CN100398430C - Flexible electric heat driven micro pliers - Google Patents
Flexible electric heat driven micro pliers Download PDFInfo
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- CN100398430C CN100398430C CNB2004100502540A CN200410050254A CN100398430C CN 100398430 C CN100398430 C CN 100398430C CN B2004100502540 A CNB2004100502540 A CN B2004100502540A CN 200410050254 A CN200410050254 A CN 200410050254A CN 100398430 C CN100398430 C CN 100398430C
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Abstract
The present invention relates to a flexible electric-thermal driven micro clamp which belongs to a micro actuator class in the field of a micro electromechanical system. The flexible electric-thermal driven micro clamp is composed of a drive part and a clamp body part, wherein the drive part is in a V-shaped beam array, and the micro clamp is in an integral flexible structure which is formed by utilizing a high-resistance polycrystalline silicon material to carry out body silicon processing without the need of any assembly; the integral clamp body structure is composed of four pairs of rocking bars, six pairs of flexible hinges, a drive displacement bar and a drive fixed bar, the shape curves of the external contours of the four pairs of rocking bars can be various shapes, such as circular arc curves, rectangular curves, rhombic curves, etc., or any combination of the different curve shapes, and the six pairs of flexible hinges are all in a bar-shaped structure. The micro clamp has the advantages of simple and available control, simple manufacture, larger displacement magnification, high output efficiency and high precision and can be used for a micro electromechanical system to carry out micro operation, micro assembly, etc.
Description
Technical field
The present invention is that a kind of flexible electric heating drives micro-gripper, belongs to the microactrator class in the MEMS field.
Background technology
Micro-nano technology is the high-tech sector of an emerging multidisciplinary intersection, relates to subjects such as electronics, machinery, material, physics, chemistry, and the functional dimension and the resolution capability of its research and the control structure of matter reach micron to nanometer scale.Its target is exactly the manufacturing technology that will realize on the atom and molecule level, form the new structure of matter and machine, the approach that realizes this purpose has two kinds: a kind of bottom-up of being technology, promptly pass through the device that single atom of direct control or molecular configuration need, like this, a kind ofly operate important directions and the content that the very trickle fine motion system of yardstick just becomes micromechanics research.Another approach then is the top-down technology, promptly produces small machine with traditional method by big machine.For this reason, require the positioning accuracy of corresponding technological equipment to enter sub-micron even nano-precision.In fact, the micromechanical parts that processes of which kind of approach all needs the very trickle fine motion system of a kind of operational size to be assembled into micro-machine.By above analysis as can be seen, the importance of little clamping or micro OS, and the micro-clamp technology is its key.Micro-clamp not only can become the paw of Micro-Robot as a kind of typical microactuator, and in the fields such as processing, assembling, bioengineering and optics of micromechanical parts good application prospects is arranged all.Therefore, micro-clamp and relevant research thereof have become an advanced subject of domestic and international micromechanics research field.
When the caliper of micro-gripper adopted rigid structure, general volume was bigger, makes trouble, and assembling is difficulty relatively; Flexible structure just in time can overcome the deficiency of rigid structure, and it is meant that can partly or entirely have the flexible deformation of member by it produces the mechanical mechanism of displacement, and a flexible structure can transmission or transmitting moving, power or energy.Flexible structure generally adopts functional materials such as piezoelectricity, marmem, magnetostriction.Different with rigid body bindiny mechanism is that compliant mechanism not only can obtain movement from the motion of hinge, can also obtain their movement from the distortion of compliant member, has following advantages: the required number of components of perhaps a large amount of minimizings; Miniaturization easily, and or utilize micro-processing technology to carry out batch and integrated manufacturing; No friction, wearing and tearing, drive gap, need not lubricate, perhaps reduce or the cancellation gap, improve the precision of structure; Because compliant mechanism depends on the distortion of compliant member, thereby energy stored with the form of strain energy by compliant member, and this energy storage properties may be useful to special force deformation characteristic, or cause that a mechanism trends towards ad-hoc location; Perhaps remarkable reduction is being arranged aspect the quality than corresponding rigid mechanism.The drive form of micro-clamp comprises: static driving, Piezoelectric Driving, Electromagnetic Drive, air pressure driving, electrothermal drive etc.Electrothermal drive mode and alternate manner compare have that driving voltage is low, simple in structure, driving force and output skew are big and be easy to integrated circuit fabrication process advantage such as compatibility mutually.
Relevant Dian Re drives the research of micro-gripper aspect, does not find pertinent literature in Chinese patent.People such as B.E.Volland have delivered the micro-clamp that static drives in the paper of periodical (Microelectronic Engineering) abroad, though also be to adopt bulk silicon technological to make, and also be that voltage drives, therefore its driving voltage is too big but its driving force is mainly electrostatic force.The micro-gripper structure that people such as Young Seek Oh have delivered topology optimization design and made amendment in the paper of international academic conference (2003 ASME International Mechanical Engineering Congress), and add electrothermal drive, driver is with the identical V-type beam array that is of the present invention, but structural shape is different fully, be easy to generate distortion during the micro-gripper clamping object mentioned in the document, the jaw displacement is little, chucking power is also smaller.
Summary of the invention the purpose of this invention is to provide a kind of simple for structure, and is required zero, number of components is few, and control is simple, the delivery efficiency height, and chucking power is big, and the flexible electric heating that the displacement multiplication factor is bigger drives micro-clamp.
The technical solution used in the present invention is that a kind of flexible electric heating drives micro-gripper, partly form by drive part and caliper, drive part is a V-arrangement electrothermal drive part 16, it is characterized in that: micro-clamp is to utilize the polycrystalline silicon material of high value to carry out the overall flexibility structure that body silicon is processed to form, need not any assembling, whole caliper structure is by three couples of rocking bar 5a, 5b; 7a, 7b and 11a, 11b; Tong arm 14a, 14b, six couples of flexible hinge 4a, 4b; 6a, 6b; 8a, 8b; 10a, 10b; 12a, 12b; 13a, 13b, drive displacement bar 9 drives fixed bar 1a, 1b and forms; The outer contour shape curve of four pairs of rocking bars or all be circular curve is multiple shapes such as rectangular curve, diamond curve also or all, or is any combination of different curve shapes.Six pairs of flexible hinges all are rod shaped structure;
Tong arm rocking bar 14a, the upper end of 14b is bare terminal end 15a, 15b, the lower end is by flexible hinge 12a, 12b and 13a, 13b respectively with rocking bar 5a, the upper end of 5b and rocking bar 11a, the lower end of 11b is hinged, rocking bar 5a, pass through flexible hinge 4a in the middle of the 5b, 4b and caliper fixed bar 3a, 3b is hinged, the lower end is again by flexible hinge 6a, 6b and rocking bar 7a, the lower end of 7b is hinged, rocking bar 7a, the upper end of 7b is by flexible hinge 8a, drive displacement bar 9 lower ends in the middle of 8b and the caliper are hinged, the upper end of drive displacement bar 9 is by flexible hinge 10a, 10b and rocking bar 11a, the upper end of 11b is hinged, the input of drive displacement bar 9 links to each other with the drive part V-beam array 16 that produces the linear drives displacement, the fixed bar 1a of V-arrangement electrothermal drive part 16, the fixed bar 3a of 1b and caliper, 3b links to each other, electrode 2a, 2b is positioned at fixed bar 1a, on the surface of 1b.
" V " word opening direction that flexible electric heating drives the V-beam array of micro-clamp changes, and the number of array central sill from one to changeableization; When the direction of V-beam array was V-arrangement electrothermal drive part 16, bare terminal end opened, and the distance L of bare terminal end can not be zero, specifically should decide on clamping object size, and it will realize closed action; When the direction of V-beam array was V-arrangement electrothermal drive part 17, bare terminal end closure, the distance L of bare terminal end were zero, and it will realize opening action.
Effect of the present invention is that a kind of flexible electric heating drives micro-gripper, simple, the easy row of its control, and the caliper of micro-clamp part is a flexible integral body with drive part, need not assembling, make simply, can be applied to MEMS field, micro robotics field etc. and carry out microoperation, little assembling etc., and its displacement multiplication factor is bigger, the delivery efficiency height, the precision height.
Description of drawings
The mechanism principle sketch of Fig. 1 Shi micro-gripper caliper structure.Wherein: AB, AG, BD, GI, EF, JF, DE, IJ are rocking bar; AF is middle drive rod; C, H are fixed-hinged support; A, B, D, E, F, G, I, J are revolute pair; K is a moving sets.
Fig. 2 is the structure chart that flexible electric heating drives micro-gripper.Wherein: 1a, 1b-drive fixed bar; 2a, 2b-electrode; 3a, 3b-caliper fixed bar; 4a, 4b-flexible hinge; 5a, 5b-rocking bar; 6a, 6b-flexible hinge; 7a, 7b-rocking bar; 8a, 8b-flexible hinge; 9-drive displacement bar; 10a, 10b-flexible hinge; 11a, 11b-rocking bar; 12a, 12b-flexible hinge; 13a, 13b-flexible hinge; 14a, 14b-tong arm rocking bar; 15a, 15b-bare terminal end; 16-V shape electrothermal drive part.
Fig. 3 is the hinged structure chart of flexible hinge 13a, 13b, 12a, 12b, 5a, 5b that flexible electric heating drives micro-gripper.Fig. 4 is the structure chart that adopts V-arrangement electrothermal drive part micro-gripper, wherein: 17-V shape electrothermal drive part.Fig. 5 drives stiff end 1a, 1b and caliper stiff end 3a, the micro-clamp structure chart when 3b separates.Fig. 6 is several rocking bar shape figure, and wherein: (a) the rocking bar outline is the circular curve shape; (b) the rocking bar outline is a rectangular shape; (c) the rocking bar outline is a diamond shape.
The specific embodiment
Specify embodiment below in conjunction with accompanying drawing.At electrode 2a, after adding suitable voltage between the 2b, V-arrangement electrothermal drive part 16 has electric current to pass through, because of high resistant is given birth to heat, make the beam expansion elongation of inclination, output at the V-arrangement drive part produces certain output displacement and driving force, this can be used as the input displacement and the input power of caliper part, be input to the drive rod 9 of caliper mid portion, make its generation straight-line displacement straight up, by flexible hinge 8a, 10a and 8b, the 10b effect makes rocking bar 7a respectively, 11a produces and rotates counterclockwise, rocking bar 7b, 11b produces and clockwise rotates, 7a wherein, 7b is by flexible hinge 6a, 6b makes rocking bar 5a, 5b rotates, flexible hinge 12a, 12b and 13a, 13b can utilize rocking bar 5a, 5b and 11a, tong arm rocking bar 14a is finally ordered about in the rotation of 11b, 14b produces clockwise and counterclockwise rotation respectively, so just can be at bare terminal end 15a, the 15b place produces bigger displacement, thereby realizes the closed action of micro-clamp gripping small items.Be applied to the size of electrode 2a, the last voltage of 2b by control, just or the closing displacement size at control micro-clamp bare terminal end 15a, 15b place, see accompanying drawing 2.
When flexible electric heating drove micro-gripper employing V-arrangement electrothermal drive part 16, bare terminal end opened, and the distance L of bare terminal end can not be zero, and bare terminal end initial displacement L can suitably reduce, and specifically should decide on clamping object size, and it will realize closed action, see accompanying drawing 3; When the direction of V-beam array was V-arrangement electrothermal drive part 17, bare terminal end closure, the distance L of bare terminal end were zero, and it will realize opening action, see accompanying drawing 4.
When the stiff end of drive part and caliper part separates, do not have electric current in the caliper of this kind structure and pass through, can avoid electrostatic phenomenon to produce, see accompanying drawing 5.
Claims (3)
1. a flexible electric heating drives micro-gripper, partly form by drive part and caliper, drive part is V-beam array [16], it is characterized in that: micro-clamp is to utilize the polycrystalline silicon material of high value to carry out the overall flexibility structure that body silicon is processed to form, need not any assembling, whole caliper structure is by three couples of rocking bar [5a, 5b], [7a, 7b] and [11a, 11b], tong arm rocking bar [14a, 14b], six couples of flexible hinge [4a, 4b], [6a, 6b], [8a, 8b], [10a, 10b], [12a, 12b], [13a, 13b], drive displacement bar [9] drives fixed bar [1a, 1b] form; The outer contour shape curve of four pairs of rocking bars can all be a circular curve, can be multiple shapes such as rectangular curve, diamond curve all, or be any combination of different curve shapes also, and six pairs of flexible hinges all are rod shaped structure;
Tong arm rocking bar [14a, 14b] the upper end be bare terminal end [15a, 15b], the lower end is by flexible hinge [12a, 12b] and [13a, 13b] respectively with rocking bar [5a, 5b] upper end and rocking bar [11a, 11b] the lower end be hinged, rocking bar [5a, 5b] middle by flexible hinge [4a, 4b] and caliper fixed bar [3a, 3b] be hinged, the lower end is again by flexible hinge [6a, 6b] and rocking bar [7a, 7b] the lower end be hinged, rocking bar [7a, 7b] the upper end by flexible hinge [8a, 8b] with caliper in the middle of drive displacement bar [9] be hinged, the upper end of drive displacement bar [9] is by flexible hinge [10a, 10b] and rocking bar [11a, 11b] the upper end be hinged, the lower end of drive displacement bar [9] links to each other with the drive part V-beam array [16] that produces the linear drives displacement, fixed bar [the 1a of V-arrangement electrothermal drive part [16], 1b] with the fixed bar [3a of caliper, 3b] link to each other electrode [2a, 2b] be positioned at fixed bar [1a, 1b] the surface on.
2. the flexible electric heating described in claim 1 drives micro-clamp, and " V " word opening direction of V-beam array changes, and the number of array central sill from one to changeableization; When the direction of V-beam array was V-arrangement electrothermal drive part [16], bare terminal end opened, and the distance L of bare terminal end can not be zero, specifically should decide on clamping object size, and it will realize closed action; When the direction of V-beam array was V-arrangement electrothermal drive part [17], bare terminal end closure, the distance L of bare terminal end were zero, and it will realize opening action.
3. the flexible electric heating described in claim 1 or 2 drives micro-gripper, and the position of flexible hinge [13a, 13b] on tong arm [14a, 14b] changes arbitrarily, and the position of flexible hinge [10a, 10b] on drive displacement bar [9] also changes simultaneously; The stiff end of caliper [3a, 3b] links to each other with the stiff end [1a, 1b] of electrothermal drive part or separates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100502540A CN100398430C (en) | 2004-08-12 | 2004-08-12 | Flexible electric heat driven micro pliers |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100502540A CN100398430C (en) | 2004-08-12 | 2004-08-12 | Flexible electric heat driven micro pliers |
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| CN1733592A CN1733592A (en) | 2006-02-15 |
| CN100398430C true CN100398430C (en) | 2008-07-02 |
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| CNB2004100502540A Expired - Fee Related CN100398430C (en) | 2004-08-12 | 2004-08-12 | Flexible electric heat driven micro pliers |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504030B (en) * | 2009-03-10 | 2010-09-08 | 北京航空航天大学 | One-dimensional flexible linear guiding mechanism for slanting spring combination |
| CN101759137B (en) * | 2009-12-31 | 2011-09-14 | 大连理工大学 | Method for manufacturing electrothermal driving photoresist micro gripper |
| CN101857187B (en) * | 2010-05-12 | 2015-02-18 | 大连理工大学 | Flexible electric heating micro gripper with parallel opening-closing jaw |
| CN103342331B (en) * | 2013-06-20 | 2017-02-08 | 河南工业大学 | Silicon micro parallel-connection five-rod mechanism |
| CN106420005B (en) * | 2016-10-28 | 2020-01-03 | 天津大学 | Foldable minimally invasive surgical forceps structure |
| CN108284430A (en) * | 2018-01-28 | 2018-07-17 | 北京工业大学 | The submissive electric heating drive micro-clamps of SU-8 of one kind of multiple operation objects |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0752072A (en) * | 1993-08-20 | 1995-02-28 | Fuji Electric Corp Res & Dev Ltd | Electrostatic drive type microgripper |
| JPH0890478A (en) * | 1994-09-29 | 1996-04-09 | Shimadzu Corp | Microgrip |
| US5538305A (en) * | 1991-11-27 | 1996-07-23 | Microscience Group, Inc. | Microgripper |
| CN1376631A (en) * | 2001-12-07 | 2002-10-30 | 清华大学 | Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
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2004
- 2004-08-12 CN CNB2004100502540A patent/CN100398430C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5538305A (en) * | 1991-11-27 | 1996-07-23 | Microscience Group, Inc. | Microgripper |
| JPH0752072A (en) * | 1993-08-20 | 1995-02-28 | Fuji Electric Corp Res & Dev Ltd | Electrostatic drive type microgripper |
| JPH0890478A (en) * | 1994-09-29 | 1996-04-09 | Shimadzu Corp | Microgrip |
| CN1376631A (en) * | 2001-12-07 | 2002-10-30 | 清华大学 | Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
Non-Patent Citations (4)
| Title |
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| V型电致热微驱动器的力学特性分析. 张永宁等.微纳电子技术，第40卷第5期. 2003 |
| V型电致热微驱动器的力学特性分析. 张永宁等.微纳电子技术，第40卷第5期. 2003 * |
| 微夹钳研究的进展与展望. 张培玉等.光学精密工程，第8卷第3期. 2000 |
| 微夹钳研究的进展与展望. 张培玉等.光学精密工程，第8卷第3期. 2000 * |
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| CN1733592A (en) | 2006-02-15 |
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