CN207677650U - Double driving precision rotation driving devices of piezoelectric stack - Google Patents

Double driving precision rotation driving devices of piezoelectric stack Download PDF

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Publication number
CN207677650U
CN207677650U CN201721672125.4U CN201721672125U CN207677650U CN 207677650 U CN207677650 U CN 207677650U CN 201721672125 U CN201721672125 U CN 201721672125U CN 207677650 U CN207677650 U CN 207677650U
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driving
hinge
bearing
table top
rotary table
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赵宏伟
秦峰
程廷海
王岩
祖新宇
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Jilin University
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Jilin University
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Abstract

The utility model is related to a kind of double driving precision rotation driving devices of piezoelectric stack, belong to precision engineering technical field.Including units such as support base, rotary table top, stator module and bearings, support base is connect with rotary table top by bearing fit, support base is bolted with stator module, with stator module by driving sufficient front end to be engaged, bearing is interference fitted rotary table top with support base and rotary table top.When excitation electric signal, which acts on, stacks type piezoelectric element, it stacks type piezoelectric element and is based on inverse piezoelectric effect generation axial elongation, driving is set to generate tangential displacement enough, rotary table top is driven to generate rotary motion, by change driving voltage direction and sequential, can control rotary table top forward and reverse and position it is static.The utility model has that simple in structure, positioning accuracy is high, stroke is big and many technical advantages such as fast response time, has wide practical use in precision engineering technical field.

Description

Double driving precision rotation driving devices of piezoelectric stack
Technical field
The utility model is related to precision engineering technical field, more particularly to a kind of driving precision rotation of double piezoelectric stacks drives Dynamic device.
Background technology
In recent years, with the development of science and technology, nanometer technique is in life science, microelectronics, optics, ultraprecise machine It is occupied in the ambits such as tool and its manufacture, accurate measurement, medical and health, semiconductor, biochemistry, data storage increasingly heavier The status wanted.It is high-new that micro mechanical technology, micro-nano measuring technique, the positioning of micro/nano level and actuation techniques have become the world today The hot topic of technical field.The different novel driving device quilt with precision actuation, accurate measurement and precision positioning function of form It develops and comes out successively.Often there are the disadvantages such as structure size is bigger than normal, positioning accuracy is low in existing driving device;Although wherein There are also driver outputs to stablize, precision is high, but stroke is small, seriously limits the range of its application;And piezoceramic material It is high, small with frequency response, displacement resolution is high, fever less, noiseless, High power output, conversion efficiency be high, driving force Greatly, driving power is low, working frequency is wide, not by electromagnetic interference many advantages, such as, therefore in recent years thus class component as accurate The micro/nano level precision driver of driving increasingly attracts attention.
Invention content
The purpose of this utility model is to provide a kind of double driving precision rotation driving devices of piezoelectric stack, solve existing Structure size existing for some driving devices is bigger than normal, positioning accuracy is low and the technical problems such as stroke is small.
The above-mentioned purpose of the utility model is achieved through the following technical solutions:
Double driving precision rotation driving devices of piezoelectric stack, including support base 1, rotary table top 2,3 and of stator module Bearing 4;The support base 1 is connected by bearing 4 and rotary table top 2;The support base 1 fixes spiral shell by stator Nail 3-3 is fastenedly connected with stator module 3;The support base 1 is interference fitted with bearing 4;The rotary table top 2 passes through driving Sufficient 3-1-1-1 is engaged with stator module 3;The rotary table top 2 is interference fitted with bearing 4.
The support base 1 includes stator supporting table 1-1 and bearing support column 1-2, the upper surface of the support base 1 Middle part is provided with stator supporting table 1-1;It is uniformly provided with N number of stator fixing screwed hole 1-1-1 on the stator supporting table 1-1, Middle N is the positive integer more than or equal to 1;The upper surface middle part of the support base 1 is provided with bearing support column 1-2;The bearing The upper end of support column 1-2 is provided with bearing mounting post 1-2-1;The top of the bearing support column 1-2 is provided with shaft shoulder 1-2-2.
The rotary table top 2 includes internal thread hole 2-1, turntable side wall 2-2 and bearing mounting base 2-3;The rotation 2 upper surface of table top is provided with several internal thread holes 2-1;The outer circumferential edges of the rotary table top 2 are provided with turntable side wall 2-2;It is provided with bearing mounting base 2-3 in the middle part of 2 lower surface of the rotary table top;The upper surfaces the bearing mounting base 2-3 are provided with Bearing mounting groove 2-3-1;The lower ends bearing mounting groove 2-3-1 are equipped with bearing limited ring dais 2-3-2.
The stator module 3 include two-fold heap-type stator 3-1, stack type piezoelectric element 3-2, stator fixing screws 3-3, Stack pre-loading screw 3-4 and adjust pad 3-5;The two-fold heap-type stator 3-1 includes driving hinge 3-1-1 and stator supporting rack 3-1-2;The front center of the driving hinge 3-1-1 is provided with driving foot 3-1-1-1;The side of the driving hinge 3-1-1 The both side ends of tie-beam 3-1-1-5 be provided with flexible hinge one 3-1-1-2, the other side of the driving hinge 3-1-1 The both side ends of tie-beam 3-1-1-5 are provided with two 3-1-1-3 of flexible hinge, the connection at the middle part of the driving hinge 3-1-1 The both side ends of beam 3-1-1-5 are provided with three 3-1-1-4 of flexible hinge, one 3-1-1-2 of the flexible hinge and flexible hinge The value range of the ratio between the thickness of three 3-1-1-4 is 0.1 ~ 0.9, two 3-1-1-3 of the flexible hinge and three 3-1- of flexible hinge The value range of the ratio between the thickness of 1-4 is 0.1 ~ 0.9;The both side ends of the driving hinge 3-1-1 and middle part are equipped with company Beam 3-1-1-5 is met, the thickness by changing tie-beam 3-1-1-5 can change the axial rigidity of driving hinge 3-1-1;The drive Dynamic hinge 3-1-1, which is provided with, stacks type piezoelectric element limiting slot 3-1-1-6;The lateral wall of the stator supporting rack 3-1-2 is uniform It is the positive integer more than or equal to 2 equipped with P driving hinge 3-1-1, wherein P;The lateral wall bottom end of the stator supporting rack 3-1-2 It is uniformly provided with N number of fixed lifting lug 3-1-2-1, wherein N is the positive integer more than or equal to 1;The fixed lifting lug 3-1-2-1 is equipped with Through-hole 3-1-2-2;The stator supporting rack 3-1-2 lateral walls, which are equipped with, pre-tightens threaded hole 3-1-2-3;
It is described stack type piezoelectric element 3-2 and be installed on stack in type piezoelectric element limiting slot 3-1-1-6, stack type piezoelectricity member Part 3-2 encourages two-fold heap-type stator 3-1 to generate deformation after powered up, so that driving foot 3-1-1-1 is generated lateral displacement, and then drive Rotary table top 2 makes rotary table top 2 be rotated;
The adjust pad 3-5, one side end face are engaged with type piezoelectric element 3-2 is stacked, another side end face with it is folded Heap-type piezoelectric element limiting slot 3-1-1-6 is engaged, and is tentatively pre-tightened to stacking type piezoelectric element 3-2, and prevent from stacking Type piezoelectric element 3-2 generates shear strain or unbalance stress.
The bearing 4 is connected with bearing mounting post 1-2-1 and bearing mounting groove 2-3-1, and passes through shaft shoulder 1-2-2 The axial displacement of bearing 4 is defined with bearing limited ring dais 2-3-2.
The cross sectional shape of the driving foot 3-1-1-1 can be semicircle, parabola shaped or class L-type etc..
One 3-1-1-2 of flexible hinge, two 3-1-1-3 of flexible hinge and three 3-1-1-4 of flexible hinge can be straight circle Type hinge, ellipse hinge, hyperbolic-type hinge, parabolic type hinge or perpendicular type hinge etc..
The adjust pad 3-5 is made of the materials such as wolfram steel or No. 45 steel.
The beneficial effects of the utility model are:The utility model mainly using stack type piezoelectric element as power come Source, when alternately passing to excitation electric signal to the piezoelectric stack in driving hinge left and right side based on piezoelectric stack Inverse piezoelectric effect, piezoelectric stack will produce axial elongation, due to driving the structure feature of hinge in two-fold heap-type stator, cause The tie-beam of both sides is different with intermediate tie-beam axial rigidity, therefore driving is made to generate tangential displacement enough, and then drives rotation Table top makes rotary table top rotate in the forward direction or counter-rotating.Due to piezoceramic material high, small, displacement point with frequency response Resolution is high, fever less, noiseless, High power output, conversion efficiency is high, driving force is big, driving power is low, working frequency is wide, not by Many advantages, such as electromagnetic interference, therefore a kind of double driving precision rotation driving devices of piezoelectric stack can effective solution Structure size existing for existing driving device is bigger than normal, positioning accuracy is low and the technical problems such as stroke is small.
Description of the drawings
Attached drawing described herein is used to provide a further understanding of the present invention, and is constituted part of this application, The illustrative example and its explanation of the utility model do not constitute the improper limit to the utility model for explaining the utility model It is fixed.
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is the structural schematic diagram of the support base of the utility model;
Fig. 3 is the structural schematic diagram of the rotary table top of the utility model;
Fig. 4 is the structural schematic diagram of the rotary table top bottom of the utility model;
Fig. 5 is the structural schematic diagram of the stator module of the utility model;
Fig. 6 is the structural schematic diagram of the two-fold heap-type stator of the utility model;
Fig. 7 is the vertical view of the two-fold heap-type stator of the utility model;
Fig. 8 is the structural schematic diagram for stacking type piezoelectric element of the utility model;
Fig. 9 is the structural schematic diagram of the adjust pad of the utility model;
Figure 10 is the structural schematic diagram of the bearing of the utility model;
Figure 11 is the schematic diagram of the workflow of the utility model;
Figure 12 is that the stator of the utility model is shown by driving foot generation positive tangential displacement when stacking the driving of type piezoelectric element It is intended to;
Figure 13 is that the stator of the utility model is shown by driving foot generation inverse tangential displacement when stacking the driving of type piezoelectric element It is intended to;
Figure 14 is that the stator of the utility model is shown by sufficient generate when displacement is offset of driving when stacking the driving of type piezoelectric element It is intended to.
In figure:1, support base;1-1, stator supporting table;1-2, bearing support column;1-1-1, stator fixing screwed hole; 1-2-1, bearing mounting post;1-2-2, the shaft shoulder;2, rotary table top;2-1, internal thread hole;2-2, turntable side wall;2-3, bearing Mounting base 2-3-1, bearing mounting groove;2-3-2, bearing limited ring dais;3, stator module;3-1, two-fold heap-type stator;3-1-1、 Drive hinge;3-1-2, stator supporting rack;3-1-1-1, driving foot;3-1-1-2, flexible hinge;3-1-1-3, flexible hinge II; 3-1-1-4, flexible hinge III;3-1-1-5, tie-beam;3-1-1-6, type piezoelectric element limiting slot is stacked;3-1-2-1 fixations are hung Ear;3-1-2-2, through-hole;3-1-2-3, threaded hole is pre-tightened;3-2, type piezoelectric element is stacked;3-3, stator fixing screws;3-4、 Stack pre-loading screw;3-5, adjust pad;4, bearing.
Specific implementation mode
The detailed content and its specific implementation mode of the utility model are further illustrated below in conjunction with the accompanying drawings.
Shown in Fig. 1 to Figure 14, the driving precision rotation driving device of double piezoelectric stacks of the utility model, including branch Support pedestal 1, rotary table top 2, stator module 3 and bearing 4;The support base 1 is connected by bearing 4 and the cooperation of rotary table top 2 It connects;The support base 1 is fastenedly connected by stator fixing screws 3-3 and stator module 3;The support base 1 and bearing 4 Interference fit;The rotary table top 2 is by driving foot 3-1-1-1 to be engaged with stator module 3;The rotary table top 2 and axis Hold 4 interference fits.
Shown in Figure 2, support base 1 described in the utility model includes stator supporting table 1-1 and bearing support column 1- 2, the upper surface middle part of the support base 1 is provided with stator supporting table 1-1;It is uniformly provided on the stator supporting table 1-1 N number of Stator fixing screwed hole 1-1-1, wherein N are the positive integer more than or equal to 1;The upper surface middle part of the support base 1 is provided with Bearing support column 1-2;The upper end of the bearing support column 1-2 is provided with bearing mounting post 1-2-1;The bearing support column 1-2 Top be provided with shaft shoulder 1-2-2.
Shown in Fig. 3 and Fig. 4, rotary table top 2 described in the utility model includes internal thread hole 2-1, turntable side wall 2-2 and bearing mounting base 2-3;2 upper surface of the rotary table top is provided with several internal thread holes 2-1;The rotary table top 2 Outer circumferential edges are provided with turntable side wall 2-2;It is provided with bearing mounting base 2-3 in the middle part of 2 lower surface of the rotary table top;It is described The upper surfaces bearing mounting base 2-3 are provided with bearing mounting groove 2-3-1;The lower ends bearing mounting groove 2-3-1 are limited equipped with bearing Land 2-3-2.
Shown in Fig. 5 to Fig. 9, stator module 3 described in the utility model includes two-fold heap-type stator 3-1, stacks type Piezoelectric element 3-2, stator fixing screws 3-3, pre-loading screw 3-4 and adjust pad 3-5 are stacked;The two-fold heap-type stator 3-1 Including driving hinge 3-1-1 and stator supporting rack 3-1-2;The front center of the driving hinge 3-1-1 is provided with driving foot 3- 1-1-1;The both side ends of the tie-beam 3-1-1-5 of the side of the driving hinge 3-1-1 are provided with one 3-1-1- of flexible hinge 2, the both side ends of the tie-beam 3-1-1-5 of the other side of the driving hinge 3-1-1 are provided with two 3-1-1-3 of flexible hinge, The both side ends of the tie-beam 3-1-1-5 at the middle part of the driving hinge 3-1-1 are provided with flexible hinge three 3-1-1-4, described The value range of the ratio between the thickness of one 3-1-1-2 of flexible hinge and three 3-1-1-4 of flexible hinge is 0.1 ~ 0.9, the flexible hinge The value range of the ratio between the thickness of two 3-1-1-3 of chain and three 3-1-1-4 of flexible hinge is 0.1 ~ 0.9;The driving hinge 3-1- 1 both side ends and middle part are equipped with tie-beam 3-1-1-5, and the thickness by changing tie-beam 3-1-1-5 can change drive The axial rigidity of dynamic hinge 3-1-1;The driving hinge 3-1-1, which is provided with, stacks type piezoelectric element limiting slot 3-1-1-6;It is described It is the positive integer more than or equal to 2 that the lateral wall of stator supporting rack 3-1-2, which is uniformly provided with P driving hinge 3-1-1, wherein P,;It is described The lateral wall bottom end of stator supporting rack 3-1-2 is uniformly provided with N number of fixed lifting lug 3-1-2-1, and wherein N is just whole more than or equal to 1 Number;The fixed lifting lug 3-1-2-1 is equipped with through-hole 3-1-2-2;The stator supporting rack 3-1-2 lateral walls, which are equipped with, pre-tightens screw thread Hole 3-1-2-3;
It is described stack type piezoelectric element 3-2 and be installed on stack in type piezoelectric element limiting slot 3-1-1-6, stack type piezoelectricity member Part 3-2 encourages two-fold heap-type stator 3-1 to generate deformation after powered up, so that driving foot 3-1-1-1 is generated lateral displacement, and then drive Rotary table top 2 makes rotary table top 2 be rotated;
The adjust pad 3-5, one side end face are engaged with type piezoelectric element 3-2 is stacked, another side end face with it is folded Heap-type piezoelectric element limiting slot 3-1-1-6 is engaged, and is tentatively pre-tightened to stacking type piezoelectric element 3-2, and prevent from stacking Type piezoelectric element 3-2 generates shear strain or unbalance stress.
It is shown in Figure 10, bearing 4 and bearing mounting post 1-2-1 and bearing mounting groove 2-3-1 described in the utility model It is connected, and the axial displacement of bearing 4 is defined by shaft shoulder 1-2-2 and bearing limited ring dais 2-3-2.
The cross sectional shape of the driving foot 3-1-1-1 can be semicircle, parabola shaped or L-type etc..
One 3-1-1-2 of flexible hinge, two 3-1-1-3 of flexible hinge and three 3-1-1-4 of flexible hinge can be straight circle Type hinge, ellipse hinge, hyperbolic-type hinge, parabolic type hinge or perpendicular type hinge etc..
The adjust pad 3-5 is made of the materials such as wolfram steel or No. 45 steel.
Embodiment:
Shown in Fig. 1 to Figure 14, the driving precision rotation driving device of double piezoelectric stacks of the utility model includes branch Support pedestal 1, rotary table top 2, stator module 3 and bearing 4.Support base is connect with rotary table top by bearing fit, and bottom is supported Seat is bolted with stator module, and rotary table top is engaged with stator module by the sufficient front end of driving, bearing and support Pedestal and rotary table top interference fit.When excitation electric signal, which acts on, stacks type piezoelectric element, the type piezoelectric element of stacking is based on Inverse piezoelectric effect generates axial elongation, and driving is made to generate tangential displacement enough, and driving rotary table top generates rotary motion, passes through change The direction of driving voltage and sequential, can control rotary table top forward and reverse and position it is static.The utility model has knot Structure is simple, positioning accuracy is high, stroke is big and many technical advantages such as fast response time, has extensively in precision engineering technical field Application prospect.
The support base 1 is provided with stator supporting table 1-1 and bearing support column 1-2;The upper surface of the support base 1 Middle part is provided with stator supporting table 1-1, is used to be engaged with the lower surface of stator supporting rack 3-1-2, realizes to stator pack The support of part 3;It is uniformly provided with N number of stator fixing screwed hole 1-1-1 on the stator supporting table 1-1, is used to fix with stator Screw 3-3 screws connection, and realization stator module 3 is fastenedly connected with support base 1, and wherein N is the positive integer more than or equal to 1, N=3 in present embodiment;The upper surface middle part of the support base 1 is provided with bearing support column 1-2;The bearing support The upper end of column 1-2 is provided with bearing mounting post 1-2-1, is used to be interference fitted with bearing 4, realizes bearing 4 and support base 1 It is connected;The top of the bearing support column 1-2 is provided with shaft shoulder 1-2-2, is used to be engaged with 4 inner ring of bearing, real Now to the support of bearing 4, and limit the axial displacement of bearing 4.
The rotary table top 2 is provided with internal thread hole 2-1, turntable side wall 2-2 and bearing mounting base 2-3;The rotation It is the positive integer more than or equal to 1, this specific embodiment party that 2 upper surface end of table top, which is evenly arranged with W circles internal thread hole 2-1, wherein W, W=6 in formula, often circle be provided with E internal thread hole 2-1, wherein E is the positive integer more than or equal to 1, E in present embodiment= 1,4,10, the internal thread hole 2-1 are connect for being screwed with the other elements of carried, realize other elements and rotary table top 2 Be fastenedly connected, and then realize rotary table top 2 drive other elements be rotated;The circumferential periphery of the rotary table top 2 Edge is provided with turntable side wall 2-2, is used to be engaged with the driving foot 3-1-1-1 set by driving hinge 3-1-1, realize Driving of the stator module 3 to rotary table top 2;It is provided with bearing mounting base 2-3 in the middle part of 2 lower surface of the rotary table top;The axis It holds the upper surfaces mounting base 2-3 and is provided with bearing mounting groove 2-3-1, the installation for being used for bearing 4 is fixed, and realizes bearing 4 and rotation The mating connection of table top 2;The lower ends bearing mounting groove 2-3-1 set by the bearing mounting base 2-3 are equipped with bearing limited ring dais 2- 3-2 is used to be engaged with the outer ring of bearing 4, realizes the limitation to 4 axial displacement of bearing.
The stator module 3 includes two-fold heap-type stator 3-1, stacks type piezoelectric element 3-2, stator fixing screws 3-3, folds Heap pre-loading screw 3-4 and adjust pad 3-5.
The two-fold heap-type stator 3-1 includes driving hinge 3-1-1 and stator supporting rack 3-1-2;The driving hinge 3- The front center of 1-1 is provided with driving foot 3-1-1-1, is used to contact with the turntable side wall 2-2 set by rotary table top 2 and match It closes, realizes drivings of the two-fold heap-type stator 3-1 to rotary table top 2, the cross sectional shape of the driving foot 3-1-1-1 can be semicircle Shape, parabola shaped, class L-type etc., it is semicircle that the cross sectional shape of foot 3-1-1-1 is driven in present embodiment, a diameter of R1, R1For the number more than 1, R in present embodiment1=1.6 mm;The tie-beam 3-1- of the side of the driving hinge 3-1-1 The both side ends of 1-5 are provided with one 3-1-1-2 of flexible hinge, and the thickness of one 3-1-1-2 of the flexible hinge is d1;The driving The both side ends of the tie-beam 3-1-1-5 of the other side of hinge 3-1-1 are provided with two 3-1-1-3 of flexible hinge, the flexible hinge The thickness of two 3-1-1-3 of chain is d2;The both side ends of the tie-beam 3-1-1-5 at the middle part of the driving hinge 3-1-1 are provided with The thickness of three 3-1-1-4 of flexible hinge, three 3-1-1-4 of the flexible hinge are d3;Wherein d1/ d3And d2/ d3Value range It is 0.1 ~ 0.9, d in present embodiment1/ d3= d2/ d3=0.5, one 3-1-1-2 of the flexible hinge, flexible hinge Two 3-1-1-3 and three 3-1-1-4 of flexible hinge can be straight round hinge, ellipse hinge, hyperbolic-type hinge, parabolic type hinge Chain or perpendicular type hinge etc., one 3-1-1-2 of flexible hinge, two 3-1-1-3 of flexible hinge and flexible hinge in present embodiment Three 3-1-1-4 of chain is straight round hinge;The both side ends of the driving hinge 3-1-1 and middle part are equipped with tie-beam 3-1- The thickness of 1-5, the tie-beam 3-1-1-5 are d4;Wherein d4For the number more than or equal to 1, pass through change d4Value can change The axial rigidity of hinge 3-1-1 is driven, d is taken in present embodiment4=2mm;The driving hinge 3-1-1, which is provided with, to be stacked Type piezoelectric element limiting slot 3-1-1-6 is used for and stacks type piezoelectric element 3-2 and is engaged, and realizes to stacking type piezoelectricity member The restriction of the positions part 3-2;The lateral wall of the stator supporting rack 3-1-2 is uniformly provided with P driving hinge 3-1-1, and wherein P is big P=3 are taken in the positive integer equal to 2, present embodiment;The lateral wall bottom end of the stator supporting rack 3-1-2 is uniformly provided with N number of fixed lifting lug 3-1-2-1, wherein N are positive integer more than or equal to 1, N=3 in present embodiment;The fixed lifting lug 3-1-2-1 is equipped with through-hole 3-1-2-2, is used to coordinate with stator fixing screws 3-3, realizes stator module 3 and support base 1 Be fastenedly connected;The stator supporting rack 3-1-2 lateral walls, which are equipped with, pre-tightens threaded hole 3-1-2-3, is used for and stacks preload spiral shell Nail 3-4 screws connection, realizes the preload for stacking type piezoelectric element 3-2.
It is described stack type piezoelectric element 3-2 and be installed on set by driving hinge 3-1-1 stack type piezoelectric element limiting slot 3- In 1-1-6, the type piezoelectric element 3-2 inverse piezoelectric effects based on piezoelectric element after powered up are stacked, stack type piezoelectric element 3-2 meetings It encourages two-fold heap-type stator 3-1 to generate deformation, so that driving foot 3-1-1-1 is generated lateral displacement, and then rotary table top 2 is driven to make rotation Table with revolvable top 2 is rotated, and type piezoelectric element 3-2 is stacked in present embodiment using THORLABS companies of the U.S. The piezoelectric stack of AE0505D16F models.
The stator fixing screws 3-3 is used to coordinate with through-hole 3-1-2-2 set on fixed lifting lug 3-1-2-1, and It screws and connect with stator fixing screwed hole 1-1-1, realization stator module 3 is fastenedly connected with support base 1.
It is described to stack pre-loading screw 3-4, it is used for and pre-tightens threaded hole 3-1-2-3 and screw and connect, realization is to stacking type pressure The preload of electric device 3-2.
The adjust pad 3-5, one side end face are engaged with type piezoelectric element 3-2 is stacked, another side end face with it is folded Heap-type piezoelectric element limiting slot 3-1-1-6 is engaged, and realizes the preliminary preload for stacking type piezoelectric element 3-2, and prevent from stacking Type piezoelectric element 3-2 generates shear strain or unbalance stress, and the adjust pad 3-5 can be preferable by the rigidity such as wolfram steel, No. 45 steel Material is made, and the adjust pad 3-5 in present embodiment is made of wolfram steel.
The bearing 4 and bearing mounting post 1-2-1 and bearing mounting groove 2-3-1 are connected, and by shaft shoulder 1-2-2 with Bearing limited ring dais 2-3-2 is defined the axial displacement of bearing 4, and then realizes the cooperation of support base 1 and rotary table top 2 Connection.
Shown in Fig. 1 to Figure 14, the operation principle of the utility model is as follows:
The course of work can be divided into two stages:Rotate in the forward direction stage and counter-rotating stage;Rotate in the forward direction the stage:When positioned at Stacking type piezoelectric element 3-2 while passing to excitation electric signal on the left of driving hinge 3-1-1, stacks type piezoelectric element 3-2 and is based on Its inverse piezoelectric effect generates axial elongation to be made due to the presence of three 3-1-1-4 of one 3-1-1-2 of flexible hinge and flexible hinge It is had differences with the axial rigidity of the tie-beam 3-1-1-5 at middle part on the left of driving hinge 3-1-1, leads to that sufficient 3-1-1-1 is driven to produce Raw positive tangential displacement, and then increase the normal pressure for causing driving foot 3-1-1-1 and turntable side wall 2-2, and drive turntable Face 2 is rotated in the forward direction;The counter-rotating stage:When positioned at driving hinge 3-1-1 on the right side of stack type piezoelectric element 3-2 simultaneously lead to To encourage electric signal, stacks type piezoelectric element 3-2 and generate axial elongation based on its inverse piezoelectric effect, due to two 3- of flexible hinge The presence of three 3-1-1-4 of 1-1-3 and flexible hinge makes the axial direction of the tie-beam 3-1-1-5 on the right side of driving hinge 3-1-1 with middle part Rigidity has differences, and leads to that sufficient 3-1-1-1 is driven to generate reverse tangential displacement, and then increase and cause driving foot 3-1-1-1 and rotation The normal pressure of table side 2-2, and rotary table top 2 is driven to carry out counter-rotating;Alternately to the left and right sides driving hinge 3-1-1 The type piezoelectric element 3-2 that stacks pass to excitation electric signal, can realize that the continuous of rotary table top 2 rotates in the forward direction and counter-rotating; Work as d1/ d3= d2/ d3Namely d1= d2When, a kind of work of double driving precision rotation driving devices of piezoelectric stack Process further includes positioning quiescent phase, refer to just when be located at left and right sides of driving hinge 3-1-1 to stack type piezoelectric element 3-2 same When pass to excitation electric signal, stack type piezoelectric element 3-2 and generate axial elongation based on its inverse piezoelectric effect, due to flexible hinge One 3-1-1-2 is identical with the thickness of two 3-1-1-3 of flexible hinge, the positive tangential displacement etc. for making driving hinge 3-1-1 generate In reverse tangential displacement, and then increase the normal pressure of driving hinge 3-1-1 and turntable side wall 2-2, rotary table top 2 is made to be in Position static state.
The foregoing is merely the preferred embodiments of the utility model, are not intended to limit the utility model, for ability For the technical staff in domain, various modifications and changes may be made to the present invention.It is all to made by the utility model it is any modification, Equivalent replacement, improvement etc., should be included within the scope of protection of this utility model.

Claims (8)

1. a kind of driving precision rotation driving device of double piezoelectric stacks, it is characterised in that:Including support base (1), turntable Face (2), stator module (3) and bearing (4);The support base (1) is connected by bearing (4) and rotary table top (2); The support base (1) is fastenedly connected by stator fixing screws (3-3) and stator module (3);The support base (1) with Bearing (4) is interference fitted;The rotary table top (2) is by driving foot (3-1-1-1) to be engaged with stator module (3);It is described Rotary table top (2) is interference fitted with bearing (4).
2. the driving precision rotation driving device of double piezoelectric stacks according to claim 1, it is characterised in that:The branch Support pedestal (1) includes stator supporting table (1-1) and bearing support column (1-2), the upper surface middle part setting of the support base (1) There is stator supporting table (1-1);N number of stator fixing screwed hole (1-1-1), wherein N are uniformly provided on the stator supporting table (1-1) For the positive integer more than or equal to 1;The upper surface middle part of the support base (1) is provided with bearing support column (1-2);The bearing The upper end of support column (1-2) is provided with bearing mounting post (1-2-1);The top of the bearing support column (1-2) is provided with the shaft shoulder (1-2-2)。
3. the driving precision rotation driving device of double piezoelectric stacks according to claim 1, it is characterised in that:The rotation Table with revolvable top (2) includes internal thread hole (2-1), turntable side wall (2-2) and bearing mounting base (2-3);On the rotary table top (2) Surface is provided with several internal thread holes (2-1);The outer circumferential edges of the rotary table top (2) are provided with turntable side wall (2- 2);It is provided with bearing mounting base (2-3) in the middle part of rotary table top (2) lower surface;Bearing mounting base (2-3) upper surface is set It is equipped with bearing mounting groove (2-3-1);Bearing mounting groove (2-3-1) lower end is equipped with bearing limited ring dais (2-3-2).
4. the driving precision rotation driving device of double piezoelectric stacks according to claim 1, it is characterised in that:Described determines Sub-component (3) includes two-fold heap-type stator (3-1), stacks type piezoelectric element (3-2), stator fixing screws (3-3), stacks preload Screw (3-4) and adjust pad (3-5);The two-fold heap-type stator (3-1) includes driving hinge (3-1-1) and stator supporting rack (3-1-2);The front center of the driving hinge (3-1-1) is provided with driving foot (3-1-1-1);Driving hinge (the 3-1- 1) both side ends of the tie-beam (3-1-1-5) of side are provided with flexible hinge one (3-1-1-2), the driving hinge (3- The both side ends of the tie-beam (3-1-1-5) of other side 1-1) are provided with flexible hinge two (3-1-1-3), the driving hinge The both side ends of the tie-beam (3-1-1-5) at the middle part of (3-1-1) are provided with flexible hinge three (3-1-1-4), the flexible hinge The value range of chain one (3-1-1-2) and the ratio between the thickness of flexible hinge three (3-1-1-4) is 0.1 ~ 0.9, the flexible hinge The value range of two (3-1-1-3) and the ratio between the thickness of flexible hinge three (3-1-1-4) is 0.1 ~ 0.9;The driving hinge The both side ends of (3-1-1) and middle part are equipped with tie-beam (3-1-1-5), by the thickness for changing tie-beam (3-1-1-5) The axial rigidity of driving hinge (3-1-1) can be changed;The driving hinge (3-1-1), which is provided with, stacks the limit of type piezoelectric element Slot (3-1-1-6);The lateral wall of the stator supporting rack (3-1-2) is uniformly provided with P driving hinge (3-1-1), and wherein P is big In the positive integer equal to 2;The lateral wall bottom end of the stator supporting rack (3-1-2) is uniformly provided with N number of fixed lifting lug (3-1-2- 1), wherein N is the positive integer more than or equal to 1;The fixed lifting lug (3-1-2-1) is equipped with through-hole (3-1-2-2);The stator Supporting rack (3-1-2) lateral wall, which is equipped with, pre-tightens threaded hole (3-1-2-3);
It is described stack type piezoelectric element (3-2) and be installed on stack in type piezoelectric element limiting slot (3-1-1-6), stack type piezoelectricity member Part (3-2) encourages two-fold heap-type stator (3-1) to generate deformation after powered up, and driving foot (3-1-1-1) is made to generate lateral displacement, into And drive rotary table top (2) that rotary table top (2) is made to be rotated;
The adjust pad (3-5), one side end face are engaged with type piezoelectric element (3-2) is stacked, another side end face with it is folded Heap-type piezoelectric element limiting slot (3-1-1-6) is engaged, and is tentatively pre-tightened to stacking type piezoelectric element (3-2), and prevent It stacks type piezoelectric element (3-2) and generates shear strain or unbalance stress.
5. the driving precision rotation driving device of double piezoelectric stacks according to claim 1, it is characterised in that:The axis It holds (4) to be connected with bearing mounting post (1-2-1) and bearing mounting groove (2-3-1), and is limited by the shaft shoulder (1-2-2) and bearing Position land (2-3-2) is defined the axial displacement of bearing (4).
6. the driving precision rotation driving device of double piezoelectric stacks according to claim 4, it is characterised in that:The drive The cross sectional shape of action spot (3-1-1-1) is semicircle, parabola shaped or L-type.
7. the driving precision rotation driving device of double piezoelectric stacks according to claim 4, it is characterised in that:Described is soft Property hinge one (3-1-1-2), flexible hinge two (3-1-1-3) and flexible hinge three (3-1-1-4) be straight round hinge, ellipse Hinge, hyperbolic-type hinge, parabolic type hinge or perpendicular type hinge.
8. the driving precision rotation driving device of double piezoelectric stacks according to claim 4, it is characterised in that:The tune Whole gasket (3-5) is made of wolfram steel or No. 45 steel.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107947629A (en) * 2017-12-05 2018-04-20 吉林大学 Double driving precision rotation driving devices of piezoelectric stack
CN109995267A (en) * 2019-04-24 2019-07-09 西安交通大学 Straight line-shearing piezoelectric ceramics cooperation driving stepping rotation apparatus and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107947629A (en) * 2017-12-05 2018-04-20 吉林大学 Double driving precision rotation driving devices of piezoelectric stack
CN107947629B (en) * 2017-12-05 2023-10-20 吉林大学 Double piezoelectric stack driving type precise rotation driving device
CN109995267A (en) * 2019-04-24 2019-07-09 西安交通大学 Straight line-shearing piezoelectric ceramics cooperation driving stepping rotation apparatus and method

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