CN109842321A - A kind of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform and its motivational techniques - Google Patents
A kind of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform and its motivational techniques Download PDFInfo
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Abstract
The invention discloses a kind of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform and its motivational techniques, belong to piezoelectric driving technology field.Solves the technical problem that current Three Degree Of Freedom straight line location platform arrangement is complicated, precision is insufficient, stroke is too small and motivational techniques are single.The piezoelectricity locating platform is made of motion platform, driving unit, lateral pressing plate, vertical guide and pedestal, wherein driving unit is main driving element, to generate bending deformation and dilatation, and then pass through the linear motion of driving foot driving motion platform three orthogonal directions along space.Based on the motivational techniques in the present invention, the ultraprecise movement of large scale is may be implemented in the piezoelectricity locating platform.Piezoelectricity location platform arrangement in the present invention is compact, and motivational techniques are simple and easy, convenient for applying in the technical field for needing precision positioning to operate.
Description
Technical field
The invention belongs to piezoelectric driving technology fields, position more particularly to a kind of ultraprecise Three Degree Of Freedom linear piezoelectric flat
Platform and its motivational techniques.
Background technique
With the fast development of science and technology, the mankind are also increasingly enhanced the exploring ability of microcosmos, this changes significantly
The mode of production and life of the mankind is become.Explore microcosmos it is most crucial be exactly observation and operation, these two aspects all be unable to do without surpasses
High-precision actuation techniques.In order to meet this demand, numerous ultraprecise drivers comes into being, wherein piezoelectric driving technology
It occupys an important position always.Using the inverse piezoelectric effect of piezoelectric material, piezoelectric actuator can achieve nanoscale or even Asia
Nanoscale resolving power, therefore it is very suitable for ultraprecise driving.But most of piezoelectric actuator all has stroke mistake
Deficiency small, motivational techniques are single.There is also structure is complicated, forms of motion is very few for multiple degrees of freedom piezoelectric actuator
The shortcomings that.The multiple degrees of freedom piezoelectric actuator that large scale and nanoscale resolving power may be implemented because the invention is a kind of is micro- for exploring
It sees the rule in the world and realizes and the operation of micro-object is all had a very important significance, this also receives very extensive
Concern and research.
Have in fiber orientation and alignment, flying-spot microscope, two-photon polymerized and micromanipulation etc. to ultra-precision device
The technical field of important need realizes that the linear motion of three orthogonal axis directions in space is particularly significant, therefore the present invention utilizes
Piezoelectric ceramic piece proposes a kind of Three Degree Of Freedom straight line compact-sized, motivational techniques are simple and reliable as main driving element
Locating platform can meet the needs of Ultra-precision positioning device field to a certain extent, solve existing Ultra-precision positioning device
Some drawbacks.Be commonly employed prospect in the technical field for needing Ultra-precision positioning, also will multiple degrees of freedom precision
Certain contribution is made in the development in piezoelectric driving technology field.
Summary of the invention
Complicated, precision deficiency that the purpose of the present invention is to solve current Three Degree Of Freedom piezoelectric straight line location platform arrangements,
The technical problem that stroke is too small and motivational techniques are single, so that it is flat to propose a kind of ultraprecise Three Degree Of Freedom linear piezoelectric positioning
Platform and its motivational techniques.The technical solution taken is as follows:
A kind of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform, the locating platform include motion platform 1, driving unit
2, lateral pressing plate 3, vertical guide 4 and pedestal 5；The driving unit 2 includes upper driving foot 2-1, two-way stacked flexure type
Piezoelectric actuator 2-2, middle splint 2-3, longitudinal vibration piezoelectric ceramics 2-4, unidirectional bending vibration piezoelectric ceramics 2-5 and lower driving foot 2-6；
The upper driving foot 2-1, two-way stacked flexure type piezoelectric actuator 2-2, middle splint 2-3, longitudinal vibration piezoelectric ceramics 2-4, list
It is sequentially arranged and is fixedly connected along the axis direction of the driving unit 2 to bending vibration piezoelectric ceramics 2-5 and lower driving foot 2-6,
The lateral pressing plate 3 is fixedly connected with pedestal 5, and the vertical guide 4 is fixedly connected with pedestal 5, and the vertical guide 4 is along vertical
Direction arrangement and parallel with the axis direction of driving unit 2, the vertical guide 4 and middle splint 2-3 be slidably connected with
The linear motion of middle splint 2-3 along the vertical direction is guided, the pedestal 5 is slidably connected to guide fortune with the motion platform 1
Linear motion of the moving platform 1 along the horizontal direction and longitudinal direction orthogonal with vertical direction；The following table face pressure of the motion platform 1
Tightly in the upper surface of upper driving foot 2-1, the lateral surface compressing of the lower driving foot 2-6 is in the side of lateral pressing plate 3；The pedestal 5
Be kept fixed, the driving unit 2 moves in a straight line along the vertical direction, the motion platform 1 along the vertical direction, horizontal direction,
Longitudinal direction does Three Degree Of Freedom linear motion.
Further, the two-way stacked flexure type piezoelectric actuator 2-2 is by multilayer piezoelectric ceramic along own axes side
It is composed of a fixed connection to stacking, two end faces of every lamination electroceramics respectively include four polarization subregions, and one pair of them are depth
Direction is bent subregion, and another pair is that horizontal direction is bent subregion, described two-way stacked under the action of driving voltage signal
Flexure type piezoelectric actuator 2-2 generates the bending deformation for deviateing own axes direction, and then drives driving foot 2-1 along depth side
To the pendulum motion with horizontal direction；The longitudinal vibration piezoelectric ceramics 2-4 is stacked by multilayer piezoelectric ceramic along own axes direction solid
Two end faces of fixed connection composition, every lamination electroceramics are respectively a polarization subregion, under the action of driving voltage signal, institute
It states longitudinal vibration piezoelectric ceramics 2-4 and generates dilatation along own axes direction, and then drive lower driving foot 2-6 along the vertical direction
Linear motion；The unidirectional bending vibration piezoelectric ceramics 2-5 is stacked along own axes direction by multilayer piezoelectric ceramic and is composed of a fixed connection,
Two end faces of every lamination electroceramics respectively include two polarization subregions, described unidirectional curved under the action of driving voltage signal
The piezoelectric ceramics 2-5 that shakes generates the bending deformation for deviateing own axes direction, and then drives lower driving foot 2-6 close to or far from lateral
The pendulum motion of pressing plate 3.
Further, it is compressed between the motion platform 1 and upper driving foot 2-1 by external support device, it is described external
Support device includes guide supporting, ball bearing compression, electromagnetic attracting force, hydrodynamic pressure compresses and hydrostatic pressure compresses.
Further, it is compressed between lower driving foot 2-6 and the lateral pressing plate 3 by vertical guide 4.
Further, the quantity of the driving unit 2 is one or more, and the quantity for increasing driving unit 2 realizes movement
The multiplication of 1 load capacity of platform.
A kind of motivational techniques of the ultraprecise Three Degree Of Freedom linear piezoelectric locating platform, the quantity of the driving unit 2
When being one or more, realize motion platform 1 along parallel with the axis direction of driving unit 2 vertical by following motivational techniques
Do two-way linear movement in direction:
Step 1: lateral pressing plate 3 is pressed on the lower driving foot side 2-6, and adjust precompression between the two；
Step 2: but phase phase difference identical to longitudinal vibration piezoelectric ceramics 2-4 and unidirectional bending vibration piezoelectric ceramics 2-5 application frequency
+ 90 ° of sine-wave excitation voltage signal, longitudinal vibration piezoelectric ceramics 2-4 and unidirectional bending vibration piezoelectric ceramics 2-5 motivate driving unit respectively
The longitudinal vibration and bending vibration of 2 lower parts, the clockwise elliptical track fortune of the longitudinal vibration and the lower driving foot end the 2-6 particle of bending vibration synthesis
Dynamic, under the action of the lower frictional force driven between foot 2-6 and lateral pressing plate 3, driving unit 2 and motion platform 1 are along vertical side
To doing positive direction linear motion；
Step 3: repeating step 2, the continuous positive direction linear motion along the vertical direction of motion platform 1 is realized, and pass through
The amplitude and application time for changing driving voltage signal realize the ultraprecise positive direction straight line fortune of motion platform 1 along the vertical direction
It is dynamic；
Step 4: lateral pressing plate 3 is pressed on the lower driving foot side 2-6, and the precompression that logical adjustment is between the two；
Step 5: but phase phase identical to longitudinal vibration piezoelectric ceramics 2-4 and unidirectional bending vibration piezoelectric ceramics 2-5 application frequency
The sine-wave excitation voltage signal of -90 ° of difference, longitudinal vibration piezoelectric ceramics 2-4 and unidirectional bending vibration piezoelectric ceramics 2-5 motivate driving single respectively
The longitudinal vibration and bending vibration of the lower part of member 2, the counter-clockwise elliptical track fortune of the longitudinal vibration and the lower driving foot end the 2-6 particle of bending vibration synthesis
Dynamic, under the action of the lower frictional force driven between foot 2-6 and lateral pressing plate 3, driving unit 2 and motion platform 1 are along vertical side
To doing opposite direction linear motion；
Step 6: repeating step 5, the continuous opposite direction linear motion along the vertical direction of motion platform 1 is realized, and pass through
The amplitude and application time for changing driving voltage signal realize the ultraprecise opposite direction straight line fortune of motion platform 1 along the vertical direction
It is dynamic.
A kind of motivational techniques of the ultraprecise Three Degree Of Freedom linear piezoelectric locating platform, the quantity of the driving unit 2
When being one or more, realize motion platform 1 along the level orthogonal with the axis direction of driving unit 2 by following motivational techniques
Do two-way linear movement in direction:
Step 1: motion platform 1 is pressed on the upper driving foot upper surface 2-1, and adjust precompression between the two；
Step 2: it is slow to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
Slowly the driving voltage signal risen, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along water
Straight and even direction is slowly rocked to extreme position, under the action of the upper stiction driven between foot 2-1 and motion platform 1, fortune
Moving platform 1 is exported along horizontal square to straight-line displacement is generated；
Step 3: it is fast to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of speed decline, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along water
Direction of redressing quickly is rocked to initial position, under the action of the inertia of motion platform 1, motion platform 1 and upper driving foot 2-1 it
Between occur to remain stationary with respect to sliding；
Step 4: repeating step 2 to step 3, the continuous positive direction straight line fortune in the horizontal direction of motion platform 1 is realized
It is dynamic, and the amplitude by changing driving voltage signal and time realize that the ultraprecise positive direction of motion platform 1 in the horizontal direction is straight
Line movement；
Step 5: motion platform 1 is pressed on the upper driving foot upper surface 2-1, and adjust precompression between the two；
Step 6: it is slow to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
Slowly the driving voltage signal declined, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along water
Direction of redressing slowly is rocked to extreme position, under the action of stiction between upper driving foot 2-1 and motion platform 1, transports
Moving platform 1 generates straight-line displacement output along horizontal opposite direction；
Step 7: it is fast to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal that speed rises, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along water
Straight and even direction is quickly rocked to initial position, under the action of the inertia of motion platform 1, motion platform 1 and upper driving foot 2-1 it
Between occur to remain stationary with respect to sliding；
Step 8: repeating step 6 to step 7, the continuous opposite direction straight line fortune in the horizontal direction of motion platform 1 is realized
It is dynamic, and the amplitude by changing driving voltage signal and time realize that the ultraprecise opposite direction of motion platform 1 in the horizontal direction is straight
Line movement.
Wherein, in the application speed of the driving voltage signal amplitude, slowly signified application speed is less than quick institute
The application speed of finger.
A kind of motivational techniques of the ultraprecise Three Degree Of Freedom linear piezoelectric locating platform, the quantity of the driving unit 2
When being one or more, realize motion platform 1 along the depth orthogonal with the axis direction of driving unit 2 by following motivational techniques
Do two-way linear movement in direction:
Step 1: motion platform 1 is pressed on the upper driving foot upper surface 2-1, and adjust precompression between the two；
Step 2: it is slow to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
Slowly the driving voltage signal risen, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along vertical
Deep positive direction is slowly rocked to extreme position, under the action of the upper stiction driven between foot 2-1 and motion platform 1, fortune
Moving platform 1 is exported along horizontal square to straight-line displacement is generated；
Step 3: it is fast to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of speed decline, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along vertical
Deep opposite direction is quickly rocked to initial position, under the action of the inertia of motion platform 1, motion platform 1 and upper driving foot 2-1 it
Between occur to remain stationary with respect to sliding；
Step 4: repeating step 2 to step 3, realize motion platform 1 along the continuous positive direction straight line fortune of longitudinal direction
It is dynamic, and the amplitude by changing driving voltage signal and time realize that motion platform 1 is straight along the ultraprecise positive direction of longitudinal direction
Line movement；
Step 5: motion platform 1 is pressed on the upper driving foot upper surface 2-1, and adjust precompression between the two；
Step 6: it is slow to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
Slowly the driving voltage signal declined, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along vertical
Deep opposite direction is slowly rocked to extreme position, under the action of the upper stiction driven between foot 2-1 and motion platform 1, fortune
Moving platform 1 generates straight-line displacement output along horizontal opposite direction；
Step 7: it is fast to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal that speed rises, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along vertical
Deep positive direction is quickly rocked to initial position, under the action of the inertia of motion platform 1, motion platform 1 and upper driving foot 2-1 it
Between occur to remain stationary with respect to sliding；
Step 8: repeating step 6 to step 7, realize motion platform 1 along the continuous opposite direction straight line fortune of longitudinal direction
It is dynamic, and the amplitude by changing driving voltage signal and time realize that motion platform 1 is straight along the ultraprecise opposite direction of longitudinal direction
Line movement.
Wherein, in the application speed of the driving voltage signal amplitude, slowly signified application speed is less than quick institute
The application speed of finger.
The invention has the advantages that:
The present invention realizes output ultraprecise multifreedom motion using single PZT (piezoelectric transducer), avoids parallel institution or string
The labyrinth of online structure significantly reduces the structure complexity of ultraprecise Three Degree Of Freedom straight line locating platform, improves its work
Skill simultaneously reduces manufacturing cost；The motivational techniques of locating platform in the present invention, by the step-by-step movement working principle of Piezoelectric Driving,
It can be realized simultaneously high resolution and the driving of big stroke, overcome the Three Degree Of Freedom linear motion positioning of existing many Piezoelectric Drivings
The disadvantage that table stroke is insufficient or precision is lower；Locating platform in the present invention has preferable scalability, and it is single to increase driving
The quantity of member can significantly increase the load capacity of locating platform；In addition, location platform arrangement disclosed in this invention is simply tight
It gathers, motivational techniques are reliably easy, in fiber orientation and alignment, flying-spot microscope, two-photon polymerized and micromanipulation etc. to super
Precision apparatus has the technical field of important need to have preferable application prospect.
Detailed description of the invention
Fig. 1 is the three-dimensional knot of the ultraprecise Three Degree Of Freedom linear piezoelectric locating platform in the present invention with a driving unit
Structure schematic diagram；
Fig. 2 is that the realization of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform is required when doing positive direction linear motion along Z axis
The driving voltage signal schematic representation of application；
Fig. 3 is that the realization of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform is required when doing opposite direction linear motion along Z axis
The driving voltage signal schematic representation of application；
Fig. 4 is that ultraprecise Three Degree Of Freedom linear piezoelectric locating platform realizes that do forward and reverse linear motion along Z axis drives at present
Movement locus schematic diagram of the sufficient end particle relative to lateral pressing plate；
Fig. 5 does positive direction linear motion when institute along X-axis or Y-axis for the realization of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform
The driving voltage signal schematic representation for needing to apply；
Fig. 6 does opposite direction linear motion when institute along X-axis or Y-axis for the realization of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform
The driving voltage signal schematic representation for needing to apply；
On when Fig. 7 does forward and reverse linear motion along X-axis or Y-axis for the realization of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform
Drive movement locus schematic diagram of the sufficient end particle relative to motion platform.
Specific embodiment
The present invention will be further described combined with specific embodiments below, but the present invention should not be limited by the examples.
Embodiment one:
1 pair of the present embodiment is described in further details with reference to the accompanying drawings of the specification.It present embodiments provides a kind of such as Fig. 1
Shown in ultraprecise Three Degree Of Freedom linear piezoelectric locating platform.The locating platform includes motion platform 1, driving unit 2, lateral
Pressing plate 3, vertical guide 4 and pedestal 5；The driving unit 2 includes upper driving foot 2-1, two-way stacked flexure type piezoelectricity drive
Dynamic device 2-2, middle splint 2-3, longitudinal vibration piezoelectric ceramics 2-4, unidirectional bending vibration piezoelectric ceramics 2-5 and lower driving foot 2-6；On described
Drive foot 2-1, two-way stacked flexure type piezoelectric actuator 2-2, middle splint 2-3, longitudinal vibration piezoelectric ceramics 2-4, unidirectional bending vibration
Piezoelectric ceramics 2-5 and lower driving foot 2-6 is sequentially arranged from top to bottom along the axis direction of the driving unit 2 and the company of fixation
It connects, the lateral pressing plate 3 is fixedly connected with pedestal 5, and the vertical guide 4 is fixedly connected with pedestal 5, and the vertical guide 4 is along Z
Axis direction arrangement and it is parallel with the axis direction of driving unit 2, the vertical guide 4 is slidably connected with the middle splint 2-3
To guide middle splint 2-3 along the linear motion of Z-direction, the pedestal 5 is slidably connected to guide fortune with the motion platform 1
Linear motion of the moving platform 1 along the X-direction and Y direction orthogonal with Z-direction；The upper surface pressure of the upper driving foot 2-1
Tightly in the lower surface of motion platform 1, and by frictional force drives motion platform 1 along the x axis with the two-freedom of Y direction
The lateral surface compressing of linear motion, the lower driving foot 2-6 makes 2 edge of driving unit in the side of lateral pressing plate 3, and by frictional force
Z-direction moves in a straight line, and then drives the linear motion along Z-direction of motion platform 1；The pedestal 5 is kept fixed, institute
It states driving unit 2 to move in a straight line along Z-direction, the motion platform 1 is exported for loading accurate manipulation object along Z axis
Direction, X-direction, Y direction linear motion.
In the present embodiment, the driving unit 2 is used as energy conversion component, realizes inputing power to output mechanical energy
Conversion；The two-way stacked flexure type piezoelectric actuator 2-2 stacks fixed connect along own axes direction by multilayer piezoelectric ceramic
Composition is connect, two end faces of every lamination electroceramics respectively include four polarization subregions, and one pair of them are that X-direction is bent subregion,
Another pair is that Y direction is bent subregion, is applying driving voltage letter to X-direction bending subregion or Y direction bending subregion
After number, their corresponding piezoelectric ceramics regions elongate or shorten respectively, to make two-way stacked flexure type piezoelectric actuator 2-2
The bending deformation for deviateing own axes direction is generated, and then drives driving foot 2-1 along the x axis or the swing of Y direction fortune
It is dynamic；The longitudinal vibration piezoelectric ceramics 2-4 is stacked along own axes direction by multilayer piezoelectric ceramic and is composed of a fixed connection, every lamination electricity pottery
Two end faces of porcelain are respectively a polarization subregion, after applying driving voltage signal to the polarization subregion, longitudinal vibration piezoelectric ceramics
2-4 generates the dilatation along Z-direction, to motivate driving unit 2 along the longitudinal vibration of Z-direction, and then drives lower driving foot
Linear reciprocating motion of the 2-6 along Z-direction；The unidirectional bending vibration piezoelectric ceramics 2-5 is by multilayer piezoelectric ceramic along own axes side
It is composed of a fixed connection to stacking, two end faces of every lamination electroceramics respectively include two polarization subregions, to two polarization point
After area applies driving voltage signal, their corresponding piezoelectric ceramics regions extend and shorten respectively, so that driving unit 2 be motivated to produce
The raw bending deformation for deviateing own axes direction, and then drive lower driving foot 2-6 close to or far from the reciprocally swinging of lateral pressing plate 3
Movement.
In the present embodiment, the lower surface of the motion platform 1 is pressed on upper driving foot 2-1 by external support device
On, motion platform 1 can not only move in a straight line in own layer, and driving unit 2 can also be followed flat along itself is orthogonal to
The direction in face moves in a straight line；It is compressed between the motion platform 1 and upper driving foot 2-1 by external support device, and the two
Between pressing force can be adjusted, the support device include but is not limited to guide supporting, ball bearing compress, electromagnetic force inhale
Draw, hydrodynamic pressure compress, hydrostatic pressure compress etc..
In the present embodiment, the lower driving foot 2-6 is pressed on lateral pressing plate 3 by vertical guide 4, and therebetween
Frictional force can be adjusted, under the action of frictional force between, moving cell 2 is moved in a straight line along Z-direction.
In the present embodiment, the motion platform 1 is for fixing accurate operation object, to realize it in three, space freedom
Ultra-precision positioning on degree, or for loading end accurate operation executing agency, to realize it on the three degree of freedom of space
Precision positioning is to realize fine operation；The quantity of the driving unit 2 is one or more, increases the quantity of driving unit 2
The multiplication of 1 load capacity of motion platform may be implemented.
Embodiment two:
With reference to the accompanying drawings of the specification 1, Fig. 2, Fig. 3, Fig. 4 are described in further details the present embodiment.The present embodiment mentions
A kind of motivational techniques based on ultraprecise Three Degree Of Freedom linear piezoelectric locating platform shown in FIG. 1 have been supplied, the motivational techniques are passed through
Realize that the two-way linear of Z-direction along Fig. 1 of motion platform 1 moves.The quantity of driving unit is one in the present embodiment, still
It is equally applicable to increase its quantity the present embodiment, increasing its quantity in the case where applying identical pumping signal will increase motion platform
1 load capacity.
Realize motion platform 1 along Z-direction do motivational techniques that two-way linear moves specifically includes the following steps:
Step 1: lateral pressing plate 3 is pressed on the lower driving foot side 2-6, and adjust precompression between the two；
Step 2: but phase phase difference identical to longitudinal vibration piezoelectric ceramics 2-4 and unidirectional bending vibration piezoelectric ceramics 2-5 application frequency
The reciprocal transformation of+90 ° of sine-wave excitation voltage signal, longitudinal vibration piezoelectric ceramics 2-4 and unidirectional bending vibration piezoelectric ceramics 2-5 are distinguished
Motivate the longitudinal vibration and bending vibration of part under driving unit 2, the up time of the longitudinal vibration and the lower driving foot end the 2-6 particle of bending vibration synthesis
The movement of needle elliptical orbit, therefore it forms the frictional force of single direction between lateral pressing plate 3, with this push driving unit 2 with
And motion platform 1 does positive direction linear motion along Z-direction；
Step 3: repeating step 2, realize that motion platform 1 along the continuous positive direction linear motion of Z-direction, changes excitation
The amplitude and application time of voltage signal, realize Ultra-precision positioning in this direction, to longitudinal vibration piezoelectric ceramics 2-4 and unidirectional curved
The driving voltage signal that vibration piezoelectric ceramics 2-5 applies is respectively such as U in Fig. 21And U2It is shown；
Step 4: lateral pressing plate 3 is pressed on the lower driving foot side 2-6, and adjust precompression between the two；
Step 5: but phase phase identical to longitudinal vibration piezoelectric ceramics 2-4 and unidirectional bending vibration piezoelectric ceramics 2-5 application frequency
The reciprocal transformation point of the sine-wave excitation voltage signal of -90 ° of difference, longitudinal vibration piezoelectric ceramics 2-4 and unidirectional bending vibration piezoelectric ceramics 2-5
The longitudinal vibration and bending vibration of part under driving unit 2 are not motivated, and the driving foot end 2-6 particle is inverse under the longitudinal vibration and bending vibration synthesis
The movement of hour hands elliptical orbit, therefore it forms the frictional force of single direction between lateral pressing plate 3, pushes driving unit 2 with this
And motion platform 1 does opposite direction linear motion along Z-direction；
Step 6: repeating step 5, realize that motion platform 1 along the continuous opposite direction linear motion of Z-direction, changes excitation
The amplitude and application time of voltage signal, realize Ultra-precision positioning in this direction, to longitudinal vibration piezoelectric ceramics 2-4 and unidirectional curved
The driving voltage signal that vibration piezoelectric ceramics 2-5 applies is respectively such as U in Fig. 31And U2It is shown.
In the present embodiment, the locating platform realizes that ultraprecise Z-direction linear motion drives the foot end 2-6 matter at present
The motion profile relative to lateral pressing plate 3 is put as shown in figure 4, and using the lower driving foot end 2-6 particle along the ellipse of different directions
The forward and reverse linear motion of circular motion path implementation.
Embodiment three:
With reference to the accompanying drawings of the specification 1, Fig. 5, Fig. 6, Fig. 7 are described in further details the present embodiment.The present embodiment mentions
A kind of motivational techniques based on ultraprecise Three Degree Of Freedom linear piezoelectric locating platform shown in FIG. 1 have been supplied, the motivational techniques are passed through
Realize that the two-way linear of X-direction along Fig. 1 of motion platform 1 moves.The quantity of driving unit is one in the present embodiment, still
It is equally applicable to increase its quantity the present embodiment, increasing its quantity in the case where applying identical pumping signal will increase motion platform
1 load capacity.
Realize motion platform 1 do along the x axis two-way linear movement motivational techniques specifically includes the following steps:
Step 1: motion platform 1 is pressed on the upper driving foot upper surface 2-1, and adjust precompression between the two；
Step 2: it is slow to apply amplitude to the X-direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of rising, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along X-axis
Positive direction is slowly rocked to extreme position, under the action of the upper stiction driven between foot 2-1 and motion platform 1, movement
Platform 1 generates straight-line displacement output along X-axis positive direction；
Step 3: it is quick to apply amplitude to the X-direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of decline, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along X-axis
Opposite direction is quickly rocked to initial position, under the action of the inertia of motion platform 1, between motion platform 1 and upper driving foot 2-1
Generation is remain stationary with respect to sliding；
Step 4: repeating step 2 to step 3, continuous positive direction moves along a straight line realization motion platform 1 along the x axis,
By changing amplitude and the time of driving voltage signal, Ultra-precision positioning in this direction is realized, to two-way stacked flexure type
The driving voltage signal that X-direction bending subregion in piezoelectric actuator 2-2 applies is as shown in U in Fig. 5；
Step 5: motion platform 1 is pressed on the upper driving foot upper surface 2-1, and adjust precompression between the two；
Step 6: it is slow to apply amplitude to the X-direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of decline, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along X-axis
Opposite direction is slowly rocked to extreme position, under the action of the upper stiction driven between foot 2-1 and motion platform 1, movement
Platform 1 generates straight-line displacement output along X-axis opposite direction；
Step 7: it is quick to apply amplitude to the X-direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of rising, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along X-axis
Positive direction is quickly rocked to initial position, under the action of the inertia of motion platform 1, between motion platform 1 and upper driving foot 2-1
Generation is remain stationary with respect to sliding；
Step 8: repeating step 6 to step 7, continuous opposite direction moves along a straight line realization motion platform 1 along the x axis,
By changing amplitude and the time of driving voltage signal, Ultra-precision positioning in this direction is realized, to two-way stacked flexure type
The driving voltage signal that X-direction bending subregion in piezoelectric actuator 2-2 applies is as shown in U in Fig. 6.
In the present embodiment, the end foot 2-1 is driven on when ultraprecise linear motion is done in the locating platform realization along the x axis
Hold particle relative to the motion profile of motion platform 1 as shown in fig. 7, and utilizing the upper driving foot end 2-1 two movement sides of particle
To the different forward and reverse linear motions for realizing motion platform of speed.
Example IV:
With reference to the accompanying drawings of the specification 1, Fig. 5, Fig. 6, Fig. 7 are described in further details the present embodiment.The present embodiment mentions
A kind of motivational techniques based on ultraprecise Three Degree Of Freedom linear piezoelectric locating platform shown in FIG. 1 have been supplied, the motivational techniques are passed through
Realize that the two-way linear of Y direction along Fig. 1 of motion platform 1 moves.The quantity of driving unit is one in the present embodiment, still
It is equally applicable to increase its quantity the present embodiment, increasing its quantity in the case where applying identical pumping signal will increase motion platform
1 load capacity.
Realize motion platform 1 do along the y axis two-way linear movement motivational techniques specifically includes the following steps:
Step 1: motion platform 1 is pressed on the upper driving foot upper surface 2-1, and adjust precompression between the two；
Step 2: it is slow to apply amplitude to the Y direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of rising, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along Y-axis
Positive direction is slowly rocked to extreme position, under the action of the upper stiction driven between foot 2-1 and motion platform 1, movement
Platform 1 generates straight-line displacement output along Y-axis positive direction；
Step 3: it is quick to apply amplitude to the Y direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of decline, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along Y-axis
Opposite direction is quickly rocked to initial position, under the action of the inertia of motion platform 1, between motion platform 1 and upper driving foot 2-1
Generation is remain stationary with respect to sliding；
Step 4: repeating step 2 to step 3, continuous positive direction moves along a straight line realization motion platform 1 along the y axis,
By changing amplitude and the time of driving voltage signal, Ultra-precision positioning in this direction is realized, to two-way stacked flexure type
The driving voltage signal that Y direction bending subregion in piezoelectric actuator 2-2 applies is as shown in U in Fig. 5；
Step 5: motion platform 1 is pressed on the upper driving foot upper surface 2-1, and adjust precompression between the two；
Step 6: it is slow to apply amplitude to the Y direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of decline, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along Y-axis
Opposite direction is slowly rocked to extreme position, under the action of the upper stiction driven between foot 2-1 and motion platform 1, movement
Platform 1 generates straight-line displacement output along Y-axis opposite direction；
Step 7: it is quick to apply amplitude to the Y direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of rising, two-way stacked flexure type piezoelectric actuator 2-2 bending deformation drive driving foot 2-1 along Y-axis
Positive direction is quickly rocked to initial position, under the action of the inertia of motion platform 1, between motion platform 1 and upper driving foot 2-1
Generation is remain stationary with respect to sliding；
Step 8: repeating step 6 to step 7, continuous opposite direction moves along a straight line realization motion platform 1 along the y axis,
By changing amplitude and the time of driving voltage signal, Ultra-precision positioning in this direction is realized, to two-way stacked flexure type
The driving voltage signal that Y direction bending subregion in piezoelectric actuator 2-2 applies is as shown in U in Fig. 6.
In the present embodiment, the end foot 2-1 is driven on when ultraprecise linear motion is done in the locating platform realization along the y axis
Hold particle relative to the motion profile of motion platform 1 as shown in fig. 7, and utilizing the upper driving foot end 2-1 two movement sides of particle
To the different forward and reverse linear motions for realizing motion platform of speed.
Although the present invention has been disclosed in the preferred embodiment as above, it is not intended to limit the invention, any to be familiar with this
The people of technology can do various changes and modification, therefore protection of the invention without departing from the spirit and scope of the present invention
Range should subject to the definition of the claims.
Claims (8)
1. a kind of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform, which is characterized in that the locating platform includes motion platform
(1), driving unit (2), lateral pressing plate (3), vertical guide (4) and pedestal (5)；
The driving unit (2) includes upper driving foot (2-1), two-way stacked flexure type piezoelectric actuator (2-2), middle splint
(2-3), longitudinal vibration piezoelectric ceramics (2-4), unidirectional bending vibration piezoelectric ceramics (2-5) and lower driving foot (2-6)；
Upper driving foot (2-1), two-way stacked flexure type piezoelectric actuator (2-2), middle splint (2-3), longitudinal vibration piezoelectricity
Ceramic (2-4), unidirectional bending vibration piezoelectric ceramics (2-5) and it is lower drive foot (2-6) along the driving unit (2) axis direction according to
Secondary to arrange and be fixedly connected, the lateral pressing plate (3) is fixedly connected with pedestal (5), and the vertical guide (4) and pedestal (5) are solid
Fixed connection, the vertical guide (4) are arranged in a vertical direction and parallel with the axis direction of driving unit (2), described vertically to lead
Rail (4) and the middle splint (2-3) are slidably connected to guide the linear motion of middle splint (2-3) along the vertical direction, described
Pedestal (5) and the motion platform (1) be slidably connected with guided-moving platform (1) along the horizontal direction orthogonal with vertical direction and
The linear motion of longitudinal direction；
The lower surface of the motion platform (1) is pressed on the upper surface for driving foot (2-1), the lower side for driving foot (2-6)
Face is pressed on the side of lateral pressing plate (3)；
The pedestal (5) is kept fixed, and the driving unit (2) moves in a straight line along the vertical direction, motion platform (1) edge
Vertical direction, horizontal direction, longitudinal direction do Three Degree Of Freedom linear motion.
2. locating platform according to claim 1, which is characterized in that the two-way stacked flexure type piezoelectric actuator
(2-2) is stacked along own axes direction by multilayer piezoelectric ceramic and is composed of a fixed connection, two end faces difference of every lamination electroceramics
Including four polarization subregions, one pair of them are that longitudinal direction is bent subregion, and another pair is that horizontal direction is bent subregion, is being motivated
Under the action of voltage signal, the two-way stacked flexure type piezoelectric actuator (2-2), which generates, deviates the curved of own axes direction
Song deformation, and then drive and drive foot (2-1) along the pendulum motion of longitudinal direction and horizontal direction；
The longitudinal vibration piezoelectric ceramics (2-4) is stacked along own axes direction by multilayer piezoelectric ceramic and is composed of a fixed connection, every lamination
Two end faces of electroceramics are respectively a polarization subregion, under the action of driving voltage signal, the longitudinal vibration piezoelectric ceramics (2-
4) dilatation along own axes direction is generated, and then drives the linear motion of lower driving foot (2-6) along the vertical direction；
The unidirectional bending vibration piezoelectric ceramics (2-5) is stacked along own axes direction by multilayer piezoelectric ceramic and is composed of a fixed connection, often
Two end faces of lamination electroceramics respectively include two polarization subregions, under the action of driving voltage signal, the unidirectional bending vibration
Piezoelectric ceramics (2-5) generates the bending deformation for deviateing own axes direction, and then drives lower driving foot (2-6) close to or far from side
Pendulum motion to pressing plate (3).
3. locating platform according to claim 1, which is characterized in that the motion platform (1) and upper driving enough (2-1) it
Between compressed by external support device, the external support device includes guide supporting, ball bearing compression, electromagnetic attracting force, stream
Body dynamic pressure compresses and hydrostatic pressure compresses.
4. locating platform according to claim 1, which is characterized in that the lower driving foot (2-6) and lateral pressing plate (3) it
Between by vertical guide (4) compress.
5. locating platform according to claim 1, which is characterized in that the quantity of the driving unit (2) be one and with
On, the quantity for increasing driving unit (2) realizes the multiplication of motion platform (1) load capacity.
6. the motivational techniques of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform described in a kind of claim 1, which is characterized in that institute
When the quantity for stating driving unit (2) is one or more, motion platform (1) edge and driving unit are realized by following motivational techniques
(2) the parallel vertical direction of axis direction does two-way linear movement:
Step 1: lateral pressing plate (3) is pressed on lower driving foot side (2-6), and adjust precompression between the two；
Step 2: but phase phase difference identical to longitudinal vibration piezoelectric ceramics (2-4) and unidirectional bending vibration piezoelectric ceramics (2-5) application frequency
+ 90 ° of sine-wave excitation voltage signal, longitudinal vibration piezoelectric ceramics (2-4) and unidirectional bending vibration piezoelectric ceramics (2-5) motivate driving respectively
The longitudinal vibration and bending vibration of part under unit (2), the longitudinal vibration and the lower clockwise elliptical for driving foot end (2-6) particle of bending vibration synthesis
Track movement, under the action of the lower frictional force driven between foot (2-6) and lateral pressing plate (3), driving unit (2) and movement are flat
Platform (1) does positive direction linear motion along the vertical direction；
Step 3: repeating step 2, motion platform (1) continuous positive direction linear motion along the vertical direction is realized, and by changing
The amplitude and application time for becoming driving voltage signal realize the ultraprecise positive direction straight line fortune of motion platform (1) along the vertical direction
It is dynamic；
Step 4: lateral pressing plate (3) is pressed on lower driving foot side (2-6), and the precompression that logical adjustment is between the two；
Step 5: but phase phase identical to longitudinal vibration piezoelectric ceramics (2-4) and unidirectional bending vibration piezoelectric ceramics (2-5) application frequency
The sine-wave excitation voltage signal of -90 ° of difference, longitudinal vibration piezoelectric ceramics (2-4) and unidirectional bending vibration piezoelectric ceramics (2-5) motivate drive respectively
The counterclockwise ellipse of foot end (2-6) particle is driven under the longitudinal vibration and bending vibration of part under moving cell (2), the longitudinal vibration and bending vibration synthesis
Circular test movement, under the action of the lower frictional force driven between foot (2-6) and lateral pressing plate (3), driving unit (2) and movement
Platform (1) does opposite direction linear motion along the vertical direction；
Step 6: repeating step 5, motion platform (1) continuous opposite direction linear motion along the vertical direction is realized, and by changing
The amplitude and application time for becoming driving voltage signal realize the ultraprecise opposite direction straight line fortune of motion platform (1) along the vertical direction
It is dynamic.
7. the motivational techniques of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform described in a kind of claim 1, which is characterized in that institute
When the quantity for stating driving unit (2) is one or more, motion platform (1) edge and driving unit are realized by following motivational techniques
(2) the orthogonal horizontal direction of axis direction does two-way linear movement:
Step 1: motion platform (1) is pressed on upper driving foot upper surface (2-1), and adjust precompression between the two；
Step 2: it is slow to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of rising, two-way stacked flexure type piezoelectric actuator (2-2) bending deformation, which drives, drives foot edge (2-1)
Horizontal square is to slowly extreme position is rocked to, in the upper effect for driving the stiction between foot (2-1) and motion platform (1)
Under, motion platform (1) is exported along horizontal square to straight-line displacement is generated；
Step 3: it is quick to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of decline, two-way stacked flexure type piezoelectric actuator (2-2) bending deformation, which drives, drives foot edge (2-1)
Horizontal opposite direction is quickly rocked to initial position, under the action of the inertia of motion platform (1), motion platform (1) and upper driving
Occur to remain stationary with respect to sliding between foot (2-1)；
Step 4: repeating step 2 to step 3, continuous positive direction moves along a straight line in the horizontal direction for realization motion platform (1),
And the amplitude by changing driving voltage signal and time realize the ultraprecise positive direction straight line of motion platform (1) in the horizontal direction
Movement；
Step 5: motion platform (1) is pressed on upper driving foot upper surface (2-1), and adjust precompression between the two；
Step 6: it is slow to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of decline, two-way stacked flexure type piezoelectric actuator (2-2) bending deformation, which drives, drives foot edge (2-1)
Horizontal opposite direction is slowly rocked to extreme position, in the upper effect for driving the stiction between foot (2-1) and motion platform (1)
Under, motion platform (1) generates straight-line displacement output along horizontal opposite direction；
Step 7: it is quick to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of rising, two-way stacked flexure type piezoelectric actuator (2-2) bending deformation, which drives, drives foot edge (2-1)
Horizontal square is to being quickly rocked to initial position, under the action of the inertia of motion platform (1), motion platform (1) and upper driving
Occur to remain stationary with respect to sliding between foot (2-1)；
Step 8: repeating step 6 to step 7, continuous opposite direction moves along a straight line in the horizontal direction for realization motion platform (1),
And the amplitude by changing driving voltage signal and time realize the ultraprecise opposite direction straight line of motion platform (1) in the horizontal direction
Movement.
Wherein, in the application speed of the driving voltage signal amplitude, slowly signified application speed is less than quick meaning
Apply speed.
8. the motivational techniques of ultraprecise Three Degree Of Freedom linear piezoelectric locating platform described in a kind of claim 1, which is characterized in that institute
When the quantity for stating driving unit (2) is one or more, motion platform (1) edge and driving unit are realized by following motivational techniques
(2) the orthogonal longitudinal direction of axis direction does two-way linear movement:
Step 1: motion platform (1) is pressed on upper driving foot upper surface (2-1), and adjust precompression between the two；
Step 2: it is slow to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of rising, two-way stacked flexure type piezoelectric actuator (2-2) bending deformation, which drives, drives foot edge (2-1)
Depth positive direction is slowly rocked to extreme position, in the upper effect for driving the stiction between foot (2-1) and motion platform (1)
Under, motion platform (1) is exported along horizontal square to straight-line displacement is generated；
Step 3: it is quick to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of decline, two-way stacked flexure type piezoelectric actuator (2-2) bending deformation, which drives, drives foot edge (2-1)
Depth opposite direction is quickly rocked to initial position, under the action of the inertia of motion platform (1), motion platform (1) and upper driving
Occur to remain stationary with respect to sliding between foot (2-1)；
Step 4: repeating step 2 to step 3, realization motion platform (1) moves along a straight line along the continuous positive direction of longitudinal direction,
And the amplitude by changing driving voltage signal and time realize motion platform (1) along the ultraprecise positive direction straight line of longitudinal direction
Movement；
Step 5: motion platform (1) is pressed on upper driving foot upper surface (2-1), and adjust precompression between the two；
Step 6: it is slow to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of decline, two-way stacked flexure type piezoelectric actuator (2-2) bending deformation, which drives, drives foot edge (2-1)
Depth opposite direction is slowly rocked to extreme position, in the upper effect for driving the stiction between foot (2-1) and motion platform (1)
Under, motion platform (1) generates straight-line displacement output along horizontal opposite direction；
Step 7: it is quick to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of rising, two-way stacked flexure type piezoelectric actuator (2-2) bending deformation, which drives, drives foot edge (2-1)
Depth positive direction is quickly rocked to initial position, under the action of the inertia of motion platform (1), motion platform (1) and upper driving
Occur to remain stationary with respect to sliding between foot (2-1)；
Step 8: repeating step 6 to step 7, realization motion platform (1) moves along a straight line along the continuous opposite direction of longitudinal direction,
And the amplitude by changing driving voltage signal and time realize motion platform (1) along the ultraprecise opposite direction straight line of longitudinal direction
Movement.
Wherein, in the application speed of the driving voltage signal amplitude, slowly signified application speed is less than quick meaning
Apply speed.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110224634A (en) * | 2019-07-05 | 2019-09-10 | 季华实验室 | Piezoelectric ceramics displacement driver |
| CN111273418A (en) * | 2020-03-12 | 2020-06-12 | 中国科学院长春光学精密机械与物理研究所 | Optical element multi-degree-of-freedom precision positioning device under vacuum condition |
| CN111421228A (en) * | 2020-04-08 | 2020-07-17 | 华中科技大学 | Sample precision clamp for cross-scale two-photon polymerization processing and leveling method |
| CN112917502A (en) * | 2021-01-22 | 2021-06-08 | 哈尔滨工业大学 | Piezoelectric finger and excitation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1543051A (en) * | 2003-11-04 | 2004-11-03 | 上海大学 | Ultra-fine bidirectional driving type linear micromotor |
| CN105406754A (en) * | 2016-01-08 | 2016-03-16 | 哈尔滨工业大学 | Longitudinal-flexural-combined single-foot two-degree-of-freedom ultrasonic motor vibrator |
| CN106533248A (en) * | 2016-12-08 | 2017-03-22 | 南京航空航天大学 | Single-stator three-degree-of-freedom ultrasonic motor and working mode thereof |
| CN106953539A (en) * | 2017-04-14 | 2017-07-14 | 哈尔滨工业大学 | The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques |
| CN107147328A (en) * | 2017-06-21 | 2017-09-08 | 哈尔滨工业大学 | Bend the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom motion realized using the driver |
-
2019
- 2019-04-09 CN CN201910280460.7A patent/CN109842321B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1543051A (en) * | 2003-11-04 | 2004-11-03 | 上海大学 | Ultra-fine bidirectional driving type linear micromotor |
| CN105406754A (en) * | 2016-01-08 | 2016-03-16 | 哈尔滨工业大学 | Longitudinal-flexural-combined single-foot two-degree-of-freedom ultrasonic motor vibrator |
| CN106533248A (en) * | 2016-12-08 | 2017-03-22 | 南京航空航天大学 | Single-stator three-degree-of-freedom ultrasonic motor and working mode thereof |
| CN106953539A (en) * | 2017-04-14 | 2017-07-14 | 哈尔滨工业大学 | The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques |
| CN107147328A (en) * | 2017-06-21 | 2017-09-08 | 哈尔滨工业大学 | Bend the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom motion realized using the driver |
Non-Patent Citations (1)
| Title |
|---|
| 金龙等: "圆柱定子多自由度压电超声电机的设计", 《全国超声波电机理论及其应用技术研讨会论文集》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110224634A (en) * | 2019-07-05 | 2019-09-10 | 季华实验室 | Piezoelectric ceramics displacement driver |
| CN111273418A (en) * | 2020-03-12 | 2020-06-12 | 中国科学院长春光学精密机械与物理研究所 | Optical element multi-degree-of-freedom precision positioning device under vacuum condition |
| CN111421228A (en) * | 2020-04-08 | 2020-07-17 | 华中科技大学 | Sample precision clamp for cross-scale two-photon polymerization processing and leveling method |
| CN112917502A (en) * | 2021-01-22 | 2021-06-08 | 哈尔滨工业大学 | Piezoelectric finger and excitation method thereof |
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