CN105099063A - Driving device capable of rotary and linear two-degree-of-freedom running - Google Patents

Driving device capable of rotary and linear two-degree-of-freedom running Download PDF

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Publication number
CN105099063A
CN105099063A CN201510527758.5A CN201510527758A CN105099063A CN 105099063 A CN105099063 A CN 105099063A CN 201510527758 A CN201510527758 A CN 201510527758A CN 105099063 A CN105099063 A CN 105099063A
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CN
China
Prior art keywords
linear
permanent magnet
stator core
magnetostrictive
coil
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510527758.5A
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Chinese (zh)
Inventor
雷美珍
王立强
夏永明
丁海波
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Priority to CN201510527758.5A priority Critical patent/CN105099063A/en
Publication of CN105099063A publication Critical patent/CN105099063A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a driving device capable of rotary and linear two-degree-of-freedom running, comprising a rotating motor, a rotating spindle, a bracket, a linear shaft, a stator core, a permanent magnet, a linear motor coil, a magnetostrictive material, a magnetostrictive coil, and an excitation permanent magnet. The rotating motor is connected with the linear shaft through the rotating spindle. The linear shaft is supported on the bracket through a linear rotating bearing. The stator core is fixedly held on the bracket which sleeves the linear shaft. The linear motor coil is installed inside the stator core. The permanent magnet is fixedly held on the linear shaft, and the permanent magnet and the stator core are arranged oppositely. The magnetostrictive material abuts on the linear shaft. The magnetostrictive coil is embedded into the stator core. The excitation permanent magnet is arranged between the magnetostrictive material and the magnetostrictive coil. The driving device can achieve rotary and linear two-degree-of-freedom running, is designed in an integrated manner, has two driving modes (macro and micro), and is compact in structure and low in energy consumption.

Description

A kind of drive unit that can carry out rotating and straight line two degrees of freedom is run
[technical field]
The present invention relates to a kind of drive unit, be specifically related to a kind of drive unit that can carry out rotating and straight line two degrees of freedom is run, belong to hi-Fix equipment technical field.
[background technology]
Micro-structure surface refers to that surface figure accuracy can reach submicron order, surface roughness can reach nanoscale, the surface of (as optical property, adhesiveness, frictional property, lubrification, mar proof etc.) the small topology that has specific function, is widely used in the fields such as Fresnel lens, harddisk surface, MEMS, cell culture system, endoscope and heat exchanging fin.3D micro-structure surface processing request driver can meet the requirement of rotation-straight line two degrees of freedom, Long Distances and high position precision simultaneously.Therefore, the research of high-grade drives device becomes a very important research direction of 3D micro-structure surface process technology.
At present, existing Driving technique comprises conventional motors Driving technique, Piezoelectric Ceramic technology and ultra-magnetic telescopic Driving technique.The structure that conventional motors Driving technique adopts linear electric motors and rotary main shaft unit to stack realizes rotation-straight line two degree-of-freedom motion.This method output displacement is comparatively large, but due to mover quality large, have when processed complex 3D micro-structure surface that positioning precision is low, movement velocity slow, microminiaturized difficulty, noise is large and drive efficiency is a lower problem.
Along with the development of intellectual material Driving technique, the fast tool servo feed mechanism (FastToolServo is called for short FTS) driven based on piezoelectric ceramic (PZT) is adopted to carry out cut to micro-structure surface.This method has the features such as the high and compact conformation of fast response time, positioning precision.Not enough place is that delivery stroke is little, can not bear larger tangential load power and pulling force, and driving voltage is higher, is not suitable for being applied in the higher environment of requirement of explosion proof.
Giant magnetostrictive actuator (GMA), by applying magnetic field, utilizes magnetic effect to realize Micro-displacement Driving.Up-to-date giant magnetostrictive material iron gallium alloy (Galfenol), have intensity high, can weld and machinable advantage, larger load tangential force or even pulling force can be born.In addition, super-magnetostrictive drive has higher magnetostrictive strain, lower driving voltage, wide operating temperature range and without the need to advantages such as electrode noncontact drivings.Giant magnetostrictive actuator (GMA) has been applied in the rotation-linear drives platform of milling process.This driving platform adopts Terfenol-D giant magnetostrictive material, GMA is directly installed on rotary main shaft, Control Shaft is carried out to telescopic displacement by coil current, the magnetic that regulating winding electric current changes in magnetostrictive material is close, can realize rotation-straight line two degree-of-freedom motion and the adjustment of axial micrometric displacement of machining shaft.This type of drive is applied to micro-structure surface and adds man-hour, still has the following disadvantages: 1. cannot realize Long Distances; 2. efficiency is lower.Driver adopts coil magnetization, because Terfenol-D magnetic permeability is usually lower, this just needs more number of ampere turns to drive, and in coil, electric current can produce thermal losses, causes temperature rise, affect drive performance, in addition, under maintenance micrometric displacement output state, there is not mechanical output and export, the electric energy great majority that driver absorbs consume on the resistance of coil, and drive efficiency is very low; 3. Terfenol-D needs pre-compressing device, not easily microminiaturized.
Therefore, for solving the problems of the technologies described above, the necessary drive unit that can carry out rotating and straight line two degrees of freedom is run providing a kind of innovation, to overcome described defect of the prior art.
[summary of the invention]
For solving the problems of the technologies described above, the object of the invention is to a kind of compact conformation, having grand micro-two-stage drive form, adopt permanent magnet to be intellectual material excitation, what energy consumption was little can carry out rotates and the drive unit of straight line two degrees of freedom operation.
For achieving the above object, the technical scheme that the present invention takes is: a kind of drive unit that can carry out rotating and straight line two degrees of freedom is run, and it comprises electric rotating machine, rotary main shaft, support, linear axis, stator core, permanent magnet, linear motor coil, magnetostrictive material, magnetostrictive coil and excitation permanent magnet; Wherein, described electric rotating machine is connected with linear axis by rotary main shaft; Described linear axis is held by Linear rotary shaft and is supported on support; Described stator core is immobilizated on support, and it is set on linear axis; Described linear motor coil is installed in stator core; Described permanent magnet is immobilizated on linear axis, and itself and stator core are oppositely arranged; Described magnetostrictive material are connected on linear axis; Described magnetostrictive coil is embedded in stator core; Described excitation permanent magnet is arranged between magnetostrictive material and magnetostrictive coil.
The drive unit that can carry out rotating and straight line two degrees of freedom is run of the present invention is set to further: described magnetostrictive material are iron gallium alloy.
The drive unit that can carry out rotating and straight line two degrees of freedom is run of the present invention is also set to: the axial charging of described permanent magnet.
Compared with prior art, the present invention has following beneficial effect:
(1) the present invention adopts rotation-straight line two degree-of-freedom motion integrated design, compact conformation, independent rotary motion, rectilinear motion or screw can be realized, overcome traditional stacked structure mover quality large, slow and the problem that positioning precision is low of movement velocity, is conducive to the machining accuracy improving complicate three dimension microstructure surface;
(2) the present invention adopts grand micro-two-stage drive form, has the advantage that grand driving stroke range is large and micro-move device positioning precision is high concurrently.Grand driving directly adopts permanent-magnetism linear motor to drive, and eliminates intermediate mechanical transmission, reduces driving error, higher velocity and acceleration can be obtained, trajectory error is little, can obtain good positioning precision at high speeds, is conducive to the processing problems solving amplitude micro-structure surface;
(3) Micro-displacement Driving of the present invention has the very high linearity, by excitation mechanism design cleverly, iron gallium alloy Galfenol is made to be operated in the range of linearity, the displacement linearity exported than exclterless structure type of drive is higher, and this excitation mechanical mechanism ensures that excitation field remains unchanged when main shaft does axially macroscopical Large travel range motion;
(4) the present invention adopts the iron gallium alloy Galfenol of stress anneal, and without the need to precompression clamping device, be more easy to microminiaturized, and Galfenol operating temperature range is wider, parameter temperature influence is less, is conducive to stable operation and the precise hard_drawn tuhes of driver.
[accompanying drawing explanation]
Fig. 1 is the profile that can carry out the drive unit of rotation and the operation of straight line two degrees of freedom of the present invention.
Fig. 2 is the profile after the drive unit that can carry out rotating and straight line two degrees of freedom is run of the present invention moves linearly.
[embodiment]
Refer to shown in Figure of description 1 and accompanying drawing 2, the present invention is a kind of drive unit that can carry out rotating and straight line two degrees of freedom is run, and it is made up of a few parts such as electric rotating machine 1, rotary main shaft 2, support 3, linear axis 4, stator core 5, permanent magnet 6, linear motor coil 7, magnetostrictive material 8, magnetostrictive coil 9 and excitation permanent magnets 10.
Wherein, described electric rotating machine 1 is connected with linear axis 4 by rotary main shaft 2, makes electric rotating machine 1 that linear axis 4 can be driven to rotate.
Described linear axis 4 holds 11 by Linear rotary shaft and is supported on support 3, and it can linearly move left and right by swivel bearing 10.
Described stator core 5 is immobilizated on support 3, and it is set on linear axis 4.Described linear motor coil 7 is installed in stator core 5.
Described permanent magnet 6 is immobilizated on linear axis 4, and itself and stator core 5 are oppositely arranged.The axial charging of described permanent magnet 6.
Described magnetostrictive material 8 are connected on linear axis 4, and it can drive linear axis 4 to carry out micrometric displacement.In the present embodiment, described magnetostrictive material 8 are iron gallium alloy.Described magnetostrictive coil 9 is embedded in stator core 5.Described excitation permanent magnet 10 is arranged between magnetostrictive material 8 and magnetostrictive coil 9.
The operation principle of drive unit carrying out rotating and straight line two degrees of freedom is run of the present invention is as follows: after electric rotating machine 1 energising, rotary main shaft 2 produces rotary motion; The magnetic field produced after linear motor coil 7 is energized, the axle magnetic field interaction of magnetic field permeates stator core 5 and permanent magnet 3, thus drive linear axis 4 to produce Long Distances rectilinear motion; After magnetostrictive coil 9 is energized, change the excitation field of excitation permanent magnet 10, change magnetostrictive material 8 telescopic displacement further, and then make linear axis 4 produce micrometric displacement rectilinear motion.And whole rotational motion to linear motion holds 11 supportings by Linear rotary shaft, can realize the binary motion of rotation-straight line, straight-line displacement simultaneously can accomplish Long Distances micrometric displacement.
Above embodiment is only the preferred embodiment of this creation, and not in order to limit this creation, any amendment made within all spirit in this creation and principle, equivalent replacement, improvement etc., within the protection range that all should be included in this creation.

Claims (3)

1. can carry out the drive unit rotated and straight line two degrees of freedom is run, it is characterized in that: comprise electric rotating machine, rotary main shaft, support, linear axis, stator core, permanent magnet, linear motor coil, magnetostrictive material, magnetostrictive coil and excitation permanent magnet; Wherein, described electric rotating machine is connected with linear axis by rotary main shaft; Described linear axis is held by Linear rotary shaft and is supported on support; Described stator core is immobilizated on support, and it is set on linear axis; Described linear motor coil is installed in stator core; Described permanent magnet is immobilizated on linear axis, and itself and stator core are oppositely arranged; Described magnetostrictive material are connected on linear axis; Described magnetostrictive coil is embedded in stator core; Described excitation permanent magnet is arranged between magnetostrictive material and magnetostrictive coil.
2. can carry out the drive unit rotated and straight line two degrees of freedom is run as claimed in claim 1, it is characterized in that: described magnetostrictive material are iron gallium alloy.
3. can carry out the drive unit rotated and straight line two degrees of freedom is run as claimed in claim 1, it is characterized in that: the axial charging of described permanent magnet.
CN201510527758.5A 2015-08-26 2015-08-26 Driving device capable of rotary and linear two-degree-of-freedom running Pending CN105099063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510527758.5A CN105099063A (en) 2015-08-26 2015-08-26 Driving device capable of rotary and linear two-degree-of-freedom running

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Application Number Priority Date Filing Date Title
CN201510527758.5A CN105099063A (en) 2015-08-26 2015-08-26 Driving device capable of rotary and linear two-degree-of-freedom running

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110143437A (en) * 2019-06-04 2019-08-20 恒钛(天津)机械制造有限公司 A kind of device using permanent magnet haul
CN110190793A (en) * 2019-05-31 2019-08-30 东南大学 A kind of two degrees of freedom numerically-controlled machine tool and its control system and localization method
CN111571280A (en) * 2020-04-28 2020-08-25 南京理工大学 Novel hybrid drive triaxial quick cutter servo device
CN113258825A (en) * 2021-05-31 2021-08-13 吉林大学 Piezoelectric driver based on stick-slip and impact principle coupling and control method thereof

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CN1312135A (en) * 2000-03-07 2001-09-12 松下电器产业株式会社 Liquid discharging apparatus and liquid discharging method
DE102007035346A1 (en) * 2007-07-27 2009-01-29 Feinmess Dresden Gmbh Positioning system for a micro stage
CN202690598U (en) * 2012-06-28 2013-01-23 浙江大学 Electro-hydraulic vibration exciter
CN102983778A (en) * 2012-11-07 2013-03-20 上海交通大学 Electric rotating machine based on super magnetostriction material
RO129045A2 (en) * 2012-03-29 2013-11-29 Universitatea "Ştefan Cel Mare" Din Suceava Mono-phase magnetostrictive micromotor
CN103904936A (en) * 2014-04-14 2014-07-02 浙江理工大学 Linear motor capable of being controlled at three levels on basis of iron and gallium alloy and application method of linear motor
CN204886524U (en) * 2015-08-26 2015-12-16 浙江理工大学 Can rotate drive arrangement with operation of sharp two -degree -of -freedom

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1312135A (en) * 2000-03-07 2001-09-12 松下电器产业株式会社 Liquid discharging apparatus and liquid discharging method
DE102007035346A1 (en) * 2007-07-27 2009-01-29 Feinmess Dresden Gmbh Positioning system for a micro stage
RO129045A2 (en) * 2012-03-29 2013-11-29 Universitatea "Ştefan Cel Mare" Din Suceava Mono-phase magnetostrictive micromotor
CN202690598U (en) * 2012-06-28 2013-01-23 浙江大学 Electro-hydraulic vibration exciter
CN102983778A (en) * 2012-11-07 2013-03-20 上海交通大学 Electric rotating machine based on super magnetostriction material
CN103904936A (en) * 2014-04-14 2014-07-02 浙江理工大学 Linear motor capable of being controlled at three levels on basis of iron and gallium alloy and application method of linear motor
CN204886524U (en) * 2015-08-26 2015-12-16 浙江理工大学 Can rotate drive arrangement with operation of sharp two -degree -of -freedom

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110190793A (en) * 2019-05-31 2019-08-30 东南大学 A kind of two degrees of freedom numerically-controlled machine tool and its control system and localization method
CN110143437A (en) * 2019-06-04 2019-08-20 恒钛(天津)机械制造有限公司 A kind of device using permanent magnet haul
CN111571280A (en) * 2020-04-28 2020-08-25 南京理工大学 Novel hybrid drive triaxial quick cutter servo device
CN111571280B (en) * 2020-04-28 2022-04-19 南京理工大学 Novel hybrid drive triaxial quick cutter servo device
CN113258825A (en) * 2021-05-31 2021-08-13 吉林大学 Piezoelectric driver based on stick-slip and impact principle coupling and control method thereof

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Application publication date: 20151125