CN110752768A - Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism - Google Patents
Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention relates to a piezoelectric precision driving device based on an asymmetric triangular arc flexible hinge mechanism, which consists of a piezoelectric stack, an asymmetric triangular arc flexible hinge mechanism, a rotor, a pre-tightening screw, a pre-tightening wedge block and a base. The piezoelectric stack can be stretched and recovered under the drive of a voltage signal; the asymmetric triangular arc flexible hinge mechanism can realize parasitic inertia motion; the pretightening screw and the pretightening wedge block can adjust the initial pretightening force between the asymmetric triangular arc-shaped flexible hinge mechanism and the rotor; the base plays a supporting role. The main output direction of the piezoelectric stack is perpendicular to the motion direction of the rotor, so that the rigidity of the main output direction of the piezoelectric stack can be fully utilized; the asymmetric triangular arc type flexible hinge mechanism has the advantages of simple structure, good rigidity, capability of bearing larger load and improvement of the output load of the driving device. The device can realize the linear motion of the rotor, and can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro-operation robots and biotechnology.
Description
Technical Field
The invention relates to the field of precise ultraprecise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a piezoelectric precise driving device based on an asymmetric triangular arc flexible hinge mechanism
Background
The precise driving technology with micro/nano level positioning precision is related to high-end scientific and technical fields of ultra-precision processing and measurement, optical engineering, modern medical treatment, aerospace technology and the likeKey technology. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving device. The traditional driving device has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving device. The piezoelectric ceramic driver has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. In the conventional piezoelectric inertia driving device, a piezoelectric element and a rotor mass block are usually arranged in parallel in the motion direction of the piezoelectric element, the pretightening force is perpendicular to the main output direction of the piezoelectric element, and the output load of the whole device mainly depends on the friction force generated by the pretightening force. However, piezoelectric elements, such as piezoelectric stacks, usually employ d33The working mode of (2) is that the rigidity of the section perpendicular to the main output direction is small, the generated pretightening force is small, so that the output load of the whole device is greatly reduced, and the large rigidity of the piezoelectric element in the main output direction is not fully utilized. Therefore, it is necessary to design a novel piezoelectric precision driving device which makes full use of the rigidity of the piezoelectric stack in the main output direction, generates pretightening force and driving force through the parasitic inertia motion of the asymmetric triangular arc type flexible hinge mechanism, and further improves the output load of the piezoelectric driving device.
Disclosure of Invention
The invention aims to provide a piezoelectric precision driving device based on an asymmetric triangular arc flexible hinge mechanism, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the linear motion output function.
According to the invention, the main output direction of the piezoelectric stack is perpendicular to the moving direction of the rotor, the asymmetric triangular arc type flexible hinge mechanism with good rigidity output characteristic is adopted, and the composite load is transferred through the asymmetric triangular arc type flexible hinge mechanism, so that the linear motion of the rotor is finally realized.
The above object of the present invention is achieved by the following technical solutions:
a piezoelectric precision driving device of an asymmetric triangular arc type flexible hinge mechanism mainly comprises a rotor, a piezoelectric stack, a pre-tightening wedge block, a pre-tightening screw, the asymmetric triangular arc type flexible hinge mechanism and a base, and the piezoelectric linear precision driving is realized by the precision driving device through a parasitic inertia principle. The rotor (1) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw; the asymmetric triangular arc type flexible hinge mechanism (5) is arranged on the base through screws; the piezoelectric stack (2) is arranged in the asymmetric triangular arc-shaped flexible hinge mechanism (5), and the main output direction of the piezoelectric stack is perpendicular to the motion direction of the rotor (1); the pre-tightening wedge block (3) is arranged between the piezoelectric stack (2) and the asymmetric triangular arc-shaped flexible hinge mechanism (5) and can be pre-tightened through the pre-tightening wedge block (3); the pretightening screw (4) is fastened on the base and is contacted with the lower end of the asymmetric arc-shaped hinge, and the arc-shaped structure at the upper end of the asymmetric triangular arc-shaped flexible hinge mechanism (5) is contacted with the rotor (1); the base (6) plays a role in supporting, installing and fixing other parts, and the rotor (1) and the asymmetric triangular arc type flexible hinge mechanism (5) are installed on the base (6) through screws.
The main output direction of the piezoelectric stack (2) is perpendicular to the motion direction of the rotor (1), so that the larger rigidity of the piezoelectric stack (2) in the main output direction is fully utilized; the asymmetric triangular arc flexible hinge mechanism (5) is good in rigidity output performance, the upper end of the asymmetric triangular arc flexible hinge mechanism can bear larger pretightening force, the movement is stable and efficient, the piezoelectric stack (2) is electrified and transmits the driving force of the linear movement of the rotor (1) and the pretightening force between the asymmetric triangular arc flexible hinge mechanism (5) and the rotor (1) through the asymmetric triangular arc flexible hinge mechanism (5), and therefore the output load of the piezoelectric driving device is greatly improved. Linear step-by-step motion in a certain direction can be realized.
The main advantages of the invention are: the main output direction of the piezoelectric stack is perpendicular to the moving direction of the rotor by using a parasitic inertia motion principle, and the load is transferred by using the parasitic inertia motion of the asymmetric triangular arc type flexible hinge mechanism, so that the output load of the driving device is greatly improved, and the linear motion of the rotor is realized. The driving device has the advantages of high driving reliability, good stability, high working efficiency and the like. The micro-motion precision control device can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like, can greatly improve the micro-motion precision of the micro-electro-mechanical systems, and simultaneously improves the disadvantages of complex and large structure, unreliable performance and the like of the traditional driver. The invention has the advantages of simple structure, compact arrangement, stable movement, high efficiency, low investment, high benefit and the like, and has wider application prospect.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic left side view of the present invention;
fig. 4 is a schematic view of an asymmetric triangular arc-type flexible hinge mechanism of the present invention.
In the figure:
1. a mover; 2, piezoelectric stack; 3, pre-tightening the wedge block;
4. pre-tightening the screw; 5, an asymmetric triangular arc type flexible hinge mechanism; and 6, a base.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, the novel piezoelectric precision driving device based on the asymmetric triangular arc flexible hinge mechanism mainly comprises a rotor, a piezoelectric stack, a pre-tightening wedge block, a pre-tightening screw, the asymmetric triangular arc flexible hinge mechanism and a base, and the precision driving device realizes piezoelectric linear precision driving through a parasitic inertia principle. The rotor (1) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw; the asymmetric triangular arc type flexible hinge mechanism (5) is arranged on the base through screws; the piezoelectric stack (2) is arranged in the asymmetric triangular arc-shaped flexible hinge mechanism (5), and the main output direction of the piezoelectric stack is perpendicular to the motion direction of the rotor (1); the pre-tightening wedge block (3) is arranged between the piezoelectric stack (2) and the asymmetric triangular arc-shaped flexible hinge mechanism (5) and can be pre-tightened through the pre-tightening wedge block (3); the pre-tightening screw (4) is fastened on the base and is in contact with the lower end of the asymmetric arc type hinge, the asymmetric triangular arc type flexible hinge mechanism (5) is of an asymmetric arc type structure, and the arc structure at the upper end of the asymmetric triangular arc type flexible hinge mechanism is in contact with the rotor (1); the base (6) plays a role in supporting, installing and fixing other parts, and the rotor (1) and the asymmetric triangular arc type flexible hinge mechanism (5) are installed on the base (6) through screws.
The main output direction of the piezoelectric stack (2) is perpendicular to the motion direction of the rotor (1), so that the larger rigidity of the piezoelectric stack (2) in the main output direction is fully utilized; the asymmetric triangular arc flexible hinge mechanism (5) is good in rigidity output performance, the upper end of the asymmetric triangular arc flexible hinge mechanism can bear larger pretightening force, the movement is stable and efficient, the piezoelectric stack (2) is electrified and transmits the driving force of the linear movement of the rotor (1) and the pretightening force between the asymmetric triangular arc flexible hinge mechanism (5) and the rotor (1) through the asymmetric triangular arc flexible hinge mechanism (5), so that the output load of the piezoelectric driving device is greatly improved, and the linear stepping movement is realized.
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
realizing the stepping linear motion of the rotor, and in an initial state: the contact distance between the asymmetric triangular arc-shaped flexible hinge mechanism (5) and the rotor (1), namely the initial pretightening force in the parasitic motion process, is adjusted by adjusting the pretightening screw (4). The piezoelectric stack (2) is controlled by a piezoelectric signal in the form of sawtooth wave or triangular wave. The piezoelectric stack (2) is not electrified, and the system is in a free state; when the piezoelectric stack (2) is electrified, the piezoelectric stack is extended through the inverse piezoelectric effect to push the asymmetric triangular arc flexible hinge mechanism (5) to deform, the rotor (1) is pressed by the asymmetric triangular arc flexible hinge mechanism (5), and the rotor (1) is driven to move by the asymmetric triangular arc flexible hinge mechanism (5) under the action of static friction force between the rotor and the rotor (1); when the piezoelectric stack (2) is de-energized and rapidly retreats to the initial position, the asymmetric triangular arc type flexible hinge mechanism (5) also restores to the initial state, and the rotor (1) is still kept at the moved position under the action of inertia force, so that one motion cycle of the driving device is completed. By repeating the steps, the driving device can realize the stepping linear motion in the required direction, and obtain larger output displacement.
The invention relates to a novel piezoelectric precision driving device based on an asymmetric triangular arc flexible hinge mechanism, which adopts a piezoelectric stack as a driving source and adopts the asymmetric triangular arc flexible hinge mechanism as a power transmission element, has the characteristics of small heat generation, stable driving, reliability and high efficiency, and can realize the functions of stepping linear precision motion and the like.
Claims (5)
1. The utility model provides a piezoelectricity precision driving device based on flexible hinge mechanism of asymmetric triangle-shaped circular arc formula, includes active cell (1), piezoelectric stack (2), pretension voussoir (3), pretension screw (4), the flexible hinge mechanism of asymmetric triangle-shaped circular arc formula (5) and base (6), its characterized in that: the precise driving device realizes micro-nano linear precise driving by utilizing a parasitic inertia principle. The rotor (1) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base (6) through a screw to realize high-precision linear motion; the asymmetric triangular arc type flexible hinge mechanism (5) is arranged on the base through screws; the piezoelectric stack (2) is arranged in the asymmetric triangular arc-shaped flexible hinge mechanism (5) and can be pre-tightened through the pre-tightening wedge block (3); the pretightening screw (4) can adjust the initial pretightening force between the asymmetric triangular arc-shaped flexible hinge mechanism (5) and the rotor (1); the precision driving device drives the asymmetric triangular arc-shaped flexible hinge mechanism (5) to realize parasitic inertia motion by controlling the piezoelectric stack (2), and then drives the rotor (1) to realize stepping linear precision motion.
2. The piezoelectric precision driving device based on the asymmetric triangular arc flexible hinge mechanism according to claim 1, wherein the designed asymmetric triangular arc flexible hinge mechanism (5) can be made of spring steel, high-strength aluminum alloy and other materials, and is connected through two arc flexible hinges to form an asymmetric triangular structure, so that the rigidity output characteristic is good, and in parasitic inertia motion, the contact surface of the asymmetric triangular arc flexible hinge mechanism (5) and the rotor (1) can bear large pretightening force, thereby being beneficial to improving the output load of the piezoelectric driving device.
3. The piezoelectric precision driving device based on the asymmetric triangular arc flexible hinge mechanism according to claim 1, wherein the main output direction of the piezoelectric stack (2) is perpendicular to the moving direction of the rotor (1), and the stress direction of the asymmetric triangular arc flexible hinge mechanism (5) is consistent with the main output direction of the piezoelectric stack (2), so that the larger rigidity of the main output direction of the piezoelectric stack (2) is fully utilized, and the output load of the piezoelectric driving device is greatly improved.
4. The piezoelectric precision driving device based on the asymmetric triangular arc flexible hinge mechanism according to claim 1, wherein a parasitic inertia driving principle of the asymmetric triangular arc flexible hinge mechanism (5) is adopted, a single piezoelectric stack (2) is electrically driven to drive the asymmetric triangular arc flexible hinge mechanism (5) to generate composite force in two directions, the force in one direction is used as driving force to drive the rotor (1) to do linear motion, and the force in the other direction applies pretightening force to the upper jacking rotor (1).
5. The piezoelectric precision driving device based on the asymmetric triangular arc flexible hinge mechanism according to claim 1, wherein the piezoelectric stack (2) is controlled by a piezoelectric signal in the form of sawtooth wave or triangular wave, so that the piezoelectric stack (2) is slowly elongated to push the asymmetric triangular arc flexible hinge mechanism to perform compound motion, thereby realizing the linear movement of the mover (1); the piezoelectric stack (2) rapidly retreats under the control of a piezoelectric signal, and the rotor (1) is kept still under the action of inertia.
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| CN201910291975.7A CN110752768B (en) | 2019-04-08 | 2019-04-08 | Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism |
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| CN201910291975.7A CN110752768B (en) | 2019-04-08 | 2019-04-08 | Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism |
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| JP2000022231A (en) * | 1998-07-06 | 2000-01-21 | Murata Mfg Co Ltd | Piezoelectric device |
| CN101262182A (en) * | 2008-04-15 | 2008-09-10 | 华南农业大学 | Compound vibrator line ultrasonic electromotor |
| CN104320016A (en) * | 2014-10-13 | 2015-01-28 | 吉林大学 | Stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform |
| CN105827143A (en) * | 2016-06-06 | 2016-08-03 | 长春工业大学 | Rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor and composite excitation method thereof |
| US20180097457A1 (en) * | 2015-08-26 | 2018-04-05 | Soochow University | One-dimensional large-stroke precise positioning platform |
| CN108306546A (en) * | 2018-03-04 | 2018-07-20 | 长春工业大学 | Compact dual actuation component piezoelectricity stick-slip Drive And Its Driving Method |
| CN108322090A (en) * | 2018-03-04 | 2018-07-24 | 长春工业大学 | External stirs type rotary piezoelectric stick-slip driver and its driving method |
| US20190074778A1 (en) * | 2016-03-15 | 2019-03-07 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelectric drive |
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2019
- 2019-04-08 CN CN201910291975.7A patent/CN110752768B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000022231A (en) * | 1998-07-06 | 2000-01-21 | Murata Mfg Co Ltd | Piezoelectric device |
| CN101262182A (en) * | 2008-04-15 | 2008-09-10 | 华南农业大学 | Compound vibrator line ultrasonic electromotor |
| CN104320016A (en) * | 2014-10-13 | 2015-01-28 | 吉林大学 | Stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform |
| US20180097457A1 (en) * | 2015-08-26 | 2018-04-05 | Soochow University | One-dimensional large-stroke precise positioning platform |
| US20190074778A1 (en) * | 2016-03-15 | 2019-03-07 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelectric drive |
| CN105827143A (en) * | 2016-06-06 | 2016-08-03 | 长春工业大学 | Rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor and composite excitation method thereof |
| CN108306546A (en) * | 2018-03-04 | 2018-07-20 | 长春工业大学 | Compact dual actuation component piezoelectricity stick-slip Drive And Its Driving Method |
| CN108322090A (en) * | 2018-03-04 | 2018-07-24 | 长春工业大学 | External stirs type rotary piezoelectric stick-slip driver and its driving method |
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