CN111230919B

CN111230919B - Four-finger pressure electric manipulator capable of manipulating rotors with various different structures and excitation method thereof

Info

Publication number: CN111230919B
Application number: CN202010065303.7A
Authority: CN
Inventors: 刘英想; 张仕静; 邓杰; 刘军考; 陈维山
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2020-01-20
Filing date: 2020-01-20
Publication date: 2021-03-12
Anticipated expiration: 2040-01-20
Also published as: CN111230919A

Abstract

The invention discloses a four-finger pressure electric manipulator capable of manipulating rotors with various different structures and an excitation method thereof, and belongs to the technical field of bionic robots. The four-finger piezoelectric manipulator comprises a flat base, four bending piezoelectric fingers and a plurality of connecting screws, and can operate rotors with spherical, flat and cylindrical structures. When the excitation voltage signals are applied to the bending piezoelectric fingers, the bending piezoelectric fingers can generate bending motion, and the bending motion direction of the four bending piezoelectric fingers is controlled by adjusting the time sequence and the amplitude of the excitation voltage signals of the four bending piezoelectric fingers. The bending motion of four bending piezoelectric fingers is selected according to the structural type of the mover, and the mover is further operated by using friction force to generate motion with multiple degrees of freedom. The four-finger pressure electric manipulator has the advantages of self-adaption of the structure type of the rotor, wide movement range of the controlled rotor, multiple degrees of freedom, large scale and simple structure, and has wide application prospect in the field of multiple degrees of freedom micro-nano control.

Description

Four-finger pressure electric manipulator capable of manipulating rotors with various different structures and excitation method thereof

Technical Field

The invention belongs to the technical field of bionic robots, and particularly relates to a four-finger pressure electric manipulator capable of manipulating rotors with various different structures and an excitation method thereof.

Background

With the rapid development of advanced technologies such as precision machining, precision medical treatment, micro-nano manufacturing and the like, the advanced technologies provide urgent requirements for equipment with micro-nano object control capability, and particularly a micro-nano control manipulator with multi-degree-of-freedom motion control capability. However, the current manipulator with high flexibility and multi-degree-of-freedom manipulation capability is mostly driven by an electromagnetic motor, and a complex speed reducing mechanism is often adopted in the structure of the manipulator to improve the low-speed stability of the manipulator in manipulating the object to move; this leads to difficulties in simplifying the structure thereof, often resulting in extremely complex overall systems when implementing multiple degrees of freedom manipulation; the most important point is that the movement precision of the traditional electromagnetic motor is limited by the acceleration and deceleration mechanism mode of the traditional electromagnetic motor, and the actual requirement of controlling an object to realize micro-nano movement precision in the micro-nano control field is difficult to meet.

In recent years, with the successful realization of piezoelectric functional materials in the aspect of precise motion, researchers at home and abroad carry out extensive research on piezoelectric micro-nano control manipulators adopting a piezoelectric actuation principle; the piezoelectric transducer realizes conversion of electric energy and mechanical energy by utilizing the inverse piezoelectric effect of a piezoelectric material, and generally has the characteristics of high response speed, outage self-locking, simple structure, no electromagnetic interference, high motion resolution and the like. The current piezoelectric micro-nano manipulator mainly adopts a piezoelectric stack as an actuating element, and is structurally combined with a flexible displacement amplifying mechanism in order to enlarge the motion stroke of the piezoelectric micro-nano manipulator; the piezoelectric micro-nano control manipulator realizes higher motion precision, although the flexible displacement amplification mechanism is adopted to expand the control stroke, the control stroke is still limited, and the control degree of freedom is generally single. Because the piezoelectric micro-nano manipulation mechanical arm adopts a scheme of combining the piezoelectric stack and the flexible amplifying mechanism, the structure is complex in the aspect of realizing multi-degree-of-freedom motion or manipulation, and the multi-degree-of-freedom motion or manipulation capability is difficult to obtain on the basis of simplifying the structure; in addition, the piezoelectric stack is used as an actuating element of the micro-nano manipulator, so that the serious hysteresis phenomenon which is difficult to avoid is generated in the application of the micro-nano manipulator. In summary, how to expand the degree of freedom and the manipulation range of the micro-nano manipulation manipulator and how to improve the adaptability of the micro-nano manipulation manipulator to the manipulation object have become key problems in the field of micro-nano manipulation.

As can be seen from the above, although the micro-nano manipulator using the piezoelectric principle in the current research has a high-precision manipulation capability, it has the disadvantages of a small degree of freedom and a small manipulation range, and the structure type of the manipulatable object is single and the motion type is solidified. Therefore, the manipulation capability with micro-nano manipulation precision, multiple degrees of freedom and large-stroke motion has become a research target of the micro-nano manipulation manipulator at present. In view of the diversity and flexibility of the limb movement of animals in the biological field, the exploration of micro-nano control manipulators which can realize the nano movement precision, multiple degrees of freedom and large stroke and adapt to objects with different structural types based on the basic principle of bionics has become a current research hotspot.

Disclosure of Invention

In view of the above, the present invention is directed to a four-finger piezoelectric manipulator capable of manipulating various rotors with different structures and an excitation method thereof, so as to solve the problems of the current micro-nano manipulator, such as less freedom, small manipulation range, complex body structure, single structure type of a manipulation object, and fixed size.

In order to achieve the purpose, the technical scheme of the invention is realized as follows:

a four-finger pressure electric manipulator capable of manipulating rotors with various different structures comprises a flat plate base, four bending piezoelectric fingers and a plurality of connecting screws, wherein the bending piezoelectric fingers are divided into a first bending piezoelectric finger, a second bending piezoelectric finger, a third bending piezoelectric finger and a fourth bending piezoelectric finger; the four bending piezoelectric fingers have the same structure, the first bending piezoelectric finger comprises an upper end part, a piezoelectric unit and an actuator base, and the top end of the upper end part is of an incomplete spherical structure; the four bending piezoelectric fingers are fixedly connected with the flat base through connecting screws; the central connecting lines of the fixed positions of the four bent piezoelectric fingers on the flat plate base are square or circular; the upper end parts of the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger are in contact with the rotor, and the upper end parts of the four bending piezoelectric fingers are in contact with the rotor to realize the support and the operation of the rotor; the controlled rotor is a spherical rotor, a flat plate type rotor or a cylindrical rotor, wherein the shape of the outer edge of the flat plate type rotor is rectangular, circular or a polygonal structure with the number of sides larger than four, and the cylindrical rotor is of a solid structure or a hollow structure.

Further, the four bending piezoelectric fingers are identical in size.

An excitation method of a four-finger pressure electric manipulator capable of operating rotors with various different structures,

a Cartesian rectangular coordinate system XYZ is established by taking the symmetrical centers of the distribution positions of the four bending piezoelectric fingers on the flat plate base as an origin, the X axis of the coordinate system is parallel to the connecting line of the fixed centers of the first bending piezoelectric finger and the second bending piezoelectric finger on the flat plate base, the Y axis is parallel to the connecting line of the fixed centers of the first bending piezoelectric finger and the fourth bending piezoelectric finger on the flat plate base, and the Z axis is parallel to the axial direction of the bending piezoelectric fingers; the four bending piezoelectric fingers realize bending motion in multiple directions under the excitation of A, B two-path voltage signals, and the method specifically comprises the following steps:

firstly, realize four crooked piezoelectricity fingers and move to X axle positive bending simultaneously: applying the A path of positive excitation voltage signals to four bending piezoelectric fingers simultaneously;

secondly, four bending piezoelectric fingers can bend towards the negative direction of the X axis at the same time: applying the A path of negative excitation voltage signals to four bending piezoelectric fingers at the same time;

thirdly, four bending piezoelectric fingers can bend to the Y axis at the same time: applying the B path of positive excitation voltage signals to four bending piezoelectric fingers simultaneously;

fourthly, the four bending piezoelectric fingers can bend towards the negative direction of the Y axis at the same time: applying the B-path negative excitation voltage signal to four bending piezoelectric fingers at the same time;

fifthly, the four bending piezoelectric fingers can simultaneously perform counterclockwise bending motion along the tangent of the fixed center circumcircle on the flat base: simultaneously applying the A path of negative-value excitation voltage signals and the B path of positive-value excitation voltage signals to a first bending piezoelectric finger, simultaneously applying the A path of negative-value excitation voltage signals and the B path of negative-value excitation voltage signals to a second bending piezoelectric finger, simultaneously applying the A path of positive-value excitation voltage signals and the B path of negative-value excitation voltage signals to a third bending piezoelectric finger, simultaneously applying the A path of positive-value excitation voltage signals and the B path of positive-value excitation voltage signals to a fourth bending piezoelectric finger, and synchronously applying the excitation voltage signals;

sixthly, the four bending piezoelectric fingers can simultaneously perform clockwise bending motion along the tangent of a fixed center circumcircle on the flat base: the method comprises the steps of simultaneously applying the A path of positive-value excitation voltage signals and the B path of negative-value excitation voltage signals to a first bending piezoelectric finger, simultaneously applying the A path of positive-value excitation voltage signals and the B path of positive-value excitation voltage signals to a second bending piezoelectric finger, simultaneously applying the A path of negative-value excitation voltage signals and the B path of positive-value excitation voltage signals to a third bending piezoelectric finger, simultaneously applying the A path of negative-value excitation voltage signals and the B path of negative-value excitation voltage signals to a fourth bending piezoelectric finger, and synchronously applying the excitation voltage signals.

Furthermore, by setting the amplitude and the time sequence of the A path of excitation voltage signal and the B path of excitation voltage signal, the bending motion of the four bending piezoelectric fingers in multiple directions is excited, and the friction force is utilized to operate the spherical rotor, the flat-plate rotor and the cylindrical rotor to realize the linear or rotary motion with multiple degrees of freedom, which specifically comprises the following steps:

the specific process of operating the spherical rotor to realize three-degree-of-freedom rotary motion is as follows: the three-degree-of-freedom rotary motion of the spherical rotor is relative to a Cartesian rectangular coordinate system X established at the spherical center of the spherical rotor₁Y₁Z₁According to the right-hand rule, the spherical rotor is operated to respectively realize X-ray winding by taking the forward direction of the rotary motion around the coordinate axis as the anticlockwise direction₁、Y₁、Z₁Continuous rotational movement of the shaft in the counter-clockwise and clockwise directions;

wherein, the operation ball-type rotor winds X₁The specific process of the continuous rotating motion of the shaft in the counterclockwise direction is as follows:

step one, applying a positive-value excitation voltage signal with a slowly rising B-path amplitude to four bent piezoelectric fingers to enable the four bent piezoelectric fingers to generate slow bending deformation to limit positions along a Y-axis positive direction simultaneously, and operating the spherical rotor to wind X around the spherical rotor through static friction force₁The shaft generates micro displacement in the counterclockwise direction;

applying a positive excitation voltage signal with a rapidly reduced B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the Y axis simultaneously, wherein the spherical rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor to wind X₁The shaft rotates anticlockwise continuously;

operating ball type rotor winding X₁The specific process of the continuous clockwise rotation motion of the shaft is as follows:

step one, applying a negative excitation voltage signal with a slowly-decreasing B-path amplitude to four bent piezoelectric fingers to enable the four bent piezoelectric fingers to generate slow bending deformation to limit positions along the negative direction of the Y axis simultaneously, and operating the spherical rotor to wind the X-axis through static friction force₁The shaft generates micro displacement clockwise;

applying a negative excitation voltage signal with a rapidly rising B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the Y axis simultaneously, wherein the spherical rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor to wind X₁The shaft rotates clockwise continuously;

operating ball type rotor winding Y₁The specific process of the continuous rotating motion of the shaft in the counterclockwise direction is as follows:

step one, applying a negative excitation voltage signal with a slowly-decreasing amplitude of the path A to four bending piezoelectric fingers to enable the four bending piezoelectric fingers to generate slow bending deformation to limit positions along the negative direction of an X axis simultaneously, and operating a spherical rotor to wind Y around through static friction force₁The shaft generates micro displacement in the counterclockwise direction;

applying the negative excitation voltage signal with the rapidly rising amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the X axis at the same time, wherein the spherical rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor to wind Y₁The shaft rotates anticlockwise continuously;

operating ball type rotor winding Y₁The specific process of the continuous clockwise rotation motion of the shaft is as follows:

step one, applying the A path of positive value excitation voltage signals with slowly rising amplitude to four bending piezoelectric fingers to enable the four bending piezoelectric fingers to simultaneously positively move along the X axisSlowly bending and deforming to the limit position, and operating the spherical rotor to wind Y through static friction force₁The shaft generates micro displacement clockwise;

applying a positive excitation voltage signal with a rapidly reduced amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the X axis at the same time, wherein the spherical rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor to wind Y₁The shaft rotates clockwise continuously;

operating ball type rotor winding Z₁The specific process of the continuous rotating motion of the shaft in the counterclockwise direction is as follows:

step one, simultaneously applying the A path of negative value excitation voltage signals with slowly-decreasing amplitude and the B path of positive value excitation voltage signals with slowly-increasing amplitude to a first bending piezoelectric finger, simultaneously applying the A path of negative value excitation voltage signals with slowly-decreasing amplitude and the B path of negative value excitation voltage signals with slowly-decreasing amplitude to a second bending piezoelectric finger, simultaneously applying the A path of positive value excitation voltage signals with slowly-increasing amplitude and the B path of negative value excitation voltage signals with slowly-decreasing amplitude to a third bending piezoelectric finger, simultaneously applying the A path of positive value excitation voltage signals with slowly-increasing amplitude and the B path of positive value excitation voltage signals with slowly-increasing amplitude to a fourth bending piezoelectric finger, wherein the application actions of the excitation voltage signals are synchronously performed, and the four bending piezoelectric fingers simultaneously generate slow bending deformation along the tangential direction of the fixed center circumcircle on the flat plate base in the anticlockwise direction to the limit position, operating spherical rotor to wind Z by static friction force₁The shaft generates micro displacement in the counterclockwise direction;

step two, simultaneously applying the negative excitation voltage signal with the quickly rising amplitude of the A path and the positive excitation voltage signal with the quickly falling amplitude of the B path to the first bending piezoelectric finger, simultaneously applying the negative excitation voltage signal with the quickly rising amplitude of the A path and the negative excitation voltage signal with the quickly rising amplitude of the B path to the second bending piezoelectric finger, simultaneously applying the positive excitation voltage signal with the quickly falling amplitude of the A path and the negative excitation voltage signal with the quickly rising amplitude of the B path to the third bending piezoelectric finger, simultaneously applying the positive excitation voltage signal with the quickly falling amplitude of the A path and the positive excitation voltage signal with the quickly falling amplitude of the B path to the fourth bending piezoelectric finger, wherein the application actions of the excitation voltage signals are synchronously performed, and the four bending piezoelectric fingers simultaneously generate the quick bending deformation along the tangential direction of the fixed center circumcircle tangent line on the flat base to the zero bending position, the spherical rotor keeps still due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor to wind Z₁The shaft rotates anticlockwise continuously;

operating ball type rotor winding Z₁The specific process of the continuous clockwise rotation motion of the shaft is as follows:

step one, simultaneously applying the A path of positive-value excitation voltage signals with slowly rising amplitude values and the B path of negative-value excitation voltage signals with slowly falling amplitude values to a first bending piezoelectric finger, simultaneously applying the A path of positive-value excitation voltage signals with slowly rising amplitude values and the B path of positive-value excitation voltage signals with slowly rising amplitude values to a second bending piezoelectric finger, simultaneously applying the A path of negative-value excitation voltage signals with slowly falling amplitude values and the B path of positive-value excitation voltage signals with slowly rising amplitude values to a third bending piezoelectric finger, simultaneously applying the A path of negative-value excitation voltage signals with slowly falling amplitude values and the B path of negative-value excitation voltage signals with slowly falling amplitude values to a fourth bending piezoelectric finger, wherein the application actions of the excitation voltage signals are synchronously performed, and the four bending piezoelectric fingers simultaneously generate slow bending deformation along the tangent direction of the fixed center circumcircle on a flat base to the limit position in the clockwise direction, operating spherical rotor to wind Z by static friction force₁The shaft generates micro displacement clockwise;

step two, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the first bending piezoelectric finger, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the second bending piezoelectric finger, simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the third bending piezoelectric finger, simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the fourth bending piezoelectric finger, wherein the application actions of the excitation voltage signals are synchronously performed, and the four bending piezoelectric fingers simultaneously generate rapid bending deformation along the tangential direction of the fixed center circumcircle on the flat plate base along the anticlockwise direction to the zero bending position, the spherical rotor keeps still due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor to wind Z₁The shaft rotates clockwise continuously;

the specific process of operating the flat plate type mover to realize linear motion with two degrees of freedom and rotary motion with one degree of freedom is as follows: the two-degree-of-freedom linear motion and one-degree-of-freedom rotary motion of the flat plate type mover are relative to a Cartesian rectangular coordinate system XYZ, and respectively realize positive and negative continuous linear motion along an X axis and a Y axis and continuous rotary motion around the Z axis in the anticlockwise direction and the clockwise direction;

the specific process of the manipulation flat plate type mover moving along the X-axis forward continuous linear motion is as follows:

step one, applying a positive-value excitation voltage signal of which the amplitude of the path A slowly rises to four bending piezoelectric fingers, enabling the four bending piezoelectric fingers to slowly bend and deform to limit positions along the positive direction of an X axis at the same time, and operating a flat plate type mover to generate micro displacement along the positive direction of the X axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the X axis at the same time, wherein the flat plate type rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor to continuously and linearly move along the positive direction of the X axis;

the specific process of operating the flat plate type mover to move along the negative direction of the X axis is as follows:

step one, applying a negative excitation voltage signal with a slowly decreasing amplitude of the path A to four bending piezoelectric fingers, enabling the four bending piezoelectric fingers to generate slow bending deformation to limit positions along the negative direction of an X axis at the same time, and operating a flat plate type mover to generate micro displacement along the negative direction of the X axis through static friction force;

applying the negative excitation voltage signal with the rapidly rising amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the X axis simultaneously, wherein the flat plate type rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor to continuously and linearly move along the negative direction of the X axis;

the specific process of operating the flat plate type mover to move continuously and linearly along the positive direction of the Y axis is as follows:

step one, applying a positive excitation voltage signal of which the amplitude of a path B slowly rises to four bending piezoelectric fingers, enabling the four bending piezoelectric fingers to generate slow bending deformation to an extreme position along the positive direction of a Y axis simultaneously, and operating a flat plate type mover to generate micro displacement along the positive direction of the Y axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the Y axis simultaneously, wherein the flat plate type rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor to continuously and linearly move along the positive direction of the Y axis;

the specific process of operating the flat plate type mover to move along the negative direction of the Y axis is as follows:

step one, applying a negative excitation voltage signal with a slowly decreasing B path amplitude to four bending piezoelectric fingers, enabling the four bending piezoelectric fingers to generate slow bending deformation to an extreme position along the negative direction of a Y axis at the same time, and operating a flat plate type mover to generate micro displacement along the negative direction of the Y axis through static friction force;

applying a negative excitation voltage signal with a rapidly rising B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the Y axis simultaneously, wherein the flat plate type rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor to continuously and linearly move along the negative direction of the Y axis;

the specific process of operating the plate type mover to perform continuous rotary motion around the Z axis in the anticlockwise direction is as follows:

step one, simultaneously applying the A path of negative value excitation voltage signals with slowly-decreasing amplitude and the B path of positive value excitation voltage signals with slowly-increasing amplitude to a first bending piezoelectric finger, simultaneously applying the A path of negative value excitation voltage signals with slowly-decreasing amplitude and the B path of negative value excitation voltage signals with slowly-decreasing amplitude to a second bending piezoelectric finger, simultaneously applying the A path of positive value excitation voltage signals with slowly-increasing amplitude and the B path of negative value excitation voltage signals with slowly-decreasing amplitude to a third bending piezoelectric finger, simultaneously applying the A path of positive value excitation voltage signals with slowly-increasing amplitude and the B path of positive value excitation voltage signals with slowly-increasing amplitude to a fourth bending piezoelectric finger, wherein the application actions of the excitation voltage signals are synchronously performed, and the four bending piezoelectric fingers simultaneously generate slow bending deformation along the tangential direction of the fixed center circumcircle on the flat plate base in the anticlockwise direction to the limit position, operating the flat plate type mover to generate micro displacement in the anticlockwise direction around the Z axis through static friction force;

step two, simultaneously applying the negative excitation voltage signal with the quickly rising amplitude of the A path and the positive excitation voltage signal with the quickly falling amplitude of the B path to the first bending piezoelectric finger, simultaneously applying the negative excitation voltage signal with the quickly rising amplitude of the A path and the negative excitation voltage signal with the quickly rising amplitude of the B path to the second bending piezoelectric finger, simultaneously applying the positive excitation voltage signal with the quickly falling amplitude of the A path and the negative excitation voltage signal with the quickly rising amplitude of the B path to the third bending piezoelectric finger, simultaneously applying the positive excitation voltage signal with the quickly falling amplitude of the A path and the positive excitation voltage signal with the quickly falling amplitude of the B path to the fourth bending piezoelectric finger, wherein the application actions of the excitation voltage signals are synchronously performed, and the four bending piezoelectric fingers simultaneously generate the quick bending deformation along the tangential direction of the fixed center circumcircle tangent line on the flat base to the zero bending position, the flat-plate rotor keeps still due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor to continuously rotate around the Z axis in the anticlockwise direction;

the specific process of the operation plate type mover rotating continuously around the Z axis in the clockwise direction is as follows:

step one, simultaneously applying the A path of positive-value excitation voltage signals with slowly rising amplitude values and the B path of negative-value excitation voltage signals with slowly falling amplitude values to a first bending piezoelectric finger, simultaneously applying the A path of positive-value excitation voltage signals with slowly rising amplitude values and the B path of positive-value excitation voltage signals with slowly rising amplitude values to a second bending piezoelectric finger, simultaneously applying the A path of negative-value excitation voltage signals with slowly falling amplitude values and the B path of positive-value excitation voltage signals with slowly rising amplitude values to a third bending piezoelectric finger, simultaneously applying the A path of negative-value excitation voltage signals with slowly falling amplitude values and the B path of negative-value excitation voltage signals with slowly falling amplitude values to a fourth bending piezoelectric finger, wherein the application actions of the excitation voltage signals are synchronously performed, and the four bending piezoelectric fingers simultaneously generate slow bending deformation along the tangent direction of the fixed center circumcircle on a flat base to the limit position in the clockwise direction, the flat plate type mover is controlled by static friction force to generate micro displacement clockwise around a Z axis;

step two, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the first bending piezoelectric finger, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the second bending piezoelectric finger, simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the third bending piezoelectric finger, simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the fourth bending piezoelectric finger, wherein the application actions of the excitation voltage signals are synchronously performed, and the four bending piezoelectric fingers simultaneously generate rapid bending deformation along the tangential direction of the fixed center circumcircle on the flat plate base along the anticlockwise direction to the zero bending position, the flat-plate rotor keeps still due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor to continuously rotate around the Z axis in the clockwise direction;

the specific process of operating the cylindrical rotor to realize one-degree-of-freedom linear motion and one-degree-of-freedom rotary motion comprises the following steps: one-degree-of-freedom linear motion and one-degree-of-freedom rotary motion of the cylindrical rotor refer to a Cartesian rectangular coordinate system X established in the center of the end face of the cylindrical rotor₂Y₂Z₂According to the right-hand rule, the cylindrical mover is operated along Y direction with the positive direction of the rotation motion around the coordinate axis as the counterclockwise direction₂Continuous linear movement of the axis in positive and negative directions, and about Y₂Continuous rotational movement of the shaft in the counter-clockwise and clockwise directions;

wherein the cylindrical mover is operated along Y₂The specific process of the shaft forward continuous linear motion is as follows:

step one, applying a positive excitation voltage signal with a slowly rising B-path amplitude to four bent piezoelectric fingers to enable the four bent piezoelectric fingers to generate slow bending deformation to limit positions along the positive direction of a Y axis simultaneously, and operating a cylindrical rotor along the Y axis through static friction force₂The shaft generates tiny displacement in the positive direction;

applying a positive excitation voltage signal with a rapidly reduced B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the Y axis, wherein the cylindrical rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the cylindrical rotor along the Y direction₂The shaft continuously moves linearly in the positive direction;

operating the cylinder mover along Y₂The specific process of the axial negative continuous linear motion is as follows:

step one, applying a negative excitation voltage signal with a slowly-decreasing B-path amplitude to four bent piezoelectric fingers to enable the four bent piezoelectric fingers to generate slow bending deformation to limit positions along the negative direction of a Y axis simultaneously, and operating a cylindrical rotor along the Y axis through static friction force₂The negative axis direction generates micro displacement;

applying a negative excitation voltage signal with a rapidly rising B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the Y axis simultaneously, wherein the cylindrical rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the cylindrical rotor along the Y direction₂The negative axis continuously moves linearly;

operating cylinder type mover to wind Y₂The specific process of the continuous rotating motion of the shaft in the counterclockwise direction is as follows:

step one, applying a negative excitation voltage signal with a slowly-decreasing amplitude of the A path to four bending piezoelectric fingers to enable the four bending piezoelectric fingers to generate slow bending deformation to limit positions along the negative direction of an X axis at the same time, and operating a cylindrical rotor to wind Y around through static friction force₂The shaft generates micro displacement in the counterclockwise direction;

applying the negative excitation voltage signal with the rapidly rising amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the X axis at the same time, wherein the cylindrical rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the cylindrical rotor to wind Y₂The shaft rotates anticlockwise continuously;

operating solid cylindrical rotor winding Y₂The specific process of the continuous clockwise rotation motion of the shaft is as follows:

step one, applying a positive excitation voltage signal with slowly rising A path amplitude to four bending piezoelectric fingers to enable the four bending piezoelectric fingers to generate slow bending deformation to limit positions along the positive direction of an X axis simultaneously, and operating a cylindrical rotor to wind Y around through static friction force₂The shaft generates micro displacement clockwise;

applying a positive excitation voltage signal with a rapidly reduced amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the X axis at the same time, wherein the cylindrical rotor keeps static due to inertia;

step three, repeating the step one to the step two, and operating the cylindrical rotor to wind Y₂The shaft continues to rotate clockwise.

Furthermore, the A, B two-phase excitation voltage signals are independent of each other and are both asymmetric sawtooth waves or asymmetric trapezoidal waves, and the rising and falling processes of the waveform are linear or nonlinear.

Compared with the prior art, the invention has the following advantages: four bending piezoelectric fingers are used as four control feet, self-adaptive control of the spherical mover, the flat-plate mover and the cylindrical mover is realized by controlling the bending motion of the four bending piezoelectric fingers and utilizing friction force, and various multi-degree-of-freedom linear and rotary motions of the mover are realized. The four bending piezoelectric fingers are used as a control unit and also used as a supporting unit of the rotor, so that the provided four-finger piezoelectric manipulator for controlling the rotors with various different structures realizes the integrated design of the control unit and the supporting unit, and further simplifies the structure; in addition, the four-finger piezoelectric manipulator which can operate the rotors with various different structures is arranged above the four-foot bending piezoelectric fingers, so that the large-scale motion output capacity of the rotors is remarkably improved.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic structural diagram of a four-finger-pressure electric manipulator capable of operating rotors with various different structures;

FIG. 2 is a detailed structural schematic diagram of a first curved piezoelectric finger;

FIG. 3 is a schematic diagram of a four-finger-pressure mechanical hand operable mover of a plurality of different structures;

FIG. 4 is a schematic illustration of four bending piezoelectric fingers simultaneously bending in a positive direction along the X-axis;

FIG. 5 is a schematic illustration of four bending piezoelectric fingers simultaneously bending in the negative X-axis;

FIG. 6 is a schematic illustration of four bending piezoelectric fingers simultaneously bending along the Y-axis in a positive direction;

FIG. 7 is a schematic illustration of four bending piezoelectric fingers simultaneously bending in the negative Y-axis;

FIG. 8 is a schematic illustration of four bending piezoelectric fingers simultaneously bending counterclockwise along a tangent to their fixed center circumscribed circle on a flat substrate;

FIG. 9 is a schematic illustration of four bending piezoelectric fingers simultaneously bending clockwise along their fixed center circumscribing circle tangent on a flat substrate;

FIG. 10 shows a spherical rotor of a four-finger-pressure electric manipulator capable of operating rotors with different structures wound around X₁A schematic view of a counter-clockwise rotational movement of the shaft;

FIG. 11 is a diagram of a four-finger-pressure electric manipulator operating spherical rotor capable of operating rotors with various different structures around X₁Schematic diagram of the shaft rotating clockwise;

FIG. 12 is a diagram of a spherical rotor wound by Y for four-finger-pressure electric manipulator capable of operating rotors with various different structures₁A schematic view of a counter-clockwise rotational movement of the shaft;

FIG. 13 is a diagram of a four-finger-pressure electric manipulator operating spherical rotor winding Y for operating rotors with different structures₁Schematic diagram of the shaft rotating clockwise;

FIG. 14 shows a spherical rotor of a four-finger-pressure manipulator for operating rotors with different structures wound around Z₁A schematic view of a counter-clockwise rotational movement of the shaft;

FIG. 15 shows a spherical rotor of a four-finger-pressure electric manipulator for operating rotors with different structures wound around Z₁Schematic diagram of the shaft rotating clockwise;

FIG. 16 is a schematic diagram of a four-finger-pressure electric manipulator operated flat-type mover capable of operating movers with various different structures and moving linearly along the positive direction of the X axis;

FIG. 17 is a schematic diagram of a four-finger-pressure electric manipulator operated flat-plate type mover capable of operating movers with various different structures and moving linearly along the negative direction of the X axis;

FIG. 18 is a schematic diagram of a four-finger-pressure electric manipulator operated flat-type mover capable of operating movers with various different structures and moving linearly along the positive direction of the Y axis;

FIG. 19 is a schematic diagram of a four-finger-pressure electric manipulator operated flat-type mover capable of operating movers with various different structures and moving linearly along the negative direction of the Y axis;

FIG. 20 is a schematic diagram of a four-finger-pressure electric manipulator operated flat-type mover capable of operating movers with different structures to rotate around a Z-axis in a counterclockwise direction;

FIG. 21 is a schematic diagram of a four-finger-pressure electric manipulator operated flat-type mover capable of operating movers with different structures, wherein the four-finger-pressure electric manipulator operates the flat-type mover to rotate clockwise around a Z axis;

FIG. 22 is a four-finger-pressure electric manipulator for operating various rotors with different structures, and a cylindrical rotor is operated along Y direction₂A schematic diagram of a shaft moving straight forward;

FIG. 23 is a four-finger-pressure electric manipulator for operating various rotors with different structures, and the cylindrical rotor is operated along Y direction₂A schematic diagram of an axial negative linear motion;

FIG. 24 is a four-finger-pressure electric manipulator for operating various rotors with different structures, and for operating a cylindrical rotor to wind Y-shaped rotor₂A schematic view of a counter-clockwise rotational movement of the shaft;

FIG. 25 is a diagram of a four-finger-pressure electric manipulator for operating various rotors with different structures for operating a cylindrical rotor to wind Y-shaped rotor₂Schematic diagram of the shaft rotating clockwise;

FIG. 26 is a schematic diagram of the A or B excitation voltage signals used to excite a bending piezoelectric finger to produce bending motion; the partial graph (a) represents the excitation voltage signals of the path A or the path B with positive voltage amplitudes, and the partial graph (B) represents the excitation voltage signals of the path A or the path B with negative voltage amplitudes;

in fig. 4 to 25, the dotted outline represents the position or posture before the bending piezoelectric finger or the mover moves, and the solid outline represents the position or posture after the bending piezoelectric finger or the mover moves.

Detailed Description

It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.

The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.

The first embodiment is as follows: this embodiment will be described in further detail with reference to fig. 1 and 3 of the specification. The embodiment provides a specific embodiment of a four-finger piezoelectric manipulator capable of operating rotors with various different structures, such as a flat base 1, four bending piezoelectric fingers 2 and a connecting screw 4 shown in fig. 1; the bending piezoelectric finger 2 is divided into a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4; the first bending piezoelectric finger 2-1 comprises an upper end part 2-1-1, a piezoelectric unit 2-1-2 and an actuator base 2-1-3, and the top end of the upper end part 2-1-1 is of an incomplete spherical structure; the other three bending piezoelectric fingers are the same as the first bending piezoelectric finger 2-1, and the four bending piezoelectric fingers 2 are fixedly connected with the flat base 1 through connecting screws 4; the central connecting lines of the fixed positions of the four bent piezoelectric fingers 2 on the flat plate base 1 are square or circular; the upper end 2-1-1 of the first bending piezoelectric finger 2-1, the upper end 2-2-1 of the second bending piezoelectric finger 2-2, the upper end 2-3-1 of the third bending piezoelectric finger 2-3 and the upper end 2-4-1 of the fourth bending piezoelectric finger 2-4 are all in contact with the rotor 3, and the rotor 3 is supported and operated by the contact of the upper ends of the four bending piezoelectric fingers 2 and the rotor 3; the operable mover 3 includes three different structural types, i.e., a spherical mover 3-1, a flat-plate mover 3-2, and a cylindrical mover 3-3, as shown in fig. 3, wherein the outer edge of the flat-plate mover 3-2 is rectangular, circular, or polygonal with more than four sides, and the cylindrical mover 3-3 is solid or hollow.

The second embodiment is as follows: this embodiment will be described in further detail with reference to fig. 2 of the specification. The present embodiment provides a specific embodiment of the bending piezoelectric finger included in the four-finger piezoelectric manipulator capable of operating the movers with different structures. The four bending piezoelectric fingers 2 are completely the same in structure type, size, excitation method and motion form. The following description will be made by taking the first bending piezoelectric finger 2-1 as an example:

the first curved piezoelectric finger 2-1 is constructed as shown in fig. 2 and includes three parts, an upper end 2-1-1, a piezoelectric element 2-1-2 and an actuator base 2-1-3. Wherein, the top end of the upper end part 2-1-1 is of an incomplete spherical structure; the piezoelectric unit 2-1-2 is integrally of a hollow cylindrical structure and is uniformly divided into four fan-shaped areas in the circumferential direction, namely a first fan-shaped area 2-1-2-1, a second fan-shaped area 2-1-2-2, a third fan-shaped area 2-1-2-3 and a fourth fan-shaped area 2-1-2-4; and conductive metal layers are arranged on the surfaces of the inner ring and the outer ring of the four segments. The conductive metal layers on the inner ring surfaces of the four sectors are mutually connected to be used as an electrode G, the conductive metal layers on the outer ring surfaces of the first sector 2-1-2-1 and the third sector 2-1-2-3 are mutually connected to be used as an electrode EA, the conductive metal layers on the outer ring surfaces of the second sector 2-1-2-2 and the fourth sector 2-1-2-4 are mutually connected to be used as an electrode EB, and the electrodes EA, EB and G are mutually disconnected. The four quadrants of the piezoelectric unit 2-1-2 are made of materials which have positive and inverse piezoelectric effects after polarization; the electric field polarization directions of the first quadrant 2-1-2-1 and the third quadrant 2-1-2-3 are opposite, and the electric field polarization directions of the second quadrant 2-1-2-2 and the fourth quadrant 2-1-2-4 are opposite. When an excitation voltage signal with a positive or negative amplitude value is applied between the electrodes EA and G, the piezoelectric unit 2-1-2 bends positively or negatively along the X axis; when another excitation voltage signal with a positive or negative amplitude is applied between the electrodes EB and G, the piezoelectric unit 2-1-2 bends positively or negatively along the Y-axis. In fact, the a-way excitation voltage signal mentioned in the embodiment of the present invention is applied between EA and G; b excitation voltage signals are applied between the EB electrode and the G electrode; the amplitude and the time sequence of the A path of excitation voltage signal and the B path of excitation voltage signal are controlled, so that the bending motion amplitude and the direction of the bending piezoelectric finger 2 can be controlled.

The second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 are the same as the first bending piezoelectric finger 2-1, and are not described herein again.

The third concrete implementation mode: this embodiment will be described in further detail with reference to fig. 4 to 9 and fig. 26 of the specification. The present embodiment provides a specific implementation of the above excitation method for four-finger piezoelectric manipulators capable of manipulating multiple rotors with different structures, and the method can excite four bending piezoelectric fingers, i.e. a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3, and a fourth bending piezoelectric finger 2-4, of the four-finger piezoelectric manipulators capable of manipulating multiple rotors with different structures to generate multiple bending motions, so as to manipulate the rotor 3 to realize linear or rotational motions; the coordinate system XYZ as mentioned below is: the system comprises a Cartesian rectangular coordinate system established by taking the symmetrical center of the distribution position of a bending piezoelectric finger 2 on a flat plate base 1 as an origin, wherein an X axis is parallel to a connecting line of fixed centers of a first bending piezoelectric finger 2-1 and a second bending piezoelectric finger 2-2 on the flat plate base 1, a Y axis is parallel to a connecting line of fixed centers of the first bending piezoelectric finger 2-1 and a fourth bending piezoelectric finger 2-4 on the flat plate base 1, and a Z axis is parallel to the axial direction of the bending piezoelectric finger 2.

The excitation method for realizing the bending motion of the four bending piezoelectric fingers is as follows:

as shown in fig. 4, the excitation method for realizing the forward bending motion of the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 to the X axis simultaneously is as follows: simultaneously applying the A path of positive excitation voltage signals to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4;

as shown in fig. 5, the excitation method for realizing the simultaneous negative bending motion of the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 to the X axis is realized: simultaneously applying the A-path negative excitation voltage signal to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4;

as shown in fig. 6, the excitation method for realizing the forward bending motion of the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 to the Y axis at the same time is as follows: simultaneously applying the B path of positive excitation voltage signals to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4;

as shown in fig. 7, the excitation method for realizing the simultaneous negative bending motion of the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 to the Y axis is realized: applying the B-path negative excitation voltage signal to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 at the same time;

as shown in fig. 8, the excitation method for realizing the counterclockwise bending motion of the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 along the tangent of the fixed center circumcircle on the flat substrate 1 at the same time is as follows: simultaneously applying the A path of negative-value excitation voltage signals and the B path of positive-value excitation voltage signals to a first bending piezoelectric finger 2-1, simultaneously applying the A path of negative-value excitation voltage signals and the B path of negative-value excitation voltage signals to a second bending piezoelectric finger 2-2, simultaneously applying the A path of positive-value excitation voltage signals and the B path of negative-value excitation voltage signals to a third bending piezoelectric finger 2-3, and simultaneously applying the A path of positive-value voltage and the B path of positive-value voltage to a fourth bending piezoelectric finger 2-4; the applying action of the excitation voltage signal is synchronously carried out;

as shown in fig. 9, an excitation method for realizing the clockwise bending motion of the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 along the tangent of the fixed center circumcircle on the flat substrate 1 at the same time is realized: simultaneously applying the A path of positive-value excitation voltage signals and the B path of negative-value excitation voltage signals to a first bending piezoelectric finger 2-1, simultaneously applying the A path of positive-value excitation voltage signals and the B path of positive-value excitation voltage signals to a second bending piezoelectric finger 2-2, simultaneously applying the A path of negative-value excitation voltage signals and the B path of positive-value excitation voltage signals to a third bending piezoelectric finger 2-3, and simultaneously applying the A path of negative-value voltage and the B path of negative-value voltage to a fourth bending piezoelectric finger 2-4; the applying action of the excitation voltage signal is synchronously carried out;

fig. 26 shows the driving voltage signals of the paths a and B, where fig. 26(a) is a schematic diagram of the positive driving voltage signals of the paths a and B, and fig. 26(B) is a schematic diagram of the negative driving voltage signals of the paths a and B.

The fourth concrete implementation mode: this embodiment will be further described with reference to fig. 10 to 15 in the specification. The embodiment provides a specific implementation scheme that a spherical mover 3-1 is operated by a four-finger pressure electric manipulator for operating movers with various different structures to realize three-degree-of-freedom rotary motion; the method comprises the following steps: relative to each otherIn a Cartesian rectangular coordinate system X established at the center of the sphere of the spherical mover 3-1 as shown in FIGS. 10 to 15₁Y₁Z₁The coordinate axes of the coordinate system are parallel to the coordinate system XYZ established on the base, the forward direction of the rotation motion around the coordinate axes is determined to be the anticlockwise direction according to the right-hand rule, and the spherical rotor 3-1 is controlled to respectively rotate around the X-axis by adopting the A-path excitation voltage signal and the B-path excitation voltage signal shown in figure 26₁、Y₁、Z₁Continuous rotational movement of the shaft in both the clockwise and counterclockwise directions; the coordinate system XYZ referred to here is: the system comprises a Cartesian rectangular coordinate system established by taking the symmetrical center of the distribution position of a bending piezoelectric finger 2 on a flat plate base 1 as an origin, wherein an X axis is parallel to a connecting line of fixed centers of a first bending piezoelectric finger 2-1 and a second bending piezoelectric finger 2-2 on the flat plate base 1, a Y axis is parallel to a connecting line of fixed centers of the first bending piezoelectric finger 2-1 and a fourth bending piezoelectric finger 2-4 on the flat plate base 1, and a Z axis is parallel to the axial direction of the bending piezoelectric finger 2.

The following are specifically mentioned: the following implementation steps include a description of the excitation voltage signal, and a brief description is made here on the correspondence relationship of the excitation voltage signal; the method comprises the following steps: the A-path and B-path positive excitation voltage signals with slowly rising amplitudes correspond to T in one period T shown in FIG. 26(a)₁A time period; the positive-value excitation voltage signals whose amplitudes decrease rapidly in the paths a and B correspond to T in one period T shown in fig. 26(a)₂A time period; the A-path and B-path slowly decreasing negative excitation voltage signals correspond to T in one period T shown in FIG. 26(B)₁A time period; the negative-value excitation voltage signals whose amplitudes of the A-path and the B-path rise rapidly correspond to T in one period T shown in FIG. 26(B)₂A time period; the above correspondence may be mentioned in whole or in part in the implementation steps described below.

As shown in FIG. 10, the ball-type mover 3-1 is wound around X₁The specific process of the continuous rotating motion of the shaft in the counterclockwise direction is as follows:

step one, applying the B-path positive excitation voltage signal with slowly rising amplitude to the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3,The fourth bending piezoelectric finger 2-4 is bent to generate slow bending deformation to the limit position along the positive direction of the Y axis at the same time, and the spherical rotor 3-1 is operated to wind the X by static friction force₁The shaft generates micro displacement in the counterclockwise direction;

step two, applying the B-path positive excitation voltage signal with the rapidly reduced amplitude to the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously, so that the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger can rapidly bend and deform to a zero bending position along the negative direction of the Y axis simultaneously, and the spherical rotor 3-1 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in the figure 26(a), and controlling the spherical rotor 3-1 to wind X₁The shaft continues to rotate counterclockwise.

As shown in FIG. 11, the ball-type mover 3-1 is wound around X₁The specific process of the continuous clockwise rotation motion of the shaft is as follows:

step one, a negative excitation voltage signal with a slowly decreasing B-path amplitude is simultaneously applied to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4, so that the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger can slowly bend and deform to limit positions along the negative direction of a Y axis at the same time, and the spherical rotor 3-1 is controlled to wind an X-axis-shaped rotor 3-1 through static friction force₁The shaft generates micro displacement clockwise;

step two, applying the B-path negative excitation voltage signal with the rapidly rising amplitude to the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to rapidly bend and deform to a zero bending position along the positive direction of the Y axis simultaneously, wherein the spherical rotor 3-1 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in the figure 26(b), and controlling the spherical rotor 3-1 to wind X₁The shaft continues to rotate clockwise.

As shown in FIG. 12, a ball-type mover 3-1 is operated to wind Y₁The specific process of the continuous rotating motion of the shaft in the counterclockwise direction is as follows:

step one, a negative value excitation voltage signal with a slowly-decreasing A path amplitude is simultaneously applied to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to slowly bend and deform to limit positions along the negative direction of an X axis at the same time, and a spherical rotor is controlled to wind a Y-shaped rotor through static friction force₁The shaft generates micro displacement in the counterclockwise direction;

step two, applying the negative excitation voltage signal with the path A of rapidly rising amplitude to the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 at the same time, so that the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger can rapidly bend and deform to a zero bending position along the positive direction of the X axis at the same time, and the spherical rotor 3-1 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in the figure 26(b), and operating the spherical rotor 3-1 to wind Y around the Y₁The shaft continues to rotate counterclockwise.

As shown in FIG. 13, the ball-type mover 3-1 is operated to wind Y₁The specific process of the continuous clockwise rotation motion of the shaft is as follows:

step one, applying A-path positive excitation voltage signals with slowly rising amplitudes to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 simultaneously to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to generate slow bending deformation to limit positions along the positive direction of an X axis simultaneously, and operating a spherical rotor to wind a Y-axis Y-₁The shaft generates micro displacement clockwise;

step two, applying the positive excitation voltage signals of which the A path amplitude value is rapidly reduced to the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 at the same time, so that the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger can rapidly bend and deform to a zero bending position along the negative direction of the X axis at the same time, and the spherical rotor 3-1 is kept static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in the figure 26(a), and operating the spherical rotor 3-1 to wind Y around the Y₁The shaft rotates clockwise continuouslyAnd (6) moving.

As shown in FIG. 14, a manipulation ball type mover 3-1 winds Z₁The specific process of the continuous rotating motion of the shaft in the counterclockwise direction is as follows:

step one, simultaneously applying the A path of negative-value excitation voltage signals with slowly-reduced amplitude and the B path of positive-value excitation voltage signals with slowly-increased amplitude to a first bending piezoelectric finger 2-1, simultaneously applying the A path of negative-value excitation voltage signals with slowly-reduced amplitude and the B path of negative-value excitation voltage signals with slowly-reduced amplitude to a second bending piezoelectric finger 2-2, simultaneously applying the A path of positive-value excitation voltage signals with slowly-increased amplitude and the B path of negative-value excitation voltage signals with slowly-reduced amplitude to a third bending piezoelectric finger 2-3, simultaneously applying the A path of positive-value excitation voltage signals with slowly-increased amplitude and the B path of positive-value excitation voltage signals with slowly-increased amplitude to a fourth bending piezoelectric finger 2-4, and synchronously applying the excitation voltage signals, wherein the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2 and the B path of positive-value excitation voltage signals are slowly-increased, The third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously generate slow bending deformation along the anticlockwise direction of the fixed center circumcircle tangent line of the third bending piezoelectric finger and the fourth bending piezoelectric finger on the flat plate base 1 to the limit position, and the spherical rotor 3-1 is operated to wind the Z direction by static friction force₁The shaft generates micro displacement in the counterclockwise direction;

step two, simultaneously applying the negative-value excitation voltage signal with the rapidly rising amplitude of the A path and the positive-value excitation voltage signal with the rapidly falling amplitude of the B path to the first bending piezoelectric finger 2-1, simultaneously applying the negative-value excitation voltage signal with the rapidly rising amplitude of the A path and the negative-value excitation voltage signal with the rapidly rising amplitude of the B path to the second bending piezoelectric finger 2-2, simultaneously applying the positive-value excitation voltage signal with the rapidly falling amplitude of the A path and the negative-value excitation voltage signal with the rapidly rising amplitude of the B path to the third bending piezoelectric finger 2-3, simultaneously applying the positive-value excitation voltage signal with the rapidly falling amplitude of the A path and the positive-value excitation voltage signal with the rapidly falling amplitude of the B path to the fourth bending piezoelectric finger 2-4, and applying the above excitation voltage signals are synchronously performed, wherein the first bending piezoelectric finger 2-1 and the second bending piezoelectric finger 2-2, The third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously generate rapid bending deformation along the fixed center circumcircle tangent line on the flat plate base 1 in the clockwise direction to a zero bending position, and the spherical rotor 3-1 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in FIG. 26, and controlling the spherical rotor 3-1 to wind Z around₁The shaft continues to rotate counterclockwise.

As shown in FIG. 15, a manipulation ball type mover 3-1 winds Z₁The specific process of the continuous clockwise rotation motion of the shaft is as follows:

step one, simultaneously applying the A path of positive-value excitation voltage signals with slowly rising amplitude values and the B path of negative-value excitation voltage signals with slowly falling amplitude values to a first bending piezoelectric finger 2-1, simultaneously applying the A path of positive-value excitation voltage signals with slowly rising amplitude values and the B path of positive-value excitation voltage signals with slowly rising amplitude values to a second bending piezoelectric finger 2-2, simultaneously applying the A path of negative-value excitation voltage signals with slowly falling amplitude values and the B path of positive-value excitation voltage signals with slowly rising amplitude values to a third bending piezoelectric finger 2-3, simultaneously applying the A path of negative-value excitation voltage signals with slowly falling amplitude values and the B path of negative-value excitation voltage signals with slowly falling amplitude values to a fourth bending piezoelectric finger 2-4, and synchronously applying the excitation voltage signals, wherein the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, The third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously generate slow bending deformation to the limit position along the clockwise direction of the fixed center circumcircle tangent line of the third bending piezoelectric finger and the fourth bending piezoelectric finger on the flat plate base 1, and the spherical rotor 3-1 is operated to wind the Z direction through static friction force₁The shaft generates micro displacement clockwise;

step two, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the first bending piezoelectric finger 2-1, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the second bending piezoelectric finger 2-2, simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the third bending piezoelectric finger 2-3, simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the fourth bending piezoelectric finger 2-4, wherein the application actions of the excitation voltage signals are synchronously carried out, and the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2 and the B path are applied, The third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously generate rapid bending deformation along the fixed center circumcircle tangent line on the flat plate base 1 in the anticlockwise direction to a zero bending position, and the spherical rotor 3-1 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in FIG. 26, and controlling the spherical rotor 3-1 to wind Z around₁The shaft continues to rotate clockwise.

The fifth concrete implementation mode: this embodiment will be further described with reference to fig. 16 to 20 and fig. 26 in the specification. The embodiment provides a specific embodiment that the four-finger pressure electric manipulator operation flat type rotor 3-2 of the operation multi-different structure rotors realizes two-degree-of-freedom linear motion and one-degree-of-freedom rotary motion; specifically, with respect to the cartesian rectangular coordinate system XYZ shown in fig. 16 to 20, according to the right-hand rule, the positive direction of the rotational motion around the coordinate axes is determined to be the counterclockwise direction, and the paths a and B of the excitation voltage signals shown in fig. 26 are used to respectively realize the continuous linear motion along the positive direction and the negative direction of the X axis, the positive direction and the negative direction of the Y axis, and the continuous rotational motion around the counterclockwise direction and the clockwise direction of the Z axis. The coordinate system XYZ referred to here is: the system comprises a Cartesian rectangular coordinate system established by taking the symmetrical center of the distribution position of a bending piezoelectric finger 2 on a flat plate base 1 as an origin, wherein an X axis is parallel to a connecting line of fixed centers of a first bending piezoelectric finger 2-1 and a second bending piezoelectric finger 2-2 on the flat plate base 1, a Y axis is parallel to a connecting line of fixed centers of the first bending piezoelectric finger 2-1 and a fourth bending piezoelectric finger 2-4 on the flat plate base 1, and a Z axis is parallel to the axial direction of the bending piezoelectric finger 2.

The following are specifically mentioned: the following implementation steps include a description of the excitation voltage signal, and a brief description is made here on the correspondence relationship of the excitation voltage signal; the method comprises the following steps: the amplitude of the A path and the B path rises slowlyCorresponds to T in one period T shown in fig. 26(a)₁A time period; the positive-value excitation voltage signals whose amplitudes decrease rapidly in the paths a and B correspond to T in one period T shown in fig. 26(a)₂A time period; the A-path and B-path slowly decreasing negative excitation voltage signals correspond to T in one period T shown in FIG. 26(B)₁A time period; the negative-value excitation voltage signals whose amplitudes of the A-path and the B-path rise rapidly correspond to T in one period T shown in FIG. 26(B)₂A time period; the above correspondence may be mentioned in whole or in part in the implementation steps described below.

As shown in fig. 16, the specific process of manipulating the flat plate type mover 3-2 to continuously linearly move in the X-axis forward direction is as follows:

step one, applying a path A of positive excitation voltage signals with slowly rising amplitude to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to generate slow bending deformation to limit positions along the positive direction of an X axis simultaneously, and operating a flat plate type mover 3-2 to generate micro displacement along the positive direction of the X axis through static friction force;

applying the positive excitation voltage signal with the rapidly reduced amplitude of the path A to the bending piezoelectric fingers 2-1, 2-2, 2-3 and 2-4 to enable the bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of an X axis at the same time, and keeping the flat plate type mover 3-2 static due to inertia;

and step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in the figure 26(a), and controlling the flat plate type mover 3-2 to continuously move linearly along the X axis in the positive direction.

As shown in fig. 17, the specific process of operating the flat plate type mover 3-2 to move continuously and linearly in the negative direction of the X-axis is as follows:

step one, applying a path A of negative excitation voltage signals with slowly-decreasing amplitude to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to slowly bend and deform to extreme positions along the negative direction of an X axis at the same time, and operating a flat plate type mover 3-2 to generate micro displacement along the negative direction of the X axis through static friction force;

applying the negative excitation voltage signal with the path A of rapidly rising amplitude to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to simultaneously generate rapid bending deformation along the positive direction of the X axis to a zero bending position, and keeping the flat plate type mover 3-2 static due to inertia;

and step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in the figure 26(b), and controlling the flat plate type mover 3-2 to continuously and linearly move along the negative direction of the X axis.

As shown in fig. 18, the specific process of manipulating the flat plate type mover 3-2 to continuously linearly move in the Y-axis forward direction is as follows:

step one, applying a positive excitation voltage signal of which the amplitude of a path B slowly rises to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to enable the positive excitation voltage signal to slowly bend and deform to an extreme position along the positive direction of a Y axis simultaneously, and operating a flat plate type mover 3-2 to generate micro displacement along the positive direction of the Y axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced B path amplitude to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to rapidly bend and deform to a zero bending position along the negative direction of the Y axis at the same time, and keeping the flat plate type rotor 3-2 static due to inertia;

and step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in the figure 26(a), and controlling the flat plate type mover 3-2 to continuously move linearly along the positive direction of the Y axis.

As shown in fig. 19, the specific process of operating the flat plate type mover 3-2 to move continuously and linearly in the negative Y-axis direction is as follows:

step one, applying a negative excitation voltage signal with a slowly decreasing B path amplitude to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to slowly bend and deform to extreme positions along the negative direction of a Y axis at the same time, and operating a flat plate type mover 3-2 to generate micro displacement along the negative direction of the Y axis through static friction force;

applying a negative excitation voltage signal with a rapidly rising B path amplitude to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to simultaneously generate rapid bending deformation along the positive direction of the Y axis to a zero bending position, wherein the flat plate type mover 3-2 is kept static due to inertia;

and step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in the figure 26(b), and controlling the flat plate type mover 3-2 to continuously and linearly move along the negative direction of the Y axis.

As shown in fig. 20, the specific process of operating the flat plate type mover 3-2 for continuous counterclockwise rotational movement about the Z-axis is as follows:

step one, simultaneously applying the A path of negative-value excitation voltage signals with slowly-reduced amplitude and the B path of positive-value excitation voltage signals with slowly-increased amplitude to a first bending piezoelectric finger 2-1, simultaneously applying the A path of negative-value excitation voltage signals with slowly-reduced amplitude and the B path of negative-value excitation voltage signals with slowly-reduced amplitude to a second bending piezoelectric finger 2-2, simultaneously applying the A path of positive-value excitation voltage signals with slowly-increased amplitude and the B path of negative-value excitation voltage signals with slowly-reduced amplitude to a third bending piezoelectric finger 2-3, simultaneously applying the A path of positive-value excitation voltage signals with slowly-increased amplitude and the B path of positive-value excitation voltage signals with slowly-increased amplitude to a fourth bending piezoelectric finger 2-4, and synchronously applying the excitation voltage signals, wherein the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2 and the B path of positive-value excitation voltage signals are slowly-increased, The third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously generate slow bending deformation along the counterclockwise direction of the fixed center circumcircle tangent line of the third bending piezoelectric finger and the fourth bending piezoelectric finger on the flat plate base 1 to the limit position, and the flat plate type mover 3-2 is operated by static friction force to generate micro displacement along the counterclockwise direction of the Z axis;

step two, simultaneously applying the negative-value excitation voltage signal with the rapidly rising amplitude of the A path and the positive-value excitation voltage signal with the rapidly falling amplitude of the B path to the first bending piezoelectric finger 2-1, simultaneously applying the negative-value excitation voltage signal with the rapidly rising amplitude of the A path and the negative-value excitation voltage signal with the rapidly rising amplitude of the B path to the second bending piezoelectric finger 2-2, simultaneously applying the positive-value excitation voltage signal with the rapidly falling amplitude of the A path and the negative-value excitation voltage signal with the rapidly rising amplitude of the B path to the third bending piezoelectric finger 2-3, simultaneously applying the positive-value excitation voltage signal with the rapidly falling amplitude of the A path and the positive-value excitation voltage signal with the rapidly falling amplitude of the B path to the fourth bending piezoelectric finger 2-4, and applying the above excitation voltage signals are synchronously performed, wherein the first bending piezoelectric finger 2-1 and the second bending piezoelectric finger 2-2, The third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously generate rapid bending deformation along the fixed center circumcircle tangent line on the flat plate base 1 in the clockwise direction to a zero bending position, and the flat plate type mover 3-2 keeps static due to inertia;

and step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in FIG. 26, and continuously rotating the controllable flat plate type mover 3-2 around the Z axis in the counterclockwise direction.

As shown in fig. 21, the specific process of operating the flat plate type mover 3-2 for continuous clockwise rotational motion about the Z-axis is as follows:

step one, simultaneously applying the A path of positive-value excitation voltage signals with slowly rising amplitude values and the B path of negative-value excitation voltage signals with slowly falling amplitude values to a first bending piezoelectric finger 2-1, simultaneously applying the A path of positive-value excitation voltage signals with slowly rising amplitude values and the B path of positive-value excitation voltage signals with slowly rising amplitude values to a second bending piezoelectric finger 2-2, simultaneously applying the A path of negative-value excitation voltage signals with slowly falling amplitude values and the B path of positive-value excitation voltage signals with slowly rising amplitude values to a third bending piezoelectric finger 2-3, simultaneously applying the A path of negative-value excitation voltage signals with slowly falling amplitude values and the B path of negative-value excitation voltage signals with slowly falling amplitude values to a fourth bending piezoelectric finger 2-4, and synchronously applying the excitation voltage signals, wherein the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, The third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously generate slow bending deformation to limit positions along the clockwise direction of the fixed center circumcircle tangent line of the third bending piezoelectric finger and the fourth bending piezoelectric finger on the flat plate base 1, and the flat plate type mover 3-2 is operated by static friction force to generate micro displacement in the clockwise direction around the Z axis;

step two, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the first bending piezoelectric finger 2-1, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the second bending piezoelectric finger 2-2, simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the third bending piezoelectric finger 2-3, simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the fourth bending piezoelectric finger 2-4, wherein the application actions of the excitation voltage signals are synchronously carried out, and the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2 and the B path are applied, The third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously generate rapid bending deformation along the fixed center circumcircle tangent line on the flat plate base 1 in the anticlockwise direction to a zero bending position, and the flat plate type mover 3-2 keeps static due to inertia;

and step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signals shown in FIG. 26, and continuously rotating the controllable flat plate type mover 3-2 around the Z axis in the clockwise direction.

The sixth specific implementation mode: this embodiment will be further described with reference to fig. 22 to 26 in the specification. The embodiment provides a specific embodiment that the four-finger pressure electric manipulator capable of operating the rotors with various different structures operates the cylindrical rotor 3-3 to realize linear motion with one degree of freedom and rotary motion with one degree of freedom; in particular to a Cartesian rectangular coordinate system X relative to the center established on the end face of a cylindrical rotor 3-3₂Y₂Z₂Coordinate axes of the coordinate system are respectively parallel to axes of a coordinate system XYZ established on the flat bed base 1, as shown in fig. 22 to 25; according to the right-hand rule, the forward direction of the rotation motion around the coordinate axis is determined to be the counterclockwise direction, and the A path excitation signal and the B path excitation signal shown in the figure 26 are adopted to realize the rotation motion along the Y direction₂Continuous linear movement of the axis in positive and negative directions, and about Y₂Continuous rotational movement of the shaft in the counter-clockwise and clockwise directions.The coordinate system XYZ referred to here is: the system comprises a Cartesian rectangular coordinate system established by taking the symmetrical center of the distribution position of a bending piezoelectric finger 2 on a flat plate base 1 as an origin, wherein an X axis is parallel to a connecting line of fixed centers of a first bending piezoelectric finger 2-1 and a second bending piezoelectric finger 2-2 on the flat plate base 1, a Y axis is parallel to a connecting line of fixed centers of the first bending piezoelectric finger 2-1 and a fourth bending piezoelectric finger 2-4 on the flat plate base 1, and a Z axis is parallel to the axial direction of the bending piezoelectric finger 2.

As shown in FIG. 22, the cylinder type mover 3-3 is operated along Y₂The specific process of the shaft forward continuous linear motion is as follows:

step one, applying a positive excitation voltage signal with a slowly rising B-path amplitude to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 at the same time to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to generate slow bending deformation to limit positions along the positive direction of a Y axis at the same time, and operating a cylindrical rotor 3-3 along the Y axis through static friction force₂The shaft generates tiny displacement in the positive direction;

step two, applying the B-path positive excitation voltage signal with the rapidly reduced amplitude to the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously, so that the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger can rapidly bend and deform to a zero bending position along the negative direction of the Y axis simultaneously, and the cylindrical rotor 3-3 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signal shown in FIG. 26(a), and operating the cylindrical mover 3-3 along Y₂The shaft moves straight forward continuously.

As shown in FIG. 23, the cylinder type mover 3-3 is operated along Y₂The specific process of the axial negative continuous linear motion is as follows:

step one, a negative excitation voltage signal with a slowly decreasing B path amplitude is simultaneously applied to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to slowly bend and deform to limit positions along the negative direction of a Y axis, and a cylindrical rotor 3-3 is operated along the Y axis through static friction force₂The negative axis direction generates micro displacement;

step two, applying the B-path negative excitation voltage signal with the rapidly rising amplitude to the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 simultaneously to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to rapidly bend and deform to a zero bending position along the positive direction of the Y axis simultaneously, wherein the cylindrical rotor 3-3 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signal shown in FIG. 26(b), and operating the cylindrical mover 3-3 along Y₂The negative axis continuously moves in a straight line.

As shown in FIG. 24, the cylinder type mover 3-3 is operated to wind Y₂The specific process of the continuous rotating motion of the shaft in the counterclockwise direction is as follows:

step one, a negative excitation voltage signal with a slowly decreasing amplitude of the A path is simultaneously applied to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4, so that the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger can slowly bend and deform to limit positions along the negative direction of an X axis at the same time, and a cylindrical rotor 3-3 is controlled to wind a Y-axis through static friction force₂The shaft generates micro displacement in the counterclockwise direction;

step two, applying the negative excitation voltage signal with the path A of rapidly rising amplitude to the first bending piezoelectric finger 2-1, the second bending piezoelectric finger 2-2, the third bending piezoelectric finger 2-3 and the fourth bending piezoelectric finger 2-4 at the same time, so that the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger can rapidly bend and deform to a zero bending position along the positive direction of the X axis at the same time, and the cylindrical rotor 3-3 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signal shown in FIG. 26(b), and operating the cylindrical mover 3-3 to wind Y around₂The shaft continues to rotate counterclockwise.

As shown in FIG. 25, the cylinder type mover 3-3 is operated to wind Y₂The specific process of the continuous clockwise rotation motion of the shaft is as follows:

step one, applying A-path positive excitation voltage signals with slowly rising amplitudes to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 at the same time to enable the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger to generate slow bending deformation to limit positions along the positive direction of an X axis at the same time, and operating a cylindrical rotor 3-3 to wind Y around through static friction force₂The shaft generates micro displacement clockwise;

step two, applying the A path of positive excitation voltage signals with rapidly reduced amplitude to a first bending piezoelectric finger 2-1, a second bending piezoelectric finger 2-2, a third bending piezoelectric finger 2-3 and a fourth bending piezoelectric finger 2-4 simultaneously, so that the first bending piezoelectric finger, the second bending piezoelectric finger, the third bending piezoelectric finger and the fourth bending piezoelectric finger can rapidly bend and deform to a zero bending position along the negative direction of an X axis simultaneously, and the cylindrical rotor 3-3 keeps static due to inertia;

step three, repeating the step one to the step two, namely, repeatedly applying a plurality of periods T of the excitation voltage signal shown in FIG. 26(a), and operating the cylindrical mover 3-3 to wind Y around₂The shaft rotates clockwise continuously;

the seventh embodiment: a-path excitation voltage signals and B-path excitation voltage signals for operating the spherical rotor 3-1, the flat-plate-type rotor 3-2 and the cylindrical rotor 3-3 are independent of each other and are asymmetric sawtooth waves or trapezoidal waves, a feasible excitation voltage signal scheme is shown in FIG. 26, FIG. 26(a) is a waveform schematic diagram of the amplitude of the A-path or B-path excitation voltage signals being a positive value, and FIG. 26(B) is a waveform schematic diagram of the amplitude of the A-path or B-path excitation voltage signals being a negative value; wherein, V_maxIs the maximum value of the amplitude of the excitation voltage signal, -V_maxIs the minimum of the amplitude of the excitation voltage signal; t is the period of the excitation voltage signal; t is t₁Representing the duration of a slow change in the amplitude of the excitation voltage signal within a period T, T₂It represents the time duration, T, during which the amplitude of the excitation voltage signal changes rapidly within a period T₁Is far greater than t₂And the sum of both equals the period T. In addition, the amplitude rising process and the amplitude falling process of the excitation voltage signal waveform may be linear or nonlinear.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims

1. A four-finger pressure electric manipulator excitation method capable of operating rotors with various different structures is characterized in that: a four-finger piezoelectric manipulator capable of manipulating rotors with various different structures comprises a flat plate base (1), four bending piezoelectric fingers (2) and a plurality of connecting screws (4), wherein the bending piezoelectric fingers (2) are divided into a first bending piezoelectric finger (2-1), a second bending piezoelectric finger (2-2), a third bending piezoelectric finger (2-3) and a fourth bending piezoelectric finger (2-4); the four bending piezoelectric fingers (2) are identical in structure, the first bending piezoelectric finger (2-1) comprises an upper end part (2-1-1), a piezoelectric unit (2-1-2) and an actuator base (2-1-3), and the top end of the upper end part (2-1-1) is of an incomplete spherical structure; the four bending piezoelectric fingers (2) are fixedly connected with the flat base (1) through connecting screws (4); the central connecting lines of the fixed positions of the four bending piezoelectric fingers (2) on the flat plate base (1) are square or circular; the upper end (2-1-1) of the first bending piezoelectric finger (2-1), the upper end (2-2-1) of the second bending piezoelectric finger (2-2), the upper end (2-3-1) of the third bending piezoelectric finger (2-3) and the upper end (2-4-1) of the fourth bending piezoelectric finger (2-4) are all in contact with the rotor (3), and the rotor (3) is supported and operated by the contact of the upper ends of the four bending piezoelectric fingers (2) and the rotor (3); the manipulated rotor (3) is a spherical rotor (3-1), a flat plate type rotor (3-2) or a cylindrical rotor (3-3), wherein the outer edge of the flat plate type rotor (3-2) is rectangular, circular or polygonal structure with more than four sides, and the cylindrical rotor (3-3) is solid or hollow;

establishing a Cartesian rectangular coordinate system XYZ by taking the symmetric center of the distribution positions of the four bending piezoelectric fingers (2) on the flat substrate (1) as an origin, wherein the X axis of the coordinate system is parallel to the connecting line of the fixed centers of the first bending piezoelectric finger (2-1) and the second bending piezoelectric finger (2-2) on the flat substrate (1), the Y axis is parallel to the connecting line of the fixed centers of the first bending piezoelectric finger (2-1) and the fourth bending piezoelectric finger (2-4) on the flat substrate (1), and the Z axis is parallel to the axial direction of the bending piezoelectric finger (2); the four bending piezoelectric fingers (2) realize bending motion in multiple directions under the excitation of A, B two-path voltage signals, and the method specifically comprises the following steps:

firstly, four bending piezoelectric fingers (2) are simultaneously bent towards the X axis in the positive direction: applying the A path of positive excitation voltage signals to four bending piezoelectric fingers (2) simultaneously;

secondly, four bending piezoelectric fingers (2) are bent towards the negative direction of the X axis at the same time: applying the A-path negative excitation voltage signal to four bending piezoelectric fingers (2) simultaneously;

thirdly, four bending piezoelectric fingers (2) are simultaneously bent towards the positive direction of the Y axis: applying the B path of positive excitation voltage signals to four bending piezoelectric fingers (2) simultaneously;

fourthly, the four bending piezoelectric fingers (2) are bent towards the negative direction of the Y axis at the same time: applying the B-path negative excitation voltage signal to four bending piezoelectric fingers (2) simultaneously;

fifthly, four bending piezoelectric fingers (2) are simultaneously bent along the counterclockwise direction of the tangent of the fixed center circumcircle on the flat plate base (1): simultaneously applying the A path of negative excitation voltage signals and the B path of positive excitation voltage signals to a first bending piezoelectric finger (2-1), simultaneously applying the A path of negative excitation voltage signals and the B path of negative excitation voltage signals to a second bending piezoelectric finger (2-2), simultaneously applying the A path of positive excitation voltage signals and the B path of negative excitation voltage signals to a third bending piezoelectric finger (2-3), simultaneously applying the A path of positive excitation voltage signals and the B path of positive excitation voltage signals to a fourth bending piezoelectric finger (2-4), and synchronously applying the excitation voltage signals;

sixthly, the four bending piezoelectric fingers (2) are simultaneously bent along the clockwise direction of the tangent of the fixed center circumcircle on the flat plate base (1): simultaneously applying the A path of positive-value excitation voltage signals and the B path of negative-value excitation voltage signals to a first bending piezoelectric finger (2-1), simultaneously applying the A path of positive-value excitation voltage signals and the B path of positive-value excitation voltage signals to a second bending piezoelectric finger (2-2), simultaneously applying the A path of negative-value excitation voltage signals and the B path of positive-value excitation voltage signals to a third bending piezoelectric finger (2-3), simultaneously applying the A path of negative-value excitation voltage and the B path of negative-value excitation voltage to a fourth bending piezoelectric finger (2-4), and synchronously applying the excitation voltage signals;

the method comprises the following steps of exciting bending motions of four bending piezoelectric fingers (2) in multiple directions by setting amplitudes and time sequences of A-path excitation voltage signals and B-path excitation voltage signals, and controlling a spherical mover (3-1), a flat-plate mover (3-2) and a cylindrical mover (3-3) by using friction force to realize linear or rotary motions with multiple degrees of freedom, and specifically comprises the following steps:

the specific process of operating the spherical rotor (3-1) to realize the rotary motion with three degrees of freedom is as follows: the three-degree-of-freedom rotary motion of the spherical rotor (3-1) refers to that relative to a Cartesian rectangular coordinate system X1Y1Z1 established in the center of the sphere of the spherical rotor (3-1), according to the right-hand rule, the forward direction of the rotary motion around the coordinate axis is the anticlockwise direction, and the spherical rotor (3-1) is operated to respectively realize the continuous rotary motion around the axes X1, Y1 and Z1 in the anticlockwise direction and the clockwise direction;

the specific process of the operation ball type rotor (3-1) rotating around the X1 axis in a counterclockwise direction continuously is as follows:

step one, applying a positive excitation voltage signal of which the amplitude of a path B slowly rises to four bent piezoelectric fingers, enabling the four bent piezoelectric fingers to generate slow bending deformation to an extreme position along the positive direction of a Y axis simultaneously, and operating a spherical rotor (3-1) to generate micro displacement along the counterclockwise direction of an X1 axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the Y axis, wherein the spherical rotor (3-1) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor (3-1) to continuously rotate around an X1 axis in the counterclockwise direction;

the specific process of the continuous clockwise rotary motion of the operating spherical rotor (3-1) around the X1 axis is as follows:

step one, applying a negative excitation voltage signal with a slowly decreasing amplitude of a path B to four bent piezoelectric fingers, enabling the four bent piezoelectric fingers to generate slow bending deformation to an extreme position along the negative direction of a Y axis at the same time, and operating a spherical rotor to generate micro displacement clockwise around an X1 axis through static friction force;

applying a negative excitation voltage signal with a rapidly rising B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the Y axis simultaneously, wherein the spherical rotor (3-1) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor (3-1) to continuously rotate around an X1 axis in the clockwise direction;

the specific process of the operation ball type rotor (3-1) rotating around the Y1 axis in a counterclockwise direction is as follows:

step one, applying a negative excitation voltage signal with a slowly decreasing amplitude of the path A to four bent piezoelectric fingers, enabling the four bent piezoelectric fingers to generate slow bending deformation to an extreme position along the negative direction of an X axis at the same time, and operating a spherical rotor (3-1) to generate micro displacement along the counterclockwise direction of a Y1 axis through static friction force;

applying a negative excitation voltage signal with a rapidly rising amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the X axis at the same time, wherein the spherical rotor (3-1) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor (3-1) to rotate around the Y1 axis in a counterclockwise direction continuously;

the specific process of the continuous clockwise rotary motion of the operating spherical rotor (3-1) around the Y1 axis is as follows:

step one, applying a positive excitation voltage signal of which the amplitude of the path A slowly rises to four bent piezoelectric fingers, enabling the four bent piezoelectric fingers to generate slow bending deformation to an extreme position along the positive direction of an X axis simultaneously, and operating a spherical rotor (3-1) to generate micro displacement clockwise around an Y1 axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the X axis at the same time, wherein the spherical rotor (3-1) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor (3-1) to continuously rotate around the Y1 axis in the clockwise direction;

the specific process of the continuous rotating motion of the operating spherical rotor (3-1) around the Z1 axis in the counterclockwise direction is as follows:

step one, a path of negative value excitation voltage signals with slowly-reduced amplitude and a path of positive value excitation voltage signals with slowly-increased amplitude are applied to a first bending piezoelectric finger (2-1), a path of negative value excitation voltage signals with slowly-reduced amplitude and a path of negative value excitation voltage signals with slowly-reduced amplitude are applied to a second bending piezoelectric finger (2-2), a path of positive value excitation voltage signals with slowly-increased amplitude and a path of negative value excitation voltage signals with slowly-reduced amplitude are applied to a third bending piezoelectric finger (2-3), a path of positive value excitation voltage signals with slowly-increased amplitude and a path of positive value excitation voltage signals with slowly-increased amplitude are applied to a fourth bending piezoelectric finger (2-4), the application actions of the excitation voltage signals are carried out synchronously, and the four bending piezoelectric fingers simultaneously generate counterclockwise direction along a tangent line of a fixed center circumscribed circle on a flat plate base (1) Slowly bending and deforming to a limit position, and operating the spherical rotor (3-1) by static friction force to generate micro displacement around a Z1 axis in the counterclockwise direction;

step two, simultaneously applying the negative excitation voltage signal with the quickly rising A path of amplitude and the positive excitation voltage signal with the quickly falling B path of amplitude to the first bending piezoelectric finger (2-1), simultaneously applying the negative excitation voltage signal with the quickly rising A path of amplitude and the negative excitation voltage signal with the quickly rising B path of amplitude to the second bending piezoelectric finger (2-2), simultaneously applying the positive excitation voltage signal with the quickly falling A path of amplitude and the negative excitation voltage signal with the quickly rising B path of amplitude to the third bending piezoelectric finger (2-3), simultaneously applying the positive excitation voltage signal with the quickly falling A path of amplitude and the positive excitation voltage signal with the quickly falling B path of amplitude to the fourth bending piezoelectric finger (2-4), wherein the application actions of the excitation voltage signals are carried out synchronously, and the four bending piezoelectric fingers simultaneously generate clockwise positive excitation voltage signals along the tangent direction of a fixed center circumcircle on the flat base (1) The spherical rotor (3-1) is rapidly bent and deformed to a zero bending position and keeps still due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor (3-1) to continuously rotate around the Z1 axis in the counterclockwise direction;

the specific process of the continuous clockwise rotary motion of the operating spherical rotor (3-1) around the Z1 axis is as follows:

step one, simultaneously applying the A path of positive excitation voltage signals with slowly rising amplitude values and the B path of negative excitation voltage signals with slowly falling amplitude values to a first bending piezoelectric finger (2-1), simultaneously applying the A path of positive excitation voltage signals with slowly rising amplitude values and the B path of positive excitation voltage signals with slowly rising amplitude values to a second bending piezoelectric finger (2-2), simultaneously applying the A path of negative excitation voltage signals with slowly falling amplitude values and the B path of positive excitation voltage signals with slowly rising amplitude values to a third bending piezoelectric finger (2-3), simultaneously applying the A path of negative excitation voltage signals with slowly falling amplitude values and the B path of negative excitation voltage signals with slowly falling amplitude values to a fourth bending piezoelectric finger (2-4), wherein the application actions of the excitation voltage signals are carried out synchronously, and the four bending piezoelectric fingers simultaneously generate clockwise negative excitation voltage signals along the tangent direction of a fixed center circumscribed circle on a flat plate base (1) Slowly bending and deforming to a limit position, and operating the spherical rotor (3-1) by static friction force to generate micro displacement clockwise around a Z1 axis;

step two, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the first bending piezoelectric finger (2-1), simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the second bending piezoelectric finger (2-2), simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the third bending piezoelectric finger (2-3), simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the fourth bending piezoelectric finger (2-4), wherein the application actions of the excitation voltage signals are carried out synchronously, and the four bending piezoelectric fingers simultaneously generate the counterclockwise direction along the tangent line of the fixed center circumscribe circle on the flat base (1) The spherical rotor (3-1) is rapidly bent and deformed to a zero bending position and keeps still due to inertia;

step three, repeating the step one to the step two, and operating the spherical rotor (3-1) to continuously rotate around the Z1 axis in the clockwise direction;

the specific process of operating the flat plate type mover (3-2) to realize linear motion with two degrees of freedom and rotary motion with one degree of freedom is as follows: the two-degree-of-freedom linear motion and one-degree-of-freedom rotary motion of the flat-plate type mover (3-2) are positive and negative continuous linear motions along an X axis and a Y axis and continuous rotary motions around a Z axis in a counterclockwise direction and a clockwise direction respectively relative to a Cartesian rectangular coordinate system XYZ;

the specific process of the operating flat plate type mover (3-2) to move continuously and linearly along the positive direction of the X axis is as follows:

step one, applying a positive excitation voltage signal with slowly rising amplitude of the path A to four bending piezoelectric fingers, enabling the four bending piezoelectric fingers to generate slow bending deformation to an extreme position along the positive direction of an X axis simultaneously, and operating a flat plate type mover (3-2) to generate micro displacement along the positive direction of the X axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the X axis at the same time, and keeping the flat plate type rotor (3-2) static due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor (3-2) to move linearly and continuously along the positive direction of the X axis;

the specific process of operating the flat plate type mover (3-2) to move along the negative direction of the X axis is as follows:

step one, applying a negative excitation voltage signal with a slowly-decreasing amplitude of the path A to four bending piezoelectric fingers, enabling the four bending piezoelectric fingers to generate slow bending deformation to limit positions along the negative direction of an X axis at the same time, and operating a flat plate type mover (3-2) to generate micro displacement along the negative direction of the X axis through static friction force;

applying the negative excitation voltage signal with the rapidly rising amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the X axis at the same time, and keeping the flat plate type rotor (3-2) static due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor (3-2) to continuously and linearly move along the negative direction of the X axis;

the specific process of operating the flat plate type mover (3-2) to move continuously and linearly along the positive direction of the Y axis is as follows:

step one, applying a positive excitation voltage signal of which the amplitude of a path B slowly rises to four bent piezoelectric fingers, enabling the four bent piezoelectric fingers to generate slow bending deformation to an extreme position along the positive direction of a Y axis simultaneously, and operating a flat plate type mover (3-2) to generate micro displacement along the positive direction of the Y axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the Y axis, wherein the flat plate type mover (3-2) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor (3-2) to continuously and linearly move along the positive direction of the Y axis;

the specific process of operating the flat plate type mover (3-2) to move along the negative direction of the Y axis is as follows:

step one, applying a negative excitation voltage signal with a slowly-decreasing B path amplitude to four bending piezoelectric fingers, enabling the four bending piezoelectric fingers to generate slow bending deformation to an extreme position along the negative direction of a Y axis at the same time, and operating a flat plate type mover (3-2) to generate micro displacement along the negative direction of the Y axis through static friction force;

applying a negative excitation voltage signal with a rapidly rising B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to generate rapid bending deformation to a zero bending position along the positive direction of the Y axis simultaneously, wherein the flat plate type rotor (3-2) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type mover (3-2) to continuously and linearly move along the negative direction of the Y axis;

the specific process of operating the plate type mover (3-2) to rotate around the Z axis anticlockwise continuously is as follows:

step one, a path of negative value excitation voltage signals with slowly-reduced amplitude and a path of positive value excitation voltage signals with slowly-increased amplitude are applied to a first bending piezoelectric finger (2-1), a path of negative value excitation voltage signals with slowly-reduced amplitude and a path of negative value excitation voltage signals with slowly-reduced amplitude are applied to a second bending piezoelectric finger (2-2), a path of positive value excitation voltage signals with slowly-increased amplitude and a path of negative value excitation voltage signals with slowly-reduced amplitude are applied to a third bending piezoelectric finger (2-3), a path of positive value excitation voltage signals with slowly-increased amplitude and a path of positive value excitation voltage signals with slowly-increased amplitude are applied to a fourth bending piezoelectric finger (2-4), the application actions of the excitation voltage signals are carried out synchronously, and the four bending piezoelectric fingers simultaneously generate counterclockwise direction along a tangent line of a fixed center circumscribed circle on a flat plate base (1) Slowly bending and deforming to a limit position, and operating the flat plate type mover (3-2) to generate micro displacement along the anticlockwise direction of a Z axis through static friction force;

step two, simultaneously applying the negative excitation voltage signal with the quickly rising A path of amplitude and the positive excitation voltage signal with the quickly falling B path of amplitude to the first bending piezoelectric finger (2-1), simultaneously applying the negative excitation voltage signal with the quickly rising A path of amplitude and the negative excitation voltage signal with the quickly rising B path of amplitude to the second bending piezoelectric finger (2-2), simultaneously applying the positive excitation voltage signal with the quickly falling A path of amplitude and the negative excitation voltage signal with the quickly rising B path of amplitude to the third bending piezoelectric finger (2-3), simultaneously applying the positive excitation voltage signal with the quickly falling A path of amplitude and the positive excitation voltage signal with the quickly falling B path of amplitude to the fourth bending piezoelectric finger (2-4), wherein the application actions of the excitation voltage signals are carried out synchronously, and the four bending piezoelectric fingers simultaneously generate clockwise positive excitation voltage signals along the tangent direction of a fixed center circumcircle on the flat base (1) The flat-plate type rotor (3-2) is rapidly bent and deformed to a zero bending position and is kept still due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor (3-2) to rotate around the Z axis in a counterclockwise direction continuously;

the specific process of operating the plate type mover (3-2) to rotate continuously around the Z axis in the clockwise direction is as follows:

step one, simultaneously applying the A path of positive excitation voltage signals with slowly rising amplitude values and the B path of negative excitation voltage signals with slowly falling amplitude values to a first bending piezoelectric finger (2-1), simultaneously applying the A path of positive excitation voltage signals with slowly rising amplitude values and the B path of positive excitation voltage signals with slowly rising amplitude values to a second bending piezoelectric finger (2-2), simultaneously applying the A path of negative excitation voltage signals with slowly falling amplitude values and the B path of positive excitation voltage signals with slowly rising amplitude values to a third bending piezoelectric finger (2-3), simultaneously applying the A path of negative excitation voltage signals with slowly falling amplitude values and the B path of negative excitation voltage signals with slowly falling amplitude values to a fourth bending piezoelectric finger (2-4), wherein the application actions of the excitation voltage signals are carried out synchronously, and the four bending piezoelectric fingers simultaneously generate clockwise negative excitation voltage signals along the tangent direction of a fixed center circumscribed circle on a flat plate base (1) Slowly bending and deforming to a limit position, and operating the flat plate type mover (3-2) to generate micro displacement around a Z axis in a clockwise direction through static friction force;

step two, simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the first bending piezoelectric finger (2-1), simultaneously applying the positive excitation voltage signal with the rapidly reduced amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the second bending piezoelectric finger (2-2), simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the positive excitation voltage signal with the rapidly reduced amplitude of the B path to the third bending piezoelectric finger (2-3), simultaneously applying the negative excitation voltage signal with the rapidly increased amplitude of the A path and the negative excitation voltage signal with the rapidly increased amplitude of the B path to the fourth bending piezoelectric finger (2-4), wherein the application actions of the excitation voltage signals are carried out synchronously, and the four bending piezoelectric fingers simultaneously generate the counterclockwise direction along the tangent line of the fixed center circumscribe circle on the flat base (1) The flat-plate type rotor (3-2) is rapidly bent and deformed to a zero bending position and is kept still due to inertia;

step three, repeating the step one to the step two, and operating the flat plate type rotor (3-2) to continuously rotate around the Z axis in the clockwise direction;

the specific process of operating the cylindrical rotor (3-3) to realize one-degree-of-freedom linear motion and one-degree-of-freedom rotary motion is as follows: one degree of freedom linear motion and one degree of freedom rotary motion of the cylindrical mover (3-3) refer to that relative to a Cartesian rectangular coordinate system X2Y2Z2 established at the center of the end face of the cylindrical mover (3-3), according to the right-hand rule, the positive direction of the rotary motion around the coordinate axis is taken as the anticlockwise direction, and the cylindrical mover (3-3) is operated to perform continuous linear motion along the positive direction and the negative direction of the Y2 shaft and perform continuous rotary motion along the anticlockwise direction and the clockwise direction of the Y2 shaft;

the concrete process of operating the cylindrical rotor (3-3) to move forward and continuously linearly along the Y2 axis is as follows:

step one, applying a positive excitation voltage signal of which the amplitude of a path B slowly rises to four bent piezoelectric fingers to enable the four bent piezoelectric fingers to slowly bend and deform to an extreme position along the positive direction of a Y axis simultaneously, and operating a cylindrical rotor (3-3) to generate micro displacement along the positive direction of a Y2 axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the Y axis, wherein the cylindrical rotor (3-3) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the cylindrical rotor (3-3) to continuously and linearly move along the positive direction of the Y2 shaft;

the specific process of operating the cylindrical rotor (3-3) to move continuously and linearly along the negative direction of the Y2 axis is as follows:

step one, applying a negative excitation voltage signal with a slowly decreasing B path amplitude to four bent piezoelectric fingers to enable the four bent piezoelectric fingers to generate slow bending deformation to an extreme position along the negative direction of a Y axis at the same time, and operating a cylindrical rotor (3-3) to generate micro displacement along the negative direction of the Y2 axis through static friction force;

applying a negative excitation voltage signal with a rapidly rising B path amplitude to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the Y axis at the same time, wherein the cylindrical rotor (3-3) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the cylindrical rotor (3-3) to continuously and linearly move along the negative direction of the Y2 axis;

the concrete process of operating the cylinder type mover (3-3) to rotate around the Y2 axis continuously in the anticlockwise direction is as follows:

firstly, applying a negative excitation voltage signal with a slowly-decreasing amplitude of the path A to four bent piezoelectric fingers, enabling the four bent piezoelectric fingers to generate slow bending deformation to an extreme position along the negative direction of an X axis at the same time, and operating a cylindrical rotor (3-3) to generate micro displacement along the counterclockwise direction of a Y2 axis through static friction force;

applying a negative excitation voltage signal with a rapidly rising amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the positive direction of the X axis at the same time, wherein the cylindrical rotor (3-3) keeps static due to inertia;

step three, repeating the step one to the step two, and operating the cylindrical rotor (3-3) to rotate around the Y2 shaft in a counterclockwise direction continuously;

the concrete process of operating the solid cylindrical rotor (3-3) to rotate continuously around the Y2 axis in the clockwise direction is as follows:

step one, applying a positive excitation voltage signal of which the amplitude of the path A slowly rises to four bent piezoelectric fingers to enable the four bent piezoelectric fingers to generate slow bending deformation to an extreme position along the positive direction of an X axis simultaneously, and operating a cylindrical rotor (3-3) to generate micro displacement clockwise around an Y2 axis through static friction force;

applying a positive excitation voltage signal with a rapidly reduced amplitude of the path A to the four bending piezoelectric fingers to enable the four bending piezoelectric fingers to rapidly bend and deform to a zero bending position along the negative direction of the X axis at the same time, wherein the cylindrical rotor (3-3) keeps static due to inertia;

and step three, repeating the step one to the step two, and operating the cylindrical rotor (3-3) to continuously rotate around the Y2 axis in the clockwise direction.

2. The method of claim 1, wherein said method comprises: the four bending piezoelectric fingers (2) are identical in size.

3. The method of claim 1, wherein said method comprises: the A, B two paths of excitation voltage signals are independent from each other and are asymmetric sawtooth waves or asymmetric trapezoidal waves, and the rising and falling processes of the waveform are linear or nonlinear.