CN105827141A - Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof - Google Patents
Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof Download PDFInfo
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- CN105827141A CN105827141A CN201610386960.5A CN201610386960A CN105827141A CN 105827141 A CN105827141 A CN 105827141A CN 201610386960 A CN201610386960 A CN 201610386960A CN 105827141 A CN105827141 A CN 105827141A
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- H—ELECTRICITY
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Abstract
Provided are an oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and a driving method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is limited is solved. The motor is composed of a base, a pre-pressure adjustment device, an oblique-trapezoid stator and an oblique-trapezoid rotor, the stator adopts a symmetric flexible hinge structure to produce displacement amplification, lateral displacement is produced by means of nonuniform axial rigidity distribution of a semicircular drive foot, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the linear piezoelectric motor is significantly improved. The oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the micro-nano precision driving and positioning fields such as aerospace, optical precision instruments and semiconductor processing is achieved.
Description
Technical field
The present invention relates to a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor and driving method thereof, belong to micro-nano precision actuation and field of locating technology.
Background technology
Piezoelectricity stick-slip line motor is a kind of inverse piezoelectric effect utilizing piezoelectric element, excites oscillator (or weighed son) to produce micro breadth oscillation, coupled the accurate micro-nano driver realizing mechanical energy output by the friction between oscillator with mover under Asymmetric Electric signal encourages.According to the difference of driving operation principle, piezoelectricity stick-slip line motor is broadly divided into resonance type piezo-electric motor (also referred to as supersonic motor) and the big class of non-co-vibration shape piezo-electric motor (also referred to as piezoelectricity stick-slip motor) two.Compared with resonance type piezo-electric motor, piezoelectricity stick-slip line motor have simple and compact for structure, positioning precision is high and the advantage such as easy to control, is widely used in the technical field of precision actuation and location.
Piezoelectricity stick-slip drives and mainly the saw tooth excitation signal of telecommunication is put on piezoelectric element, stator is excited to produce speed motion deformation alternately, control stator and mover is mutually changed between " gluing " and " cunning " two kinds of kinestates, utilize frictional force drives mover to realize mechanical movement output.But, owing to piezoelectricity stick-slip drives slowly and the rapid deformation stage, between stator and mover, frictional force plays not same-action, shows as friction drive, and show as frictional resistance when rapid deformation drives the stage when being specially the slowly deformation driving stage.The technology of being disclosed shows current piezoelectricity stick-slip line motor cannot realize the frictional force of whole driving process and carries out comprehensive regulation, causes its output mechanical performance limited.Rapid deformation at stator especially drives the stage, owing to mover friction moves in opposite direction, when mover inertia force is not enough to overcome this frictional resistance, mover will be caused to produce rollback motion, show as the jagged unstable movement output of class, deterioration output performance, the existing saw tooth excitation signal of telecommunication cannot realize driving piezoelectricity stick-slip line motor rapid deformation the regulation and control of stage frictional force, further limit application and the development of piezoelectricity stick-slip line motor.
Summary of the invention
For solving existing piezoelectricity stick-slip line motor due to frictional force comprehensive regulation difficulty between stator and mover, the output mechanical performance caused is limited, produce the unstable movement output of class zigzag, the technical problems such as deterioration output performance, the invention discloses a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor and driving method thereof.
The technical solution adopted in the present invention is:
Described a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor is made up of pedestal, precompression adjusting apparatus, inclined ladder shape stator and mover.
Described pedestal includes pedestal installing hole, precompression device installing hole, guide rail fixed installation contact surface and guide rail threaded mounting hole.Pedestal can be fixed by described pedestal installing hole with other peripheral unit, precompression adjusting apparatus installing hole fixing for precompression adjusting apparatus, and described guide rail fixed installation contact surface and guide rail threaded mounting hole are used for installing mover.
Described precompression adjusting apparatus includes lower fixing slide unit, upper movable slide unit, pretightning force manual adjusting screw rod peace platform lock-screw.Described lower fixing slide unit is provided with screwed hole and threadeds for adjusting screw rod manual with pretightning force, described lower fixing slide unit is provided with spring fixed cylinder for installing pre-compressed spring, described lower fixing slide unit is provided with the guide rail movement for upper movable slide unit, described guide rail is provided with guide rail stop screw and movable slide unit can be avoided beyond the stroke of guide rail, it is provided with counter sink bottom described lower fixing slide unit and can realize the fixed installation between pedestal by screw, described lower fixing slide unit is provided with locking support frame and screw fixed by locking support frame, the locking to upper movable slide unit can be realized by regulation platform lock-screw.Described movable slide unit upper surface is provided with screwed hole for installing inclined ladder shape stator, and described movable slide unit is provided with platform lock-screw installing hole and threadeds with platform lock-screw.
Described inclined ladder shape stator includes the hinge of frame-shaped construction, piezoelectric stack, pretension bolt and adjustment pad.The hinge of described frame-shaped construction uses the flexible hinge of symmetrical rectangular structure, and the hinge of described frame-shaped construction is provided with clamping bolt installing hole, is threadably secured being connected with the screwed hole on upper movable slide unit by the hinge of frame-shaped construction by bolt.The hinge of described frame-shaped construction is provided with straight round flexible hinge, it is attached by buckstay between described straight round flexible hinge, the hinge of described frame-shaped construction is provided with inclined ladder shape stator and drives foot, described piezoelectric stack is fixedly mounted on the hinge of frame-shaped construction by pretension bolt, sawtooth waveforms signal of telecommunication excitation piezoelectric stack produces power output, it is delivered on crossbeam by adjusting pad, between described crossbeam and tapered plane, produces lateral displacement because of axial rigidity skewness.Friction drive when increasing the slowly deformation driving stage, reduces frictional resistance when rapid deformation drives the stage, can realize the comprehensive regulation to frictional force.Described inclined ladder shape stator drives foot end face to scribble friction material accordingly, and described stator drives foot to drive mover motion, and described pre-loading screw installing hole is threadeded with pre-loading screw, is provided with adjustment pad between described piezoelectric stack and pre-loading screw.
Described mover is biserial decussation roller guide rail, including movable guiding rail, guide rail caging bolt, fixing guide rail, biserial decussation roller guide rails assembling bolt and biserial decussation roller guide holder.Described fixing guide rail carries out threadeding being fixed on guide rail fixed installation contact surface with guide rail threaded mounting hole by biserial decussation roller guide rails assembling bolt, the slip that described fixing guide rail is provided with biserial decussation roller guide holder and roller is mover provides and supports, and the movable guiding rail of described mover and the two ends of fixing guide rail arrange guide rail caging bolt and carry out spacing.
The complex incentive signal of telecommunication employed in described driving method is driven in ripple by the regulation and control ripple complex superposition sawtooth in the stator rapid deformation stage that rubs, and described driving ripple is sawtooth waveforms, and described friction regulation and control ripple is sinusoidal wave.Described driving method can reduce the frictional resistance between rapid deformation stage stator and mover, and suppression rollback motion produces, and wherein sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
The invention has the beneficial effects as follows:
Due to the fact that and use the inclined ladder shape stator structure with frictional force comprehensive regulation function, encouraged by the complex incentive signal of telecommunication simultaneously, increase stator and slowly deform friction drive between driving stage stator and mover, reduce stator rapid deformation and drive frictional resistance between stage stator and mover, achieve the frictional force to piezoelectricity stick-slip line motor whole driving process and carry out comprehensive regulation, piezoelectricity stick-slip line motor machinery output characteristics, the generation of suppression displacement rollback motion can be obviously improved.Compared with current prior art, power output promotes more than 10%, and output speed promotes more than 25%, and delivery efficiency promotes more than 35%, and displacement rollback rate reduces by more than 50%, and under open loop condition, positioning precision is up to nanoscale.
Accompanying drawing explanation
Fig. 1 show the structural representation of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor that the present invention proposes；
Fig. 2 show the structural representation of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor pedestal that the present invention proposes；
Fig. 3 show the structural representation of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor precompression adjusting apparatus that the present invention proposes；
Fig. 4 show the structural representation of the lower fixing slide unit of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor precompression adjusting apparatus that the present invention proposes；
Fig. 5 show the structural representation of the upper movable slide unit of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor precompression adjusting apparatus that the present invention proposes；
Fig. 6 show the structural representation of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor inclined ladder shape stator that the present invention proposes；
Fig. 7 show the structural representation of the frame-shaped construction flexible hinge of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor inclined ladder shape stator that the present invention proposes；
Fig. 8 show the partial enlargement structural representation of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor inclined ladder shape stator that the present invention proposes；
Fig. 9 show the structural representation of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor mover that the present invention proposes；
Figure 10 show the electric signal waveform schematic diagram of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor driving method that the present invention proposes.
Detailed description of the invention
Detailed description of the invention one: combine Fig. 1 ~ Fig. 9 and present embodiment is described.Present embodiments provide for the specific embodiments of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor.Described a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor is made up of pedestal 1, precompression adjusting apparatus 2, inclined ladder shape stator 3 and mover 4.
Described pedestal 1 includes that pedestal installing hole 1-1, precompression device installing hole 1-2, guide rail fixedly mount contact surface 1-3 and guide rail threaded mounting hole 1-4.Described pedestal 1 can use high magnetic stainless steel material.Described pedestal installing hole 1-1 is counter sink, pedestal 1 can be fixed with other peripheral unit, described precompression adjusting apparatus installing hole 1-2, fixing for precompression adjusting apparatus 2, described guide rail fixed installation contact surface 1-3 and guide rail threaded mounting hole 1-4 is used for fixedly mounting mover 4.
Described precompression adjusting apparatus 2 is the precompression guiding mechanism of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor, and described precompression adjusting apparatus 2 includes lower fixing slide unit 2-1, upper movable slide unit 2-2, pretightning force manual adjusting screw rod 2-3 peace platform lock-screw 2-4.Described lower fixing slide unit 2-1 is provided with screwed hole 2-1-1, it is threadeded for adjusting screw rod 2-3 manual with pretightning force, described lower fixing slide unit 2-1 is provided with spring fixed cylinder 2-1-2, for installing pre-compressed spring 2-1-4, described lower fixing slide unit 2-1 is provided with guide rail 2-1-3, for the movement of upper movable slide unit 2-2.Described guide rail 2-1-3 is provided with 8n guide rail stop screw 2-1-5 and movable slide unit 2-2 can be avoided beyond the stroke of guide rail 2-1-3, and wherein n is the integer more than or equal to 1.It is provided with counter sink 2-1-6 bottom described lower fixing slide unit 2-1, the fixed installation between pedestal 1 can be realized by screw, described lower fixing slide unit 2-1 is provided with locking support frame 2-1-7 and screw 2-1-8 fixed by locking support frame, by regulation platform lock-screw 2-4, the locking to upper movable slide unit 2-2 can be realized, the movement of upper movable slide unit 2-2 after preventing from having loaded.Described movable slide unit 2-2 upper surface is provided with screwed hole 2-2-1, for fixedly mounting inclined ladder shape stator 3, the side of described movable slide unit 2-2 is provided with platform lock-screw installing hole 2-2-2, and described threaded mounting hole 2-2-2 is threadeded with platform lock-screw 2-4.
Described inclined ladder shape stator 3 includes the hinge 3-1 of frame-shaped construction, piezoelectric stack 3-2, pretension bolt 3-3 and adjusts pad 3-4.The hinge 3-1 of described frame-shaped construction uses the flexible hinge of symmetrical rectangular structure, and the hinge 3-1 of described frame-shaped construction can use 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloy or Ti-13 titanium alloy material.The hinge 3-1 of described frame-shaped construction is provided with clamping bolt installing hole 3-1-1, it is threadably secured being connected with the screwed hole 2-2-1 on upper movable slide unit 2-2 by the hinge 3-1 of frame-shaped construction by bolt, the hinge 3-1 side of described frame-shaped construction is provided with 4 straight round flexible hinge 3-1-2, and opposite side is provided with 4 straight round flexible hinge 3-1-7.Described straight round flexible hinge 3-1-2 and straight round flexible hinge 3-1-7 is attached by buckstay 3-1-3, distance between described 2 buckstay 3-1-3 is L, and described straight round flexible hinge 3-1-2 and straight round flexible hinge 3-1-7 has identical radius of corner value R1, wherein R1The span 0.017 ~ 0.09 of/L, it is ensured that straight round flexible hinge 3-1-2 and straight round flexible hinge 3-1-7 has displacement equations ability and piezoelectric stack 3-2 has certain installing space, R in present embodiment1=1mm, L=12mm.The hinge 3-1 of described frame-shaped construction is provided with the tapered plane 3-1-4, a length of L of described tapered plane 3-1-4 that Stiffness Distribution is uneven2, wherein L2/ L span is 1 ~ 4.The hinge 3-1 of described frame-shaped construction is provided with inclined ladder shape stator and drives foot 3-1-5, and described piezoelectric stack 3-2 one end is fixedly mounted on the hinge 3-1 of frame-shaped construction by pretension bolt 3-3, and the other end contacts with crossbeam 3-1-6, the described a length of L of crossbeam 3-1-61, wherein L1/ L span is 1/6 ~ 5/6, and between described crossbeam 3-1-6 and tapered plane 3-1-4, angle is α, and wherein α span is 10 ° ~ 80 °, and the angle α in present embodiment is 30 °.Described inclined ladder shape stator 3 uses the flexible hinge of symmetrical rectangular structure to carry out displacement equations, sawtooth waveforms signal of telecommunication excitation piezoelectric stack 3-2 produces power output, being delivered on crossbeam 3-1-6 by adjusting pad 3-4, between described crossbeam 3-1-6 and tapered plane 3-1-4, Stiffness Distribution is uneven and produce lateral displacement vertically.Friction drive when increasing the slowly deformation driving stage, reduces frictional resistance when rapid deformation drives the stage, can realize the comprehensive regulation to frictional force.Described inclined ladder shape stator drives the thickness of foot 3-1-5 to be N, and the thickness of movable guiding rail 4-1 is M, and wherein N≤M can ensure that effective contact area, improves transmission efficiency, wherein M=(N+1) mm, M=8mm, N=7mm in present embodiment.Described inclined ladder shape stator drives foot 3-1-5 end face to scribble ceramic-like or glass fibre class friction material accordingly, described inclined ladder shape is stated stator and is driven foot 3-1-5 to drive mover 4 to move, described pre-loading screw installing hole 3-1-8 is threadeded with pre-loading screw 3-3, and described piezoelectric stack 3-2 can be the piezoelectric stack product of the companies such as PI or NEC.Adjustment pad 3-4 it is provided with between rear end face and the pre-loading screw 3-3 of described piezoelectric stack 3-2; adjustment pad 3-4 it is provided with between front end face and the hinge 3-1 of frame-shaped construction of described piezoelectric stack 3-2; the purpose that described piezoelectric stack 3-2 front/rear end arranges pad 3-4 is to protect piezoelectric stack 3-2, prevents it from producing shear strain or local pressure is uneven.By adjusting the screwing length of pre-loading screw 3-3, the regulation of the axial pretightening to piezoelectric stack 3-2 can be realized.
Described mover 4 is biserial decussation roller guide rail, including movable guiding rail 4-1, guide rail caging bolt 4-2, fixing guide rail 4-3, biserial decussation roller guide rails assembling bolt 4-4 and biserial decussation roller guide holder 4-5.Described movable guiding rail 4-1 end face scribbles ceramic-like or glass fibre class friction material accordingly, described fixing guide rail 4-3, carry out threadeding being fixed on guide rail fixed installation contact surface 1-3 by biserial decussation roller guide rails assembling bolt 4-4 and guide rail threaded mounting hole 1-4, described fixing guide rail 4-3 is provided with biserial decussation roller guide holder 4-5 and roller, and the slip that described biserial decussation roller guide holder 4-5 and roller are mover 4 provides and supports.In order to avoid biserial decussation roller guide holder 4-5 and roller skid off guide rail, the two ends at the movable guiding rail 4-1 and fixing guide rail 4-3 of mover 4 arrange guide rail caging bolt 4-2 and carry out spacing respectively.
Detailed description of the invention two: combine Figure 10 figure explanation present embodiment.Present embodiments provide for the specific embodiments of a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor driving method.Described a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor driving method is as follows.
The complex incentive signal of telecommunication employed in described driving method is driven in ripple by the regulation and control ripple complex superposition sawtooth in the stator rapid deformation stage that rubs, and described driving ripple is sawtooth waveforms, and described friction regulation and control ripple is sinusoidal wave.Specifically, described driving method can reduce the frictional resistance between rapid deformation stage stator and mover, and suppression rollback motion produces, elevating mechanism output performance.Wherein sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
Operation principle: inclined ladder shape motion change type precision piezoelectricity stick-slip line motor and driving method thereof are mainly under compound electric signal encourages, inclined ladder shape is utilized to drive foot Stiffness Distribution vertically uneven and produce lateral displacement, frictional force between comprehensive regulation stator and mover, and then promote Linear piezoelectric motor machinery output characteristics.The stator of the present invention is owing to using symmetrical flexure hinge mechanism, inclined ladder shape is utilized to drive foot Stiffness Distribution vertically uneven, stator drive end is excited to produce lateral displacement, adjust stator and the normal pressure contacted between mover, i.e. slowly deform the driving stage at stator, increase stator and the normal pressure contacted between mover, and then increase the friction drive between stator and mover, the stage is driven at stator rapid deformation, reduce stator and the normal pressure contacted between mover, and then reduce the frictional resistance between stator and mover, realize slowly deformation driving stage friction drive and rapid deformation are driven the comprehensive regulation of stage frictional resistance, promote complete machine output performance.Simultaneously, the present invention drives in ripple by friction regulates and controls the ripple complex superposition sawtooth in the stator rapid deformation stage, stator is excited to be in dither state a little, improve driving contact state between stator and mover, reduce the real contact area between stator and mover and actual time of contact, thus reduce rapid deformation and drive frictional resistance between stage fixed and moving son, suppression rollback motion produces, and can be obviously improved piezoelectricity stick-slip line motor machinery output characteristics.
Comprehensive above said content, the present invention provides a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor, utilizes inclined ladder shape to drive foot Stiffness Distribution vertically uneven and produce lateral displacement, the frictional force between comprehensive regulation stator and mover；The driving method that the present invention provides can suppress the generation that displacement rollback moves, and is obviously improved piezoelectricity stick-slip line motor machinery output characteristics.The hinge of frame-shaped construction and piezoelectric stack are assembled into a stator, and assembling is simple, it is easy to regulation；Designed precompression adjusting apparatus can regulate the pretightning force contacted between stator with mover easily.The present invention has the features such as simple in construction, precision height and stroke are big, has good application prospect in the micro-nano precision actuation such as Aero-Space, optical precision instrument and semiconductor machining with positioning field.
Claims (9)
1. an inclined ladder shape motion change type precision piezoelectricity stick-slip line motor, it is characterized in that this inclined ladder shape motion change type precision piezoelectricity stick-slip line motor is made up of pedestal (1), precompression adjusting apparatus (2), inclined ladder shape stator (3) and mover (4), wherein precompression adjusting apparatus (2) is fixed on pedestal (1), inclined ladder shape stator (3) is arranged in precompression adjusting apparatus (2), and mover (4) is arranged on pedestal (1).
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor the most according to claim 1, it is characterised in that described pedestal (1) includes pedestal installing hole (1-1), precompression device installing hole (1-2), guide rail fixed installation contact surface (1-3) and guide rail threaded mounting hole (1-4)；Described pedestal installing hole (1-1) is counter sink, pedestal (1) can be fixed with other peripheral unit, precompression adjusting apparatus installing hole (1-2), fixing for precompression adjusting apparatus (2), described guide rail fixed installation contact surface (1-3) and guide rail threaded mounting hole (1-4) are used for fixedly mounting mover (4).
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor the most according to claim 1, it is characterised in that described precompression adjusting apparatus (2) includes lower fixing slide unit (2-1), upper movable slide unit (2-2), pretightning force manual adjusting screw rod 2-3 peace platform lock-screw (2-4)；nullDescribed lower fixing slide unit (2-1) is provided with screwed hole (2-1-1)，It is threadeded for adjusting screw rod manual with pretightning force (2-3)，Described lower fixing slide unit (2-1) is provided with spring fixed cylinder (2-1-2)，For installing pre-compressed spring (2-1-4)，Described lower fixing slide unit (2-1) is provided with guide rail (2-1-3)，Movement for upper movable slide unit (2-2)，Described guide rail (2-1-3) is provided with guide rail stop screw (2-1-5)，Counter sink (2-1-6) realizes down the connection between fixing slide unit (2-1) and pedestal (1) by screw，Described lower fixing slide unit (2-1) is provided with locking support frame (2-1-7) and screw (2-1-8) fixed by locking support frame，Upper movable slide unit (2-2) can be locked by regulation platform lock-screw (2-4)，Described movable slide unit (2-2) upper surface is provided with screwed hole (2-2-1)，For fixedly mounting inclined ladder shape stator (3)，The side of described movable slide unit (2-2) is provided with platform lock-screw installing hole (2-2-2)，Described threaded mounting hole (2-2-2) is threadeded with platform lock-screw (2-4).
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor the most according to claim 1, it is characterized in that described inclined ladder shape stator (3) includes the hinge (3-1) of frame-shaped construction, piezoelectric stack (3-2), pretension bolt (3-3) and adjusts pad (3-4), described piezoelectric stack (3-2) is by pre-loading screw (3-3) and adjusts in the hinge (3-1) that pad (3-4) is fixed on frame-shaped construction；nullThe hinge (3-1) of described frame-shaped construction is provided with clamping bolt installing hole (3-1-1)，It is threadably secured being connected with the screwed hole (2-2-1) on upper movable slide unit (2-2) by the hinge (3-1) of frame-shaped construction by bolt，Hinge (3-1) side of described frame-shaped construction arranges straight round flexible hinge (3-1-2)，Opposite side arranges straight round flexible hinge (3-1-7)，Described straight round flexible hinge (3-1-2) and straight round flexible hinge (3-1-7) are attached by buckstay (3-1-3)，Power output is delivered on crossbeam (3-1-6) by described piezoelectric stack (3-2) by adjusting pad (3-4)，Described crossbeam (3-1-6) and tapered plane (3-1-4) are integral type structure，Described inclined ladder shape stator drives foot (3-1-5) end face to scribble friction material accordingly，Described trapezoidal stator drives foot (3-1-5) to drive mover (4) motion，Described pre-loading screw installing hole (3-1-8) threadeds with pre-loading screw (3-3)，Adjustment pad (3-4) it is provided with between rear end face and the pre-loading screw (3-3) of described piezoelectric stack (3-2)，Adjustment pad (3-4) it is provided with between front end face and the hinge (3-1) of frame-shaped construction of described piezoelectric stack (3-2)，By adjusting the screwing length of pre-loading screw (3-3)，The regulation of the axial pretightening to piezoelectric stack (3-2) can be realized.
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor the most according to claim 4, it is characterised in that described straight round flexible hinge (3-1-2) and straight round flexible hinge (3-1-7) have identical radius of corner value R1, the distance between described 2 buckstays (3-1-3) is L, and the hinge (3-1) of described frame-shaped construction is provided with tapered plane (3-1-4), a length of L of described tapered plane (3-1-4)2, wherein L2/ L span is 1 ~ 4, and the hinge (3-1) of described frame-shaped construction is provided with inclined ladder shape stator and drives foot (3-1-5), described crossbeam (3-1-6) a length of L1, wherein L1/ L span is 1/6 ~ 5/6, and between described crossbeam (3-1-6) and tapered plane (3-1-4), angle is α, and wherein α span is 10 ° ~ 80 °.
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor the most according to claim 4, it is characterised in that the hinge (3-1) of described frame-shaped construction can use 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloy or Ti-13 titanium alloy material.
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor the most according to claim 4, it is characterised in that the inclined ladder shape stator of inclined ladder shape stator (3) drives foot (3-1-5) end face to scribble ceramic-like or glass fibre class friction material accordingly.
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor the most according to claim 1, it is characterized in that described described mover (4) is biserial decussation roller guide rail, including movable guiding rail (4-1), guide rail caging bolt (4-2), fixing guide rail (4-3), biserial decussation roller guide rails assembling bolt (4-4) and biserial decussation roller guide holder (4-5)；Described movable guiding rail (4-1) end face scribbles ceramic-like or glass fibre class friction material accordingly, described fixing guide rail (4-3), it is threaded connection and biserial decussation roller guide rails assembling bolt (4-4) and guide rail threaded mounting hole (1-4) is fixed on guide rail fixed installation contact surface 1-3, described fixing guide rail (4-3) is provided with biserial decussation roller guide holder (4-5) and roller, and the movable guiding rail (4-1) of mover (4) and the two ends of fixing guide rail (4-3) arrange guide rail caging bolt (4-2).
9. an inclined ladder shape motion change type precision piezoelectricity stick-slip line motor driving method, this driving method realizes based on the inclined ladder shape motion change type precision piezoelectricity stick-slip line motor described in claim 1；Described driving method is characterised by that driving ripple is sawtooth waveforms, and friction regulation and control ripple is sinusoidal wave, and wherein sawtooth drives be T period of wave1, driving voltage amplitude is V1, symmetry is D, a little friction sine regulation and control period of wave be T2, driving voltage amplitude is V2, sawtooth drives ripple to be T with the period ratio of friction sine regulation and control ripple a little1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120110758A1 (en) * | 2010-11-04 | 2012-05-10 | Canon Kabushiki Kaisha | Driving method for piezoelectric vibrator, and dust removing device and ultrasonic motor using the driving method |
| CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro nano stick slip inertia drive platform |
| CN103580532A (en) * | 2013-11-27 | 2014-02-12 | 苏州大学 | Bottom pre-tensioning type stick-slip driving cross-scale precision motion platform |
| CN104320016A (en) * | 2014-10-13 | 2015-01-28 | 吉林大学 | Stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform |
| CN105556824A (en) * | 2013-09-13 | 2016-05-04 | 物理仪器(Pi)两合公司 | Compact versatile stick-slip piezoelectric motor |
-
2016
- 2016-06-06 CN CN201610386960.5A patent/CN105827141B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120110758A1 (en) * | 2010-11-04 | 2012-05-10 | Canon Kabushiki Kaisha | Driving method for piezoelectric vibrator, and dust removing device and ultrasonic motor using the driving method |
| CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro nano stick slip inertia drive platform |
| CN105556824A (en) * | 2013-09-13 | 2016-05-04 | 物理仪器(Pi)两合公司 | Compact versatile stick-slip piezoelectric motor |
| CN103580532A (en) * | 2013-11-27 | 2014-02-12 | 苏州大学 | Bottom pre-tensioning type stick-slip driving cross-scale precision motion platform |
| CN104320016A (en) * | 2014-10-13 | 2015-01-28 | 吉林大学 | Stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform |
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