CN214674946U

CN214674946U - Device for improving forward and reverse output consistency of stick-slip piezoelectric driver

Info

Publication number: CN214674946U
Application number: CN202120889167.3U
Authority: CN
Inventors: 黄虎; 王钰铭; 魏靖松; 汤纪洲
Original assignee: Jilin University
Current assignee: Jilin University
Priority date: 2021-04-23
Filing date: 2021-04-23
Publication date: 2021-11-09
Anticipated expiration: 2031-04-23

Abstract

The utility model relates to a promote device of stick-slip formula piezoelectric actuator forward reverse output uniformity belongs to the precision machinery field. The device consists of a base, a positioning unit and a driving unit, wherein the positioning unit is connected with the base, and the driving unit is connected with the positioning unit. The driving unit innovatively uses a double-foot flexible hinge structure, and a symmetrical structure is formed by the driving unit, the piezoelectric stack, the rigid supporting plate and the wedge block. The utility model has the advantages that: the method has the advantages that high output forward and reverse consistency, stability and repeatability can be realized for different control signals, the control signals are simple and easy to assemble, a new solution is provided for solving the problem of inconsistent forward and reverse output of the stick-slip piezoelectric driver under the condition of simple control signals, and the method has important significance for expanding the application range of the stick-slip piezoelectric driver and developing a precision positioning technology.

Description

Device for improving forward and reverse output consistency of stick-slip piezoelectric driver

Technical Field

The utility model relates to an accurate machinery, in particular to promote device of stick-slip formula piezoelectric actuator positive reverse output uniformity.

Background

The piezoelectric driving technology is based on the inverse piezoelectric effect of piezoelectric ceramic material, and has the features of simple structure, flexible design, high precision, high resolution, etc. and its mechanical deformation is controlled to produce rotation or linear motion. The precise positioning and driving technology has great development prospect in future microscopic research work. The piezoelectric actuator is widely applied to high-tech fields such as micro-nano control, precision manufacturing, micro-electro-mechanical systems and the like, and various piezoelectric actuators are developed to meet the requirement of precise positioning. In order to achieve large-stroke motion, several stepping piezoelectric driving principles have been proposed, which can be classified into inchworm drivers, stick-slip drivers, impact drivers, ultrasonic drivers, etc. according to the working principle. Compared with other types of actuators, stick-slip piezoelectric actuators have the advantages of simple structure, convenience in control and the like, and have been widely researched in recent years. However, many previous stick-slip drives suffer from the problem that the output performance of the forward motion is difficult to match the output performance in the opposite direction. The inconsistency of forward and reverse motion at the same driving voltage and driving frequency can cause complex control problems. In order to achieve consistency of the back and forth motion, different control parameters must be employed. For most previous stick-slip drives, the asymmetric configuration is one of the primary causes of inconsistent back and forth motion. To address this problem, some stick-slip piezoelectric actuators use two identical drive mechanisms and are assembled symmetrically. However, since the forward drive module and the reverse drive module of the driver are independent of each other, large assembly errors and manufacturing errors are unavoidable, and it is rather difficult to achieve good consistency in both directions.

In summary, the structural design of the driver and the input of the control signal are always the key factors influencing the consistency of the forward and reverse outputs of the stick-slip piezoelectric driver. On the premise of ensuring that the input signal is stable and unchanged, research and design on a flexible hinge structure of the stick-slip piezoelectric driver are needed.

Disclosure of Invention

An object of the utility model is to provide a promote device and method of stick-slip formula piezoelectric actuator positive reverse output uniformity to solve the above-mentioned problem that exists at present. The utility model discloses a design special symmetry hinge structure and simple and easy assembly method, simplified because the complicated control problem that the structure asymmetry leads to, like input signal's design. The input of signals under different frequencies and voltages has the universality of consistent forward and reverse output, and the output requirements of different step lengths and speeds are met. The initial position and the pre-tightening force are adjusted through the wedge block and the clearance fine adjustment device, an ideal state is easy to find, the assembling and debugging difficulty is reduced, the influence of assembling errors and manufacturing errors is reduced, and the stability and the repeatability of output are ensured. The utility model discloses a solve and glue the inconsistent problem of forward and reverse output of smooth formula piezoelectric driver under simple control signal and provide a new solution. The research has important significance for expanding the application range of the stick-slip piezoelectric driver and developing a precision positioning technology.

The above object of the utility model is realized through following technical scheme:

the device for improving the consistency of the forward and reverse output of the stick-slip piezoelectric driver comprises a base (1), a positioning unit and a driving unit; the positioning unit is connected with the base (1) through a screw, and the driving unit is connected with the positioning unit.

The positioning unit consists of a clearance fine-tuning device (2), a sliding block base (3), a central positioning rod (4) and a hinge base (12); the sliding block base (3) is connected with the clearance fine-tuning device (2) through a screw; the central positioning rod (4) is connected with the hinge base (12) through a set screw (9).

The driving unit consists of a guide rail sliding block (5), a double-foot flexible hinge (6), a rigid supporting plate (8) and two piezoelectric stacks (11); the piezoelectric stacks (11) are placed in grooves between the double-foot flexible hinges (6) and the rigid support plate (8) and are connected in an interference fit mode through the wedge blocks (7), connecting lines of two feet of the double-foot flexible hinges (6) and the centers of the round holes are perpendicular to the two piezoelectric stacks (11) respectively, and the guide rail sliding blocks (5) move horizontally along the direction of the guide rail.

The guide rail sliding block (5) is connected with the sliding block base (3) through a screw; the double-foot flexible hinge (6) is connected with the central positioning rod (4) through a bearing (10), and the bearing (10) is fixed on the side surface of the double-foot flexible hinge (6) through a fastening screw; the rigid bearing plate (8) is connected with the hinge base (12) through screws.

The method for improving the consistency of the forward and reverse output of the stick-slip piezoelectric driver comprises the steps of adjusting a clearance fine adjustment device (2) to enable a double-foot flexible hinge (6) and a guide rail sliding block (5) to be in direct contact and have a certain pretightening force; the assembling tightness of the wedge block (7) is adjusted, and the assembling errors among the double-foot flexible hinge (6), the rigid support plate (8) and the piezoelectric stack (11) are reduced; triangular wave signals with certain frequency and voltage are selected, and signals are respectively input to the two piezoelectric stacks (11), so that the forward and reverse output switching is realized.

One side of the piezoelectric stacks (11) receives an input control signal and generates inverse piezoelectric effect deformation, the double-foot flexible hinge (6) generates tiny deflection and local deformation around the bearing (10) by receiving the deformation of the piezoelectric stacks (11), and the guide rail sliding block (5) horizontally moves along the guide rail direction through friction force to form positive output; when the other side of the piezoelectric stack (11) receives the same input control signal, the reverse output is formed due to the symmetry of the structure.

The beneficial effects of the utility model reside in that: the problem of complex control caused by asymmetric structure is simplified, and the consistency of forward and reverse output under simple and single input signals is realized; secondly, the signal input under different frequencies and voltages has the universality of consistent forward and reverse output, and the output requirements of different step lengths and speeds are met; meanwhile, the structure is easy to find an ideal state, the assembly and debugging difficulty is reduced, the influence of assembly errors is reduced, and the stability and the repeatability of output are ensured. A new solution is provided for solving the problem of inconsistent forward and reverse outputs of the stick-slip piezoelectric driver under a simple control signal. The method has important significance for expanding the application range of the stick-slip piezoelectric driver and developing a precision positioning technology. Can be used in the fields of precision machinery, microelectronic manufacturing industry, precision optical systems, micromanipulation, precision/ultra-precision machining and the like.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate example embodiments of the invention and together with the description serve to explain the invention without limitation.

Fig. 1 is a schematic perspective view of the device for improving the forward and reverse output consistency of the stick-slip piezoelectric actuator according to the present invention;

fig. 2 is a top view of the biped flexible hinge of the present invention;

fig. 3 is a timing control diagram of the driving voltage according to the present invention;

FIG. 4 is a schematic diagram of the output displacement of the device of the present invention at 10Hz without voltage signal;

in the figure: 1. a base; 2. a gap fine-tuning device; 3. a slider base; 4. a central positioning rod; 5. a guide rail slider; 6. a biped flexible hinge; 7. a wedge block; 8. a rigid support plate; 9. tightening the screw; 10. a bearing; 11. a piezoelectric stack; 12. a hinge base.

Detailed Description

The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.

Referring to fig. 1, the device for improving the consistency of the forward and reverse outputs of the stick-slip piezoelectric actuator of the present invention comprises a base (1), a positioning unit and a driving unit; the positioning unit is connected with the base (1) through a screw, and the driving unit is connected with the positioning unit. The positioning unit consists of a clearance fine-tuning device (2), a sliding block base (3), a central positioning rod (4) and a hinge base (12); the sliding block base (3) is connected with the clearance fine-tuning device (2) through a screw; the central positioning rod (4) is connected with the hinge base (12) through a set screw (9). The driving unit consists of a guide rail sliding block (5), a double-foot flexible hinge (6), a rigid supporting plate (8) and two piezoelectric stacks (11); the piezoelectric stack (11) is placed in a groove between the double-foot flexible hinge (6) and the rigid support plate (8), interference fit connection is formed through the wedge block (7), and the guide rail sliding block (5) horizontally moves along the direction of the guide rail. The guide rail sliding block (5) is connected with the sliding block base (3) through a screw; the double-foot flexible hinge (6) is connected with the central positioning rod (4) through a bearing (10), and the bearing (10) is fixed on the side surface of the double-foot flexible hinge (6) through a fastening screw; the rigid bearing plate (8) is connected with the hinge base (12) through screws.

As shown in fig. 2, the two-foot flexible hinge (6) of the present invention respectively adopts two arcs with different radii at two feet, the joint of the two arcs is the highest point of the structure, and is directly connected with the guide rail slider (5) to ensure the double-point contact, and the contact point is parallel to the central connecting line of the bearing (10) and the corresponding hinge edge, and is perpendicular to the length direction of the two piezoelectric stacks (11); one side of the middle part of the double-foot flexible hinge (6) is horizontally opened to the round hole by using a threaded hole, and the joint of the double-foot flexible hinge and the piezoelectric stack (11) adopts a straight round flexible hinge as a buffer, so that the problem of stress concentration is solved. The right stack in the piezoelectric stacks (11) receives an input control signal to generate inverse piezoelectric effect deformation, the double-foot flexible hinge (6) generates micro deflection and local deformation around the bearing (10) by receiving the deformation of the piezoelectric stacks (11), and the guide rail sliding block (5) horizontally moves along the guide rail direction by friction force to form forward output; when the left stack in the piezoelectric stack (11) receives the same input control signal, the reverse output is formed due to the symmetry of the structure.

Referring to fig. 3, the input voltage drives the single piezoelectric stack with the waveform, which is a timing control diagram of the driving voltage according to the present invention.

Referring to fig. 4, for the utility model discloses output displacement schematic diagram under the different voltage signal of 10Hz, the result shows that under the different signal effect circumstances, positive reverse output uniformity can obtain guaranteeing.

The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made to the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a promote device of stick-slip formula piezoelectric actuator forward reverse output uniformity which characterized in that: comprises a base (1), a positioning unit and a driving unit; the positioning unit is connected with the base (1) through a screw, and the driving unit is connected with the positioning unit.

2. The device for improving the forward and reverse output consistency of the stick-slip piezoelectric driver as recited in claim 1, wherein: the positioning unit consists of a clearance fine-tuning device (2), a sliding block base (3), a central positioning rod (4) and a hinge base (12); the sliding block base (3) is connected with the clearance fine-tuning device (2) through a screw; the central positioning rod (4) is connected with the hinge base (12) through a set screw (9).

3. The device for improving the forward and reverse output consistency of the stick-slip piezoelectric driver as recited in claim 1, wherein: the driving unit consists of a guide rail sliding block (5), a double-foot flexible hinge (6), a rigid supporting plate (8) and two piezoelectric stacks (11); the piezoelectric stack (11) is placed in a groove between the double-foot flexible hinge (6) and the rigid support plate (8) and is in interference fit connection through the wedge block (7); the guide rail sliding block (5) horizontally moves along the guide rail direction.

4. The device for improving the forward and reverse output consistency of the stick-slip piezoelectric driver as recited in claim 3, wherein: the guide rail sliding block (5) is connected with the sliding block base (3) through a screw; the double-foot flexible hinge (6) is connected with the central positioning rod (4) through a bearing (10), and the bearing (10) is fixed on the side surface of the double-foot flexible hinge (6) through a fastening screw; the rigid bearing plate (8) is connected with the hinge base (12) through screws.

5. The device for improving the forward and reverse output consistency of the stick-slip piezoelectric driver as recited in claim 3, wherein: the double-foot flexible hinge (6) respectively adopts two arcs with different radiuses at two feet, the joint of the two arcs is the highest point of the structure and is directly connected with the guide rail sliding block (5) to ensure double-point contact, and the connecting line of the contact point and the center of the bearing (10) is parallel to the corresponding hinge edge and is vertical to the length direction of the two piezoelectric stacks (11); one side of the middle part of the double-foot flexible hinge (6) is horizontally opened to the round hole by using a threaded hole; the connection part of the double-foot flexible hinge (6) and the piezoelectric stack (11) adopts a straight round flexible hinge as a buffer, so that the problem of stress concentration is solved.