CN107994804B - Ultrasonic driving macro-micro composite motion platform - Google Patents
Ultrasonic driving macro-micro composite motion platform Download PDFInfo
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- CN107994804B CN107994804B CN201711374655.5A CN201711374655A CN107994804B CN 107994804 B CN107994804 B CN 107994804B CN 201711374655 A CN201711374655 A CN 201711374655A CN 107994804 B CN107994804 B CN 107994804B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention provides a macro-micro composite motion platform combining a linear driver and an ultrasonic actuation driver. Macro motion of the motion platform over a large stroke is achieved by a linear drive in the middle of the motion start to the positioning start, while final high precision positioning is achieved by an ultrasonic actuation drive in final micro feed positioning motion over a small stroke. By combining the two, the defect that the ultrasonic actuation driver is low in speed on a large stroke is overcome, and the defect that the linear motor is insufficient in positioning precision under the condition of high positioning precision requirement is overcome.
Description
Technical Field
The invention relates to the technical field of motion platforms, in particular to an ultrasonic driving macro-micro composite motion platform.
Background
In the advanced fields of microelectronic processing, ultra-precision processing, semiconductor manufacturing, aerospace technology, etc., it has been difficult for conventional driving devices to meet the increasing requirements of processing precision, and technological staff are striving to find new drivers capable of meeting the ultra-precision processing precision. The piezoelectric ceramic material has the advantages of high response speed, large output force, stable output displacement, compact structure and small volume. The flexible hinge has no mechanical friction, no lubrication and high motion sensitivity, and the ultrasonic actuation driver made of piezoelectric ceramic material can generate mechanical vibration in an ultrasonic frequency domain.
Disclosure of Invention
The motion platform combines the ultrasonic actuation driver with the flexible hinge and other structures, can convert and accumulate the small-stroke reciprocating vibration of the piezoelectric ceramic material into large-stroke motion in the linear direction, and has the characteristics of nanoscale resolution, high output precision, high positioning precision, quick response and the like, but also has the problem of lower running speed.
The invention provides an ultrasonic driving macro-micro composite motion platform for overcoming at least one defect in the prior art, and adopts the following technical scheme.
An ultrasonic-driven macro-micro composite motion platform, characterized in that the motion platform comprises: the device comprises a machine base, a linear guide rail, a guide rail sliding block, a linear driver, a workbench, an ultrasonic actuation driver, a displacement detection device and a flexible hinge; the linear guide rail is fixed on the base; the guide rail sliding block is arranged on the linear guide rail and can slide on the linear guide rail; the linear driver drives the workbench to perform linear motion; the ultrasonic actuation driver is arranged on the guide rail sliding block and is connected with the workbench through the flexible hinge; the ultrasonic driver includes: an ultrasonic actuation device and a motion switching unit; the ultrasonic actuating device utilizes the inverse piezoelectric effect of the piezoelectric material to realize ultrasonic vibration of the device by changing the voltage input by the device; the motion switching unit is used for converting ultrasonic high-frequency vibration of the ultrasonic actuating device into feeding motion along the direction of the linear guide rail; the displacement detection device is used for feeding back the position of the workbench in real time; the flexible hinge drives the workbench to move in precisely positioned micro-motions through elastic deformation.
Further, the ultrasonic actuation device comprises: two plates and a piezoelectric stack; the two plates are respectively arranged on the guide rail sliding blocks so as to be connected with the linear guide rail fixed on the machine base; the piezoelectric stack is positioned between the two plates and connected with the two plates so as to realize pretension.
Further, the motion switching unit comprises a fastening mechanism connected with the ultrasonic actuating device; the fastening mechanism includes: a piezoelectric actuator and a friction block; the friction block is connected with the top of the piezoelectric actuator; when the piezoelectric actuator is electrified, the piezoelectric actuator stretches according to the inverse piezoelectric effect, so that the friction block is propped against the linear guide rail to increase friction force, and the effect of fastening the ultrasonic actuating device is realized.
Further, the motion switching unit comprises a plurality of fastening mechanisms connected with the plate of the ultrasonic actuation device; the fastening mechanism includes: a piezoelectric actuator and a friction block; the friction block is connected with the top of the piezoelectric actuator; when the piezoelectric actuator is electrified, the piezoelectric actuator stretches according to the inverse piezoelectric effect, so that the friction block is propped against the linear guide rail to increase friction force, and the effect of fastening the block is realized.
Further, the displacement detection device comprises a grating displacement sensor.
Further, the linear driver includes: the linear motor rotor and the linear motor stator are formed; the linear motor rotor is connected with the workbench, and can drive the workbench to perform large-stroke linear motion through electromagnetic force action.
Further, the flexible hinge is a detachable notch hinge. In this way, replacement of the hinge can be facilitated.
Further, the number of the flexible hinges is multiple, and the flexible hinges are all detachable notch-shaped hinges; each of the panels is connected to at least one of the flexible hinges.
Further, the two plates are made into a whole. This allows a better synchronization effect.
Compared with the prior art, the beneficial effects are that: the macro motion is driven by the linear driver, so that the speed is high, the transition time from the motion start to the positioning start is shortened, meanwhile, the motion stroke is large, and the effective stroke of the motion platform is increased. The micro-motion is driven by an ultrasonic actuation driver, the precision is high, the nano-scale resolution can be achieved, the response speed is high, and the rapid positioning is realized by matching the characteristics of friction-free and motion sensitivity of the flexible hinge and the short positioning time required by the platform. The macro-micro composite mode is adopted to combine the linear driver with high large stroke speed and the ultrasonic actuation driver with high small stroke precision, so that the macro-micro composite motion platform with high stroke precision and quick positioning is realized.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention.
Fig. 2 illustrates the operation of an ultrasonic actuator driver according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of a split structure according to a second embodiment of the present invention.
Fig. 4 is an enlarged partial cutaway schematic view of a second embodiment of the present invention.
Reference numerals illustrate: 1. the ultrasonic device comprises a front plate, a rear plate, an ultrasonic actuator, a flexible hinge and a workbench, wherein the front plate, the rear plate, the ultrasonic actuator, the flexible hinge and the workbench are arranged in sequence; 6. the device comprises a base, a linear guide rail, a guide rail sliding block, a piezoelectric actuator, a friction block, a plate I, a plate II, a plate 13, a plate III, a plate 14, a plate IV, a grating displacement sensor, a linear motor rotor, a linear motor stator, a flexible hinge, a piezoelectric stack I, a piezoelectric stack 20, a piezoelectric stack II and a workbench.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the present patent; for the purpose of better illustrating the embodiments, certain elements of the drawings may be omitted, enlarged or reduced and do not represent the actual product dimensions; it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationship depicted in the drawings is for illustrative purposes only and is not to be construed as limiting the present patent.
The basic principle of the present invention is as follows.
As shown in FIG. 1, the composite motion platform mainly comprises a linear guide rail 7, a guide rail sliding block 8, a machine base 6, a workbench 5, a displacement detection device, a linear driver, an ultrasonic actuation driver, a flexible hinge 4 and other components.
The ultrasonic actuation driver comprises an ultrasonic actuation device and a motion switching unit. The ultrasonic actuating device is made of piezoelectric ceramic materials, and ultrasonic vibration of the device is realized by changing the voltage input by the device by utilizing the inverse piezoelectric effect of the piezoelectric materials. The motion switching unit is used for converting ultrasonic high-frequency vibration of the ultrasonic actuating device into feeding motion along the direction of the linear guide rail.
The ultrasonic actuation device comprises: a front plate 1, a rear plate 2 and an ultrasonic actuator 3; the front plate 1 and the rear plate 2 are respectively arranged on a guide rail sliding block 8 so as to be connected with a linear guide rail 7 fixed on the machine base 6; the ultrasonic actuator 3 is located between and connected to the two plates to achieve pretension.
The ultrasonic actuation driver is mounted on the guide rail slide block 8 by a rigid connection mode such as a screw and the like so as to be connected with a linear guide rail fixed on the machine base. The stator of the linear driver is rigidly connected with the machine base 6, and the rotor of the linear driver is rigidly connected with the workbench 5. The ultrasonic actuation driver 3 and the workbench 5 are connected through a flexible hinge 4.
The flexible hinge drives the motion platform in precisely positioned micro motions by elastic deformation.
The working principle of the composite motion platform is as follows:
When macro-movement with large stroke is realized, the ultrasonic actuation driver does not work, and the linear driver directly drives the whole macro-micro composite movement platform to perform linear movement. When the displacement detection device detects that the distance from the moving platform to the target position is smaller than a preset value, the moving platform is switched to precise positioning movement, at the moment, the linear driver does not work, and the precise positioning movement of the moving platform is realized through the ultrasonic actuation driver.
The principle diagram of the ultrasonic actuation driver driving the motion platform to realize micro-feeding motion is shown in fig. 2.
Working principle of ultrasonic actuation driver to drive platform to move:
S—01. At the start of the micro-feed movement, the movement switching unit secures the rear plate 2 to the guide rail as shown in state one.
S_02. The ultrasonic actuator 3 mounted between the front plate 1 and the rear plate 2 is in an elongation stage, and continues to elongate until it reaches a maximum elongation e, and since the rear plate 2 is fixed, the ultrasonic actuator 3 will drive the front plate 1 to move by a displacement equal to the maximum elongation e of the ultrasonic actuator 3. As the distance between the front plate 1 and the rear plate 2 increases continuously during the elongation phase of the ultrasonic actuator 3, the flexible hinge 4 will be elastically deformed as shown in state two.
S_03. The motion switching unit fixes the front plate 1 on the guide rail as shown in state three.
S_04 the motion switching unit removes control of the rear panel 2, leaving the rear panel 2 and the guide rail unfixed. The ultrasonic driver 3 is in a retracted state and continuously retracts until the flexible hinge 4 is restored to the original state, and the driven rear plate 2 moves for a displacement, wherein the displacement is equal to the maximum extension e of the ultrasonic actuator 3, as shown in a state four.
S_05. The flexible hinge 4 is elastically deformed from S_02 to S_04. The flexible hinge is recovered from the deformation, and the workbench 5 is driven to move. The final movement displacement of the table 5 is the maximum extension e of the ultrasonic actuator 3, completing a process movement, as shown in state five.
Taking S_01 to S_05 as a micro-feeding process, repeating the process, continuously accumulating the micro-displacement of each process, and finally reaching the target position.
By changing the control time sequence of the motion switching unit to the front plate 1 and the rear plate 2, micro motion in the opposite direction can be realized.
One specific embodiment of the motion platform provided by the invention is as follows.
As shown in fig. 3 and 4, the motion platform mainly comprises a machine base 6, a linear guide rail 7, a guide rail slide block 8, a piezoelectric actuator 9, a friction block 10, a plate i 11, a plate ii 12, a plate iii 13, a plate iv 14, a grating displacement sensor 15, a linear motor rotor 16, a linear motor stator 17, a flexible hinge 18, a piezoelectric stack i 19, a piezoelectric stack ii 20, a workbench 21 and the like.
The ultrasonic actuation driver consists of an ultrasonic actuation device and a motion switching unit.
The ultrasonic actuating device comprises a plate I11, a plate II 12, a plate III 13, a plate IV 14, a piezoelectric stack I19, a piezoelectric stack II 20 and the like. The plate I11, the plate II 12, the plate III 13 and the plate IV 14 are respectively arranged on the guide rail slide blocks 8 so as to be connected with the linear guide rail 7 fixed on the machine base 6. The piezoelectric stack I19 is positioned between the plate I11 and the plate III 13 on the same linear guide rail, and is rigidly connected with the two plates in a stud-bolt connection mode, and pretension is realized. Symmetrically, the piezoelectric stack II 20 is positioned between the plate II 12 and the plate IV 14, and is rigidly connected with the two plates in a stud-bolt connection mode, and pretension is realized. To achieve better synchronization, panels I11 and III 13, and panels II 12 and IV 14 may be formed integrally.
The motion switching unit comprises 4 fastening mechanisms, wherein the fastening mechanisms comprise piezoelectric actuators 9, friction blocks 10 and the like. The friction block 10 is rigidly connected to the top of the piezoelectric actuator 9 by means of a threaded connection. The fastening mechanism is respectively and rigidly connected with the plate I11, the plate II 12, the plate III 13 and the plate IV 14 in a screw connection mode, and is opposite to the upper part of the linear guide rail 7. When the piezoelectric actuator 9 in the fastening mechanism is electrified, the piezoelectric actuator stretches according to the inverse piezoelectric effect, so that the friction block 10 is abutted against the linear guide rail 7, the friction force is increased, and the effect of fastening the corresponding block is realized.
The linear actuator consists of a linear motor rotor 16 and a linear motor stator 17. The linear motor mover 16 is connected to the table 21, and the linear motor mover 16 can drive the table to perform a large-stroke linear motion by electromagnetic force.
The flexible hinges 18 are detachable notch-type hinges, are respectively arranged in an array mode and are connected with the plate I11, the plate II 12, the plate III 13 and the plate IV 14 in a rigid connection mode through screws. As shown in FIG. 3, table 10 is connected to panels I11, II 12, III 13, IV 14, respectively, by hinges A8.
The grating displacement sensor 15 is connected with the workbench 21, and feeds back the position of the workbench 21 in motion in real time. The position signal detected by the grating displacement sensor 15 is used as feedback, and a closed loop system is built by combining an external controller, so that high-precision linear motion of the workbench 21 is realized.
Specific movement modes of the embodiment:
When macro motion with a large stroke is performed, the linear motor mover 16 drives the table 21 to perform linear motion by electromagnetic force. The grating displacement sensor 15 detects the position of the workbench 21 in real time, when detecting that the current position of the workbench 21 approaches the target position and is smaller than a preset amount, the linear motor is powered off, the linear motor rotor 16 does not drive the workbench 21 any more, and the workbench 21 is driven to perform precise micro-motion through the ultrasonic actuation driver.
When the micro-feeding motion with a small stroke is performed, the voltage input to the piezoelectric stack I19 and the voltage input to the piezoelectric stack II 20 are controlled, so that the two are synchronous and the regular motion of 'extension-retraction' is repeatedly performed. At the beginning of the micro-feed movement, first, the piezoelectric actuator 9 in the fastening device mounted on the plate II 12 and the plate IV 14 is electrically extended, the friction block 10 is abutted against the linear guide rail 7, and the friction force is increased, so that the plate II 12 and the plate IV 14 are fixed on the linear guide rail 7. Secondly, the voltages loaded on the piezoelectric stacks I19 and II 20 gradually rise, and the piezoelectric stacks I19 and II 20 gradually stretch according to the inverse piezoelectric effect. During the elongation process, since panels ii 12 and iv 14 are already secured to linear guide 7 by the fastening mechanism, piezoelectric stacks i 19 and ii 20 will drive panels i 11 and iii 13 to a small displacement motion while simultaneously elastically deforming flexible hinge 18. And when the piezoelectric stacks I19 and II 20 reach the maximum elongation, the plates I11 and III 13 advance forward by a displacement equal to the maximum elongation, and fastening devices arranged on the plates I11 and III 13 are electrified to fix the plates I11 and III 13 on the linear guide rail 7, and simultaneously, the fastening devices on the plates II 12 and IV 14 are in power-off retraction to release the plates II 12 and IV 14. Then, the voltages applied to the piezoelectric stacks i 19 and ii 20 gradually decrease, the piezoelectric stacks i 19 and ii 20 gradually shorten according to the inverse piezoelectric effect, and the flexible hinge 18 is recovered from the deformation. During the shortening process, since panels I11 and III 13 are already fixed to linear guide 7 by the fastening mechanism, flexible hinge 18 drives panels II 12 and IV 14 to perform a small forward displacement motion by elastic restoring action. Finally, when the voltage applied to the piezoelectric stacks I19 and II 20 is reduced to zero, the piezoelectric stacks I19 and II 20 recover to original length, and the flexible hinges 18 recover to original shape, so that the plates II 12 and IV 14 advance forward by a displacement with the length equal to the maximum elongation.
In this process, the flexible hinge 18 is elastically deformed under the action of external force, then returns to its original state, and drives the workbench 21 to move forward, and finally, the workbench 21 is driven by the flexible hinge 18 to advance by an amount equal to the maximum elongation of the piezoelectric stacks i 19 and ii 20, so that the maximum elongation is the stepping displacement of the workbench 21 in this process.
By repeating this process, the minute step displacement of the table 21 can be gradually accumulated, and during the movement, the grating displacement sensor 15 detects the real-time position, and the table 21 finally reaches the target position by closed-loop control.
The micro-feed motion in the opposite direction can be achieved by varying the control timing of the fastening mechanism.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
It is to be understood that the above examples of the present invention are provided by way of illustration only and not by way of limitation of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.
Claims (5)
1. An ultrasonic-driven macro-micro composite motion platform, characterized in that the motion platform comprises: the device comprises a machine base, a linear guide rail, a guide rail sliding block, a linear driver, a workbench, an ultrasonic actuation driver, a displacement detection device and a flexible hinge;
the linear guide rail is fixed on the base;
The guide rail sliding block is arranged on the linear guide rail and can slide on the linear guide rail;
The linear driver drives the workbench to perform linear motion;
the ultrasonic actuation driver is arranged on the guide rail sliding block and is connected with the workbench through the flexible hinge;
The ultrasonic actuation driver comprises: an ultrasonic actuation device and a motion switching unit;
The ultrasonic actuating device utilizes the inverse piezoelectric effect of the piezoelectric material to realize ultrasonic vibration of the device by changing the voltage input by the device;
The motion switching unit is used for converting ultrasonic high-frequency vibration of the ultrasonic actuating device into feeding motion along the direction of the linear guide rail;
the displacement detection device is used for feeding back the position of the workbench in real time;
the flexible hinge drives the workbench to move in precisely positioned micro-motions through elastic deformation;
the motion switching unit comprises a fastening mechanism which is connected with the ultrasonic actuating device;
the fastening mechanism includes: a piezoelectric actuator and a friction block;
the friction block is connected with the top of the piezoelectric actuator;
when the piezoelectric actuator is electrified, the piezoelectric actuator stretches according to the inverse piezoelectric effect, so that a friction block is propped against the linear guide rail to increase friction force, and the effect of fastening the ultrasonic actuating device is realized;
The displacement detection device comprises a grating displacement sensor;
the linear actuator includes: the linear motor rotor and the linear motor stator are formed; the linear motor rotor is connected with the workbench, and can drive the workbench to perform large-stroke linear motion through electromagnetic force action.
2. An ultrasonic-driven macro-micro composite motion platform, characterized in that the motion platform comprises: the device comprises a machine base, a linear guide rail, a guide rail sliding block, a linear driver, a workbench, an ultrasonic actuation driver, a displacement detection device and a flexible hinge;
the linear guide rail is fixed on the base;
The guide rail sliding block is arranged on the linear guide rail and can slide on the linear guide rail;
The linear driver drives the workbench to perform linear motion;
the ultrasonic actuation driver is arranged on the guide rail sliding block and is connected with the workbench through the flexible hinge;
The ultrasonic actuation driver comprises: an ultrasonic actuation device and a motion switching unit;
The ultrasonic actuating device utilizes the inverse piezoelectric effect of the piezoelectric material to realize ultrasonic vibration of the device by changing the voltage input by the device;
The motion switching unit is used for converting ultrasonic high-frequency vibration of the ultrasonic actuating device into feeding motion along the direction of the linear guide rail;
the displacement detection device is used for feeding back the position of the workbench in real time;
The flexible hinge driving the stage to move in a precisely positioned micro-motion by elastic deformation the ultrasonic actuation device comprising: two plates and a piezoelectric stack;
The two plates are respectively arranged on the guide rail sliding blocks so as to be connected with the linear guide rail fixed on the machine base;
the piezoelectric stack is positioned between the two plates and connected with the two plates so as to realize pre-tightening;
The motion switching unit comprises a plurality of fastening mechanisms, wherein the fastening mechanisms are connected with the plate of the ultrasonic actuating device;
the fastening mechanism includes: a piezoelectric actuator and a friction block;
the friction block is connected with the top of the piezoelectric actuator;
when the piezoelectric actuator is electrified, the piezoelectric actuator stretches according to the inverse piezoelectric effect, so that a friction block is propped against the linear guide rail to increase friction force, and the effect of fastening the block is realized;
The displacement detection device comprises a grating displacement sensor;
the linear actuator includes: the linear motor rotor and the linear motor stator are formed; the linear motor rotor is connected with the workbench, and can drive the workbench to perform large-stroke linear motion through electromagnetic force action.
3. The ultrasonically driven macro-micro composite motion platform of claim 1 or 2, wherein the flexible hinge is a detachable notched hinge.
4. The ultrasonic driven macro-micro composite motion platform according to claim 2, wherein the plurality of flexible hinges are detachable incision type hinges; each of the panels is connected to at least one of the flexible hinges.
5. The ultrasonically driven macro-micro composite motion platform according to claim 2 or 4, wherein the two plates are integrally formed.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20120138374A (en) * | 2011-06-15 | 2012-12-26 | 주식회사 삼전 | Piezoelectric vibrator of ultrasonic motor |
| CN207732662U (en) * | 2017-12-19 | 2018-08-14 | 广东工业大学 | A kind of macro micro- composite motion platform of ultrasound-driven |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US10281829B2 (en) * | 2014-12-22 | 2019-05-07 | The Regents Of The University Of Michigan | Vibration-assisted positioning stage |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120138374A (en) * | 2011-06-15 | 2012-12-26 | 주식회사 삼전 | Piezoelectric vibrator of ultrasonic motor |
| CN207732662U (en) * | 2017-12-19 | 2018-08-14 | 广东工业大学 | A kind of macro micro- composite motion platform of ultrasound-driven |
Non-Patent Citations (2)
| Title |
|---|
| 一种轮式直线型超声电机;时运来;赵淳生;黄卫清;;中国电机工程学报;20100325(第09期);68-73 * |
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