CN106100439B - A kind of stepping type rotating electric machine based on piezoelectric stack driving method - Google Patents
A kind of stepping type rotating electric machine based on piezoelectric stack driving method Download PDFInfo
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- CN106100439B CN106100439B CN201610542793.9A CN201610542793A CN106100439B CN 106100439 B CN106100439 B CN 106100439B CN 201610542793 A CN201610542793 A CN 201610542793A CN 106100439 B CN106100439 B CN 106100439B
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000002783 friction material Substances 0.000 claims abstract description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 125000003003 spiro group Chemical group 0.000 claims description 2
- 230000005284 excitation Effects 0.000 abstract description 12
- 230000009471 action Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000001429 stepping effect Effects 0.000 description 18
- 238000006073 displacement reaction Methods 0.000 description 11
- 230000033001 locomotion Effects 0.000 description 6
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The embodiment of the invention discloses a kind of stepping type rotating electric machines based on piezoelectric stack driving method, it is related to Precision Piezoelectric actuation technology field, it can be realized low voltage drive, and electric machine structure is simplified, the rotation speed of motor can also be adjusted by changing electrical excitation frequency, easy to control, output is accurately.The present invention includes that stator 5 and touching are grabbed and be connected through a screw thread between 4, and touching is grabbed 4 and installed according to preset back-out amount, is equipped with the spring structure for playing automatic compensating action inside stator 5；Piezoelectric stack 2 is uniformly arranged around 5 ring geometric center of stator, and piezoelectric stack 2 is for driving the stepping type rotating electric machine；Piezoelectric stack 2 is embedded in stator 5 according to preset magnitude of interference in an interference fit；4 joints are grabbed in rotor 1 and touching, and rotor 1 and touching grab and be coated with friction material on 4 contact surface, and the bottom for the contact surface that rotor 1 and touching grab 4 is provided with the boss for preventing rotor 1 from slipping when rotated.
Description
Technical field
The present invention relates to Precision Piezoelectric actuation technology field more particularly to a kind of steppings based on piezoelectric stack driving method
Type rotating electric machine.
Background technique
Piezoelectric actuator is that one kind should press in recent years extensively in the important devices in the fields such as aerospace, medicine, industry
In motor-driven cylinder development, along with the appearance of piezoelectric stack, type piezoelectric actuator is stacked due to its big displacement, high thrust, low drive
The characteristic of dynamic voltage, application field is very extensive, and has developed relevant products scheme quickly.
But in existing many schemes, the piezoelectric actuator based on piezoelectric stack scheme still remains displacement of the lines deficiency
The shortcomings that, and be simultaneously and met the control for output revolving speed and the requirement of low driving voltage, it is needed in current scheme
The components such as displacement amplification device, piezoelectric stack, even dedicated control module are configured in rotating driver, lead to actuation
The structure of device is complex and volume is larger, and which has limited the piezoelectric actuators based on piezoelectric stack scheme in aerospace, doctor
Application range in etc. the demanding field of measures of precision.
Summary of the invention
The embodiment of the present invention provides a kind of stepping type rotating electric machine based on piezoelectric stack driving method, can be realized low
Voltage driving, and electric machine structure has been simplified, the rotation speed of motor can also be adjusted by changing electrical excitation frequency, passed through
Change voltage, input signal pattern to adjust stepping corner and resolution ratio, easy to control, output is accurately.
In order to achieve the above objectives, the embodiment of the present invention is adopted the following technical scheme that based on piezoelectric stack driving method
Stepping type rotating electric machine by rotor 1, piezoelectric stack 2, fixing screws 3,4, stator 5 is grabbed in touching and pedestal 6 forms；
Stator 5 and touching are grabbed and are connected through a screw thread between 4, and touching is grabbed 4 and installed according to preset back-out amount, are installed inside stator 5
There is the spring structure for playing automatic compensating action；
Piezoelectric stack 2 is installed, piezoelectric stack 2 is uniformly arranged around 5 ring geometric center of stator, piezoelectricity inside motor stator 5
2 are stacked for driving the stepping type rotating electric machine；
Piezoelectric stack 2 is embedded in stator 5 according to preset magnitude of interference in an interference fit；
4 joints are grabbed in rotor 1 and touching, and rotor 1 and touching grab and be coated with friction material on 4 contact surface, and rotor 1 and touching grab 4
The bottom of contact surface is provided with the boss for preventing rotor 1 from slipping when rotated.
Stepping type rotating electric machine provided in an embodiment of the present invention based on piezoelectric stack driving method, is driven by piezoelectric stack
Dynamic stepping type rotating electric machine, wherein motor includes rotor 1, stator 5, touches and grab 4, piezoelectric stack 2 and pedestal 6, by piezoelectricity
Stacking 2 applications is deformed stator 5 with dephased electric excitation, and the elliptic motion that 4 generations rule is grabbed in the driving touching of stator 5 pushes away
Turn 1 rotates.The characteristics of based on 2 big displacement high thrust low driving voltage of piezoelectric stack, 5 knot of stator provided by the invention
Structure is effectively exaggerated the displacement of piezoelectric stack 2, and can realize low voltage drive.It is a kind of stepping type driven by piezoelectric stack
The rotating piezoelectric actuator scheme of rotating electric machine has been simplified electric machine structure, and can have been adjusted by changing electrical excitation frequency
The rotation speed of motor adjusts stepping corner and resolution ratio by changing voltage, input signal pattern, therefore easy to control,
Output is accurate, can be used for substituting in existing scheme that structure is complex and the biggish actuator scheme of volume.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to needed in the embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the plan structure of the stepping type rotating electric machine provided in an embodiment of the present invention based on piezoelectric stack driving method
Figure；
Fig. 2 is the motion mode schematic diagram that the touching of motor provided in an embodiment of the present invention is grabbed；
Fig. 3 is that the polarization direction of piezoelectric stack, spatial arrangement and electric excitation apply in motor provided in an embodiment of the present invention
Schematic diagram；
Fig. 4 is the disassemblying structure of the stepping type rotating electric machine provided in an embodiment of the present invention based on piezoelectric stack driving method
Schematic diagram, each label therein respectively indicate: 1. rotors, 2. piezoelectric stacks, 3. fixing screws, 4. touching grab, 5. stators, 6. bottoms
Seat, 11. motor mounting-positioning holes, 12. wire casings, 13. anti-slip boss, the contact inner wall of 14. rotors 1,15. triangles amplification knot
Structure, 16. 1 groups of piezoelectric stacks, 17. 1 groups of fixing screws, the positioning screw hole of 18. stators 5,19 1 groups of touchings are grabbed.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, with reference to the accompanying drawing and specific embodiment party
Present invention is further described in detail for formula.Embodiments of the present invention are described in more detail below, the embodiment is shown
Example is shown in the accompanying drawings, and in which the same or similar labels are throughly indicated same or similar element or has identical or class
Like the element of function.It is exemplary below with reference to the embodiment of attached drawing description, for explaining only the invention, and cannot
It is construed to limitation of the present invention.Those skilled in the art of the present technique are appreciated that unless expressly stated, odd number shape used herein
Formula " one ", "one", " described " and "the" may also comprise plural form.It is to be further understood that specification of the invention
Used in wording " comprising " refer to that there are the feature, integer, step, operation, element and/or component, but it is not excluded that
In the presence of or add other one or more features, integer, step, operation, element, component and/or their group.It should be understood that
When we say that an element is " connected " or " coupled " to another element, it can be directly connected or coupled to other elements, or
There may also be intermediary elements.In addition, " connection " used herein or " coupling " may include being wirelessly connected or coupling.Here make
Wording "and/or" includes one or more associated any cells for listing item and all combinations.The art
Technical staff is appreciated that unless otherwise defined all terms (including technical terms and scientific terms) used herein have
Meaning identical with the general understanding of the those of ordinary skill in fields of the present invention.It should also be understood that such as general
Those terms, which should be understood that, defined in dictionary has a meaning that is consistent with the meaning in the context of the prior art, and
Unless defined as here, it will not be explained in an idealized or overly formal meaning.
The embodiment of the present invention provides a kind of stepping type rotating electric machine based on piezoelectric stack driving method, as shown in Figure 1, packet
Include: rotor 1, piezoelectric stack 2, fixing screws 3,4, stator 5 is grabbed in touching and pedestal 6 forms.
Stator 5 and touching are grabbed and are connected through a screw thread between 4, and touching is grabbed 4 and installed according to preset back-out amount, are installed inside stator 5
There is the spring structure for playing automatic compensating action.Wherein, the preset back-out amount foundation that touching grabs 4 adjusts according to actual needs.
Piezoelectric stack 2 is installed, piezoelectric stack 2 is uniformly arranged around 5 ring geometric center of stator, piezoelectricity inside motor stator 5
2 are stacked for driving the stepping type rotating electric machine.
Piezoelectric stack 2 is embedded in stator 5 according to preset magnitude of interference in an interference fit.Piezoelectric stack 2 with it is described fixed
Structure is designed based on triangle amplification principle at sub 5 cooperations.Piezoelectric stack 2 is embedding in an interference fit according to preset magnitude of interference
Enter stator 5.Wherein, preset magnitude of interference can adjust according to actual needs.Such as: as shown in Figure 1, stator 5 and piezoelectric stack 2 it
Between so that piezoelectric stack 2 is embedded in stator 5 in an interference fit, structure is set according to triangle amplification principle at 2 insertion of piezoelectric stack
Meter, when applying electric excitation to piezo stack, piezoelectric stack 2 generates line strain as shown in figure 3, piezoelectric stack 2 produces along its polarization direction
Raw displacement passes to stator 5 by the triangle enlarged structure of stator 5, and stator 5 obtains at double perpendicular to the direction for stacking deformation
The deflection of growth, the deflection are grabbed in touching and are further amplified at 4, and touching is made to grab the enough displacement driving rotors of 4 acquisitions
1。
4 joints are grabbed in rotor 1 and touching, and rotor 1 and touching grab and be coated with friction material on 4 contact surface, and rotor 1 and touching grab 4
The bottom of contact surface is provided with the boss for preventing rotor 1 from slipping when rotated.
In the present embodiment, piezoelectric stack 2 is made to be embedded in stator between stator 5 and piezoelectric stack 2 in an interference fit
5, structure is triangle enlarged structure at 2 insertion of piezoelectric stack.
2 polarization direction of piezoelectric stack is as shown in figure 3, the displacement that piezoelectric stack 2 generates amplifies knot by the triangle of the stator 5
Structure passes to stator 5, and stator 5 is obtaining the deflection being doubled and redoubled perpendicular to the direction for stacking deformation, which grabs 4 in touching
Place is further amplified, and touching is made to grab the enough displacement driving rotors 1 of 4 acquisitions.
Further, stator 5 is embedded in even number piezoelectric stack 2, is mounted on orthogonally between adjacent piezoelectric stack 2
In stator 5.In the preferred embodiment of the present embodiment, stator 5 is embedded in four piezoelectric stacks 2.Such as: as shown in Figure 1, motor is determined
Sub 5 inside piezoelectric stacks 2 are uniformly arranged around 5 ring geometric center of stator, and the present embodiment uses four piezoelectric stacks 2, adjacent folded
It is orthogonal between heap to put.
In the present embodiment, 5 internal structure of stator is a disk for fixing, is distributed four on the disk
A positioning spiro pit, stator 5 are fixedly connected by screw with pedestal 6, and there are four the circular arc knots of hollow out for the outside setting of the disk
Structure, the structure are connected and fixed disk outer portion supporting beam, and the arc structure of hollow out plays the role of spring, carry out abrasion benefit to motor
It repays.Such as: as described in Figure 1,5 internal structure of stator is one and plays fixed disk, and four positioning threads are distributed on the disk
Hole, affiliated stator 5 are fixedly connected by screw with pedestal 6, and there are four the arc structures of hollow out in the outside of 5 fixed disc of stator, should
Structure is connected and fixed disk outer portion supporting beam, and hollow out circular arc plays the role of spring, carries out wear-compensating to motor.
Further, the touching of the external preset quantity of stator 5 grabs 4, and touching is grabbed to be connected through a screw thread between 4 and stator 5, stator 5
4 are grabbed by touching between rotor 1 to contact.Precompression can grab the back-out amount between 4 and stator 5 by adjusting touching and adjust.Such as: such as
Shown in Fig. 1, the touching of the external preset quantity of stator 5 grabs 4, and touching is grabbed to be connected through a screw thread between 4 and stator 5, stator 5 and rotor 1 it
Between 4 contacts are grabbed by touching, precompression can grab the back-out amount between 4 and stator 5 by adjusting touching and adjust.Rotor 1 is grabbed 4 with touching and is contacted
Bottom have a boss, can prevent rotor 1 from skidding off in the course of rotation.And in the present embodiment, rotor 1 is grabbed 4 with touching and is connect
Friction material is coated in contacting surface.Rotor 1 and touching grab and are coated with friction material on 4 contact surface.
As shown in Fig. 2, the movement mechanism of the motor can be reduced to the model in figure, wherein the deformation rule of the model
Based on Electrical excitation mode shown in Fig. 3, T indicates that touching is grabbed for 4 period of motion, and t indicates the time.
Specifically, a period of motion by during end:
When t=0, stator 5 is grabbed 4 and is not moved without deformation, each touching；
When 0 < t≤T/4, state shown in subgraph 2-1 is presented in stator 5, and elongation downside is shunk on the upside of stator 5；
When T/4 < t≤T/2, state shown in subgraph 2-2 is presented in stator 5, and elongation left side is shunk on the right side of stator 5.At this
The pressure maximum that 4 pairs of rotors 1 are grabbed in touching at contact A is inscribed in period, plays a leading role to rotor 1, passes through friction and drives 1 court of rotor
Arrow direction rotation in subgraph 2-2；
When T/2 < t≤3T/4, state shown in subgraph 2-3 is presented in stator 5, and elongation left side is shunk on the right side of stator 5.At this
The pressure maximum of 4 pairs of rotors 1 is grabbed in touching at the B of contact point in period, is played a leading role to rotor 1, is passed through friction and is driven 1 court of rotor
Arrow direction rotation in subgraph 2-3；
When 3T/4 < t≤T, state shown in subgraph 2-4 is presented in stator 5, and elongation left side is shunk on the right side of stator 5.At this
Between in section at the C of contact point touching grab 4 pairs of rotors 1 pressure it is maximum, play a leading role to rotor 1, by friction drive rotor 1 towards
Arrow direction rotates in subgraph 2-4；
When T < t≤5T/4, state shown in subgraph 2-5 is presented in stator 5, and elongation left side is shunk on the right side of stator 5.At this
Between in section at the D of contact point touching grab 4 pairs of rotors 1 pressure it is maximum, play a leading role to rotor 1, by friction drive rotor 1 towards
Arrow direction rotates in subgraph 2-5；
The mode of connection according to Fig.3, the application frequency by adjusting electric excitation can increase or reduce the motor
Revolving speed, electric excitation reverse-phase can realize motor reversal.Signal mode by adjusting electric excitation can adjust the drive of the motor
Dynamic step resolution.
As shown in figure 4, the groove of motor base 6 is used for portion's line of motor, wherein each label is corresponding to be indicated: 11. motors peace
Fill location hole；12. wire casing；13. anti-slip boss；14. the contact inner wall of rotor 1；15. triangle enlarged structure；16. one group of pressure
Electricity stacks (one group of piezoelectric stack quantity can be as shown in Figure 4 4)；17. one group of fixing screws (one group of fixing screws
Quantity can be as shown in Figure 4 4)；18. the positioning screw hole of stator 5；19 1 groups of touchings are grabbed.
In the present embodiment, the preset quantity that touching grabs 4 can be 3,4,6 or 8, such as shown in Fig. 4, and number is grabbed in one group of touching
Amount can be 4.
Stepping type rotating electric machine provided in an embodiment of the present invention based on piezoelectric stack driving method, is driven by piezoelectric stack
Dynamic stepping type rotating electric machine, wherein motor includes rotor 1, stator 5, touches and grab 4, piezoelectric stack 2 and pedestal 6, by piezoelectricity
Stacking 2 applications is deformed stator 5 with dephased electric excitation, and the elliptic motion that 4 generations rule is grabbed in the driving touching of stator 5 pushes away
Turn 1 rotates.The characteristics of based on 2 big displacement high thrust low driving voltage of piezoelectric stack, 5 knot of stator provided by the invention
Structure is effectively exaggerated the displacement of piezoelectric stack 2, and can realize low voltage drive.It is a kind of stepping type driven by piezoelectric stack
The rotating piezoelectric actuator scheme of rotating electric machine has been simplified electric machine structure, and can have been adjusted by changing electrical excitation frequency
The rotation speed of motor adjusts stepping corner and resolution ratio by changing voltage, input signal pattern, therefore easy to control,
Output is accurate, can be used for substituting in existing scheme that structure is complex and the biggish actuator scheme of volume.
All the embodiments in this specification are described in a progressive manner, same and similar portion between each embodiment
Dividing may refer to each other, and each embodiment focuses on the differences from other embodiments.Especially for equipment reality
For applying example, since it is substantially similar to the method embodiment, so describing fairly simple, related place is referring to embodiment of the method
Part explanation.The above description is merely a specific embodiment, but protection scope of the present invention is not limited to
This, anyone skilled in the art in the technical scope disclosed by the present invention, the variation that can readily occur in or replaces
It changes, should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claim
Subject to enclosing.
Claims (2)
1. a kind of stepping type rotating electric machine based on piezoelectric stack driving method characterized by comprising rotor (1), piezo stack
(4), stator (5) and pedestal (6) composition are grabbed in heap (2), fixing screws (3), touching；
Stator (5) and touching are grabbed to be connected through a screw thread between (4), and touching is grabbed (4) and installed according to preset back-out amount；
Piezoelectric stack (2) are installed inside motor stator (5), piezoelectric stack (2) is uniformly arranged around stator (5) ring geometric center,
Piezoelectric stack (2) is for driving the stepping type rotating electric machine；
Piezoelectric stack (2) is embedded in stator (5) according to preset magnitude of interference in an interference fit；
(4) joint is grabbed in rotor (1) and touching, and rotor (1) and touching grab and be coated with friction material, rotor (1) and touching on the contact surface of (4)
The bottom for grabbing the contact surface of (4) is provided with boss for preventing rotor (1) from slipping when rotated；
Piezoelectric stack (2) are made to be embedded in stator (5) between stator (5) and piezoelectric stack (2) in an interference fit, piezoelectric stack
(2) structure is triangle enlarged structure at insertion；
Stator (5) is embedded in even number piezoelectric stack (2), is mounted on stator (5) orthogonally between adjacent piezoelectric stack (2)
In；
Stator (5) internal structure is a disk for fixing, and four positioning spiro pits are distributed on the disk, fixed
Sub (5) are fixedly connected by screw with pedestal (6), the arc structure for hollow out that there are four the outside settings of the disk, and described four
The arc structure of hollow out is connected and fixed disk outer portion supporting beam, and the arc structure of hollow out plays the role of spring, grinds to motor
Damage compensation；
The touching of stator (5) external preset quantity is grabbed (4), and touching is grabbed and is connected through a screw thread between (4) and stator (5), stator (5) with turn
(4) contact is grabbed by touching between sub (1).
2. the stepping type rotating electric machine according to claim 1 based on piezoelectric stack driving method, which is characterized in that touching is grabbed
(4) preset quantity is 4.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610542793.9A CN106100439B (en) | 2016-07-11 | 2016-07-11 | A kind of stepping type rotating electric machine based on piezoelectric stack driving method |
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| CN201610542793.9A CN106100439B (en) | 2016-07-11 | 2016-07-11 | A kind of stepping type rotating electric machine based on piezoelectric stack driving method |
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| CN106100439B true CN106100439B (en) | 2019-04-19 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107947629B (en) * | 2017-12-05 | 2023-10-20 | 吉林大学 | Double piezoelectric stack driving type precise rotation driving device |
| CN108233764B (en) * | 2017-12-05 | 2023-10-20 | 吉林大学 | Piezoelectric driving type precise rotation driving device adopting special-shaped hinge transmission mechanism |
| CN112713803B (en) * | 2020-12-11 | 2021-11-05 | 南京航空航天大学 | Macro-micro combined piezoelectric driving rotary actuator and working method thereof |
| CN112713804B (en) * | 2020-12-11 | 2021-11-05 | 南京航空航天大学 | Piezoelectric driving rotary motor and working method thereof |
| CN113162465B (en) * | 2021-04-22 | 2022-05-17 | 燕山大学 | Piezoelectric stack driven stepping type rotating motor |
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| CN2525728Y (en) * | 2002-03-04 | 2002-12-11 | 辛洪兵 | Piezoelectric harmonic motor |
| CN101630925A (en) * | 2009-08-25 | 2010-01-20 | 哈尔滨工业大学 | Square rotary ultrasonic motor oscillator |
| CN102437786A (en) * | 2011-10-18 | 2012-05-02 | 哈尔滨工业大学 | Surface mount type square four-footed rotational ultrasonic motor vibrator |
| CN104218846A (en) * | 2014-09-23 | 2014-12-17 | 江苏釜鼎能源科技有限公司 | Marching type piezoelectric actuator and driving and realizing method thereof |
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- 2016-07-11 CN CN201610542793.9A patent/CN106100439B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2525728Y (en) * | 2002-03-04 | 2002-12-11 | 辛洪兵 | Piezoelectric harmonic motor |
| CN101630925A (en) * | 2009-08-25 | 2010-01-20 | 哈尔滨工业大学 | Square rotary ultrasonic motor oscillator |
| CN102437786A (en) * | 2011-10-18 | 2012-05-02 | 哈尔滨工业大学 | Surface mount type square four-footed rotational ultrasonic motor vibrator |
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