both ends；The spherical shape rail plate（5-8）Upper
Sliding rail（3-7）With lower slider track（5-11）It is moved in the sliding rail of composition；The cushion block（5-9）It can be with other peripheral units
It is contacted；The base installing hole（5-10）Installation can be fixed with other peripheral units；The lower slider track（5-
11）With spherical rail plate（5-8）Contact；The pretightning force loader installs threaded hole（5-12）With pretightning force loader（4）
It is threadedly coupled.
6. a kind of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor according to claim 1, it is characterised in that：Institute
State single seamed edge geometry flexible hinge（1-4-1）Straight circular flexible hinge, straight beam-chamfering hinge, oval flexible hinge can be selected
Chain, V-arrangement flexible hinge, straight circle-chamfering flexible hinge, straight circle-oval flexible hinge, hyperbola flexible hinge or parabolic
Linear flexible hinge, the height of the straight circular flexible hinge is a1, hinge thickness is b1, straight radius of circle is c1, wherein b1<a1And
2c1<a1；The height of the straight beam-chamfering hinge is a2, hinge thickness is b2, straight beam length is c2, wherein b2<a2And c2<a2；
The height of the ellipse flexible hinge is a3, a length of 2b of ellipse short shaft3, a length of 2c of transverse3, hinge thickness is d3, wherein
b3、c3Meet：x2/c3 2+y2/b3 2=1 and (c3>b3>0), d3<a3；The height of the V-arrangement flexible hinge is a4, hinge thickness is b4,
Hinge width is c4, the angle at V-arrangement angle is d4, wherein b4<a4, c4<a4And 0o<d4<180o；Straight circle-chamfering the flexible hinge
Height be a5, hinge thickness is b5, hinge width c5, straight radius of circle is d5, wherein b5<a5, c5<a5And d5<c5；It is described straight
The height of circle-oval flexible hinge is a6, flexible hinge thickness is c6, a length of 2b of ellipse short shaft6, a length of 2d of transverse6,
Straight radius of circle is e6, wherein b6、d6Meet x2/b6 2+y2/d6 2=1 and (b6>d6>0), c6<a6, 2e6<a6；The parabola shaped flexibility
The height of hinge is a7, it is parabolical burnt accurate away from for b7, hinge width c7, hinge thickness is d7, wherein b7Meet：y2=4b7X,
c7<a7, d7<a7；The height of the hyperbola flexible hinge is a8, hinge width c8, a length of 2b of hyperbola real axis8, the imaginary axis
A length of 2d8, wherein c8<a8And b8、d8Meet：x2/b8 2-y2/d8 2=1；The gasket limiting slot（1-4-5）Width is B, the side
Shape gasket（1-1）Width is C, and the value range of thickness b, wherein b is 1 ~ 2.5mm, B=（C+1）mm；The semicircle driving
Foot（1-4-8）Thickness for N, wherein the value range of N is 6 ~ 9mm, the semicircle driving foot（1-4-8）End face is accordingly coated with
Ceramic-like or glass fibre class friction material.
7. a kind of driving side of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor applied to the claims 1
Method, it is characterised in that：The driving method is mainly under the excitation of Asymmetric Electric signal, if being simultaneously D by two groups of symmetry1's
Electric signal inputs two asymmetric drive components respectively（1）, wherein, symmetry D1Value range for 51 ~ 99%, can be notable
Increase guide assembly（2）Positive thrust output；If it is simultaneously D by two groups of symmetry2Electric signal input respectively two it is non-right
Title formula drive component（1）, wherein, symmetry D2Value range for 1 ~ 49%, guide assembly can be significantly increased（2）It is reversed defeated
Go out thrust；If it is simultaneously D by one group of symmetry1, another group of symmetry is D2Electric signal input the driving of two asymmetrics respectively
Component（1）, it can be achieved that guide assembly（2）Accurate emergency stop in motion process.
8. a kind of driving method of two-way micro-displacement scale-up version precision piezoelectricity stick-slip linear motor according to claim 7,
It is characterized in that, the Asymmetric Electric signal includes sawtooth wave electric signal, power function wave electric signal, trapezoidal wave electric signal, non-right
Claim square wave electric signal or the combination of its arbitrary two kinds of signal.
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| CN110492781A (en) * | 2019-08-05 | 2019-11-22 | 包头稀土研究院 | Three-level micro displacement magnifying mechanism and its amplification method |
| CN110798094A (en) * | 2019-04-08 | 2020-02-14 | 浙江师范大学 | Novel piezoelectric linear precision driving device based on parasitic inertia principle |
| CN111474663A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity vertical focusing mechanism with compact structure |
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| CN112838786A (en) * | 2019-11-22 | 2021-05-25 | 北京大学 | Linear motor with precise driving and positioning functions |
| CN111474662A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity horizontal focusing mechanism with compact structure |
| CN111474663A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity vertical focusing mechanism with compact structure |
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| CN113381638B (en) * | 2021-05-31 | 2023-10-24 | 西安交通大学 | Linear actuating device with shock-resistant overload function and actuating method |
| CN113612406A (en) * | 2021-08-17 | 2021-11-05 | 吉林大学 | Piezoelectric driver based on differential motion principle and control method thereof |
| CN113612406B (en) * | 2021-08-17 | 2023-07-21 | 吉林大学 | Piezoelectric driver based on differential motion principle and control method thereof |
| CN114337359A (en) * | 2021-12-25 | 2022-04-12 | 西安交通大学 | Large-displacement injection type driver capable of performing bidirectional actuation based on pressure-induced thickening effect |
| CN114337359B (en) * | 2021-12-25 | 2023-10-24 | 西安交通大学 | Large-displacement penetration driver capable of bidirectionally actuating based on pressure thickening effect |
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