CN114227559B - Piezoelectric driving micro clamp with three-stage displacement amplification and capable of realizing parallel clamping - Google Patents

Piezoelectric driving micro clamp with three-stage displacement amplification and capable of realizing parallel clamping Download PDF

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CN114227559B
CN114227559B CN202210021502.7A CN202210021502A CN114227559B CN 114227559 B CN114227559 B CN 114227559B CN 202210021502 A CN202210021502 A CN 202210021502A CN 114227559 B CN114227559 B CN 114227559B
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displacement amplification
amplification mechanism
stage
stage displacement
gripper
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CN114227559A (en
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马海峰
郭中义
陈杰
刘战强
宋清华
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Shandong University
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Shandong University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00Clamps
    • B25B5/02Clamps with sliding jaws
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00Clamps
    • B25B5/16Details, e.g. jaws, jaw attachments
    • B25B5/163Jaws or jaw attachments

Abstract

The invention discloses a piezoelectric driving micro-gripper with three-stage displacement amplification and capable of realizing parallel clamping, which comprises a piezoelectric ceramic driving piece, a first-stage displacement amplification mechanism, a second-stage displacement amplification mechanism and a third-stage displacement amplification mechanism, wherein the piezoelectric ceramic driving piece is connected with the first-stage displacement amplification mechanism, the first-stage displacement amplification mechanism is connected with the second-stage displacement amplification mechanism in series, two output ends of the second-stage displacement amplification mechanism are respectively connected with one third-stage displacement amplification mechanism, the two third-stage displacement amplification mechanisms are connected in parallel, and the output ends of the two third-stage displacement amplification mechanisms are respectively connected with two clamping parts of the gripper.

Description

Piezoelectric driving micro clamp with three-stage displacement amplification and capable of realizing parallel clamping
Technical Field
The invention relates to the field of piezoelectric drive, in particular to a piezoelectric drive micro-gripper which is provided with a three-stage displacement amplification mechanism and can realize parallel clamping.
Background
In recent years, domestic scholars have designed micro-clamps based on different driving principles, such as Piezoelectric (PZT) drive, electrostatic drive, thermal drive, electromagnetic drive, shape memory alloy drive, and pneumatic drive. The electrostatic driving is mainly realized by the electrostatic comb driver, and the electrostatic comb type driving device has the advantages of high efficiency, high response speed, low energy consumption, simple structure and the like. It also has the obvious disadvantage of low clamping force. The thermal drive is realized in the form of expansion caused by the use of an electrically conductive material. Its advantages are high drive power and low response speed. In contrast, PZT driven micro-clamps are popular in both industrial and academic applications. The piezoelectric transducer not only inherits the advantages of high response speed, compact structure, low price and the like of the PZT material, but also has the characteristics of high displacement precision and large structural rigidity. However, the output displacement of PZT driven micro-grippers is limited by the piezoelectric strain coefficient. Therefore, a displacement amplification mechanism is required.
Compliant mechanisms are widely used in the PZT field to produce larger output displacements because they have the advantages of increased output displacement, friction avoidance, repeatable motion, and compact structure. Many scholars at home and abroad design and manufacture different PZT drive micro-clamp body structures by using different compliant structures. Through looking up documents and other data widely, the displacement amplification ratio of the micro clamp designed at home and abroad is basically not more than 30, in addition, if the parallel movement of the jaw can be realized, the clamping operation is more reliable and easier, and meanwhile, the high displacement amplification ratio means that the deformation of the clamp body is large, the structural rigidity is reduced, the inherent frequency of the structure is reduced, and the actual working bandwidth of the micro clamp is reduced. Therefore, on the premise of ensuring higher working bandwidth, a novel micro clamp which has higher displacement amplification ratio and larger stroke and can realize parallel clamping needs to be designed.
Disclosure of Invention
In order to solve the problems, the invention provides a piezoelectric driving micro-gripper which has high amplification ratio and large stroke and can realize parallel clamping. The device is formed by connecting two bridge type amplification mechanisms and a lever type amplification mechanism in series, and a pair of parallelogram mechanisms is integrated at the tail end of the lever displacement amplification mechanism so as to realize high amplification ratio, large stroke and parallel clamping. And the key structure parameters are optimally selected through response surface analysis. The effectiveness of the micro-gripper is verified through simulation.
In order to achieve the purpose, the invention is realized by the following technical scheme:
the embodiment of the invention provides a piezoelectric driving micro-gripper with three-stage displacement amplification and capable of realizing parallel clamping, which comprises a piezoelectric ceramic driving piece, a first-stage displacement amplification mechanism, a second-stage displacement amplification mechanism and a third-stage displacement amplification mechanism, wherein the piezoelectric ceramic driving piece is connected with the first-stage displacement amplification mechanism, the first-stage displacement amplification mechanism is connected with the second-stage displacement amplification mechanism in series, two output ends of the second-stage displacement amplification mechanism are respectively connected with the third-stage displacement amplification mechanism, the two third-stage displacement amplification mechanisms are connected in parallel, and the output ends of the two third-stage displacement amplification mechanisms are respectively connected with two clamping parts of the gripper.
As a further technical scheme, the primary displacement amplification mechanism is a back-ward type bridge type displacement amplification mechanism.
As a further technical scheme, the secondary displacement amplification mechanism is a forward type bridge type displacement amplification mechanism.
As a further technical scheme, the three-stage displacement amplifying mechanism is a lever displacement amplifying mechanism.
As a further technical scheme, the lever displacement amplification mechanism is a parallelogram mechanism.
As a further technical scheme, the piezoelectric driving micro clamp capable of amplifying three-stage displacement and realizing parallel clamping further comprises a base, and the piezoelectric driving micro clamp is fixed on the base.
The beneficial effects of the above-mentioned embodiment of the present invention are as follows:
in order to realize ultrahigh displacement amplification ratio and high clamping stroke, the invention designs a novel three-stage displacement amplification form. The back-ward type bridge type displacement amplification mechanism, the forward type bridge type displacement amplification mechanism and the lever displacement amplification mechanism are ingeniously combined, so that three-stage amplification of the piezoelectric driving micro clamp is realized; in order to ensure the realization of higher working bandwidth while realizing displacement amplification, the first stage and the second stage adopt a bridge type displacement amplification mechanism with higher structural rigidity; meanwhile, when the piezoelectric driver generates output displacement, in order to realize inward clamping action of the jaw, a back ward bridge type displacement amplification mechanism is designed in the first skillful stage, and a forward bridge type displacement amplification mechanism is designed in the first stage.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are included to illustrate an exemplary embodiment of the invention and not to limit the invention.
Fig. 1 is a backward type bridge type displacement amplification mechanism.
FIG. 2 is a forward type bridge displacement amplification mechanism;
FIG. 3 is a lever displacement amplification mechanism;
FIG. 4 is a schematic view of a micro-gripper according to the present invention;
FIG. 5 is a schematic view of a straight beam type flexible hinge structure;
FIG. 6 is sensitivity of key parameter changes to jaw output displacement;
FIG. 7 is a graph of sensitivity of key parameter changes to natural frequency of the micro-gripper;
in the figure: the spacing or dimensions between each other are exaggerated to show the location of the various parts, and the illustration is for illustrative purposes only.
The device comprises a base 1, a fixing bolt 2, a clamp 3, a parallelogram mechanism 4, a first-stage displacement amplification mechanism 5, a second-stage displacement amplification mechanism 6, a third-stage displacement amplification mechanism 7 and a piezoelectric ceramic driving piece 8.
Detailed Description
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof;
the embodiment provides a piezoelectric driving micro clamp with high amplification ratio and large stroke and capable of realizing parallel clamping. And the key structure parameters are optimally selected through response surface analysis. The effectiveness of the micro-gripper is verified through simulation. The results show that the microcap developed has a displacement magnification of 45.58 and a motion stroke of 683.70 μm.
The structure of the micro-clamp body is formed by connecting three stages of displacement amplification mechanisms in series, wherein the first stage displacement amplification and the second stage displacement amplification are both bridge type displacement amplification mechanisms, and particularly, in order to ensure the correct transmission of motion, the first stage is a backward type bridge type displacement amplification mechanism, and the second stage is a forward type bridge type displacement amplification mechanism; in order to obtain higher displacement amplification ratio, a three-level displacement amplification mechanism is added, and a lever displacement amplification mechanism is adopted, wherein the displacement amplification mechanism is shown in fig. 1, fig. 2 and fig. 3, fig. 1 is a backward bridge type displacement amplification mechanism which is integrally in an up-and-down symmetrical structure and comprises two input ends and one output end, and fig. 2 is a forward bridge type displacement amplification mechanism; the whole body is of a bilateral symmetry structure which comprises an input end and two output ends, and a lever displacement amplifying mechanism is shown in figure 3; which comprises an input and an output. And the third level lever displacement amplification mechanism is a parallelogram mechanism, which ensures that parallel clamping is realized while high displacement amplification ratio and large clamping stroke are realized, the two third level lever displacement amplification mechanisms are arranged symmetrically left and right relative to the central line of the piezoelectric driving micro-clamp, the structure of the micro-clamp body disclosed in the embodiment is shown in figure 2, the piezoelectric ceramic driving piece 8 is connected with the input end of the first level displacement amplification mechanism 5, the output end of the first level displacement amplification mechanism 5 is connected with the input end of the second level displacement amplification mechanism 6, the two output ends of the second level displacement amplification mechanism 6 are respectively connected with one third level displacement amplification mechanism 7, the two third level displacement amplification mechanisms 7 are mutually connected in parallel, the output ends of the two third level displacement amplification mechanisms 7 are respectively connected with the two clamping parts of the clamp, wherein the piezoelectric ceramic driving piece 8 is made of lead zirconate titanate piezoelectric ceramic.
The following multi-objective parameter optimization algorithm based on response surface analysis and genetic algorithm optimizes the structure of each component, specifically as follows:
the maximum output displacement of the jaw and the first-order natural frequency of the micro-gripper are two design targets. The multi-objective parameter optimization based on response surface analysis and genetic algorithm comprises the following mathematical expressions:
S=maxD(Z)
N=maxE(Z)
Z=[r,t,h,l 1 ,l 2 ,l 31 ]
Figure BDA0003462553080000051
wherein S and N are objective functions respectively representing jaw displacement and first-order natural frequency, Z is a design variable, the name of the specific variable is shown in Table 1, and the specific position of the variable is shown in FIG. 1, FIG. 2, FIG. 4 and FIG. 5:
sensitivity analysis was performed on the key parameters, and the results are shown in fig. 6 and 7. Based on the maximum entropy criterion, adopting optimal space filling to carry out experimental design, and adopting a full quadratic model to generate sample points; a response surface is then generated based on the neural network algorithm. Finally, an optimal solution is found through a screening algorithm, and the key structure parameters of the micro-clamp are compared before and after optimization in the table 1.
TABLE 1 Microgripper Key Structure parameters
Figure BDA0003462553080000061
The following finite element simulation analysis with the aid of ANSYS was carried out as follows:
the input end of the micro-clamp, namely the contact end of the piezoelectric driver, is provided with fixed input displacement, the output displacement of the jaw is obtained through simulation, and the ratio of the fixed input displacement and the output displacement is the displacement amplification ratio of the clamp body. The input end is shifted to the left and the right by 7.5 mu m.
The simulation result shows that the micro-gripper is verified to have a displacement amplification ratio of 45.58 and a motion stroke of 683.70 mu m through simulation and realize parallel clamping, and meanwhile, the finite element result shows that the first-order natural frequency of the micro-gripper is 140.80Hz, and the requirement of actual working bandwidth is met.
In order to realize ultrahigh displacement amplification ratio and high clamping stroke, the invention designs a novel three-stage displacement amplification form. Skillfully combining a backward type bridge displacement amplification mechanism, a forward type bridge displacement amplification mechanism and a lever displacement amplification mechanism to realize three-stage amplification of the piezoelectric driving micro clamp; in order to ensure the realization of higher working bandwidth while realizing displacement amplification, the first stage and the second stage adopt a bridge type displacement amplification mechanism with higher structural rigidity; meanwhile, when the piezoelectric driver generates output displacement, in order to realize inward clamping action of the jaw, a back ward bridge type displacement amplification mechanism is designed in the first skillful stage, and a forward bridge type displacement amplification mechanism is designed in the first stage.
Finally, it is also noted that relational terms such as first and second, and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. The piezoelectric driving micro gripper is characterized by comprising a piezoelectric ceramic driving piece, a first-stage displacement amplification mechanism, a second-stage displacement amplification mechanism and a third-stage displacement amplification mechanism, wherein the first-stage displacement amplification mechanism is a back-ward bridge type displacement amplification mechanism, the piezoelectric ceramic driving piece is connected with the first-stage displacement amplification mechanism, the first-stage displacement amplification mechanism is connected with the second-stage displacement amplification mechanism in series, two output ends of the second-stage displacement amplification mechanism are respectively connected with the third-stage displacement amplification mechanism, the two third-stage displacement amplification mechanisms are connected in parallel, and the output ends of the two third-stage displacement amplification mechanisms are respectively connected with two clamping parts of the gripper.
2. The piezoelectric driven micro-gripper with three-stage displacement amplification and capable of parallel gripping as claimed in claim 1, wherein the two-stage displacement amplification mechanism is a forward type bridge displacement amplification mechanism.
3. The piezoelectric driven micro-gripper with three-stage displacement amplification and parallel gripping as claimed in claim 1, wherein the three-stage displacement amplification mechanism is a lever displacement amplification mechanism.
4. The piezoelectric driven micro gripper with three stages of displacement amplification and parallel gripping according to claim 3, wherein the lever displacement amplification mechanism is a parallelogram mechanism.
5. The piezoelectric driven micro-gripper with three stages of displacement amplification and capable of parallel gripping as claimed in claim 1, wherein the two lever displacement amplification mechanisms are arranged in bilateral symmetry with respect to the center line of the piezoelectric driven micro-gripper.
6. The piezo-electrically driven micro gripper with three stages of displacement amplification and parallel gripping as claimed in claim 1, further comprising a base, wherein the piezo-electrically driven micro gripper is fixed to the base.
7. The piezo-actuated micro gripper with three stages of displacement amplification and parallel gripping according to claim 1, wherein the piezo-ceramic actuator is a lead zirconate titanate piezo-ceramic.
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US4989847A (en) * 1989-09-12 1991-02-05 Grant Chapman Clamping device
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CN109909976B (en) * 2019-03-18 2021-12-24 天津大学 Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism
CN111546312B (en) * 2020-04-24 2022-07-01 天津大学 Two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplification mechanism
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